An absolute pressure metal film capacitance vacuum gauge

Abstract

The present invention discloses an absolute pressure metal film capacitive vacuum gauge, which relates to the technical field of vacuum gauges and comprises a shell, a first connecting tube being fixedly connected to one side of the shell, a metal film, a ceramic block and a mounting block being fixedly connected to the inner cavity of the shell, and an alarm component being provided in the inner cavity of the mounting block. The absolute pressure metal film capacitive vacuum gauge is connected to a pipe in a vacuum system through a clamping mechanism by providing the alarm component. When the vacuum system causes pressure to be generated in the pipe, pressure is increased or decreased inside the detection cavity. At this time, the metal film will bend to a certain extent, causing a change in capacitance. Then, the pressure change can be inferred by measuring the change in capacitance value. When the sliding plate is moving, the capacitance signal derived from the internal capacitance can be canceled, thereby quickly shutting down the operation of the internal and external capacitances, and starting a corresponding miniature sound and light alarm to indicate that the vacuum gauge is damaged.

Description

Technical Field

[0001] The present invention relates to the technical field of capacitance vacuum gauges, in particular to an absolute pressure metal film capacitance vacuum gauge. Background Art

[0002] Vacuum gauges are key components for real-time measurement of vacuum levels in vacuum systems. They are typically categorized into Bourdon gauges, thin-film capacitance gauges, Pirani resistance gauges, thermocouple gauges, hot cathode ionization gauges, and cold cathode ionization gauges. Thin-film capacitance gauges are the most commonly used instruments for measuring vacuum levels under normal temperature and low vacuum conditions, offering advantages such as a wide measurement range and high accuracy. Furthermore, thin-film capacitance gauges can be classified according to their vacuum comparison principle into two types: differential pressure and absolute pressure. The vacuum comparison chamber of a differential pressure gauge requires constant evacuation using a vacuum pump to maintain vacuum, while the vacuum comparison chamber of an absolute pressure gauge is a closed environment, requiring no external vacuum source.

[0003] Existing absolute pressure metal film capacitive vacuum gauges often use a metal film to separate the vacuum gauge into a vacuum chamber and a detection chamber. When in use, the vacuum degree of the vacuum system is measured by the curvature of the metal film. When the metal film leaks, it will affect the accuracy of detecting the vacuum degree of the vacuum system. When an error occurs, it is inconvenient to prompt the user. When the data detected by the vacuum gauge is abnormal, the vacuum gauge needs to be manually shut down immediately. The vacuum gauge is difficult to shut down automatically, which affects the use of the vacuum gauge.

[0004] Combining the above problems, we will find that it is difficult to avoid the above problems at the same time when using the existing vacuum gauges on the market. Even if they can be solved, they need to be solved with the help of external tools, which makes it impossible to achieve the desired effect. Therefore, we propose an absolute pressure metal film capacitive vacuum gauge. Summary of the Invention

[0005] The object of the present invention is to provide an absolute pressure metal film capacitance vacuum gauge to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: an absolute pressure metal film capacitance vacuum gauge, comprising a shell, a first connecting tube fixedly connected to one side of the shell, a metal film, a ceramic block and a mounting block fixedly connected to the inner cavity of the shell, an alarm assembly provided in the inner cavity of the mounting block, and a clamping mechanism provided on one side of the first connecting tube.

[0007] Preferably, the bottom of the ceramic block is fixedly connected with an internal capacitor and an external capacitor, the external capacitor is connected to the outside through a wire to derive a capacitance signal, the outer shell is separated into a vacuum chamber and a detection chamber by a metal film, and the detection chamber is connected to the first connecting tube.

[0008] Preferably, the alarm component includes a groove opened at the bottom of the mounting block, the inner cavity of the groove is slidably connected with an isolation component, the isolation component is used to isolate the vacuum chamber into a first negative pressure chamber and a second negative pressure chamber, the inner wall of the groove is fixedly connected with two first metal blocks, two second metal blocks and two third metal blocks, the surface of the outer shell is fixedly connected with three miniature sound and light alarms and batteries, one of the first metal blocks, one of the second metal blocks and one of the third metal blocks are electrically connected to the three miniature sound and light alarms respectively, another first metal block, another second metal block and another third metal block are all electrically connected to the battery, the three miniature sound and light alarms are all electrically connected to the battery, and the isolation component includes a sliding plate slidably connected to the inner cavity of the groove.

