Substrate working device

Abstract

The invention provides a substrate working device capable of shortening the time required for thread fastening operation. The substrate working device is provided with: a substrate holding device for holding a substrate at a working position; a mounting unit that is disposed above the substrate holding device and that mounts a component on the upper surface of the substrate held by the substrate holding device; and a screw fastening unit that is disposed below the substrate holding device and that screws the component mounted on the upper surface of the substrate from below the substrate. The screw fastening unit includes: a work head that performs screw acquisition and screw fastening in an upward posture opposite to the lower surface of the substrate held by the substrate holding device; and a moving mechanism for moving the working head to the screw mounting position.

Description

Technical Field

[0001] The present invention relates to a substrate working device. Background Art

[0002] In the production process of electronic devices, an automatic device for performing an operation of mounting components on the surface of a substrate is used. Patent Document 1 discloses a substrate assembly device in which the casing of the device is divided into upper and lower layers, and a first robot for performing an operation on the surface of the substrate from above and a second robot for performing an operation on the back surface of the substrate from below are provided. The first robot mounts components on the surface of the substrate. The second robot is a vertical multi-joint robot provided with a screwdriver at the front end, and performs a screw fastening operation of the components to the substrate. The second robot picks up screws from a screw supply device provided in the lower layer of the casing and tightens the screws from the back surface of the substrate, thereby thread-fixing the components to the substrate. Prior Art Documents Patent Documents

[0003] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2019-209433 Summary of the Invention Problems to be Solved by the Invention

[0004] The robot that performs the screw fastening operation has the front end of the screwdriver facing downward, picks up screws from the screw supply device, and then has the front end of the screwdriver facing upward to perform the screw fastening of the components. Since the posture of the front end portion (screwdriver) of the robot is changed to downward and upward every time screw fastening is performed, the operation takes time. In order to improve the overall operation efficiency of the device, it is desired to shorten the time required for the screw fastening operation.

[0005] The object of the technology disclosed in this specification is to shorten the time required for the screw fastening operation. Means for Solving the Problems

[0006] This specification discloses a substrate working device. The substrate working device includes: a substrate holding device that holds a substrate at a working position; a mounting unit that is disposed above the substrate holding device and mounts components on the upper surface of the substrate held by the substrate holding device; and a screw fastening unit that is disposed below the substrate holding device and performs screw fastening of the components mounted on the upper surface of the substrate from below the substrate. The screw fastening unit includes: a working head that obtains and performs screw fastening of screws in a state where the working head faces upward and is opposed to the lower surface of the substrate held by the substrate holding device; and a moving mechanism that moves the working head to a screw mounting position.

[0007] According to the technology disclosed in this specification, the time required for the screw fastening operation can be shortened. Description of the Drawings

[0008] Figure 1 is a perspective view of a substrate processing apparatus according to an embodiment. Figure 2 is a diagram schematically showing a mounting head according to an embodiment. Figure 3 is a diagram showing a nozzle according to an embodiment. Figure 4 is a perspective explanatory view showing the installation position of a screw fastening unit according to the present embodiment. Figure 5 is a perspective view of a screw fastening unit according to the present embodiment. Figure 6 is a top view of a screw fastening unit according to the present embodiment. Figure 7 is a perspective view of an operation head according to the present embodiment. Figure 8 is a front view of an operation head according to the present embodiment. Figure 9 is a sectional view of a screwdriver tool according to the present embodiment. Figure 10 is a schematic diagram showing the function of a transfer portion according to the present embodiment. Figure 11 is a perspective view of a screw supply device and a feeding mechanism according to an embodiment. Figure 12 is a sectional view of the main part of a feeding mechanism according to an embodiment. Figure 13 is a functional block diagram showing an example of a control device according to the present embodiment. Figure 14 is a flowchart showing an example of a component mounting method according to the present embodiment. Figure 15 is showing Figure 14 a flowchart of the screw fastening operation of step S4 of Figure 16 is a schematic diagram showing the screw fastening operation of a screw fastening unit. Figure 17 is a perspective view of a screwdriver tool according to an embodiment. Figure 18 is a perspective view of an example of an extended tool according to an embodiment. Detailed Embodiments

[0009] Embodiments of the present invention will be described below with reference to the drawings, but the present invention is not limited thereto. The constituent elements of the embodiments described below can be appropriately combined. There may also be cases where some of the constituent elements are not used.

[0010] In the following description, an XYZ orthogonal coordinate system is set, and the positional relationships of each part are described with reference to this XYZ orthogonal coordinate system. The direction parallel to the X-axis in the specified plane is set as the X-axis direction, the direction parallel to the Y-axis orthogonal to the X-axis in the specified plane is set as the Y-axis direction, and the direction parallel to the Z-axis orthogonal to the X-axis and the Y-axis respectively is set as the Z-axis direction. The rotation or tilt direction centered on the X-axis is set as the θX direction, the rotation or tilt direction centered on the Y-axis is set as the θY direction, and the rotation or tilt direction centered on the Z-axis is set as the θZ direction. The specified plane is the XY plane. The direction parallel to the specified plane includes one or both of the X-axis direction and the Y-axis direction. The Z-axis direction is the direction orthogonal to the specified plane. In the present embodiment, the specified plane is parallel to the horizontal plane, and the Z-axis direction is the up-and-down direction. Additionally, the specified plane may be inclined with respect to the horizontal plane.

[0011] [Substrate processing device] Figure 1 is a perspective view showing the substrate processing device 100 of the present embodiment. As Figure 1 shown, the substrate processing device 100 includes: a base frame 114; a component supply device 200 that supplies components C; a setting unit 102 that sets the component supply device 200; a substrate transfer device 103 that transfers a substrate P to a processing position; a substrate holding device 104 that holds the substrate P at the processing position; a mounting unit 10 disposed at a position above the substrate holding device 104; a screw fastening unit 20 disposed at a position below the substrate holding device 104; and a control device 120 that controls the substrate processing device 100. The mounting unit 10 mounts the component C on the upper surface of the substrate P held by the substrate holding device 104. The screw fastening unit 20 screws the component C mounted on the upper surface of the substrate P from below the substrate P.

[0012] The component supply device 200 includes a feeder that sequentially supplies a plurality of components C. The setting unit 102 includes a feeder container that sets the feeder. The setting unit 102, the substrate transfer device 103, and the mounting unit 10 are supported by the base frame 114. A component supply position PJa is defined in the component supply device 200. The component supply position PJa is a position where a component supply process of supplying the component C from the component supply device 200 to the mounting head 106 is performed.

[0013] The substrate transfer device 103 transfers the substrate P to the working position PJb. The working position PJb is the position where the mounting operation of mounting the component C onto the substrate P and the thread tightening operation are performed. The substrate transfer device 103 includes a conveyor belt capable of transferring the substrate P. A pair of conveyor belts are provided in the Y-axis direction. One conveyor belt supports the +Y-side end of the back surface of the substrate P, and the other conveyor belt supports the -Y-side end of the back surface of the substrate P. The conveyor belt includes an endless belt and rotates while supporting the substrate P, thereby transferring the substrate P in the X-axis direction.

[0014] The substrate holding device 104 holds the end of the substrate P on the transfer path of the substrate transfer device 103. The substrate holding device 104 holds the substrate P at the working position PJb. The substrate held by the substrate holding device 104 stops at the working position PJb. The substrate holding device 104 includes a clamping mechanism that clamps the end of the substrate P. The substrate holding device 104 holds the substrate P by clamping both ends of the substrate P in the Y-axis direction from above and below. The substrate holding device 104 holds the substrate P such that the front surface and the back surface of the substrate P are parallel to the XY plane respectively. The front surface of the substrate P is the surface facing upward. The back surface of the substrate P is the surface facing downward. Hereinafter, expressions such as above and below the substrate P refer to the directions with respect to the substrate P held at the working position PJb as a reference.

[0015] [Mounting unit] The mounting unit 10 includes: a mounting head 106 that mounts the component C onto the front surface of the substrate P held by the substrate holding device 104; a mounting head moving mechanism 107 that enables the mounting head 106 to move within the XY plane; and a nozzle moving device 140 provided on the mounting head 106 that enables the nozzle 30 to move relative to the mounting head 106 in the Z-axis direction and the θZ direction.

