Piezoelectric cooling fan

Abstract

The invention relates to the technical field of electronic equipment, and discloses a piezoelectric cooling fan which comprises a piezoelectric element, a vibration plate, a supporting frame, a jet flow plate and an air outlet plate. The supporting frame is provided with a cavity with the two sides open in the first direction. The vibration plate and the jet flow plate are arranged on the two sides, in the first direction, of the cavity in a covering mode respectively and connected with the supporting frame, and jet flow holes are formed in the jet flow plate. The piezoelectric element is attached to the side, away from the cavity in the first direction, of the vibrating plate and / or the side, away from the cavity in the first direction, of the jet plate, a center hole is formed in the piezoelectric element, and the air outlet plates are arranged on the side, away from the cavity in the first direction, of the jet plate at intervals. The air outlet plate is provided with air outlet holes communicated with the jet flow holes. According to the piezoelectric cooling fan, fatigue cracks caused by long-time use of the piezoelectric element can be avoided, and the service life of a product is greatly prolonged.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic devices, and particularly to a piezoelectric cooling fan. Background Art

[0002] With the continuous improvement of the operating speed and computing power of electronic devices and integrated circuit chips, the accompanying problem is a sharp increase in heat. To solve the heat problem generated by electronic devices, various heat dissipation mechanisms have been proposed, such as mechanical fans. However, with the continuous development of the miniaturization trend of electronic devices, the traditional mechanical fan heat dissipation solution is no longer applicable.

[0003] In recent years, piezoelectric cooling fans, as a new type of heat dissipation technology, have gradually attracted attention. Piezoelectric cooling fans utilize the bending vibration of piezoelectric materials to drive fluid flow, thereby achieving a heat dissipation effect. However, existing piezoelectric cooling fan technologies still have some defects. For example, during long-term operation, the piezoelectric materials in the piezoelectric cooling fans continuously undergo large-amplitude bending deformations, which easily generate fatigue cracks, resulting in product failure and affecting the service life of the products. Summary of the Invention

[0004] The objective of the present invention is to design a piezoelectric cooling fan with durability and high reliability.

[0005] To achieve the above objective, the present invention provides a piezoelectric cooling fan, comprising: a piezoelectric element, a vibration plate, a support frame, a jet plate, and an air outlet plate;

[0006] The support frame has a chamber that is open on both sides along a first direction; the vibration plate and the jet plate are respectively disposed on both sides of the chamber along the first direction and are both connected to the support frame. The jet plate is provided with jet holes, and the piezoelectric element is attached to one side of the vibration plate and / or one side of the jet plate that faces away from the chamber along the first direction. The piezoelectric element is provided with a central hole, and the air outlet plate is spaced apart from one side of the jet plate that faces away from the chamber along the first direction. The air outlet plate is provided with air outlet holes that communicate with the jet holes.

[0007] Further, the projection of the piezoelectric element in the first direction is circular, and the central hole is a circular hole.

[0008] Further, the piezoelectric element is attached to one side of the jet plate that faces away from the chamber along the first direction, and the projections of the jet holes in the first direction are all located within the central hole.

[0009] Further, the spacing dimension between the vibration plate and the jet plate in the first direction is H1 mm, where 0.02 mm ≤ H1 ≤ 0.5 mm; and / or,

[0010] The spacing dimension between the jet plate and the air outlet plate in the first direction is H2 mm, wherein 0.1≤H2≤2 mm.

[0011] Furthermore, the jet hole is a circular hole, and the aperture size of the jet hole is 0.005mm to 0.5mm.

[0012] Furthermore, the jet plate is provided with a plurality of jet holes, the air outlet plate is provided with a plurality of air outlet holes, the aperture of the air outlet hole is larger than the aperture of the jet hole, and one of the air outlet holes is arranged corresponding to at least one of the jet holes in the first direction.

[0013] Furthermore, the jet plate is provided with a plurality of jet holes, wherein the projection area of ​​the jet plate in the first direction is S1mm 2 The projection area of ​​the jet hole in the first direction is S2mm 2 , satisfying 0.1%≤S2 / S1≤10%; and / or,

[0014] The outlet plate is provided with a plurality of outlet holes, wherein the projection area of ​​the outlet plate in the first direction is S3 mm 2 The projection area of ​​the air outlet in the first direction is S4mm 2 , satisfying 1%≤S4 / S3≤20%.

