Air floatation vibration isolation assembly and combined vibration isolation device

Abstract

The invention relates to the technical field of photoetching processing, in particular to an air floatation vibration isolation assembly and a combined vibration isolation device. An air floatation vibration isolation assembly comprises an air floatation seat suitable for being placed on a vibration isolation base and being connected with an air source pipeline; the air floater is arranged above the air floating seat, the upper portion of the air floater is suitable for containing an air floating support, a first inflation space is formed between the air floater and the air floating seat, and the air source inflates air into the air floating seat to fill the first inflation space so as to isolate vibration transmitted to the air floating support from the vibration isolation base. According to the air floating vibration isolation assembly and the combined vibration isolation device, the defects that the damping frequency of large equipment is low, a passive vibration isolation scheme cannot achieve a good vibration isolation effect, sometimes, a certain amplification effect can be achieved on low-frequency vibration, and the vibration isolation effect is affected are overcome, and therefore the air floating vibration isolation assembly and the combined vibration isolation device are provided.

Description

Technical Field

[0001] The present invention relates to the field of lithography processing technology, and particularly relates to an air-floating vibration isolation component and a combined vibration isolation device. Background Art

[0002] In lithography processing, lithography belongs to the field of ultra-precision processing. In a lithography machine, the projection on a silicon wafer is very small while the path from the light source to the imaging lithography is very long and requires passing through a series of optical components. Vibration generally causes adverse effects such as poor lithography focusing, blurred patterns, misalignment and offset of upper and lower layer patterns. As the IC manufacturing process becomes more and more advanced and the line width of the chip becomes smaller and smaller, the influence of low-frequency micro-vibration on the lithography processing accuracy becomes greater and greater.

[0003] During the production process, the lithography equipment in the lithography area will be interfered by various factors, which are mainly divided into two aspects: (1) vibrations outside the clean room, such as traffic vibrations outside the factory area and vibrations of large power equipment in the factory area. Such vibrations are transmitted to the foundation of the clean workshop through the soil and then transmitted to the lithography equipment through the main structure; (2) vibrations inside the clean room, such as vibrations generated by air-conditioning equipment, pipelines, production equipment and their auxiliary equipment in the clean room. Such vibrations are transmitted to the lithography equipment through the foundation or directly through the main structure. In the field of ultraviolet light imaging, especially in the field of sub-ultraviolet wavelength resolution imaging, the imaging quality has extremely high requirements for the micro-vibration control of the microscope imaging system.

[0004] Existing traditional vibration control generally is divided into two methods: active vibration isolation and passive vibration isolation. Passive vibration isolation relies on its own deformation to play the role of vibration isolation, such as springs, rubber pads, etc.; active vibration isolation is to install sensors on the vibration isolation system to measure the remaining vibration of the system, and after processing, drive the actuator to offset the influence of the remaining vibration. Generally, the general micro-vibration control method is to use passive vibration isolation technology to block the vibration energy or make it dissipate, attenuate, etc. during the propagation process and consume it; so that it is not enough to produce an impact when it reaches the equipment. The key points are to block the vibration source and use the structural characteristics to consume the vibration energy. This passive vibration isolation technology has a good attenuation effect on high-frequency and high-amplitude vibration interference and can be used for vibration isolation of large non-precision equipment. However, in the field of precision imaging, especially in the field of ultraviolet imaging, for the low-frequency vibration sources in the external environment, due to the low damping frequency of large equipment itself, the passive vibration isolation scheme can no longer play a good vibration isolation effect, and sometimes it will also have a certain amplification effect on low-frequency vibration, affecting the vibration isolation effect. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defects that the damping frequency of large equipment in the prior art is relatively low, the passive vibration isolation scheme can no longer achieve a good vibration isolation effect, and sometimes it will have a certain amplification effect on low-frequency vibration, affecting the vibration isolation effect, so as to provide an air-floating vibration isolation component and a combined vibration isolation device.

[0006] To solve the above problems, the present invention provides an air-floating vibration isolation component, including:

[0007] An air-floating seat, which is adapted to be placed on a vibration isolation base and is adapted to be connected to an air pump pipeline;

[0008] An air-floating element, which is arranged above the air-floating seat. An air-floating support is adapted to be placed above the air-floating element. A first inflation space is provided between the air-floating element and the air-floating seat. The air pump fills the air-floating seat with gas to fill the first inflation space to isolate the vibration transmitted from the vibration isolation base to the air-floating support.

[0009] Optionally, the air-floating seat is rectangularly arranged, the air-floating seat is provided with a groove, and at least two first flow guide groove beams arranged at intervals are provided in the groove. The height of the first flow guide groove beam is lower than the height of the side wall of the groove.