[0016] The mounting head 106 mounts the component C onto the front surface of the substrate P held by the substrate holding device 104. The mounting head 106 is equipped with a nozzle 30 that releasably holds the component C. The mounting head 106 can move within the XY plane including the component supply position PJa and the working position PJb. The mounting head 106 holds the component C supplied from the component supply device 200 with the nozzle 30 and mounts the component C onto the front surface of the substrate P disposed at the working position PJb.

[0017] The mounting head moving mechanism 107 moves the mounting head 106 above the substrate P and above the component supply device 200. The mounting head moving mechanism 107 enables the mounting head 106 to move within the XY plane including the component supply position PJa and the working position PJb.

[0018] The mounting head moving mechanism 107 includes: an X-axis guide rail 107a that guides the mounting head 106 in the X-axis direction; a Y-axis guide rail 107b that guides the X-axis guide rail 107a in the Y-axis direction; an X drive unit 109 that generates power for moving the mounting head 106 in the X-axis direction; and a Y drive unit 110 that generates power for moving the mounting head 106 in the Y-axis direction.

[0019] The mounting head 106 is supported by the X-axis guide rail 107a. The X drive unit 109 includes an actuator such as a motor and generates power for moving the mounting head 106 supported by the X-axis guide rail 107a in the X-axis direction. By the operation of the X drive unit 109, the mounting head 106 moves in the X-axis direction while being guided by the X-axis guide rail 107a.

[0020] The X-axis guide rail 107a is supported by the Y-axis guide rail 107b. The Y drive unit 110 includes an actuator such as a motor and generates power for moving the X-axis guide rail 107a supported by the Y-axis guide rail 107b in the Y-axis direction. By the operation of the Y drive unit 110, the X-axis guide rail 107a moves in the Y-axis direction while being guided by the Y-axis guide rail 107b. By the X-axis guide rail 107a moving in the Y-axis direction, the mounting head 106 moves in the Y-axis direction.

[0021] Figure 2 FIG. schematically shows the mounting head 106 of the present embodiment. The mounting head 106 includes a suction nozzle 30 that releasably holds the component C. The suction nozzle 30 holds the component C supplied from the component supply device 200 at the component supply position PJa. After the suction nozzle 30 holds the component C at the component supply position PJa, it transports the component C to the work position PJb and mounts it on the substrate P. After mounting the component C on the substrate P at the work position PJb, the suction nozzle 30 releases the component C. Thereby, the component C is mounted on the substrate P.

[0022] The mounting head 106 includes a suction nozzle moving device 140 that can move the suction nozzle 30 in the Z-axis direction and the θZ direction. The suction nozzle moving device 140 includes: a Z drive unit 150 that moves the suction nozzle 30 in the Z-axis direction; and a θZ drive unit 160 that rotates the suction nozzle 30 in the θZ direction. The Z drive unit 150 includes an actuator such as a motor and generates power for moving the suction nozzle 30 in the Z-axis direction. The θZ drive unit 160 includes an actuator such as a motor and generates power for moving the suction nozzle 30 in the θZ direction.

[0023] The suction nozzle 30 can move in four directions: the X-axis direction, the Y-axis direction, the Z-axis direction, and the θZ direction through the mounting head moving mechanism 107 and the suction nozzle moving device 140. Additionally, the suction nozzle 30 can also move in six directions: the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction.

[0024] Figure 3 This is a view showing the nozzle 30 of the present embodiment. Figure 3 The shown nozzle 30 is a gripping nozzle that grips and holds the component C. The nozzle 30 includes: a nozzle body 35; and a holding portion 32 that is supported by the nozzle body 35 and grips and holds the component C. The holding portion 32 includes: a fixed arm 32A; a movable arm 32B; and a drive portion 33 that can move the movable arm 32B. The movable arm 32B is supported by the nozzle body 35 through a hinge mechanism 34. The movable arm 32B can rotate about the rotation axis of the hinge mechanism 34. In a state where the component C is disposed between the fixed arm 32A and the movable arm 32B, the component C is held in the holding portion 32 by the movable arm 32B moving closer to the fixed arm 32A. The component C is released from the holding portion 32 by the movable arm 32B moving away from the fixed arm 32A. Additionally, the nozzle 30 may be a suction nozzle that suction-holds the component C.

[0025] [Component recognition device] As Figure 1 shown, the substrate processing device 100 includes a component recognition device 111. The component recognition device 111 is supported by a base frame 114. The component recognition device 111 measures the three-dimensional shape of the component C held by the nozzle 30. The measurement data of the component recognition device 111 includes three-dimensional data representing the three-dimensional shape of the component C. The component recognition device 111 measures the three-dimensional shape of the component C held by the nozzle 30 based on the phase-shift method. The component recognition device 111 includes: a projection device that projects a pattern light of light and shade; and a photographing device that photographs the component C onto which the pattern light is projected, and calculates the three-dimensional shape of the component C based on the image data of the component C photographed by the photographing device. The three-dimensional data representing the three-dimensional shape of the component C measured by the component recognition device 111 includes three-dimensional data of leads and threaded holes. The control device 120 performs position control of the mounting unit 10 and the like based on the measurement result of the component recognition device 111.

[0026] The component C mounted on the substrate P by the mounting unit 10 includes a component that is screwed to the substrate P. The component C screwed to the substrate P includes, for example, a connector component. The mounting unit 10 mounts the component C on the upper surface of the substrate P such that the XY positions of the threaded holes of the component C coincide with the XY positions of the screw insertion through holes formed in the substrate P. In the embodiment, the component C mounted on the upper surface of the substrate P by the mounting unit 10 can be screwed by a screw tightening unit 20.

[0027] [Screw tightening unit] Next, the screw tightening unit 20 of the present embodiment will be described. Figure 4 This is a perspective view showing the screw tightening unit 20 of the present embodiment.

[0028] The threaded fastening unit 20 is supported by the base frame 114. The threaded fastening unit 20 is disposed below the substrate conveying device 103 and the substrate holding device 104. The base frame 114 includes an upper frame 114A and a lower frame 114B. The upper frame 114A is provided on the lower frame 114B. The upper frame 114A is respectively disposed at both ends in the X-axis direction of the lower frame 114B. The upper frame 114A is in the shape of a wall along the YZ plane and has a gate shape with openings formed as the loading port and unloading port of the substrate P. As Figure 1 shown, the mounting unit 10 is supported by the upper frame 114A. The lower frame 114B has both end portions 114C in the X-axis direction and a central portion 114D recessed with respect to the both end portions 114C. The substrate conveying device 103 and the substrate holding device 104 are arranged to straddle the both end portions 114C above the central portion 114D. The threaded fastening unit 20 is provided in the central portion 114D. The threaded fastening unit 20 is disposed below the holding position (i.e., the working position PJb) of the substrate P of the substrate holding device 104. The threaded fastening unit 20 performs threaded fastening (thread fixing) of the component C mounted on the upper surface of the substrate P from below the substrate P held by the substrate holding device 104 during the installation of the component C.

[0029] Figure 5 is a perspective view showing the threaded fastening unit 20 of the present embodiment. Figure 6 is a top view showing the threaded fastening unit 20 of the present embodiment.

[0030] The threaded fastening unit 20 includes a working head 21 and a moving mechanism 22 that moves the working head 21 to the screw mounting position. In addition, the threaded fastening unit 20 further includes a screw supply device 23 and a feeding mechanism 24 that feeds the screw to the working head 21 through a feeding channel 25 (refer to the double-dot chain line). The screw mounting position is the position where the threaded hole of the component C is disposed. The working head 21 performs threaded fastening using a screwdriver tool 80. The working head 21 holds the screwdriver tool 80 in an upward posture facing the lower surface of the substrate P held by the substrate holding device 104. The threaded fastening unit 20 arranges the screw SC at the front end of the screwdriver tool 80 and performs threaded fastening to the component C through the screw insertion hole of the substrate P.

[0031] In the present embodiment, the working head 21 acquires the screw SC and performs screw fastening while maintaining an upward posture facing the lower surface of the substrate P held by the substrate holding device 104. Therefore, in the screw fastening unit 20, there is no need to switch the orientation (posture) of the tip of the screwdriver tool 80 up and down during the acquisition of the screw SC and during the screw fastening operation. The screw fastening unit 20 of the embodiment does not include a mechanism for changing the orientation (upward, downward) of the screwdriver tool 80.

[0032] (Moving mechanism) The moving mechanism 22 can move the working head 21 in a direction parallel to the XY plane on the lower surface side of the substrate P. The moving mechanism 22 moves the working head 21 so that the XY coordinates of the screwdriver tool 80 coincide with the screw mounting position, which is the XY coordinates of the threaded hole of the component C.

