Temperature-controllable energized gas-solid interface in-situ Raman spectrum dynamic detection device

Abstract

The invention discloses a temperature-controllable energized gas-solid interface in-situ Raman spectrum dynamic detection device. The device comprises a target gas bag, an in-situ pool, a Raman spectrometer, an external power supply and a computer. The in-situ pool is arranged in the Raman spectrometer and is used for acquiring chemical information of reaction intermediates and products of the sensing device in target gas and information of surface structure change of the sensing material. The in-situ tank has a temperature control function and is used for adjusting the working temperature of the gas sensing device; meanwhile, the gas sensor has a power-on function and is used for adjusting the working voltage of the gas sensor and acquiring a dynamic response-recovery electric signal of the sensor to the target gas. The dynamic detection device can simultaneously acquire Raman spectrum information of a microstructure / chemical reaction triggered by a target gas on a gas-solid interface and response-recovery electric signals of a sensing device, has the advantages of simplicity and convenience in assembly, controllable temperature, electrification, ventilation and the like, and is widely applicable to in-situ Raman test of the chemical reaction on the gas-solid interface.

Description

Technical Field

[0001] The present invention relates to the technical field of gas sensors, and in particular to a dynamic detection device for in-situ Raman spectroscopy at the gas-solid interface with controllable temperature and power supply. Background Art

[0002] A large number of volatile organic compounds (VOCs) are contained in human exhaled breath. These substances are produced by human metabolism and are excreted through blood circulation and pulmonary gas exchange. Small gas sensors can be used to detect VOCs in exhaled breath; small sensors are miniaturized instruments for qualitative and quantitative analysis of target gas molecules in breath samples; when target gas molecules adsorb or undergo redox reactions with the sensing material in the small sensor, the electrical properties of the sensing material will change; it has the advantages of strong portability, low cost, and convenient operation, and is suitable for on-line clinical analysis. With the progress of scientific research, scientific researchers need to use in-situ spectroscopy technology to reveal the reaction mechanism at the gas-solid interface during the gas sensing process, so as to solve the scientific problems encountered in the research. Among them, the in-situ cell plays a linking role and is the key to the combined application of spectroscopy detection technology and the gas sensing field. The research on the gas-solid interface reaction mechanism needs to use in-situ spectroscopy technology (such as Raman spectroscopy) to track the reaction intermediates and surface dynamic changes in real time. The in-situ cell is the core component connecting spectroscopy detection and gas sensing, and needs to meet the functions of gas circulation, temperature control, electrical signal acquisition, etc. Designing and developing a convenient and fully functional test cell can provide guarantees for the efficiency and reliability of the spectroscopy-gas sensing test technology.

[0003] Existing devices cannot simultaneously obtain Raman spectra (surface reaction information and structural information) and electrical signals (performance response) during the gas-solid interface reaction process, which hinders the comprehensive analysis of the mechanism. Most in-situ cells lack precise control of key reaction conditions such as temperature and electric field (such as the working temperature range of the sensor is 25-150°C), resulting in the disconnection between experimental conditions and actual application scenarios. At present, there is no general device suitable for the gas-solid interface reaction for synchronous detection of in-situ Raman signals and electrical signals for detecting reaction intermediates. Therefore, it is an urgent problem for those skilled in the art to provide a general device that is easy to manufacture, low in cost, and has functions such as gas ventilation, power supply, and temperature control, and is suitable for synchronous detection of in-situ Raman signals and electrical signals. Summary of the Invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a dynamic detection device for in-situ Raman spectroscopy at the gas-solid interface with controllable temperature and power supply.

[0005] A controllable-temperature and powered gas-solid interface in-situ Raman spectroscopy dynamic detection device provided by the present invention includes a target gas gas bag, a peristaltic pump, pipelines, an in-situ cell, an exhaust gas gas bag, a Raman spectrometer, an external power supply, and a computer; the in-situ cell is arranged in the Raman spectrometer; the in-situ cell includes an intake air duct and an exhaust air duct; the target gas gas bag is communicated with the intake port of the peristaltic pump through a pipeline, the exhaust port of the peristaltic pump is communicated with the intake air duct of the in-situ cell through a pipeline, and the exhaust air duct of the in-situ cell is communicated with the intake port of the exhaust gas gas bag through a pipeline; the in-situ cell is electrically connected to the computer and the external power supply through a first group of wires and a second group of wires respectively.

