Anti-clogging gas spray head

Abstract

The present application relates to the field of semiconductor processing, specifically to a kind of anti-clogging gas shower head, including gas shower tray, preliminary mixing component, strengthening mixing component, temperature control component and collection and processing component, the lower end of gas shower tray is equipped with several gas outlet, before multiple reaction gas sources participate in processing, in reaction assembly pipe, through preliminary mixing component and strengthening mixing component, multiple gas sources are mixed fully, and during mixing, heat is released fully, then through temperature control component, the heat generated is effectively treated in reaction assembly pipe, so that the mixed processing gas is in stable state and sprayed out of gas shower tray, to avoid the clogging problem that gas shower tray is in high temperature for a long time possibly produces, then through collection and processing component, the condensate of mixed gas possibly produced is independently collected and discharged, while not affecting gas use, condensate does not occur the phenomenon of clogging gas hole.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor processing, in particular to a kind of anti-clogging gas shower head. BACKGROUND

[0002] In the semiconductor industry, semiconductor products often need to form the required film or crystalline structure on the semiconductor material when preparing by gas phase growth technology, when carrying out gas phase growth processing, one or more gas mixtures participating in reaction are uniformly sent into process chamber by gas shower head;

[0003] The existing gas shower head for semiconductor gas phase growth, when using, a plurality of reaction gases are mixed into uniform composite gas in its interior, and then are uniformly sprayed out through a plurality of small holes below the gas shower head, but when the plurality of gases are mixed in the gas shower head, molecules are in constant thermal motion, and they frequently collide, in the semiconductor gas phase growth system, the gas is usually transported and reacted under certain pressure and flow rate, the collision frequency between molecules is higher, so that the temperature of mixed gas increases, when the temperature in the interior of the gas shower head is high for a long time, internal material peeling may occur, thereby causing the small gas outlet holes to be blocked, in addition, when the gas participating in reaction is high-boiling metal organic compound, it may be cooled and condensed into liquid or solid when being transported from high-temperature gas source to relatively low-temperature shower head area, which also causes the small gas outlet holes to be blocked. SUMMARY

[0004] The present application aims to provide an anti-clogging gas shower head to solve the problems raised in the background.

[0005] To achieve the above object, the present application provides the following technical scheme: an anti-clogging gas shower head, comprising:

[0006] A gas shower disc is provided with a plurality of gas outlet holes at the lower end, and a mounting cylinder is communicated at the center of the upper end of the gas shower disc, a reaction assembly pipe is threadedly and sealingly inserted into the mounting cylinder, and a multi-hole interface is provided at the upper end of the reaction assembly pipe;

[0007] A preliminary mixing assembly is arranged at the upper end in the reaction assembly pipe, and the preliminary mixing assembly comprises a conical mixing chamber and a plurality of spiral gas pipes;

[0008] A reinforced mixing assembly is inserted into the reaction assembly pipe and arranged at the lower end in the mounting cylinder, and the reinforced mixing assembly comprises a reinforced mixing seat, a central through pipe is vertically arranged at the center of the reinforced mixing seat, and a mixing chamber is vertically arranged between the upper end of the reinforced mixing seat and the central through pipe;

[0009] The temperature control assembly comprises a first refrigerant groove, a second refrigerant groove and a third refrigerant groove, the first refrigerant groove and the second refrigerant groove are arranged in the reinforced mixing seat, and the third refrigerant groove is arranged in the reaction assembly pipe close to one side of the conical mixing cavity.

[0010] The collection and treatment assembly is arranged at the lower end of the reaction assembly pipe arranged in the mounting cylinder, and the collection and treatment assembly comprises a collection cylinder, the lower end of the collection cylinder is provided with a collection ball groove, and the lower end of the central connecting pipe is inserted into the collection ball groove.

