Feeding and discharging unit, coating system and feeding and discharging method

Abstract

The invention discloses a feeding and discharging unit, a coating system and a feeding and discharging method, and the feeding and discharging unit comprises a rotating mechanism which is used for rotating at least one of a first container and a second container so as to adjust an included angle between a sheet in the first container and a sheet in the second container; and a transfer mechanism for transferring the sheet between the first container and the second container. According to the design, the productivity of the coating system can be improved.

Description

Technical Field

[0001] This application relates to the technical field of coating production, and in particular to a loading and unloading unit, a coating system, and a method for loading and unloading. Background Art

[0002] In photovoltaic production technology, in the production of ALD (Atomic Layer Deposition), sheets are usually inserted between boats and flower baskets to transfer the sheets, and the insertion action is realized by a manipulator. However, based on the current design considerations of the boat entering and exiting the coating chamber and the flower basket loading and unloading sheets, the layout orientation of the boat and the flower basket will make the sheets inside them perpendicular to each other. The manipulator needs to rotate 90° correspondingly every time it transfers a sheet to adapt to the perpendicular orientation. Such a way of transferring sheets restricts the improvement of the transfer speed of the manipulator and cannot meet the higher production capacity requirements. At the same time, because the manipulator needs to rotate and adjust in multiple degrees of freedom, the control accuracy requirements and equipment costs also increase significantly. Summary of the Invention

[0003] This application provides a loading and unloading unit, a coating system, and a method for loading and unloading, which can improve the production capacity of the coating system.

[0004] In the first aspect of this application, a loading and unloading unit is provided. The loading and unloading unit includes: a rotating mechanism for rotating at least one of a first container and a second container to adjust the included angle between the sheets in the first container and the sheets in the second container; a handling mechanism for transferring sheets between the first container and the second container.

[0005] In one embodiment, the first container includes a boat, and the second container includes a flower basket.

[0006] In one embodiment, the position of the second container is fixed, and the rotating mechanism is used to rotate the first container.

[0007] In one embodiment, the rotating mechanism is used to rotate the first container between a first position and a second position. Wherein, when the first container is in the first position, the included angle between the sheets in the first container and the sheets in the second container is a first included angle, and when the first container is in the second position, the included angle between the sheets in the first container and the sheets in the second container is a second included angle. Wherein, the first included angle is greater than the second included angle, and when the first container is in the second position, the handling mechanism transfers sheets between the first container and the second container.

[0008] In one embodiment, it further includes: a first position detection sensor disposed at the first position for detecting whether the first container is at the first position; and / or, a second position detection sensor disposed at the second position for detecting whether the first container is at the second position.

[0009] In one embodiment, the second included angle is 0°.

[0010] In one embodiment, the loading and unloading unit includes: a loading and unloading overhead crane including a lifting part, the rotating mechanism is connected to the lifting part, the lifting part is configured to lift at least one of the first container and the second container, and the rotating mechanism is configured to rotate at least one of the first container and the second container.

[0011] In one embodiment, the handling mechanism is disposed above the first container and the second container.

[0012] In one embodiment, the handling mechanism includes at least one of a suction cup manipulator and a plug-in sheet overhead crane.

[0013] A second aspect of the present application provides a coating system including the loading and unloading unit according to any one of the above embodiments.

[0014] A third aspect of the present application provides a method for loading and unloading, the method including: rotating at least one of the first container and the second container to reduce the included angle between the sheet in the first container and the sheet in the second container; transferring the sheet between the first container and the second container.

[0015] In one embodiment, rotating at least one of the first container and the second container to reduce the included angle between the sheet in the first container and the sheet in the second container includes: rotating the first container from a first position to a second position, wherein when the first container is at the first position, the included angle between the sheet in the first container and the sheet in the second container is a first included angle, and when the first container is at the second position, the included angle between the sheet in the first container and the sheet in the second container is a second included angle, and the first included angle is greater than the second included angle.