[0010] Optionally, the first flow guide groove beam is obliquely arranged, both ends of the first flow guide groove beam are provided with round chamfers, and the first flow guide groove beam is provided with a through groove.

[0011] Optionally, the first flow guide groove beam is obliquely arranged, both ends of the first flow guide groove beam are arc-shaped, and at least two flow guide columns are provided on the first side wall of the groove. The flow guide columns and the first flow guide groove beam are arranged alternately.

[0012] Optionally, an air inlet hole is provided on the side wall of the groove and is connected to an air source pipeline. The air-floating element is provided with an extending end, and the extending end extends into the groove. At least two second flow guide groove beams arranged at intervals are provided on the extending end facing the groove. At least one communication hole is provided on each second flow guide groove beam. A first inflation space is formed between the extending end and the groove. The outer peripheral surface of the extending end is attached to the inner side wall of the groove. A second inflation space is provided in the extending end. The first inflation space and the second inflation space are communicated through the communication hole.

[0013] Optionally, the second flow guide groove beam and the first flow guide groove beam are arranged in a staggered manner, and the first flow guide groove beam is accommodated in the gap between adjacent second flow guide groove beams.

[0014] Optionally, at least one leveling component is provided at each corner of the air float and the air float seat. Each leveling component includes two elastic members. The two ends of each elastic member are respectively connected to the air float and the air float seat. Each leveling component further includes two first leveling ends and one second leveling end. The second leveling end is provided on the air float seat facing the air float, and two first leveling ends are provided on the cover plate of the air float facing the air float seat; or, two first leveling ends are provided on the air float seat facing the air float, and a second leveling end is provided on the cover plate of the air float facing the air float seat. The first leveling end and the second leveling end are in point contact.

[0015] A combined vibration isolation device includes the above-mentioned air float vibration isolation component, and further includes a vibration isolation base. The vibration isolation base is provided with a vibration isolation plate, four columns and rubber pads. The rubber pads are adapted to be arranged between the ground and the columns, and the vibration isolation plate is fixedly connected to the air float vibration isolation component.

[0016] Optionally, it further includes an air float support. Four air float vibration isolation components are arranged on the vibration isolation base. An air float vibration isolation component is provided between the vibration isolation base and the air float support. The air float support is fixedly connected to the air float vibration isolation component. The air float support is provided with a first platform and a second platform along the height direction. A micro-manipulation stage is provided on the first platform, and a mask alignment stage is provided on the second platform. The first platform and the second platform are arranged in parallel. The first platform and the second platform are respectively provided with a level. A balance plate is provided between the air float support and the air float. A mirror alignment stage is provided on the balance plate. A level is provided on the balance plate.

[0017] Optionally, it further includes a vibration feedback component and a controller. The controller is respectively communicatively connected to the vibration feedback component and the gas source.

[0018] The technical solution of the present invention has the following advantages:

[0019] 1. For the air float vibration isolation component provided by the present invention, the air float seat is adapted to be placed on the vibration isolation base and is adapted to be connected to the gas source pipeline; the air float is arranged above the air float seat, and the air float support is adapted to be placed above the air float. A first inflation space is provided between the air float and the air float seat. The gas source fills the air float seat with gas. By adjusting the gas pressure in the first inflation space, the air float damping is changed to isolate the low-frequency and small-amplitude vibrations transmitted from the vibration isolation base to the air float support.

[0020] 2. For the air float vibration isolation component provided by the present invention, the air float seat is rectangularly arranged. The air float seat is provided with a groove, and at least two first flow guide groove beams are arranged at intervals in the groove. The height of the first flow guide groove beam is lower than the height of the side wall of the groove. The arrangement of the first flow guide groove beam enables the gas to be evenly distributed during the flow process to fill the first inflation space, so that the air float receives a uniformly upward buoyancy force.

[0021] 3. In the air-floating vibration isolation component provided by the present invention, the first flow guide groove beam is obliquely arranged, with round chamfers at both ends of the first flow guide groove beam. The first flow guide groove beam is provided with a through groove. The obliquely arranged first flow guide groove beam can slow down the blockage of the first flow guide groove beam to the gas, the round chamfers make the gas flow more smoothly, and the through groove enables the gas to pass through the first flow guide groove beam.

[0022] 4. In the air-floating vibration isolation component provided by the present invention, the first flow guide groove beam is obliquely arranged, and both ends of the first flow guide groove beam are arc-shaped. At least two flow guide columns are provided on the first side wall of the groove, and each flow guide column is located between two first flow guide groove beams. The arc-shaped ends make the air flow more convenient. At the same time, the flow guide columns cooperate with the arc-shaped ends of the first flow guide groove beam to control the flow direction of the air flow, making the air flow distribution more uniform.

