Probe card cleaning device

Abstract

The invention is suitable for the technical field of electronic equipment cleaning, and provides a probe card cleaning device. Comprising a bottom groove; the top supporting table is mounted on the bottom groove and is used for fixing the probe card; the lifting platform is fixedly installed on the bottom groove and located below the top supporting table; the cleaning device is installed at the output end of the lifting platform and comprises a plurality of sets of cleaning units, each cleaning unit comprises an outer ring and a cleaning assembly, the cleaning assemblies are arranged on the inner sides of the outer rings, the outer rings and the cleaning assemblies are concentric, and each cleaning assembly comprises an upper ring, cleaning sponge, a lower ring and a plurality of connecting columns. The upper end and the lower end of the cleaning assembly abut against the upper ring and the lower ring respectively, the upper end of the connecting column is fixedly installed on the upper ring, the upper ring penetrates through a through hole in the lower ring, the lower ring is connected with the upper ring in an up-down elastic mode, and a plurality of nozzles used for spraying out cleaning liquid are formed in the side wall of the inner side of the outer ring in an array mode. The lower ends of the multiple connecting columns are all connected to the connecting disc.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic device cleaning, and specifically to a probe card cleaning device. Background Art

[0002] A probe card is a test interface, mainly used for testing bare chips. By connecting a tester and a chip, the chip parameters are tested by transmitting signals. When the probe card is in use, the probes on the probe card are directly in contact with the pads or bumps on the chip to draw out the chip signals, and then cooperate with peripheral test instruments and software control to achieve the purpose of automatic measurement. The probe card is used before the IC is packaged, and functional tests are performed on the bare die with probes to screen out defective products and then perform subsequent packaging projects. Therefore, the probe card is one of the important manufacturing processes that has a significant impact on the manufacturing cost in IC manufacturing.

[0003] During the use of the probes of the probe card, dust adhesion, oxidation, etc. will occur, so the probe card needs to be cleaned regularly. An existing probe card cleaning device, a cleaning mechanism and a pressing mechanism (patent application number: CN201922109606.X), includes a base, a pool body, a probe card, probes, a cleaning mechanism and a pressing mechanism. The top surface of the base is provided with a pool body, the cleaning mechanism is installed on the base and the pool body, the top of the pool body is provided with a pressing mechanism, the probe card is clamped on the pressing mechanism, the bottom surface of the probe card is provided with probes, and card slots are opened at the four corners of the top surface of the pool body. During the cleaning process, multiple probes are cleaned through the same cleaning hole, and stains left during the previous probe cleaning process may remain on the cleaning hole, resulting in insufficient cleaning. To solve this technical problem, a probe card cleaning device is now proposed. Summary of the Invention

[0004] The purpose of the present invention is to provide a probe card cleaning device to solve the problems raised in the above background art.

[0005] To achieve the above purpose, the present invention provides the following technical solutions:

[0006] A probe card cleaning device, comprising: a bottom groove;

[0007] A top support platform, installed on the bottom groove, for fixing the probe card;

[0008] A lifting platform, fixedly installed on the bottom groove and located below the top support platform;

[0009] and a cleaning device installed at the output end of the lifting platform. The cleaning device includes several groups of cleaning units. Each cleaning unit includes an outer ring and a cleaning component. The cleaning component is arranged inside the outer ring and the two are concentric. The cleaning component includes an upper ring, a cleaning sponge, a lower ring and several connecting columns. The upper and lower ends of the cleaning component are respectively in contact with the upper ring and the lower ring. The upper end of the connecting column is fixedly installed on the upper ring, and the upper ring passes through the through hole on the lower ring. The lower ring is elastically connected to the upper ring up and down. A number of nozzles for spraying cleaning liquid are arranged in an array on the inner side wall of the outer ring. The lower ends of several connecting columns are all connected to a connecting disk, and the connecting disk is connected to the output end of the lifting platform; and several connecting columns all pass through a matching disk installed on the bottom groove. The bottom of the outer ring is connected with several guiding columns in an array, and the guiding columns pass through the first through holes with damping structures on the matching disk; Limiting blocks are symmetrically arranged on the inner side of the outer ring, and the limiting blocks are arranged between the lower ring and the upper ring. A top ring is also installed on the matching disk, and the top ring is arranged directly below the lower ring.