[0009] Preferably, a through hole is provided on one side of the sliding plate, a fixed block is fixedly connected to the inner wall of the through hole, two springs are fixedly connected to both sides of the fixed block, the ends of the two springs away from the fixed block are commonly fixedly connected to a sliding bar, the opposite sides of the two sliding bars are fixedly connected to metal contact blocks used in conjunction with the first metal block, the second metal block and the third metal block, a connecting wire is fixedly connected between the opposite sides of the two metal contact blocks, and the inner cavity of the mounting block is fixedly connected to two metal connecting bars, one of the metal connecting bars is connected to the internal capacitor through a wire, and the other metal connecting bar is connected to the outside through a wire to derive a capacitance signal.

[0010] Preferably, two sealing rings are fixedly connected to the surface of the sliding plate, and the surfaces of the two sealing rings are in close contact with the inner wall of the groove. The inner wall of the groove is fixedly connected to a spacer used in conjunction with the sliding plate.

[0011] Preferably, the clamping mechanism includes a second connecting tube threadedly connected to one side of the first connecting tube, one side of the second connecting tube is communicated with the first connecting tube, an elastic tube is fixedly connected to the inner wall of the second connecting tube, an extrusion cavity is formed between the elastic tube and the second connecting tube, a clamping assembly is provided on one side of the second connecting tube, and a piston assembly is provided on the surface of the second connecting tube.

[0012] Preferably, the piston assembly includes a piston tube fixedly connected to one side of the second connecting tube, the inner cavity of the piston tube is slidably connected to a piston block, the surface of the piston block is in close contact with the inner wall of the piston tube, one side of the piston block is fixedly connected to an adjusting block, one side of the adjusting block is rotatably connected to a first threaded rod, and the surface of the first threaded rod is threadedly connected to the inner wall of the piston tube.

[0013] Preferably, the clamping assembly includes a fixed ring fixedly connected to one side of the second connecting tube, the inner cavity of the fixed ring is slidably connected to a tooth plate, the number of the tooth plates is several, one side of the tooth plate is fixedly connected to a clamping block, one side of the fixed ring is rotatably connected to a gear ring, one side of the second connecting tube is rotatably connected to a gear, and the tooth plate and the gear ring are both meshed with the gear.

[0014] Preferably, one side of the second connecting tube is fixedly connected to an L-shaped plate, the inner cavity of the L-shaped plate is threadedly connected to a second threaded rod, one end of the second threaded rod is fixedly connected to a connecting block, and one side of the connecting block is fixedly connected to a friction pad used in conjunction with the gear ring.

[0015] Preferably, a T-shaped rod is fixedly connected to one side of the tooth plate, and the surface of the T-shaped rod is slidably connected to the inner wall of the fixing ring.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The present invention provides an alarm component, which is connected to the pipe in the vacuum system through a clamping mechanism, so that the detection chamber is connected to the pipe. When the vacuum system generates pressure in the pipe, the inside of the detection chamber is pressurized or depressurized. At this time, the metal film will bend to a certain extent, causing the capacitance to change. Then, the pressure change can be inferred by measuring the change in capacitance value. When a leak occurs between the metal film and the outer shell, the sliding plate will move under the pressure of the pipe. When the sliding plate is in contact and aligned with the first metal block or the third metal block, the corresponding micro-sound and light alarm is activated. When a leak occurs between the mounting block and the outer shell, the first negative pressure chamber will take in air, so that the sliding plate is aligned with the second metal block, and the corresponding micro-sound and light alarm is activated. When the sliding plate is moving, the capacitance signal derived from the internal capacitor can be canceled, so that the operation of the internal capacitor and the external capacitor can be quickly shut down, and the corresponding micro-sound and light alarm is activated to indicate that the vacuum gauge is damaged.