[0023] 5. In the air-floating vibration isolation component provided by the present invention, an air inlet hole is provided on the side wall of the groove, and the air inlet hole is connected to the gas source pipeline. The air float is provided with an extending end, and the extending end extends into the groove. The extending end is provided with at least two second flow guide groove beams arranged at intervals towards the groove. Each second flow guide groove beam is provided with at least one communication hole. A first inflation space is formed between the extending end and the groove, and the outer peripheral surface of the extending end is attached to the inner side wall of the groove. A second inflation space is provided inside the extending end, and the first inflation space and the second inflation space are communicated through the communication hole. Through the attached setting, the relative movement between the air float and the air float seat in the height direction is realized, so that the gas in the first inflation space enters the second space through the communication hole, making there be no rigid connection between the air float and the air float seat, achieving a good effect of homogenizing the gas to eliminate vibration.

[0024] 6. In the air-floating vibration isolation component provided by the present invention, the second flow guide groove beam and the first flow guide groove beam are arranged in a staggered manner, and the first flow guide groove beam is accommodated in the gap between adjacent second flow guide groove beams, so that the gas between adjacent first flow guide groove beams enters the communication holes of the second flow guide groove beam.

[0025] 7. In the air-floating vibration isolation component provided by the present invention, at least one set of leveling components is provided at each corner of the air float and the air float seat. Each leveling component includes two elastic members, and both ends of each elastic member are respectively connected to the air float and the air float seat. Each leveling component further includes two first leveling ends and one second leveling end. The air float seat is provided with a second leveling end towards the air float, and the cover plate of the air float is provided with two first leveling ends towards the air float seat; or, the air float seat is provided with two first leveling ends towards the air float, and the cover plate of the air float is provided with a second leveling end towards the air float seat. The first leveling end and the second leveling end are in point contact.

[0026] Leveling components are respectively provided at the four corners of the air float and the air float seat to achieve the leveling of the air float. The air float is located on the air float seat through at least four points by means of the cylindrical surface of the first leveling end, the spherical surface of the second leveling end, and the interaction between high-pressure gas and elastic components, finally achieving the purpose of leveling the air float. The first leveling end on the air float and the second leveling end of the air float seat achieve the purpose of point contact between the air float and the air float base. This structure is beneficial to the balance of the bearing surface of the air float, avoiding the problem of uneven air float surface caused by surface contact of the support structure. Under the interaction of high-pressure gas and elastic components, the contact surface can be finely adjusted. In the form of multiple point contacts, the air float is completely attached to the air float seat, achieving the purpose of overall leveling of the air float vibration isolation component.

[0027] 8. The combined vibration isolation device provided by the present invention includes the above-mentioned air float vibration isolation component, and also includes a vibration isolation base and an air float support. The vibration isolation base is provided with a vibration isolation plate, four columns and rubber pads. The rubber pads are adapted to be arranged between the ground and the columns, and the vibration isolation plate is fixedly connected with the air float vibration isolation component. The rubber pads arranged between the ground and the columns are mainly used to attenuate abnormal high-amplitude vibrations in the medium and high frequencies; the large-mass platform composed of the columns and the vibration isolation plate can effectively consume vibration energy, achieving the purpose of attenuating vibration energy in the full frequency band.

[0028] 9. The combined vibration isolation device provided by the present invention also includes an air float support. Four air float vibration isolation components are arranged on the vibration isolation base. An air float vibration isolation component is arranged between the vibration isolation base and the air float support, and the air float support is fixedly connected with the air float vibration isolation component. The air float support is provided with a first platform and a second platform along the height direction. A micro-pressure stage is arranged on the first platform, and a mask pressure stage is arranged on the second platform. The first platform and the second platform are arranged in parallel. The first platform and the second platform are respectively provided with a level. A balance plate is arranged between the air float support and the air float. A mirror pressure stage is arranged on the balance plate, and a level is arranged on the balance plate. To eliminate the remaining low-frequency micro-amplitude vibrations less than 10 Hz after the action of the air float vibration isolation component and the vibration isolation base.

[0029] 10. The combined vibration isolation device provided by the present invention also includes a vibration feedback component and a controller. The controller is respectively communicatively connected with the vibration feedback component and the gas source.

