Arc ion plating device with central air intake

Abstract

The present invention discloses an arc ion plating device with central air intake, comprising a vacuum coating structure and an arc ion plating body. The vacuum coating structure is provided with a vacuum coating chamber, wherein the upper portion of the chamber is connected to a guide hood and a downcomer, the downcomer has a centrifugal hole, and is also provided with a high-temperature resistant crushing sleeve, an air guide screw rod, etc., which can effectively deal with the problem of large particle droplets generated during the coating process; compared with the existing technology, the design of the centrifugal hole of the downcomer and the wall-attached peak hole of the high-temperature resistant crushing sleeve can make the metal droplets form a wall hanging layer during coating, avoid deposition on the surface of the film layer, reduce the roughness of the film layer, and improve the appearance and functionality of the workpiece; the driving motor drives the air guide screw rod through the speed-increasing gearbox, and the gear transmission is combined to make the workpiece rotate at a uniform speed, optimize the ion bombardment deposition angle, and prepare high-quality thin films. In addition, the special structure on the side of the high-temperature resistant crushing sleeve can realize the switching of the centrifugal area, which is convenient for removing and processing the internal metal pipe body after coating, and is beneficial to material recovery and equipment maintenance.

Description

Technical Field

[0001] The invention relates to the technical field of arc ion plating, in particular to an arc ion plating device with central air intake. Background Art

[0002] With the rapid development of modern industry, the requirements for material surface properties in various fields continue to rise. Arc ion plating technology has been widely used in the industrial sector due to its unique advantages. This technology has the remarkable characteristic of a high target material ionization rate, which means that the target material can be converted into an ionic state more efficiently, laying a good foundation for the subsequent thin film or coating deposition. Its fast film or coating deposition rate greatly improves production efficiency and meets the rhythm of large-scale industrial production. At the same time, the prepared film or coating has a dense structure and excellent protective properties. In particular, arc ion plating technology has demonstrated excellent effectiveness in the surface protection and modification of key industrial components such as cutting tools, molds, and wear-resistant parts. After this technical treatment, the surface hardness of the workpiece is effectively improved, which can better resist external mechanical forces and reduce wear. The enhanced composite toughness makes the workpiece less likely to suffer brittle fracture when subjected to complex stresses, significantly improving its reliability. The significant improvement in wear resistance can effectively extend the service life of the workpiece in high-friction environments. The improvement in chemical stability makes the workpiece more stable when facing erosion by various chemical media, and less likely to undergo chemical reactions that lead to performance degradation. The comprehensive optimization of these properties greatly extends the service life of the workpiece, reduces costs for industrial production, and creates higher economic benefits.

[0003] However, currently in the arc ion plating process, the temperature of the cathode arc spot usually far exceeds the melting point of the metal, and a micro-molten pool is formed on the cathode surface. In the micro-molten pool, the metal will undergo intense vaporization. When the metal vapor flow rushes into the space at high speed, it will carry out some liquid metal, causing droplets to splash and eventually form large droplets. Once these large droplets are deposited on the surface of the film layer, the surface roughness of the film layer will increase significantly. The increase in the surface roughness of the film layer will not only affect the appearance quality of the workpiece, but more importantly, it will have a negative impact on the functionality of the workpiece.

[0004] Therefore, an arc ion plating device with central air intake is proposed. Summary of the Invention

[0005] The object of the present invention is to provide an arc ion plating device with central air intake to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: an arc ion plating device with central air intake, comprising:

[0007] Vacuum coating structure;

[0008] The arc ion plating machine body and the vacuum coating structure are fixedly arranged on the upper surface of the arc ion plating machine body;

