Heating table lifting device and semiconductor equipment

Abstract

The invention discloses a heating table lifting device and semiconductor equipment, the heating table lifting device is used for driving a heating table to lift, the heating table is fixedly mounted on a lifting base, and the heating table lifting device comprises a driving mechanism used for driving the lifting base to move up and down; the guide rail mechanism comprises guide rail units which are vertically and symmetrically arranged on the two sides of the lifting base; and the coaxiality adjusting mechanism is connected with the lifting base and comprises an X-axis adjusting assembly and a Y-axis adjusting assembly, the X-axis adjusting assembly is used for adjusting the lifting base in the X-axis direction, and the Y-axis adjusting assembly is used for adjusting the lifting base in the Y-axis direction. Deformation of the driving mechanism caused by difference of atmosphere and vacuum states can be avoided through the symmetrically-distributed guide rail units, deflection of the heating table is avoided, the X-axis direction and the Y-axis direction of the lifting base are respectively adjusted through the coaxiality adjusting mechanism, the problem of coordinate system synthesis is avoided, and therefore the effect of enhancing lifting control of the heating table is achieved, and the service life of the heating table is prolonged. And the processing performance of thin film processing equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and particularly relates to a heating stage lifting device and a semiconductor equipment. Background Art

[0002] In thin film process equipment, the height control of the heating stage and the position accuracy between the heating stage and the spray disk play a crucial role in the process effect. Currently, most equipment relies on a lifting device driven by a motor to precisely control the height of the heating stage, and at the same time, it is necessary to ensure its coaxiality and flatness with the spray disk to guarantee the uniformity of gas flow. However, the existing heating stage lifting device has obvious defects: firstly, it adopts a single slider linear module offset driving method, and when converting between the atmospheric and vacuum states, due to the pressure difference, the force is uneven, resulting in a deviation in coaxiality in the vacuum environment; secondly, the existing heating stage lifting device usually uses 3 setscrews for adjustment, and when using 3 setscrews for adjustment, there is a problem of coordinate system synthesis interference. For example, the two setscrews in the 120-degree direction will simultaneously affect the adjustment results in both the X / Y directions, which greatly increases the operation difficulty. Summary of the Invention

[0003] Embodiments of the present invention provide a heating stage lifting device and a semiconductor equipment, aiming to enhance the lifting control effect of the heating stage, and further improve the processing performance of the thin film process equipment.

[0004] Embodiments of the present invention provide a heating stage lifting device for driving the heating stage to lift. The heating stage is fixedly installed on a lifting base, and the device includes:

[0005] A driving mechanism, connected to the lifting base, for driving the lifting base to move up and down;

[0006] A guide rail mechanism, including guide rail units symmetrically arranged vertically on both sides of the lifting base, and the lifting base can slide up and down on the guide rail units;

[0007] A coaxiality adjustment mechanism, connected to the lifting base, and the coaxiality adjustment mechanism includes an X-axis adjustment component and a Y-axis adjustment component. Among them, the X-axis adjustment component is used to adjust the lifting base in the X-axis direction, and the Y-axis adjustment component is used to adjust the lifting base in the Y-axis direction.

[0008] Furthermore, it further includes a mounting seat, and the mounting seat is provided with a guide rail groove adapted to the guide rail unit, and the guide rail unit is installed in the guide rail groove.

[0009] Furthermore, the guide rail unit is a V-shaped needle roller guide rail, and both sides of the lifting base are provided with sliders adapted to the V-shaped needle roller guide rail.

[0010] Further, the X-axis adjustment assembly includes a first driving assembly and a first pushing assembly. The first driving assembly can drive the first pushing assembly to move in the X-axis direction, and the first pushing assembly is in rigid contact with the lifting base.

[0011] Further, the first driving assembly includes a first driving bolt and a second driving bolt respectively arranged on the left and right sides of the lifting base, and the first pushing assembly includes a first wedge block and a second wedge block respectively arranged on the left and right sides of the lifting base;

[0012] The first driving bolt is used to drive the first wedge block to move in the positive X-axis direction, and the second driving bolt is used to drive the second wedge block to move in the negative X-axis direction.

[0013] Further, the Y-axis adjustment assembly includes a second driving assembly, and the second driving assembly can drive the lifting base to move in the Y-axis direction.

[0014] Further, the second driving assembly includes a third driving bolt and a fourth driving bolt distributed along the Y-axis direction. The third driving bolt is used to push the lifting base to move in the positive Y-axis direction, and the fourth driving bolt is used to pull the lifting base to move in the negative Y-axis direction.

