Arc ion plating device with central air inlet

Abstract

The arc ion plating device comprises a vacuum coating structure and an arc ion plating machine body, the vacuum coating structure is provided with a vacuum coating chamber, a guide cover and a lower guide pipe are connected to the upper portion in the chamber, the lower guide pipe is provided with centrifugal holes, and the arc ion plating device is further provided with a high-temperature-resistant breaking sleeve, an air guide helical ribbon rod and the like. The problem of large-particle liquid drops generated in the coating process can be effectively solved; compared with the prior art, through the design of the lower guide pipe centrifugal holes and the wall-attaching peak holes of the high-temperature-resistant breaking sleeve, metal liquid drops can form a wall-hanging layer during film coating and are prevented from being deposited on the surface of a film layer, the roughness of the film layer is reduced, and the appearance and functionality of a workpiece are improved; the driving motor drives the air guide helical ribbon rod through the step-up gear box, a workpiece is made to rotate at a constant speed in combination with gear transmission, the ion bombardment deposition angle is optimized, a high-quality film is prepared, in addition, due to the special structure of the side face of the high-temperature-resistant breaking sleeve, centrifugal area switching can be achieved, an internal metal pipe body can be conveniently taken out and treated after film coating, and material recovery and equipment maintenance are facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of arc ion plating, in particular to an arc ion plating device with central air intake. Background Art

[0002] In the process of rapid development of modern industry, the requirements for material surface properties in various fields continue to rise. Arc ion plating technology has been widely used in the industry due to its unique advantages. This technology has the significant characteristic of high target material ionization rate, which means that the target material can be converted into ionic state more efficiently, laying a good foundation for subsequent film or coating deposition. Its film or coating deposition rate is fast, which greatly improves production efficiency and meets the rhythm of large-scale industrial production. At the same time, the prepared film or coating has a dense structure and excellent protective performance, especially in the surface protection and modification of key industrial components such as cutting tools, molds and wear-resistant parts. Arc ion plating technology shows excellent effectiveness. After being treated with this technology, the surface hardness of the workpiece is effectively improved, which can better resist external mechanical forces and reduce wear. The enhanced composite toughness makes the workpiece less likely to suffer brittle fracture when subjected to complex stresses, significantly improving its reliability. The significant improvement in wear resistance can effectively extend the service life of the workpiece in high-friction environments. The improvement in chemical stability makes the workpiece more stable when facing erosion by various chemical media, and less likely to undergo chemical reactions that lead to performance degradation. The comprehensive optimization of these properties has greatly extended the service life of the workpiece, reduced costs for industrial production, and created higher economic benefits.

[0003] However, in the current arc ion plating process, the temperature of the cathode arc spot is usually far beyond the melting point of the metal, and a micro-molten pool is formed on the cathode surface. In the micro-molten pool, the metal will undergo intense vaporization. When the metal vapor flow rushes into the space at high speed, it will carry out part of the liquid metal, causing droplets to splash and eventually form large droplets. Once these large droplets are deposited on the surface of the film layer, the surface roughness of the film layer will increase significantly. The increase in the surface roughness of the film layer will not only affect the appearance quality of the workpiece, but more importantly, it will have a negative impact on the functionality of the workpiece.

[0004] Therefore, an arc ion plating device with central air intake is proposed. Summary of the invention

[0005] The object of the present invention is to provide an arc ion plating device with central air intake to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: an arc ion plating device with central air intake, comprising: Vacuum coating structure; Arc ion plating machine body, the vacuum coating structure is fixedly arranged on the upper surface of the arc ion plating machine body; Among them, the vacuum coating structure includes a vacuum coating chamber. Above the interior of the vacuum coating chamber, a guide cover is connected by bolts. The lower end of the guide cover is integrally connected with a lower conduit. Centrifugal holes are evenly formed on the inner wall of the lower conduit. A bearing ring is sleeved and fixed on the side of the guide cover. Inside the bearing ring, an adapter cap is connected by bolts. At the lower end of the adapter cap, a high-temperature resistant crushing sleeve is provided. Micro concave wall-attached peak holes are evenly and densely formed on the inner wall of the high-temperature resistant crushing sleeve. A gas guiding spiral rod is rotatably arranged inside the lower conduit. The lower end of the gas guiding spiral rod is connected with a machine connecting rod through a coupling. The rod body of the machine connecting rod slides through the substrate chassis from the axis and is connected with a driving gear below the rod body. The substrate chassis is fixedly arranged below the interior of the vacuum coating chamber. Inside the substrate chassis, several lower spring seats are rotatably connected by pre-installed bearings. On the lower surfaces of the lower spring seats, driven gears are fixedly arranged. The driven gears are all meshed and driven with the driving gear. At least one positioning rod is fixedly arranged on the surface of the substrate chassis between the lower spring seats. The upper ends of the positioning rods are all fixed to the bearing replacement frame. Inside the bearing replacement frame, several upper spring seats are rotationally positioned.