[0015] Further, it also includes a connection component;

[0016] The air outlet plate is connected to the edge of the jet plate through the connecting assembly, or the air outlet plate is connected to the edge of the vibration plate through the connecting assembly;

[0017] The connecting component is provided with an air inlet passage which is in communication with the jet hole.

[0018] Furthermore, it also includes a shell, which has an opening on one side along the first direction, the air outlet plate cover is arranged on the opening, and the piezoelectric element, the vibration plate, the support frame and the jet plate are all arranged in the shell, and the shell has an air inlet connected to the air inlet channel.

[0019] Furthermore, the air inlet is opened on a side of the shell away from the opening along the first direction.

[0020] Compared with the prior art, the piezoelectric heat dissipation fan in the embodiment of the present invention has the following beneficial effects:

[0021] In the piezoelectric cooling fan according to the embodiment of the present invention, the piezoelectric element is provided with a central hole. When a voltage is applied to drive the piezoelectric element to deform, its own deformation amount can be reduced, and the vibration plate or jet plate located at the central hole is used to amplify its deformation amount, so as to achieve the effect of driving gas flow. Since the deformation amount of the piezoelectric element is small, the generation of fatigue cracks during long-term operation is effectively avoided, and the service life of the piezoelectric cooling fan is significantly extended. Description of the Drawings

[0022] Figure 1 is a schematic structural diagram of the piezoelectric cooling fan according to the embodiment of the present invention;

[0023] Figure 2 is a front view of the piezoelectric element and the vibration plate in the first direction of the piezoelectric cooling fan according to the embodiment of the present invention;

[0024] Figure 3 is an exploded schematic diagram of the piezoelectric cooling fan according to the first embodiment of the present invention;

[0025] Figure 4 is a schematic structural diagram of the piezoelectric cooling fan according to the first embodiment of the present invention Figure 1 ;

[0026] Figure 5 is a schematic structural diagram of the piezoelectric cooling fan according to the first embodiment of the present invention Figure 2 ;

[0027] Figure 6 is a schematic structural diagram of the piezoelectric cooling fan according to the first embodiment of the present invention Figure 3 ;

[0028] Figure 7 is a schematic structural diagram of the piezoelectric cooling fan according to the second embodiment of the present invention Figure 1 ;

[0029] Figure 8 is a schematic structural diagram of the piezoelectric cooling fan according to the second embodiment of the present invention Figure 2 ;

[0030] Figure 9 is a schematic structural diagram of the piezoelectric cooling fan according to the second embodiment of the present invention Figure 3 ;

[0031] Figure 10 is a schematic structural diagram of the piezoelectric cooling fan according to the third embodiment of the present invention Figure 1 ;

[0032] Figure 11 is a schematic structural diagram of the piezoelectric cooling fan according to the third embodiment of the present invention Figure 2 ;

[0033] Figure 12Structural schematic of the piezoelectric cooling fan according to the third embodiment of the present invention Figure 3 。

[0034] In the figure, 1 is a piezoelectric element; 11 is a central hole; 2 is a vibration plate; 3 is a support frame; 31 is a chamber; 4 is a jet plate; 41 is a jet hole; 5 is an air outlet plate; 51 is an air outlet hole; 6 is a connection assembly; 61 is an intake passage; 7 is a housing; 71 is an opening; 72 is an air inlet; x is the first direction. Specific embodiments

[0035] The following further describes in detail the specific embodiments of the present invention with reference to the drawings and embodiments. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0036] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. used in the present invention indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0037] In the description of the present invention, it should be understood that the terms "connected", "connected", "fixed", etc. used in the present invention should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or a welded connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0038] The terms "first", "second", etc. are used in the present invention to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information can also be called "second" information, and similarly, "second" information can also be called "first" information.

[0039] Refer to Figure 1 、 Figure 2 and Figure 3 A piezoelectric cooling fan according to an embodiment of the present invention, a piezoelectric cooling fan, includes: a piezoelectric element 1, a vibration plate 2, a support frame 3, a jet plate 4 and an air outlet plate 5;

[0040] The support frame 3 has a chamber 31 which is open on both sides along the first direction x; the vibration plate 2 and the jet plate 4 are respectively covered on both sides of the chamber 31 along the first direction x and are both connected to the support frame 3, the jet plate 4 is provided with a jet hole 41, the piezoelectric element 1 is attached to the side of the vibration plate 2 away from the chamber 31 along the first direction x and / or the side of the jet plate 4 away from the chamber 31 along the first direction x, the piezoelectric element 1 is provided with a center hole 11, the air outlet plate 5 is spaced apart from the side of the jet plate 4 away from the chamber 31 along the first direction x, and the air outlet plate 5 is provided with an air outlet hole 51 connected with the jet hole 41.