[0011] Preferably, a plurality of reversing air grooves are symmetrically arranged at the upper end of the conical mixing cavity of the reaction assembly pipe, a spiral air pipe is arranged in the conical mixing cavity and communicated with one side of the reversing air groove, the upper end of the conical mixing cavity is in a cylindrical groove structure, and the lower end of the conical mixing cavity is in a conical structure, the side edges of the spiral air pipe are in contact with the inner side wall of the conical mixing cavity, and a reaction gas source connecting groove is arranged in the reversing air groove and penetrates the multi-hole interface.

[0012] Preferably, an assembly groove is arranged at the lower end of the reaction assembly pipe, the upper end of the reinforced mixing seat is inserted into the assembly groove and fixedly connected through a plurality of bolts, and the upper end of the central connecting pipe is vertically inserted into the conical mixing cavity, and the diameter of the lower end of the conical mixing cavity is greater than the diameter of the central connecting pipe.

[0013] Preferably, a refrigerant input groove is arranged in the conical mixing cavity communicated with the central connecting pipe, a conical butt joint groove is arranged at the lower end of the refrigerant input groove, and the upper end of the central connecting pipe is inserted into the conical butt joint groove through a sealing ring.

[0014] Preferably, the lower end of the conical mixing cavity is arranged corresponding to the mixing cavity of the reinforced mixing seat, a conical flow guide groove, a reversing flow guide groove, a first arc-shaped flow disturbance groove and a second arc-shaped flow disturbance groove are arranged in the mixing cavity of the reinforced mixing seat from top to bottom on both sides, the conical flow guide groove and the first arc-shaped flow disturbance groove are connected through a partition plate, the reversing flow guide groove and the second arc-shaped flow disturbance groove are connected through a partition plate, and the two partition plates are arranged in a staggered manner.

[0015] Preferably, a plurality of mixing penetration grooves are arranged in the mixing cavity of the reinforced mixing seat and penetrate the lower end, the first refrigerant groove is arranged in the center of the reinforced mixing seat, the second refrigerant groove is arranged on the outer circumferential side of the reinforced mixing seat close to the mixing cavity, the heat absorbed by the reversing flow guide groove and the second arc-shaped flow disturbance groove can be transferred to the first refrigerant groove, the heat absorbed by the conical flow guide groove and the first arc-shaped flow disturbance groove can be transferred to the second refrigerant groove, a plurality of staggered connecting grooves are arranged in the first refrigerant groove and the second refrigerant groove and horizontally communicated, the plurality of staggered connecting grooves and the plurality of mixing penetration grooves are arranged in a staggered manner, and the upper and lower ends of the central connecting pipe are respectively communicated with the refrigerant input groove and the first refrigerant groove.

[0016] Preferably, the upper end of the second refrigerant tank is arranged through the reinforced mixing seat, the assembly tank of the reaction assembly pipe is provided with an annular butt joint groove at the upper end, the upper end of the annular butt joint groove is connected with the third refrigerant tank, the reinforced mixing seat is inserted into the annular butt joint groove through the annular sealing ring on one side of the second refrigerant tank, the upper end of the annular discharge groove provided in the reaction assembly pipe at the upper end of the third refrigerant tank is provided with a circulating discharge joint arranged through the reaction assembly pipe.

[0017] Preferably, the lower end of the reaction assembly pipe is provided with a threaded connection ring, the outer circumferential side of the threaded connection ring is provided with a threaded connection sleeve through threaded sleeve connection, the lower end of the threaded connection sleeve is provided with a tubular ceramic inorganic membrane, the upper end of the collecting cylinder is inserted into the inner circumferential side of the threaded connection ring through threaded connection, and the lower end of the reinforced mixing seat is inserted into the upper end of the collecting cylinder.

[0018] Preferably, the outer circumferential side of the collecting cylinder is provided with a plurality of reversing air holes which are inclined inward.