[0006] Further, the in-situ cell includes a quartz glass sheet, an upper cover, a housing, a bottom cover, a ceramic sheet, interdigital electrodes, and a heating pad; wherein,

[0007] The housing is arranged in a ring shape, and two through grooves are symmetrically arranged on the housing; one ends of the intake air duct and the exhaust duct are respectively fixedly arranged inside the through grooves in a sealed manner for communicating the inside and outside of the housing; two other through grooves are arranged on the housing between the through grooves for the wiring installation of the wires; the bottom cover is arranged in a plate shape and is fixedly arranged on the bottom surface of the housing;

[0008] The upper cover is arranged in a ring shape corresponding to the housing for carrying the quartz glass sheet, and is detachably and switchably arranged on the top surface of the housing for multiple uses and putting samples;

[0009] The quartz glass sheet, as the path of Raman laser, is fixedly arranged on the top surface of the upper cover;

[0010] The ceramic sheet is fixedly arranged on the top surface of the bottom cover inside the housing for hindering heat conduction to protect the bottom cover;

[0011] The interdigital electrodes are fixedly arranged on the top surface of the heating pad for coating the sensing material to be studied to form a sensor device;

[0012] The heating pad is fixedly arranged on the top surface of the ceramic sheet for regulating the working temperature of the gas sensor device.

[0013] Further, the heating pad is closely attached to the ceramic sheet, and the interdigital electrodes are closely attached to the heating pad.

[0014] Further, the interdigital electrodes are electrically connected to the computer through the first group of wires, the heating pad is electrically connected to the external power supply through the second group of wires, and the first group of wires and the second group of wires respectively pass through the third through groove.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0016] The controllable-temperature and energized in-situ Raman spectroscopy dynamic detection device for gas-solid interfaces of the present invention can utilize a heating pad to detect the dynamic differences in the gas-sensing process at the gas-solid interface under different heating conditions, and further detect the structural changes of reaction intermediates during the sensing process; it can obtain the Raman information of reaction intermediates at different temperatures, and has low cost, is easy to manufacture, and has strong versatility;

[0017] The interdigital electrode is connected to a computer through a wire, and the computer collects the changes in the electrical signals generated by the gas-solid interface reaction;

[0018] In addition, the controllable-temperature and energized in-situ Raman spectroscopy dynamic detection device for gas-solid interfaces of the present invention spins or drops a sample on the surface of the interdigital electrode. During the testing process, the surface of the sample is not contacted, and in-situ Raman testing is carried out after introducing the target gas, which is a non-destructive testing technology.

[0019] It should be understood that the content described in the invention content section is not intended to limit the key or important features of the embodiments of the present invention, nor to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] By reading the detailed description of the non-limiting embodiments with reference to the following drawings, other features, objectives, and advantages of the present invention will become more obvious:

[0021] Figure 1 It is a schematic diagram of the overall structure of a controllable-temperature and energized in-situ Raman spectroscopy dynamic detection device for gas-solid interfaces provided by an embodiment of the present invention;

[0022] Figure 2 It is a schematic diagram of the structure of the in-situ cell of this example;

[0023] Figure 3 It is an exploded view of the structure of the in-situ cell of this example;

[0024] Figure 4 It is a top view dimensional structure diagram of the in-situ cell of this example;

[0025] Figure 5 It is a side view dimensional structure diagram of the in-situ cell of this example;

[0026] Figure 6 It is a graph of the in-situ Raman signal changes when different concentrations of target gas and air are introduced in this example;

[0027] Figure 7 It is for this example when introducing different concentrations of target gas at 1361 cm-1 The Raman peak at 1580 cm -1 Schematic diagram of the change of Raman peak with time;

[0028] Figure 8 Schematic diagram of the change of the resistance response value of different concentrations of target gas introduced into this example with time;

