Exposure device and exposure equipment

Abstract

The invention relates to the technical field of exposure equipment, and discloses an exposure device and exposure equipment. The exposure device comprises a workpiece table, a bearing module and an exposure module, and the bearing module is arranged on the workpiece table and used for bearing a part to be exposed; the exposure module comprises a supporting piece and an exposure head arranged on the supporting piece, the supporting piece is slidably arranged on the workpiece table in the first direction, the exposure head is slidably arranged on the supporting piece in the second direction, and an included angle is formed between the second direction and the first direction. The exposure device disclosed by the invention is more stable in bearing of the to-be-exposed part, so that the exposure precision is higher; meanwhile, the exposure device is more compact in structure and smaller in size.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure equipment, and in particular to an exposure device and an exposure equipment. Background Art

[0002] Lithography, that is, optical etching, is to irradiate light on a light-reactive material to make the light-reactive material react. Usually, light is irradiated on the light-reactive material according to a specific pattern to obtain a required structure. Lithography is generally also called exposure, and the equipment for performing lithography is a lithography machine or an exposure machine.

[0003] In the prior art, usually, through the step exposure method, that is, by driving the movement of a carrier table carrying a part to be exposed to achieve high-efficiency exposure. This exposure method requires the carrier table to move in at least two directions, so the exposure accuracy will be greatly reduced. At the same time, the exposure method by moving the carrier table will result in a relatively large overall size of the exposure device.

[0004] Therefore, there is an urgent need for an exposure device and an exposure equipment to solve the above problems. Summary of the Invention

[0005] Based on the above, the object of the present invention is to provide an exposure device and an exposure equipment, in which the carrier of the part to be exposed is more stable, and thus the exposure accuracy is higher; at the same time, the structure of the exposure device is more compact and the size is smaller.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] An exposure device, comprising:

[0008] A workpiece table;

[0009] A carrier module, arranged on the workpiece table and used for carrying a part to be exposed;

[0010] An exposure module, comprising a support member and an exposure head arranged on the support member. The support member is slidably arranged on the workpiece table along a first direction, and the exposure head is slidably arranged on the support member along a second direction, and the second direction is arranged at an angle to the first direction.

[0011] As a preferred solution of the exposure device, the exposure device includes a first driving unit. The first driving unit includes a first slide rail and a first slider slidably arranged on the first slide rail. The first slide rail extends along the first direction and is arranged on the workpiece table, and the support member is arranged on the first slider.

[0012] As a preferred solution of the exposure device, the support member includes a mounting beam extending in the second direction and support beams provided on both sides of the mounting beam. Two first slide rails are arranged in parallel at intervals, and the two first slide rails are respectively provided on both sides of the carrying module. The support beam is connected to the first slider, and the exposure head is slidably arranged on the mounting beam.

[0013] As a preferred solution of the exposure device, the exposure module includes at least one first exposure unit and at least one second exposure unit. The first exposure unit includes one exposure head, and the second exposure unit includes at least two relatively fixed exposure heads.

[0014] As a preferred solution of the exposure device, the exposure device further includes a second driving unit and a third driving unit. The second driving unit is used to drive the first exposure unit to move in the second direction, and the third driving unit is used to drive the second exposure unit to move in the second direction.

[0015] As a preferred solution of the exposure device, the exposure head is slidably arranged on the support member in the third direction, and the third direction is perpendicular to the plane where the first direction and the second direction are located.

[0016] As a preferred solution of the exposure device, the carrying module is configured to be able to drive the part to be exposed to rotate relative to the workbench on the horizontal plane.

[0017] As a preferred solution of the exposure device, the carrying module includes a plurality of functional nozzles arranged in an array. The functional nozzles can provide negative pressure to adsorb the part to be exposed, or provide positive pressure to make the part to be exposed float to correct the part to be exposed.

[0018] As a preferred solution of the exposure device, the exposure device further includes a loading and unloading module. The loading and unloading module is arranged at one end of the workbench along the first direction and is configured to be able to pick up and place the part to be exposed from and to the carrying module. And / or the exposure device further includes a base and a shock absorption module, and the workbench is arranged on the base through the shock absorption module.

[0019] An exposure device, including the exposure device and the loading and unloading device according to any one of the above solutions. The loading and unloading device can pick up and place the part to be exposed from and to the carrying module from three sides away from the exposure module of the carrying module; the loading and unloading device is set as a manipulator or a CV conveyor line or a handling shaft.