[0041] Specifically, the vibration plate 2 can be made of metal films such as stainless steel, copper, aluminum alloy, titanium alloy, etc., or can be made of non-metallic films such as polyimide film, PET film, epoxy resin, rubber, etc., and its thickness can range from 0.01mm to 1mm. The piezoelectric element 1 is fixed on the vibration plate 2 or the jet plate 4. The piezoelectric element 1 can be a separate piezoelectric crystal, which together with the vibration plate 2 or the jet plate 4 constitutes a transducer that can bend and vibrate; the piezoelectric element 1 can also be a piezoelectric single crystal composed of a piezoelectric crystal and an elastic substrate; or a piezoelectric double crystal formed by attaching a piezoelectric crystal to both sides of an elastic substrate; or a piezoelectric laminate formed by bonding two piezoelectric crystals that can bend and vibrate. The common point of the above schemes is that they can drive the vibration plate 2 or the jet plate 4 to produce bending deformation vibration. The above piezoelectric crystal can be a multilayer piezoelectric ceramic or a single-layer piezoelectric ceramic. The piezoelectric element 1 can be of any structural shape, such as a circular, square, annular, etc. structure.

[0042] Applying an AC excitation signal to the piezoelectric element 1 causes the vibration plate 2 or the jet plate 4 to vibrate at a high frequency, thereby doing work on the gas and driving the gas to flow in a directional manner. The frequency of the applied excitation signal is within the ultrasonic frequency range to avoid generating noise audible to the human ear. When the frequency of the excitation signal is the same as or close to the characteristic frequency of the piezoelectric element 1, the maximum flow rate can be obtained. The Helmholtz resonance frequency of the chamber 31 can be designed to be close to the drive signal frequency to maximize the use of system energy. Of course, other frequencies can also be used.

[0043] The piezoelectric element 1 vibrates at high speed under an AC driving signal of a specific frequency, driving the vibration plate 2 or the jet plate 4 to produce periodic up and down bending deformation. Figure 5 As shown, the piezoelectric element 1 bends downward, the gas in the chamber 31 is compressed, and obtains an initial forward velocity. The gas moves outward through the jet hole 41 of the jet plate 4, generates a gas jet, forms a vortex pair and sucks the nearby gas forward to be ejected through the outlet hole 51.

[0044] like Figure 5As shown, the piezoelectric element 1 bends upward, the pressure in the chamber 31 decreases, and external gas enters the chamber 31 through the jet holes 41 from the gap between the jet plate 4 and the air outlet plate 5. Due to inertia, the gas that was previously ejected from the chamber 31 has passed through the air outlet holes 51 and is far from the jet holes 41. With the blocking effect of the air outlet plate 5, only a small part of the gas will flow back at this time, and the remaining gas entering the chamber 31 mainly enters through the gap channel between the jet plate 4 and the air outlet plate 5. The process of continuous cycling and repetition Figure 4 and Figure 5 can continuously suck the cooling gas from the gap between the jet plate 4 and the air outlet plate 5 and finally eject it from the air outlet holes 51.

[0045] As Figure 2 shown, in some improved solutions of the present application, the projection of the piezoelectric element 1 in the first direction x is circular, and the central hole 11 is a circular hole. The circular structure is more evenly stressed during vibration, which can further reduce stress concentration and extend the service life of the piezoelectric element 1.

[0046] In some improved solutions of the present application, the piezoelectric element 1 is attached to the side of the jet plate 4 facing away from the chamber 31 along the first direction x, and the projections of the jet holes 41 in the first direction x are all located within the central hole 11, which can directly utilize the central hole 11 to pass the air flow without opening holes at other positions of the piezoelectric element 1.

[0047] Referring to Figure 4 , in some improved solutions of the present application, the spacing dimension between the vibration plate 2 and the jet plate 4 in the first direction x is H1 mm, where 0.02 mm ≤ H1 ≤ 0.5 mm. The dimension of the vibration plate 2 to the jet plate 4 in the first direction x is the height H1 of the chamber 31. In order to avoid the vibration interference between the jet plate 4 and the vibration plate 2, H1 needs to be greater than the maximum amplitude of the vibration plate 2 or the jet plate 4. At the same time, the closer the jet plate 4 is to the vibration plate 2, the higher the energy obtained by the gas and the greater its initial velocity.