[0007] Preferably, an arc evaporation source is fixedly arranged above the interior of the vacuum coating chamber. The arc evaporation source is electrically connected with the arc ion plating machine body through a circuit. The guide cover is sleeved outside the arc evaporation source. The adapter cap and the high-temperature resistant crushing sleeve are sleeved outside the lower conduit.

[0008] Preferably, on the upper side of the side surface of the high-temperature resistant crushing sleeve and the lower side of the side surface of the adapter cap, axially penetrating fixing ears are correspondingly fixedly arranged. Inside the fixing ears, ball rods are slidably inserted. And the fixing ears on the side surface of the high-temperature resistant crushing sleeve fix the lower ends of the ball rods with bolts. The upper end of the ball rod is a sphere. The spherical end is slidably constrained inside the stepped tube. A return spring and an isolation expansion sleeve are fixedly arranged at the spherical end of the ball rod. The upper ends of the return spring and the isolation expansion sleeve are both fixed on the upper wall surface of the stepped tube. Among them, the isolation expansion sleeve is a high-temperature resistant expansion structure and is sleeved outside the return spring. On the tube wall surface of the stepped tube, several T-shaped holes are linearly arrayed symmetrically from top to bottom along the tube diameter below the spherical end of the ball rod. Inside the T-shaped holes, variable-step spring rods are slidably constrained. The variable-step spring rod is composed of a T-shaped rod and a spring fixed to the expanded end of the T-shaped rod. Among them, the end of the T-shaped rod in contact with the ball rod is set as a hemispherical shape. The centrifugal end of the spring is fixed to the inner wall of the T-shaped hole. And the strength of the spring is sequentially increased from top to bottom. The lower end of the stepped tube is fixed on the upper surface of the fixing ear on the side surface of the adapter cap.

[0009] Preferably, the lower end of the machine connecting rod is connected with the driving motor inside the arc ion plating machine body through a speed increasing gear box.

[0010] Preferably, the lower spring seat and the upper spring seat are both composed of a bottom plate, a center hole support plate and a spring fixed between the bottom plate and the support plate, and the lower spring seat and the upper spring seat are arranged in equal numbers in upper and lower combinations.

[0011] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention provides a lower conduit with a centrifugal hole and a high-temperature crushing sleeve with a wall-attached peak hole on the inner wall. During film coating, metal vapor and liquid droplets move downward along the lower conduit under the action of the gas-guiding screw rod, and the liquid droplets are thrown out into the high-temperature crushing sleeve through the centrifugal hole. A metal wall hanging layer is formed under the action of the wall-attached peak hole, thereby avoiding the deposition of large particle droplets on the surface of the film layer, effectively reducing the surface roughness of the film layer, and improving the appearance quality and functionality of the workpiece. In addition, on the one hand, the driving motor drives the gas-guiding screw rod to rotate at a high speed through the speed-increasing gear box, which can efficiently pull the metal vapor and liquid droplets, so that the metal vapor is more evenly transported between the workpieces. On the other hand, the driving gear meshes with the driven gear, driving the lower spring seat and the upper spring seat to rotate the workpiece at a uniform speed, so that the ion bombardment deposition angle is dynamically optimized, and a high-quality film with uniform thickness and dense structure is formed; 2. The present invention arranges fixed ears, ball rods, stepped tubes, variable-step spring rods and other structures on the side of the high-temperature resistant crushing sleeve. During the coating process, when the metal wall layer in the high-temperature resistant crushing sleeve reaches a predetermined weight, it will move downward as a whole to achieve centrifugal area switching. After the coating is completed, the high-temperature resistant crushing sleeve can be easily taken out by removing the ball rod and the bolts of the fixed ears, and the metal tube body formed inside can be disassembled to achieve material recycling. At the same time, it is also convenient to clean and maintain the equipment, thereby reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is the overall structural view of the present invention; Figure 2 It is an open diagram of the vacuum coating chamber of the present invention; Figure 3 It is an overall cross-sectional view of the present invention; Figure 4 This is a disassembled diagram of the vacuum coating structure of the present invention; Figure 5 This is a disassembly diagram of the guide cover, high temperature resistant crushing sleeve and their connection structure of the present invention; Figure 6 It is a cross-sectional view of the stepped pipe and its connection structure of the present invention; Figure 7 It is a schematic diagram of the machine connecting rod of the present invention; Figure 8 It is a schematic diagram of the lower spring seat of the present invention; Figure 9Cross-sectional view of the positioning rod, bearing bracket and upper spring seat of the present invention; Figure 10 Of the present invention Figure 6 Enlarged view at location A in Figure 11 Of the present invention Figure 6 Enlarged view at location B in