[0029] Figure 9 Schematic diagram of the relationship between Raman and resistance response values of this example with the concentration of target gas;

[0030] Reference numerals in the figure: 1. Target gas gas bag; 2. Peristaltic pump; 3. Pipeline; 4. In-situ cell; 41. Quartz glass sheet; 42. Upper cover; 43. Housing; 44. Bottom cover; 45. Interdigitated electrode; 46. Heating pad; 47. Ceramic sheet; 48. First through groove; 49. Second through groove; 410. Third through groove; 411. Inlet gas guide pipe; 412. Outlet gas guide pipe; 5. Exhaust gas gas bag; 6. Raman spectrometer; 7. External power supply; 8. Computer; 9. First group of wires; 10. Second group of wires. Specific implementation mode

[0031] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related invention, rather than limiting the invention. In addition, it should be noted that for the convenience of description, only the parts related to the invention are shown in the drawings.

[0032] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the drawings and embodiments.

[0033] Please refer to Figures 1-9 , the embodiment of the present invention provides a temperature-controlled and energized in-situ Raman spectroscopy dynamic detection device for gas-solid interface, including a target gas gas bag 1, a peristaltic pump 2, a pipeline 3, an in-situ cell 4, an exhaust gas gas bag 5, a Raman spectrometer 6, an external power supply 7, a computer 8, and wires 9;

[0034] The in-situ cell 4 is arranged in the Raman spectrometer 6; the in-situ cell 4 includes an inlet gas guide pipe 411 and an outlet gas guide pipe 412;

[0035] In a preferred embodiment, the in-situ cell 4 includes a quartz glass sheet 41, an upper cover 42, a housing 43, a bottom cover 44, a ceramic sheet 47, an interdigitated electrode 45, and a heating pad 46; among them,

[0036] The housing 43 is arranged in a ring shape. On both symmetric sides of the housing 43, a first through groove 48 and a second through groove 49 are respectively arranged. The first through groove 48 and the second through groove 49 are symmetrically arranged, and the first through groove 48 and the second through groove 49 penetrate through the inside and outside of the housing 43.

[0037] One end of the intake air duct 411 is fixedly arranged inside the first through groove 48 in a sealed manner, and one end of the exhaust air duct 412 is fixedly arranged inside the second through groove 49 in a sealed manner. The intake air duct 411 and the exhaust air duct 412 are used to connect the inside and outside of the housing 43.

[0038] Among them, between the intake air duct 411 and the first through groove 48, and between the exhaust air duct 412 and the second through groove 49, AB glue is used for sealing the interfaces.

[0039] On the housing 43, two third through grooves 410 are arranged between the first through groove 48 and the second through groove 49 for the wiring installation of the wire 9.

[0040] The bottom cover 44 is arranged in a plate shape and is fixedly arranged on the bottom surface of the housing 43. Between the housing 43 and the bottom cover 44, they are sealed and pasted with 502 glue.

[0041] The upper cover 42 is arranged in a ring shape corresponding to the housing 43 and is detachably arranged on the top surface of the housing 43. Between the upper cover 42 and the housing 43, they are detachably sealed and pasted with polyimide tape.

[0042] The quartz glass sheet 41 is fixedly arranged on the top surface of the upper cover 42. Between the quartz glass sheet 41 and the upper cover 42, they are sealed and pasted with 502 glue.

[0043] The ceramic sheet 47 is fixedly arranged on the top surface of the bottom cover 44 inside the housing 43. Between the ceramic sheet 47 and the bottom cover 44, they are sealed and pasted with 502 glue.

[0044] The heating pad 46 is fixedly arranged on the top surface of the ceramic sheet 47. Among them, the heating pad 46 is closely attached to the ceramic sheet 47, and between the heating pad 46 and the ceramic sheet 47, they are fixed with polyimide double-sided tape.

[0045] The interdigital electrode 45 is fixedly arranged on the top surface of the heating pad 46. Among them, the interdigital electrode 45 is closely attached to the heating pad 46, and between the interdigital electrode 45 and the heating pad 46, they are fixed with polyimide double-sided tape.

