PCBA and semiconductor full-automatic intelligent cleaning machine

Abstract

The invention provides a PCBA and semiconductor full-automatic intelligent cleaning machine, and relates to the technical field of cleaning machines. Comprising a cleaning machine body, an inner cavity, a magnetic wheel roller line assembly, a JCI spraying pipe, a universal spraying pipe and the like. The stepping gear motor is matched with the duplex chain wheel and the stainless steel chain to drive the two sides of the driving inner cavity to rotate along the driving main shaft at the top of the plate, and the driving main shaft drives the main shaft magnetic wheel magnetized in the radial direction to rotate at a high speed when rotating. The radially magnetized main shaft magnetic wheel and the axially magnetized roller magnetic wheel form an orthogonal magnetic field layout, and tangential electromagnetic force is generated when the two magnetic wheels alternately move to directly drive the roller magnetic wheel and the connected roller main shaft to rotate in a non-contact manner; therefore, outer ring roller pieces are driven to synchronously rotate according to a fixed interval to horizontally drag a device to stably move forwards for cleaning, non-contact transmission is achieved through tangential electromagnetic force generated by magnetic field alternation, and gear friction noise and abrasion risks are thoroughly eliminated.

Description

Technical Field

[0001] The present invention relates to the technical field of cleaning machines, and particularly to a PCBA and semiconductor fully automatic intelligent cleaning machine. Background Art

[0002] In the production process of semiconductor devices, from core process steps such as wafer oxidation, lithography, etching to deposition, precise cleaning is required after each step. This is because the residual photoresist, metal ion contamination or organic matter attachment will significantly affect the subsequent process accuracy. For example, tiny particles during the lithography pattern transfer may cause short circuits in the circuit. Especially in the chemical mechanical polishing (CMP) stage, after removing the surface damage layer by combining chemical corrosion and mechanical grinding, an SC1 / SC2 mixed solution is required for cleaning to remove organic pollutants and control metal residues. As the process nodes advance to 14nm and below, new requirements such as TSV via cleaning are introduced in 3D packaging technology, and the cleaning steps already account for more than 30% of the entire production process. Therefore, using a cleaning machine to clean the residues after processing semiconductor devices is a key link to ensure the yield and reliability of semiconductor devices.

[0003] For example, the patent with the publication number CN108735636B discloses a semiconductor lithography plate rapid cleaning device, which includes an outer cover frame and a feeding mechanism, a rotary grasping device, a positioning lifting conveying roller, a conveying roller, a linear moving grasping mechanism, a cleaning module and a second conveying roller arranged in sequence inside. The linear moving grasping mechanism integrates a vacuum suction cup, a transmission shaft, a lifting and longitudinal moving component to achieve multi-directional precise control. Each component cooperates to complete the automatic loading, positioning transmission, grasping and cleaning, and unloading processes of the workpiece. Through full automation control, the manual intervention is reduced, and high-speed continuous operation is achieved. However, most of the existing intelligent cleaning devices rely on traditional gear meshing transmission for the conveyance during the cleaning of semiconductor devices. When the gears are transmitting, the friction between them generates relatively large noise, and it is not suitable for high-speed and heavy-duty transmission, otherwise the gears are prone to wear and affect the use of the equipment.

[0004] Therefore, a PCBA and semiconductor fully automatic intelligent cleaning machine is introduced. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to overcome the defect that in the prior art, when the cleaning device relies on gear meshing transmission for the cleaning and conveyance of semiconductor devices, the gear friction easily generates relatively large noise. The present invention proposes a PCBA and semiconductor fully automatic intelligent cleaning machine.

[0006] To solve the above technical problems, the technical solution adopted by the present invention is as follows: A PCBA and semiconductor full-automatic intelligent cleaning machine, including a cleaning machine body and an inner cavity disposed inside the cleaning machine body. A magnetic wheel roller line assembly is disposed inside the inner cavity. A cleaning liquid tank is provided at the bottom of one end inside the cleaning machine body. Universal spray pipes are respectively and fixedly disposed between the inner walls of the cleaning machine body on the upper and lower sides of the inner cavity, and the universal spray pipes are located above the port of the cleaning liquid tank; isolation sections are provided in front of and behind the universal spray pipes. A condenser is fixedly disposed between the inner walls of the cleaning machine body above the universal spray pipes, and one end of the condenser is connected to the isolation section, and the other end of the condenser is connected to the exhaust port provided at the top of the cleaning machine body;

[0007] The magnetic wheel roller line assembly includes roller main shafts that are movably and evenly spaced between the side walls of the inner cavity. Roller pieces are evenly and spacedly fixedly connected to the outer walls of the roller main shafts between the side walls of the inner cavity. Both ends of the roller main shafts penetrate and extend outside the side walls of the inner cavity. Roller magnetic wheels are fixedly connected to the outer walls of the ends of both ends of the roller main shafts. Driving main shafts are respectively fixedly disposed at the top parts of the side plates on both sides of the inner cavity below the roller magnetic wheels through bearing seats. Main shaft magnetic wheels are respectively fixedly disposed on the outer walls of the driving main shafts corresponding to the roller magnetic wheels, and the tops of the main shaft magnetic wheels are arranged close to the bottoms of the roller magnetic wheels. A stepping reduction motor is fixedly disposed inside the cleaning machine body below the inner cavity. Two groups of stainless steel chains are sleeved on the outer wall of the transmission shaft of the stepping reduction motor, and the other ends of the two groups of stainless steel chains penetrate through the side plates on both sides of the inner cavity and are movably sleeved on the outer walls of the driving main shafts.