[0020] The beneficial effects of the present invention are:

[0021] The present invention provides a workpiece table for integrating a loading module and an exposure module, and a loading module for loading parts to be exposed. Meanwhile, the support of the exposure module can move relative to the workpiece table in a first direction, and the exposure head can move relative to the support in a second direction. During exposure, the combined movement of the support and the exposure head is used to achieve the exposure of the parts to be exposed placed on the loading module. It should be noted that the loading module does not move horizontally relative to the workpiece table, thereby improving the loading stability of the parts to be exposed and facilitating the improvement of exposure accuracy. In addition, compared with the prior art, by movably arranging the support on the workpiece table while keeping the horizontal position of the loading module relative to the workpiece table unchanged, the length of the workpiece table can be effectively shortened, making the structure of the exposure device more compact and smaller in size. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for the description of the embodiments of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the content of the embodiments of the present invention and these drawings.

[0023] Figure 1 is a schematic diagram of the exposure device provided by the specific embodiment of the present invention;

[0024] Figure 2 is a schematic diagram of the first exposure unit of the exposure device provided by the specific embodiment of the present invention;

[0025] Figure 3 is a schematic diagram of the second exposure unit of the exposure device provided by the specific embodiment of the present invention;

[0026] Figure 4 is a schematic diagram of the loading module of the exposure device provided by the specific embodiment of the present invention;

[0027] Figure 5 is a top view of the exposure device provided by the specific embodiment of the present invention;

[0028] Figure 6 is a flowchart of the exposure device provided by the specific embodiment of the present invention for full-surface exposure;

[0029] Figure 7 is a flowchart of the exposure device provided by the specific embodiment of the present invention for edge rapid exposure.

[0030] In the figure:

[0031] 1. Parts to be exposed;

[0032] 100. Workpiece table;

[0033] 200, Carrier Module; 210, Carrier Table; 220, Air-Floating Foot; 230, Function Nozzle; 240, Rotating Shaft; 250, Alignment Mechanism; 260, Feeding Roller

[0034] 301, Exposure Head; 302, Alignment Recognition Component; 303, Mounting Plate; 310, First Exposure Unit; 320, Second Exposure Unit; 330, Support Component; 331, Mounting Beam; 332, Support Beam

[0035] 410, First Driving Unit; 420, Second Driving Unit; 421, Second Slide Block; 430, Third Driving Unit; 431, Third Slide Block; 440, Fourth Slide Rail; 450, Fourth Driving Unit; 451, Fifth Slide Rail; 452, Fourth Slide Block; 460, Drag Chain Box

[0036] 510, Base; 520, Shock Absorption Module Detailed Embodiment

[0037] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention, and should not be construed as a limitation of the present invention.

[0038] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0039] Unless otherwise clearly defined and limited, the terms "install", "connect", "connect", "fix" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present invention, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0041] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and through specific embodiments.

[0042] As Figures 1-7 shown, this embodiment provides an exposure device, which includes a workpiece table 100, a carrying module 200 and an exposure module. The carrying module 200 is arranged on the workpiece table 100 and is used for carrying the part 1 to be exposed. The exposure module includes a support member 330 and an exposure head 301 arranged on the support member 330. The support member 330 is slidably arranged on the workpiece table 100 in a first direction, and the exposure head 301 is slidably arranged on the support member 330 in a second direction, and the second direction is arranged at an angle to the first direction. Wherein, the part 1 to be exposed is a part that needs to complete the exposure operation, such as a printed circuit board (PCB), a flat panel display (FPD) in the new display field, and a mask.

[0043] By arranging the workpiece table 100, it is used to integrally carry the carrying module 200 and the exposure module; by arranging the carrying module 200, it is used to carry the part 1 to be exposed. At the same time, the support member 330 of the exposure module can move relative to the workpiece table 100 in the first direction, and the exposure head 301 can move relative to the support member 330 in the second direction. During exposure, through the coordinated movement of the support member 330 and the exposure head 301, the exposure of the part 1 to be exposed placed on the carrying module 200 is realized. It should be noted that the carrying module 200 has no horizontal movement relative to the workpiece table 100, thereby improving the carrying stability of the part 1 to be exposed and being beneficial to improving the exposure accuracy. In addition, compared with the prior art, by movably arranging the support member 330 on the workpiece table 100 while the horizontal position of the carrying module 200 relative to the workpiece table 100 remains unchanged, the length of the workpiece table 100 can be effectively shortened, making the structure of the exposure device more compact and the size smaller.