[0013] In the figure: 1. Vacuum coating structure; 11. Vacuum coating chamber; 111. Arc evaporation source; 12. Guide cover; 121. Bearing ring; 122. Lower conduit; 1221. Centrifugal hole; 13. High-temperature resistant broken sleeve; 131. Wall-attached peak hole; 132. Fixed ear; 133. Adapter cap; 134. Step-down pipe; 1341. Ball rod; 1342. Return spring; 1343. Isolation telescopic sleeve; 1344. Step-changing spring rod; 14. Machine connecting rod; 141. Air guiding spiral rod; 142. Driving gear; 15. Substrate chassis; 151. Lower spring seat; 1511. Driven gear; 152. Positioning rod; 153. Bearing replacement frame; 154. Upper spring seat; 2. Arc ion plating machine body. Specific embodiments

[0014] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0015] Please refer to Figures 1 to 11 , the present invention provides a technical solution for an arc ion plating device with central air intake: An arc ion plating device with central air intake, comprising: A vacuum coating structure 1, made of metals such as stainless steel, having good sealing performance, and equipped with an observation window, a vacuum pumping port, an air inlet, etc.; An arc ion plating machine body 2, including a power system, a vacuum system, a gas supply system, a control system, and an exhaust gas treatment system, etc., and the vacuum coating structure 1 is fixedly arranged on the upper surface of the arc ion plating machine body 2, and the vacuum pumping port, air inlet, etc. of the vacuum coating structure 1 are correspondingly connected to the respective systems of the arc ion plating machine body 2; Among them, the vacuum coating structure 1 includes a vacuum coating chamber 11 made of metals such as stainless steel. An arc evaporation source 111 is fixedly arranged above the interior of the vacuum coating chamber 11, and the arc evaporation source 111 is electrically connected to the arc ion plating machine body 2 through a circuit; A guide cover 12 is bolted above the interior of the vacuum coating chamber 11, and the guide cover 12 is sleeved outside the arc evaporation source 111. The guide cover 12 is in the shape of a funnel with a wider upper part and a narrower lower part, and a lower conduit 122 is integrally connected to the lower end of the guide cover 12. Centrifugal holes 1221 are evenly opened on the inner wall of the lower conduit 122 near the lower port, and the centrifugal holes 1221 are in the shape of a horn with a narrower inner part and a wider outer part. A bearing ring 121 is sleeved and fixed on the side of the guide cover 12 near the lower port, and a transfer cap 133 is bolted inside the bearing ring 121. The transfer cap 133 is in the shape of an annular body with a wider upper part and a narrower lower part, and is sleeved on the upper end of the lower conduit 122. And a high-temperature resistant crushing sleeve 13 is arranged at the lower end of the transfer cap 133. Micro concave wall-attached peak holes 131 are evenly and densely opened on the inner wall of the high-temperature resistant crushing sleeve 13, and the high-temperature resistant crushing sleeve 13 is sleeved on the lower conduit 122 in a wall-attached manner. Bearing frames are fixedly arranged at both the upper and lower ports inside the lower conduit 122, and a gas guiding spiral rod 141 is rotatably arranged inside in cooperation with the bearing frames. And the lower end of the gas guiding spiral rod 141 passes through the lower conduit 122 and is connected to the upper end of the machine connecting rod 14 through a coupling. The rod body of the machine connecting rod 14 slides through the substrate chassis 15 from the axis center, and then the lower end of the rod body is connected to the driving motor inside the arc ion plating machine body 2 through a speed increasing gear box. And a driving gear 142 is fixedly arranged on the machine shaft of the driving motor. The substrate chassis 15 is fixedly arranged below the interior of the vacuum coating chamber 11, and several mounting holes are annularly arranged along the axis on the centrifugal side inside the substrate chassis 15. And bearings are fixedly arranged inside the mounting holes, and lower spring seats 151 are rotatably connected inside the holes in cooperation with the bearings. At least one positioning rod 152 is fixedly arranged on the surface of the substrate chassis 15 between the lower spring seats 151, and the positioning rod 152 can be any one of a spring rod, a hydraulic cylinder, an electric push rod, etc. The upper ends of the positioning rods 152 are all fixedly connected to the bearing replacement frame 153. The bearing replacement frame 153 is composed of a ring and several bearing seats fixed on the ring, and upper spring seats 154 are rotatably positioned inside the bearing seats. Both the lower spring seats 151 and the upper spring seats 154 are composed of a bottom plate, a middle hole support plate and a spring fixed between the bottom plate and the support plate. And the lower spring seats 151 and the upper spring seats 154 are arranged in equal numbers in an up-and-down combination, and both the lower spring seats 151 and the upper spring seats 154 are located on the outer ring side of the high-temperature resistant crushing sleeve 13. Among them, driven gears 1511 are fixedly arranged on the lower surfaces of the lower spring seats 151, and the driven gears 1511 are distributed around the circumference of the driving gear 142, and the driven gears 1511 are all meshed and driven with the driving gear 142.