[0033] The moving mechanism 22 of the embodiment is an orthogonal robot (XY robot) that moves the working head 21 within the XY plane. The moving mechanism 22 includes a head support member 40 that supports the working head 21. The moving mechanism 22 includes an X-axis drive unit 41 and a Y-axis drive unit 42 that move the working head 21 in the X-axis direction and the Y-axis direction that are orthogonal to each other within the plane along the lower surface of the substrate P. The moving mechanism 22 includes: an X-axis guide portion 43 that guides the head support member 40 in the X-axis direction; and a Y-axis guide portion 44 that guides the X-axis guide portion 43 in the Y-axis direction.

[0034] The head support member 40 supports the working head 21. The head support member 40 can move in the X-axis direction and the Y-axis direction while supporting the working head 21. The head support member 40 is supported by the X-axis guide portion 43.

[0035] The X-axis guide portion 43 includes an X beam 43A and an X linear guide 43B. The X beam 43A is long in the X-axis direction. The +X side end and the -X side end of the X beam 43A are supported by the Y-axis guide portion 44. The X linear guide 43B is fixed to the X beam 43A and is a guide rail that extends linearly in the X-axis direction. A linear slider 43C fixed to the head support member 40 can be slidably mounted on the X linear guide 43B. The head support member 40 is guided in the X-axis direction by the X linear guide 43B.

[0036] The X-axis drive unit 41 generates power for moving the head support member 40 in the X-axis direction. The X-axis drive unit 41 is an actuator and includes an electric motor in the embodiment. The power generated by the X-axis drive unit 41 is transmitted to the head support member 40 through a power transmission mechanism. The power transmission mechanism is in Figure 5 、 Figure 6In the example, it is the lead screw shaft 41A. The lead screw shaft 41A extends linearly in the X-axis direction. The +X side end and the -X side end of the lead screw shaft 41A are respectively supported by the X beam 43A so as to be rotatable. The X-axis drive unit 41 is provided at the -X side end of the X beam 43A, and rotates the lead screw shaft 41A connected to the output shaft via the pulley mechanism 41B. A nut member (not shown) fixed to the head support member 40 is mounted on the lead screw shaft 41A. By the rotation of the lead screw shaft 41A, the nut member meshing with the lead screw shaft 41A moves in the X-axis direction. As a result, by the operation of the X-axis drive unit 41, the head support member 40 moves in the X-axis direction while being guided by the X-axis guide portion 43. By the movement of the head support member 40 in the X-axis direction, the working head 21 moves in the X-axis direction. The position of the working head 21 in the X-axis direction is defined by the driving amount of the X-axis drive unit 41.

[0037] The Y-axis guide portion 44 includes a pair of Y linear guides 44A. The pair of Y linear guides 44A are guide rails that extend linearly along the Y-axis direction. The +X side end and the -X side end of the X beam 43A are respectively supported by the pair of Y linear guides 44A. Linear sliders (not shown) fixed to the X beam 43A are slidably mounted on the pair of Y linear guides 44A respectively. The X beam 43A is guided in the Y-axis direction by the pair of Y linear guides 44A.

[0038] The Y-axis drive unit 42 generates power for moving the head support member 40 in the Y-axis direction. The Y-axis drive unit 42 is an actuator, and in the embodiment, includes an electric motor. The power generated by the Y-axis drive unit 42 is transmitted to the X beam 43A via the power transmission mechanism. The power transmission mechanism Figure 5 , Figure 6 In the example, includes a lead screw shaft 42A and a pulley mechanism 42B. The lead screw shaft 42A is disposed between the pair of Y linear guides 44A and extends linearly in the Y-axis direction. The +Y side end and the -Y side end of the lead screw shaft 42A are respectively supported by support portions (not shown) fixed to the base frame 114 so as to be rotatable. The Y-axis drive unit 42 is supported by the base frame 114 and is connected to the +Y side end of the lead screw shaft 42A via the pulley mechanism 42B. A nut member 42C fixed to the X beam 43A is mounted on the lead screw shaft 42A. By the rotation of the lead screw shaft 42A, the nut member 42C meshing with the lead screw shaft 42A moves in the Y-axis direction. As a result, by the operation of the Y-axis drive unit 42, the X beam 43A moves in the Y-axis direction while being guided by the Y-axis guide portion 44. The head support member 40 moves in the X-axis direction while being guided by the X-axis guide portion 43. By the movement of the X beam 43A in the Y-axis direction, the working head 21 moves in the Y-axis direction. The position of the working head 21 in the Y-axis direction is defined by the driving amount of the Y-axis drive unit 42.

[0039] (Working head) Figure 7 is a perspective view showing the working head 21 of the present embodiment. Figure 8 is a front view showing the working head 21 of the present embodiment.

[0040] The working head 21 is supported by the head support member 40. The working head 21 includes a tool portion 50 for tightening the screw SC, a transfer portion 60, 051, a θZ drive portion 52, and a pneumatic portion 53. The tool portion 50, the transfer portion 60, the Z-axis drive portion 51, the θZ drive portion 52, and the pneumatic portion 53 are supported by the head support member 40.

[0041] The tool portion 50 has a mounting portion 71 capable of detachably mounting a screwdriver tool 80 that engages with the screw. The tool portion 50 holds the screwdriver tool 80 at the mounting portion 71. The tool portion 50 holds the screwdriver tool 80 in a posture with the front end facing upward. The mounting portion 71 detachably holds the base end portion (the end portion opposite to the front end portion that engages with the screw SC) of the screwdriver tool 80. Thus, the tool portion 50 can replace multiple types of screwdriver tools 80 having different front end shapes. The tool portion 50 is provided on the movable plate 72.

[0042] The θZ drive portion 52 generates power for rotating the screwdriver tool 80 in the θZ direction. The θZ drive portion 52 is an actuator and includes an electric motor in the embodiment. The θZ drive portion 52 rotates the screwdriver tool 80 mounted on the mounting portion 71 in the θZ direction about the central axis of the screwdriver tool 80. The θZ drive portion 52 is provided on the lower surface side of the movable plate 72. The output shaft of the θZ drive portion 52 is connected to the mounting portion 71. The θZ drive portion 52 rotates the screwdriver tool 80 about the central axis in the θZ direction by the rotation of the output shaft. By rotating the screwdriver tool 80 with the screw mounted thereon in the θZ direction, screw fastening is performed.

[0043] The Z-axis drive unit 51 generates power for moving the screwdriver tool 80 in the Z direction. The Z-axis drive unit 51 is an actuator, and in an embodiment, includes an electric motor. The Z-axis drive unit 51 is fixed to the head support member 40. The output shaft of the Z-axis drive unit 51 is connected to the Z screw shaft 73. The Z screw shaft 73 extends linearly along the Z-axis direction. The end of the +Z side and the vicinity of the end of the -Z side of the Z screw shaft 73 are respectively supported by a support portion 73A fixed to the head support member 40 so as to be rotatable. A nut component fixed to the movable plate 72 is installed on the Z screw shaft 73. The movable plate 72 moves in the Z-axis direction by the rotation of the Z screw shaft 73. The movable plate 72 is provided with a linear slider 74A. The linear slider 74A can be slidably mounted on the Z linear guide 74 fixed to the head support member 40. The Z linear guide 74 is a guide rail extending linearly along the Z-axis direction. By the operation of the Z-axis driving unit 51, the tool unit 50 (screwdriver tool 80), the θZ driving unit 52, and the movable plate 72 move in the Z-axis direction along the Z linear guide 74. The position of the screwdriver tool 80 in the Z-axis direction is determined by the driving amount of the Z-axis driving unit 51. The Z-axis driving unit 51 can move the screwdriver tool 80 up and down between a position where the front end of the screwdriver tool 80 is arranged below the intersection 60 and a position where the front end of the screwdriver tool 80 is arranged above the intersection 60.