[0008] Further, a double-row sprocket is fixedly connected to the outer wall of the transmission shaft of the stepping reduction motor. Positioning sprockets are respectively fixedly connected to the outer walls of the driving main shafts at the top parts of the side plates on both sides of the inner cavity corresponding to the double-row sprocket. One end of each of the two groups of stainless steel chains is movably sleeved on the outer wall of the double-row sprocket, and the other end is movably sleeved on the outer wall of the positioning sprocket.

[0009] Further, the lower end of the liquid suction pipe of the universal spray pipe extends into the cleaning liquid tank. A concentrated liquid tank is provided inside the cleaning machine body on one side of the cleaning liquid tank, and an electric diaphragm pump is provided between the concentrated liquid tank and the cleaning liquid tank.

[0010] Further, four groups of ST liquid tanks and three groups of rinsing liquid tanks are sequentially arranged side by side at the bottom inside the cleaning machine body adjacent to the other side of the cleaning liquid tank. The four groups of ST liquid tanks and the three groups of rinsing liquid tanks are used to perform step-by-step overflow precipitation purification on the liquid sprayed and rinsed from semiconductor devices in groups, and guide the rinsing liquid after precipitation purification to flow back to the ST liquid tanks step by step.

[0011] Furthermore, a JCI spray pipe is fixedly suspended between the inner walls of the cleaning machine body above the ST liquid tank and the rinse liquid tank port, the JCI spray pipe is symmetrically distributed on the upper and lower sides of the inner cavity, and water-cut air knives are fixedly suspended at even intervals between the inner walls of the cleaning machine body between the JCI spray pipes, a condenser is fixedly arranged between the inner walls of the cleaning machine body above the water-cut air knife, and exhaust outlets are evenly arranged on the top of the cleaning machine body; a universal spray pipe is fixedly suspended between the inner walls of the cleaning machine body above the rinse liquid tank port, the universal spray pipe is symmetrically distributed on the upper and lower sides of the inner cavity, and water-cut air knives are fixedly suspended at even intervals between the inner walls of the cleaning machine body between the universal spray pipes, and exhaust outlets are evenly arranged on the top of the cleaning machine body above the water-cut air knife.

[0012] Furthermore, the roller magnetic wheel includes a fixing ring seat movably sleeved on the outer wall at the end ends of the roller main shaft and a first threaded hole opened on the side wall of the fixing ring seat, the first threaded hole is threadedly connected with a fixing bolt, the fixing bolt passes through the roller main shaft sleeved in the middle hole of the fixing ring seat, and a toggle ring is rotatably arranged on the side wall at the end of the fixing ring seat, and the two ends of the side wall of the end end of the fixing ring seat in the middle hole of the toggle ring are respectively movably arranged with a driven gear, the side ends of the driven gear are meshed with the teeth on the inner wall of the middle hole of the toggle ring, a positioning rod is penetrated through the middle of the driven gear, a spiral steel bar is fixedly connected to the outer wall of the end end of the positioning rod, a magnetic wheel body is movably sleeved on the outer wall of the roller main shaft outside the toggle ring, a positioning hole is opened on the outer wall of the magnetic wheel body close to the toggle ring, the positioning hole is arranged corresponding to the positioning rod, and a convex hole is opened inside the magnetic wheel body inside the positioning hole, and the convex hole is connected with the positioning hole.

[0013] Furthermore, a accommodating cavity is opened on the side wall of the fixed ring seat corresponding to the positioning rod, the accommodating cavity is connected to the first threaded hole, and a limiting hole is opened on the side wall of the fixing bolt corresponding to the accommodating cavity. The end of the positioning rod away from the spiral steel bar is movably sleeved in the accommodating cavity, and a limiting protrusion is set on the inner wall of one side of the accommodating cavity, and the end of the limiting protrusion is movably engaged with the side wall of the positioning rod.

[0014] Furthermore, the positioning rod includes a positioning cylinder fixedly arranged on the side wall passing through the middle part of the driven gear, a second threaded hole is provided on the side wall of the end of the positioning cylinder away from the spiral steel bar, a T-screw is movably sleeved inside the positioning cylinder, the end of the T-screw is threadedly sleeved in the second threaded hole, and a sliding groove is provided on the outer wall of one side of the T-screw straight rod, and the end of the limiting protrusion is movably engaged in the sliding groove on the outside of the positioning cylinder.

[0015] Furthermore, when the magnetic wheel body fits the side wall of the toggle ring and the end of the spiral steel bar is movably engaged in the small-diameter port of the convex hole, the end of the T-shaped screw extends through the accommodating cavity to the limiting hole on the side wall of the fixing bolt.