[0010] As a further scheme of the present invention: An elastic member is sleeved outside the connecting column, and the two ends of the elastic member are respectively fixedly installed on the lower ring and the upper ring.

[0011] As a further scheme of the present invention: A liquid flow channel is arranged inside the guiding column, and the output end of the guiding column is communicated with the inside of the outer ring.

[0012] As a further scheme of the present invention: The inner diameter of the cleaning component is smaller than the inner diameters of the lower ring and the upper ring.

[0013] As a further scheme of the present invention: The matching disk is rotatably installed in the installation through hole on the matching seat, and a rotating mechanism for driving the matching disk to rotate is also arranged on the matching seat.

[0014] As a further scheme of the present invention: The rotating mechanism includes a rotating motor fixedly installed on the matching seat and a gear arranged at the output end of the rotating motor. The gear meshes with an external toothed ring installed on the matching disk. The external toothed ring is concentric with the matching disk. The top of the connecting rod is rotatably installed in the installation round hole on the connecting disk.

[0015] As a further scheme of the present invention: The liquid supply system includes an infusion pump installed on the bottom groove. The output end of the infusion pump is communicated with the cleaning liquid tank inside the bottom groove. The output end of the infusion pump is communicated with the input end of the connecting column through a communication mechanism.

[0016] As a further scheme of the present invention: The communication mechanism includes a rotating ring rotatably installed in the annular hole on the matching disk. The rotating ring is concentric with the matching disk. A two-way joint is fixedly installed on the rotating ring. One end of the two-way joint is communicated with the output end of the infusion pump, and the other end of the two-way joint is communicated with the input end of the connecting column.

[0017] As a further solution of the present invention: the lifting platform includes a lifting table and a telescopic mechanism. The connecting rod is connected to the lifting table, the lifting table is connected to the output end of the telescopic mechanism, and the telescopic mechanism is fixedly installed on the bottom groove.

[0018] As a further solution of the present invention: there are two cleaning units, and the mating seat in one of the cleaning units is slidably installed on the bottom groove left and right.

[0019] Compared with the prior art, the beneficial effects of the present invention are: the surface of the probe is cleaned twice by the cleaning sponge, which ensures the cleaning effect. Moreover, after the cleaning sponge wipes, spraying with the cleaning liquid can effectively ensure the cleaning effect. Before each cleaning sponge cleans each probe, the cleaning liquid on the cleaning sponge is replaced, which further ensures the cleanliness of the cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic structural diagram of a probe card cleaning device according to an embodiment of the present invention Figure 1 .

[0021] Figure 2 is Figure 1 the enlarged view of part A in

[0022] Figure 3 is Figure 1 the enlarged view of part B in

[0023] Figure 4 is a schematic structural diagram of a probe card cleaning device according to an embodiment of the present invention Figure 2 .

[0024] Figure 5 is Figure 4 the enlarged view of part C in

[0025] Figure 6 is a schematic structural diagram of a probe card cleaning device according to an embodiment of the present invention Figure 3 .

[0026] Figure 7 is Figure 6 the enlarged view of part D in

[0027] Figure 8 is Figure 6 the enlarged view of part E in

[0028] Figure 9 is a schematic structural diagram of a mating disc in a probe card cleaning device according to an embodiment of the present invention.

[0029] In the figure:

[0030] 10 - Bottom groove, 20 - Top support platform, 30 - Probe card, 40 - Lifting platform, 50 - Cleaning device, 301 - Probe, 401 - Lifting table, 402 - Telescopic mechanism, 501 - Outer ring, 502 - Cleaning component, 503 - Upper ring, 504 - Cleaning sponge, 505 - Lower ring, 506 - Connecting column, 507 - Elastic member, 508 - Limiting block, 509 - Nozzle, 510 - Guide post, 511 - Top ring, 512 - Fitting disc, 513 - External gear ring, 514 - Gear, 515 - Rotating motor, 516 - Connecting disc, 517 - Connecting rod, 518 - Infusion pump, 519 - Rotary joint, 520 - Mounting seat, 521 - Fitting seat, 522 - Support, 523 - Telescopic rod, 524 - Swivel ring, 525 - Two-way joint, 526 - First through hole, 527 - Second through hole, 528 - Adjusting threaded rod. Detailed implementation manner