[0019] Preferably, the inner cavity of the center connecting pipe arranged in the inner cavity of the collecting ball groove is provided with a lifting accommodation groove, the inner diameter of the lifting accommodation groove is larger than the inner diameter of the center connecting pipe, the lifting accommodation groove is horizontally provided with a spring partition plate through a supporting rod, the lower end of the spring partition plate is provided with a downward spring, the lower end of the downward spring is provided with an anti-falling plate, the lower end of the anti-falling plate is provided with a piston rod at the center, the piston rod is vertically movably inserted into the inner cavity of the center connecting pipe, the length of the piston rod is greater than the length of the downward spring, the lower end of the piston rod is provided with an extension rod at the center, the extension rod extends out of the center connecting pipe and is provided with a sealing ball head, the collecting ball groove is provided with a sealing ball groove at the center of the lower end, the sealing ball head is inserted into the sealing ball groove, the inner center of the piston rod is provided with a transfer groove, the transfer groove is provided with a plurality of suction holes arranged through the outer circumferential side of the piston rod, and the center of the sealing ball head is connected with the transfer groove to form a suction groove.

[0020] Compared with the prior art, the present application has the following beneficial effects:

[0021] Before a plurality of reaction gas sources participate in processing, the plurality of gas sources are fully mixed in the reaction assembly pipe through the preliminary mixing assembly and the reinforced mixing assembly, heat is fully released during mixing, and then the heat generated is effectively treated in the reaction assembly pipe through the temperature control assembly, so that the mixed processing gas is in a stable state and sprayed out of the gas spraying disc, thereby avoiding the clogging problem that may be caused by the gas spraying disc being at high temperature for a long time. Then, the mixed gas that may generate condensed water is independently collected and discharged through the collection and treatment assembly, so that the use of the gas is not affected and the phenomenon of condensed water clogging the air holes does not occur. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a first perspective view of the structure of the present application.

[0023] Figure 2 This is a second-view schematic diagram of the structure of the present invention;

[0024] Figure 3 This is a schematic diagram of the side cross-section structure of the present invention;

[0025] Figure 4 For the present invention Figure 3 Schematic diagram of part A;

[0026] Figure 5 For the present invention Figure 4 Schematic diagram of part B;

[0027] Figure 6 For the present invention Figure 3 Schematic diagram of part C;

[0028] Figure 7 For the present invention Figure 6 Schematic diagram of part D;

[0029] Figure 8 For the present invention Figure 3 Schematic diagram of part E;

[0030] Figure 9 For the present invention Figure 8 Schematic diagram of part F;

[0031] Figure 10 This is a schematic diagram of the disassembled structure of the reaction assembly tube and the reinforced mixing seat of the present invention;

[0032] Figure 11 For the present invention Figure 10 Schematic diagram of part G;

[0033] Figure 12 This is a schematic diagram showing the disassembled structure of the collection cylinder and the tubular ceramic inorganic membrane of the present invention.

[0034] In the diagram: 1. Gas spray plate; 2. Mounting cylinder; 3. Reaction assembly pipe; 4. Multi-hole interface; 5. Conical mixing chamber; 6. Reaction gas source connection groove; 7. Reversing gas groove; 8. Spiral gas pipe; 9. Enhanced mixing seat; 10. Central connecting pipe; 11. Conical guide groove; 12. Reversing guide groove; 13. First arc-shaped turbulence groove; 14. Second arc-shaped turbulence groove; 15. Mixing permeation groove; 16. Threaded connecting ring; 17. Collection cylinder; 18. Threaded connecting sleeve; 19. Tubular ceramic inorganic membrane; 20. Reversing gas hole; 21. First refrigerant tank; 22. Second refrigerant tank; 23. Offset connecting groove; 24. Annular connecting groove; 25. Third refrigerant tank; 26. Annular discharge groove; 27. Refrigerant input groove; 28. Circulation discharge connector; 29. ​​Collection ball groove; 30. Lifting clearance groove; 31. Piston rod; 32. Anti-detachment plate; 33. Spring partition plate; 34. Downward pressure spring; 35. Sealing ball groove; 36. Sealing ball head; 37. Suction groove; 38. Suction hole. Detailed Implementation