[0016] In one embodiment, the second included angle is 0°.

[0017] In one embodiment, after transferring the sheet between the first container and the second container, it further includes: rotating the first container from the second position to the first position.

[0018] In one embodiment, the first container includes a boat, and the second container includes a flower basket.

[0019] Distinct from the prior art, the beneficial effects of the present application are as follows: The loading and unloading unit of the present application includes a rotating mechanism and a handling mechanism. The rotating mechanism is used to rotate at least one of the first container and the second container to adjust the included angle between the sheet in the first container and the sheet in the second container. Therefore, by rotating the rotating mechanism, the included angle between the first container and the second container after rotation can be made smaller than that before rotation. The handling mechanism saves time by transferring the sheet between the first container and the second container, so that a faster production rhythm can be followed, waiting of the coating equipment can be reduced, and the production capacity of the coating system can be improved. Moreover, the relative orientations of the first container and the second container in different coating systems may be different, and the rotation angles required for the sheet before and after transfer may be different. With the rotating mechanism of the present application, the first container or the second container can be rotated and adjusted to the required angle to transfer the sheet. Therefore, the loading and unloading unit of the present application can be compatible with coating systems having different layouts of the first container and the second container. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts, where:

[0021] Figure 1 is a top view schematic diagram of the prior art loading and unloading unit transferring a sheet;

[0022] Figure 2 is a top view schematic diagram of an embodiment of the present application's loading and unloading unit transferring a sheet with the first container in the first position and the second container in the third position;

[0023] Figure 3 is a top view schematic diagram of an embodiment of the present application's loading and unloading unit transferring a sheet with the first container in the second position;

[0024] Figure 4 is Figure 2 a right view structural schematic diagram of an embodiment of the rotating mechanism in

[0025] Figure 5 is a top view schematic diagram of an embodiment of the present application's loading and unloading unit transferring a sheet with the second container in the fourth position;

[0026] Figure 6 is an architecture diagram of an embodiment of the present application's coating system;

[0027] Figure 7 is a flowchart schematic diagram of an embodiment of the method for loading and unloading in the present application;

[0028] Figure 8 It is a schematic structural diagram of an embodiment of the conveying mechanism of the present application. Specific Embodiment

[0029] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0030] It should be noted that the terms "first" and "second" in the present application are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0031] Refer to Figure 1 , Figure 1It is a top view schematic diagram of a sheet transferring unit in the prior art. The manipulator 101 is used to transfer sheets in the first container 102 and the second container 103. The first container 102 is provided with tooth grooves, and the sheets are vertically inserted into the tooth grooves. The second container 103 is also provided with tooth grooves, and the sheets are also vertically inserted into the tooth grooves. The first container 102 and the second container 103 can usually accommodate a lot of sheets. Through the research of the inventor, when the manipulator 101 transfers each batch of sheets, the manipulator 101 needs to rotate in multiple degrees of freedom to transfer the sheets from the tooth grooves of the first container or the second container. Specifically, in addition to the rotation and lifting adjustment for switching the pick-up and placement positions between the first container 102 and the second container 103, the manipulator 101 also needs to rotate the direction of the sheet taken out from the first container 102 to be consistent with the direction of the tooth grooves of the second container 103 before it can be placed into the tooth grooves of the second container 103. After the manipulator 101 places the sheet, when taking the sheet from the first container 102 again, the direction of the manipulator 101 has to be adjusted back to be consistent with the direction of the sheet in the first container 102, so it has to rotate back. Of course, the process of the manipulator 101 transferring from the second container 103 to the first container 102 is similar to the above. From the above process, it can be seen that in the context of the increasing requirements for production tempo, rotation will make the total rotation adjustment time required for the manipulator 101 to transfer each sheet longer, thus having a negative impact on production capacity, and ultimately resulting in the production capacity being unable to meet the demand. At the same time, in order to adapt to the rotation actions required for adjusting the orientation of the sheets, the manipulator 101 needs to have more rotational degrees of freedom, so the requirements for the automation control accuracy of the manipulator and the equipment cost also increase.