[0048] In some improved solutions of the present application, the spacing dimension between the jet plate 4 and the air outlet plate 5 in the first direction x is H2 mm, where 0.1 ≤ H2 ≤ 2 mm. The distance between the jet plate 4 and the air outlet plate 5 is H2, which affects the size of the gas flow entering the chamber 31 from the gap between the two, and also affects the size of the gas flow carried away during the gas jet entrainment process in the jet holes 41. The size of H2 can be adjusted according to the required flow rate and noise level. In some embodiments, the size of H2 is 0.1 mm to 2 mm.

[0049] In some improved embodiments of the present application, the jet holes 41 are circular holes, and the aperture size of the jet holes 41 is 0.005 mm to 0.5 mm. The circular hole design ensures uniform airflow through, reducing local turbulence. The small aperture design also helps to increase the airflow velocity and enhance the heat dissipation effect.

[0050] In some improved embodiments of the present application, a plurality of jet holes 41 are formed in the jet plate 4, a plurality of air outlet holes 51 are formed in the air outlet plate 5, the aperture of the air outlet holes 51 is larger than that of the jet holes 41, and one air outlet hole 51 is correspondingly arranged with at least one jet hole 41 in the first direction x. Generally, the air outlet holes 51 and the jet holes 41 are in one-to-one correspondence, or they may not be in one-to-one correspondence. For example, multiple air outlet holes 51 can be combined into one air outlet hole 51 for the gas of multiple jet holes 41 to pass through. Generally, the size of the air outlet holes 51 is larger than that of the jet holes 41. In some other embodiments, it may also be equal to or smaller than the size of the jet holes 41, and can be adjusted according to the required flow rate and noise level. By increasing the area ratio of the air outlet holes 51 to the corresponding jet holes 41, the change rate of the gas flow velocity can be reduced, thereby reducing the noise generated when the air flow passes through.

[0051] In some improved embodiments of the present application, a plurality of jet holes 41 are formed in the jet plate 4, wherein the projected area of the jet plate 4 in the first direction x is S1 mm2, and the projected area of the jet holes 41 in the first direction x is S2 mm2, satisfying 0.1% ≤ S2 / S1 ≤ 10%. The jet holes 41 are evenly distributed on the jet plate 4. The jet holes 41 are generally circular, and can also be in shapes such as rectangular, waist-shaped, and oval. The diameter of a single jet hole 41 can be 5 um to 500 um. The number of jet holes 41 is determined by the total area of the jet plate 4 and the area of a single jet hole 41. The total opening area ratio on the jet plate 4 is 0.1% to 10%. In some embodiments, the number of jet holes 41 is 10 to 2000.

[0052] In some improved embodiments of the present application, a plurality of air outlet holes 51 are formed in the air outlet plate 5, wherein the projected area of the air outlet plate 5 in the first direction x is S3 mm2, and the projected area of the air outlet holes 51 in the first direction x is S4 mm2, satisfying 1% ≤ S4 / S3 ≤ 20%. The air outlet holes 51 on the air outlet plate 5 are used for the gas to jet through the jet holes 41, which can ensure rapid heat dissipation. In some embodiments, the opening area ratio on the air outlet plate 5 is 1% to 20%.

[0053] In some improved embodiments of the present application, it further includes a connection component 6;

[0054] The air outlet plate 5 is connected to the edge of the jet plate 4 via the connecting component 6, or the air outlet plate 5 is connected to the edge of the vibration plate 2 via the connecting component 6;

[0055] The connecting assembly 6 is provided with an air inlet passage 61 which is in communication with the jet hole 41 .

[0056] In some improved schemes of the present application, a shell 7 is further included, and an opening 71 is provided on one side of the shell 7 along the first direction x, the air outlet plate 5 is covered on the opening 71, and the piezoelectric element 1, the vibration plate 2, the support frame 3 and the jet plate 4 are all arranged in the shell 7, and an air inlet 72 connected to the air inlet channel 61 is provided on the shell 7.

[0057] In some improved solutions of the present application, the air inlet 72 is opened on the side of the housing 7 away from the opening 71 along the first direction x. The air inlet 72 and the opening 71 are arranged opposite to each other along the first direction x, that is, the air inlet 72 and the air outlet 51 are arranged opposite to each other, which can prevent the ejected gas from being sucked into the piezoelectric heat dissipation fan, thereby improving the heat dissipation cycle efficiency.