[0009] Wherein, the vacuum coating structure includes a vacuum coating chamber, the upper part of the interior of the vacuum coating chamber is connected with a guide cover by bolts, the lower end of the guide cover is integrally connected with a downpipe, the inner wall of the downpipe is evenly provided with centrifugal holes, the side of the guide cover is sleeved and fixed with a bearing ring, and the interior of the bearing ring is connected with an adapter cap by bolts, and the lower end of the adapter cap is provided with a high-temperature crushing sleeve, the inner wall of the high-temperature crushing sleeve is evenly and densely provided with slightly concave wall-attached peak holes, an air guide screw rod is rotatably provided inside the downpipe, and the lower end of the air guide screw rod cooperates with a coupling and a machine connecting rod The connecting rod of the machine is connected, and the rod body of the machine connecting rod slides through the substrate chassis from the axis and is connected to a driving gear below the rod body. The substrate chassis is fixedly arranged at the bottom of the vacuum coating chamber, and the interior of the substrate chassis is rotatably connected to several lower spring seats in cooperation with pre-installed bearings. The lower surfaces of the lower spring seats are fixedly provided with driven gears, and the driven gears are meshed with the driving gears for transmission. At least one positioning rod is fixedly provided on the surface of the substrate chassis between the lower spring seats, and the upper ends of the positioning rods are fixed to the bearing racks, and the bearing racks are internally provided with several upper spring seats for rotation and positioning.

[0010] Preferably, an arc evaporation source is fixedly installed above the interior of the vacuum coating chamber, and the arc evaporation source is electrically connected to the arc ion plating body through a line. The guide cover is arranged on the outside of the arc evaporation source, and the adapter cap and the high-temperature resistant crushing sleeve are arranged on the outside of the downcomer.

[0011] Preferably, the upper side of the high-temperature resistant crushing sleeve and the lower side of the adapter cap are both fixedly provided with axially penetrating fixing ears, and the interior of the fixing ears are slidably inserted with ball rods, and the fixing ears on the side of the high-temperature resistant crushing sleeve cooperate with bolts to fix the lower end of the ball rod, the upper end of the ball rod is a sphere, and the sliding constraint of the ball end is arranged inside the stepped tube, the ball end of the ball rod is fixedly provided with a reset spring and an isolation telescopic sleeve, and the upper ends of the reset spring and the isolation telescopic sleeve are fixed to the upper wall surface of the stepped tube, wherein the isolation telescopic sleeve is high-temperature resistant The telescopic structure is sleeved on the outside of the return spring. The wall surface of the stepped tube is symmetrically provided with a plurality of T-shaped holes in a straight array from top to bottom along the tube diameter below the ball end of the ball rod, and a variable-step spring rod is provided for the internal sliding constraint of the T-shaped hole. The variable-step spring rod consists of a T-shaped rod and a spring fixed to the expanded end of the T-shaped rod, wherein the end of the T-shaped rod in contact with the ball rod is set to a hemispherical shape, the centrifugal end of the spring is fixed to the inner wall of the T-shaped hole, and the strength of the spring is set to increase from top to bottom. The lower end of the stepped tube is fixed to the upper surface of the fixed ear on the side of the adapter cap.

[0012] Preferably, the lower end of the connecting rod cooperates with a speed increasing gear box to be connected to a driving motor inside the arc ion plating machine body.

[0013] Preferably, the lower spring seat and the upper spring seat are both composed of a base plate, a center hole support plate and a spring fixed between the base plate and the support plate, and the lower spring seat and the upper spring seat are arranged in equal numbers in upper and lower combinations.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The present invention provides a lower conduit with a centrifugal hole and a high-temperature crushing sleeve with wall-attached peak holes on the inner wall. During film coating, metal vapor and liquid droplets spiral downward along the lower conduit under the action of the air-guiding screw rod, and the liquid droplets are thrown out into the high-temperature crushing sleeve through the centrifugal hole. A metal hanging layer is formed under the action of the wall-attached peak holes, thereby avoiding the deposition of large particle droplets on the surface of the film layer, effectively reducing the surface roughness of the film layer, and improving the appearance quality and functionality of the workpiece. In addition, on the one hand, the driving motor drives the air-guiding screw rod to rotate at high speed through the speed-increasing gearbox, which can efficiently pull the metal vapor and liquid droplets, so that the metal vapor is more evenly transported between the workpieces. On the other hand, the driving gear meshes with the driven gear, driving the lower spring seat and the upper spring seat to rotate the workpiece at a uniform speed, so that the ion bombardment deposition angle is dynamically optimized, forming a high-quality film with uniform thickness and dense structure.

