Tool, kit and method for machining inner diameter and outer diameter of SiC ring

Abstract

The invention relates to a tool, a kit and a method for machining the inner diameter and the outer diameter of a SiC ring. In one aspect, the tool comprises an annular part, the inner circumferential face and the outer circumferential face of the annular part are both circular and concentric, and the annular part comprises a first annular plane which is used for being attached to an annular plane of an annular body of the SiC ring; and a positioning member disposed radially inward of the first annular plane and configured to position the plurality of arms of the SiC ring such that the annular portion is concentric with the annular body. Consequently, the concentricity of the outer diameter and the inner diameter of the processed SiC ring can be improved, and the processing efficiency can be improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor manufacturing technology, and more particularly, to a tooling, kit and method for machining the inner diameter and outer diameter of a SiC ring. Background Art

[0002] Silicon carbide (SiC) has excellent physical and chemical properties such as high thermal conductivity, high chemical stability, and high mechanical strength, and has been widely used in various different industrial fields. For example, in semiconductor manufacturing, SiC structures are used as various components for manufacturing semiconductors, such as focus rings, wafer carriers, etc.

[0003] Generally, a chemical vapor deposition (CVD) method can be used to manufacture a SiC ring blank (hereinafter referred to as a SiC ring) to obtain a SiC structure. In this method, a reaction gas is used to deposit a SiC layer on an annular substrate such as graphite, thereby obtaining a SiC ring. The SiC ring obtained by using this method generally includes an annular body and a plurality of arms, each arm extending radially from the inner circumferential portion of the annular body toward the radially inner side of the annular body, and since the growth rate of SiC at the edge of the annular substrate during the CVD process is relatively high, the annular body of the formed SiC ring has outwardly protruding portions on its outer circumferential side and inner circumferential side. Therefore, it is necessary to machine the inner diameter and outer diameter of the SiC ring to remove the protruding portions of the arms and the annular body.

[0004] Currently, the outer diameter and inner diameter of the SiC ring are machined sequentially by a computer numerical control (CNC) machine tool and a manual tool changer (MTC) using different toolings and different clamping methods.

[0005] However, since the machining of both the outer diameter and the inner diameter needs to be centered on the center of the corresponding tooling, in the case of using different toolings and different clamping and positioning methods, it is impossible to ensure the concentricity of the machined outer diameter and inner diameter; and since the machining of the outer diameter and the inner diameter requires the use of different toolings and the inner diameter machining can only be carried out after the outer diameter machining is completed, the machining efficiency is low. Summary of the Invention

[0006] This section provides a general overview of the present disclosure, rather than a full disclosure of the entire scope or all features of the present disclosure.

[0007] An object of the present disclosure is to provide a tooling, kit and method for machining the inner diameter and outer diameter of a SiC ring that can improve the concentricity of the outer diameter and inner diameter of the machined SiC ring.

[0008] Another object of the present disclosure is to provide a tooling, a kit and a method for machining the inner diameter and outer diameter of a SiC ring, which can improve the machining efficiency.

[0009] To achieve the above object, according to one aspect of the present disclosure, there is provided a tooling for machining the inner diameter and outer diameter of a SiC ring, the SiC ring being manufactured by CVD method and including an annular body and a plurality of arms, each arm radially extending from the inner circumferential portion of the annular body towards the radially inner side of the annular body, the tooling including: An annular portion, the inner circumferential surface and the outer circumferential surface of which are both circular and concentric, the annular portion including a first annular plane for fitting with the annular plane of the annular body; and A positioning member, disposed on the radially inner side of the first annular plane and configured to position the plurality of arms so that the annular portion is concentric with the annular body.

[0010] In some embodiments, the positioning member can also be configured to fix the plurality of arms.

[0011] In some embodiments, the positioning member can be spaced apart from the inner circumferential side of the first annular plane by a predetermined distance.

[0012] In some embodiments, the positioning member can include a plurality of keys, the plurality of keys corresponding to the plurality of arms one by one, each key being in a convex shape for being disposed in a groove of a corresponding one of the arms.

[0013] In some embodiments, the positioning member can include a plurality of pairs of clamping members, the plurality of pairs of clamping members corresponding to the plurality of arms one by one, each pair of clamping members being configured to clamp a corresponding one of the arms therebetween.