[0016] Furthermore, fixed frames are fixedly arranged on the side walls at the top of the cleaning machine body on both sides above the inner cavity body. A number of observation and maintenance openings are evenly spaced on the side walls of the fixed frames. Corresponding to the observation and maintenance openings, front upper doors are respectively movably connected to the outer edges of the bottom sides of the fixed frames. On both sides of the inner wall of the fixed end of the front upper door, curved rods are respectively fixedly connected. The ends of the curved rods are movably connected to gas spring telescopic brackets. The ends of the gas spring telescopic brackets are successively movably connected to gas springs and gas spring fixed seats. The ends of the gas spring fixed seats are fixedly connected to the inner walls of the vertical rods on the side of the fixed frame close to the cleaning machine body.

[0017] Compared with the prior art, the beneficial effects of the present invention include: by sequentially placing the cleaning devices on the roller sheets of the inner cavity body, after starting the stepping reduction motor, its power is transmitted through the transmission system composed of double-row sprockets, stainless steel chains and positioning sprockets to synchronously drive the rotation of the driving main shafts at the tops of the edge plates on both sides of the inner cavity body. When the driving main shafts rotate, they drive the main shaft magnetic wheels with radial magnetization to rotate at high speed. Since the driving main shafts and the roller main shafts are perpendicular to each other, the main shaft magnetic wheels with radial magnetization and the roller magnetic wheels with axial magnetization form an orthogonal magnetic field layout. When the two magnetic wheels alternate, tangential electromagnetic force is generated to directly drive the roller magnetic wheels and the connected roller main shafts to rotate without contact, thereby driving the outer ring roller sheets to rotate synchronously at a fixed interval. The contact between the roller sheets and the surface of the semiconductor device generates a directional frictional force, and the device is stably dragged forward horizontally in a state of no mechanical meshing, ensuring that the transmission path does not deviate. Compared with the traditional gear transmission, the magnetic drive system completely eliminates the tooth surface friction noise and at the same time avoids the risk of transmission failure caused by gear wear, realizing the silent and low-loss continuous transportation of semiconductor devices during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The disclosure of the present invention will be described with reference to the accompanying drawings. It should be understood that the drawings are only for the purpose of illustration and are not intended to limit the scope of protection of the present invention. In the drawings, the same reference numerals are used to refer to the same components. Among them:

[0019] Figure 1 Schematically shows the process and layout diagram of a PCBA and a semiconductor fully automatic intelligent cleaning machine according to an embodiment of the present invention;

[0020] Figure 2 Schematically shows the overall structure schematic of a PCBA and a semiconductor fully automatic intelligent cleaning machine according to an embodiment of the present invention Figure 2 ;

[0021] Figure 3 Schematically shows the internal sectional structure schematic diagram of the cleaning machine body of a PCBA and a semiconductor fully automatic intelligent cleaning machine according to an embodiment of the present invention;

[0022] Figure 4Schematically shows a schematic diagram of the front upper door closing structure of a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention;

[0023] Figure 5 Schematically shows a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention Figure 4 The enlarged structure schematic diagram at position A in;

[0024] Figure 6 Schematically shows a schematic diagram of the magnetic wheel roller line assembly structure of a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention;

[0025] Figure 7 Schematically shows a schematic diagram of the roller magnetic wheel structure of a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention;

[0026] Figure 8 Schematically shows a schematic diagram of the roller magnetic wheel assembly structure of a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention;

[0027] Figure 9 Schematically shows a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention Figure 8 The enlarged structure schematic diagram at position B in;

[0028] Figure 10 Schematically shows a schematic diagram of the positioning rod structure of a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention;

[0029] Figure 11 Schematically shows a schematic diagram of the front upper door opening structure of a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention;

[0030] Figure 12 Schematically shows a PCBA and a semiconductor fully automatic intelligent cleaning machine proposed according to an embodiment of the present invention Figure 11 The enlarged structure schematic diagram at position C in.

[0031] Numbers in the figure: 1. Cleaning machine body; 101. Inner cavity; 102. Cleaning liquid tank; 103. Universal spray pipe; 104. Concentrate tank; 105. ST liquid tank; 106. Rinse liquid tank; 107. Water-cutting air knife; 108. JCI spray pipe; 109. Isolation section; 2. Magnetic wheel roller line assembly; 21. Roller spindle; 22. Roller sheet; 23. Roller magnetic wheel; 231. Fixed ring seat; 2311. First threaded hole; 2312. Fixing bolt; 2313. Limiting hole; 2314. Accommodating cavity; 2315. Limiting convex block; 232. Toggle Ring; 233, driven gear; 234, positioning rod; 2341, positioning cylinder; 2342, second threaded hole; 2343, T-screw; 2344, slide groove; 235, spiral steel bar; 236, magnetic wheel body; 237, positioning hole; 238, convex hole; 24, driving spindle; 25, spindle magnetic wheel; 26, stepping reduction motor; 27, stainless steel chain; 3, exhaust vent; 4, fixing frame; 5, observation and maintenance port; 6, front upper door; 7, curved rod; 8, gas spring telescopic bracket; 9, gas spring; 10, gas spring fixing seat; 11, hinge. DETAILED DESCRIPTION

[0032] It is easy to understand that according to the technical solution of the present invention, without changing the essential spirit of the present invention, a person skilled in the art can propose a variety of interchangeable structural modes and implementation modes. Therefore, the following specific implementation modes and drawings are only exemplary descriptions of the technical solution of the present invention, and should not be regarded as the whole of the present invention or as a limitation or restriction to the technical solution of the present invention.