[0015] Further, a second pushing assembly is arranged between the third driving bolt and the lifting base.

[0016] Further, the driving mechanism includes an electric lead screw connected to the lifting base and a driving motor connected to the electric lead screw.

[0017] An embodiment of the present invention also provides a semiconductor device, including the heating table lifting device described in any one of the above.

[0018] An embodiment of the present invention provides a heating stage lifting device for driving the lifting of a heating stage. The heating stage is fixedly installed on a lifting base. The device includes: a driving mechanism connected to the lifting base for driving the lifting base to move up and down; a guide rail mechanism including guide rail units symmetrically arranged vertically on both sides of the lifting base, and the lifting base can slide up and down on the guide rail units; a coaxiality adjustment mechanism connected to the lifting base. The coaxiality adjustment mechanism includes an X-axis adjustment component and a Y-axis adjustment component. Among them, the X-axis adjustment component is used to adjust the lifting base in the X-axis direction, and the Y-axis adjustment component is used to adjust the lifting base in the Y-axis direction. In the embodiment of the present invention, the driving mechanism drives the lifting base to move up and down, thereby realizing the lifting operation of the heating stage. And because the guide rail units in the guide rail mechanism are symmetrically distributed, it is possible to avoid the deformation of the driving mechanism caused by the difference in the atmosphere and vacuum state, and further avoid the skew of the center of the heating stage, ensure the uniformity of the gas flow pumping in the process, and at the same time, the coaxiality adjustment mechanism adjusts the X-axis direction and the Y-axis direction of the lifting base respectively, that is, adjusts the X-axis direction and the Y-axis direction of the heating stage respectively, avoiding the problem of coordinate system synthesis caused by using individual set screws for adjustment in the prior art, thereby achieving the effect of enhancing the lifting control of the heating stage and further improving the processing performance of the thin film process equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 is a schematic structural diagram of a heating stage lifting device provided by an embodiment of the present invention;

[0021] Figure 2 is a schematic structural diagram of another perspective of a heating stage lifting device provided by an embodiment of the present invention;

[0022] Figure 3 is a schematic structural diagram of yet another perspective of a heating stage lifting device provided by an embodiment of the present invention;

[0023] Figure 4 is a schematic structural diagram of a lifting base in a heating stage lifting device provided by an embodiment of the present invention;

[0024] Figure 5 is a schematic structural diagram of a guide rail unit in a heating stage lifting device provided by an embodiment of the present invention.

[0025] Reference numerals in the figure:

[0026] 1. Lifting base; 11. Bellows; 12. Slide block;

[0027] 2. Driving mechanism; 21. Electric screw rod; 22. Driving motor;

[0028] 3. Guide rail mechanism; 31. Guide rail unit;

[0029] 4. Coaxiality adjustment mechanism; 41. X-axis adjustment component; 411. First driving bolt; 412. Second driving bolt; 413. First wedge block; 414. Second wedge block; 42. Y-axis adjustment component; 421. Third driving bolt; 422. Fourth driving bolt; 423. Rectangular block;

[0030] 5. Mounting base; 51. Guide rail groove. Detailed implementation manners

[0031] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0032] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their combinations.

[0033] It should also be understood that the terms used in this specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in this specification of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms.

[0034] It should be further understood that the term " / and / " used in this specification of the present invention and the appended claims refers to any combination and all possible combinations of one or more of the related listed items, and includes these combinations.

[0035] Next, please refer to Figures 1 - 3 , a heating table lifting device provided by an embodiment of the present invention for driving the heating table to lift. The heating table is fixedly installed on the lifting base 1. The device includes:

[0036] A driving mechanism 2, connected to the lifting base 1, for driving the lifting base 1 to move up and down;

[0037] The guide rail mechanism 3 includes guide rail units 31 symmetrically arranged vertically on both sides of the lifting base 1, and the lifting base 1 can slide up and down on the guide rail units 31;

[0038] The coaxiality adjustment mechanism 4 is connected to the lifting base 1. Combining Figure 4 , the coaxiality adjustment mechanism 4 includes an X-axis adjustment component 41 and a Y-axis adjustment component 42. Among them, the X-axis adjustment component 41 is used to adjust the lifting base 1 in the X-axis direction, and the Y-axis adjustment component 42 is used to adjust the lifting base 1 in the Y-axis direction.

[0039] In this embodiment, the heating table lifting device includes a driving mechanism 2 and a coaxiality adjustment mechanism 4. Among them, the driving mechanism 2 includes an electric lead screw 21 and a driving motor 22, which are used to drive the lifting base 1 and the heating table to perform lifting movements together. The coaxiality adjustment mechanism 4 includes an X-axis adjustment component 41 and a Y-axis adjustment component 42, which are used to adjust the X-axis direction and the Y-axis direction of the lifting base 1 respectively.

