Curable composition, film forming method, pattern forming method, and article manufacturing method

CN120202529APending Publication Date: 2025-06-24CANON KK
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Patent Information

Application Number
CN202380079286.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-08-31
Filing Date
2023-11-07
Publication Date
2025-06-24

AI Technical Summary

Technical Problem

In traditional pattern formation methods and planarization techniques, the non-contact liquid droplets lead to an increase in bubbles, reducing productivity, and in order to avoid mold damage, the residual film of the hardenable composition needs to be thickened, affecting the precise pattern transfer.

Method used

A hardenable composition comprising a polymerizable compound, a photopolymerization initiator and a solvent is developed, which is within a specific viscosity range and contains a polycyclic structure, and can volatilize the solvent by waiting steps to form a suitable liquid film surface flatness before the dispersed droplets bond to each other to form a substantially continuous liquid film.

Benefits of technology

Diffusion and filling are achieved in a short time, shortening pattern formation time, improving productivity, while maintaining pattern accuracy and high filling properties of hardenable compositions, avoiding mold breakage.

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Abstract

A curable composition includes a polymerizable compound (a), a photopolymerization initiator (b), and a solvent (d), and has a viscosity of 2 mPa.s to 60 mPa.s at 23 DEG C. wherein the curable composition from which the solvent (d) is removed has a viscosity of 30 mPa.s to 10000 mPa.s at 23 DEG C. The content of the solvent (d) is 5 vol% to 95 vol% of the entire curable composition. The polymerizable compound (a) at least contains a compound (a-1) having a plurality of cyclic structures, wherein at least one of the cyclic structures is an aromatic structure or an aromatic heterocyclic structure.
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Citation Information

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