[0018] 2. The present invention sets a clamping mechanism, inserts the pipe in the vacuum system into the inner cavity of the second connecting pipe, and then rotates the first threaded rod to make the piston block move in the piston tube, squeezing the air in the piston tube into the inside of the extrusion cavity, so that the elastic tube is deformed by force, so that the space in the extrusion cavity becomes larger, and the elastic tube is in close contact with the pipe, thereby sealing the pipe and the second connecting pipe. Then, the pipe can be clamped by the clamping assembly, and pipes of various diameters can be clamped and sealed. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 It is a cross-sectional schematic diagram of the overall structure of the present invention;

[0021] Figure 3 This is an exploded schematic diagram of the first connecting pipe and the second connecting pipe of the present invention;

[0022] Figure 4 Schematic diagram of the structure of the second connecting tube and the piston tube of the present invention;

[0023] Figure 5 is a cross-sectional schematic diagram of the second connecting tube and the piston tube of the present invention;

[0024] Figure 6 Schematic diagram of the structure of the L-shaped rod and the second threaded rod of the present invention;

[0025] Figure 7 is a schematic cross-sectional view of the housing of the present invention;

[0026] Figure 8 For the present invention Figure 7 A partial enlarged view of point A in the middle;

[0027] Figure 9 It is an exploded schematic diagram of the sliding plate and the metal contact block of the present invention.

[0028] In the figure: 1. housing; 11. first connecting tube; 12. metal film; 13. ceramic block; 14. mounting block; 15. internal capacitor; 16. external capacitor; 17. vacuum chamber; 18. detection chamber; 2. alarm assembly; 201. groove; 202. first negative pressure chamber; 203. second negative pressure chamber; 204. first metal block; 205. second metal block; 206. third metal block; 207. miniature sound and light alarm; 208. battery; 209. sliding plate; 210. through hole; 211. fixing block; 212. spring; 213. sliding bar; 214. Metal contact block; 215. Connecting line; 216. Metal connecting strip; 217. Sealing ring; 218. Spacer; 3. Clamping mechanism; 301. Second connecting tube; 302. Elastic cylinder; 303. Extrusion chamber; 304. Piston tube; 305. Piston block; 306. Adjusting block; 307. First threaded rod; 308. Fixing ring; 309. Tooth plate; 310. Clamping block; 311. Gear ring; 312. Gear; 313. L-shaped plate; 314. Second threaded rod; 315. Connecting block; 316. Friction pad; 317. T-shaped rod. DETAILED DESCRIPTION

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] Example 1: Please refer to Figures 1-9The present invention provides a technical solution: an absolute pressure metal film capacitance vacuum gauge, comprising a housing 1, a first connecting tube 11 fixedly connected to one side of the housing 1, a metal film 12, a ceramic block 13 and a mounting block 14 fixedly connected to the inner cavity of the housing 1, an alarm component 2 provided in the inner cavity of the mounting block 14, a clamping mechanism 3 provided on one side of the first connecting tube 11, an internal capacitor 15 and an external capacitor 16 fixedly connected to the bottom of the ceramic block 13, the external capacitor 16 is connected to the outside through a wire to derive a capacitance signal, the housing 1 is divided into a vacuum chamber 17 and a detection chamber 18 by the metal film 12, the detection chamber 18 is communicated with the first connecting tube 11, and by setting the housing 1, The metal film 12, the ceramic block 13 and the mounting block 14 are used in combination to connect the detection chamber 18 to the pipeline in the vacuum system through the first connecting tube 11 and the clamping mechanism 3. When pressure is generated in the pipeline, pressure will be generated in the detection chamber 18, causing the metal film 12 to deform and cause a change in capacitance. The pressure change can then be inferred by measuring the change in capacitance value, and the capacitance signal is derived through the internal capacitor 15 and the external capacitor 16. When a leak occurs between the metal film 12 and the outer shell 1, the alarm component 2 is activated. When a leak occurs between the mounting block 14 and the outer shell 1, the alarm component 2 is also activated, thereby alerting the operator.