[0044] Specifically, to achieve the movement of the support member 330 in the first direction, the exposure device includes a first driving unit 410. The first driving unit 410 includes a first slide rail and a first slider slidably disposed on the first slide rail. The first slide rail extends in the first direction and is disposed on the workpiece table 100, and the support member 330 is disposed on the first slider. Preferably, there are two first slide rails, and the two first slide rails are respectively disposed on both sides of the carrier module 200, which is beneficial to improving the sliding stability of the support member 330. Further, each first slider is respectively driven by a driving member, that is, the first driving unit 410 is configured as a dual drive, which is beneficial to improving the synchronism of the two first sliders moving in the first direction.

[0045] In this embodiment, the support member 330 includes a mounting beam 331 extending in the second direction and support beams 332 disposed on both sides of the mounting beam 331. The support beams 332 are arranged in one-to-one correspondence with the first sliders. That is, the support member 330 is configured in a gantry form, and the gantry-shaped support member 330 is slidably disposed on the workpiece table 100 through the first driving unit 410 and straddles the carrier module 200.

[0046] In the prior art, the exposure accuracy requirements for the exposure patterns on the surface of the part 1 to be exposed are different. Generally speaking, the overall exposure of a large-range complete pattern on the entire surface pursues the alignment accuracy of exposure, and the edge exposure (such as patterns like "field", "square", "river" etc.) pursues the exposure efficiency. Correspondingly, the exposure module includes at least one first exposure unit 310 and at least one second exposure unit 320. The first exposure unit 310 includes an exposure head 301, and the second exposure unit 320 includes at least two relatively fixed exposure heads 301. One exposure head 301 of the first exposure unit 310 can be used for edge exposure; when at least two exposure heads 301 of the second exposure unit 320 work simultaneously, it can be used for overall exposure, and when one of the exposure heads 301 works, it can be used for edge exposure. Since the relative positions of at least two exposure heads 301 of the second exposure unit 320 are fixed, that is, only one alignment is required to achieve the alignment of at least two exposure heads 301, thereby ensuring the alignment accuracy during overall exposure. That is, the exposure device can not only achieve overall exposure but also achieve edge exposure, integrating the original two devices into one device, with a compact structure, low cost, small floor space, and moreover, it can be applicable to a wider range of exposure accuracies, high exposure efficiency, and more applicable scenarios.

[0047] Further, the exposure device further includes a second driving unit 420 and a third driving unit 430. The second driving unit 420 is used to drive the first exposure unit 310 to move in the second direction, and the third driving unit 430 is used to drive the second exposure unit 320 to move in the second direction. By respectively driving the first exposure unit 310 and the second exposure unit 320, it is beneficial for the exposure device to adapt to different exposure scenarios.

[0048] Exemplarily, the second driving unit 420 includes a second slide rail and a second slider 421 slidably disposed on the second slide rail. The second slide rail extends along a second direction and is disposed on the mounting beam 331 of the support member 330. The exposure head 301 of the first exposure unit 310 is disposed on the second slider 421. The third driving unit 430 includes a third slide rail and a third slider 431 slidably disposed on the third slide rail. The third slide rail extends along the second direction and is disposed on the mounting beam 331 of the support member 330. At least two exposure heads 301 of the second exposure unit 320 are disposed on the mounting plate 303, and the mounting plate 303 is disposed on the third slider 431.

[0049] Preferably, both the second slider 421 and the third slider 431 are L-shaped. A fourth slide rail 440 is disposed on the top surface of the support member 330 along the second direction. Both the L-shaped second slider 421 and the third slider 431 can cooperate with the fourth slide rail 440 on the top surface. By setting the second slider 421 and the third slider 431 to be L-shaped and disposing the fourth slide rail 440 on the top surface of the support member 330 along the second direction to support the exposure head 301, it is avoided that the gravity of the exposure head 301 causes the cooperation between the second slider 421 and the third slider 431 and the corresponding slide rails to be unsmooth, and the reliability and stability of the movement of the exposure unit along the second direction are improved.

[0050] Optionally, the exposure accuracies of the plurality of exposure heads 301 are different to adapt to different exposure requirements. Those skilled in the art can select and set according to the actual exposure scenario, and no specific limitation is made here. In addition, alignment recognition members 302 are disposed on the first exposure unit 310 and the second exposure unit 320 for performing alignment operations on the exposure units. One alignment recognition member 302 is disposed at each end of the second exposure unit 320. Exemplarily, the alignment recognition member 302 can be a positioning camera, and alignment recognition is achieved by taking pictures.