[0014] In some embodiments, the width of the first annular plane can be in the range of 4 mm to 70 mm.

[0015] In some embodiments, the annular portion can further include a second annular plane, the second annular plane being located on the radially inner side of the first annular plane and lower in height than the first annular plane, and the positioning member is disposed on the second annular plane.

[0016] In some embodiments, the tooling can be made of metal.

[0017] According to another aspect of the present disclosure, there is also provided a kit for machining the inner diameter and outer diameter of a SiC ring, which includes: The tooling for machining the inner diameter and outer diameter of a SiC ring according to any one of the above embodiments; and The first chuck and the second chuck are respectively used to process the outer diameter and the inner diameter of the SiC ring thereon. Any one of the first chuck and the second chuck includes a carrier and a plurality of jaws. The carrier is used to carry the tooling, and the plurality of jaws are arranged on the carrier and can move in the radial direction of the carrier to concentrically clamp the tooling on the carrier.

[0018] In some embodiments, the jaws of any one of the first chuck and the second chuck can be configured to concentrically clamp the tooling on the carrier by supporting the inner peripheral surface of the tooling.

[0019] According to another aspect of the present disclosure, there is also provided a method for processing the inner diameter and the outer diameter of the SiC ring, which is carried out by using the kit for processing the inner diameter and the outer diameter of the SiC ring according to any of the above embodiments.

[0020] In some embodiments, the method may include: Attaching the annular plane of the SiC ring to the first annular plane of the tooling; Clamping the tooling on any one of the first chuck and the second chuck to process the corresponding one of the outer diameter and the inner diameter of the SiC ring; and Clamping the tooling on the other one of the first chuck and the second chuck to process the corresponding other one of the outer diameter and the inner diameter of the SiC ring.

[0021] According to the above technical solutions, by using the same tooling in the processing of the outer diameter and the inner diameter, and by making the inner peripheral surface and the outer peripheral surface of the annular part of the tooling concentric, the concentricity of the outer diameter and the inner diameter of the processed SiC ring can be improved. In addition, by using the same tooling in the processing of the outer diameter and the inner diameter, the processing efficiency can be improved. Furthermore, by attaching the annular plane of the SiC ring to the first annular plane of the tooling to connect the SiC ring to the tooling, and by contacting the inner peripheral surface and the outer peripheral surface of the annular part of the tooling to clamp the tooling, it is not necessary to process the outer peripheral surface of the SiC ring into a circular shape before the inner diameter processing, so there is no need to first process the outer diameter and then the inner diameter. In the processing, the subsequent processing equipment does not need to wait, thus the equipment utilization rate can be improved, and the processing efficiency can be improved accordingly. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Through the following description with reference to the drawings, the features and advantages of the embodiments of the present disclosure will become more easily understood. The drawings are not drawn to scale, and some features may be enlarged or reduced to show the details of specific parts. In the drawings: Figure 1 It is a schematic top view of an unprocessed SiC ring.

[0023] Figure 2 is Figure 1Schematic cross-sectional view of the annular body of the SiC ring in

[0024] Figure 3 Schematic cross-sectional view of the annular body of the SiC ring after inner diameter and outer diameter machining.

[0025] Figure 4 Schematic perspective view of an outer diameter machining tooling according to the related art with an unprocessed SiC ring clamped.

[0026] Figure 5 Schematic perspective view of an inner diameter machining tooling according to the related art with an SiC ring after outer diameter machining clamped.

[0027] Figure 6 Schematic top view of a tooling for inner diameter and outer diameter machining of an SiC ring according to an embodiment of the present disclosure.

[0028] Figure 7 For Figure 6 Schematic perspective view of the tooling shown in

[0029] Figure 8 For Figure 6 Schematic cross-sectional view taken along line A-A of the tooling shown in

[0030] Figure 9 For clamping an unprocessed SiC ring Figure 6 Schematic top view of the tooling shown in

[0031] Figure 10 For Figure 9 Schematic perspective view of the tooling shown in

[0032] Figure 11 For Figure 9 Schematic front view of the tooling shown in

[0033] Figure 12 For clamping during outer diameter machining Figure 9 Schematic top view of the first chuck of the tooling shown in

[0034] Figure 13 For Figure 12 Schematic perspective view of the first chuck shown in

[0035] Figure 14 For Figure 12 Schematic front view of the first chuck shown in

[0036] Figure 15 For clamping during inner diameter machining Figure 9 Schematic top view of the second chuck of the tooling shown in

[0037] Figure 16 is Figure 15 a schematic perspective view of the second chuck shown in

[0038] Figure 17 is Figure 15 a schematic front view of the second chuck shown in

[0039] Figure 18 is a schematic top view of a tooling for machining the inner diameter and outer diameter of a SiC ring according to another embodiment of the present disclosure.