[0046] The in-situ cell 4 is electrically connected to the computer 8 and the external power supply 7 through the first set of wires 9 and the second set of wires 10 respectively. Specifically, the interdigital electrode 45 is electrically connected to the computer 8 through the first set of wires 9 after passing through the third through groove 410. The computer 8 is used to collect the change of the electrical signal generated by the gas-solid interface reaction, so as to adjust the working voltage of the sensor (voltage range 0.1 - 10V) and obtain the dynamic electrical signal diagram of the response-recovery of the sensor device to the target gas;

[0047] The heating pad 46 is electrically connected to the external power supply 7 through the second set of wires 10 after passing through the third through groove 410. The temperature of the heating pad is adjusted by adjusting the voltage of the external power supply 7, that is, the working temperature of the sensor device (temperature range 25 - 150 °C); The gaps between the first set of wires 9 and the second set of wires 10 and the third through groove 410 are filled with caulking glue and the interfaces are sealed with AB glue.

[0048] The target gas bag 1 is connected to the inlet of the peristaltic pump 2 through the pipeline 3, the outlet of the peristaltic pump 2 is connected to the inlet gas pipe 411 of the in-situ cell 4 through the pipeline 3, and the outlet gas pipe 412 of the in-situ cell 4 is connected to the inlet of the waste gas bag 5 through the pipeline 3;

[0049] Among them, the peristaltic pump 2 is used to control the flow rate of the target gas in the pipeline to achieve the stable flow of the target gas;

[0050] In this embodiment, the sample is spin-coated or drop-coated on the surface of the interdigital electrode 45. The test process does not contact the sample surface. In-situ Raman testing is carried out after introducing the target gas, which is a non-destructive testing technology;

[0051] In this embodiment, heating is carried out through the heating pad 46 to achieve gas sensing detection at different temperatures, and further achieve the dynamic and differential detection of the structural characteristics of the gas-solid interface sensing reaction intermediate under heating conditions.

[0052] The controllable temperature and powered gas-solid interface in-situ Raman spectroscopy dynamic detection device of the present invention is not only applicable to the sensing reaction of gaseous gas sources and solid materials, but also applicable to the sensing reaction of volatile liquid gas sources and solid materials.

[0053] For the reaction of gaseous gas sources: The target gas bag 1 is connected to the inlet of the peristaltic pump 2 through the pipeline 3, the outlet of the peristaltic pump 2 is directly connected to the inlet gas pipe 411 of the in-situ cell 4, and the outlet gas pipe 412 of the in-situ cell 4 is connected to the waste gas bag 5 through the pipeline 3, so as to carry out the reaction of the gas-solid interface in the in-situ cell 4;

[0054] For a volatile liquid gas source: A gas source bottle is installed between the peristaltic pump 2 and the in-situ cell 4. The gas outlet of the peristaltic pump 2 is connected to the gas inlet of the gas source bottle through a pipeline 3. The gas outlet of the gas source bottle is connected to the intake air duct 411 of the in-situ cell 4 through a pipeline 3. The exhaust air duct 412 of the in-situ cell 4 is connected to the waste gas bag 5 through a pipeline 3. The gas source bottle installed between the peristaltic pump 2 and the intake air duct 411 of the in-situ cell 4 has its gas inlet below the liquid level and its gas outlet above the liquid level and close to the bottle stopper. It is used to contain the volatile liquid target gas. The peristaltic pump 2 is used to accelerate the volatilization of the target liquid by the bubbling method, so as to carry out the reaction at the gas-solid interface in the in-situ cell 4.

[0055] In addition, the Raman spectrometer can be replaced with a photoluminescence spectrometer, an infrared spectrometer, etc., so as to realize the synchronous detection of electrical signals and other in-situ devices;

[0056] If the experiment does not require the synchronous monitoring of electrical signals and in-situ signals, the computer can be not connected, and only the in-situ spectral signals are measured for qualitative analysis.