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0032] Embodiment 1

[0033] Please refer to Figures 1 to 9, Structure diagram of a probe card cleaning device provided in Embodiment 1 of the present invention. The probe card cleaning device includes: a bottom groove 10, a top support platform 20, a lifting platform 40, and a cleaning device 50. The top support platform 20 is installed on the bottom groove 10 and is used to fix the probe card 30. The lifting platform 40 is fixedly installed on the bottom groove 10 and is located below the top support platform 20. The cleaning device 50 is installed at the output end of the lifting platform 40. The cleaning device 50 includes several groups of cleaning units. Each cleaning unit includes an outer ring 501 and a cleaning component 502. The cleaning component 502 is arranged inside the outer ring 501 and the two are concentric. The cleaning component 502 includes an upper ring 503, a cleaning sponge 504, a lower ring 505, and several connecting columns 506. The upper and lower ends of the cleaning component 502 are respectively in contact with the upper ring 503 and the lower ring 505. The upper ends of the connecting columns 506 are fixedly installed on the upper ring 503, and the upper ring 503 passes through the through hole on the lower ring 505. The lower ring 505 is elastically connected to the upper ring 503 up and down. A number of spray nozzles 509 for spraying cleaning liquid are arranged in an array on the inner side wall of the outer ring 501. The lower ends of several connecting columns 506 are all connected to a connection disk 516, and the connection disk 516 is connected to the output end of the lifting platform 40. And several connecting columns 506 all pass through a matching disk 512 installed on the bottom groove 10. The bottom of the outer ring 501 is connected with several guiding columns 510 in an array. The guiding columns 510 pass through the first through holes 526 with damping structures on the matching disk 512. By setting the damping structures on the first through holes 526, the positions of the guiding columns 510 are locked. Two limiting blocks 508 are symmetrically arranged inside the outer ring 501. The limiting blocks 508 are arranged between the lower ring 505 and the upper ring 503. A top ring 511 is also installed on the matching disk 512. The top ring 511 is arranged directly below the lower ring 505.

[0034] The top support platform 20 can fix the probe card 30 by means of a suction cup or clamping. The top support platform 20 can also be installed on the bottom groove 10 through a horizontal movement structure. The specific setting of the top support platform 20 is prior art and will not be elaborated here.

[0035] During operation, the top support platform 20 fixes the probe card 30. The probe 301 is directly above the outer ring 501. At this time, the upper ring 503 abuts against the inner edge at the lower side of the top of the outer ring 501. The nozzle 509 sprays cleaning liquid to moisten the cleaning component 502. At this time, the lifting platform 40 extends, drives the connecting column 506 to rise through the connecting disk 516. The connecting column 506 drives the cleaning component 502 and the outer ring 501 to rise. The probe 301 passes through the central hole of the cleaning component 502, and the cleaning component 502 conducts the first wiping and cleaning on the surface of the probe 301. When the cleaning device 50 moves to the highest position, the lifting platform 40 controls it to descend. At the initial descent, the guide post 510 is maintained at the highest position under the damping effect, while the connecting column 506 follows the lifting platform 40 to descend. During the descent of the connecting column 506, the liquid spraying path of the nozzle 509 is vacated, and the cleaning liquid sprayed by the nozzle 509 can directly clean the surface of the probe 301. During the descent, the cleaning sponge 504 conducts secondary wiping on the probe 301. At the same time, the nozzle 509 completely cleans the surface of the probe 301 after wiping, which can effectively ensure the cleaning cleanliness. At the same time, when the cleaning sponge 504 is separated from the probe 301, the lower ring 505 abuts against the top ring 511 that is in operation. At this time, the connecting column 506 drives the upper ring 503 to continue to descend, so that the upper ring 503 squeezes the cleaning sponge 504, and squeezes out the used cleaning liquid in the upper ring 503, so that the upper ring 503 can use clean cleaning liquid to clean the probe 301 next time. When the lifting platform 40 extends again during the second cleaning, the upper ring 503 rises under the action of the connecting column 506, and the upper end of the upper ring 503 will again abut against the inner upper edge position of the outer ring 501, and the nozzle 509 moistens the cleaning sponge 504 again.