[0040] Figure 19 is of the tooling shown in Figure 18 with an unprocessed SiC ring clamped.

[0041] Figure 20 is a schematic front view of the first chuck according to another embodiment of the present disclosure.

[0042] In the drawings, the same or corresponding technical features, parts or components are denoted by the same or corresponding reference numerals. Detailed Embodiments

[0043] The present disclosure will be described in detail below with reference to the drawings and by means of exemplary embodiments. It should be noted that the following detailed description of the present disclosure is for illustrative purposes only and is in no way a limitation of the present disclosure.

[0044] It should be noted that, for the sake of clarity, not all features of a specific embodiment are described and shown in the specification and the drawings, and, in order to avoid unnecessary details obscuring the technical solutions of interest in the present disclosure, only the device structures and parts closely related to the technical solutions of the present disclosure are described and shown in the specification and the drawings, while other details that are not closely related to the technical content of the present disclosure and are known to those skilled in the art are omitted.

[0045] As mentioned before, referring to Figure 1 , a SiC ring 200 fabricated by CVD method generally includes a ring-shaped body 210 and a plurality of arms 220, for example, three arms. Each arm 220 radially extends from the inner circumferential portion 2101 of the ring-shaped body 210 towards the radially inner side of the ring-shaped body 210. As Figure 1 shown in , the inner circumferential portion 2101 and the outer circumferential portion 2102 of the ring-shaped body 210 are concentric and both have a circular profile. The three arms 220 are evenly distributed along the circumferential direction of the ring-shaped body 210 and converge at the center of the ring-shaped body 210, and each arm 220 has a groove 2201 extending in its radial direction.

[0046] Referring to Figure 1 and Figure 2, the SiC ring 200 is obtained by depositing a SiC layer 240 on a ring-shaped substrate 230 with a reactive gas. Since the growth rate of SiC is relatively high at the edge of the ring-shaped substrate 230, convex portions 240a are formed on the outer peripheral side and the inner peripheral side of the ring-shaped body 210. In Figure 2 , the convex portions 240a located at the upper left corner, lower left corner, upper right corner, and lower right corner of the cross-section of the ring-shaped body 210 are shown.

[0047] Therefore, it is necessary to process the inner diameter and outer diameter of the SiC ring 200 to remove the convex portions 240a of the arms 220 and the ring-shaped body 210 in order to obtain a ring-shaped SiC structure 200' with a cross-section as shown in Figure 3 .

[0048] Referring to Figure 4 and Figure 5 , in the related art, different first tooling S1 and second tooling S2 are used to clamp the SiC ring 200 for processing the outer diameter and inner diameter of the SiC ring 200 respectively.

[0049] As shown in Figure 4 , in the outer diameter processing, the SiC ring 200 is bonded to the first tooling S1 with an outer diameter slightly smaller than its own outer diameter, and then the first tooling S1 is clamped by a hydraulic chuck in a way of expanding the inner hole. Then, the outer diameter of the SiC ring 200 is ground by a grinding wheel. After the convex portions 240a at the outer periphery of the SiC ring 200 are removed, the SiC ring 200 is removed from the first tooling S1 and then the inner diameter processing is carried out.

[0050] As shown in Figure 5 , in the inner diameter processing, the SiC ring 200 is clamped inside the ring-shaped second tooling S2 through its processed circular outer peripheral surface and is pressed by the pressing plate S21 of the second tooling S2. Then, the second tooling S2 is clamped by a self-centering chuck in a way of clamping from the outer periphery. Then, the inner diameter of the SiC ring 200 is cut by a core drill. After the convex portions 240a and the arms 220 at the inner periphery of the SiC ring 200 are removed, the SiC ring 200 is removed from the second tooling S2 to obtain the ring-shaped SiC structure 200'.

