Heavy-load displacement adjustment mechanism

Abstract

The present invention relates to the field of semiconductor equipment technology, and discloses a heavy-load displacement adjustment mechanism, which includes: a first plate body, a second plate body and a third plate body; a first floating part, having a first pressing part; a first driving part, an output shaft connected to the first connecting part; the first connecting part is pressed and fixed to the first plate body by the first pressing part; the pressing force of the first pressing part is adjustable; a second floating part, having a second pressing part; a second driving part, an output shaft connected to the second connecting part; the second connecting part is pressed and fixed to the second plate body by the second pressing part; the pressing force of the second pressing part is adjustable; the heavy-load displacement adjustment mechanism provided by the present invention, the driving part and the plate body are floatingly connected by means of the floating part, and the floating part can be adjusted by loosening pressure and increasing pressure to solve the jamming and mechanical jamming encountered during the displacement process, thereby ensuring the precision of the displacement adjustment of the heavy-load structure, achieving the purpose of heavy-load precision adjustment, and taking into account the needs of heavy-load and high-precision precision displacement adjustment.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a heavy-load displacement adjustment mechanism. Background Art

[0002] In the field of semiconductor chip processing, the smaller the chip's feature size, the higher the chip's integration and the better the performance; the smaller the chip, the more precise the line lithography, and the higher the requirements for the lighting lens; the lighting lens ensures line precision by increasing the magnification, which greatly increases the size and weight of the lighting lens.

[0003] In the prior art, a heavy-duty adjustment mechanism is usually used to achieve adjustment of the fixed position of the lens, and the adjustment directions are at least two mutually perpendicular directions located in the same horizontal plane, specifically a first direction and a second direction, the first direction corresponds to the y direction, and the second direction corresponds to the x direction; since the weight of the lighting lens is greatly increased, when the position of the lighting lens is adjusted, the connection parts, drive structure and other positions of the heavy-duty adjustment mechanism are prone to jamming and mechanical jamming, making it difficult to achieve precise displacement of the heavy-loaded lighting lens, affecting the quality of the dimensional adjustment work of the lighting lens. Summary of the Invention

[0004] In view of this, the present invention provides a heavy-load displacement adjustment mechanism to solve the problem that it is difficult to achieve precise position adjustment of a heavy-loaded lighting lens on the adjustment mechanism.

[0005] The present invention provides a heavy-load displacement adjustment mechanism, comprising: a first plate body and a second plate body that are at least partially overlapped and slidably connected in sequence; a first floating part, fixed to the first plate body, the first floating part having a first pressing member, and the pressing force of the first pressing member is adjustable; a first driving member, fixed to the second plate body; a first connecting part, connected to the first driving member; the first connecting part is pressed by the first pressing member and floatingly connected to the first plate body; in a normal state, the first connecting part is pressed and fixed to the first plate body by the first pressing member, and the first driving member is suitable for driving the first plate body to move; in a first abnormal state, the first pressing member adjusts the pressing force acting on the first connecting part, which is suitable for loosening or re-tightening the first connecting part and the first plate body.

[0006] Beneficial effects: The floating part floats and presses the connecting part against the plate body, thereby making the driving part float and connected to the plate body. The floating part can change the floating pressing force acting on the connecting part, thereby solving the jamming and mechanical jamming phenomena generated during the movement by adding or subtracting pressure, and increasing the pressure to adjust to avoid the problem of looseness at the connecting part and thus reducing the transmission sensitivity. The precision of heavy-load structures such as lighting lenses during displacement adjustment is always guaranteed, and the purpose of heavy-load precision adjustment is achieved, taking into account the heavy-load requirements and the requirements of high-precision precision displacement adjustment, achieving both, and having a strong use effect. In addition, the floating part provides an initial preload force acting on the connecting part, effectively eliminating the mechanical clearance error, reducing the drive displacement return amount, and driving the precision jump.

[0007] Beneficial effects: The connecting part is composed of a release part and a driving part, so that the connecting part has an additional release function. The release part is floated and pressed to the plate body by the floating part in normal use. When an emergency situation occurs and the floating part cannot be adjusted and restored, the release part will withdraw from the floating part and the plate body in time, and then directly disconnect the connection between the driving part and the plate body to prevent structural damage. The emergency release mechanism can quickly cut off the connection between the driving end and the transmission end, effectively eliminating system risks.

[0008] Beneficial effects: The first clamping member cooperates with the fourth driving member, and the second clamping member cooperates with the third driving member. By linking the force-applying elements with the same force direction, the control accuracy of the mechanism is improved, and the safety of the system operation is improved, to prevent any single force-applying element from losing control or insufficient force to cause a failure risk; at the same time, a buckle and a compensation mechanism are provided in the linkage mechanism, and the buckle controls the connection and disconnection of the linkage mechanism, so that the clamping member and the driving member work independently of each other under normal conditions, and are linked when one of them fails. The compensation mechanism is used to compensate for the pressure transmitted by the clamping member or the linkage member during the linkage process, to prevent the linkage force from affecting its own working state, and to ensure the normal realization of the driving and clamping functions.