[0058] like Figures 4 to 6 As shown in FIG. 1 , it is the first embodiment of the present application. In this embodiment, the piezoelectric element 1 is attached to the vibration plate 2. Figure 4 As shown, along the first direction x, from top to bottom, there are the shell 7, the piezoelectric element 1, the vibration plate 2, the support frame 3, the jet plate 4, the connecting assembly 6 and the air outlet plate 5, and the components are fixed by welding or adhesive. The shell 7 is made of metal or plastic, and an air inlet 72 is provided on it. In this embodiment, the vibration plate 2 is rectangular, and in other embodiments, it can also be circular or other shapes. The vibration plate 2 and the jet plate 4 are fixed on the supporting frame 3 on all sides. There are a plurality of evenly distributed jet holes 41 on the jet plate 4, and the distribution area of ​​the jet holes 41 is in the hollow area in the middle of the chamber 31. The other side of the jet plate 4 is fixed on the connecting assembly 6, and the connecting assembly 6 is provided with an air inlet channel 61 for gas to enter. The air outlet plate 5 is located on the other side of the connecting assembly 6, and an air outlet is provided on the air outlet plate 5, and the air outlet plate 5 is connected to the shell 7 at the same time.

[0059] like Figures 7 to 8 As shown in FIG. 1 , it is a second embodiment of the present application. In this embodiment, the piezoelectric element 1 is attached to the jet plate 4. Figure 7As shown in the figure, the piezoelectric cooling fan from top to bottom is successively a vibration plate 2, a support frame 3, a jet plate 4, a piezoelectric element 1, and an air outlet plate 5. Its basic structure is the same as that of the first embodiment, and the working principle is similar to that of the first embodiment. Among them, the vibration plate 2 has basically no deformation in this embodiment and can be regarded as a cover plate. The air outlet plate 5 and the vibration plate 2 are connected by a connection component 6, and an air inlet channel 61 communicating with the jet holes 41 is provided on the connection component 6. Since the piezoelectric element 1 is fixed on the jet plate 4, when a driving voltage is applied to the piezoelectric element 1, the piezoelectric element 1 vibrates and drives the jet plate 4 to vibrate. The jet plate 4 is both a jet plate and a vibration element at the same time. Therefore, compared with the first embodiment, the structure of this embodiment is simpler, the overall size of the piezoelectric cooling fan in the first direction x is smaller, it can be applied in a narrower heat dissipation space, and the piezoelectric element 1 can drive the discharge of gas both when driving the jet plate 4 to bend upward or downward, with higher efficiency. In some specific embodiments, its overall thickness can be made to be 0.5 mm to 1.0 mm.

[0060] Refer to Figure 8 , when the jet plate 4 bends upward, the gas in the chamber 31 is compressed, obtaining a forward initial velocity. The gas moves outward through the jet holes 41 on the jet plate 4. Under specific conditions, a gas jet is generated, forming a vortex pair and entraining the gas in the chamber 31, and finally discharging from the air outlet holes 51. In this process, more gas is discharged from the air outlet holes 51, which is the main exhaust process. At the same time, external gas enters the chamber 31 from the air inlet channel 61.

[0061] Refer to Figure 9 , when the jet plate 4 bends downward, the pressure in the chamber 31 decreases, external gas enters the cavity through the jet holes 41, the pressure in the chamber 31 increases, and a part of the gas is driven to continue flowing out from the air outlet holes 51. In this process, less gas is discharged from the air outlet holes 51.

[0062] In this way, in Figure 8 and Figure 9 both processes, gas can be discharged from the air outlet holes 51, and it has higher efficiency compared with the first embodiment.

[0063] As Figures 10 to 12 shown, it is the third embodiment of the present application. In this embodiment, piezoelectric elements 1 are attached to both the jet plate 4 and the vibration plate 2. Without increasing the overall size of the piezoelectric cooling fan, the performance of the piezoelectric fan can be greatly improved. The basic structure of the piezoelectric cooling fan in this embodiment is the same as that of the first embodiment, and it is composed of a housing 7, a piezoelectric element 1, a vibration plate 2, a support frame 3, a jet plate 4, and an air outlet plate 5. Its working principle is the same as that of the first embodiment and has all the advantages of the first embodiment.

[0064] However, compared with the first embodiment of the present application, a piezoelectric element 1 is also fixed on the jet plate 4 of this embodiment. During operation, drive voltages are respectively applied to the two piezoelectric elements 1 to cause the vibrating plate 2 and the jet plate 4 to vibrate with the same frequency and opposite directions. Since the vibrating plate 2 and the jet plate 4 vibrate in a mode with the same frequency and opposite directions, the volume change rate of the chamber 31 is greatly increased compared with the situation in the first embodiment. Accordingly, the driving ability for the gas is also greatly increased, and the performance of the piezoelectric cooling fan is also greatly improved.