[0030] By adopting a combined vibration isolation scheme with three - stage vibration damping, the passive vibration isolation effect of rubber and the high damping and high stiffness of the marble platform are used to isolate the medium - and high - frequency external vibration interference, and the overall vibration energy is attenuated to achieve the first - stage vibration damping effect; an air - floating vibration isolation component and an air pump are used to control the gas pressure. By changing the air - floating damping through the change of gas pressure and using the real - time feedback compensation method, the second - stage vibration damping effect is achieved, and the overall vibration energy of the system is further attenuated; for the low - frequency micro - amplitude vibration less than 10 Hz that cannot be handled by passive vibration isolation, the self - locking and active phase compensation technologies of piezoelectric actuators are used to achieve the third - stage vibration damping effect, and finally the requirements of ultraviolet nano - scale imaging for the micro - environment vibration are realized. Brief Description of the Drawings

[0031] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0032] Figure 1 Schematic diagram of the air - floating vibration isolation component provided in the embodiment of the present invention;

[0033] Figure 2 is Figure 1 an enlarged view in the A direction of;

[0034] Figure 3 Schematic diagram of the air - floating seat provided in the first embodiment of the present invention;

[0035] Figure 4 Schematic diagram of the air - floating seat provided in the second embodiment of the present invention;

[0036] Figure 5 Schematic diagram of the air - floating seat provided in the third embodiment of the present invention;

[0037] Figure 6 Schematic diagram of the air - floating ball provided in the embodiment of the present invention;

[0038] Figure 7 Schematic diagram of the vibration isolation base provided in the embodiment of the present invention;

[0039] Figure 8 Schematic diagram of the connection between the air - floating vibration isolation component and the adapter bottom plate and the adapter top plate provided in the embodiment of the present invention;

[0040] Figure 9 Schematic diagram of the connection between the air - floating support and the air - floating vibration isolation component provided in the embodiment of the present invention;

[0041] Figure 10 Schematic diagram of the connection between the vibration isolation base, air-floating bracket and air-floating vibration isolation component provided in the embodiment of the present invention;

[0042] Figure 11 Schematic diagram of the combined vibration isolation device provided in the embodiment of the present invention;

[0043] Figure 12 Schematic diagram of the connection between the air-floating element and the air-floating seat provided in the embodiment of the present invention;

[0044] Description of reference numerals: 1, air-floating seat; 101, air inlet; 102, second leveling end; 103, elastic member; 104, groove; 105, first flow guiding groove beam; 106, through groove; 107, flow guiding column; 108, first side wall; 109, second side wall; 110, first inflation space; 2, air-floating element; 201, cover plate; 202, extending end; 203, second flow guiding groove beam; 204, communication hole; 205, placement hole; 206, first leveling end; 207, second inflation space; 3, air-floating upper cover; 4, vibration isolation base; 401, vibration isolation plate; 402, column; 403, rubber pad; 5, adapter bottom plate; 6, adapter top plate; 7, air pump; 8, air-floating bracket; 801, second platform; 802, first platform; 9, balance plate; 10, mirror pressing station; 11, mask pressing station; 12, microscope pressing station; 13, first adapter plate; 14, microscope; 15, temperature control component; 16, temperature isolation seat; 17, mask; 18, mask table; 19, second adapter plate; 20, optical path transmission unit; 21, first mirror element; 22, first two-dimensional adjustment frame; 23, spacer; 24, second mirror element; 25, second two-dimensional adjustment frame. Detailed implementation manners

[0045] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0046] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0047] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0049] Embodiment 1

[0050] As Figure 1 -12 shows a specific embodiment of the air-floating vibration isolation assembly, including: an air-floating seat 1 and an air-floating element 2.

[0051] As Figure 1 、 Figure 3 shown, the air-floating seat 1 is arranged in a rectangle. The air-floating seat 1 is provided with a groove 104. Seven first flow guiding channel beams 105 are arranged at intervals in the groove 104. The height of the first flow guiding channel beam 105 is lower than the height of the side wall of the groove 104, and the intervals between adjacent first flow guiding channel beams 105 are equal. There are gaps between the end faces at both ends of the first flow guiding channel beam 105 and the inner side wall of the groove 104. As Figure 1 、 Figure 3 shown, an air inlet 101 and an air outlet are provided on the side wall of the air-floating seat 1, and the air inlet 101 is connected to the gas source pipeline. It should be noted that the central axis direction of the air inlet 101 is perpendicular to the length direction of the first flow guiding channel beam 105. Specifically, the gas source is an air pump 7. To ensure the uniform distribution of gas in the air-floating seat 1, the high-pressure gas introduced by the air pump 7 diffuses in the air-floating seat 1, and the first flow guiding channel beam 105 is arranged to make the gas distribution in the air-floating seat 1 uniform.