[0040] In this embodiment, the driving motor 22 in the driving mechanism 2 drives the lifting base 1 to move up and down, thereby realizing the lifting operation of the heating table. And because the guide rail units 31 in the guide rail mechanism 3 are symmetrically distributed, it is possible to avoid the deformation of the driving mechanism 2 caused by the differences in the atmospheric and vacuum states, and further avoid the deviation of the center of the heating table, ensuring the uniformity of the gas flow pumping during the process. At the same time, the coaxiality adjustment mechanism 4 is also used to adjust the X-axis direction and the Y-axis direction of the lifting base 1 respectively, that is, to adjust the X-axis direction and the Y-axis direction of the heating table respectively, avoiding the problem of coordinate system synthesis caused by using three set screws for adjustment in the prior art. Thus, the effect of enhancing the lifting control of the heating table is achieved, and further the processing performance of the thin film process equipment is improved. In practical applications, the heating table lifting device can be adjusted adaptively to facilitate the operation of the coaxiality adjustment mechanism 4 to adjust the heating table.

[0041] In practical applications, the heating table can be fixedly arranged on the lifting base 1 through a corrugated pipe 11. In this way, the heating table can remain stable during the lifting process, avoiding displacement caused by temperature changes or other factors, thereby further ensuring the processing accuracy and stability of the thin-film processing equipment. At the same time, the design of the corrugated pipe 11 also has a certain elasticity, which can absorb a certain amount of vibration and impact force, protecting the heating table and the lifting device from damage. In addition, the driving mechanism 2 includes an electric screw rod 21 connected to the lifting base 1 and a driving motor 22 connected to the electric screw rod 21. By driving the electric screw rod 21 to rotate through the driving motor 22, the lifting base 1 is driven to move up and down along the axial direction of the electric screw rod, realizing the lifting operation of the heating table. Moreover, the coaxiality adjustment mechanism 4 can be specifically installed below the lifting base 1 for easy operation and adjustment. In addition, a positioning device can be provided at the top of the guide rail mechanism 3. For example, the lifting base 1 can be accurately positioned through a fine-tuning nut to ensure the smooth lifting of the heating table in the vertical direction. The guide rail mechanism 3 can also be designed with an automatic lubrication function to reduce wear and extend the service life of the equipment.

[0042] In some alternative embodiments, the heating table lifting device in this embodiment may further include a sensor and a control system. The sensor can be used to monitor parameters such as the position and speed of the lifting base 1 and the heating table in real time, and feedback these parameters to the control system. The control system can then accurately control the driving motor 22 according to the feedback signal of the sensor to achieve precise lifting and adjustment of the heating table. This design can further improve the automation level and processing accuracy of the heating table lifting device, providing a more reliable guarantee for high-quality thin-film production.

[0043] In one embodiment, the heating table lifting device further includes a mounting seat 5. The mounting seat 5 is provided with a guide rail groove 51 adapted to the guide rail unit 31, and the guide rail unit 31 is installed in the guide rail groove 51.

[0044] Based on the setting of the driving mechanism 2 in this embodiment, two guide rail units 31 are correspondingly provided, and a mounting seat 5 provided with a guide rail groove 51 is also provided accordingly. In this way, it can be ensured that both sides of the heating table lifting device are evenly stressed during operation, avoiding structural distortion problems caused by unilateral stress. This design not only improves the stability and durability of the device, but also can improve the overall processing efficiency and accuracy of the thin-film processing equipment, making the product quality more reliable.

[0045] Specifically, as Figure 5 shown, the guide rail unit 31 is a V-shaped needle roller guide rail, and sliders 12 adapted to the V-shaped needle roller guide rail are provided on both sides of the lifting base 1.

[0046] Through the design of the V-shaped needle roller guide rail cooperating with the slider 12, the smooth operation during the lifting of the heating table is ensured, reducing friction and noise, thereby improving the working efficiency and service life of the lifting slide table of the hot table. In addition, the precise fit between the V-shaped needle roller guide rail and the slider 12 can also effectively prevent foreign objects from entering, ensuring the cleanliness and precision of the entire device, and providing a strong guarantee for high-quality film production.