[0009] In an optional embodiment, it also includes: a third plate body, slidingly connected to the side of the second plate body facing away from the first plate body; a second floating part, fixed to the second plate body, the second floating part has a second pressing member, and the pressing force of the second pressing member is adjustable; a second driving member, fixed to the third plate body; a second connecting part, connected to the second driving member; the second connecting part is pressed by the second pressing member and floatingly connected to the second plate body; in a normal state, the second connecting part is pressed and fixed to the second plate body by the second pressing member, and the second driving member is suitable for driving the second plate body to move; in the first abnormal state, the second pressing member adjusts the pressing force acting on the second connecting part, which is suitable for loosening or re-tightening the second connecting part and the second plate body.

[0010] In an optional embodiment, the first connecting part includes a third driving member and a first disengaging member, and the third driving member is fixedly connected to the output shaft of the first driving member; under normal conditions, the first disengaging member is floatingly connected to the first plate body with the help of the first floating part; the third driving member is connected to the first disengaging member; under a second abnormal condition, the third driving member drives the first disengaging member to move so that it disengages from the first floating part and the first plate body.

[0011] In an optional embodiment, the first ejection member has a first large end and a first small end, and the first large end is larger than the first small end in a first direction; under normal conditions, the first large end is pressed by the first clamping member and floatingly connected to the first plate body; under a second abnormal condition, the first ejection member moves, the first large end is separated from the first clamping member and the first plate body, and the first small end is spaced between the first clamping member and the first plate body, suitable for disconnecting the first driving member from the first plate body.

[0012] In an optional embodiment, the second connecting portion includes a fourth driving member and a second disengaging member, wherein the fourth driving member is fixedly connected to the output shaft of the second driving member; in a normal state, the second disengaging member is floatingly connected to the second plate body via the second floating portion;

[0013] The fourth driving member is connected to the second disengaging member; in the second abnormal state, the fourth driving member drives the second disengaging member to move so as to separate from the second floating portion and the second plate body.

[0014] In an optional embodiment, the second ejection member has a second large end and a second small end, and the second large end is larger than the second small end in the second direction; under normal conditions, the second large end is pressed by the second pressing member and floatingly connected to the second plate body; under a second abnormal condition, the second ejection member moves, the second large end is separated from the second pressing member and the second plate body, and the second small end is spaced between the second pressing member and the second plate body, suitable for disconnecting the second driving member from the second plate body.

[0015] In an optional embodiment, the first clamping member and the fourth driving member are connected by means of a linkage system; the second clamping member and the third driving member are connected by means of a linkage system; a connecting switch and a compensation structure are provided in the linkage system, the connecting switch is suitable for disconnecting or connecting the linkage system, and the compensation mechanism is suitable for compensating for pressure.

[0016] In an optional embodiment, the direction of the pressing force of the first pressing member is parallel to the first direction, and the direction of the pressing force of the second pressing member is parallel to the second direction; under normal conditions, the first driving member drives the first plate body to move along the first direction, and the second driving member drives the second plate body to move along the second direction.

[0017] In an optional embodiment, a first clearance groove is provided at the first large end, and the output shaft of the third driving member is connected to the inner wall of the first clearance groove; in the second abnormal state, the first disengagement member moves, and the first clearance groove gradually covers the third driving member.

[0018] In an optional embodiment, a second give way groove is provided at the second large end, and the output shaft of the fourth driving member is connected to the inner wall of the second give way groove; in the second abnormal state, the second disengagement member moves, and the second give way groove gradually covers the fourth driving member.

[0019] In an optional embodiment, it also includes: a first slide rail, which is clamped between the first plate body and the second plate body and extends along the first direction, suitable for making the first plate body slide along the first direction relative to the second plate body; the first slide rail includes a first slideway and a plurality of first sliders slidably connected to the first slideway; at least one of the first sliders is connected to the first ejection member; at least one of the first sliders is connected to the first ejection member by means of a third slide rail, and the third slide rail extends along the second direction.

[0020] In an optional embodiment, it also includes: a second slide rail, which is clamped between the second plate body and the third plate body and extends along the second direction, suitable for making the second plate body slide along the second direction relative to the third plate body; the second slide rail includes a second slideway and a plurality of second sliders slidably connected to the second slideway; at least one second slider is connected to the second ejection member; at least one second slider is connected to the second ejection member by means of a fourth slide rail, and the fourth slide rail extends along the first direction.