[0035] In order to make the purpose, technical solutions of the present application, and the advantages are more clear and obvious, the following will be further described in detail with the embodiments of the present application. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, rather than all the embodiments, and are only used to explain the embodiments of the present application, and do not limit the embodiments of the present application. All other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0036] Please refer to Figures 1-12 The present application provides the following technical solutions:

[0037] Embodiment one: a kind of anti-clogging gas spray head, including gas spray disc 1 and preliminary mixing component, the lower end of gas spray disc 1 is equipped with several gas outlets, the upper end of gas spray disc 1 is centrally communicated and equipped with installation cylinder 2, installation cylinder 2 is equipped with reaction assembly pipe 3 by thread sealing plug-in, the upper end of reaction assembly pipe 3 is equipped with multi-hole interface 4, reaction assembly pipe 3 can be detachably connected with installation cylinder 2 by screw thread, to facilitate the replacement of active position in later period, the sealing mode is the way of thread cooperation sealing rubber sheet, installation cylinder 2 and gas spray disc 1 are welded and fixedly arranged.

[0038] Preliminary mixing component is arranged in the upper end of reaction assembly pipe 3, preliminary mixing component includes conical mixing cavity 5 and several spiral air pipes 8, reaction assembly pipe 3 is symmetrically provided with several reversing air grooves 7 at the upper end of conical mixing cavity 5, conical mixing cavity 5 is provided with spiral air pipe 8 at one side of reversing air groove 7, the upper end of conical mixing cavity 5 is cylindrical groove structure, and the lower end is conical structure, the side of spiral air pipe 8 is in contact with the inner wall of conical mixing cavity 5, and the reversing air groove 7 is provided with reaction gas source connecting groove 6 through multi-hole interface 4, according to the number of gases required to participate in the reaction, select the reaction assembly pipe 3 with corresponding number of reaction gas source connecting grooves 6 and spiral air pipes 8, when multiple gases participating in the reaction enter the reaction gas source connecting groove 6 under high pressure, through reversing air groove 7 into spiral air pipe 8, the direction of airflow is changed, so that multiple air flows spiral along the inner wall of conical mixing cavity 5 in conical mixing cavity 5, and under the action of conical face, preliminary mixing is carried out.

[0039] The reinforcing mixing assembly is arranged to further reinforce the mixing of the reaction gas after the preliminary mixing, the reinforcing mixing assembly is inserted into the lower end of the installation cylinder 2, the reinforcing mixing assembly comprises a reinforcing mixing seat 9, a central through pipe 10 is vertically arranged in the center of the reinforcing mixing seat 9, a mixing cavity is vertically arranged between the upper end of the reinforcing mixing seat 9 and the central through pipe 10, the lower end of the reaction assembly pipe 3 is provided with an assembly groove, the upper end of the reinforcing mixing seat 9 is inserted into the assembly groove and is fixedly connected through a plurality of bolts, the upper end of the central through pipe 10 is vertically inserted into the conical mixing cavity 5, the diameter of the lower end of the conical mixing cavity 5 is larger than the diameter of the central through pipe 10, the reinforcing mixing seat 9 and the reaction assembly pipe 3 are detachably connected, when the reinforcing mixing seat 9 is contaminated or damaged, it can be quickly replaced, and the gas after the preliminary mixing enters the mixing cavity of the reinforcing mixing seat 9 for sufficient contact.