[0032] Referring to Figure 2 , in the first aspect of the present application, a loading and unloading unit 20 is provided. The loading and unloading unit 20 includes a rotating mechanism 210 and a handling mechanism 220. The rotating mechanism 210 is used to rotate at least one of the first container 102 and the second container 103 to adjust the included angle between the sheets in the first container 102 and the sheets in the second container 103. The handling mechanism 220 is used to transfer sheets between the first container 102 and the second container 103. The sheets can be silicon wafers, glass or other materials.

[0033] Specifically, the first container 102 and the second container 103 include one of the carrier containers such as a boat and a flower basket. They can be the same or different, and the sheet material carried is a silicon wafer. When the rotating mechanism 210 does not rotate at least one of the first container 102 and the second container 103, there will be an angle before rotation between the silicon wafers in the first container 102 and the silicon wafers in the second container 103. After the rotating mechanism 210 rotates at least one of the first container 102 and the second container 103, there will be an angle after rotation between the silicon wafers in the first container 102 and the silicon wafers in the second container 103. It can be understood that when rotation occurs, the angle before rotation and the angle after rotation are not equal. Therefore, the time taken by the handling mechanism 220 to transfer each batch of silicon wafers will change due to the change in the angle. Based on the above principle, by adjusting the rotation angle of the rotating mechanism 210 for at least one of the first container 102 and the second container 103, the angle after rotation can be made smaller than the angle before rotation, so as to reduce the time for the handling mechanism 220 to transfer the silicon wafers. It should be noted that one of the first container 102 and the second container 103 is a boat, which is used to put the carried silicon wafers into the coating equipment for coating. The handling mechanism 220 is used to replace the coated silicon wafers with the uncoated silicon wafers. After the boat completes the coating process and leaves the coating equipment, the handling mechanism 220 replaces the coated silicon wafers with the uncoated silicon wafers, and then the boat enters the coating equipment again for the next coating process. Therefore, due to saving the time for transferring the silicon wafers and reducing the waiting time of the coating equipment, more coating processes can be completed within the same time, thus improving the productivity of the coating system. Further, considering that the current automated layout of the coating system is usually relatively complex, the angles before rotation of different coating systems may be different. Through the rotation of the rotating mechanism 210 of the present application, the silicon wafers can be transferred by rotating to the required angle. Therefore, the loading and unloading unit of the present application can be compatible with coating systems with different layouts.

[0034] In one embodiment, the first container 102 includes a boat, and the second container 103 includes a flower basket.

[0035] Further, referring to Figure 2 and Figure 3 , the position of the second container 103 is fixed, and the rotating mechanism 210 is used to rotate the first container 102.

[0036] Specifically, the first container 102 includes a boat, and the second container 103 includes a flower basket. Generally, one boat can correspond to the transfer of silicon wafers in multiple flower baskets. Specifically, each boat has a plurality of slots A arranged along the length direction of the boat, and each slot A has a plurality of tooth grooves arranged along the width direction of the boat. Each flower basket has a plurality of tooth grooves for accommodating silicon wafers. Generally, the number of silicon wafers that one boat can accommodate is much larger than the number of silicon wafers that one flower basket can accommodate. After rotating one first container 102, its wafer loading capacity can correspond to multiple second containers 103 for silicon wafer transfer. If the first container 102 is fixed in position and the second container 103 is rotated and adjusted, then after rotating multiple second containers 103, its total wafer loading capacity can only correspond to meet the silicon wafer transfer requirements of one first container 102. Obviously, from the perspective of the complexity of the execution steps, the solution of fixing the position of the second container 103 and using the rotating mechanism 210 to rotate the first container 102 can save more time.