[0016] 2. The present invention sets structures such as fixed ears, ball rods, stepped tubes and variable-step spring rods on the side of the high-temperature resistant crushing sleeve. During the coating process, when the metal wall layer inside the high-temperature resistant crushing sleeve reaches a predetermined weight, it will move downward as a whole to realize centrifugal area switching. After the coating is completed, the high-temperature resistant crushing sleeve can be easily taken out by removing the ball rods and the bolts of the fixed ears, and the metal tube body formed inside can be disassembled and processed to realize material recycling. At the same time, it is also convenient to clean and maintain the equipment, thereby reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is an overall structural view of the present invention;

[0018] Figure 2 This is an open diagram of the vacuum coating chamber of the present invention;

[0019] Figure 3 It is an overall cross-sectional view of the present invention;

[0020] Figure 4 This is a disassembled diagram of the vacuum coating structure of the present invention;

[0021] Figure 5 This is a disassembled diagram of the guide cover, high-temperature resistant crushing sleeve and their connection structure of the present invention;

[0022] Figure 6A cross-sectional view of the stepped pipe and its connection structure of the present invention;

[0023] Figure 7 It is a schematic diagram of the connecting rod of the present invention;

[0024] Figure 8 It is a schematic diagram of the lower spring seat of the present invention;

[0025] Figure 9 It is a cross-sectional view of the positioning rod, bearing frame and upper spring seat of the present invention;

[0026] Figure 10 For the present invention Figure 6 Enlarged view of point A in the middle;

[0027] Figure 11 For the present invention Figure 6 Enlarged view of point B in the middle.

[0028] In the picture:

[0029] 1. Vacuum coating structure;

[0030] 11. Vacuum coating chamber; 111. Arc evaporation source;

[0031] 12. Guide cover; 121. Bearing ring; 122. Downpipe; 1221. Centrifugal hole;

[0032] 13. High-temperature resistant crushing sleeve; 131. Wall-attached peak hole; 132. Fixing ear; 133. Adapter cap; 134. Stepped tube; 1341. Ball rod; 1342. Return spring; 1343. Isolation telescopic sleeve; 1344. Step-variable spring rod;

[0033] 14. Connecting rod; 141. Air guide screw rod; 142. Driving gear;

[0034] 15. Base material chassis; 151. Lower spring seat; 1511. Driven gear; 152. Positioning rod; 153. Bearing replacement frame; 154. Upper spring seat;

[0035] 2. Arc ion plating machine body. DETAILED DESCRIPTION

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] See also Figures 1 to 11 The present invention provides a technical solution for an arc ion plating device with central air intake:

[0038] An arc ion plating device with central air intake, comprising:

[0039] Vacuum coating structure 1, made of metal such as stainless steel, has good sealing performance, and is equipped with an observation window, vacuum exhaust port, air inlet, etc.;

[0040] The arc ion plating machine 2 includes a power supply system, a vacuum system, a gas supply system, a control system, and an exhaust gas treatment system. The vacuum coating structure 1 is fixedly arranged on the upper surface of the arc ion plating machine 2, and the vacuum exhaust port and air inlet of the vacuum coating structure 1 are correspondingly connected to the various systems of the arc ion plating machine 2.

[0041] The vacuum coating structure 1 includes a vacuum coating chamber 11 made of metal such as stainless steel. An arc evaporation source 111 is fixedly installed above the interior of the vacuum coating chamber 11, and the arc evaporation source 111 is electrically connected to the arc ion plating body 2 through a circuit.