[0033] According to one embodiment of the present invention, Figures 1-6 A fully automatic intelligent cleaning machine for PCBA and semiconductors, wherein an inner cavity 101 is arranged inside the cleaning machine body 1, and a PLC controller is arranged on the end wall of the cleaning machine body 1 on the side of the feed inlet, and the PLC controller is used to control the autonomous operation of the equipment, and the inner cavity 101 runs through the entire cleaning machine body 1 horizontally, and the inner cavity 101 is a U-shaped structure, the bottom plate of the inner cavity 101 is hollowed out, and the two ends of the inner cavity 101 extend to the outside of the two ends of the cleaning machine body 1, and a magnetic wheel roller line assembly 2 is arranged in the inner cavity 101, and the cleaning machine A cleaning liquid tank 102 is provided at the bottom of one end of the body 1, and universal spray pipes 103 are fixedly provided between the inner walls of the cleaning machine body 1 on the upper and lower sides of the inner cavity 101, respectively, and the universal spray pipe 103 is located above the port of the cleaning liquid tank 102; isolation sections 109 are provided in front and rear of the universal spray pipe 103, and a condenser is fixedly provided between the inner walls of the cleaning machine body above the universal spray pipe 103, and one end of the condenser is connected to the isolation section 109, and the other end of the condenser is connected to the exhaust port 3 provided at the top of the cleaning machine body;

[0034] The magnetic wheel roller line assembly 2 includes a roller main shaft 21 movably and evenly spaced between the side walls of the inner cavity body 101. Roller pieces 22 are fixedly connected at equal intervals on the outer wall of the roller main shaft 21 between the side walls of the inner cavity body 101. Both ends of the roller main shaft 21 penetrate and extend outside the side walls of the inner cavity body 101. Roller magnetic wheels 23 are fixedly connected to the outer walls of the ends of both ends of the roller main shaft 21. On both sides of the inner cavity body 101 below the roller magnetic wheels 23, driving main shafts 24 are fixedly arranged through bearing seats at the top of the edge plates. Main shaft magnetic wheels 25 are fixedly arranged on the outer walls of the driving main shafts 24 corresponding to the roller magnetic wheels 23. The tops of the main shaft magnetic wheels 25 are arranged close to the bottoms of the roller magnetic wheels 23. A stepping reduction motor 26 is fixedly arranged inside the cleaning machine body 1 below the inner cavity body 101. Two groups of stainless steel chains 27 are sleeved on the outer wall of the transmission shaft of the stepping reduction motor 26. The other ends of the two groups of stainless steel chains 27 penetrate through the edge plates on both sides of the inner cavity body 101 and are movably sleeved on the outer walls of the driving main shafts 24.

[0035] A double-row sprocket is fixedly connected to the outer wall of the transmission shaft of the stepping reduction motor 26. Positioning sprockets are fixedly connected to the outer walls of the driving main shafts 24 at the top of the edge plates on both sides of the inner cavity body 101 corresponding to the double-row sprocket. One end of each of the two groups of stainless steel chains 27 is movably sleeved on the outer wall of the double-row sprocket, and the other end is movably sleeved on the outer wall of the positioning sprocket.

[0036] The lower end of the liquid extraction pipe of the general spray pipe 103 extends into the inside of the cleaning liquid tank 102. A concentrated liquid tank 104 is arranged inside the cleaning machine body 1 on one side of the cleaning liquid tank 102. An electric diaphragm pump is arranged between the concentrated liquid tank 104 and the cleaning liquid tank 102.

[0037] On the inner bottom of the cleaning machine body 1 adjacent to the other side of the cleaning liquid tank 102, four groups of ST liquid tanks 105 and three groups of rinse liquid tanks 106 are arranged side by side in sequence. The four groups of ST liquid tanks 105 and the three groups of rinse liquid tanks 106 are used to carry out step-by-step overflow precipitation purification of the liquid sprayed and rinsed on the semiconductor device in groups, and guide the rinsing liquid after precipitation purification to flow back to the ST liquid tank 105 step by step. The four groups of ST liquid tanks 105 are the ST1 liquid tank, the ST2 liquid tank, the ST3 liquid tank, and the ST4 liquid tank from left to right based on the cleaning liquid tank 102. The three groups of rinse liquid tanks 106 are the rinse 1 liquid tank, the rinse 2 liquid tank, and the rinse 3 liquid tank from left to right based on the ST liquid tank 105. Between the inner walls of the cleaning machine body 1 above the ports of the ST liquid tank 105, the JCI spray pipe 108 is fixedly suspended. The JCI spray pipe 108 is symmetrically distributed on the upper and lower sides of the inner cavity body 101, and the water-cutting air knives 107 are fixedly suspended at uniform intervals between the inner walls of the cleaning machine body 1 between the JCI spray pipes 108. On the top of the cleaning machine body 1 above the water-cutting air knives 107, the air exhaust ports 3 are arranged at uniform intervals. Between the inner walls of the cleaning machine body 1 above the ports of the rinse liquid tank 106, the general spray pipe 103 is fixedly suspended. The general spray pipe is symmetrically distributed on the upper and lower sides of the inner cavity body 101, and the water-cutting air knives 107 are fixedly suspended at uniform intervals between the inner walls of the cleaning machine body between the general spray pipes 103. On the top of the cleaning machine body above the water-cutting air knives 107, the air exhaust ports 3 are arranged at uniform intervals. An ST1 drain valve, an ST2 drain valve, and an ST3 drain valve are respectively arranged on the ST1 liquid tank, the ST2 liquid tank, and the ST3 liquid tank in sequence; finally, these 3 valves are all incorporated into the cleaning / rinsing total drain port. The ST1 drain valve, the ST2 drain valve, and the ST3 drain valve are in a normally closed state.