[0021] In an optional embodiment, a groove is provided on one side of the first plate body along the second direction, and the end surfaces of both sides of the first large end along the first direction respectively abut against the inner wall of the groove and the first clamping member; a protrusion is formed on the second plate body; under normal conditions, the end surfaces of both sides of the second large end along the second direction respectively abut against the protrusion and the second clamping member.

[0022] In an optional embodiment, the first floating part further has a first connecting member, the first connecting member is fixed to the first plate body, and the first clamping member is arranged at the first connecting member; the second floating part further has a second connecting member, the second connecting member is fixed to the second plate body, and the second clamping member is arranged at the second connecting member.

[0023] In a second aspect, the present invention provides an electronic device electrically connected to any one of the heavy-load displacement adjustment mechanisms described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 is a schematic diagram of the heavy-load displacement adjustment mechanism of the present invention;

[0026] Figure 2 Schematic diagram of the disassembly of the heavy-load displacement adjustment mechanism of the present invention along the first direction;

[0027] Figure 3 Schematic diagram of the disassembly of the heavy-load displacement adjustment mechanism of the present invention along the second direction;

[0028] Figure 4 Schematic diagram of the heavy-load displacement adjustment mechanism of the present invention in the disengaged state;

[0029] Figure 5 It is a top view schematic diagram of the heavy-load displacement adjustment mechanism of the present invention in the disengaged state;

[0030] Figure 6 Schematic diagram of the third and fourth slide rails of the present invention;

[0031] Figure 7 This is a schematic diagram of the first connecting portion of the present invention;

[0032] Figure 8 This is a schematic diagram of the linkage state of the heavy-load displacement adjustment mechanism of the present invention;

[0033] Figure 9 Schematic diagram of the second disengagement method of the disengagement member of the heavy-load displacement adjustment mechanism of the present invention;

[0034] Figure 10 Schematic diagram of the third disengagement method of the disengagement member of the heavy-load displacement adjustment mechanism of the present invention;

[0035] Figure 11Schematic diagram of the second floating connection mode of the heavy-load displacement adjustment mechanism of the present invention.

[0036] Description of reference numerals:

[0037] 1. First plate body; 2. Second plate body; 3. Third plate body; 4. First floating part; 41. First pressing member; 42. First connecting member; 5. First driving member; 6. First connecting part; 61. Third driving member; 62. First disengaging member; 621. First large end; 622. First small end; 623. First clearance groove; 7. Second floating part; 71. Second pressing member; 72. Second connecting member; 8. Second driving member; 9. Second connecting part; 91. Fourth driving member; 92. Second disengaging member; 921. Second large end; 922. Second small end; 923. Second clearance groove; 10. First slide rail; 101. First slideway; 102. First slider; 11. Second slide rail; 111. Second slideway; 112. Second slider; 12. Groove; 13. Protrusion; 14. Third slide rail; 15. Fourth slide rail. DETAILED DESCRIPTION

[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0039] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0040] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0041] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0042] The following combination Figures 1 to 11 , describing embodiments of the present invention.

[0043] In the first aspect, an embodiment of the present invention provides a heavy-load displacement adjustment mechanism, comprising a first plate body 1, a second plate body 2 and a third plate body 3 that are at least partially overlapped and slidably connected in sequence, and also comprising a first driving member 5 and a second driving member 8 for driving the movement of the plate body, and also comprising a first connecting portion 6 and a second connecting portion 9 for connecting the driving member to the plate body and for emergency disengagement, and also comprising a first floating portion 4 and a second floating portion 7 for floatingly connecting the connecting portion to the plate body; in this embodiment, the output shaft of the driving part and the plate body are in a floating connection, and the adjustment structure can solve the jamming and mechanical jamming phenomena generated during the movement by loosening the pressure and increasing the pressure to avoid loosening of the connection part and thus reducing the transmission sensitivity by changing the clamping force at the connection part, thereby ensuring the precision of the heavy-load structure during displacement adjustment at all times and achieving the purpose of heavy-load precision adjustment.

[0044] It should be noted that the connection part is connected to the plate body in a floating manner by means of a compression piece at the floating part. The floating connection can provide a relaxation buffer for the adjustment mechanism during movement and adaptively adjust the jamming and mechanical deadlock phenomena.