[0042] The upper part of the interior of the vacuum coating chamber 11 is connected with a guide cover 12 by bolts, and the guide cover 12 is sleeved on the outer side of the arc evaporation source 111. The guide cover 12 is a funnel-shaped body that is wide at the top and narrow at the bottom, and the lower end of the guide cover 12 is integrally connected to a lower conduit 122. Centrifugal holes 1221 are evenly opened on the inner wall of the lower conduit 122 near the lower port, and the centrifugal holes 1221 are set in a trumpet shape that is narrow inside and wide outside. A bearing ring 121 is sleeved and fixed on the side of the guide cover 12 near the lower port, and an adapter cap 133 is connected to the inside of the bearing ring 121 by bolts. The adapter cap 133 is an annular body that is wide at the top and narrow at the bottom, and is sleeved on the upper end of the lower conduit 122. The lower end of the adapter cap 133 is provided with a high-temperature crushing sleeve 13, and the inner wall of the high-temperature crushing sleeve 13 is evenly and densely opened with slightly concave wall-attached peak holes 131, and the high-temperature crushing sleeve 13 is sleeved on the wall of the lower guide tube 122. The upper and lower ports inside the lower guide tube 122 are fixedly provided with bearing frames, and an air guide screw rod 141 is provided to rotate inside the bearing frame, and the lower end of the air guide screw rod 141 passes through the lower guide tube 122 and is connected to the upper end of the machine connecting rod 14 through the coupling. The rod body of the machine connecting rod 14 slides from the axis through the substrate chassis 15 and then cooperates with the speed increasing gear box and the driving inside the arc ion plating body 2 at the lower end of the rod body. The substrate chassis 15 is fixedly provided at the bottom of the vacuum coating chamber 11, and a plurality of mounting holes are provided in a circular array along the axis on the centrifugal side of the substrate chassis 15, and the interior of the mounting holes are fixedly provided with bearings, and the lower spring seat 151 is connected to the lower spring seat 151 for rotation in the hole with the bearing. At least one positioning rod 152 is fixedly provided on the surface of the substrate chassis 15 between the lower spring seats 151, and the positioning rod 152 is selected from any one of a spring rod, a hydraulic cylinder, an electric push rod, etc. The upper ends of the positioning rods 152 are fixed to the bearing exchange frame 153, and the bearing exchange frame 153 is fixed to the bearing exchange frame 153. It is composed of several bearing seats on the circular ring, and the upper spring seats 154 are rotatably positioned inside the bearing seats. The lower spring seat 151 and the upper spring seat 154 are both composed of a base plate, a center hole support plate and a spring fixed between the base plate and the support plate. The lower spring seat 151 and the upper spring seat 154 are arranged in equal numbers in the upper and lower combinations, and the lower spring seat 151 and the upper spring seat 154 are both located on the outer ring side of the high-temperature resistant crushing sleeve 13, wherein the lower surface of the lower spring seat 151 is fixedly provided with a driven gear 1511, and the driven gear 1511 is distributed around the circumference of the driving gear 142, and the driven gears 1511 are all meshed with the driving gear 142 for transmission.

[0043] During operation, first control the positioning rod 152 or lift the bearing changing frame 153, insert the workpiece on the lower spring seat 151, reset the bearing changing frame 153, and insert the upper spring seat 154 into the upper end of the workpiece for positioning. After the target material is installed on the cathode target, close the vacuum coating chamber 11 and evacuate to high vacuum, apply high voltage of the anode and cathode to make the target material arc evaporate and ionize, and at the same time, the gas guide screw rod 141 is driven at high speed, pulling the metal vapor and droplets to move downward along the lower guide tube 122 in a spiral. The droplets are thrown to the high-temperature resistant crushing sleeve 13 through the centrifugal hole 1221, forming a metal wall layer of the wall peak hole 131, and the purified vapor is transported to the workpiece area through the lower end of the lower guide tube 122. The driving gear 142 engages the driven gear 1511, driving the lower spring seat 151 and the upper spring seat 154 to rotate the workpiece at a constant speed, and ions are deposited to form a film.

[0044] To sum up, by providing a lower conduit 122 with a centrifugal hole 1221 and a high-temperature crushing sleeve 13 with a wall-attached peak hole 131 on the inner wall, during film coating, metal vapor and droplets spiral downward along the lower conduit 122 under the action of the gas-guiding screw rod 141, and the droplets are thrown out into the high-temperature crushing sleeve 13 through the centrifugal hole 1221, and a metal wall hanging layer is formed under the action of the wall-attached peak hole 131, thereby avoiding the deposition of large particle droplets on the surface of the film layer, effectively reducing the surface roughness of the film layer, and improving the appearance quality and functionality of the workpiece. In addition, on the one hand, the driving motor drives the gas-guiding screw rod 141 to rotate at a high speed through the speed-increasing gearbox, which can efficiently pull metal vapor and droplets, so that the metal vapor is more evenly transported between the workpieces. On the other hand, the driving gear 142 engages with the driven gear 1511, driving the lower spring seat 151 and the upper spring seat 154 to rotate the workpiece at a uniform speed, so that the ion bombardment deposition angle is dynamically optimized, forming a high-quality film with uniform thickness and dense structure.