[0044] (Screwdriver tool) Figure 9 : is a cross-sectional view showing a screwdriver tool 80 of the present embodiment. The screwdriver tool 80 includes a screwdriver 81 and a retaining tube 82 disposed around the screwdriver 81. The screwdriver 81 is disposed inside the retaining tube 82. The retaining tube 82 has an upper end opening 82A at the upper end. An annular rib 82B protruding toward the center of the retaining tube 82 is formed on the inner peripheral surface slightly below the upper end of the retaining tube 82. The inner diameter of the portion where the rib 82B is formed is smaller than the outer diameter of the head of the screw SC and larger than the outer diameter of the screwdriver 81. The inner diameter of the range from the rib 82B to the upper end opening 82A in the retaining tube 82 is larger than the outer diameter of the head of the screw SC. The retaining tube 82 can retain the screw SC by embedding the head of the screw SC in the rib 82B. The screw SC is retained in a state where the shaft portion faces upward and the head portion is embedded in the rib 82B. As a result, the head of the screw SC is disposed directly above the front end of the screwdriver 81.

[0045] The lower end of the holding cylinder 82 is inserted into the housing portion 83. The holding cylinder 82 has a lower end opening 82C at the lower end. The screwdriver 81 is supported by a bearing arranged in the housing portion 83 through the lower end opening 82C so as to be relatively rotatable around the Z axis. The lower end of the screwdriver 81 is supported by the mounting portion 71. The mounting portion 71 is rotated in the θZ direction by the θZ driving portion 52, so that the screwdriver 81 and the mounting portion 71 are rotated in the θZ direction as a whole. The housing portion 83 and the holding cylinder 82 do not rotate.

[0046] The lower end opening 82C of the holding cylinder 82 allows the interior of the holding cylinder 82 to communicate with the interior of the housing portion 83. A connector 83A for connection to the air pressure portion 53 is provided in the housing portion 83. A negative pressure is supplied from the air pressure portion 53 to the holding cylinder 82 via the housing portion 83. The holding cylinder 82 sucks air from the upper end opening 82A using the negative pressure. The holding cylinder 82 is closed at the portion of the annular rib 82B by the head of the screw SC. The holding cylinder 82 can suck the screw SC inserted into the rib 82B using the negative pressure and fix the screw SC in place.

[0047] The holding cylinder 82 and the screwdriver 81 can move relative to each other in the Z-axis direction. The holding cylinder 82 is urged upward by a spring member 84 disposed within the housing portion 83. The spring member 84 is a compression coil spring. The lower end portion of the spring member 84 is supported by a spring bracket 85 fixed to the housing portion 83.

[0048] If the screwdriver tool 80 is moved upward by the Z-axis drive unit 51, first the holding cylinder 82 comes into contact with the lower surface of the substrate P. If the screwdriver tool 80 continues to move upward, the spring member 84 is compressed by the reaction force from the substrate P, so that the holding cylinder 82 does not move and maintains its position. During the period when the spring member 84 is compressed, the screwdriver 81 and the housing portion 83 continue to move upward. Therefore, the front end portion of the screwdriver 81 engages with the screw SC in the rib 82B held by the holding cylinder 82 and directly moves upward through the inner peripheral side of the rib 82B. Thereby, the screw is mounted on the front end portion of the screwdriver 81 and then inserted into the threaded hole of the component C. In addition, the screwdriver 81 rotates and moves upward by the θZ drive unit 52. Therefore, when the screwdriver 81 comes into contact with the head of the screw SC, the engaging groove of the head of the screw SC is in phase with the rotational phase of the front end portion of the screwdriver 81, and the engaging groove engages with the front end portion.

[0049] (Transfer portion) Figure 10 is a schematic diagram showing the function of the transfer portion 60 of the present embodiment. As Figure 7 shown, the transfer portion 60 is disposed above the head support member 40. The transfer portion 60 is connected to the delivery mechanism 24 through the delivery channel 25. The transfer portion 60 receives the screw SC sent from the delivery channel 25. The transfer portion 60 sets the received screw SC at the front end portion of the screwdriver tool 80 of the tool portion 50. Therefore, the transfer portion 60 is disposed above the screwdriver tool 80 disposed at the screw mounting position ES (refer to Figure 10 ). In addition, Figure 7 shows the state where the screwdriver tool 80 is disposed at the rising position during screw tightening. Therefore, in Figure 7 , the front end of the screwdriver tool 80 is located at a position above the transfer portion 60.

[0050] As shown Figure 7 in the figure, the transfer portion 60 includes: a holding portion 61 that releasably holds the screw SC; a driving portion 62 that moves the holding portion 61 to the transfer position; and a connecting portion 63 that is connected to the delivery passage 25. The end of the delivery passage 25 is connected to the connecting portion 63. The holding portion 61 receives the screw SC delivered from the delivery passage 25 via the connecting portion 63. The holding portion 61 is connected to the pneumatic portion 53 through an air pipe (not shown). The holding portion 61 holds the screw SC using the pressure supplied from the pneumatic portion 53. By stopping the pressure supply, the holding of the screw SC is released. The driving portion 62 movably holds the holding portion 61 via a bracket 62A. The driving portion 62 is an actuator, for example, a cylinder. The driving portion 62 is connected to the pneumatic portion 53 through an air pipe (not shown). The driving portion 62 moves the holding portion 61 using the pressure supplied from the pneumatic portion 53. The driving portion 62 reciprocates the holding portion 61 between the transfer position A2 and the retracted position A1 by the forward and backward movement of the piston rod. As shown Figure 10 in the figure, the transfer position A2 is the position where the screw SC is transferred to the screwdriver tool 80. The retracted position A1 is the position where the holding portion 61 is retracted when the tool portion 50 (screwdriver tool 80) is moved upward by the Z-axis driving portion 51 for thread tightening.

[0051] As shown Figure 10 in the figure, the holding portion 61 has a holding chamber 64 for the screw SC. The holding chamber 64 is a space that conforms to the shape of the screw SC, and the lower end portion of the holding chamber 64 opens on the lower surface of the holding portion 61. The lower surface opening of the holding chamber 64 is vertically opposed to the opening portion of the connecting portion 63. The connecting portion 63 is disposed directly below the holding portion 61 at the retracted position A1 and is supported by the head support member 40. The connecting portion 63 is a cylindrical connector that is connected to the end of the delivery passage 25. The connecting portion 63 is connected to the delivery passage 25 at the lower end portion and receives the screw SC from the lower end opening. The connecting portion 63 transfers the received screw SC from the upper end opening to the holding chamber 64. The holding portion 61 receives the screw SC into the holding chamber 64 from the lower surface side.

[0052] The screw SC is sent from the delivery passage 25 into the holding chamber 64 in a posture with the shaft portion facing the front side of the traveling direction and the head portion facing the rear side of the traveling direction. The upper portion of the holding chamber 64 forms a small-diameter portion 64A into which the shaft portion of the screw SC is inserted. The holding portion 61 has an air passage 65 connected to the small-diameter portion 64A. The air passage 65 is connected to the pneumatic portion 53. The holding portion 61 sucks the shaft portion of the screw SC received into the holding chamber 64 using the negative pressure supplied to the air passage 65, thereby holding the screw SC in the holding chamber 64. The lower surface of the holding chamber 64 is open, but during the suction using the negative pressure, the screw SC is held and does not fall from the holding chamber 64.

[0053] The holding part 61 that holds the screw SC is moved from the retracted position A1 to the handover position A2 by the drive part 62. At the handover position A2, the lower surface opening of the holding chamber 64 and the upper end opening 82A of the holding cylinder 82 of the screwdriver tool 80 are vertically opposed to each other. By stopping the negative pressure supply from the air pressure part 53 to the air passage 65, the holding of the screw SC is released, and the holding part 61 causes the screw SC to fall from the holding chamber 64. At this time, the thread fastening unit 20 supplies positive pressure to the air passage 65 through the air pressure part 53. By using the positive pressure, the fall of the screw SC from the air passage 65 can be smoothly performed. The screw SC enters the upper end opening 82A of the holding cylinder 82 with the head facing downward and is held in a manner that fits into the annular rib 82B. Thus, the holding part 61 arranges the screw SC at the front end part of the screwdriver tool 80 at the handover position A2. During the thread fastening with the screwdriver tool 80, the next screw SC to be used is supplied from the feeding mechanism 24 to the holding chamber 64. By supplying the next screw SC to be used to the holding chamber 64 during the thread fastening, the time required for the thread fastening can be shortened.

[0054] After the screw SC is arranged, the holding part 61 is moved from the handover position A2 to the retracted position A1 by the drive part 62. The retracted position A1 is located outside the movable range of the tool part 50 (screwdriver tool 80). In a state where the holding part 61 is located at the retracted position A1, the tool part 50 performs a thread fastening operation using the screwdriver tool 80. Thus, the thread fastening unit 20 can obtain the screw SC and perform the thread fastening operation without changing the posture (orientation) of the screwdriver tool 80.