[0045] The first connecting portion 6 includes a third driving member 61 and a first disengaging member 62, and the first floating portion 4 includes a first connecting member 42 and a first pressing member 41; the first pressing member 41 is fixed to the first plate body 1 by means of the first connecting member 42; the first disengaging member 62 includes a first large end 621 and a first small end 622, and the size of the first large end 621 in the first direction is larger than the first small end 622; wherein the output shaft of the third driving member 61 is fixed to the first disengaging member 62, and the base of the third driving member 61 is fixed to the output shaft of the first driving member 5. In this embodiment, the first large end The end 621 is arranged close to the base, and the output shaft of the third driving member 61 is arranged parallel to the second direction; when the adjustment mechanism is in normal use, the first clamping member 41 is pressed and abutted against one side end face of the first large end 621 along the first direction, and at the same time, the other side end face of the first large end 621 along the first direction abuts against the first plate body 1, so that the first release member 62 is pressed and connected to the first plate body 1; the clamping force of the first clamping member 41 is adjustable, and the first release member 62 is floatingly pressed against the first plate body 1, and then the first driving member 5 is floatingly connected to the first plate body 1.

[0046] The second connecting portion 9 includes a fourth driving member 91 and a second disengaging member 92, and the second floating portion 7 includes a second connecting member 72 and a second pressing member 71; the second pressing member 71 is fixed to the second plate body 2 by means of the second connecting member 72; the second disengaging member 92 includes a second large end 921 and a second small end 922, and the size of the second large end 921 in the second direction is larger than the second small end 922; wherein the output shaft of the third driving member 61 is fixed to the second disengaging member 92, and the base of the third driving member 61 is fixed to the output shaft of the second driving member 8. In this embodiment, the second large end The end 921 is arranged close to the base, and the output shaft of the fourth driving member 91 is arranged parallel to the first direction; when the adjusting mechanism is in normal use, the second clamping member 71 is pressed and abutted against one side end face of the second large end 921 along the second direction, and at the same time, the other side end face of the second large end 921 along the second direction abuts against the second plate body 2, so that the second release member 92 is pressed and connected to the second plate body 2; the clamping force of the second clamping member 71 is adjustable, and the second release member 92 is floatingly pressed and abutted against the second plate body 2, and then the second driving member 8 is floatingly connected to the second plate body 2.

[0047] Furthermore, the directions of the forces acting on the first clamping member 41 and the fourth driving member 91 are both in the first direction, and the first clamping member 41 and the fourth driving member 91 are linked with each other by means of a mechanical structure; the directions of the forces acting on the second clamping member 71 and the third driving member 61 are both in the second direction, and the second clamping member 71 and the third driving member 61 are linked with each other by means of a mechanical structure; the mechanical structure may be, but is not limited to, a direct connection structure such as a hinge, a slide rail, or a mechanical direct connection; a connection switch and a compensation mechanism are provided in the mechanical structure, and the connection switch may be a fully automatic disengagement connection buckle to automatically control the connection or disconnection of the linkage structure according to actual conditions.

[0048] It should be noted that the adjustment directions of the adjustment mechanism are at least two mutually perpendicular directions located in the same horizontal plane, specifically a first direction and a second direction, wherein the first direction corresponds to the y direction and the second direction corresponds to the x direction.

[0049] It should be noted that the base of the first driving member 5 is fixed to the second plate 2, and the output shaft is floatingly connected to the first plate 1, which is used to drive the first plate 1 to move along the y direction; the base of the second driving member 8 is fixed to the third plate 3, and the output shaft is floatingly connected to the second plate 2, which is used to drive the second plate 2 and the first plate 1 to move along the x direction.

[0050] The specific working process of the heavy-load displacement adjustment mechanism is as follows: on the one hand, during the process of the first plate body 1 performing displacement adjustment along the first direction, i.e., the y direction, due to the heavy weight of the lens, mechanical jamming may occur at the first driving member 5; in the first abnormal state, i.e., when the first driving member 5 has a tendency to produce jamming or mechanical jamming, the first floating portion 4 immediately performs loosening pressure adjustment, reduces the clamping force of the first clamping member 41, reduces the clamping effect on the first large end 621, and loosens the connection between the first driving member 5 and the first plate body 1. The degree of loosening depends on the specific situation. The first driving member 5 obtains a relaxation buffer along the first direction, and uses the relaxation buffer to eliminate or alleviate the jamming and mechanical jamming phenomenon, and then slowly increases the pressure of the first clamping member 41, so that the first clamping member 41 is re-pressed to the first large end 621, and the displacement adjustment work along the first direction and the y direction is performed again; on the other hand, when the second plate body 2 drives the second plate body 2 to perform displacement adjustment along the first direction, i.e., During the x-direction displacement adjustment, due to the heavy weight of the lens, mechanical jamming may occur at the second driving member 8. When the second driving member 8 tends to produce jamming or mechanical jamming, the second floating part 7 is immediately loosened and adjusted to reduce the clamping force of the second clamping member 71, reduce the clamping effect on the second large end 921, and loosen the connection between the second driving member 8 and the second plate 2. The degree of loosening depends on the specific situation. The second driving member 8 obtains a relaxation buffer along the second direction, and uses the relaxation buffer to eliminate or alleviate the jamming and mechanical jamming. Then, the pressure of the second clamping member 71 is slowly increased, so that the second clamping member 71 is re-pressed to the second large end 921, and the displacement adjustment work along the second direction and the x-direction is performed again; on the other hand, the floating part is pre-pressed at the connection part, so that the connection part between the driving member and the plate body obtains an initial pre-tightening force, which can effectively eliminate mechanical clearance error, reduce the drive displacement return amount, and mechanical precision jump.