[0037] In one embodiment, referring to Figure 2 and Figure 3 , the rotating mechanism 210 is used to rotate the first container 102 between a first position P1 and a second position P2. Wherein, when the first container 102 is in the first position P1, the included angle between the silicon wafers in the first container 102 and the silicon wafers in the second container 103 is a first included angle, that is, the included angle before rotation; when the first container 102 is in the second position P2, the included angle between the silicon wafers in the first container 102 and the silicon wafers in the second container 103 is a second included angle, that is, the included angle after rotation; wherein, the first included angle is greater than the second included angle, and when in the second position P2, the handling mechanism 220 transfers silicon wafers between the first container 102 and the second container 103. The range of the first included angle is (0°, 90°], and the range of the second included angle is [0°, 90°).

[0038] Specifically, the second included angle is smaller than the first included angle. Therefore, when transferring silicon wafers between the first container 102 and the second container 103 at the second position P2 by the handling mechanism 220, compared with transferring silicon wafers between the first container 102 and the second container 103 at the first position P1, the distance of the difference between the first included angle and the second included angle can be saved for each batch of silicon wafers transferred, thereby reducing the time for the handling mechanism 220 to transfer silicon wafers, and further improving the production capacity.

[0039] In one embodiment, referring to Figure 2 , the loading and unloading unit 20 of the present application further includes a first position detection sensor S1, which is arranged at the first position P1 and is used to detect whether the first container 102 is at the first position P1.

[0040] Specifically, the first position detection sensor S1 can be arranged at any point in the first position P1, and the number of the first position detection sensors S1 is not limited either. As long as it can be arranged at the first position P1 and can be used to detect whether the first container 102 rotates in place at the first position P1, the position accuracy of the first container 102 rotating to the first position P1 can be ensured through the first position detection sensor S1. In addition, the first position detection sensor S1 includes electromagnetic sensors, photoelectric sensors, ultrasonic sensors, capacitive sensors, etc., and the type of the first position detection sensor S1 is not limited in this application.

[0041] In an embodiment, referring to Figure 3 , the loading and unloading unit 20 of this application further includes a second position detection sensor S2, which is arranged at the second position P2 and is used to detect whether the first container 102 is at the second position P2.

[0042] Specifically, the second position detection sensor S2 can be arranged at any point in the second position P2, and the number of the second position detection sensors S2 is not limited either. As long as it can be arranged at the second position P2 and can be used to detect whether the first container 102 rotates in place at the second position P2, the position accuracy of the first container 102 rotating to the second position P2 can be ensured through the second position detection sensor S2. In addition, the second position detection sensor S2 includes electromagnetic sensors, photoelectric sensors, ultrasonic sensors, capacitive sensors, etc., and the type of the second position detection sensor S2 is not limited in this application.

[0043] Of course, in some other embodiments, sensors may not be used, and a limiting structure can be used to limit the first container 102 at the first position P1, and / or a limiting structure can be used to limit the first container 102 at the second position P2. The first position detection sensor S1 and the second position detection sensor S2 can be arranged in the area where the first container 102 and the second container 103 are placed, or can be arranged on the rotating mechanism 210.

[0044] In an embodiment, the second included angle is 0°, and the range of the first included angle is 0° to 90°.

[0045] Specifically, the second included angle being 0° means that the wafer directions in the rotated first container 102 and the second container 103 are completely parallel. The first included angle refers to the included angle formed between the wafers in the first container 102 before rotation and the wafers in the second container 103. Then there is an angular difference between the first included angle and the second included angle. If the design of the present application is not adopted, when transferring each batch of wafers, the handling mechanism 220 needs to transfer between the first container 102 and the second container 103 at the first position P1, and needs to rotate by an angular difference to adjust the wafer direction, which is very time-consuming. After using the design of the present application, when transferring each batch of wafers, the handling mechanism 220 transfers between the first container 102 and the second container 103 at the second position P2, and the handling mechanism 220 does not need to rotate the wafer direction, thus saving a large amount of time. At the same time, the design requirement for one degree of rotational freedom of the handling mechanism 220 is reduced, and the control precision requirement and equipment cost can be significantly reduced.