[0045] As an embodiment of the present invention, Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 10 and Figure 11As shown, the upper side of the high-temperature crushing sleeve 13 and the lower side of the adapter cap 133 are fixedly provided with an axially penetrating fixing ear 132, and the interior of the fixing ear 132 is slidably inserted with a ball rod 1341, and the fixing ear 132 on the side of the high-temperature crushing sleeve 13 cooperates with the bolt to fix the lower end of the ball rod 1341, the upper end of the ball rod 1341 is a sphere, and the sliding constraint of the ball end is set inside the stepped tube 134, the ball end of the ball rod 1341 is fixedly provided with a reset spring 1342 and an isolation telescopic sleeve 1343, and the upper ends of the reset spring 1342 and the isolation telescopic sleeve 1343 are fixed to the upper wall surface of the stepped tube 134, wherein the isolation The telescopic sleeve 1343 is a high-temperature resistant telescopic structure and is sleeved on the outside of the reset spring 1342. The wall surface of the stepped tube 134 is symmetrically provided with a plurality of T-shaped holes in a straight array from top to bottom along the tube diameter below the ball end of the ball rod 1341, and the internal sliding constraint of the T-shaped hole is provided with a step-variable spring rod 1344. The step-variable spring rod 1344 consists of a T-shaped rod and a spring fixed to the expanded end of the T-shaped rod, wherein the end of the T-shaped rod in contact with the ball rod 1341 is set to be hemispherical, the centrifugal end of the spring is fixed to the inner wall of the T-shaped hole, and the strength of the spring is set to increase from top to bottom. The lower end of the stepped tube 134 is fixed to the upper surface of the fixing ear 132 on the side of the adapter cap 133.

[0046] During the coating process of the high-temperature resistant crushing sleeve 13, the internal metal droplets are thrown out through the centrifugal hole 1221 to form a wall hanging layer. When the accumulated weight reaches a predetermined weight, the gravity overcomes the elastic force of the variable-step spring rod 1344 and the return spring 1342, and moves downward along the inner wall of the stepped tube 134, falling onto the lower layer of the variable-step spring rod 1344, triggering the ball end support of the ball rod 1341, driving the entire sleeve to move downward along the wall of the lower guide tube 122, realizing the switching of the centrifugal area. The metal tube body finally formed can be removed from the high-temperature resistant crushing sleeve 13 as a whole by removing the bolts of the ball rod 1341 and the fixing ear 132, and then the internal tube body is separated by crushing or lubrication.

[0047] To sum up, by arranging the fixing ear 132, the ball rod 1341, the stepped tube 134 and the variable-step spring rod 1344 and other structures on the side of the high-temperature resistant crushing sleeve 13, during the coating process, when the metal wall layer inside the high-temperature resistant crushing sleeve 13 reaches a predetermined weight, it will move downward as a whole to realize the switching of the centrifugal area. After the coating is completed, the high-temperature resistant crushing sleeve 13 can be easily removed by removing the bolts of the ball rod 1341 and the fixing ear 132, and the metal tube body formed inside can be dismantled to realize the recycling of materials. At the same time, it is also convenient to clean and maintain the equipment, thereby reducing production costs.