[0051] Furthermore, when the connection between the driving part and the plate body is slightly loose, the clamping part at the floating part can promptly increase the clamping force acting on the disengaging part, so that the driving part and the plate body always maintain a stable connection, prevent the transmission sensitivity from decreasing, and ensure the displacement accuracy.

[0052] It should be noted that a pressure sensor is provided at the pressing member for detecting the pressure relationship between the pressing member and the release member in real time, and a displacement sensor is provided at the plate body for detecting the movement displacement state of the plate body in real time.

[0053] The working process of the disengaging structure of the heavy-load displacement adjustment mechanism is as follows: in the second abnormal state, that is, when an emergency risk situation occurs, the disengaging structure is required to disconnect the connection between the driving member and the plate body; on the one hand, when a risk situation is encountered during the displacement adjustment work along the first direction, the third driving member 61 is started, the output shaft of the third driving member 61 contracts, and drives the first disengaging member 62 to retreat from the first plate body 1 and the first clamping member 41, the first large end 621 is disengaged from the floating connection with the first plate body 1 and the first clamping member 41, and the first small end 622 is placed between the first clamping member 41 and the first plate body 1, thereby disconnecting the first driving member 5 from the first plate body 1 and the first clamping member 41. The connection of the plate body 1, the first plate body 1 is in a free state, and the emergency escape processing work is completed; on the other hand, when a risk situation is encountered during the displacement adjustment work along the second direction, the fourth driving member 91 is started, the output shaft of the fourth driving member 91 contracts, and drives the second escape member 92 to retreat from the second plate body 2 and the second clamping member 71, the second large end 921 is disengaged from the floating connection with the second plate body 2 and the second clamping member 71, and the second small end 922 is placed in a gap between the second clamping member 71 and the second plate body 2, thereby disconnecting the second driving member 8 from the second plate body 2, and the second plate body 2 is in a free state, completing the emergency escape processing work.

[0054] It should be noted that the first abnormal state is a state that can be adaptively restored through the floating connection, such as mechanism jamming or mechanical deadlock; the second abnormal state is other working conditions encountered by the adjustment mechanism during the displacement adjustment process that cannot be automatically adjusted and restored through the floating connection, and requires manual or other methods to correct and reset.

[0055] The working process of the linkage structure of the heavy-load displacement adjustment mechanism is as follows: the pressing member and the disengagement drive member are linked by means of a mechanical structure to improve the control accuracy of the mechanism and the safety of the system operation, and prevent the risk of failure caused by any single force-applying element losing control or insufficient force; under normal working conditions, the buckle is disengaged, the linkage structure is disconnected, the first pressing member 41 and the fourth drive member 91 operate independently, and the second pressing member 71 and the third drive member 61 operate independently, and each independently undertakes the corresponding driving work; when an emergency occurs, the emergency may be that one of the pressing member and the disengagement drive member is stuck or not working, that is, the special situation where the power of one of the parties in the linkage system is partially or completely failed, the buckle is automatically connected, the pressing member and the disengagement drive member are linked, and then auxiliary driving or clamping operation is performed on the failed party, and the force in the same direction is increased to the insufficient force or failure point. At the same time, the compensation mechanism can compensate for the pressure transmitted by the pressing member or linkage member on the force-applying party during the linkage process, preventing the linkage from affecting its own working state and ensuring the normal realization of the driving and clamping functions.