[0047] The V-shaped needle roller guide rail specifically includes a V-shaped guide rail frame and needle rollers distributed on both sides of the V-shaped guide rail frame. The V-shaped needle roller guide rail is installed between the mounting seat 5 and the lifting base 1. Through the rolling contact of the needle rollers with the V-shaped cross-section between the mounting seat 5 and the lifting base 1, the guiding and load-bearing of the guide rail are realized. This design greatly improves the load-bearing capacity and bending strength of the hot table lifting device, ensuring the stable operation of the equipment under high-temperature and heavy-load conditions.

[0048] To achieve better performance, the V-shaped needle roller guide rail can be made of high-quality materials, such as high-precision alloy steel with excellent wear resistance, corrosion resistance, and high-temperature stability, and is finely processed to reduce wear. At the same time, through regular maintenance and lubrication, the service life of the guide rail and the slider 12 can be further extended, ensuring the long-term stable operation of the heating table lifting device.

[0049] In one embodiment, the X-axis adjustment component 41 includes a first driving component and a first pushing component. The first driving component can drive the first pushing component to move in the X-axis direction, and the first pushing component is in rigid contact with the lifting base 1.

[0050] Furthermore, the first driving component includes a first driving bolt 411 and a second driving bolt 412 respectively arranged on the left and right sides of the lifting base 1, and the first pushing component includes a first wedge block 413 and a second wedge block 414 respectively arranged on the left and right sides of the lifting base 1;

[0051] The first driving bolt 411 is used to drive the first wedge block 413 to move in the positive X-axis direction, and the first driving bolt 411 is used to drive the first wedge block 413 to move in the negative X-axis direction.

[0052] In this embodiment, the coaxiality adjustment mechanism 4 is divided into an X-axis adjustment component 41 and a Y-axis adjustment component 42. Among them, the X-axis adjustment component 41 includes a first driving component and a first pushing component. The first driving component is used to drive the first pushing component to move in the X-axis direction, and then the pushing component pushes the lifting base 1 to move in the X-axis direction, so as to achieve the effect of adjusting the heating table in the X-axis direction. Specifically, in order to further improve the adjustment accuracy, the first driving component is subdivided into a first driving bolt 411 and a second driving bolt 412, and the first pushing component is subdivided into a first wedge block 413 and a second wedge block 414, so as to realize the adjustment in the positive X-axis direction through the first driving bolt 411 and the first wedge block 413, and realize the adjustment in the negative X-axis direction through the second driving bolt 412 and the second wedge block 414.

[0053] In practical applications, the inclined surfaces of the first wedge block 413 and the second wedge block 414 are respectively in contact with the lifting base 1. In this way, when the driving bolt rotates, the rotational motion can be converted into a linear motion through the interaction of the inclined surfaces, thereby driving the lifting base 1 to move in the X-axis direction. In addition, due to the design of double driving bolts and double wedge blocks, the movement of the lifting base 1 in the X-axis direction can be made more stable, avoiding the deflection problem that may be caused by a single driving point, and further improving the adjustment accuracy and stability. Preferably, in order to ensure that the first driving bolt 411 and the second driving bolt 412 can accurately drive the first wedge block 413 and the second wedge block 414 to move, a precise transmission mechanism, such as a gear transmission or a belt transmission, can also be provided between the driving bolt and the wedge block. These transmission mechanisms can ensure that the rotational motion of the driving bolt can be accurately transmitted to the wedge block, so as to realize the precise adjustment of the lifting base 1.

[0054] In one embodiment, the Y-axis adjustment component 42 includes a second driving component, and the second driving component can drive the lifting base 1 to move in the Y-axis direction.

[0055] Specifically, the second driving component includes a third driving bolt 421 and a fourth driving bolt 422 distributed along the Y-axis direction. The third driving bolt 421 is used to push the lifting base 1 to move in the positive Y-axis direction, and the fourth driving bolt 422 is used to pull the lifting base 1 to move in the negative Y-axis direction.

[0056] In this embodiment, the Y-axis adjustment assembly 42 adjusts the Y-axis direction of the lifting base 1, thereby achieving the effect of adjusting the heating table in the Y-axis direction. Among them, the Y-axis adjustment assembly 42 includes a third driving bolt 421 for achieving adjustment in the positive Y-axis direction and a fourth driving bolt 422 for achieving adjustment in the negative Y-axis direction. When the third driving bolt 421 is adjusted, it pushes the lifting base 1 upward in a "pushing" manner to achieve the effect of moving in the positive Y-axis direction. When the fourth driving bolt 422 is adjusted, it pulls the lifting base 1 downward in a "pulling" manner to achieve the effect of moving in the negative Y-axis direction.