[0016] During operation, first, control the positioning rod 152 or lift the bearing replacement frame 153 upwards, insert the workpiece onto the lower spring seat 151. After resetting the bearing replacement frame 153, insert the upper spring seat 154 to position the upper end of the workpiece. After loading the target onto the cathode target, close the vacuum coating chamber 11 and evacuate it to a high vacuum. Apply high voltage to the anode and cathode to ionize the target material by arc evaporation. At the same time, the gas guiding spiral rod 141 rotates at high speed to drive and draw the metal vapor and droplets to move spirally downwards along the lower conduit 122. The droplets are thrown to the high-temperature resistant crushing sleeve 13 through the centrifugal holes 1221 to form a metal wall-attached layer with wall-attached peak holes 131. The purified vapor is transported to the workpiece area through the lower end of the lower conduit 122. The driving gear 142 meshes with the driven gear 1511 to drive the lower spring seat 151 and the upper spring seat 154 to rotate the workpiece at a constant speed, and ions are deposited to form a film.

[0017] In summary, by providing the lower conduit 122 with centrifugal holes 1221 and the high-temperature resistant crushing sleeve 13 with wall-attached peak holes 131 on its inner wall, during film coating, the metal vapor and droplets move spirally downwards along the lower conduit 122 under the action of the gas guiding spiral rod 141. The droplets are thrown into the high-temperature resistant crushing sleeve 13 through the centrifugal holes 1221 and form a metal wall-attached layer under the action of the wall-attached peak holes 131, avoiding large particle droplets from depositing on the film surface, effectively reducing the surface roughness of the film, and improving the appearance quality and functionality of the workpiece. In addition, on the one hand, the driving motor drives the gas guiding spiral rod 141 to rotate at high speed through the speed increasing gearbox, which can efficiently draw the metal vapor and droplets and make the metal vapor more evenly transported between the workpieces. On the other hand, the driving gear 142 meshes with the driven gear 1511 to drive the lower spring seat 151 and the upper spring seat 154 to rotate the workpiece at a constant speed, dynamically optimizing the ion bombardment deposition angle and forming a high-quality film with uniform thickness and dense structure.