[0031] The alarm component 2 includes a groove 201 opened at the bottom of the mounting block 14, and the inner cavity of the groove 201 is slidably connected to an isolation component, which is used to isolate the vacuum chamber 17 into a first negative pressure chamber 202 and a second negative pressure chamber 203. The inner wall of the groove 201 is fixedly connected with two first metal blocks 204, two second metal blocks 205 and two third metal blocks 206. The surface of the shell 1 is fixedly connected with three miniature sound and light alarms 207 and a battery 208, one of the first metal blocks 204, one of the second metal blocks 205 and one of the third metal blocks 206 are respectively connected to the three micro-sound and light alarms. The first metal block 204, the second metal block 205 and the third metal block 206 are all electrically connected to the battery 208. The three miniature sound and light alarms 207 are all electrically connected to the battery 208. The isolation component includes a sliding plate 209 slidably connected to the inner cavity of the groove 201. By setting the alarm component 2, during use, when a leak occurs between the metal film 12 and the shell 1, the pipe intakes air into the detection chamber 18, so that air enters the first negative pressure chamber 202, and the sliding plate 209 is negatively charged in the second negative pressure chamber 203. Under the action of the negative pressure, the sliding plate 209 is aligned with the first metal block 204. When leakage occurs between the mounting block 14 and the housing 1, air enters the first negative pressure chamber 202, making the negative pressure value in the first negative pressure chamber 202 smaller than the negative pressure value in the second negative pressure chamber 203. Since the negative pressure in the second negative pressure chamber 203 and the first negative pressure chamber 204 are aligned, the negative pressure in the first negative pressure chamber 202 is smaller than the negative pressure value in the second negative pressure chamber 203. The negative pressure value in the pressure chamber 202 is consistent and can be set to a fixed value. When the negative pressure value of the first negative pressure chamber 202 is consistent with the atmospheric pressure, the sliding plate 209 can be aligned with the second metal block 205 under the action of the second negative pressure chamber 203, and then the micro sound and light alarm 207 is powered by the battery 208. When the sliding plate 209 is aligned with the first metal block 204, the second metal block 205 and the third metal block 206 respectively, the battery 208 and the micro sound and light alarm 207 form a closed circuit, so that the micro sound and light alarm 207 is activated, thereby alerting the user.

[0032] A through hole 210 is provided on one side of the sliding plate 209, and a fixed block 211 is fixedly connected to the inner wall of the through hole 210. Two springs 212 are fixedly connected to both sides of the fixed block 211, and a sliding bar 213 is fixedly connected to one end of the two springs 212 away from the fixed block 211. The opposite sides of the two sliding bars 213 are fixedly connected to metal contact blocks 214 used in conjunction with the first metal block 204, the second metal block 205 and the third metal block 206. A connecting wire 215 is fixedly connected between the opposite sides of the two metal contact blocks 214. Two metal connecting bars 216 are fixedly connected to the inner cavity of the mounting block 14, one of the metal connecting bars 216 is connected to the internal capacitor 15 through a wire, and the other metal connecting bar 216 is connected to the outside through a wire to derive the capacitance signal. Two sealing rings 217 are fixedly connected to the surface of the sliding plate 209, and the surfaces of the two sealing rings 217 are in close contact with the inner wall of the groove 201. The inner wall of the groove 201 is fixedly connected with a spacer block 218 used in conjunction with the sliding plate 209. By setting up an isolation component, when there is no leakage between the metal film 12 and the shell 1 and between the mounting block 14 and the shell 1, the sliding plate 209 is aligned with the metal connecting strip 216, so that the internal capacitor 15 can export the capacitance signal. When the sliding plate 209 moves, the contact between the sliding plate 209 and the metal connecting strip 216 is cancelled, thereby stopping the operation of the vacuum gauge. The spring 212 squeezes the sliding bar 213 so that the metal contact block 214 can maintain contact with the metal connecting strip 216, so that the two metal connecting strips 216 are conductive through the two metal contact blocks 214 and the connecting wire 215. By setting up a sealing ring 217, the sliding plate 209 and the groove 201 can be sealed. By setting up a spacer block 218, the sliding plate 209 is prevented from escaping from the inner cavity of the groove 201.