[0052] As Figure 6 shown, the air-floating element 2 is adapted to the air-floating seat 1. The air-floating element 2 is arranged above the air-floating seat 1, and a first inflation space is formed between the air-floating seat 1 and the air-floating seat 1. As Figure 6 shown, the air-floating element 2 is provided with an extending end 202. The extending end 202 extends into the groove 104. Eight second flow guiding channel beams 203 are arranged at intervals on the extending end 202 facing the groove 104. The outer peripheral surface of the extending end 202 is in close contact with the inner side wall of the groove 104. To prevent gas leakage, grease is filled between the outer peripheral surface of the extending end 202 and the inner side wall of the groove 104. As Figure 6As shown, each second guide groove beam 203 is provided with three connecting holes 204. To facilitate the cooperation between the air float 2 and the air float seat 1, the gap between the adjacent second guide groove beams 203 of the air float 2 accommodates the first guide groove beam 105, that is, the side of the second guide groove beam 203 fits the side of the first guide groove beam 105, so that the gas in the gap of the first guide groove beam 105 enters the connecting holes 204 of the second guide groove beam 203. Figure 12 As shown, a second air-filled space 207 is provided in the insertion end 202, and the first air-filled space 110 and the second air-filled space 207 are connected through the connecting hole 204, so that the connecting hole 204 plays the role of connecting the first air-filled space 110 and the second air-filled space 207. To further improve stability, the air float 2 is also fixedly provided on the air float upper cover 3, and the air float upper cover 3 is fixedly connected to the adapter top plate 6.

[0053] To prevent the air float 2 from shaking, Figure 2 , Figure 6 As shown, eight sets of leveling components are arranged between the air float seat 1 and the air float 2, that is, two sets of leveling components are arranged on the four corners of the air float seat 1 and the air float 2, and one set of leveling components is arranged on each side of each corner. Figure 2 , Figure 6 As shown, each leveling component includes two elastic members 103, the end of each elastic member 103 is arranged in the placement hole 205, and the two elastic members 103 of each leveling component are in point contact with the air float 2 and the air float seat 1, that is, the air float seat 1 is provided with a second leveling end 102 in the direction of the air float 2, and the cover plate 201 of the air float 2 is provided with two first leveling ends 206 in the direction of the air float seat 1, and the second leveling end 102 is located between the two first leveling ends 206, and the first leveling end 206 is in point contact with the second leveling end 102. Specifically, the elastic member 103 is an elastic member such as a spring, the first leveling end 206 includes an arc column, a curved column or other structure that can achieve point contact with the second leveling end 102, and the second leveling end 102 is a hemisphere, a hemispherical column, a spherical body, etc., which can achieve point contact with the first leveling end 206. The purpose of leveling the air float 2 is achieved through the action of the first leveling end 206, the second leveling end 102 and the elastic member 103. The problem of uneven surface of the air float 2 caused by the contact of the supporting structure surface is avoided through point contact. Under the action of high-pressure gas and the elastic member 103, the contact point of the first leveling end 206 and the second leveling end 102 can be fine-tuned. Through eight point contacts, the air float 2 is completely attached to the air float seat 1, and the overall leveling of the air float 2 is achieved. It should be noted that no matter how high the gas pressure introduced into the air float seat 1 is, the air float seat 1 and the air float 2 always maintain point contact. In order to prevent the second leveling end 102 and the first leveling end 206 from detaching, a position sensor is provided on the cover plate 201 in the direction toward the air float seat 1, and the position sensor is used to monitor the position of the cover plate 201 and the air float seat 1.

[0054] A combined vibration isolation component includes the above-mentioned air-floating vibration isolation component, and also includes a vibration isolation base 4, an air-floating support 8 and a piezoelectric vibration isolation component.

[0055] As Figure 7 shown, the vibration isolation base 4 is mainly composed of a vibration isolation plate 401, four columns 402 and rubber pads 403. The air-floating seat 1 is fixedly connected to the vibration isolation plate 401 through an adapter bottom plate 5. The rubber pads 403 are arranged between the ground and the columns 402, and are mainly used to attenuate abnormal high-amplitude vibrations in the medium and high frequencies. Specifically, the vibration isolation plate 401 is a marble plate. The large-mass platform composed of the columns 402 and the marble plate can effectively consume vibration energy and achieve the purpose of attenuating vibration energy in the full frequency band.

[0056] As Figure 8 、 Figure 9 and Figure 10 shown, the air-floating support 8 is located above the air-floating vibration isolation component. That is, four air-floating vibration isolation components are arranged below the air-floating support 8. A balance plate 9 is arranged between the air-floating support 8 and the air-floating element 2. The balance plate 9 is fixedly connected to the adapter top plate 6, and a spirit level is arranged on the balance plate 9. The air-floating support 8 is provided with a first platform 802 and a second platform 801 in the height direction. A temperature isolation seat 16 is arranged on the first platform 802, and a mask pressing platform 11 is arranged on the second platform 801. A second adapter plate 19 is arranged above the mask pressing platform 11. The first platform 802 and the second platform 801 are arranged in parallel, and spirit levels are respectively arranged on the first platform 802 and the second platform 801.