[0040] The temperature control assembly is arranged to control the heating phenomenon of the gas mixing in the conical mixing cavity 5 and the reinforcing mixing seat 9, so as to avoid the part of the gas spray tray 1 in contact with the gas being in a high temperature state for a long time, the temperature control assembly comprises a first coolant groove 21, a second coolant groove 22 and a third coolant groove 25, the first coolant groove 21 and the second coolant groove 22 are arranged in the reinforcing mixing seat 9, the third coolant groove 25 is arranged in the reaction assembly pipe 3 close to one side of the conical mixing cavity 5, the lower end of the conical mixing cavity 5 and the mixing cavity of the reinforcing mixing seat 9 are correspondingly arranged, the mixing cavity of the reinforcing mixing seat 9 is provided with a conical flow guide groove 11, a reversing flow guide groove 12, a first arc-shaped flow disturbance groove 13 and a second arc-shaped flow disturbance groove 14 from top to bottom on both sides, the conical flow guide groove 11 and the first arc-shaped flow disturbance groove 13 are connected through a partition plate, the reversing flow guide groove 12 and the second arc-shaped flow disturbance groove 14 are connected through a partition plate, and the two partition plates are arranged in a staggered manner, a plurality of mixing transparent grooves 15 are vertically arranged in the lower end of the mixing cavity of the reinforcing mixing seat 9, the first coolant groove 21 is arranged in the center of the reinforcing mixing seat 9, the second coolant groove 22 is arranged on the outer circumferential side of the reinforcing mixing seat 9 close to the mixing cavity, the heat absorbed by the reversing flow guide groove 12 and the second arc-shaped flow disturbance groove 14 can be transferred to the first coolant groove 21, the heat absorbed by the conical flow guide groove 11 and the first arc-shaped flow disturbance groove 13 can be transferred to the second coolant groove 22, the arrangement of the conical flow guide groove 11, the reversing flow guide groove 12, the first arc-shaped flow disturbance groove 13 and the second arc-shaped flow disturbance groove 14 can make the gas in the conical mixing cavity 5 disturb the flow in the reinforcing mixing seat 9, realize repeated contact and collision of multiple gases in the interior, and then be discharged from the mixing transparent groove 15;

[0041] When the cold source substance is sent into the first coolant groove 21, the second coolant groove 22 and the third coolant groove 25, the heat of the conical flow guide groove 11, the reversing flow guide groove 12, the first arc-shaped flow disturbance groove 13, the second arc-shaped flow disturbance groove 14 and the side wall of the conical mixing cavity 5 can be controlled, when the temperature is relatively high, the temperature can be lowered, and when the temperature is relatively low, the temperature can be supplemented.

[0042] A plurality of staggered connecting grooves 23 are formed in the lower end of the first coolant groove 21 and the lower end of the second coolant groove 22, and the staggered connecting grooves 23 are arranged staggeredly with the mixed and discharged grooves 15. The central connecting tapered mixing cavity 5 of the multi-hole interface 4 is provided with a coolant input groove 27, and the lower end of the coolant input groove 27 is provided with a tapered butt joint groove. The upper end of the central connecting pipe 10 is arranged by pressing the tapered butt joint groove through a sealing ring. The central connecting pipe 10 connects the coolant input groove 27 and the first coolant groove 21. The coolant input groove 27 is connected with the coolant substance. The upper end of the second coolant groove 22 penetrates the reinforced mixing seat 9. The assembly groove of the reaction assembly pipe 3 is provided with an annular butt joint groove 24 at the upper end. The upper end of the annular butt joint groove 24 is connected with the third coolant groove 25. The reinforced mixing seat 9 is arranged in the annular butt joint groove 24 through the annular sealing ring by annular pressing and sealing. The upper end of the third coolant groove 25 in the reaction assembly pipe 3 is provided with an annular discharge groove 26. The upper end of the annular discharge groove 26 penetrates the reaction assembly pipe 3 and is provided with a circulating discharge joint 28. After the coolant substance enters the coolant input groove 27, it enters the first coolant groove 21 through the central connecting pipe 10, and then enters the second coolant groove 22 from the staggered connecting grooves 23. The coolant substance in the second coolant groove 22 is subjected to temperature control by the tapered flow guide groove 11, the reversing flow guide groove 12, the first arc-shaped flow disturbance groove 13 and the second arc-shaped flow disturbance groove 14, and then enters the third coolant groove 25 through the annular butt joint groove 24. The temperature in the tapered mixing cavity 5 is controlled, and finally discharged from the circulating discharge joint 28 for circulation.

[0043] The gas after preliminary mixing and reinforced mixing enters the gas spraying disc 1 and is blown from the gas outlet hole to the process chamber to participate in the gas phase growth processing of the semiconductor.