[0038] Taking the ST3 liquid tank as an example, a DI water inlet ST3 angle seat valve, a DI water inlet ST3 manual ball valve, an ST3 liquid tank zero-discharge ball valve, an ST4 liquid inlet ST3 pneumatic diaphragm pump, an inlet ST3 pneumatic diaphragm pump angle seat valve, and an inlet ST3 pneumatic diaphragm pump regulating valve are provided on the ST3 liquid tank. The DI water inlet angle seat valve is in a normally closed state, and the DI water ball valve is in a normally open state. The DI water ball valve and the DI water inlet angle seat valve are sequentially arranged on the DI water addition pipeline. When the DI water inlet angle seat valve automatically opens, DI water can be added to the ST3 liquid tank. Open or start the ST4 liquid inlet ST3 pneumatic diaphragm pump and the ST4 liquid inlet ST3 angle seat valve sequentially arranged on the pipeline for the liquid in the ST4 liquid tank to flow into the ST3 liquid tank, and the liquid in the ST4 liquid tank will be automatically added to the ST3 liquid tank. Open the ST3 liquid tank zero-discharge ball valve, and the liquid in the ST3 liquid tank will flow to the zero-discharge water pump. In this way, the rinsing liquid in each rinsing liquid tank 106 gradually overflows and flows back to the ST liquid tank 105 in sequence. When the concentration tester automatically detects that the concentration of the cleaning liquid in the cleaning liquid tank 102 is lower than the set concentration, the high-concentration cleaning liquid in the concentrated liquid tank 104 is automatically added to the cleaning liquid tank 102 through an electric diaphragm pump. When the concentration tester automatically detects that the concentration of the cleaning liquid in the cleaning liquid tank 102 reaches the set value, the addition of the high-concentration cleaning liquid in the concentrated liquid tank 104 to the cleaning liquid tank 102 stops.

[0039] In this embodiment, the semiconductor devices to be cleaned after processing are sequentially placed on the top of the roller sheets 22 between the inner cavities 101. The stepper reduction motor 26 is started. The stepper reduction motor 26 drives the rotation of the drive main shafts 24 fixed to the tops of the edge plates on both sides of the inner cavity 101 through the cooperation of double-row sprockets, stainless steel chains 27 and positioning sprockets. When the drive main shafts 24 rotate, the main shaft magnetic wheels 25 are driven to rotate. Since the drive main shafts 24 are perpendicular to the roller main shafts 21, that is, the axial directions of the roller magnetic wheels 23 and the main shaft magnetic wheels 25 are perpendicular to each other. Therefore, when the main shaft magnetic wheels 25 rotate, the main shaft magnetic wheels 25 (radially magnetized) and the roller magnetic wheels 23 (axially magnetized) are orthogonally arranged. The tangential electromagnetic force generated by the magnetic field alternation drives the rotation of the roller magnetic wheels 23, realizing non-contact power transmission. Thus, the roller magnetic wheels 23 drive the rotation of the roller main shafts 21 between the side walls of the inner cavity 101, and then drive the rotation of the roller sheets 22 on the outer walls of the roller main shafts 21. The arrangement spacing of the roller sheets 22 is fixed. The friction between the roller sheets 22 and the PCBA and semiconductor devices is used to horizontally drag them forward, ensuring the stable transportation of the PCBA and semiconductor devices without deviation. Through the magnetic force drive between the roller magnetic wheels 23 and the main shaft magnetic wheels 25, when the PCBA and semiconductor devices are cleaned and transported by the traditional cleaning device relying on gear meshing transmission, the problem of large noise generated by gear friction is avoided, realizing the silent transportation of the PCBA and semiconductor devices. At the same time, the probability of equipment failure caused by gear wear in the traditional device using gear transmission for transportation is reduced. When the PCBA and semiconductor devices are transported forward by rolling on the roller sheets 22, when the PCBA and semiconductor devices pass above the cleaning liquid tank 102, each ST liquid tank 105 and the rinsing liquid tank 106 in sequence, the general spray pipes 103 and JCI spray pipes 108 above each box body perform the cleaning, ST washing and rinsing processes on the PCBA and semiconductor devices transported by the roller sheets 22 in sequence. The liquid in the airflow discharged from the exhaust port 3 is condensed by the condenser and then flows back and drips into the cleaning liquid tank 102 at the bottom of the cleaning machine body 1, enabling the cleaning liquid to be fully and effectively recycled, reducing the consumption of the cleaning liquid of the cleaning machine. By guiding the rinsing liquid in each box body after step-by-step precipitation and purification to flow back into the ST liquid tank 105, the discharge amount of the rinsing liquid is reduced, protecting the environment and saving the production cost. The high-concentration cleaning liquid in the concentrated liquid tank 104 is guided by an electric diaphragm pump to flow into the cleaning liquid tank 102 for liquid concentration adjustment, improving the qualified rate of cleaning and reducing the manual addition workload of the operator.