[0018] As an embodiment of the present invention, such as Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 10 and Figure 11As shown in the figure, fixing ears 132 with a through axis are fixedly arranged corresponding to the upper side of the side surface of the high-temperature resistant broken sleeve 13 and the lower side of the side surface of the adapter cap 133. Ball rods 1341 are slidably inserted through the interiors of the fixing ears 132. The lower ends of the ball rods 1341 are fixed by bolts in cooperation with the fixing ears 132 on the side surface of the high-temperature resistant broken sleeve 13. The upper ends of the ball rods 1341 are spherical bodies, and the spherical ends are slidably constrained inside the stepped tube 134. A return spring 1342 and an isolation telescopic sleeve 1343 are fixedly arranged at the spherical ends of the ball rods 1341. The upper ends of the return spring 1342 and the isolation telescopic sleeve 1343 are both fixed on the upper wall surface of the stepped tube 134. Among them, the isolation telescopic sleeve 1343 is a high-temperature resistant telescopic structure and is sleeved outside the return spring 1342. A plurality of T-shaped holes are symmetrically arranged in a linear array along the pipe diameter below the spherical ends of the ball rods 1341 on the pipe wall surface of the stepped tube 134. A variable-step spring rod 1344 is slidably constrained inside the T-shaped holes. The variable-step spring rod 1344 is composed of a T-shaped rod and a spring fixed to the expanded end of the T-shaped rod. Among them, the end of the T-shaped rod in contact with the ball rod 1341 is arranged as a hemispherical shape. The centrifugal end of the spring is fixed to the inner wall of the T-shaped hole, and the strength of the spring is sequentially increased from top to bottom. The lower end of the stepped tube 134 is fixed on the upper surface of the fixing ear 132 on the side surface of the adapter cap 133.

[0019] During the coating process of the high-temperature resistant broken sleeve 13, internal metal droplets are thrown out through the centrifugal holes 1221 to form a wall-hanging layer. When the accumulated weight reaches a predetermined value, its gravity overcomes the elastic forces of the variable-step spring rod 1344 and the return spring 1342, and moves downward along the inner wall of the stepped tube 134 and lands on the lower-layer variable-step spring rod 1344, triggering the support of the spherical end of the ball rod 1341, driving the whole sleeve to move downward along the wall of the lower conduit 122, realizing the switching of the centrifugal region. The finally formed metal tube body can be taken out of the high-temperature resistant broken sleeve 13 as a whole by removing the bolts of the ball rod 1341 and the fixing ear 132, and then the internal tube body can be separated through processes such as breaking or lubricating.

[0020] In summary, by arranging structures such as fixing ears 132, ball rods 1341, stepped tubes 134, and variable-step spring rods 1344 on the side surface of the high-temperature resistant broken sleeve 13, during the coating process, when the metal wall-hanging layer in the high-temperature resistant broken sleeve 13 reaches a predetermined weight, the whole of it will move downward to realize the switching of the centrifugal region. After the coating is completed, by removing the bolts of the ball rod 1341 and the fixing ear 132, the high-temperature resistant broken sleeve 13 can be conveniently taken out, the metal tube body formed inside can be removed, the recycling of materials can be realized, and at the same time, it is also convenient to clean and maintain the equipment, reducing the production cost.