[0057] As Figure 10 shown, the piezoelectric vibration isolation component is composed of a microscopic pressing platform 12 located on the second platform 801, a mask pressing platform 11 located on the first platform 802 and a mirror pressing platform 10 located on the balance plate 9, so as to eliminate the remaining low-frequency micro-amplitude vibrations less than 10 Hz after the action of the air-floating vibration isolation component and the vibration isolation base 4. Among them, the microscopic pressing platform 12 plays an active isolation role for the low-frequency micro-amplitude vibrations below 10 Hz of the microscopic component. A first adapter plate 13 is arranged above the microscopic pressing platform 12. The mask pressing platform 11 plays an active isolation role for the low-frequency micro-amplitude vibrations below 10 Hz of the mask component. The mirror pressing platform 10 plays an active isolation role for the low-frequency micro-amplitude vibrations below 10 Hz of the second reflector 24 and the second two-dimensional adjustment bracket 25 of the optical path incident. Through the joint adjustment mechanism among the microscopic pressing platform 12, the mask pressing platform 11 and the mirror pressing platform 10, it is ensured that the overall optical path vibrates in real time with the same frequency and has no phase difference.

[0058] As Figure 11As shown, the combined vibration isolation assembly also includes a microscope assembly, an optical transmission assembly and a mask assembly, wherein the microscope assembly is located on the second platform 801, the optical transmission assembly is located on the balance board 9, and the mask assembly is located on the first platform 802. The microscope assembly is composed of a microscope 14, a temperature control assembly 15, and a temperature control isolation seat. The microscope assembly mainly realizes ultraviolet laser nano-scale microscopic imaging through the microscope 14, and realizes micro-environment temperature control through the temperature control assembly 15 and the temperature control isolation seat, thereby reducing the influence of ambient temperature changes on imaging.

[0059] The optical path transmission component is mainly composed of an optical path transmission tube, a first reflector component 21, a first two-dimensional adjustment frame 22, a cushion block 23, a second reflector, and a second two-dimensional adjustment frame 25. The optical path transmission component mainly realizes the optical path transmission and turning of ultraviolet light, wherein the first reflector component 21 is arranged on the upper end surface of the first two-dimensional adjustment frame 22, and the first two-dimensional adjustment frame 22 is installed on the cushion block 23, so that the first reflector component 21 and the second reflector component 24 are kept at the same height; the second reflector component 24 is installed on the upper end surface of the second two-dimensional adjustment frame 25, and the center of the reflector in the second reflector component 24 is coaxially arranged with the axis of the transmission tube of the optical path transmission unit 20. The optical path transmission path is that after the ultraviolet light is emitted from the light source, it is emitted by the first reflector component 21 and then transmitted to the second reflector component 24, the optical path turns upward, enters the optical path transmission tube, and enters the microscope 14 after passing through the mask 17 to form an image.

[0060] The mask assembly consists of a mask 17 and a mask stage 18 . The mask is mounted on the mask stage 18 . The mask 17 participates in the transmission process of the light beam path. Interference fringes are formed after passing through the mask 17 , forming minimum-size nanometer-level resolution imaging on the microscope 14 .

[0061] In order to realize automatic control, a vibration feedback component and a controller are also included. The controller is respectively connected to the vibration feedback component, the air pump 7, and the position sensor circuit. It should be noted that the vibration feedback component includes a first vibration sensor, a second vibration sensor, a third vibration sensor, a fourth vibration sensor, and a fifth vibration sensor, wherein the first vibration sensor is arranged on the column 402, the second vibration sensor is arranged on the adapter top plate 6, and the adapter top plate 6 of each air-floating vibration isolation component is provided with a second vibration sensor, the third vibration sensor is arranged on the first reflector 21, the fourth vibration sensor is arranged on the mask stage 18, and the fifth vibration sensor is arranged on the microscope 14. The controller is respectively connected to the above-mentioned vibration sensor circuits to receive the vibration frequency measured by the vibration sensor in real time.

[0062] In the specific implementation process, the controller collects vibration data in real time, obtains the time-domain data of the vibration input and output of the combined vibration isolation component through the vibration feedback component, preprocesses the test data by windowing, intercepts the time period with a relatively stable waveform and no pulse vibration for further processing, and at the same time uses it as the vibration input for the finite element transient dynamic calculation. The controller uses the MATLAB data visualization function to draw the time-frequency domain curve, and finally analyzes the transfer function of the data to obtain the actual control equation of the vibration control system in the frequency domain. According to the above actual control equation, the controller drives the air pump 7 to adjust the pressure of the air floating vibration isolation component, changes the air damping in the air floating vibration isolation component, and attenuates the low-frequency vibration corresponding to the frequency value according to the air damping value, so as to further attenuate the low-frequency vibration above 10 Hz of the system.