[0046] In one embodiment, referring to Figure 2 and Figure 3 , the second included angle is 0°, and the first included angle is 90°.

[0047] Specifically, referring to Figure 3 , the second included angle being 0° means that the wafer directions in the rotated first container 102 and the second container 103 are completely parallel. Referring to Figure 2 , the first included angle being 90° means that the wafer directions in the first container 102 before rotation and the second container 103 are completely perpendicular. If the design of the present application is not adopted, when transferring each batch of wafers, the handling mechanism 220 needs to transfer between the first container 102 and the second container 103 at the first position P1, and needs to rotate by 90° to adjust the wafer direction, which is very time-consuming. After using the design of the present application, when transferring each batch of wafers, the handling mechanism 220 transfers between the first container 102 and the second container 103 at the second position P2, and the handling mechanism 220 does not need to rotate the wafer direction, thus saving a large amount of time. At the same time, the design requirement for one degree of rotational freedom of the handling mechanism 220 is reduced, and the equipment cost is significantly reduced.

[0048] It should be noted that in the above embodiment where the second included angle is 0° and the first included angle is 90°, when the handling mechanism 220 handles the sheet material, the handling time of each sheet can be reduced by rotating 90°. In some other embodiments, the first included angle is 90° and the second included angle is 30°, so that when the handling mechanism 220 handles the sheet material, the handling time of each sheet can be reduced by rotating 60°; or, the first included angle is 80° and the second included angle is 10°, so that when the handling mechanism 220 handles the sheet material, the handling time of each sheet can be reduced by rotating 70°; or, the first included angle is 50° and the second included angle is 0°, so that when the handling mechanism 220 handles the sheet material, the handling time of each sheet can be reduced by rotating 50°. The above are only examples, but not limitations of the present application. It can be understood that under different first and second included angles, the effect of saving time is achieved.

[0049] In one embodiment, the handling mechanism 220 includes a suction cup manipulator and the like. A suction cup is provided on the suction cup manipulator, and the silicon wafer is picked up and placed through the suction cup.

[0050] In one embodiment, referring to Figure 2 , the second container 103 includes a flower basket. The second container 103 can be divided into a wet flower basket 1031 and a dry flower basket 1032. The wet flower basket 1031 is used to place uncoated silicon wafers, that is, raw wafers, and the dry flower basket 1032 is used to place coated silicon wafers, that is, cooked wafers. By transferring the coated silicon wafers in the first container 102 to the dry flower basket 1032, and then transferring the uncoated silicon wafers in the wet flower basket 1031 to the first container 102, the silicon wafer replacement can be completed. After all the cooked wafers in the first container 102 are replaced with raw wafers, it can re-enter the coating equipment for the next coating process.

[0051] In one embodiment, referring to Figure 2 , the loading and unloading unit 20 includes a loading and unloading overhead crane 200. The loading and unloading overhead crane 200 includes a rotating mechanism 210 and a lifting part 250. The rotating mechanism 210 is connected to the lifting part 250. The lifting part 250 is used to lift and grab at least one of the first container 102 and the second container 103, and the rotating mechanism 210 is used to rotate at least one of the first container and the second container.

[0052] In one embodiment, referring to Figure 4 , the loading and unloading unit 20 includes a loading and unloading overhead crane 200. The loading and unloading overhead crane 200 includes a rotating mechanism 210 and a lifting part 250. The rotating mechanism 210 is used to rotate the lifting part 250, so as to drive at least one of the first container 102 and the second container 103 to rotate synchronously.