[0051] In this embodiment, the exposure head 301 is slidably disposed on the support member 330 along a third direction, and the third direction is perpendicular to the plane where the first direction and the second direction are located. Exemplarily, the first direction, the second direction, and the third direction are perpendicular to each other pairwise. That is, the exposure head 301 is slidably disposed on the mounting beam 331 along the vertical direction, which is convenient for adjusting the focal depth of the exposure head 301 and at the same time adapting to parts 1 to be exposed with different thicknesses to meet the exposure effect and different exposure requirements.

[0052] Further, the exposure device includes a fourth driving module for moving the exposure head 301 in the third direction. The fourth driving module includes a fifth slide rail 451 and a fourth slider 452 slidably disposed on the fifth slide rail 451. The fifth slide rail 451 extending in the third direction is disposed on both the second slider 421 and the third slider 431, and the exposure head 301 is disposed on the fourth slider 452. It can be understood that each driving unit is provided with a driving member for driving the slider to move along the corresponding slide rail. Exemplarily, a drag chain is disposed between the slider and the driving member, and correspondingly, the exposure device is further provided with a drag chain box 460. The drag chain box 460 can cover the outside of the drag chain to protect the drag chain and improve the overall aesthetics of the exposure device.

[0053] Specifically, the carrier module 200 is configured to drive the part 1 to be exposed to rotate relative to the worktable 100 on a horizontal plane, so as to rotate the part 1 to be exposed to a position where it cooperates with the exposure unit to achieve exposure of a preset shape.

[0054] Exemplarily, the carrier module 200 includes a carrier table 210 and a rotating shaft 240. The carrier table 210 is used to carry the part 1 to be exposed, and the rotation is used to drive the carrier table 210 to rotate relative to the worktable 100, with a rotation angle of 0 - 100°. Preferably, air floating feet 220 are disposed below the carrier table 210, and the lower ends of the air floating feet 220 are slidably supported on the upper surface of the worktable 100 to prevent the carrier table 210 from sagging.

[0055] Further, the carrier module 200 includes a plurality of functional nozzles 230 arranged in an array. The functional nozzles 230 are disposed on the carrier table 210. The functional nozzles 230 can provide negative pressure to adsorb the part 1 to be exposed, or provide positive pressure to make the part 1 to be exposed float to correct the part 1 to be exposed. That is, the carrier module 200 supports the part 1 to be exposed through adsorption, and the support is more stable. Moreover, not only can the rotation of the part 1 to be exposed be realized, but also the regularization of the part 1 to be exposed can be realized. Correspondingly, regularization mechanisms 250 are disposed on adjacent sides of the carrier table 210. When the functional nozzles 230 blow air to make the part 1 to be exposed float, the regularization mechanisms 250 can cooperate to correct the position of the part 1 to be exposed, ensuring the accuracy of the subsequent exposure position. Preferably, the regularization mechanism 250 further includes a transverse regularization block and a longitudinal regularization block, which are respectively used to regularize adjacent sides of the part 1 to be exposed.

[0056] In this embodiment, the exposure device further includes a loading and unloading module. The loading and unloading module is disposed at one end of the worktable 100 along the first direction. By providing the loading and unloading module, it is used to pick up and place the part 1 to be exposed from and to the carrier module 200.

[0057] Preferably, the carrier module 200 further includes a plurality of blanking rollers 260, which are slidably arranged on the carrier table 210 in the vertical direction. When blanking is required, when the functional nozzle 230 stops sucking the part 1 to be exposed under negative pressure, the blanking rollers 260 rise to lift the part 1 to be exposed, and the exposed part is conveyed away from the functional nozzle 230 by rotation.

[0058] Furthermore, the exposure device further includes a base 510 and a shock absorption module 520. The workpiece table 100 is arranged on the base 510 through the shock absorption module 520. By arranging the shock absorption module 520, it is beneficial to improve the stability of the workpiece table 100 in the vertical direction, and further improve the stability of the part 1 to be exposed and the exposure module arranged on the workpiece table 100 in the vertical direction, and thus can effectively improve the exposure accuracy.