[0063] The combined vibration isolation device provided by the present invention has the following advantages: (1) It adopts a combined vibration isolation scheme with three-stage vibration reduction. The passive vibration isolation effect of rubber and the high damping and high stiffness of the marble platform are used to isolate the medium and high-frequency external vibration interference, and the overall vibration energy is attenuated to achieve the first-stage vibration reduction effect; the air floating vibration isolation component and the air pump 7 are used to control the gas pressure and change the gas damping, that is, by changing the gas damping to eliminate the vibration of a specific frequency corresponding to the damping, and the real-time feedback compensation method is used to achieve the second-stage vibration reduction effect, further attenuating the overall vibration energy of the system; for the low-frequency micro-vibration less than 10 Hz that cannot be handled by passive vibration isolation, the self-locking and active phase compensation technologies of the piezoelectric actuator are used to achieve the third-stage vibration reduction effect, and finally the requirements of the ultraviolet nano-imaging for the micro-environment vibration are realized; (2) For the large-mass modules of the overall system, the passive vibration isolation methods of the marble platform and air floating are adopted, and for each small-mass module, the piezoelectric active vibration isolation technology is adopted. The air float 2 of the air floating vibration isolation component realizes sitting on the air floating seat 1 through 8 points through the interaction of the cylindrical surface, spherical surface and high-pressure gas with the elastic member 103, and finally realizes the purpose of leveling the air float 2. The first leveling end 206 on the air float 2 and the second leveling end 102 of the air floating seat 1 realize the purpose of point contact between the air float 2 and the air floating base. This structure is beneficial to the horizontal balance of the bearing surface of the air float 2. Under the interaction of the high-pressure gas and the elastic member 103, the contact surface can be finely adjusted, and through the form of point contact, the air float 2 is completely attached to the air floating base, realizing the purpose of overall leveling of the air floating vibration isolation component; (3) The invention adopts the active vibration isolation method of the piezoelectric stage to ensure the vibration frequency consistency and the same phase of the three key positions of the overall optical path, namely the incident mirror, the mask 17 and the microscope 14, and realizes the overall control of the low-frequency micro-vibration.

[0064] Embodiment 2

[0065] Such as Figure 4As shown, the first flow guiding trough beam 105 is obliquely arranged, the length direction of the first flow guiding trough beam 105 is arranged at an angle with the air flow direction, both ends of the first flow guiding trough beam 105 are provided with round chamfers, and each first flow guiding trough beam 105 is provided with three through grooves 106. As Figure 4 shown, the central axes of the through grooves 106 of adjacent first flow guiding trough beams 105 coincide, so that the air flow moves evenly. Away from the air inlet 101 direction of the air floating seat 1, the distance between the end of the first flow guiding trough beam 105 and the first side wall 108 decreases in sequence; towards the air outlet direction of the air floating seat 1, the distance between the end of the first flow guiding trough beam 105 and the second side wall 109 increases in sequence. The remaining structures of this embodiment are exactly the same as those of Embodiment 1.

[0066] Embodiment 3

[0067] As Figure 5 shown, the first flow guiding trough beam 105 is obliquely arranged, the length direction of the first flow guiding trough beam 105 is arranged at an angle with the air flow direction, both ends of the first flow guiding trough beam 105 are arc-shaped, six flow guiding columns 107 are arranged on the first side wall of the groove 104, and the flow guiding columns 107 are arranged staggeredly with the first flow guiding trough beam 105. Away from the air inlet 101 direction of the air floating seat 1, the distance between the end of the first flow guiding trough beam 105 and the flow guiding column 107 decreases in sequence; towards the air outlet direction of the air floating seat 1, the distance between the end of the first flow guiding trough beam 105 and the second side wall 109 increases in sequence. The remaining structures of this embodiment are exactly the same as those of Embodiment 1.

[0068] As an alternative implementation manner, the number of the first flow guiding trough beams 105 in the air floating seat 1 can also be 2, 3, 4 or even more.

[0069] As an alternative implementation manner, the number of the communication holes 204 on the second flow guiding trough beam 203 can also be 1, 2, 4 or even more.

[0070] As an alternative implementation manner, the number of the flow guiding columns 107 can also be 2, 3, 4 or even more.

[0071] As an alternative implementation manner, 1 set or 3 sets of leveling components can also be provided at each corner of the air float 2 and the air floating seat 1.

[0072] As an alternative implementation manner, the number of the through grooves 106 of the first flow guiding trough beam 105 can also be 1, 2, 4 or even more.

[0073] As an alternative implementation manner, the elastic member 103 can also be a rubber rod or the like.

[0074] As an alternative implementation manner, the second inflation space may not be provided in the insertion end.

[0075] As an alternative embodiment, two first leveling ends are provided in the direction of the air flotation seat towards the air flotation element, and a second leveling end is provided in the direction of the cover plate of the air flotation element towards the air flotation seat.

[0076] As an alternative embodiment, the first leveling end 206 can also be in other forms such as the combination of a one-third sphere, a cylinder and a hemisphere.