[0053] Specifically, the loading and unloading overhead crane 200 includes a first guiding portion 230, a second guiding portion 240, and a lifting portion 250. The first guiding portion 230 and the second guiding portion 240 are configured to enable the first container 102 and the second container 103 to be translated in two different directions, so as to be placed at a predetermined position. The lifting portion is used to lift at least one of the first container 102 and the second container 103 to facilitate the movement of at least one of the first container 102 and the second container 103. The rotating mechanism 210 is used to rotate the lifting portion 250, so as to drive at least one of the first container 102 and the second container 103 to rotate.

[0054] Of course, in some other embodiments, the rotating mechanism 210 may not be provided in the loading and unloading overhead crane 200. The rotating mechanism 210 may also be provided on the base for placing the first container 102 and / or the second container 103. By rotating the base, at least one of the first container 102 and the second container 103 is driven to rotate. At this time, the loading and unloading overhead crane 200 only undertakes the handling function. The solution of the loading and unloading overhead crane 200 with such a handling function in cooperation with a rotatable base can avoid modifying or replacing the existing overhead crane, and only requires separately designing and adapting the base part, so that the existing machine can be upgraded more quickly.

[0055] In one embodiment, the loading and unloading overhead crane 200 includes a rotating mechanism 210 and a lifting portion 250. The rotating mechanism 210 may also be provided on the lifting portion 250. The rotating mechanism 210 is used to grasp and rotate at least one of the first container and the second container, and the lifting portion 250 is used to lift the rotating mechanism 210 and at least one of the first container and the second container.

[0056] In one embodiment, the rotating mechanism 210 includes a servo motor. The servo motor can better control the position accuracy of rotation, so as to ensure the accuracy of the rotation angle.

[0057] In one embodiment, the loading and unloading overhead crane 200 is configured to reciprocally transport the first container 102 between the coating equipment and the second position P2. The loading and unloading overhead crane 200 includes a rotating mechanism 210 and a lifting portion 250. The lifting portion 250 is used to lift and grasp the first container 102, and the rotating mechanism 210 is used to rotate the first container. During the displacement of the first container 102 during transportation, the rotation adjustment is synchronously completed, realizing the change between the orientation placed in the coating equipment and the corresponding placement orientation at the second position P2, eliminating the cumbersome process of separate rotation after translation, and not additionally increasing the handling time.

[0058] In one embodiment, the first container 102 includes a boat, and the second container 103 includes a flower basket. Refer to Figure 2 and Figure 5, the position of the first container 102 is fixed, see Figure 2 , the second container 103 is located at the third position, and the rotating mechanism 210 is used to rotate the second container 103 to Figure 5 's fourth position.

[0059] In one embodiment, the rotating mechanism 210 rotates the first container 102 and the second container 103 respectively.

[0060] In one embodiment, the transport mechanism 220 is disposed above the first container 102 and the second container 103. By staggering the transport mechanism and the first container 102 and the second container 103 in height, space can be saved, and the layout of the second position P2 of the first container 102 and the second container 103 can be more compact, thus saving site space. The transport mechanism 220 can be a suction cup manipulator or a plug-in sheet crane 500 with a sheet picking and placing function. The plug-in sheet crane 500 can refer to Figure 8 The guide rails can be shared with the loading and unloading crane 200, or an independent rail can be configured. Specifically, the plug-in sheet crane 500 can take out or put in the sheet using a lifting mechanism, and the lifting mechanism can absorb or release the sheet using a suction cup structure similar to that on a suction cup manipulator.

[0061] Specifically, the second angle is set to 0°, and the plug-in sheet crane 500 only needs to move the sheet by translation in the three-coordinate space, eliminating the need for a multi-axis robotic arm device, which can further reduce equipment costs and save the installation and operation space required for installing the robotic arm on the ground. The position layout of the first container 102 and the second container 103 is more compact, further saving site space.

[0062] See also Figure 6 In a second aspect, the present application provides a coating system 30, comprising a loading and unloading unit 20 in any one of the above-mentioned embodiments.