[0059] This embodiment also discloses an exposure device, including the exposure device and the loading and unloading device described in any of the above solutions. The loading and unloading device can realize the transfer and storage of the parts 1 to be exposed between different devices. Further, the loading and unloading device can pick and place the parts 1 to be exposed from three sides of the carrier module 200 away from the exposure module, improving the flexibility of the terminal customer site arrangement; the loading and unloading device is set as a manipulator or a CV conveyor line or a handling shaft, and the loading and unloading method has greater flexibility. Specifically, the loading and unloading device performs loading and unloading on the same side of the workpiece table 100, such as using a manipulator to complete loading and unloading from the left side of the workpiece table; or, the loading and unloading device performs loading and unloading on different sides of the workpiece table 100, such as using a manipulator to load on the left side of the workpiece table 100 and using a handling shaft to unload on the right side of the workpiece table 100. The exposure device is also provided with a control system, and the exposure head 301 and each power driving part of the exposure device are communicatively connected with the control system, facilitating the realization of automatic exposure.

[0060] When performing full-surface exposure work using the above exposure device, refer to Figure 5 As shown, in this working mode, the second exposure unit 320 works, and the first exposure unit 310 does not participate in the processing. The second slider 421 carrying the first exposure unit 310 will stay at the lower limit position of the second slide rail, avoiding affecting the exposure.

[0061] The specific steps are as follows: As shown in a of Figure 6 , load the part 1 to be exposed, place the part 1 to be exposed on the carrier table 210, the functional nozzle 230 turns on the reverse blowing function to make the part 1 to be exposed float slightly, then, the shaping mechanism 250 operates, and the horizontal shaping block and the vertical shaping block perform shaping operations in sequence. After the shaping operation is completed, the functional nozzle 230 turns on the vacuum adsorption, and the adsorption of the part 1 to be exposed is completed; As shown in Figure 6As shown in Fig. b, the rotating shaft 240 rotates the carrying platform 210 by 90°, aligning the direction of the part 1 to be exposed with the processing scanning direction of the exposure equipment. If the loading direction of the part 1 to be exposed is consistent with the processing scanning direction, this step can be omitted; driven by the first driving unit 410 and the second driving unit 420, the positioning camera of the second exposure unit 320 starts to capture the markers on the part 1 to be exposed for precise positioning operation. Then, the fourth driving unit 450 adjusts the focal depth to ensure that the second exposure unit 320 is at the optimal working focal depth. The first driving unit 410 and the second driving unit 420 drive the second exposure unit 320 to move to the starting processing position for preparation; as Figure 6 shown in Fig. c, the first driving unit 410 performs a scanning operation, and the second driving unit 420 performs a stepping operation to complete the exposure operation of the entire surface of the part 1 to be exposed; as Figure 6 shown in Fig. d, the functional nozzle 230 stops vacuum adsorption, the unloading roller 260 rises, and the upper surface of the unloading roller 260 is higher than the upper surface of the functional nozzle 230. The rotation of the unloading roller 260 drives the exposed part to move away from the functional nozzle 230 to complete the unloading work.

[0062] When performing edge rapid exposure work using the above exposure equipment, referring to Figure 5 as shown, in this working mode, both the first exposure unit 310 and the second exposure unit 320 participate in the processing.

[0063] The specific steps are as follows: as Figure 7 shown in Fig. a, load the part 1 to be exposed, place the part 1 to be exposed on the carrying platform 210, the functional nozzle 230 turns on the reverse blowing function to make the part 1 to be exposed float slightly. Then, the regularizing mechanism 250 operates, and the horizontal regularizing block and the vertical regularizing block perform regularizing operations in sequence. After the regularizing operation is completed, the functional nozzle 230 turns on the vacuum adsorption, and the adsorption of the part 1 to be exposed is completed; as Figure 7 shown in Fig. b, driven by the first driving unit 410, the second driving unit 420, and the third driving unit 430, the positioning cameras of the first exposure unit 310 and the second exposure unit 320 respectively capture the markers on the left and right edges of the part 1 to be exposed for precise positioning operation. Then, the fourth driving unit 450 adjusts the focal depth to ensure that the first exposure unit 310 and the second exposure unit 320 are at the optimal working focal depths. The first driving unit 410, the second driving unit 420, and the third driving unit 430 drive the first exposure unit 310 and the second exposure unit 320 to move to the starting processing positions on the left and right edges of the part 1 to be exposed respectively for preparation; as Figure 7 shown in Fig. c, the first driving unit 410 performs a scanning operation, and the second driving unit 420 and the third driving unit 430 remain stationary to complete the exposure operation of the left and right edges of the part 1 to be exposed; as Figure 7As shown in Figure d, the rotating shaft 240 drives the carrier table 210 and the part 1 to be exposed to rotate by 90°; the first driving unit 410, the second driving unit 420, and the third driving unit 430 drive the first exposure unit 310 and the second exposure unit 320 to move to the starting processing positions at the front edge and the rear edge of the part 1 to be exposed respectively, and are ready for processing; as Figure 7 As shown in Figure e, the first driving unit 410 performs a scanning operation, and the second driving unit 420 and the third driving unit 430 remain stationary to complete the exposure operation on the front and rear edges of the part 1 to be exposed, and complete the "return" shaped exposure; as Figure 7 As shown in Figure f, the functional nozzle 230 stops vacuum adsorption, the blanking roller 260 rises, the upper surface of the blanking roller 260 is higher than the upper surface of the functional nozzle 230, and the blanking roller 260 rotates to drive the exposed part to move away from the functional nozzle 230 to complete the blanking work.