[0065] Reference Figure 11 , the gas in the chamber 31 is greatly compressed to obtain an initial forward velocity. The gas moves outwards through the jet holes 41 of the jet plate 4 to generate a gas jet, form a vortex pair and entrain the surrounding gas, and finally discharge from the air outlet 51.

[0066] Reference Figure 12 , the volume of the chamber 31 increases and the pressure decreases. External gas enters the chamber 31, and at the same time, part of the gas discharges from the air outlet 51.

[0067] In summary, the embodiment of the present invention provides a piezoelectric cooling fan. The piezoelectric element 1 is provided with a central hole 11. When a voltage is applied to drive the piezoelectric element 1 to deform, its own deformation amount can be reduced, and the vibrating plate 2 or the jet plate 4 corresponding to the central hole 11 is used to amplify its deformation amount, so as to achieve the effect of driving the gas flow. Since the deformation amount of the piezoelectric element 1 is small, the generation of fatigue cracks under long-term operation is effectively avoided, and the service life of the piezoelectric cooling fan is significantly extended.

[0068] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A piezoelectric cooling fan, characterized in that: include: Piezoelectric element, vibration plate, support frame, jet plate and air outlet plate; The support frame has a chamber which is open on both sides along the first direction; the vibration plate and the jet plate are respectively covered on both sides of the chamber along the first direction and are connected to the support frame, the jet plate is provided with a jet hole, the piezoelectric element is attached to the side of the vibration plate away from the chamber along the first direction and / or the side of the jet plate away from the chamber along the first direction, a center hole is provided on the piezoelectric element, the air outlet plate is spaced apart from the side of the jet plate away from the chamber along the first direction, and the air outlet plate is provided with an air outlet hole connected with the jet hole.

2. The piezoelectric heat dissipation fan according to claim 1, characterized in that: The projection of the piezoelectric element in the first direction is circular, and the central hole is a circular hole.

3. The piezoelectric heat dissipation fan according to claim 1, characterized in that: The piezoelectric element is attached to a side of the jet plate away from the chamber along the first direction, and the projections of the jet holes in the first direction are all located in the central hole.

4. The piezoelectric heat dissipation fan according to claim 1, characterized in that: The spacing dimension between the vibration plate and the jet plate in the first direction is H1 mm, wherein 0.02 mm ≤ H1 ≤ 0.5 mm; and / or, The spacing dimension between the jet plate and the air outlet plate in the first direction is H2 mm, wherein 0.1 mm≤H2≤2 mm.

5. The piezoelectric heat dissipation fan according to claim 1, characterized in that: The jet hole is a circular hole, and the aperture size of the jet hole is 0.005mm-0.5mm.

6. The piezoelectric heat dissipation fan according to claim 1, characterized in that: The jet plate is provided with a plurality of jet holes, the outlet plate is provided with a plurality of outlet holes, the aperture of the outlet hole is larger than the aperture of the jet hole, and one outlet hole is arranged corresponding to at least one jet hole in the first direction.

7. The piezoelectric heat dissipation fan according to claim 1, characterized in that: The jet plate is provided with a plurality of jet holes, wherein the projection area of ​​the jet plate in the first direction is S1 mm 2 The projection area of ​​the jet hole in the first direction is S2mm 2 , satisfying 0.1%≤S2 / S1≤10%; and / or, The outlet plate is provided with a plurality of outlet holes, wherein the projection area of ​​the outlet plate in the first direction is S3 mm 2 The projection area of ​​the air outlet in the first direction is S4mm 2 , satisfying 1%≤S4 / S3≤20%.

8. The piezoelectric heat dissipation fan according to any one of claims 1 to 7, characterized in that: Also included are connection components; The air outlet plate is connected to the edge of the jet plate through the connecting assembly, or the air outlet plate is connected to the edge of the vibration plate through the connecting assembly; The connecting component is provided with an air inlet passage which is in communication with the jet hole.

9. The piezoelectric heat dissipation fan according to claim 8, characterized in that: It also includes a shell, which has an opening on one side along the first direction, the air outlet plate cover is arranged on the opening, and the piezoelectric element, the vibration plate, the support frame and the jet plate are all arranged in the shell, and the shell is provided with an air inlet connected to the air inlet channel.

10. The piezoelectric heat dissipation fan according to claim 9, characterized in that: The air inlet is opened at a side of the shell body away from the opening along the first direction.

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