[0057] An application example of the present invention: Silver-doped indium tin oxide (Ag@ITO), as a promising gas sensing material for nitric oxide (NO), we carried out synchronous detection of its Raman signal and electrical signal to capture the intermediates of its gas-solid interface reaction and further explore its reaction mechanism. In this example, experiments were carried out at temperatures of 25 °C, 100 °C, and 150 °C; and test voltages of 0.1 V, 4.5 V, and 10 V. Among them, the temperature of 100 °C and the test voltage of 4.5 V are the optimal parameters of this example. Different concentrations of NO (5 ppm, 15 ppm, 20 ppm, 30 ppm) and air were respectively introduced to detect the response and recovery changes of its Raman spectrum and electrical signal. It can be seen that the Raman peaks at 1361 cm -1 and 1580 cm -1 increase with the introduction of NO gas and decrease with the introduction of air, indicating that NO gas will react with the surface of the Ag@ITO sensing material to form reaction intermediates. By referring to the literature, it can be determined that the Raman peak at 1361 cm -1 is for nitrite (NO2 - ) and the Raman peak at 1580 cm -1 is for nitrate (NO3 - ). From this, it can be proved that NO gas will react with the surface of the Ag@ITO sensing material to generate NO2 - and NO3 - intermediates (such as Figure 6 ).

[0058] In addition, with the increase of the concentration of the introduced NO gas, the 1361 cm -1 and 1580 cm -1The Raman peak at [location] gradually becomes stronger, indicating that as the concentration of NO gas introduced increases, the amount of NO2 - and NO3 - intermediate products generated gradually increases (as shown in Figure 7 ). In addition, the electrical signal synchronously detected with the Raman signal also exhibits similar properties, that is, the change in resistance (Rg / Ra) gradually increases as the NO concentration increases (as shown in Figure 8 ).

[0059] Finally, we directly correlated the Raman signal intensity and the resistance response value that vary with the concentration of the target gas (as shown in Figure 9 ) to study the quantitative relationship between the intermediate products and the sensing signal. The response value of NO is proportional to the Raman signal intensity of nitrous acid, and the relationship is y = -39.0 + 38.9x; r 2 = 0.998, and it is also proportional to the Raman signal intensity of nitric acid, and the relationship is y = -35.4 + 35.5x; r 2 = 0.991). The slopes of the two are very close (38.9 vs. 35.5), indicating that these two intermediate species (NO2 - and NO3 - ) and their corresponding surface reactions each contribute approximately 50% to the generation of the NO electrical signal, thus completing an in-depth explanation of its mechanism. If the in-situ Raman spectroscopy dynamic detection device removes the Raman function, only the electrical signal can be obtained, and the Raman spectroscopy signal cannot be obtained, making it impossible to study the key intermediate products affecting the electrical signal and their quantity change rules, and impossible to study the gas-sensing mechanism from a microscopic perspective; if the in-situ Raman spectroscopy dynamic detection device removes the power-on function, only the Raman spectroscopy signal can be obtained, and the electrical signal cannot be obtained, making it impossible to directly establish a quantitative relationship (there may be no quantitative relationship) between the electrical signal and the Raman signal under the same test environment (such as environmental temperature and humidity), and it is impossible to ensure the linearity degree (r 2 may decrease). If the in-situ Raman spectroscopy dynamic detection device removes the temperature control function, the application range of the device is limited, and only the Raman spectroscopy signal and the electrical signal can be obtained under one temperature condition, which will limit the research of different material systems. Usually, the optimal temperatures of different sensing material systems are different.

[0060] The temperature-controlled and power-on gas-solid interface in-situ Raman spectroscopy dynamic detection device disclosed in the present invention is used to achieve the synchronous acquisition of the Raman signal and the electrochemical signal of the intermediate species of the gas-solid interface reaction under different temperature conditions; the interdigital electrode 45 is connected to the computer 8, the sample is coated on the interdigital electrode 45, and the electrical signal of the sensitive material sample is monitored through the computer 8; the heating pad 46 is connected to the external power supply 7, and the temperature of the sensitive material sample is controlled by adjusting the heating voltage; the target gas passes through the peristaltic pump 2, and the target gas molecules are pumped into the in-situ cell 4 and act on the surface of the sensitive material for the gas-solid interface reaction;

[0061] This in-situ monitoring device can be mounted on a Raman spectrometer to synchronously collect the electrical signals and Raman signals of the intermediate species in the gas-solid reaction on the surface of sensitive materials, providing data support for revealing the sensing mechanism of the gas-solid interface and reference for designing highly sensitive and selective sensing materials. Compared with the prior art, the present invention also has the advantages of simple assembly, temperature control, power supply, gas supply, etc., and is widely applicable to the in-situ Raman testing of gas-solid interface chemical reactions.