[0021] Working principle: In an arc ion plating equipment, first, control the positioning rod 152 or lift the bearing replacement rack 153 to move the bearing replacement rack 153 upward. Then, insert and position the workpieces to be plated one by one on the lower spring seat 151. Then, control the positioning rod 152 or release the bearing replacement rack 153 to make the bearing replacement rack 153 reset and move downward. Then, the upper spring seat 154 will be inserted at the upper end of the workpiece, thereby realizing the positioning of the workpiece. Then, install the coating material (usually a metal or alloy target) on the cathode target. Next, close the chamber door of the vacuum coating chamber 11 and start the vacuum pump system to pump out the air in the coating chamber to make the chamber reach a predetermined high vacuum state to avoid gas molecules interfering with the coating process. When the vacuum degree reaches the requirement, then apply a high voltage between the cathode target and the anode to form a strong electric field, ionize the residual gas molecules to generate plasma, and at the same time, an arc discharge occurs on the surface of the cathode target, causing the target atoms to evaporate and ionize. At the same time, the drive motor inside the arc ion plating machine body 2 cooperates with the speed increasing gearbox (a combined structure of a large gear driving a small gear) to drive the air guiding spiral rod 141 to rotate at a high speed. The rotating air guiding spiral rod 141 will downwardly draw the metal vapor and metal droplets, causing the metal vapor and metal droplets to spiral downward at a high speed along the inner wall of the lower conduit 122. During the downward movement, it will pass through the centrifugal holes 1221, and then the metal droplets will be centrifugally thrown out from the centrifugal holes 1221 into the high-temperature resistant fragmentation sleeve 13, and under the action of the wall-attached peak holes 131, a metal wall-attached layer will be formed. The centrifuged metal vapor will be transported by the air guiding spiral rod 141 from the lower port of the lower conduit 122 to between the workpieces positioned by the lower spring seat 151 and the upper spring seat 154. Subsequently, process gas is introduced as needed to react with the target ions (if any). At this time, under the action of the electric field, the metal vapor (ions of the coating material) is accelerated to bombard the surface of the workpiece to be plated. During the process of the ions bombarding the workpiece surface, part of the energy is transferred to the atoms on the workpiece surface, causing the surface atoms to migrate and rearrange, and at the same time, the ions themselves are deposited on the workpiece surface. At the same time, the drive gear 142 driven by the drive motor will engage and drive the driven gear 1511, causing the driven gear 1511 to drive the lower spring seat 151 to rotate. Then, the rotating lower spring seat 151 will cooperate with the upper spring seat 154 to drive the workpiece to rotate at a constant speed. Then, a uniform and dense thin film will gradually form on the workpiece surface. In addition, by controlling parameters such as the arc current, voltage, coating time, vacuum degree, and gas flow rate, the thickness, composition, structure, and performance of the coating can be precisely controlled, thereby obtaining high-quality thin films that meet different requirements on the workpiece surface, such as thin films with functions of wear resistance, corrosion resistance, oxidation resistance, decoration, etc.; During the coating process of the workpiece, metal droplets will continuously scrape the inner wall of the high-temperature resistant and breakage-proof sleeve 13 after centrifugation. As the metal centrifugation increases, the thickness of the metal scraping on the inner wall of the high-temperature resistant and breakage-proof sleeve 13 in the same centrifugal area will gradually increase. After reaching the predetermined scraping weight, the overall gravity of the high-temperature resistant and breakage-proof sleeve 13 will overcome the spring elastic forces of the stepped spring rod 1344 and the return spring 1342, and move downward along the inner wall of the stepped pipe 134, and finally land on the stepped spring rod 1344 in the lower layer, enabling the stepped spring rod 1344 to support the ball end of the ball rod 1341. The high-temperature resistant and breakage-proof sleeve 13 will synchronously move downward along the wall of the lower conduit 122 with the ball rod 1341, thereby realizing the replacement of the centrifugal wall-hanging area. Eventually, a rough metal pipe body will be formed inside the high-temperature resistant and breakage-proof sleeve 13. After the metal pipe body is formed, the high-temperature resistant and breakage-proof sleeve 13 can be removed as a whole by disassembling the connection fixing bolts of the ball rod 1341 and the fixing ear 132, and then the pipe body can be taken out of the high-temperature resistant and breakage-proof sleeve 13 by means of breaking the high-temperature resistant and breakage-proof sleeve 13, lubricating and removing, etc.

[0022] It should be noted that the lower spring seat 151 can be set according to the shape of the workpiece to be coated; the vertical distance between the stepped spring rods 1344 is proportional to the downward movement distance of the high-temperature resistant and breakage-proof sleeve 13, and the wall-hanging area after each downward movement of the high-temperature resistant and breakage-proof sleeve 13 needs to be connected to the wall-hanging area that has been scraped; the high-temperature resistant and breakage-proof sleeve 13 is made of a stable high-temperature resistant material related to metal smelting, casting, forming and other equipment.