[0056] The auxiliary displacement structure of the heavy-load displacement adjustment mechanism is a slide rail, including a first slide rail 10, a second slide rail 11, a third slide rail 14 and a fourth slide rail 15, wherein the first slide rail 10 and the second slide rail 11 are used to realize relative movement between the plates, and the third slide rail 14 and the fourth slide rail 15 are used to assist in the movement of the ejection member; the first slide rail 10 is clamped between the first plate body 1 and the second plate body 2 and is extended along the first direction, and the first slide rail 10 cooperates with the first driving member 5 to realize the sliding of the first plate body 1 relative to the second plate body 2 along the first direction; the second slide rail 11 is clamped between the second plate body 2 and the third plate body 3 and is extended along the second direction, and the second slide rail 11 cooperates with the second driving member 8 to realize the sliding of the second plate body 2 relative to the third plate body 3 along the second direction, and at the same time, the second plate body 2 drives the first plate body 1 to slide synchronously along the second direction; the first slide rail 10 includes a first slideway 101 and a first slider 102, the first slide rail 10 is fixed to a side surface of the second plate body 2 close to the first plate body 1, and a plurality of first sliders 1 02 is slidably connected to the first slide rail 10, wherein one of the first sliders 102 is connected to the first ejecting member 62, and the other first sliders 102 are fixed to the plate surface of the first plate body 1, wherein the first ejecting member 62 and the first slider 102 are connected by means of the third slide rail 14, and the third slide rail 14 is extended along the second direction to ensure the stability of the connection between the first ejecting member 62 and the plate body, and at the same time assist the movement of the first ejecting member 62; the second slide rail 11 includes a second slide 111 and a second slider 112, and the second slide rail 1 1 is fixed to a side surface of the third plate body 3 close to the second plate body 2, and multiple second sliders 112 are slidably connected to the second slide rail 11, one of the second sliders 112 is connected to the second release member 92, and the remaining second sliders 112 are fixed to the plate surface of the second plate body 2. The second release member 92 and the second slider 112 are connected by a fourth slide rail 15. The fourth slide rail 15 extends along the first direction to ensure the stability of the connection between the second release member 92 and the plate body and assist in the movement of the second release member 92.

[0057] The specific connection form between the connecting part, the floating part and the plate body can be that the first plate body 1 is recessed inward at one side edge along the second direction to form a groove 12, and the two side end faces of the first large end 621 along the first direction are respectively abutted against the inner wall of one side of the groove 12 along the first direction and the first clamping member 41, and the first slider 102 is connected to the first release member 62 by means of the groove 12; the second plate body 2 is provided with a through groove passing through along the height direction at one side along the first direction, and a protrusion 13 is formed at the edge of the through groove, and the two side end faces of the second large end 921 along the second direction are respectively abutted against the protrusion 13 and the second clamping member 71, and the second slider 112 is connected to the second release member 92 by means of the through groove.

[0058] Optionally, the first clamping member 41 and the second clamping member 71 can both be other feasible clamping structures such as electric cylinders, hydraulic cylinders, telescopic rods, etc.; the first driving member 5 and the second driving member 8 can both be other linear driving structures such as ball screws, direct drive motors, high-precision gears, etc.; the third driving member 61 and the fourth driving member 91 can both be other driving structures such as electric cylinders, hydraulic cylinders, pneumatic cylinders, etc.

[0059] Optionally, the first large end 621 is recessed at one end close to the third driving member 61 to form a first clearance groove 623, the output shaft of the third driving member 61 is connected to the inner wall of the first clearance groove 623, and the slot spacing of the first clearance groove 623 in the first direction is slightly larger than the size of the base of the third driving member 61 in the first direction, so that when the output shaft drives the first disengagement member 62 to retract, the first large end 621 is sheathed on the base of the third driving member 61 to achieve disengagement with the minimum moving distance.

[0060] Optionally, the second large end 921 is recessed at one end close to the fourth driving member 91 to form a second clearance groove 923, the output shaft of the fourth driving member 91 is connected to the inner wall of the second clearance groove 923, and the slot spacing of the second clearance groove 923 in the second direction is slightly larger than the size of the base of the fourth driving member 91 in the second direction, so that when the output shaft drives the second disengagement member 92 to retract, the second large end 921 is sheathed on the base of the fourth driving member 91 to achieve disengagement with the minimum moving distance.

[0061] In this embodiment, the floating part floats and presses the connecting part against the plate body, thereby making the driving part float and connected to the plate body. The floating part can change the floating pressing force acting on the connecting part, thereby being able to solve the jamming and mechanical jamming phenomena generated during the movement by adding or subtracting pressure adjustment, and increase or decrease pressure adjustment to avoid the problem of looseness at the connecting part and thus reducing the transmission sensitivity, and always ensure the precision of heavy-load structures such as lighting lenses during displacement adjustment in the x and y directions, achieve the purpose of heavy-load precision adjustment, take into account the heavy-load requirements and the requirements of high-precision precision displacement adjustment, achieve both, and have a strong use effect; in addition, the floating part provides an initial preload force acting on the connecting part, effectively eliminates mechanical clearance errors, reduces the drive displacement return amount, and drives the precision jump.

[0062] In this embodiment, the connecting part is composed of a release part and a driving part, so that the connecting part is provided with a release function. When in normal use, the release part is floated and pressed by the floating part to be connected to the plate body. When an emergency situation occurs and the floating part cannot be adjusted and restored, the release part will withdraw from the floating part and the plate body in time, and then directly disconnect the connection between the driving part and the plate body to prevent structural damage. The emergency release mechanism can quickly cut off the connection between the driving end and the transmission end, effectively eliminating system risks.