[0044] In the embodiment two, on the basis of the embodiment one, the collecting and processing assembly is arranged to collect and discharge the condensed water generated by the high-boiling metal organic compound gas, and the collecting and processing assembly is arranged at the lower end of the reaction assembly tube 3 arranged in the installation cylinder 2. The collecting and processing assembly comprises a collecting cylinder 17, the lower end of the collecting cylinder 17 is provided with a collecting ball groove 29, and the lower end of the central connecting tube 10 is inserted into the collecting ball groove 29. The lower end of the reaction assembly tube 3 is provided with a threaded connecting ring 16, the outer periphery of the threaded connecting ring 16 is provided with a threaded connecting sleeve 18 through threaded sleeve connection, the lower end of the threaded connecting sleeve 18 is provided with a tubular ceramic inorganic membrane 19. The upper end of the collecting cylinder 17 is inserted into the inner periphery of the threaded connecting ring 16 through threaded connection. The lower end of the reinforced mixing seat 9 is inserted into the upper end of the collecting cylinder 17. The outer periphery of the collecting cylinder 17 is inclined inwardly and provided with a plurality of reversing air holes 20. The tubular ceramic inorganic membrane 19 is sleeved and attached to the outer periphery of the collecting cylinder 17. When the high-boiling metal organic compound gas enters the conical mixing cavity 5 and the reinforced mixing seat 9, if condensed water is generated, it can be collected in the collecting ball groove 29 of the collecting cylinder 17 through the mixed transparent groove 15. During this period, the mixed gas can be blown out through the inclined reversing air holes 20, so as to avoid the condensed water from falling off the collecting cylinder 17 and the collecting ball groove 29.

[0045] The tubular ceramic inorganic membrane 19 can further strengthen the filtration of the internal particles of the mixed gas, so as to avoid the blockage of the gas outlet holes of the gas spraying disc 1. Similarly, when the gas sent into the conical mixing cavity 5 is a gas that will not condense, the tubular ceramic inorganic membrane 19 can also further strengthen the filtration of the gas.

[0046] The inner cavity of the center connection pipe 10 placed in the collecting ball groove 29 is provided with a lifting accommodation groove 30, the inner diameter of the lifting accommodation groove 30 is larger than the inner diameter of the center connection pipe 10, a spring partition plate 33 is horizontally provided in the lifting accommodation groove 30 through a supporting rod, the lower end of the spring partition plate 33 is provided with a downward spring 34, the lower end of the downward spring 34 is provided with an anti-dropping plate 32, the lower end of the anti-dropping plate 32 is provided with a piston rod 31 in the center, the piston rod 31 is vertically movably inserted into the inner cavity of the center connection pipe 10, the length of the piston rod 31 is larger than the length of the downward spring 34, the lower end of the piston rod 31 is provided with an extension rod in the center, the extension rod extends out of the center connection pipe 10 and is provided with a sealing ball head 36, the collecting ball groove 29 is provided with a sealing ball groove 35 in the center of the lower end, the sealing ball head 36 is inserted into the sealing ball groove 35, the piston rod 31 is provided with a transfer groove in the center, the transfer groove is provided with a plurality of suction holes 38 penetrating through the outer circumferential side of the piston rod 31, and the center of the sealing ball head 36 is connected with the transfer groove to form a suction groove 37, when the refrigerant input groove 27 sends in refrigerant into the center connection pipe 10, the piston rod 31 is always blocked to the suction hole 38 under the downward pressing action of the downward spring 34 and the pressure of the sent refrigerant, when it is needed to discharge the condensed water accumulated at the bottom of the collecting ball groove 29, the circulating discharge joint 28 is blocked, then the negative pressure suction equipment is connected with the refrigerant input groove 27, under the action of high negative pressure, the piston rod 31 presses the downward spring 34 and rises, at this time, the suction hole 38 is connected with the lifting accommodation groove 30, the condensed water at the bottom of the collecting ball groove 29 can be suctioned and lifted through the suction groove 37, and is discharged through the center connection pipe 10 and the refrigerant input groove 27, since the water vapor content is small in the origin, according to the situation of the used gas source, the periodical treatment can be customized, and the collecting cylinder 17 can be replaced by directly disassembling the reaction assembly pipe 3 for treatment.