[0040] According to another embodiment of the present invention in combination with Figures 6-10The roller magnetic wheel 23 includes a fixed ring seat 231 movably sleeved on the outer wall of the two ends of the roller main shaft 21 and a first threaded hole 2311 opened on the side wall of the fixed ring seat 231. The first threaded hole 2311 is threadedly connected with a fixing bolt 2312. The fixing bolt 2312 penetrates the roller main shaft 21 sleeved in the middle hole of the fixed ring seat 231. A toggle ring 232 is rotatably arranged on the side wall of the end of the fixed ring seat 231. The two ends of the side wall of the end of the fixed ring seat 231 in the middle hole of the toggle ring 232 are movably arranged with a driven gear 233. Two concentric annular grooves are opened on the outer wall of the end of the fixed ring seat 231. The toggle ring 232 and the driven gear 233 are rotatably arranged by the protrusions on their respective outer walls engaging with the corresponding annular grooves. On the outer wall of the fixed ring seat 231, the side end of the driven gear 233 meshes with the teeth on the inner wall of the middle hole of the toggle ring 232. A positioning rod 234 is provided through the middle of the driven gear 233. A spiral steel bar 235 is fixedly connected to the outer wall of the end of the positioning rod 234. A magnetic wheel body 236 is movably sleeved on the outer wall of the roller main shaft 21 outside the toggle ring 232. A positioning hole 237 is provided on the outer wall of the magnetic wheel body 236 close to the toggle ring 232. The positioning hole 237 is arranged corresponding to the positioning rod 234. A convex hole 238 is provided inside the magnetic wheel body 236 inside the positioning hole 237. The convex hole 238 is connected to the positioning hole 237. The structural composition of the spindle magnetic wheel 25 is the same as that of the roller magnetic wheel 23.

[0041] An accommodating cavity 2314 is provided on the side wall of the fixing ring seat 231 corresponding to the positioning rod 234, and the accommodating cavity 2314 is communicated with the first threaded hole 2311. A limiting hole 2313 is provided on the side wall of the fixing bolt 2312 corresponding to the accommodating cavity 2314. One end of the positioning rod 234 away from the spiral steel bar 235 is movably sleeved in the accommodating cavity 2314. A limiting protrusion 2315 is provided on the inner wall of one side of the accommodating cavity 2314, and the end of the limiting protrusion 2315 is movably engaged with the side wall of the positioning rod 234.

[0042] The positioning rod 234 includes a positioning cylinder 2341 fixedly penetrating through the side wall at the middle of the driven gear 233, a second threaded hole 2342 is provided on the side wall of the end of the positioning cylinder 2341 away from the spiral steel bar 235, a T-screw 2343 is movably sleeved inside the positioning cylinder 2341, the end of the T-screw 2343 is threadedly sleeved in the second threaded hole 2342, and a sliding groove 2344 is provided on the outer wall of one side of the straight rod of the T-screw 2343, and the end of the limiting protrusion 2315 is movably engaged in the sliding groove 2344 on the outside of the positioning cylinder 2341.

[0043] When the magnetic wheel body 236 fits the side wall of the toggle ring 232 and the end of the spiral steel bar 235 is movably engaged in the small aperture port of the convex hole 238, the end of the T-screw 2343 extends through the accommodating cavity 2314 to the limiting hole 2313 on the side wall of the fixing bolt 2312.

[0044] In this embodiment, after the fixing ring seat 231 is sleeved on the outer wall of the end of the roller main shaft 21, the fixing bolt 2312 is screwed into the first threaded hole 2311 on the fixing ring seat 231, and the fixing bolt 2312 is inserted into the installation space on the outer wall of the end of the roller main shaft 21, and the fixing ring seat 231 is fixed on the outer wall of the end of the roller main shaft 21. Then, the magnetic wheel body 236 is sleeved on the outer wall of the end of the roller main shaft 21 outside the fixing ring seat 231, so that the magnetic wheel body 236 is attached to the side wall of the toggle ring 232. The end of the positioning rod 234 on the outer wall of the driven gear 233 inside the middle hole of the toggle ring 232 is inserted into the positioning hole 237 on the side wall of the magnetic wheel body 236, so that the spiral steel bar 235 at the end of the positioning cylinder 2341 is compressed. At this time, the toggle ring 232 is rotated to drive the driven gear 233 to rotate, and the driven gear 233 drives the spiral steel bar 235 to rotate by using the positioning cylinder 2341. When the spiral steel bar 235 rotates, its end hooks the small aperture port of the convex hole 238, thereby causing the spiral steel bar 235 to rotate inward. The side wall of the small-diameter port of the convex hole 238 is engaged to fix the fixing ring seat 231 and the magnetic wheel body 236. When the positioning cylinder 2341 rotates, the second threaded hole 2342 is used to rotate along the thread on the T-screw 2343. Due to the engagement restriction of the limiting protrusion 2315 on the sliding groove 2344 on the outer wall of the T-screw 2343, the T-screw 2343 moves horizontally and extends out of the positioning cylinder 2341, and then the end extends through the accommodating cavity 2314 to the limiting hole 2313 on the side wall of the fixing bolt 2312 , realizing anti-falling locking of the fixing bolt 2312, realizing quick installation of the roller magnetic wheel 23, further ensuring the installation stability of the roller magnetic wheel 23, avoiding loosening and instability of the roller magnetic wheel 23, on the contrary, the roller magnetic wheel 23 can be disassembled, and the disassembly and assembly method of the spindle magnetic wheel 25 is the same as that of the roller magnetic wheel 23, ensuring the convenience of disassembly and assembly of the spindle magnetic wheel 25 and the roller magnetic wheel 23 when the spindle magnetic wheel 25 and the roller magnetic wheel 23 are accidentally damaged or demagnetized, and easy to use.