[0055] As Figure 7 shown, the air pressure part 53 supplies pressure to the handover part 60. The air pressure part 53 is provided on the head support member 40 and moves together with the head support member 40. The air pressure part 53 is connected to an air pressure source such as an air pump (not shown). The air pressure part 53 supplies pressure to the holding part 61 and the tool part 50 (screwdriver tool 80). The air pressure part 53 detects the holding and release of the screw SC in the holding part 61 based on the rise of the negative pressure supplied into the holding part 61. The air pressure part 53 detects the holding and release of the screw SC in the holding cylinder 82 based on the rise of the negative pressure supplied into the holding cylinder 82. These pressure changes of the air pressure part 53 are monitored by the control device 120.

[0056] (Feeding mechanism) Figure 11 is a perspective view showing the screw supply device 23 and the feeding mechanism 24 of the embodiment. Figure 12 is a main part cross-sectional view of the feeding mechanism 24 of the embodiment. Figure 12 shows the XZ cross-section of the suction nozzle part 91 of the feeding mechanism 24.

[0057] The screw supply device 23 and the feeding mechanism 24 are supported by the base frame 114. The screw supply device 23 and the feeding mechanism 24 are arranged outside the movement range of the working head 21 using the movement mechanism 22. The screw supply device 23 and the feeding mechanism 24 are arranged on the -Y direction side with respect to the movement mechanism 22. The screw supply device 23 and the feeding mechanism 24 are arranged at a position higher than the movement mechanism 22. The screw supply device 23 and the feeding mechanism 24 are arranged in the X-axis direction.

[0058] The screw supply device 23 stores a plurality of screws SC and supplies them one by one to the screw extraction position B1. The screw supply device 23 includes: a screw storage part provided with a screw inlet; a stirring mechanism for stirring the screws SC stored in the screw storage part; a rail part for sending out the screws SC stored in the screw storage part in a line; and a cutting part for cutting out the screws SC one by one from the queue of the screws SC traveling on the rail part and moving the screws SC to the screw extraction position B1.

[0059] The feeding mechanism 24 presses the screws SC into the feeding passage 25 using air pressure. The feeding mechanism 24 includes: a nozzle part 91; an adsorption driving part 92 for moving the nozzle part 91; and an inlet holding part 93 for holding the inlet of the feeding passage 25. In addition, Figure 11 the illustration of the feeding passage 25 is omitted. The nozzle part 91 is connected to the switching valve 94 through an air pressure tube or the like. The switching valve 94 is connected to an air pressure source such as an air pressure pump (not shown). The switching valve 94 can selectively supply positive pressure and negative pressure to the nozzle part 91 and can stop the pressure supply. The nozzle part 91 adsorbs the screw SC arranged at the screw extraction position B1 by being supplied with negative pressure. The nozzle part 91 sends out the adsorbed screw SC from the sending position B2 to the feeding passage 25 by being supplied with positive pressure.

[0060] The adsorption driving part 92 reciprocates the nozzle part 91 between the screw extraction position B1 and the sending position B2 to the feeding passage 25. The adsorption driving part 92 includes a lifting driving part 92A and a horizontal driving part 92B. The lifting driving part 92A supports the nozzle part 91 via a nozzle holding member 95 and moves the nozzle part 91 in a straight line up and down. The horizontal driving part 92B supports the nozzle part 91 and the lifting driving part 92A and moves the nozzle part 91 and the lifting driving part 92A in a straight line in the X-axis direction between the screw extraction position B1 and the sending position B2. The lifting driving part 92A and the horizontal driving part 92B are both actuators, for example, air cylinders. The lifting driving part 92A and the horizontal driving part 92B operate by pressure supply from the switching valve 94.

[0061] As Figure 12As shown, the nozzle portion 91 holds the suction and discharge opening facing downward on the nozzle holding member 95. The nozzle portion 91 moves between the screw removal position B1 and the feeding position B2 by the horizontal drive portion 92B in a state where it is arranged at the rising position by the lifting drive portion 92A. The nozzle portion 91 moves downward from a position above the screw removal position B1 and contacts the head of the screw SC arranged at the screw removal position B1. The nozzle portion 91 sucks and holds the head of the screw SC by negative pressure and moves upward, thereby removing one screw SC from the screw supply device 23.

[0062] The nozzle portion 91 holding the head of the screw SC moves downward from a position above the feeding position B2, thereby inserting the screw SC into the inlet opening of the inlet holding portion 93. The inlet holding portion 93 is a cylindrical connector connected to the end of the feeding passage 25. The nozzle portion 91 feeds positive pressure into the feeding passage 25 via the inlet holding portion 93, thereby conveying the screw SC to the transfer portion 60 of the work head 21 by air pressure. The nozzle portion 91 sends the screw SC into the inlet of the feeding passage 25 with the shaft portion of the screw SC facing forward in the traveling direction.

[0063] The feeding passage 25 is a pipe with openings at both ends. The feeding passage 25 is formed of, for example, a flexible air tube. One end of the feeding passage 25 is connected to the feeding mechanism 24, and the other end is connected to the work head 21. As described above, one end of the feeding passage 25 is held by the inlet holding portion 93 of the feeding mechanism 24. The other end of the feeding passage 25 is held by the connecting portion 63 of the transfer portion 60. The feeding passage 25 has flexibility to deform along with the movement of the work head 21. The inner diameter of the feeding passage 25 is designed to be a size corresponding to the maximum outer diameter of the screw SC, that is, the outer diameter of the head of the screw SC. The feeding passage 25 has an inner diameter slightly larger than the maximum outer diameter of the screw SC so that the posture of the screw SC pressed and conveyed by air pressure does not change midway. Therefore, the screw SC is conveyed into the holding chamber 64 without changing its orientation while maintaining the orientation in which the shaft portion is arranged forward in the traveling direction and the head is arranged rearward in the traveling direction.

[0064] [Control device] Figure 13 It is a functional block diagram showing an example of the control device 120 of the present embodiment. The control device 120 controls the substrate working device 100. The control device 120 includes a computer system. The computer system includes: an arithmetic device including a processor such as a CPU (Central Processing Unit); a storage device including a non-volatile memory such as a ROM (Read Only Memory) or a memory and a volatile memory such as a RAM (Random Access Memory); and an input / output interface including an input / output circuit capable of inputting and outputting signals and data.

[0065] The control device 120 includes a control portion 121 and a storage portion 122.

[0066] The storage unit 122 stores a production program representing the operation conditions of the substrate processing apparatus 100. The production program includes data for the mounting process of the component C. The production program includes mounting position data indicating the mounting positions on the surface of the substrate P where the component C is to be mounted, screw mounting position data indicating the positions of the threaded holes of the mounted component C, and thickness data indicating the thickness of the substrate P on which the component C is to be mounted.

[0067] Based on the production program stored in the storage unit 122, the control unit 121 outputs control signals to the substrate conveying device 103, the substrate holding device 104, the mounting unit 10, the component supply device 200, the component identification device 111, and the screw fastening unit 20. Based on the production program, the control unit 121 outputs control signals to the X-axis drive unit 41, the Y-axis drive unit 42, the Z-axis drive unit 51, the θZ drive unit 52, the pneumatic unit 53, the feeding mechanism 24, and the screw supply device 23 of the screw fastening unit 20 respectively.

[0068] Based on the production program, the mounting unit 10 sequentially mounts a plurality of components C onto the substrate P through the mounting head 106. Based on the production program, the screw fastening unit 20 sequentially performs screw fastening operations on the components C mounted on the substrate P. That is, after the mounting head 106 holds the component C by the suction nozzle 30 at the component supply position PJa, it moves to the operation position PJb and mounts the component C onto the substrate P. The screw fastening unit 20 obtains the screw SC directly below the screw mounting position of the mounted component C and sets the screw SC on the screwdriver tool 80. The screw fastening unit 20 moves the screwdriver tool 80 upward, inserts the screw SC into the threaded hole, and rotates the screwdriver 81 to perform screw fastening. The mounting head 106 maintains the state of holding the component C from above until the screw fastening operation on the component C mounted on the upper surface of the substrate P is completed. The mounting head 106 supports the external force applied to the component C during the screw fastening operation. Regarding screw fastening, the necessary screw fastening torque is managed based on the production program, and screw fastening is performed based on the set value on the device side. The screw fastening torque is calculated according to the current value of the θZ drive unit 52 which is an electric motor.