[0051] Since the outer diameter and inner diameter processing are respectively carried out with the centers of the first tooling S1 and the second tooling S2 as the centers of the circles, when the first tooling S1 and the second tooling S2 are two different toolings and the clamping methods of the SiC ring 200 on the first tooling S1 and the second tooling S2 are different, it is impossible to ensure that the center of the circle based on when processing the outer diameter coincides with the center of the circle based on when processing the inner diameter, and thus it is impossible to ensure the concentricity of the outer diameter and inner diameter of the processed SiC ring 200.

[0052] In addition, since two different toolings are required for machining the outer diameter and the inner diameter, the entire machining process includes a step of replacing the tooling. That is, when machining the inner diameter after the outer diameter machining is completed, the SiC ring 200 must be removed from the first tooling S1 and clamped onto the second tooling S2. As a result, the machining efficiency is relatively low.

[0053] Furthermore, since the SiC ring 200 can be accurately clamped and positioned inside the second tooling S2 only through the circular outer peripheral surface, the outer diameter must be machined first to remove the protruding portion 240a before the inner diameter can be machined. This causes the machining equipment in the latter stage of the machining process to wait, resulting in low equipment utilization rate and thus low machining efficiency.

[0054] In view of this, according to an embodiment of the present disclosure, a tooling for machining the inner diameter and outer diameter of the SiC ring 200 is proposed. Next, with reference to Figures 6 to 17 , the tooling 1 will be described in detail.

[0055] First, with reference to Figures 6 to 11 , the tooling 1 includes an annular portion 10 and a positioning member 11.

[0056] The inner peripheral surface 10a and the outer peripheral surface 10b of the annular portion 10 are both circular and concentric. The annular portion 10 includes a first annular plane 100, and the first annular plane 100 is used to fit with the annular plane 2100 of the annular body 210 of the SiC ring 200.

[0057] The annular plane 2100 is the plane to be retained of the annular body 210 of the SiC ring 200, that is, the annular plane of the annular SiC structure 200' obtained after machining the outer diameter and the inner diameter. The annular plane 2100 can be attached to the first annular plane 100 of the tooling 1 by means of glue, for example.

[0058] The positioning member 11 is disposed radially inside the first annular plane 100 and is configured to position the plurality of arms 220 of the SiC ring 200 so that the annular portion 10 and the annular body 210 are concentric.

[0059] That is to say, the positioning of the plurality of arms 220 by the positioning member 11 can make the annular portion 10 of the tooling 1 concentric with the annular body 210 of the SiC ring 200, so that the first annular plane 100 and the annular plane 2100 can be concentric, so that the annular plane 2100 can be concentrically attached to the first annular plane 100.

[0060] Combined with reference to Figures 12 to 17, when machining the outer diameter of the SiC ring 200 attached to the tooling 1, the tooling 1 is clamped by the first chuck 3. Specifically, the first chuck 3 includes a carrier 31 and a plurality of jaws 32. The carrier 31 is used to carry the tooling 1, and the plurality of jaws 32 are arranged on the carrier 31 and can move in the radial direction of the carrier 31 to clamp the tooling 1 in a way of expanding the inner hole by contacting the inner peripheral surface 10a of the annular portion 10 of the tooling 1. Then, through CNC, the outer diameter of the SiC ring 200 is ground using a grinding wheel.

[0061] After the protruding portion 240a at the outer periphery of the SiC ring 200 is removed, instead of removing the SiC ring 200 from the tooling 1, the tooling 1 can be directly clamped by the second chuck 4 to machine the inner diameter of the SiC ring 200. Specifically, the second chuck 4 includes a carrier 41 and a plurality of jaws 42. The carrier 41 is used to carry the tooling 1, and the plurality of jaws 42 are arranged on the carrier 41 and can move in the radial direction of the carrier 41 to clamp the tooling 1 in a way of clamping from the outer periphery by contacting the outer peripheral surface 10b of the annular portion 10 of the tooling 1. Then, through MCT, the inner diameter of the SiC ring 200 is cut using a core cutter.