[0064] The above content is only a preferred embodiment of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manners and application scopes. The content of this specification should not be construed as a limitation to the present invention.

Claims

1. An exposure device, characterized in that include: Workpiece table (100); A carrying module (200), arranged on the workpiece platform (100), and used for carrying a part (1) to be exposed; An exposure module comprises a support member (330) and an exposure head (301) arranged on the support member (330), wherein the support member (330) is slidably arranged on the workpiece platform (100) along a first direction, and the exposure head (301) is slidably arranged on the support member (330) along a second direction, wherein the second direction is arranged at an angle to the first direction.

2. The exposure device according to claim 1, characterized in that The exposure device comprises a first driving unit (410), the first driving unit (410) comprises a first slide rail and a first slider slidably arranged on the first slide rail, the first slide rail extends along the first direction and is arranged on the workpiece table (100), and the support member (330) is arranged on the first slider.

3. The exposure device according to claim 2, characterized in that The support member (330) comprises a mounting beam (331) extending along the second direction and support beams (332) arranged on both sides of the mounting beam (331); two first slide rails are arranged in parallel and at intervals, and the two first slide rails are respectively arranged on both sides of the carrying module (200); the support beam (332) is connected to the first sliding block; and the exposure head (301) is slidably arranged on the mounting beam (331).

4. The exposure device according to claim 1, characterized in that The exposure module comprises at least one first exposure unit (310) and at least one second exposure unit (320), wherein the first exposure unit (310) comprises an exposure head (301), and the second exposure unit (320) comprises at least two relatively fixed exposure heads (301).

5. The exposure device according to claim 4, characterized in that The exposure device further comprises a second driving unit (420) and a third driving unit (430), wherein the second driving unit (420) is used to drive the first exposure unit (310) to move along the second direction, and the third driving unit (430) is used to drive the second exposure unit (320) to move along the second direction.

6. The exposure device according to any one of claims 1 to 5, characterized in that: The exposure head (301) is slidably disposed on the support member (330) along a third direction, and the third direction is perpendicular to the plane where the first direction and the second direction are located.

7. The exposure device according to any one of claims 1 to 5, characterized in that: The carrying module (200) is configured to be able to drive the part (1) to be exposed to rotate along a horizontal plane relative to the workpiece table (100).

8. The exposure device according to any one of claims 1 to 5, characterized in that: The carrier module (200) comprises a plurality of functional nozzles (230) arranged in an array, and the functional nozzles (230) can provide negative pressure to absorb the part to be exposed (1), or provide positive pressure to make the part to be exposed (1) float to correct the part to be exposed (1).

9. The exposure device according to any one of claims 1 to 5, characterized in that: The exposure device further comprises a loading and unloading module, the loading and unloading module being arranged at one end of the workpiece table (100) along the first direction and being configured to be able to take and place the part (1) to be exposed on the supporting module (200), and / or the exposure device further comprises a base (510) and a shock absorbing module (520), the workpiece table (100) being arranged on the base (510) via the shock absorbing module (520).

10. An exposure device, characterized in that It comprises an exposure device and a loading and unloading device as described in any one of claims 1 to 9, wherein the loading and unloading device can take and place the part (1) to be exposed from three sides of the supporting module (200) away from the exposure module to the supporting module (200); the loading and unloading device is configured as a robot or a CV conveyor line or a transport axis.

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