[0069] After the mounting unit 10 mounts the component C onto the surface of the substrate, it moves to the component supply position PJa and holds a new component C by the suction nozzle 30. After the mounting head 106 holds the new component C by the suction nozzle 30 at the component supply position PJa, it moves to the working position PJb and mounts the component C onto the substrate P. The screw fastening unit 20 moves to the screw mounting position of the newly mounted component and performs the screw fastening operation. In this way, the mounting unit 10 and the screw fastening unit 20 cooperate to sequentially perform the mounting and screw fastening of a plurality of components C. Therefore, if the time required for the screw fastening operation of the screw fastening unit 20 becomes shorter, the timing at which the mounting unit 10 starts the mounting of the next component C can be advanced. As a result, the overall working efficiency of the substrate working device 100 is improved.

[0070] [Component Mounting Method] Next, the component mounting method of the present embodiment will be described. Figure 14 It is a flowchart showing an example of the component mounting method of the present embodiment.

[0071] The control unit 121 outputs a control signal to the substrate conveying device 103 to convey the substrate P to the working position PJb. The substrate conveying device 103 conveys the substrate P to the working position PJb (step S1).

[0072] Next, the control unit 121 outputs a control signal to the substrate holding device 104 to hold the substrate P conveyed to the working position PJb. The substrate holding device 104 holds the substrate P conveyed to the working position PJb (step S2).

[0073] The control unit 121 controls the mounting unit 10 to mount the component C at the mounting position on the surface of the substrate P (step S3). The mounting unit 10 mounts the component C at the mounting position specified by the production program.

[0074] The control unit 121 controls the screw fastening unit 20 to perform a screw fastening operation on the component C at the mounting position on the surface of the substrate P (step S4). At this time, the control unit 121 controls the mounting unit 10 to maintain the state of holding the component C at the mounting position unchanged.

[0075] In addition, when the mounted component C is not an object of the screw fastening operation, the control unit 121 skips step S4 and makes the process proceed to the next step S5.

[0076] The control unit 121 determines whether the installation of the multiple components C has been completed based on the production program (step S5). When there is a component C that is scheduled to be installed but has not been installed, the control unit 121 determines that the installation of the component C has not been completed, and performs the processes of steps S3 and S4 on the next component C. When the installation and thread tightening of all the components C scheduled to be installed are completed, the control unit 121 determines that the installation of the component C has been completed, and outputs a control signal to the substrate conveying device 103 to carry out the substrate P.

[0077] (Thread tightening operation) Figure 15 It is a flowchart showing the process of the thread tightening operation in step S4. Figure 16 It is a schematic diagram showing the thread tightening action of the thread tightening unit 20.

[0078] In the thread tightening operation of step S4, the control unit 121 controls the thread tightening unit 20 based on the production program so that the screwdriver tool 80 is disposed directly below the screw installation position (step S11). The screw installation position is the position of the threaded hole CH of the component C (refer to Figure 16 ). The thread tightening unit 20 moves the working head 21 in the XY plane through the moving mechanism 22 and disposes the screwdriver tool 80 directly below the screw installation position.

[0079] The control unit 121 controls the screw supply device 23 and the feeding mechanism 24 to feed the screw SC to the working head 21 (step S12). As Figure 12 shown, the screw supply device 23 disposes one screw SC at the screw extraction position B1. The feeding mechanism 24 adsorbs the screw SC disposed at the screw extraction position B1 by supplying negative pressure to the suction nozzle portion 91. The feeding mechanism 24 moves the suction nozzle portion 91 to the feeding position B2 through the adsorption driving portion 92. The feeding mechanism 24 feeds the adsorbed screw SC into the feeding channel 25 by supplying positive pressure to the suction nozzle portion 91. The feeding mechanism 24 conveys the screw SC to the working head 21 via the feeding channel 25 using the positive pressure supplied from the suction nozzle portion 91.

[0080] The control unit 121 controls the working head 21 (handover portion 60) to obtain and hold the screw SC fed from the feeding mechanism 24 (step S13). The control unit 121 controls the air pressure unit 53 to supply negative pressure to the air passage 65 of the holding portion 61. As Figure 10 shown, the holding portion 61 receives the screw SC fed from the feeding mechanism 24 into the holding chamber 64 at the retracted position A1. When the shaft portion of the screw SC reaches the small diameter portion 64A of the holding chamber 64, the screw SC is held using the negative pressure supplied to the small diameter portion 64A via the air passage 65.

[0081] When there is no screw SC disposed in the holding chamber 64, the air pressure section 53 sucks only air and is at a pressure corresponding to the atmospheric pressure. However, since the shaft portion of the screw SC reaches the small-diameter portion 64A, the negative pressure increases sharply. Based on the change in the pressure value (rise in negative pressure) supplied from the air pressure section 53 to the air passage 65, the control section 121 can detect the situation where the screw SC is held by the holding section 61.

[0082] The control section 121 controls the transfer section 60 to set the screw SC in the holding cylinder 82 of the screwdriver tool 80 and retract the holding section 61 (step S14). The control section 121 causes the holding section 61 holding the screw SC to move to the transfer position A2 through the drive section 62. The control section 121 controls the air pressure section 53 to stop supplying negative pressure to the air passage 65 of the holding section 61. On the other hand, negative pressure is supplied into the holding cylinder 82 of the screwdriver tool 80. Due to the stop of the negative pressure supply, the holding section 61 releases the holding of the screw SC. The screw SC falls from the lower opening of the holding chamber 64 into the upper end opening 82A of the holding cylinder 82 by the action of gravity. Since the head of the screw SC, which is close to the center of gravity, is on the lower side, it falls in its original posture and fits into the annular rib 82B of the holding cylinder 82, closing the opening inside the rib 82B. Since the head of the screw SC closing the rib 82B is attracted by negative pressure, it is fixed to the rib 82B.

[0083] When the opening inside the rib 82B is open, the air pressure section 53 sucks only air and is at a pressure corresponding to the atmospheric pressure. However, since the head of the screw SC closes the opening inside the rib 82B, the negative pressure increases sharply. Based on the change in the pressure value (rise in negative pressure) of the air pressure section 53, the control section 121 can detect that the screw is correctly installed in the holding cylinder 82. After installing the screw SC, the control section 121 causes the holding section 61 to move from the transfer position A2 to the retracted position A1 through the drive section 62.

[0084] The control section 121 controls the working head 21 to rotate the screwdriver 81 and move the tool section 50 upward (step S15). The control section 121 outputs a control signal to rotate the screwdriver 81 through the θZ drive section 52. The θZ drive section 52 causes the screwdriver 81 to rotate around the central axis extending along the Z-axis direction. The control section 121 outputs a control signal to move the tool section 50 upward (+Z direction) through the Z-axis drive section 51. The Z-axis drive section 51 causes the movable plate 72 to move upward by rotating the Z-screw shaft 73. The screwdriver tool 80 (screwdriver 81 and holding cylinder 82) and the θZ drive section 52 mounted on the movable plate 72 move upward integrally. By moving the screwdriver tool 80 upward, as shown in (A) of Figure 16 the upper end portion of the holding cylinder 82 contacts the lower surface of the substrate P held at the working position PJb.

[0085] Even after the holding cylinder 82 comes into contact with the lower surface of the substrate P, the control unit 121 continues to move upward using the Z-axis drive unit 51. The screwdriver 81 and the housing unit 83 continue to move upward together with the movable plate 72. Even if the housing unit 83 moves further upward, since the spring member 84 is compressed, the holding cylinder 82 maintains its position in the Z-axis direction. Thus, as shown in (B) of Figure 16 , the screwdriver 81 moves upward within the holding cylinder 82 and comes into contact with the head of the screw SC that is engaged with the rib 82B. The engagement groove of the head of the screw SC is in phase with the rotation phase of the tip of the screwdriver 81, and the tip engages with the engagement groove. Thus, the screw SC is attached to the tip of the screwdriver 81. By further moving the screwdriver 81 upward, as shown in (C) of Figure 16 , the screw is inserted through the screw insertion hole TH of the substrate P into the threaded hole CH of the component C.

[0086] The control unit 121 controls the work head 21 to perform thread tightening of the screw SC inserted into the threaded hole CH (step S16). The control unit 121 controls the θZ drive unit 52 and the Z-axis drive unit 51 so that the screwdriver 81 rotates and applies an upward force toward the threaded hole CH. The control unit 121 controls the mounting unit 10 that holds the component C to support the upward external force acting on the component C. Thus, as shown in (D) of Figure 16 , the screw SC engages with the threaded hole CH and is tightened, thereby thread-fixing the component C to the substrate P. The control unit 121 determines that the thread tightening is completed, for example, when the rotational torque of the θZ drive unit 52 reaches a specified value, and stops the θZ drive unit 52 and the Z-axis drive unit 51.