[0048] Working principle: In the arc ion plating equipment, first control the positioning rod 152 or lift the bearing changing frame 153 to move the bearing changing frame 153 upward, and then insert the workpieces to be plated one by one and place them on the lower spring seat 151, and then control the positioning rod 152 or release the bearing changing frame 153 to reset the bearing changing frame 153 and move it downward, and then the upper spring seat 154 will be inserted into the upper end of the workpiece, so that the workpiece can be positioned, and then the coating material (usually a metal or alloy target material) is installed on the cathode target, and then the door of the vacuum coating chamber 11 is closed, and the vacuum pump system is started to extract the air in the coating chamber to make the chamber reach a predetermined high vacuum state to avoid gas. The molecules of the body interfere with the coating process. When the vacuum degree reaches the requirement, high voltage is applied between the cathode target and the anode to form a strong electric field, which ionizes the residual gas molecules to produce plasma. At the same time, arc discharge is generated on the surface of the cathode target, causing the target atoms to evaporate and ionize. At the same time, the driving motor inside the arc ion plating body 2 cooperates with the speed-increasing gearbox (a combination structure of a large gear driving a small gear) to drive the gas guide screw rod 141 to rotate at high speed, and the rotating gas guide screw rod 141 will pull the metal vapor and metal droplets downward, causing the metal vapor and metal droplets to spiral downward at high speed along the inner wall of the downpipe 122. During the downward movement, they will pass through the centrifugal hole 1221, and then the metal droplets will The metal vapor is centrifugally thrown out from the centrifugal hole 1221 into the high-temperature crushing sleeve 13, and forms a metal wall layer under the action of the wall peak hole 131. The metal vapor after centrifugation will be transported by the gas guide screw rod 141 from the lower port of the lower guide tube 122 to the space between the workpieces positioned by the lower spring seat 151 and the upper spring seat 154. Then, the process gas is introduced as needed to react with the target material ions (if any). At this time, under the action of the electric field, the metal vapor (ions of the coating material) is accelerated to bombard the surface of the workpiece to be plated. In the process of bombarding the surface of the workpiece, part of the energy of the ions is transferred to the atoms on the surface of the workpiece, causing the surface atoms to migrate and rearrange. At the same time, the ions are automatically The film is deposited on the surface of the workpiece. At the same time, the driving gear 142 driven by the driving motor will engage the driven gear 1511, so that the driven gear 1511 drives the lower spring seat 151 to rotate, and then the rotating lower spring seat 151 will cooperate with the upper spring seat 154 to drive the workpiece to rotate at a uniform speed. Then, a uniform and dense film will gradually form on the surface of the workpiece. In addition, by controlling parameters such as arc current, voltage, coating time, vacuum degree and gas flow, the thickness, composition, structure and performance of the coating can be accurately controlled, so as to obtain high-quality films that meet different requirements on the surface of the workpiece, such as films with functions such as wear resistance, corrosion resistance, oxidation resistance and decoration.

[0049] During the coating process of the workpiece, the interior of the high-temperature resistant crushing sleeve 13 will continue to have the situation of scraping the wall after the metal droplets are centrifuged. As the centrifugation of the metal increases, the thickness of the metal scraping wall in the same centrifugal area inside the high-temperature resistant crushing sleeve 13 will gradually increase. After reaching the predetermined scraping weight, the overall gravity of the high-temperature resistant crushing sleeve 13 will overcome the spring force of the step-changing spring rod 1344 and the return spring 1342, and move downward along the inner wall of the stepped tube 134, and finally fall on the step-changing spring rod 1344 of the lower layer, so that the step-changing spring rod 1344 supports the ball end of the ball rod 1341. The high temperature resistant crushing sleeve 13 will move synchronously with the ball rod 1341 along the wall of the lower guide tube 122, so as to realize the replacement of the centrifugal wall hanging area, and finally a rough metal tube body will be formed inside the high temperature resistant crushing sleeve 13. After the metal tube body is formed, the high temperature resistant crushing sleeve 13 and the ball rod 1341 can be separated by removing the connecting fixing bolts between the ball rod 1341 and the fixing ear 132 to remove the high temperature resistant crushing sleeve 13 as a whole, and then the tube body inside the high temperature resistant crushing sleeve 13 can be removed by crushing the high temperature resistant crushing sleeve 13, lubricating and removing it, etc.

[0050] It should be noted that the lower spring seat 151 can be set according to the shape of the workpiece to be plated; the upper and lower spacing between the variable-step spring rods 1344 is proportional to the distance that the high-temperature resistant crushing sleeve 13 moves downward, and the scraping area after each downward movement of the high-temperature resistant crushing sleeve 13 needs to be connected with the scraping area where scraping has been performed; the high-temperature resistant crushing sleeve 13 is made of stable high-temperature resistant materials related to metal smelting, casting, molding and other equipment.