[0033] The specific implementation of this embodiment is: the detection chamber 18 is connected to the pipeline in the vacuum system through the first connecting tube 11 and the clamping mechanism 3. When the pipeline generates pressure, pressure will be generated in the detection chamber 18, causing the metal film 12 to deform and cause the capacitance to change. Then, the pressure change can be inferred by measuring the change in capacitance value. During use, when leakage occurs between the metal film 12 and the outer shell 1, the pipeline intakes air into the detection chamber 18, so that air enters the first negative pressure chamber 202. The sliding plate 209 is aligned with the third metal block 206 under the action of the negative pressure in the second negative pressure chamber 203. The pipeline extracts the air from the detection chamber 18, and the negative pressure in the first negative pressure chamber 202 can continue to increase, so that the negative pressure in the first negative pressure chamber 202 is greater than the negative pressure in the second negative pressure chamber 203, thereby making the sliding plate 209 in the first negative pressure chamber 202 negative pressure. Under the action of , it is aligned with the first metal block 204. When leakage occurs between the mounting block 14 and the shell 1, air enters the first negative pressure chamber 202, making the negative pressure value in the first negative pressure chamber 202 less than the negative pressure value in the second negative pressure chamber 203. Since the negative pressure values in the second negative pressure chamber 203 and the first negative pressure chamber 202 are consistent and can be set to a fixed value, when the negative pressure value in the first negative pressure chamber 202 is consistent with the atmospheric pressure, the sliding plate 209 can be aligned with the second metal block 205, and then the micro sound and light alarm 207 is powered by the battery 208. When the sliding plate 209 is aligned with the first metal block 204, the second metal block 205 and the third metal block 206 respectively, the battery 208 and the micro sound and light alarm 207 form a closed circuit, so that the micro sound and light alarm 207 is activated, thereby alerting the user.

[0034] Example 2: Please refer to Figures 1-9 The present invention provides a technical solution: an absolute pressure metal film capacitance vacuum gauge. The present invention makes corresponding improvements to the technical problems mentioned in the background technology.

[0035] The clamping mechanism 3 includes a second connecting tube 301 threadedly connected to one side of the first connecting tube 11, one side of the second connecting tube 301 is communicated with the first connecting tube 11, and an elastic tube 302 is fixedly connected to the inner wall of the second connecting tube 301, and an extrusion chamber 303 is formed between the elastic tube 302 and the second connecting tube 301. A clamping assembly is provided on one side of the second connecting tube 301, and a piston assembly is provided on the surface of the second connecting tube 301. By setting the clamping mechanism 3, the pipe in the vacuum system is inserted into the second connecting tube 301, and then the pipe is clamped by the clamping assembly, and then gas is added to the extrusion chamber 303 by using the piston assembly, so that the extrusion chamber 303 expands. At this time, the elastic tube 302 is deformed under force, so that the elastic tube 302 wraps the pipe, thereby achieving a sealing effect between the pipe and the second connecting tube 301.

[0036] The piston assembly includes a piston tube 304 fixedly connected to one side of the second connecting tube 301, and the inner cavity of the piston tube 304 is slidably connected to the piston block 305, and the surface of the piston block 305 is in close contact with the inner wall of the piston tube 304. One side of the piston block 305 is fixedly connected to the adjusting block 306, and one side of the adjusting block 306 is rotatably connected to the first threaded rod 307, and the surface of the first threaded rod 307 is threadedly connected to the inner wall of the piston tube 304. By setting the piston assembly, when air is added to the extrusion chamber 303, the first threaded rod 307 is rotated. Since the first threaded rod 307 is threadedly connected to the piston tube 304, when the first threaded rod 307 is rotated, the first threaded rod 307 drives the adjusting block 306 and the piston block 305 to move, thereby squeezing the gas in the piston tube 304 to the inner wall of the extrusion chamber 303, thereby achieving the effect of pressurizing the extrusion chamber 303.

[0037] The clamping assembly includes a fixed ring 308 fixedly connected to one side of the second connecting tube 301, and the inner cavity of the fixed ring 308 is slidably connected to a tooth plate 309. There are several tooth plates 309, and one side of the tooth plate 309 is fixedly connected to a clamping block 310. One side of the fixed ring 308 is rotatably connected to a gear ring 311. One side of the second connecting tube 301 is rotatably connected to a gear 312. The gear plate 309 and the gear ring 311 are both meshed and connected with the gear 312. By setting up the clamping assembly, when clamping the pipe in the vacuum system, the gear ring 311 is rotated, so that the gear ring 311 drives the gear 312 to rotate, and the gear 312 drives the tooth plate 309 to move, and the tooth plate 309 drives the clamping block 310 to clamp the pipe. This clamping method can clamp pipes of different diameters.