[0063] Specifically, the coating system may be an ALD coating system or a CVD (Chemical Vapor Deposition) coating system, etc. The present application does not impose any specific restrictions on the specific type of the coating system.

[0064] See also Figure 2 , Figure 3 and Figure 7 The third aspect of the present application also provides a method for loading and unloading materials, the method comprising:

[0065] S100 : rotating at least one of the first container 102 and the second container 103 to reduce the angle between the sheets in the first container 102 and the sheets in the second container 103 .

[0066] Specifically, the rotation mechanism 210 rotates at least one of the first container 102 and the second container 103, so that the included angle between the sheet in the first container 102 and the sheet in the second container 103 after rotation is smaller than the included angle before rotation.

[0067] S200: Transfer the sheet between the first container 102 and the second container 103.

[0068] Specifically, the transfer mechanism 220 transfers the sheet between the first container 102 and the second container 103. Due to the rotation of the rotation mechanism 210, the transfer mechanism 220 does not need to rotate a large angle when transferring each batch of sheets, thus wasting time, and the overall production capacity can be improved.

[0069] In an embodiment, refer to Figure 2 and Figure 3 , the first container 102 includes a boat, and the second container 103 includes a flower basket. The above step S100 includes: rotating the first container 102 from the first position P1 to the second position P2. Among them, when the first container 102 is in the first position P1, the included angle between the sheet in the first container 102 and the sheet in the second container 103 is the first included angle, and when the first container 102 is in the second position P2, the included angle between the sheet in the first container 102 and the sheet in the second container 103 is the second included angle, where the first included angle is greater than the second included angle.

[0070] Specifically, the rotation mechanism 210 only rotates the first container 102 and does not rotate the second container 103. For the rotation mechanism 210, time can be saved. The specific principle can refer to the above-mentioned embodiment. At the same time, the first included angle before rotation is greater than the second included angle after rotation, so that the transfer mechanism 220 can save the time for transferring the sheet. Therefore, the overall production capacity can be improved according to the above method.

[0071] Of course, in some other embodiments, the position of the first container 102 is fixed, and the rotation mechanism 210 is used to rotate the second container 103. Such a solution is also possible. Or, the rotation mechanism 210 rotates the first container 102 and the second container 103 respectively.

[0072] In an embodiment, after the sheet is transferred in the above step S200, it further includes: rotating the first container 102 from the second position P2 to the first position P1.

[0073] Specifically, the first container 102 at the second position P2 corresponds to the transfer of the sheet with the second container 103, while the first position P1 corresponds to the orientation of the first container 102 in the reaction chamber of the coating system. After taking out the sheet from the second container 103 and inserting it into the first container 102, the first container 102 is rotated back to the first position P1, and the first container 102 waits at the first position P1 to be translated and transported into the reaction chamber of the coating system.

[0074] In one embodiment, the second included angle is 0° and the first included angle is 90°.

[0075] Specifically, referring to Figure 3 , the second included angle being 0° means that the direction of the sheet in the rotated first container 102 is completely parallel to the direction of the sheet in the second container 103. Referring to Figure 2 , the first included angle being 90° means that the direction of the sheet in the first container 102 before rotation is completely perpendicular to the direction of the sheet in the second container 103. If the design of the present application is not adopted, when transferring each batch of sheets, the handling mechanism 220 needs to transfer between the first container 102 and the second container 103 at the first position P1, and needs to rotate 90° to adjust the direction of the sheet, which is very time-consuming. After using the design of the present application, when transferring each batch of sheets, the handling mechanism 220 transfers between the first container 102 and the second container 103 at the second position P2, and the handling mechanism 220 does not need to rotate the direction of the sheet, thus saving a large amount of time. At the same time, the design requirement for one degree of freedom of rotation of the handling mechanism 220 is reduced, and the equipment cost is significantly reduced.