[0047] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A clog-resistant gas showerhead, comprising: The utility model relates to a kind of gas spraying disc and its reaction assembly tube, including: Gas spraying disc (1), the lower end of the gas spraying disc (1) is equipped with several gas outlets, the upper end of the gas spraying disc (1) is centrally communicated and equipped with mounting cylinder (2), the reaction assembly tube (3) is inserted and sealed by thread in mounting cylinder (2), the upper end of the reaction assembly tube (3) is equipped with multi-hole interface (4); Preliminary mixing component, the preliminary mixing component is equipped in the upper end in the reaction assembly tube (3), and the preliminary mixing component includes conical mixing chamber (5) and several spiral air pipes (8); Strengthening mixing component, the strengthening mixing component is inserted and sealed by thread in the lower end of the reaction assembly tube (3) placed in mounting cylinder (2), and the strengthening mixing component includes strengthening mixing seat (9), the center of the strengthening mixing seat (9) is vertically equipped with center through pipe (10), and mixing chamber is vertically opened between the upper end of the strengthening mixing seat (9) and the center through pipe (10); Temperature control component, the temperature control component includes first refrigerant groove (21), second refrigerant groove (22) and third refrigerant groove (25), the first refrigerant groove (21) and the second refrigerant groove (22) are opened in the strengthening mixing seat (9), and the third refrigerant groove (25) is opened in the reaction assembly tube (3) and is close to one side of conical mixing chamber (5); Collecting and processing component, the collecting and processing component is equipped in the lower end of the reaction assembly tube (3) placed in mounting cylinder (2), and the collecting and processing component includes collecting cylinder (17), and the lower end of the collecting cylinder (17) is equipped with collecting ball groove (29), and the lower end of the center through pipe (10) is inserted into collecting ball groove (29); The reaction assembly tube (3) is symmetrically opened with several reversing air grooves (7) in the upper end of conical mixing chamber (5), the conical mixing chamber (5) is equipped with spiral air pipe (8) in one side of reversing air groove (7), the upper end of the conical mixing chamber (5) is cylindrical groove structure, and the lower end is conical structure, the side of the spiral air pipe (8) is contacted with the inner wall of the conical mixing chamber (5), and the reversing air groove (7) is penetrated and opened with reaction gas source connecting groove (6) in the multi-hole interface (4); The upper end of the center through pipe (10) is inserted into conical mixing chamber (5) vertically, and the center of the multi-hole interface (4) is communicated and opened with refrigerant input groove (27) in conical mixing chamber (5); The lower end of the conical mixing chamber (5) is correspondingly arranged with the mixing chamber of the strengthening mixing seat (9), the mixing chamber of the strengthening mixing seat (9) is sequentially equipped with conical flow guide groove (11), reversing flow guide groove (12), first arc-shaped flow disturbance groove (13) and second arc-shaped flow disturbance groove (14) from top to bottom on both sides, the conical flow guide groove (11) and the first arc-shaped flow disturbance groove (13) are connected by partition, the reversing flow guide groove (12) and the second arc-shaped flow disturbance groove (14) are connected by partition, and two partitions are misaligned. The mixing cavity of the reinforced mixing seat (9) is provided with a plurality of mixing and discharging grooves (15) at the lower end, the first refrigerant groove (21) is provided with the center of the reinforced mixing seat (9), and the second refrigerant groove (22) is provided with the outer circumferential side of the reinforced mixing seat (9) close to the mixing cavity; the heat absorbed by the reversing guide groove (12) and the second arc-shaped disturbance groove (14) can be transferred to the first refrigerant groove (21), the heat absorbed by the conical guide groove (11) and the first arc-shaped disturbance groove (13) can be transferred to the second refrigerant groove (22), the lower end of the first refrigerant groove (21) is in horizontal communication with the lower end of the second refrigerant groove (22) and is provided with a plurality of staggered connecting grooves (23), the plurality of staggered connecting grooves (23) are staggered with the plurality of mixing and discharging grooves (15), the upper and lower ends of the center connecting pipe (10) are respectively connected with the refrigerant input groove (27) and the first refrigerant groove (21), and the generated condensed water drops in the collecting ball groove (29) of the collecting cylinder (17) through the mixing and discharging grooves (15) and is collected.