[0038] An L-shaped plate 313 is fixedly connected to one side of the second connecting pipe 301, and the inner cavity of the L-shaped plate 313 is threadedly connected to the second threaded rod 314, one end of the second threaded rod 314 is fixedly connected to the connecting block 315, and one side of the connecting block 315 is fixedly connected to the friction pad 316 used in conjunction with the ring gear 311. By setting the L-shaped plate 313, the second threaded rod 314, the connecting block 315 and the friction pad 316 for use, after clamping the pipe, the second threaded rod 314 is rotated, so that the second threaded rod 314 drives the connecting block 315 and the friction pad 316 to move, so that the friction pad 316 is in close contact with the ring gear 311, thereby achieving the effect of limiting the ring gear 311.

[0039] A T-shaped rod 317 is fixedly connected to one side of the tooth plate 309, and the surface of the T-shaped rod 317 is slidably connected to the inner wall of the fixed ring 308. By setting the T-shaped rod 317, when the gear 312 drives the tooth plate 309 to move, the tooth plate 309 drives the T-shaped rod 317 to slide in the inner cavity of the fixed ring 308. Its T-shaped design can effectively guide the tooth plate 309 and prevent the tooth plate 309 from tilting.

[0040] The specific implementation of this embodiment is as follows: the pipe in the vacuum system is inserted into the second connecting pipe 301, the gear ring 311 is rotated, so that the gear ring 311 drives the gear 312 to rotate, the gear 312 drives the tooth plate 309 to move, and the tooth plate 309 drives the clamping block 310 to clamp the pipe. This clamping method can clamp pipes of different diameters. After clamping the pipe, the second threaded rod 314 is rotated, so that the second threaded rod 314 drives the connecting block 315 and the friction pad 316 to move, so that the friction pad 316 is in close contact with the gear ring 311, thereby achieving the effect of limiting the gear ring 311. As a result, when air is added to the extrusion chamber 303, the first threaded rod 307 is rotated. Since the first threaded rod 307 is threadedly connected to the piston tube 304, when the first threaded rod 307 is rotated, the first threaded rod 307 drives the adjustment block 306 and the piston block 305 to move, thereby squeezing the gas in the piston tube 304 to the inner wall of the extrusion chamber 303, thereby pressurizing the extrusion chamber 303, causing the extrusion chamber 303 to expand. At this time, the elastic tube 302 is deformed under force, causing the elastic tube 302 to wrap the pipe, thereby achieving a sealing effect between the pipe and the second connecting pipe 301.

[0041] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0042] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An absolute pressure metal film capacitance vacuum gauge, comprising a housing (1), characterized in that: A first connecting tube (11) is fixedly connected to one side of the shell (1), a metal film (12), a ceramic block (13) and a mounting block (14) are fixedly connected to the inner cavity of the shell (1), an alarm component (2) is provided in the inner cavity of the mounting block (14), a clamping mechanism (3) is provided on one side of the first connecting tube (11), the alarm component (2) includes a groove (201) opened at the bottom of the mounting block (14), the inner cavity of the groove (201) is slidably connected to an isolation component, the isolation component is used to isolate the vacuum chamber (17) into a first negative pressure chamber (202) and a second negative pressure chamber (203), and the isolation component includes a sliding plate (209) slidably connected to the inner cavity of the groove (201); A through hole (210) is provided on one side of the sliding plate (209), and a fixed block (211) is fixedly connected to the inner wall of the through hole (210), and two springs (212) are fixedly connected to both sides of the fixed block (211), and one end of the two springs (212) away from the fixed block (211) is fixedly connected to a sliding bar (213), and opposite sides of the two sliding bars (213) are fixedly connected to metal contact blocks (214) used in conjunction with the first metal block (204), the second metal block (205) and the third metal block (206), and a connecting wire (215) is fixedly connected between the opposite sides of the two metal contact blocks (214), and the inner cavity of the mounting block (14) is fixedly connected to two metal connecting bars (216), one of the metal connecting bars (216) is connected to the internal capacitor (15) through a wire, and the other metal connecting bar (216) is connected to the outside through a wire to derive a capacitance signal; Two sealing rings (217) are fixedly connected to the surface of the sliding plate (209), and the surfaces of the two sealing rings (217) are in close contact with the inner wall of the groove (201). The inner wall of the groove (201) is fixedly connected to a spacer (218) used in conjunction with the sliding plate (209).