[0023] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An arc ion plating device with central air intake, comprising: A vacuum coating structure (1); An arc ion plating machine body (2), and the vacuum coating structure (1) is fixedly arranged on the upper surface of the arc ion plating machine body (2); Wherein, the vacuum coating structure (1) includes a vacuum coating chamber (11), and is characterized in that: Above the interior of the vacuum coating chamber (11), a guide cover (12) is connected by bolts. The lower end of the guide cover (12) is integrally connected with a lower conduit (122). Centrifugal holes (1221) are evenly formed on the inner wall of the lower conduit (122). A bearing ring (121) is sleeved and fixed on the side of the guide cover (12). Inside the bearing ring (121), an adapter cap (133) is connected by bolts. The lower end of the adapter cap (133) is provided with a high-temperature resistant broken sleeve (13). Micro concave wall-attached peak holes (131) are evenly and densely formed on the inner wall of the high-temperature resistant broken sleeve (13). A gas guiding spiral rod (141) is rotatably arranged inside the lower conduit (122). The lower end of the gas guiding spiral rod (141) is connected to a machine connecting rod (14) through a coupling. The rod body of the machine connecting rod (14) slides through the substrate chassis (15) from the axis center, and a driving gear (142) is connected below the rod body. The substrate chassis (15) is fixedly arranged below the interior of the vacuum coating chamber (11). Inside the substrate chassis (15), several lower spring seats (151) are rotatably connected by pre-installed bearings. On the lower surfaces of the lower spring seats (151), driven gears (1511) are fixedly arranged, and the driven gears (1511) are all in meshing transmission with the driving gear (142). On the surface of the substrate chassis (15), at least one positioning rod (152) is fixedly arranged between the lower spring seats (151). The upper ends of the positioning rods (152) are all fixed to a bearing replacement frame (153). Inside the bearing replacement frame (153), several upper spring seats (154) are rotatably positioned.

2. The arc ion plating device with central gas inlet according to claim 1, characterized in that: Above the interior of the vacuum coating chamber (11), an arc evaporation source (111) is fixedly arranged. The arc evaporation source (111) is electrically connected to the arc ion plating machine body (2) through a circuit. The guide cover (12) is sleeved outside the arc evaporation source (111). The adapter cap (133) and the high-temperature resistant broken sleeve (13) are sleeved outside the lower conduit (122).

3. The arc ion plating device with central gas inlet according to claim 1, characterized in that: On the upper side of the side surface of the high-temperature resistant broken sleeve (13) and the lower side of the side surface of the adapter cap (133), fixing ears (132) with axially penetrating centers are correspondingly fixedly arranged. Inside the fixing ears (132), ball rods (1341) are slidably inserted. And the fixing ears (132) on the side surface of the high-temperature resistant broken sleeve (13) fix the lower ends of the ball rods (1341) through bolts.

4. A central air intake arc ion plating device according to claim 3, characterized in that: The upper end of the cue (1341) is a sphere, and the spherical end is slidably constrained inside the stepped tube (134). A return spring (1342) and an isolation telescopic sleeve (1343) are fixedly arranged at the spherical end of the cue (1341), and the upper ends of the return spring (1342) and the isolation telescopic sleeve (1343) are both fixed on the upper wall surface of the stepped tube (134). Among them, the isolation telescopic sleeve (1343) is a heat-resistant telescopic structure and is sleeved outside the return spring (1342).

5. The arc ion plating device with central air intake according to claim 4, characterized in that: On the tube wall surface of the stepped tube (134), several T-shaped holes are symmetrically arranged in a linear array from top to bottom along the tube diameter below the spherical end of the cue (1341), and a variable-step spring rod (1344) is slidably constrained inside the T-shaped holes. The variable-step spring rod (1344) is composed of a T-shaped rod and a spring fixed to the enlarged end of the T-shaped rod. Among them, the end of the T-shaped rod in contact with the cue (1341) is set as a hemispherical shape, the centrifugal end of the spring is fixed to the inner wall of the T-shaped hole, and the strength of the spring is sequentially increased from top to bottom. The lower end of the stepped tube (134) is fixed on the upper surface of the fixed ear (132) on the side of the adapter cap (133).

6. The arc ion plating device with central air intake according to claim 1, characterized in that: The lower end of the machine connecting rod (14) is connected to the drive motor inside the arc ion plating machine body (2) through a speed increasing gearbox in a matching manner.

7. The arc ion plating device with central air intake according to claim 1, characterized in that: Both the lower spring seat (151) and the upper spring seat (154) are composed of a bottom plate, a middle hole support plate, and a spring fixed between the bottom plate and the support plate, and the lower spring seat (151) and the upper spring seat (154) are arranged in an equal number in an up-and-down combination.

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