2. A gas sparge head according to claim 1, wherein: The lower end of the reaction assembly pipe (3) is provided with an assembly groove, the upper end of the reinforced mixing seat (9) is inserted into the assembly groove and is fixedly connected through a plurality of bolts, and the diameter of the lower end of the conical mixing cavity (5) is greater than the diameter of the center connecting pipe (10).

3. A gas sparge head according to claim 2, wherein: The lower end of the refrigerant input groove (27) is provided with a conical butt joint groove, and the upper end of the center connecting pipe (10) is inserted into the conical butt joint groove through a sealing ring.

4. A gas sparge head according to claim 3, wherein: The upper end of the second refrigerant groove (22) is arranged through the reinforced mixing seat (9), the assembly groove of the reaction assembly pipe (3) is provided with an annular butt joint groove (24) at the upper end, the upper end of the annular butt joint groove (24) is in communication with the third refrigerant groove (25), one side of the reinforced mixing seat (9) provided with the second refrigerant groove (22) is inserted into the annular butt joint groove (24) through annular sealing ring annular compression sealing, and the upper end of the third refrigerant groove (25) in the reaction assembly pipe (3) is provided with an annular discharge groove (26), and the upper end of the annular discharge groove (26) is provided with a circulating discharge connector (28) through the reaction assembly pipe (3).

5. A gas sparge head according to claim 4, wherein: The lower end of the reaction assembly pipe (3) is provided with a threaded connection ring (16), the outer circumferential side of the threaded connection ring (16) is provided with a threaded connection sleeve (18) through threaded sleeve connection, the lower end of the threaded connection sleeve (18) is provided with a tubular ceramic inorganic membrane (19), the upper end of the collecting cylinder (17) is inserted into the inner circumferential side of the threaded connection ring (16) through threaded connection, and the lower end of the reinforced mixing seat (9) is inserted into the upper end of the collecting cylinder (17).

6. A gas sparge head according to claim 5, wherein: The outer circumferential side of the collecting cylinder (17) is provided with a plurality of reversing air holes (20) which are inclined inward, and the tubular ceramic inorganic membrane (19) is sleeved and attached to the outer circumferential side of the collecting cylinder (17).

7. A gas sparge head according to claim 6, wherein: The inner cavity of the center connecting pipe (10) placed in the collecting ball groove (29) is provided with a lifting accommodation groove (30), the inner diameter of the lifting accommodation groove (30) is larger than the inner diameter of the center connecting pipe (10), a spring partition plate (33) is horizontally arranged in the lifting accommodation groove (30) through a supporting rod, the lower end of the spring partition plate (33) is provided with a pressing spring (34), the lower end of the pressing spring (34) is provided with an anti-dropping plate (32), the lower end of the anti-dropping plate (32) is provided with a piston rod (31), the piston rod (31) is vertically movably inserted into the inner cavity of the center connecting pipe (10), the length of the piston rod (31) is larger than the length of the pressing spring (34), the lower end of the piston rod (31) is provided with an extension rod, the extension rod extends out of the center connecting pipe (10) and is provided with a sealing ball head (36), the lower end of the collecting ball groove (29) is provided with a sealing ball groove (35), the sealing ball head (36) is inserted into the sealing ball groove (35), the piston rod (31) is provided with a transfer groove in the center, the transfer groove is provided with a plurality of suction holes (38) penetrating through the outer circumferential side of the piston rod (31), and the center of the sealing ball head (36) is communicated with the transfer groove to form a suction groove (37).

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