2. The absolute pressure metal film capacitance vacuum gauge according to claim 1, characterized in that: The bottom of the ceramic block (13) is fixedly connected to an internal capacitor (15) and an external capacitor (16), and the external capacitor (16) is connected to the outside through a wire to derive a capacitance signal. The housing (1) is separated into a vacuum chamber (17) and a detection chamber (18) by a metal film (12), and the detection chamber (18) is communicated with the first connecting tube (11).

3. The absolute pressure metal film capacitance vacuum gauge according to claim 2, characterized in that: Two first metal blocks (204), two second metal blocks (205) and two third metal blocks (206) are fixedly connected to the inner wall of the groove (201); three miniature sound and light alarms (207) and a battery (208) are fixedly connected to the surface of the housing (1); one of the first metal blocks (204), one of the second metal blocks (205) and one of the third metal blocks (206) are electrically connected to the three miniature sound and light alarms (207), respectively; another first metal block (204), another second metal block (205) and another third metal block (206) are all electrically connected to the battery (208); and the three miniature sound and light alarms (207) are all electrically connected to the battery (208).

4. The absolute pressure metal film capacitance vacuum gauge according to claim 1, characterized in that: The clamping mechanism (3) comprises a second connecting tube (301) threadedly connected to one side of the first connecting tube (11); one side of the second connecting tube (301) is in communication with the first connecting tube (11); an elastic tube (302) is fixedly connected to the inner wall of the second connecting tube (301); an extrusion cavity (303) is formed between the elastic tube (302) and the second connecting tube (301); a clamping assembly is provided on one side of the second connecting tube (301); and a piston assembly is provided on the surface of the second connecting tube (301).

5. The absolute pressure metal film capacitance vacuum gauge according to claim 4, characterized in that: The piston assembly comprises a piston tube (304) fixedly connected to one side of the second connecting tube (301); a piston block (305) is slidably connected to the inner cavity of the piston tube (304); the surface of the piston block (305) is in close contact with the inner wall of the piston tube (304); an adjusting block (306) is fixedly connected to one side of the piston block (305); a first threaded rod (307) is rotatably connected to one side of the adjusting block (306); the surface of the first threaded rod (307) is threadedly connected to the inner wall of the piston tube (304).

6. The absolute pressure metal film capacitance vacuum gauge according to claim 4, characterized in that: The clamping assembly includes a fixing ring (308) fixedly connected to one side of the second connecting tube (301), an inner cavity of the fixing ring (308) is slidably connected to a tooth plate (309), the number of the tooth plates (309) is several, one side of the tooth plate (309) is fixedly connected to a clamping block (310), one side of the fixing ring (308) is rotatably connected to a gear ring (311), one side of the second connecting tube (301) is rotatably connected to a gear (312), and the tooth plate (309) and the gear ring (311) are both meshed and connected to the gear (312).

7. The absolute pressure metal film capacitance vacuum gauge according to claim 6, characterized in that: An L-shaped plate (313) is fixedly connected to one side of the second connecting tube (301), a second threaded rod (314) is threadedly connected to the inner cavity of the L-shaped plate (313), one end of the second threaded rod (314) is fixedly connected to a connecting block (315), and one side of the connecting block (315) is fixedly connected to a friction pad (316) used in conjunction with the gear ring (311).

8. The absolute pressure metal film capacitance vacuum gauge according to claim 6, characterized in that: A T-shaped rod (317) is fixedly connected to one side of the tooth plate (309), and the surface of the T-shaped rod (317) is slidably connected to the inner wall of the fixing ring (308).

Images