[0036] The present invention conducts two cleanings on the surface of the probe 301 through the cleaning sponge 504, ensuring the cleaning effect. And after the cleaning sponge 504 finishes wiping, spraying and washing with the cleaning liquid can effectively ensure the cleaning effect. Before each cleaning sponge 504 cleans each probe 301, the cleaning liquid on the cleaning sponge 504 is replaced, which further ensures the cleaning cleanliness.

[0037] As Figure 2 shown, in some embodiments, an elastic member 507 is sleeved outside the connecting column 506. The two ends of the elastic member 507 are respectively fixedly installed on the lower ring 505 and the upper ring 503. In this way, the lower ring 505 is elastically installed up and down on the upper ring 503. The elastic member 507 is a spiral spring.

[0038] In some embodiments of the present invention, a liquid flow channel is provided inside the guide post 510. The output end of the guide post 510 is communicated with the inside of the outer ring 501, and is used to provide cleaning liquid for the nozzle 509. The guide post 510 is externally connected to a cleaning liquid supply system.

[0039] In some embodiments of the present invention, the inner diameter of the cleaning component 502 is smaller than the inner diameters of the lower ring 505 and the upper ring 503, so as to protect the probe 301.

[0040] In some embodiments of the present invention, in order to further improve the cleaning effect and remove the cleaning liquid on the cleaning sponge 504 completely, the mating disk 512 is rotatably installed in the mounting through hole of the mating seat 521, and a rotating mechanism for driving the mating disk 512 to rotate is further provided on the mating seat 521. In this way, when the cleaning device 50 rises, it can rotate to clean the surface of the probe 301, increasing the circumferential rotation cleaning and improving the cleaning effect. At the same time, when the cleaning is completed, the cleaning sponge 504 is also in a rotating state during the extrusion process, and the cleaning liquid inside it is effectively removed completely under the action of centrifugal force, ensuring the cleaning quality of each probe 301.

[0041] In some embodiments of the present invention, the rotating mechanism includes a rotating motor 515 fixedly installed on the mating seat 521 and a gear 514 provided at the output end of the rotating motor 515. The gear 514 meshes with an external tooth ring 513 installed on the mating disk 512, and the external tooth ring 513 is concentric with the mating disk 512. In this way, when the rotating motor 515 rotates, the mating disk 512 is driven to rotate through the gear 514 and the external tooth ring 513, thereby providing power for the rotation of the cleaning device 50.

[0042] In some embodiments of the present invention, the liquid supply system includes an infusion pump 518 installed on the bottom tank 10. The output end of the infusion pump 518 is communicated with the cleaning liquid tank inside the bottom tank 10, and the output end of the infusion pump 518 is communicated with the input end of the connecting column 506 through a connecting mechanism. In this way, the infusion pump 518 supplies the cleaning liquid in the cleaning liquid tank to the spray nozzle 509 and sprays it out through the spray nozzle 509.

[0043] The top of the connecting rod 517 is rotatably installed in the mounting round hole of the connecting disk 516, so as to rotatably install the connecting disk 516 on the connecting disk 516.

[0044] As Figure 6 As shown, in some embodiments of the present invention, the connecting mechanism includes a rotary joint 519. The rotary joint 519 is fixedly installed at the end of several connecting columns 506. The input end of the rotary joint 519 is communicated with the output end of the infusion pump 518 through a pipeline, and the output end of the rotary joint 519 is communicated with the input end of the connecting column 506, so as to supply cleaning liquid to the connecting column 506.

[0045] As Figure 9As shown in the figure, in some other embodiments of the present invention, the connecting mechanism includes a rotating ring 524 rotatably installed in the annular hole of the mating disk 512. The rotating ring 524 is concentric with the mating disk 512. A two-way joint 525 is fixedly installed on the rotating ring 524. One end of the two-way joint 525 is communicated with the output end of the infusion pump 518, and the other end of the two-way joint 525 is communicated with the input end of the connecting column 506. In this way, the cleaning liquid can be provided for the connecting column 506 even in the rotating state.