[0063] In this embodiment, the first clamping member 41 is linked with the fourth driving member 91, and the second clamping member 71 is linked with the third driving member 61. By linking the force-applying elements with the same force direction, the control accuracy of the mechanism is improved, and the safety of the system operation is improved, to prevent any single force-applying element from losing control or insufficient force to cause the risk of failure; at the same time, a buckle is provided in the linkage mechanism, and the connection and disconnection of the linkage mechanism is controlled by the buckle, so that the clamping member and the driving member work independently of each other under normal conditions, and the linkage setting is set when one of them fails to ensure the normal realization of the driving and clamping functions.

[0064] In some embodiments, combined Figure 9 As shown, the disengagement direction of the disengagement part can also be that the disengagement part moves upward in a direction perpendicular to the plate body, thereby breaking away from the connection between the floating part and the plate body, achieving complete disconnection and disengagement; the driving part can be other mechanical structures such as an electric cylinder, a pneumatic cylinder, and a hydraulic cylinder.

[0065] In some embodiments, combined Figure 10 As shown, the disengagement direction of the disengagement member can also be that the disengagement member folds and rotates in the counterclockwise direction, thereby disengaging the connection between the floating part and the plate body, achieving complete disconnection and disengagement; the driving member can be other mechanical structures such as an electric cylinder, a pneumatic cylinder, and a hydraulic cylinder.

[0066] In some embodiments, combined Figure 11 As shown, the floating and pressing connection between the floating part and the connecting part can also be that at least two floating parts are relatively arranged on the plate body, and the pressing parts are relatively arranged, and at the same time the release part is clamped between the two pressing parts, and both sides of the release part are floatingly pressed by the pressing parts to achieve more precise floating adjustment.

[0067] In the second aspect, an embodiment of the present invention provides an electronic device, which is electrically connected to the driving parts, clamping parts, sensors and other electronic components in the heavy-load displacement adjustment structure. A central control system is provided in the electronic device for real-time reception, processing and feedback of motion signals to ensure the smooth progress of the heavy-load precision displacement adjustment process.

[0068] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the present invention.

Claims

1. A heavy-load displacement adjustment mechanism, characterized in that: include: A first plate body (1) and a second plate body (2) that are at least partially overlapped and slidably connected in sequence; A first floating portion (4) is fixed to the first plate body (1), the first floating portion (4) having a first pressing member (41), and the pressing force of the first pressing member (41) is adjustable; A first driving member (5) is fixed to the second plate (2), and an output shaft of the first driving member (5) is floatingly connected to the first plate (1) and is suitable for driving the first plate (1) to move along a first direction; A first connecting portion (6) is connected to the first driving member (5); the first connecting portion (6) is pressed by the first pressing member (41) and is floatingly connected to the first plate body (1); In a normal state, the first connecting portion (6) is pressed and fixed to the first plate body (1) by the first pressing member (41), and the first driving member (5) is suitable for driving the first plate body (1) to move; In the first abnormal state, the first pressing member (41) adjusts the pressing force acting on the first connecting portion (6), which is suitable for loosening or re-tightening the first connecting portion (6) and the first plate body (1); A third plate (3) is slidably connected to a side of the second plate (2) facing away from the first plate (1); A second floating portion (7) is fixed to the second plate body (2), the second floating portion (7) having a second pressing member (71), and the pressing force of the second pressing member (71) is adjustable; a second driving member (8) fixed to the third plate (3), an output shaft of the second driving member (8) being in floating connection with the second plate (2), and being suitable for driving the second plate (2) and the first plate (1) to move along a second direction; A second connecting portion (9) is connected to the second driving member (8); the second connecting portion (9) is pressed by the second pressing member (71) and is floatingly connected to the second plate body (2); In a normal state, the second connecting portion (9) is pressed and fixed to the second plate body (2) by the second pressing member (71), and the second driving member (8) is suitable for driving the second plate body (2) to move; In the first abnormal state, the second pressing member (71) adjusts the pressing force acting on the second connecting portion (9), which is suitable for loosening or re-pressing the second connecting portion (9) and the second plate body (2).

2. The heavy-load displacement adjustment mechanism according to claim 1, characterized in that: The first connecting portion (6) includes a third driving member (61) and a first disengaging member (62), wherein the third driving member (61) is fixedly connected to the output shaft of the first driving member (5); in a normal state, the first disengaging member (62) is floatingly connected to the first plate body (1) by means of the first floating portion (4); The third driving member (61) is connected to the first disengaging member (62); In the second abnormal state, the third driving member (61) drives the first escape member (62) to move so as to separate from the first floating portion (4) and the first plate body (1).