[0045] According to another embodiment of the present invention, Figures 3-12As shown. The front upper door assembly includes a gas spring fixing seat, a gas spring telescopic bracket 8, a gas spring, a bent rod 7, a hinge 11 and a front upper door 6. A fixed frame 4 is welded to the side wall at the top of the cleaning machine body 1 on both sides above the inner cavity 101, and a number of observation and inspection ports 5 are evenly spaced on the side wall of the fixed frame 4. The front upper door 6 is movably connected to the corresponding observation and inspection ports 5 on the outer edge of the bottom of the fixed frame 4 through hinges 11. The two hinges 11 thread the upper end of the front upper door 6 to the outer wall of the fixed frame 4. Transparent tempered glass is embedded on the side wall of the front upper door 6. The bent rods 7 are fixedly connected to the two sides of the inner wall of the fixed end of the front upper door 6. The end of the bent rod 7 is movably connected to the gas spring telescopic bracket 8. The end of the gas spring telescopic bracket 8 is movably connected to the gas spring 9 and the gas spring fixing seat 10 in turn. The end of the gas spring fixing seat 10 is fixedly connected to the inner wall of the vertical rod of the fixing frame 4 close to the cleaning machine body 1.

[0046] In this embodiment, when the front upper door 6 needs to be closed, the opening angles of the two hinges 11 become smaller, and the front upper door 6 is closely attached to the outer surface of the fixed frame 4. The front upper door 6 pushes the bent rod 7 to rotate inwards with the end connected to the front upper door 6 as the origin, and the bent rod 7 pushes the end connected to the gas spring telescopic bracket 8 as the origin to rotate outwards; when the front upper door 6 needs to be opened, the bent rod 7 rotates inwards with the end connected to the gas spring telescopic bracket 8 as the origin, and pushes the bent rod 7 to rotate outwards with the end of the gas spring telescopic bracket 8 as the origin. After the gas spring telescopic bracket 8 is extended, the other end of the bent rod 7 pushes the front upper door 6 to open outwards, the opening angles of the two hinges 11 become larger, and the gas spring telescopic bracket 8 maintains the opening angle of the front upper door 6, which is convenient for the staff to maintain and inspect the internal facilities of the cleaning machine body 1 from the observation and inspection port 5.

[0047] The technical scope of the present invention is not limited to the contents in the above description. Those skilled in the art can make various deformations and modifications to the above embodiments without departing from the technical idea of ​​the present invention, and these deformations and modifications should all fall within the protection scope of the present invention.

Claims

1. A PCBA and semiconductor fully automatic intelligent cleaning machine, characterized in that: It comprises a cleaning machine body and an inner cavity arranged inside the cleaning machine body, a magnetic wheel roller line assembly is arranged inside the inner cavity, a cleaning liquid tank is arranged at the bottom of one end of the cleaning machine body, and universal spray pipes are respectively fixedly arranged between the inner walls of the cleaning machine body on the upper and lower sides of the inner cavity, and the universal spray pipes are located above the cleaning liquid tank port; The magnetic wheel roller line assembly includes a roller main shaft movably and evenly arranged between the side walls of the inner cavity body, and roller sheets are evenly fixedly connected on the outer wall of the roller main shaft between the side walls of the inner cavity body, and both ends of the roller main shaft extend through and extend to the outside of the side walls of the inner cavity body, and roller magnetic wheels are fixedly connected to the outer walls at the ends of both ends of the roller main shaft, and a driving main shaft is fixedly arranged on the top of the plate on both sides of the inner cavity below the roller magnetic wheel through bearing seats, and a main shaft magnetic wheel is fixedly arranged on the outer wall of the driving main shaft corresponding to the roller magnetic wheel, and the top of the main shaft magnetic wheel is arranged close to the bottom of the roller magnetic wheel, and a stepping reduction motor is fixedly arranged inside the cleaning machine body below the inner cavity, and two groups of stainless steel chains are sleeved on the outer wall of the stepping reduction motor transmission shaft, and the other ends of the two groups of stainless steel chains penetrate through the two sides of the inner cavity along the plate and are movably sleeved on the outer wall of the driving main shaft.

2. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 1 is characterized in that: A double-row sprocket is fixedly connected to the outer wall of the stepping reduction motor transmission shaft, and positioning sprockets are fixedly connected to the outer wall of the driving main shaft corresponding to the double-row sprockets on the top of the plate on both sides of the inner cavity. One end of the two groups of stainless steel chains is movably sleeved on the outer wall of the double-row sprocket, and the other end is movably sleeved on the outer wall of the positioning sprocket.

3. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 1 is characterized in that: The lower end of the liquid extraction pipe of the universal spray pipe extends to the inside of the cleaning liquid tank. A concentrated liquid tank is arranged inside the cleaning machine body on one side of the cleaning liquid tank. An electric diaphragm pump is arranged between the concentrated liquid tank and the cleaning liquid tank.

4. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 3 is characterized in that: Four groups of ST liquid tanks and three groups of rinsing liquid tanks are arranged side by side in sequence at the bottom of the interior of the cleaning machine body adjacent to the other side of the cleaning liquid tank. The four groups of ST liquid tanks and the three groups of rinsing liquid tanks are used to perform overflow sedimentation purification on a group basis for the liquid sprayed for rinsing PCBAs and semiconductor devices, and guide the rinse liquid after sedimentation purification to flow back into the ST liquid tank step by step.

5. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 4 is characterized in that: A JCI spray pipe is fixedly suspended between the inner walls of the cleaning machine body above the ST liquid tank port, and the JCI spray pipe is symmetrically distributed on the upper and lower sides of the inner cavity, and water-cut air knives are fixedly suspended at even intervals between the inner walls of the cleaning machine body between the JCI spray pipes, a condenser is fixedly arranged between the inner walls of the cleaning machine body above the water-cut air knife, and exhaust outlets are evenly arranged on the top of the cleaning machine body; the universal spray pipe is fixedly suspended between the inner walls of the cleaning machine body above the rinse liquid tank port, and the universal spray pipe is symmetrically distributed on the upper and lower sides of the inner cavity, and the water-cut air knives are fixedly suspended at even intervals between the inner walls of the cleaning machine body between the universal spray pipes, and exhaust outlets are evenly arranged on the top of the cleaning machine body above the water-cut air knife.

6. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 1, characterized in that: The roller magnetic wheel comprises a fixing ring seat movably sleeved on the outer wall at the two ends of the roller main shaft and a first threaded hole opened on the side wall of the fixing ring seat, wherein the first threaded hole is threadedly connected with a fixing bolt, the fixing bolt passes through the roller main shaft arranged in the middle hole of the fixing ring seat, and a toggle ring is rotatably arranged on the side wall of the end of the fixing ring seat, and the two ends of the side wall of the end of the fixing ring seat in the middle hole of the toggle ring are respectively movably arranged with a driven gear, the side ends of the driven gear are meshed with the teeth on the inner wall of the middle hole of the toggle ring, a positioning rod is penetrated through the middle part of the driven gear, a spiral steel bar is fixedly connected to the outer wall of the end of the positioning rod, a magnetic wheel body is movably sleeved on the outer wall of the roller main shaft outside the toggle ring, a positioning hole is opened on the outer wall of the magnetic wheel body close to the toggle ring, the positioning hole is arranged corresponding to the positioning rod, and a convex hole is opened inside the magnetic wheel body inside the positioning hole, and the convex hole is connected with the positioning hole.

7. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 6, characterized in that: An accommodating cavity is provided on the side wall of the fixing ring seat corresponding to the positioning rod, and the accommodating cavity is communicated with the first threaded hole. A limiting hole is provided on the side wall of the fixing bolt corresponding to the accommodating cavity. One end of the positioning rod away from the spiral steel bar is movably sleeved in the accommodating cavity. A limiting protrusion is provided on the inner wall of one side of the accommodating cavity, and the end of the limiting protrusion is movably engaged with the side wall of the positioning rod.

8. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 7, characterized in that: The positioning rod includes a positioning cylinder fixedly arranged on the side wall passing through the middle part of the driven gear, a second threaded hole is provided on the side wall of the end of the positioning cylinder away from the spiral steel bar, a T-screw is movably sleeved inside the positioning cylinder, the end of the T-screw is threadedly sleeved in the second threaded hole, and a sliding groove is provided on the outer wall of one side of the T-screw straight rod, and the end of the limiting protrusion is movably engaged in the sliding groove on the outside of the positioning cylinder.

9. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 8, characterized in that: When the magnetic wheel body is attached to the side wall of the toggle ring and the end of the spiral steel bar is movably engaged in the small-diameter port of the convex hole, the end of the T-shaped screw extends through the accommodating cavity to the limiting hole on the side wall of the fixing bolt.

10. The PCBA and semiconductor fully automatic intelligent cleaning machine according to claim 1, characterized in that: A fixing frame is fixedly arranged on the side walls at the top of the cleaning machine body on both sides above the inner cavity, a plurality of observation and inspection openings are evenly spaced on the side walls of the fixing frame, front upper doors are movably connected to the side walls along the outer edge of the bottom of the fixing frame corresponding to the observation and inspection openings, curved rods are fixedly connected to the two sides of the inner wall of the fixed end of the front upper door, the end of the curved rod is movably connected to a gas spring telescopic bracket, the end of the gas spring telescopic bracket is movably connected to a gas spring and a gas spring fixing seat in turn, and the end of the gas spring fixing seat is fixedly connected to the inner wall of the vertical rod of the fixing frame close to the cleaning machine body.

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