[0062] Since the same tooling 1 is used in the machining of the outer diameter and the inner diameter, and since the inner peripheral surface 10a and the outer peripheral surface 10b of the annular portion 10 of the tooling 1 are concentric, the center of the circle based on which the outer diameter is machined can be made to coincide with the center of the circle based on which the inner diameter is machined, thereby improving the concentricity of the outer diameter and the inner diameter of the machined SiC ring 200.

[0063] In addition, since the same tooling 1 is used for the machining of the outer diameter and the inner diameter, there is no need to replace the tooling, and only one-time gluing is required to complete the machining operations of the inner diameter and the outer diameter, shortening the setting time of the SiC ring 200 on the tooling and improving the machining efficiency. Moreover, using the same tooling 1 can also reduce the management cost and the manufacturing cost.

[0064] In addition, since the SiC ring 200 is connected to the tooling 1 by fitting its annular plane 2100 onto the first annular plane 100 of the tooling 1, and the chuck clamps the tooling 1 by contacting the inner peripheral surface 10a and the outer peripheral surface 10b of the annular portion 10 of the tooling 1, it is not necessary to machine the outer peripheral surface 10b of the SiC ring 200 into a circular shape before machining the inner diameter. That is, it is not necessary to machine the outer diameter first and then the inner diameter. Instead, the inner diameter and the outer diameter can be machined simultaneously. Thus, during machining, the subsequent machining equipment does not need to wait, so the equipment utilization rate can be increased, and thus the machining efficiency can be improved. On the other hand, this solution also allows machining the inner diameter first and then the outer diameter. That is, the machining of the outer diameter and the inner diameter can be interchanged. Thus, when a bottleneck phenomenon occurs during the operation, the operation sequence can be interchanged, thereby improving the production stability.

[0065] In some embodiments, as Figures 6 to 11 shown, the positioning member 11 may include a plurality of keys 110, and the plurality of keys 110 correspond to the plurality of arms 220 one by one. Each key 110 is in a convex shape for being arranged in the groove 2201 of a corresponding one of the arms 220.

[0066] Figure 6 Exemplarily, it is shown that the positioning member 11 includes three keys 110 to correspond to Figure 9 the three arms 220 of the SiC ring 200 shown. By enabling each key 110 to be arranged in the groove 2201 of a corresponding one of the arms 220, these arms 220 can be positioned so that the annular portion 10 of the tooling 1 is concentric with the annular body 210 of the SiC ring 200.

[0067] In some embodiments, referring to Figure 18 and Figure 19 , the positioning member 11 may include multiple pairs of clamping members 111, and the multiple pairs of clamping members 111 correspond to the plurality of arms 220 one by one. Each pair of clamping members 111 is used to clamp a corresponding one of the arms 220 therebetween.

[0068] Figure 18 Exemplarily, it is shown that the positioning member 11 includes three pairs of clamping members 111 to correspond to Figure 19 the three arms 220 of the SiC ring 200 in. By enabling each pair of clamping members 111 to clamp a corresponding one of the arms 220 therebetween, these arms 220 can be positioned so that the annular portion 10 of the tooling 1 is concentric with the annular body 210 of the SiC ring 200.

[0069] It can be envisioned that the positioning member 11 can also adopt any other suitable form, which is not limited herein.

[0070] In some embodiments, the positioning member 11 can also be configured to fix the plurality of arms 220.

[0071] For example, as shown in Figure 9 , when the positioning member 11 includes a plurality of keys 110, each key 110 can be snap-fitted or clamped in the corresponding groove 2201 (the key 110 is shown in dashed lines in Figure 9 ), so that the corresponding arm 220 is fixed on the key 110. Alternatively, as shown in Figure 19 , when the positioning member 11 includes a plurality of pairs of clamping members 111, each pair of clamping members 111 can clamp the corresponding arm 220 therebetween, so that the arm 220 is fixed between the pair of clamping members 111.

[0072] In this way, not only can the positioning of the plurality of arms 220 be better achieved through the positioning member 11 to improve the concentricity between the annular portion 10 of the tooling 1 and the annular body 210 of the SiC ring 200; but also when taking a core during inner diameter machining, the waste core cut from the SiC ring 200 by the rotating tool can be fixed by the positioning member 11, preventing the waste core from being carried out by the rotating tool, causing tool vibration and damage, or falling off and flying out from the rotating tool, thus triggering safety risks.