[0046] In some embodiments of the present invention, a number of second through holes 527 are circumferentially arranged on the mating disk 512. Each connecting column 506 passes through the corresponding second through hole 527 below. The middle position of the mating disk 512 can also be set as a central hole, and a number of connecting columns 506 are arranged through a central hole.

[0047] In some embodiments of the present invention, the lifting platform 40 includes a lifting table 401 and a telescopic mechanism 402. The connecting rod 517 is connected to the lifting table 401. The lifting table 401 is connected to the output end of the telescopic mechanism 402. The telescopic mechanism 402 is fixedly installed on the bottom groove 10. In this way, the lifting function is realized. The telescopic mechanism 402 can be a hydraulic cylinder, an electric telescopic rod or a cylinder.

[0048] In some embodiments of the present invention, there are two cleaning units. In order to facilitate the adjustment of the distance between the cleaning units, the mating seat 521 in one of the cleaning units is slidably installed left and right on the bottom groove 10.

[0049] In some embodiments of the present invention, specifically, no less than two telescopic rods 523 are connected to the side wall of the mating seat 521. The end of the telescopic rod 523 far from the mating seat 521 is fixedly installed on the support seat 522. The support seat 522 is fixedly installed on the bottom groove 10. A threaded hole is also provided on the side wall of the support seat 522. A horizontal adjusting threaded rod 528 is arranged in the threaded hole. The other end of the adjusting threaded rod 528 is rotatably installed on the mating seat 521. In this way, the position of the mating seat 521 can be adjusted by rotation, and then the corresponding cleaning unit can be adjusted. And the connecting rod 517 of the cleaning unit with adjustable position is horizontally slidably arranged on the mounting seat 520 at the top of the lifting table 401 to realize the adjustment of the position of the cleaning unit. The connecting rod 517 can be slidably arranged in the mounting seat 520 through a T-shaped slide rail. This setting is prior art and will not be elaborated here.

[0050] The working principle of the present invention is:

[0051] The top support table 20 fixes the probe card 30, and the probe 301 is located directly above the outer ring 501. At this time, the upper ring 503 contacts the inner edge of the lower side of the top of the outer ring 501, and the nozzle 509 sprays cleaning liquid to wet the cleaning component 502. At this time, the lifting platform 40 extends, and the rotating motor 515 is powered on to rotate, and the connecting column 506 is driven to rise through the connecting plate 516. The connecting column 506 drives the cleaning component 502 and the outer ring 501 to rise, and the probe 301 passes through the center hole of the cleaning component 502. The cleaning component 502 contacts the probe 301. 01 surface is wiped and cleaned for the first time. When the cleaning device 50 moves to the highest position, the lifting platform 40 controls it to descend. During the initial descent, the guide column 510 is maintained at the highest position under the action of damping, and the connecting column 506 follows the lifting platform 40 to descend. The connecting column 506 gives way to the spray path of the nozzle 509 during the descent process. The cleaning liquid sprayed from the nozzle 509 can directly clean the surface of the probe 301. During the descent process, the cleaning sponge 504 wipes the probe 301 for the second time, and the nozzle 509 After the wiping is completed, the surface of the probe 301 is completely cleaned, which can effectively ensure the cleanliness of the cleaning. At the same time, when the cleaning sponge 504 is out of contact with the probe 301, the lower ring 505 contacts the top ring 511 that is being launched, and at this time, the connecting column 506 drives the upper ring 503 to continue to descend, so that the upper ring 503 squeezes the cleaning sponge 504 and squeezes out the used cleaning liquid in the upper ring 503, so that the upper ring 503 can use clean cleaning liquid to clean the probe 301 next time. During the cleaning process, the rotating motor 515 drives the matching disk 512 to drive the cleaning unit to rotate through the gear 514 and the outer gear ring 513, thereby increasing the circumferential rotation cleaning and effectively improving the tilting effect. After the cleaning is completed, the cleaning sponge 504 is also in a rotating state during the squeezing process, and the cleaning liquid inside it is effectively removed completely under the action of centrifugal force, thereby ensuring the cleaning quality of each probe 301; the position of the cleaning unit can be adjusted by arranging the support 522, the telescopic rod 523 and the adjusting threaded rod 528 to meet the cleaning requirements of different specifications.