[0087] After the thread tightening is completed, the control unit 121 controls the Z-axis drive unit 51 to move the tool unit 50 downward (step S17). The control unit 121 moves the movable plate 72 downward until the upper end of the holding cylinder 82 reaches the screw mounting position ES below the holding portion 61 of the handover portion 60. Thus, the thread tightening operation of one screw SC is completed.

[0088] When there are multiple screw mounting positions set for one component C (when there are multiple threaded holes CH in the component C), the control unit 121 repeats the processes from step S11 to step S17. If all the thread tightening operations for the component C are completed, the thread tightening operation in step S4 is completed.

[0089] [Expansion Tool] In the present embodiment, the screw fastening unit 20 can perform other operations than the above-described screw fastening operation. Specifically, the mounting portion 71 of the tool portion 50 can mount an extended tool for operations other than screw fastening instead of the screwdriver tool 80. That is, the mounting portion 71 can not only replace the screwdriver tools 80 of multiple types with different tip shapes but also mount tools other than the screwdriver tool 80 (extended tools).

[0090] Figure 17 FIG. is a perspective view showing the screwdriver tool 80 of the embodiment. Figure 18 FIG. is a perspective view showing an example of the extended tool of the embodiment. As Figure 18 shown, in the embodiment, the extended tool includes a support member 300 that contacts the lower surface of the substrate P and supports the substrate P. The support member 300 has a rod shape, and a support surface 301 that faces the lower surface of the substrate P is provided at the tip of the support member 300. The support member 300 can mount the base end portion to the mounting portion 71. As Figure 17 and Figure 18 shown, the screwdriver tool 80 and the support member 300 (extended tool) have attachment portions AT of the same shape. The attachment portion AT is provided at the base end portion of each of the screwdriver tool 80 and the support member 300 and can be detached from and attached to the mounting portion 71 of the work head 21.

[0091] The work head 21 that mounts the support member 300 as an extended tool instead of the screwdriver tool 80 functions as a support head that supports the lower surface of the substrate P. The screw fastening unit 20 can perform a support operation of the substrate P accompanying component mounting. The so-called support operation of the substrate P is an operation of supporting the lower surface of the substrate P from below to prevent the substrate P from bending and deforming when the component C is mounted on the upper surface of the substrate P by the mounting unit 10. The substrate P may be elastically deformed (bent) in a manner that the central portion sags due to its own weight while being held at the work position PJb by the substrate holding device 104. The screw fastening unit 20 supports the substrate P from below by the support member 300 when the mounting unit 10 mounts the component C, so that the height of the mounting position of the component C on the substrate P approaches the target height position of component mounting specified by the production program (the Z-axis direction position where the component C is arranged by the mounting unit 10).

[0092] In the case of substrate support, the moving mechanism 22 moves the work head 21 along with the component mounting of the mounting unit 10 to position the support member 300 at a support position corresponding to the mounting position of the component C. The support position is the XY-axis coordinates that are the same as or near the mounting position of the component C to be mounted, and can be specified in advance by the production program. In the case of double-sided mounting of a substrate or the like, where there are already mounted components or inaccessible structures on the opposite side of the mounting position of the substrate P, a position near the mounting position deviated from the mounting position is specified as the support position.

[0093] The work head 21 positions the support surface 301 at the upper end of the support member 300 at the support height position through the Z-axis drive unit 51. The support height position is calculated based on the Z coordinate of the target height position for component mounting and the thickness data of the substrate P included in the production program. The support height position is the height position of the support surface 301 in a state where the target height (Z-axis coordinate) when mounting the component C by the mounting head 106 is within an allowable range and coincides with the height (Z-axis coordinate) of the upper surface of the substrate P. Thus, even when the substrate P is deformed, since the component C is correctly set at the mounting position on the upper surface of the substrate P, the position deviation of the component C is suppressed.

[0094] In addition to the support member 300, the extension tool may also include various tools for operations performed along with the component mounting operation. The extension tool may also be, for example, a manual tool for clinch, a manual tool for lead cutting, a manual tool for soldering, or the like.

[0095] [Effect] As described above, according to the present embodiment, the substrate processing apparatus 100 includes: a substrate holding device 104 that holds the substrate P at the processing position; a mounting unit 10 that is disposed above the substrate holding device 104 and mounts the component C on the upper surface of the substrate P held by the substrate holding device 104; and a screw fastening unit 20 that is disposed below the substrate holding device 104 and screws the component C mounted on the upper surface of the substrate P from below the substrate P. The screw fastening unit 20 includes: a working head 21 that acquires the screw SC and performs screw fastening in a state of being in an upward-facing posture facing the lower surface of the substrate P held by the substrate holding device 104; and a moving mechanism 22 that moves the working head 21 to the screw mounting position. Thus, it is possible to acquire the screw SC and perform screw fastening while keeping the screwdriver 81 in an upward-facing state without alternately changing the posture of the screwdriver 81 to downward and upward. Since the time required for posture change is eliminated, the time required for screw fastening work can be shortened. In particular, in the case where the installation space of the screw fastening unit is extremely reduced for miniaturization of the apparatus, a large movement such as changing the posture of the screwdriver 81 180 degrees to downward and upward is likely to be restricted in the posture change position to avoid interference, and special measures such as operating at a low speed are likely to be required, and the working time is likely to become long. In the embodiment, since posture change that is likely to lengthen the working time is not required, the time required for screw fastening work can be effectively shortened.

[0096] In the present embodiment, the screw fastening unit 20 further includes a feeding mechanism 24 that feeds the screw SC to the working head 21 via a feeding passage 25. Thus, the working head 21 can acquire the screw SC without moving the working head 21 to the acquisition position of the screw SC. Therefore, since movement for acquiring the screw SC is not required, the time required for screw fastening work can be further shortened.

[0097] In the present embodiment, the feeding mechanism 24 feeds the screw SC to the feeding passage 25 using air pressure. Thus, by feeding compressed air (positive pressure) into the feeding passage 2, the screw SC can be easily fed to the working head 21.

[0098] In the present embodiment, the working head 21 includes: a tool portion 50 that tightens the screw SC; and a transfer portion 60 that acquires the screw SC from the feeding passage 25 and sets it on the tool portion 50. Thus, it is not necessary to operate the tool portion 50 to set the screw SC at the tip of the screwdriver 81, and the screw SC can be installed by the transfer portion 60. Since movement or return of the tool portion 50 (screwdriver 81) is not required, the tightening operation of the screw SC can be quickly started immediately after the screw is installed by the transfer portion 60. As a result, the time required for screw fastening work can be effectively shortened.

[0099] In the present embodiment, the work head 21 is provided with a mounting portion 71 capable of detachably mounting a screwdriver tool 80 that engages with a screw. Thus, by replacing the screwdriver tool 80, it is possible to easily perform the thread tightening of various types of screws SC. For example, there is no need to provide a dedicated tool portion 50 for each type of screw SC or replace the work head 21.

[0100] In the present embodiment, the mounting portion 71 can mount an extended tool for other operations other than thread tightening instead of the screwdriver tool 80. Thus, the thread tightening unit 20 can be given the expandability to perform operations other than thread tightening. By mounting the extended tool, for example, for a substrate P that does not require thread tightening operations, the thread tightening unit 20 can perform operations that are carried out by other units. Therefore, in the case of performing operations on various substrates P with different specifications in mass production of small lots, etc., there is no need to prepare a replacement unit for other operations, and there is no need for a large-scale preparation operation of replacing the thread tightening unit 20 with a replacement unit.

[0101] In the present embodiment, the extended tool includes a support member 300 that supports the substrate P in contact with the lower surface of the substrate P. The moving mechanism 22 moves the work head 21 as the components of the mounting unit 10 are mounted, so as to position the support member 300 at a support position corresponding to the mounting position of the component C. Thus, in the case of mounting a component C that does not require thread tightening, such as a surface mount component, etc., the substrate P is supported by the thread tightening unit 20 on which the support member 300 is mounted. By the support, the bending deformation of the substrate P due to its own weight can be suppressed, and thus the position accuracy of component mounting can be improved.