[0073] In some embodiments, as shown in Figure 6 and Figure 18 , the positioning member 11 can be spaced apart from the inner peripheral side 100a of the first annular plane 100 by a predetermined distance.

[0074] For example, the keys 110 and the clamping members 111 are spaced apart from the inner peripheral side 100a of the first annular plane 100 by a predetermined distance to form a groove. This groove can provide a margin space for the core-taking tool during inner diameter machining, so that the tool will not interfere with the positioning member 11 during core-taking, thus not damaging the positioning member 11, and can also make the core-taking process smoother.

[0075] In some embodiments, the width of the first annular plane 100 can be in the range of 4 mm to 70 mm.

[0076] In this case, the width of the first annular plane 100 is generally equal to or less than the width of the annular plane 2100 of the SiC ring 200 to be machined. Thus, when machining the outer diameter and inner diameter of the SiC ring 200, the grinding wheel and the core-taking tool are not likely to interfere with the tooling 1. Not only can it prevent the tooling 1 from being damaged during the machining of the outer diameter and inner diameter, thereby increasing the service life of the tooling 1, but also it can make the machining operation easier, thereby improving the machining efficiency.

[0077] In some embodiments, as shown in Figure 7As shown, the annular portion 10 may further include a second annular plane 101, which is located radially inside the first annular plane 100 and is lower in height than the first annular plane 100, and the positioning member 11 is disposed on the second annular plane 101.

[0078] In this way, when taking a core during inner diameter machining, in the case where the waste core cut from the SiC ring 200 by the rotating tool falls off, the second annular plane 101 can catch the waste core, and since the second annular plane 101 is lower than the first annular plane 100, it can also prevent the fallen waste core from flying outwards, thereby reducing the safety risk caused by the falling off of the waste core.

[0079] In some embodiments, the tooling 1 can be made of metal. For example, the tooling 1 can be made of steel, or can be made of any other suitable metal material.

[0080] According to another aspect of the present disclosure, there is also provided a kit for inner diameter and outer diameter machining of the SiC ring 200. The kit includes: the tooling 1; and a first chuck 3 and a second chuck 4, which are respectively used for machining the inner diameter and outer diameter of the SiC ring 200 thereon. Any one of the first chuck 3 and the second chuck 4 includes a carrier and a plurality of jaws. The carrier is used for carrying the tooling 1, and the plurality of jaws are disposed on the carrier and can move in the radial direction of the carrier to concentrically clamp the tooling 1 on the carrier.

[0081] Exemplarily, as described before, the first chuck 3 includes a carrier 31 and a plurality of jaws 32. The plurality of jaws 32 clamp the tooling 1 in a way of expanding the inner hole by contacting the inner peripheral surface 10a of the annular portion 10 of the tooling 1 for outer diameter machining. The second chuck 4 includes a carrier 41 and a plurality of jaws 42. The plurality of jaws 42 clamp the tooling 1 in a way of clamping from the outer periphery by contacting the outer peripheral surface 10b of the annular portion 10 of the tooling 1 for inner diameter machining.

[0082] It can be envisaged that, with reference to Figure 20 , the jaws 32 of the first chuck 3 can also be configured to concentrically clamp the tooling 1 on the carrier 31 by supporting the inner peripheral surface 10a of the tooling 1.

[0083] In this case, whether in the machining of the outer diameter or the inner diameter, the tooling 1 is concentrically clamped on the carrier by means of the jaws supporting the inner peripheral surface 10a of the tooling 1. In this way, the positioning reference of the tooling 1 in the machining of the outer diameter and the inner diameter can be made the same, thereby further improving the concentricity of the outer diameter and the inner diameter of the machined SiC ring 200.

[0084] According to another embodiment of the present disclosure, a method for machining the inner diameter and outer diameter of the SiC ring 200 is further provided, and this method is carried out using the above-mentioned kit for machining the inner diameter and outer diameter of the SiC ring 200.

[0085] In some embodiments, the method may include: Attach the annular plane 2100 of the SiC ring 200 to the first annular plane 100 of the tooling 1; Clamp the tooling 1 onto either the first chuck 3 or the second chuck 4 to machine the corresponding one of the outer diameter and the inner diameter of the SiC ring 200; and Clamp the tooling 1 onto the other one of the first chuck 3 and the second chuck 4 to machine the corresponding other one of the outer diameter and the inner diameter of the SiC ring 200.