[0077] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or alterations can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or alterations derived therefrom are still within the protection scope of the present invention.

Claims

1. An air-floating vibration isolation component, characterized in that, Comprising: An air flotation seat (1), the air flotation seat (1) is adapted to be placed on a vibration isolation base (4), and the air flotation seat (1) is adapted to be connected to an air source pipeline; An air float (2), the air float (2) is arranged above the air flotation seat (1), an air flotation bracket (8) is adapted to be placed above the air float (2), a first inflation space (110) is arranged between the air float (2) and the air flotation seat (1), and the air source fills the air flotation seat (1) with gas to fill the first inflation space (110) so as to isolate the vibration transmitted from the vibration isolation base (4) to the air flotation bracket (8).

2. The air-floating vibration isolation component according to claim 1, characterized in that, The air flotation seat (1) is provided with a groove (104), at least two first diversion channel beams (105) arranged at intervals are arranged in the groove (104), and the height of the first diversion channel beam (105) is lower than the height of the side wall of the groove (104).

3. The air-floating vibration isolation component according to claim 2, characterized in that, The first diversion channel beam (105) is obliquely arranged, both ends of the first diversion channel beam (105) are provided with round chamfers, and the first diversion channel beam (105) is provided with a through groove (106).

4. The air-floating vibration isolation component according to claim 2, characterized in that The first diversion channel beam (105) is obliquely arranged, both ends of the first diversion channel beam (105) are arc-shaped, at least two diversion columns (107) are arranged on a first side wall (108) of the groove (104), and the diversion columns (107) and the first diversion channel beam (105) are arranged in a staggered manner.

5. The air-floating vibration isolation component according to any one of claims 2 to 4, characterized in that, An air inlet hole is arranged on the side wall of the groove (104), the air inlet hole is connected to the air source pipeline, the air float (2) is provided with an insertion end (202), the insertion end (202) extends into the groove (104), at least two second diversion channel beams (203) arranged at intervals are arranged on the insertion end (202) facing the groove (104), at least one communication hole (204) is arranged on each second diversion channel beam (203), a first inflation space (110) is formed between the insertion end (202) and the groove (104), the outer peripheral surface of the insertion end (202) is attached to the inner side wall of the groove (104), a second inflation space (207) is arranged in the insertion end (202), and the first inflation space (110) and the second inflation space (207) are communicated through the communication hole (204).

6. The air-floating vibration isolation component according to claim 5, characterized in that, The second diversion channel beam (203) and the first diversion channel beam (105) are arranged in a dislocation manner, and the first diversion channel beam (105) is accommodated in the gap between adjacent second diversion channel beams (203).

7. The air-floating vibration isolation component according to claim 5, characterized in that, At each corner of the air float (2) and the air float seat (1), at least one leveling component is provided. Each leveling component includes two elastic members (103). The two ends of each elastic member (103) are respectively connected to the air float and the air float seat (1). Each leveling component further includes two first leveling ends (206) and one second leveling end (102). The second leveling end (102) is provided on the air float seat (1) facing the air float (2), and two first leveling ends (206) are provided on the cover plate (201) of the air float (2) facing the air float seat (1); or, two first leveling ends (206) are provided on the air float seat (1) facing the air float (2), and the second leveling end (102) is provided on the cover plate (201) of the air float (2) facing the air float seat (1). The first leveling end (206) and the second leveling end (102) are in point contact.

8. A combined vibration isolation device, characterized in that, It includes the air float vibration isolation component according to any one of claims 1 - 7, and further includes a vibration isolation base (4). The vibration isolation base (4) is provided with a vibration isolation plate (401), four columns (402) and rubber pads (403). The rubber pads (403) are adapted to be arranged between the ground and the columns (402). The vibration isolation plate (401) is fixedly connected to the air float vibration isolation component.

9. The combined vibration isolation device according to claim 8, wherein, It further includes an air float support (8). Four air float vibration isolation components are arranged on the vibration isolation base (4). An air float vibration isolation component is provided between the vibration isolation base (4) and the air float support (8). The air float support (8) is fixedly connected to the air float vibration isolation component. The air float support (8) is provided with a first platform (802) and a second platform (801) along the height direction. A micro pressure stage (12) is provided on the first platform (802), and a mask pressure stage (11) is provided on the second platform (801). The first platform (802) and the second platform (801) are arranged in parallel. The first platform (802) and the second platform (801) are respectively provided with a level. A balance plate (9) is provided between the air float support (8) and the air float (2). A mirror pressure stage (10) is provided on the balance plate (9). A level is provided on the balance plate (9).

10. The combined vibration isolation device according to claim 9, characterized in that, It further includes a vibration feedback component and a controller. The controller is respectively communicatively connected to the vibration feedback component and the air source.

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