[0052] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0053] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0054] In the present invention, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "coupled", "fixed", etc. shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, or communicable with each other; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0055] In the present invention, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0056] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0057] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. A probe card cleaning device, characterized in that: include: Bottom tank; A top support platform, mounted on the bottom groove, for fixing the probe card; The lifting platform is fixedly mounted on the bottom trough and is located below the top support platform; and a cleaning device installed at the output end of the lifting platform, the cleaning device includes several groups of cleaning units, each cleaning unit includes an outer ring and a cleaning assembly, the cleaning assembly is arranged on the inner side of the outer ring, and the two are concentric, the cleaning assembly includes an upper ring, a cleaning sponge, a lower ring and several connecting columns, the upper and lower ends of the cleaning assembly are respectively in contact with the upper ring and the lower ring, the upper end of the connecting column is fixedly installed on the upper ring, and the upper ring passes through the through hole on the lower ring, the lower ring is elastically connected to the upper ring up and down, a plurality of nozzles for spraying cleaning liquid are arranged in an array on the inner side wall of the outer ring, the lower ends of the plurality of connecting columns are all connected to the connecting disk, and the connecting disk is connected to the output end of the lifting platform; and the plurality of connecting columns all pass through the matching disk installed on the bottom groove, the bottom array of the outer ring is connected to a plurality of guide columns, and the guide columns pass through the first through hole with a damping structure on the matching disk; the inner side of the outer ring is also symmetrically provided with a limit block, the limit block is arranged between the lower ring and the upper ring, and a top ring is also installed on the matching disk, and the top ring is arranged directly below the lower ring.

2. A probe card cleaning device according to claim 1, characterized in that: An elastic piece is sleeved on the outer side of the connecting column, and two ends of the elastic piece are respectively fixedly mounted on the lower ring and the upper ring.

3. A probe card cleaning device according to claim 1, characterized in that: A liquid supply channel is arranged inside the guide column, and the output end of the guide column is communicated with the inside of the outer ring.

4. The probe card cleaning device according to claim 1, characterized in that: The inner diameter of the cleaning component is smaller than the inner diameters of the lower ring and the upper ring.

5. The probe card cleaning device according to claim 1, characterized in that: The matching disk is rotatably mounted in a mounting through hole on the matching seat, and a rotating mechanism for driving the matching disk to rotate is also provided on the matching seat.

6. The probe card cleaning device according to claim 5, characterized in that: The rotating mechanism includes a rotating motor fixedly mounted on a mating seat and a gear arranged at an output end of the rotating motor, the gear is meshed with an outer gear ring mounted on a mating disk, the outer gear ring is concentric with the mating disk, and the top of the connecting rod is rotatably mounted in a mounting circular hole on the connecting disk.

7. A probe card cleaning device according to claim 6, characterized in that: The liquid supply system comprises an infusion pump installed on the bottom tank, the output end of the infusion pump is connected with the cleaning liquid tank inside the bottom tank, and the output end of the infusion pump is connected with the input end of the connecting column through a connecting mechanism.

8. The probe card cleaning device according to claim 7, characterized in that: The connecting mechanism includes a swivel mounted rotatably in an annular hole on the matching disk, the swivel is concentric with the matching disk, a two-way connector is fixedly mounted on the swivel, one end of the two-way connector is connected to the output end of the infusion pump, and the other end of the two-way connector is connected to the input end of the connecting column.

9. The probe card cleaning device according to claim 1, characterized in that: The lifting platform comprises a lifting platform and a telescopic mechanism, the connecting rod is connected to the lifting platform, the lifting platform is connected to the output end of the telescopic mechanism, and the telescopic mechanism is fixedly installed on the bottom groove.

10. A probe card cleaning device according to any one of claims 1 to 9, characterized in that: There are two cleaning units, and a matching seat in one of the cleaning units is slidably installed on the bottom groove left and right.

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