3. The heavy-load displacement adjustment mechanism according to claim 2, characterized in that: The first ejection member (62) has a first large end (621) and a first small end (622), and the first large end (621) is larger in size in a first direction than the first small end (622); In a normal state, the first large end (621) is pressed by the first pressing member (41) and is floatingly connected to the first plate body (1); In the second abnormal state, the first disengaging member (62) moves, the first large end (621) is separated from the first pressing member (41) and the first plate body (1), and the first small end (622) is spaced between the first pressing member (41) and the first plate body (1), suitable for disconnecting the first driving member (5) from the first plate body (1).

4. The heavy-load displacement adjustment mechanism according to claim 3, characterized in that: The second connecting portion (9) includes a fourth driving member (91) and a second disengaging member (92), wherein the fourth driving member (91) is fixedly connected to the output shaft of the second driving member (8); in a normal state, the second disengaging member (92) is floatingly connected to the second plate body (2) by means of the second floating portion (7); The fourth driving member (91) is connected to the second disengaging member (92); In the second abnormal state, the fourth driving member (91) drives the second escape member (92) to move so as to separate from the second floating portion (7) and the second plate body (2).

5. The heavy-load displacement adjustment mechanism according to claim 4, characterized in that: The second ejection member (92) has a second large end (921) and a second small end (922), and the second large end (921) is larger in size in the second direction than the second small end (922); In a normal state, the second large end (921) is pressed by the second pressing member (71) and is floatingly connected to the second plate body (2); In the second abnormal state, the second disengaging member (92) moves, the second large end (921) is separated from the second pressing member (71) and the second plate body (2), and the second small end (922) is spaced between the second pressing member (71) and the second plate body (2), suitable for disconnecting the second driving member (8) from the second plate body (2).

6. The heavy-load displacement adjustment mechanism according to claim 4, characterized in that: The first pressing member (41) is connected to the fourth driving member (91) by means of a linkage system; The second pressing member (71) is connected to the third driving member (61) by means of a linkage system; A connection switch and a compensation mechanism are provided in the linkage system. The connection switch is suitable for disconnecting or connecting the linkage system, and the compensation mechanism is suitable for compensating for pressure.

7. The heavy-load displacement adjustment mechanism according to claim 3, characterized in that: A first clearance groove (623) is provided at the first large end (621), and the output shaft of the third driving member (61) is connected to the inner wall of the first clearance groove (623); In the second abnormal state, the first disengaging member (62) moves, and the first evacuation groove (623) gradually covers the third driving member (61).

8. The heavy-load displacement adjustment mechanism according to claim 5, characterized in that: A second paving groove (923) is provided at the second large end (921), and the output shaft of the fourth driving member (91) is connected to the inner wall of the second paving groove (923); In the second abnormal state, the second disengaging member (92) moves, and the second giving way groove (923) gradually covers the fourth driving member (91).

9. The heavy-load displacement adjustment mechanism according to claim 4, characterized in that: Also includes: A first slide rail (10) is sandwiched between the first plate body (1) and the second plate body (2), and extends along a first direction, suitable for enabling the first plate body (1) to slide relative to the second plate body (2) along the first direction; The first slide rail (10) comprises a first slideway (101) and a plurality of first sliding blocks (102) slidably connected to the first slideway (101); At least one of the first sliding blocks (102) is connected to the first ejection member (62) by means of a third slide rail (14), and the third slide rail (14) is extended along the second direction; A second slide rail (11) is sandwiched between the second plate body (2) and the third plate body (3), and extends along the second direction, suitable for enabling the second plate body (2) to slide relative to the third plate body (3) along the second direction; The second slide rail (11) includes a second slideway (111) and a plurality of second sliding blocks (112) slidably connected to the second slideway (111); At least one of the second sliding blocks (112) is connected to the second ejection member (92) by means of a fourth sliding rail (15), and the fourth sliding rail (15) is extended along the first direction.

10. The heavy-load displacement adjustment mechanism according to claim 5, characterized in that: The first plate (1) is provided with a groove (12) on one side along the second direction, and the end surfaces of both sides of the first large end (621) along the first direction respectively abut against the inner wall of the groove (12) and the first pressing member (41); The direction of the pressing force of the first pressing member (41) is parallel to the first direction; The second plate (2) is formed with a protrusion (13); In a normal state, the end surfaces of both sides of the second large end (921) along the second direction respectively abut against the protrusion (13) and the second pressing member (71); The direction of the pressing force of the second pressing member (71) is parallel to the second direction.

11. The heavy-load displacement adjustment mechanism according to claim 1, characterized in that: The first floating portion (4) further comprises a first connecting member (42), the first connecting member (42) being fixed to the first plate body (1), and the first pressing member (41) being arranged at the first connecting member (42); The second floating portion (7) further comprises a second connecting member (72), the second connecting member (72) being fixed to the second plate body (2), and the second pressing member (71) being arranged at the second connecting member (72).

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