[0051] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An arc ion plating device with central air intake, comprising: Vacuum coating structure (1); An arc ion plating machine body (2), wherein the vacuum coating structure (1) is fixedly arranged on the upper surface of the arc ion plating machine body (2); The vacuum coating structure (1) comprises a vacuum coating chamber (11), characterized in that: The upper part of the interior of the vacuum coating chamber (11) is connected with a guide cover (12) by bolts, and the lower end of the guide cover (12) is integrally connected with a lower conduit (122), and the inner wall of the lower conduit (122) is evenly provided with centrifugal holes (1221), and the side of the guide cover (12) is sleeved and fixed with a bearing ring (121), and the interior of the bearing ring (121) is connected with a transfer cap (133) by bolts, and the lower end of the transfer cap (133) is provided with a high-temperature crushing sleeve (13), and the inner wall of the high-temperature crushing sleeve (13) is evenly and densely provided with slightly concave wall peak holes (131), and the interior of the lower conduit (122) is rotatably provided with an air guide screw rod (141), and the lower end of the air guide screw rod (141) is connected to the machine connecting rod (14) with a coupling, and the machine connecting rod (14 ) is connected to a driving gear (142) below the rod body after the rod body slides through the substrate chassis (15) from the axis, the substrate chassis (15) is fixedly arranged below the interior of the vacuum coating chamber (11), and the interior of the substrate chassis (15) is rotatably connected to a plurality of lower spring seats (151) in conjunction with pre-installed bearings, the lower surfaces of the lower spring seats (151) are fixedly provided with driven gears (1511), and the driven gears (1511) are all meshed with the driving gear (142) for transmission, at least one positioning rod (152) is fixedly provided on the surface of the substrate chassis (15) between the lower spring seats (151), the upper ends of the positioning rods (152) are fixed to the bearing rack (153), and the interior of the bearing rack (153) is provided with a plurality of upper spring seats (154) for rotational positioning; Axially penetrating fixing ears (132) are fixedly provided on the upper side of the high-temperature resistant crushing sleeve (13) and the lower side of the adapter cap (133), and a ball rod (1341) is slidably inserted into the interior of the fixing ears (132). The fixing ears (132) on the side of the high-temperature resistant crushing sleeve (13) cooperate with bolts to fix the lower end of the ball rod (1341); The upper end of the ball rod (1341) is a sphere, and the sliding constraint of the ball end is arranged inside the stepped tube (134); the ball end of the ball rod (1341) is fixedly provided with a reset spring (1342) and an isolating telescopic sleeve (1343), and the upper ends of the reset spring (1342) and the isolating telescopic sleeve (1343) are both fixed to the upper wall surface of the stepped tube (134); wherein the isolating telescopic sleeve (1343) is a high-temperature resistant telescopic structure and is sleeved on the outside of the reset spring (1342); The wall surface of the stepped tube (134) is symmetrically provided with a plurality of T-shaped holes in a linear array from top to bottom along the tube diameter below the ball end of the ball rod (1341), and a variable-step spring rod (1344) is provided as a sliding constraint inside the T-shaped hole. The variable-step spring rod (1344) is composed of a T-shaped rod and a spring fixed to the expanded end of the T-shaped rod, wherein the end of the T-shaped rod in contact with the ball rod (1341) is set to be hemispherical, the centrifugal end of the spring is fixed to the inner wall of the T-shaped hole, and the strength of the spring is set to increase from top to bottom, and the lower end of the stepped tube (134) is fixed to the upper surface of the fixing ear (132) on the side of the adapter cap (133).

2. The arc ion plating device with central air intake according to claim 1, characterized in that: An arc evaporation source (111) is fixedly arranged above the interior of the vacuum coating chamber (11), and the arc evaporation source (111) is electrically connected to the arc ion plating machine body (2) through a circuit. The guide cover (12) is sleeved on the outside of the arc evaporation source (111), and the adapter cap (133) and the high-temperature resistant crushing sleeve (13) are sleeved on the outside of the downpipe (122).

3. The arc ion plating device with central air intake according to claim 1, characterized in that: The lower end of the machine connecting rod (14) cooperates with a speed increasing gear box to be connected to a driving motor inside the arc ion plating machine body (2).

4. The arc ion plating device with central air intake according to claim 1, characterized in that: The lower spring seat (151) and the upper spring seat (154) are both composed of a bottom plate, a center hole support plate, and a spring fixed between the bottom plate and the support plate, and the lower spring seat (151) and the upper spring seat (154) are arranged in equal numbers in upper and lower combinations.

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