[0102] In the present embodiment, the moving mechanism 22 includes an X-axis driving unit 41 and a Y-axis driving unit 42 that move the working head 21 in the X-axis direction and the Y-axis direction orthogonal to each other within a plane along the lower surface of the substrate P. The working head 21 includes a tool unit 50 that tightens the screw SC, and a Z-axis driving unit 51 that moves the tool unit 50 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. Thus, the moving mechanism 22 of the screw fastening unit 20 can be constituted by a so-called orthogonal robot (XY robot). Compared with a vertical articulated robot, for example, an orthogonal robot does not require trajectory calculation of joint positions for avoiding interference and can perform operations at high speed. In the case of this embodiment where the screw SC is obtained and screw-fastened while maintaining an upward posture during the screw fastening operation, the movement in the Z-axis direction can be merely a simple linear reciprocating motion. Therefore, it is sufficient to provide the Z-axis driving unit 51 in the working head 21, and a mechanism for changing the posture in the θX direction and the θY direction may not be provided. Thus, the screw fastening unit 20 capable of performing operations at high speed can be constructed with a simpler configuration. As a result, the time required for the screw fastening operation can be effectively shortened.

[0103] [Other Embodiments] In addition, in the above embodiment, the screw fastening unit 20 is provided with a feeding mechanism 24 that feeds the screw SC to the working head 21 via the feeding channel 25, but it is not limited thereto. The feeding mechanism 24, the feeding channel 25, and the transfer portion 60 may not be provided. In this case, the screw fastening unit 20 can move to a screw acquisition position set at a specified position within the apparatus and perform an acquisition operation of setting the screw SC on the screwdriver tool 80. The screw acquisition position is set at a position above the holding cylinder 82 of the screwdriver tool 80. A holding device that holds a plurality of screws SC in a posture with the heads of the screws SC facing downward may also be provided at the screw acquisition position. The holding device can releasably hold the screw SC by air pressure, magnetic attraction, or mechanical gripping. The holding device, for example, takes out the screw SC from the screw supply device 23 and holds the screw SC at the screw acquisition position. The working head 21 moves to the screw acquisition position and acquires the screw SC from the holding device.

[0104] In addition, in the above embodiment, the feeding mechanism 24 presses the screw SC into the feeding channel 25 by air pressure, but the screw SC can also be pressed into the feeding channel 25 by negative pressure suction from the outlet side (i.e., the transfer portion 60) of the feeding channel 25. In this case, the feeding mechanism 24 can merely take out the screw SC from the screw supply device 23 and set it at the inlet of the feeding channel 25. In addition, the screw SC can be pressed from the screw supply device 23 without providing the feeding mechanism 24.

[0105] In addition, in the above-described embodiment, an example is shown in which the transfer portion 60 acquires the screw SC from the delivery passage 25 and sets it in the tool portion 50. However, the transfer portion 60 may also only acquire and release the screw SC from the delivery passage 25, and cause the tool portion 50 to move to the position of the transfer portion 60 to receive the screw SC.

[0106] In addition, in the above-described embodiment, an example is shown in which the operation head 21 is provided with the mounting portion 71 capable of attaching and detaching the screwdriver tool 80. However, the mounting portion 71 may not be provided. For example, the entire tool portion 50 may be replaceable. In addition, a plurality of screwdriver tools 80 may be provided in the tool portion 50, and the screwdriver tool 80 used for the thread tightening operation may be selectable.

[0107] In addition, in the above-described embodiment, an example is shown in which the moving mechanism 22 of the thread tightening unit 20 is an orthogonal robot including the X-axis drive portion 41 and the Y-axis drive portion 42. However, the moving mechanism 22 may also be a moving mechanism other than an orthogonal robot. The moving mechanism 22 may be, for example, a vertical articulated robot or a horizontal articulated robot. Even in this case, since it is not necessary to alternately change the posture of the operation head 21 to downward and upward, the time required for the thread tightening operation can be correspondingly shortened. Explanation of reference numerals:

[0108] 10: Mounting unit; 20: Thread fastening unit; 21: Operating head; 22: Moving mechanism; 23: Screw feeding device; 24: Feeding mechanism; 25: Feeding channel; 30: Suction nozzle; 32: Holding part; 32A: Fixed arm; 32B: Movable arm; 33: Driving part; 34: Hinge mechanism; 35: Suction nozzle body; 40: Head support member; 41: X-axis driving part; 41A: Lead screw shaft; 41B: Belt pulley mechanism; 42: Y-axis driving part; 42A: Lead screw shaft; 42B: Belt pulley mechanism; 42C: Nut part; 43: X-axis guiding part; 43A: X beam; 43B: X linear guide; 43C: Linear slider; 44: Y-axis guiding part; 44A: Y linear guide; 50: Tool part; 51: Z-axis driving part; 52: θZ driving part; 53: Pneumatic part; 60: Handover part; 61: Holding part; 62: Driving part; 62A: Bracket; 63: Connecting part; 64: Holding chamber; 64A: Small-diameter part; 65: Air passage; 71: Mounting part; 72: Movable plate; 73A: Supporting part; 73: Z lead screw shaft; 74: Z linear guide; 74A: Linear slider; 80: Screwdriver tool; 81: Screwdriver; 82: Holding cylinder; 82A: Upper end opening; 82B: Rib; 82C: Lower end opening; 83: Housing part; 83A: Connector; 84: Spring part; 85: Spring bracket; 91: Suction nozzle part; 92: Suction driving part; 92A: Lifting driving part; 92B: Horizontal driving part; 93: Inlet holding part; 94: Changeover valve; 95: Suction nozzle holding member; 100: Substrate working device; 102: Setting part; 103: Substrate conveying device; 104: Substrate holding device; 106: Mounting head; 107: Mounting head moving mechanism; 107a: X-axis guide rail; 107b: Y-axis guide rail; 109: X driving part; 110: Y driving part; 111: Component identification device; 114: Base frame; 114A: Upper frame; 114B: Lower frame; 114C: Both ends; 114D: Central part; 120: Control device; 121: Control part; 122: Storage part; 140: Suction nozzle moving device; 150: Z driving part; 160: θZ driving part; 200: Component supply device; 300: Support; 301: Support surface; A1: Retracted position; A2: Handover position; AT: Attachment part; B1: Screw removal position; B2: Feeding position; C: Component; CH: Threaded hole; ES: Screw installation position; P: Substrate; PJa: Component supply position; PJb: Working position; TH: Screw insertion through-hole.

Claims

1. A substrate operation device, characterized in that: have: A substrate holding device, which holds the substrate in an operating position; a mounting unit disposed above the substrate holding device and mounting a component on an upper surface of the substrate held by the substrate holding device; as well as The screw fastening unit is arranged below the substrate holding device and screws the component mounted on the upper surface of the substrate from below the substrate. The threaded fastening unit comprises: A working head that takes in and tightens the screws in an upward posture facing the lower surface of the substrate held by the substrate holding device; as well as The moving mechanism moves the working head to the screw installation position.

2. The substrate working device according to claim 1, characterized in that: The threaded fastening unit further includes a delivery mechanism that delivers the screws to the working head via a delivery channel.

3. The substrate working device according to claim 2, characterized in that: The delivery mechanism uses air pressure to press the screw toward the delivery channel.

4. The substrate working device according to claim 2, characterized in that: The working head includes: a tool part for tightening a screw; and a delivery part for taking a screw from the delivery passage and setting the screw on the tool part.

5. The substrate working device according to claim 1, characterized in that: The working head has a mounting portion, and the mounting portion is capable of detachably mounting a screwdriver tool engaged with a screw.

6. The substrate working device according to claim 5, characterized in that: The attachment portion can be mounted with an extension tool for work other than screw tightening, instead of the screwdriver tool.

7. The substrate working device according to claim 6, characterized in that: The expansion tool includes a support member that supports the substrate in contact with a lower surface of the substrate, The moving mechanism moves the work head as the mounting unit mounts the component so as to arrange the support at a support position corresponding to a mounting position of the component.

8. The substrate working device according to any one of claims 1 to 7, characterized in that: The moving mechanism includes an X-axis driving unit and a Y-axis driving unit for moving the working head in an X-axis direction and a Y-axis direction that are orthogonal to each other in a plane along the lower surface of the substrate. The working head includes: a tool part for tightening a screw; and a Z-axis driving part for moving the tool part in a Z-axis direction orthogonal to an X-axis direction and a Y-axis direction.

Images