[0062] In the description of this specification, terms such as "connection", "installation", "fixation", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0063] In the description of this specification, the description of terms such as "one embodiment", "some embodiments", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or instance. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0064] The above are only the preferred embodiments of this application and are not intended to limit this application. For those skilled in the art, various changes and modifications can be made to this application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims

1. A temperature-controllable and energized gas-solid interface in-situ Raman spectroscopy dynamic detection device, characterized in that: It comprises a target gas bag, a peristaltic pump, a pipeline, an in-situ pool, an exhaust gas bag, a Raman spectrometer, an external power supply and a computer; the in-situ pool is arranged in the Raman spectrometer, and is used to obtain chemical information of reaction intermediates and products of the sensor device in the target gas and information on surface structural changes of the sensing material; the in-situ pool comprises an air inlet duct and an air outlet duct; the target gas bag is connected to the air inlet of the peristaltic pump through the pipeline, the air outlet of the peristaltic pump is connected to the air inlet duct of the in-situ pool through the pipeline, and the air outlet duct of the in-situ pool is connected to the air inlet of the exhaust gas bag through the pipeline; the in-situ pool is electrically connected to the computer and the external power supply through a first group of wires and a second group of wires respectively.

2. The temperature-controllable and energized gas-solid interface in-situ Raman spectroscopy dynamic detection device according to claim 1 is characterized in that: The in-situ cell comprises a quartz glass sheet, an upper cover, a shell, a bottom cover, a ceramic sheet, interdigital electrodes and a heating pad; wherein, The shell is arranged in an annular shape, and two through grooves are symmetrically arranged on the shell; one end of the air inlet duct and the air outlet duct are respectively sealed and fixedly arranged inside the through grooves, so as to connect the inner and outer sides of the shell; another two through grooves are arranged on the shell between the through grooves, so as to be used for wiring and installation of the electric wires; The bottom cover is configured in a plate shape and is fixedly disposed on the bottom surface of the shell; The upper cover is arranged in a ring shape corresponding to the shell, used to carry the quartz glass sheet, and is detachable. The switch is arranged on the top surface of the shell to facilitate multiple uses and the placement of samples; The quartz glass sheet, serving as a passage for the Raman laser, is fixedly disposed on the top surface of the upper cover; The ceramic sheet is fixedly arranged on the top surface of the bottom cover and inside the housing to prevent heat conduction and protect the bottom cover; The interdigital electrodes are fixedly arranged on the top surface of the heating pad and are used to coat the sensing material to be studied to form a sensor device; The heating pad is fixedly arranged on the top surface of the ceramic sheet and is used to adjust the working temperature of the gas sensor device.

3. The temperature-controllable and energized gas-solid interface in-situ Raman spectroscopy dynamic detection device according to claim 2 is characterized in that: The interdigitated electrodes are used to coat the sensing material to be studied to form a sensor device, and are electrically connected to the computer through the first group of wires. The first group of wires are arranged through the third through-groove to adjust the operating voltage of the sensor device and obtain a dynamic electrical signal diagram of the response-recovery of the sensor device to the target gas. The operating voltage range of the sensor device is 0.1V to 10V.

4. The temperature-controllable and energized gas-solid interface in-situ Raman spectroscopy dynamic detection device according to claim 2 is characterized in that: The heating pad is arranged close to the ceramic sheet, the interdigital electrode is arranged close to the heating pad, the heating pad is electrically connected to the external power supply through the second group of wires, and the second group of wires is arranged through the third through groove to adjust the temperature of the heating pad, that is, the working temperature of the sensor device, and the working temperature range of the sensor device is 25 to 150°C.

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