[0086] As mentioned before, the first chuck 3 is used for outer diameter machining, and the second chuck 4 is used for inner diameter machining. In this method, the order of inner diameter machining and outer diameter machining is not limited. Inner diameter machining can be carried out first and then outer diameter machining, or outer diameter machining can be carried out first and then inner diameter machining, that is, inner diameter machining and outer diameter machining are interchangeable, and moreover, inner diameter machining and outer diameter machining can be carried out simultaneously. As previously discussed, in this way, not only can the machining efficiency be improved, but also the production stability can be improved.

[0087] In the present disclosure, although the present disclosure has been described with reference to exemplary embodiments, it should be understood that the present disclosure is not limited to the specific embodiments described and illustrated in detail herein. Without departing from the scope defined by the claims of the present disclosure, those skilled in the art can make various changes to the exemplary embodiments.

[0088] The features mentioned and / or illustrated in the above description of the exemplary embodiments of the present disclosure can be combined in the same or similar manner into one or more other embodiments, combined with the features in other embodiments or replace the corresponding features in other embodiments. The technical solutions obtained by such combination or replacement should also be regarded as being included within the protection scope of the present disclosure.

Claims

1. A tool for machining the inner diameter and outer diameter of a SiC ring, the SiC ring being manufactured by a CVD method and comprising an annular body and a plurality of arms, each arm radially extending from the inner circumference of the annular body toward the radial inner side of the annular body, characterized in that: The tooling includes: an annular portion, whose inner circumference and outer circumference are both circular and concentric, the annular portion comprising a first annular plane, the first annular plane being adapted to fit with the annular plane of the annular body; and A positioning member is disposed radially inward of the first annular plane and is configured to position the plurality of arms so that the annular portion is concentric with the annular body.

2. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1, characterized in that: The positioning member is also configured to secure the plurality of arms.

3. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1 or 2, characterized in that: The positioning member is spaced apart from the inner circumference of the first annular plane by a predetermined distance.

4. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1 or 2, characterized in that: The positioning member includes a plurality of keys, and the plurality of keys correspond to the plurality of arms one by one, and each key is in a convex shape so as to be arranged in a groove of a corresponding one of the arms.

5. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1 or 2, characterized in that: The positioning member includes a plurality of pairs of clamping members, the plurality of pairs of clamping members correspond to the plurality of arms one by one, and each pair of clamping members is used for clamping a corresponding arm therebetween.

6. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1 or 2, characterized in that: The width of the first annular plane is in the range of 4 mm to 70 mm.

7. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1 or 2, characterized in that: The annular portion further includes a second annular plane, which is located radially inward of the first annular plane and lower in height than the first annular plane, and the positioning member is arranged on the second annular plane.

8. The tooling for inner diameter and outer diameter processing of SiC rings according to claim 1 or 2, characterized in that: The tooling is made of metal.

9. A kit for machining inner and outer diameters of SiC rings, characterized in that: include: A tool for machining the inner diameter and outer diameter of a SiC ring according to any one of claims 1 to 8; and The first chuck and the second chuck are respectively used to process the outer diameter and the inner diameter of the SiC ring thereon, and either of the first chuck and the second chuck includes a carrier and a plurality of claws, the carrier is used to carry the tooling, and the plurality of claws are arranged on the carrier and can move in the radial direction of the carrier to clamp the tooling concentrically on the carrier.

10. The kit for processing the inner diameter and outer diameter of a SiC ring according to claim 9, characterized in that: The clamping claws of any one of the first chuck and the second chuck are configured to clamp the tool concentrically on the stage by supporting the inner peripheral surface of the tool.

11. A method for machining the inner diameter and outer diameter of a SiC ring, characterized in that: This is performed using the kit for inner diameter and outer diameter machining of a SiC ring according to claim 9 or 10.

12. The method for processing the inner diameter and outer diameter of a SiC ring according to claim 11, characterized in that: include: Fitting the annular plane of the SiC ring onto the first annular plane of the tooling; clamping the tool on either one of the first chuck and the second chuck to process a corresponding one of an outer diameter and an inner diameter of the SiC ring; and The tool is chucked on the other of the first chuck and the second chuck to process the corresponding other of the outer diameter and the inner diameter of the SiC ring.

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