[0057] In some alternative embodiments, a second pushing assembly is provided between the third driving bolt 421 and the lifting base 1. By providing a pushing assembly between the third driving bolt 421 and the lifting base 1, direct contact between the third driving bolt 421 and the lifting base 1 can be avoided, thereby preventing wear on the lifting base 1 during the adjustment process. The second pushing assembly can specifically be a rectangular block 423 or other regular objects, which can avoid problems such as jamming, wear, and adjustment accuracy that may be caused by irregular shapes during the adjustment process.

[0058] In practical applications, whether it is the wedge block in the X-axis adjustment assembly 41 or the second pushing assembly here, the material used can be stainless steel. This material has good hardness and wear resistance, can effectively resist wear during long-term operation, ensure adjustment accuracy and the service life of the device. In addition, stainless steel also has good corrosion resistance, can maintain stable performance in various harsh environments, and further improves the reliability and durability of the heating table lifting device.

[0059] Of course, in some embodiments, a single driving assembly can also be used to achieve adjustment in the positive and negative X-axis directions or the positive and negative Y-axis directions. However, the accuracy and stability of this method may be inferior to that of using a dual-driving assembly. Using a dual-driving assembly, such as the first driving bolt 411 and the second driving bolt 412, as well as the third driving bolt 421 and the fourth driving bolt 422 in this embodiment, can make the movement of the lifting base 1 in the X-axis and Y-axis directions more stable and accurate. This is because the dual-driving assembly can provide a more balanced driving force, avoiding the skewing problem that may be caused by a single driving point. At the same time, the dual-driving assembly can also achieve more precise adjustment to meet the requirements of high-precision thin-film processes for the equipment.

[0060] The embodiment of the present invention also provides a semiconductor device, including the heating table lifting device described in any one of the above.

[0061] The various embodiments in the specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other. For the system disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple. For the relevant parts, reference can be made to the description in the method section. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the protection scope of the claims of the present application.

[0062] It should also be noted that in this specification, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the existence of another identical element in the process, method, article or device comprising the said element.

Claims

1. A heating table lifting device, used to drive the heating table to lift, the heating table is fixedly installed on a lifting base, characterized in that: The device comprises: A driving mechanism, connected to the lifting base, and used to drive the lifting base to move up and down; The guide rail mechanism comprises guide rail units vertically symmetrically arranged on both sides of the lifting base, and the lifting base can slide up and down on the guide rail units; A coaxiality adjustment mechanism is connected to the lifting base, and the coaxiality adjustment mechanism includes an X-axis adjustment component and a Y-axis adjustment component, wherein the X-axis adjustment component is used to adjust the lifting base in the X-axis direction, and the Y-axis adjustment component is used to adjust the lifting base in the Y-axis direction.

2. The heating table lifting device according to claim 1, characterized in that: It also includes a mounting seat, which is provided with a guide rail groove adapted to the guide rail unit, and the guide rail unit is installed in the guide rail groove.

3. The heating table lifting device according to claim 2, characterized in that: The guide rail unit is a V-shaped needle roller guide rail, and sliding blocks adapted to the V-shaped needle roller guide rail are arranged on both sides of the lifting base.

4. The heating table lifting device according to claim 1, characterized in that: The X-axis adjustment assembly includes a first driving assembly and a first pushing assembly. The first driving assembly can drive the first pushing assembly to move in the X-axis direction. The first pushing assembly is in rigid contact with the lifting base.

5. The heating table lifting device according to claim 4, characterized in that: The first driving assembly includes a first driving bolt and a second driving bolt respectively arranged on the left and right sides of the lifting base, and the first pushing assembly includes a first wedge block and a second wedge block respectively arranged on the left and right sides of the lifting base; The first driving bolt is used to drive the first wedge block to move along the positive X-axis direction, and the first driving bolt is used to drive the first wedge block to move along the negative X-axis direction.

6. The heating table lifting device according to claim 1, characterized in that: The Y-axis adjustment assembly includes a second driving assembly, and the second driving assembly can drive the lifting base to move in the Y-axis direction.

7. The heating table lifting device according to claim 6, characterized in that: The second driving assembly includes a third driving bolt and a fourth driving bolt distributed based on the Y-axis direction, the third driving bolt is used to push the lifting base to move along the positive Y-axis direction, and the fourth driving bolt is used to pull the lifting base to move along the negative Y-axis direction.

8. The heating table lifting device according to claim 7, characterized in that: A second pushing assembly is arranged between the third driving bolt and the lifting base.

9. The heating table lifting device according to claim 1, characterized in that: The driving mechanism includes an electric screw connected to the lifting base, and a driving motor connected to the electric screw.

10. A semiconductor device, characterized in that: It comprises a heating table lifting device as described in any one of claims 1 to 9.

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