[0076] Of course, in some other embodiments, the range of the first included angle is (0°, 90°], and the range of the second included angle is [0°, 90°). In some other embodiments, the first included angle is 90° and the second included angle is 30°, and when the handling mechanism 220 transports the sheet, the rotation time of each sheet can be reduced by 60°; or, the first included angle is 80° and the second included angle is 10°, and when the handling mechanism 220 transports the sheet, the rotation time of each sheet can be reduced by 70°; or, the first included angle is 50° and the second included angle is 0°, and when the handling mechanism 220 transports the sheet, the rotation time of each sheet can be reduced by 50°. The above are only examples, but not limitations of the present application. It can be understood that under different first included angles and second included angles, the effect of saving time is achieved.

[0077] The above are only embodiments of the present application, and do not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present application.

Claims

1. A loading and unloading unit, characterized in that: The loading and unloading unit comprises: A rotating mechanism, used to rotate at least one of the first container and the second container to adjust the angle between the sheet in the first container and the sheet in the second container; A transport mechanism is used to transfer sheets between the first container and the second container.

2. The loading and unloading unit according to claim 1, characterized in that: The first container comprises a boat and the second container comprises a flower basket.

3. The loading and unloading unit according to claim 2, characterized in that: The position of the second container is fixed, and the rotating mechanism is used to rotate the first container.

4. The loading and unloading unit according to claim 3, characterized in that: The rotating mechanism is used to rotate the first container between a first position and a second position, wherein when the first container is in the first position, the angle between the sheets in the first container and the sheets in the second container is a first angle, and when the first container is in the second position, the angle between the sheets in the first container and the sheets in the second container is a second angle, wherein the first angle is greater than the second angle, and when the first container is in the second position, the transport mechanism transfers the sheets between the first container and the second container.

5. The loading and unloading unit according to claim 4, characterized in that: Also includes: a first position detection sensor, disposed at the first position, for detecting whether the first container is at the first position; And / or, a second position detection sensor is arranged at the second position, for detecting whether the first container is at the second position.

6. The loading and unloading unit according to claim 4, characterized in that: The second angle is 0°.

7. The loading and unloading unit according to claim 1, characterized in that: The loading and unloading unit comprises: The loading and unloading crane comprises a lifting part, the rotating mechanism is connected to the lifting part, the lifting part is used to lift at least one of the first container and the second container, and the rotating mechanism is used to rotate at least one of the first container and the second container.

8. The loading and unloading unit according to claim 1, characterized in that: The transport mechanism is disposed above the first container and the second container.

9. The loading and unloading unit according to claim 1, characterized in that: The transport mechanism includes at least one of a suction cup manipulator and a plug-in sheet overhead travelling crane.

10. A coating system, characterized in that: The invention comprises a loading and unloading unit as claimed in any one of claims 1 to 9.

11. A method for loading and unloading materials, characterized in that: The method comprises: Rotating at least one of the first container and the second container to reduce the angle between the sheet in the first container and the sheet in the second container; Sheets are transferred between the first container and the second container.

12. The method for loading and unloading materials according to claim 11, characterized in that: The rotating at least one of the first container and the second container to reduce the angle between the sheet in the first container and the sheet in the second container comprises: The first container is rotated from a first position to a second position, wherein when the first container is in the first position, the angle between the sheets in the first container and the sheets in the second container is a first angle, and when the first container is in the second position, the angle between the sheets in the first container and the sheets in the second container is a second angle, wherein the first angle is greater than the second angle.

13. The method for loading and unloading materials according to claim 12, characterized in that: The second angle is 0°.

14. The method for loading and unloading materials according to claim 12, characterized in that: After transferring the sheet between the first container and the second container, the method further comprises: The first container is rotated from the second position to the first position.

15. The method for loading and unloading materials according to claim 11, characterized in that: The first container comprises a boat and the second container comprises a flower basket.

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