Optical waveguide array structure and optical device

Abstract

The invention relates to an optical waveguide array structure and an optical device. The optical waveguide array structure comprises: a main waveguide having a first input end and a first output end away from the first input end; a plurality of auxiliary waveguides, wherein any auxiliary waveguide comprises a second input part and a second output part far away from the second input part; the second input part is arranged close to the main waveguide and has a first state and a second state; in the first state, the effective refractive index of the second input part is different from the effective refractive index of the main waveguide, and an optical signal is transmitted in the main waveguide in the direction from the first input end to the first output end. And in the second state, the effective refractive index of the second input part is the same as the effective refractive index of the main waveguide, and the optical signal in the main waveguide is coupled to the second input part and is transmitted from the second input part to the second output part. In the optical waveguide array structure, no matter the optical signal is transmitted from any auxiliary waveguide, only one coupling path selection is carried out, the optical loss is small, the integrity of the optical signal is good, and the consistency of the output optical signal is good.

Description

Technical Field

[0001] The present application relates to the technical field of optoelectronic devices, and particularly to an optical waveguide array structure and an optical device. Background Art

[0002] Currently, an optical phased array (OPA) controls the phase of optical signals in each channel to regulate the propagation direction of the output light beam. Compared with traditional radio frequency phased arrays, the optical phased array has higher precision and can achieve fast and accurate non-mechanical small solid-state two-dimensional light beam scanning. Optical devices based on optical waveguide arrays have extensive applications in optical detection and ranging systems, such as autonomous vehicles, holography, virtual reality, biological imaging, and free space optical communication.

[0003] However, when optical signals are transmitted in each channel of an optical waveguide array, they often need to experience multiple path selections. The more path selections there are, the more serious the optical loss is, which in turn affects the integrity of optical signal transmission. Summary of the Invention

[0004] Based on this, it is necessary to provide an optical waveguide array structure that can improve the integrity of optical signal transmission, and at the same time provide an optical device including the foregoing optical waveguide array structure.

[0005] An optical waveguide array structure includes:

[0006] A main waveguide having a first input end and a first output end far from the first input end; and

[0007] A plurality of sub-waveguides, any one of the sub-waveguides including a second input portion and a second output portion far from the second input portion; the second input portion is disposed adjacent to the main waveguide and has a first state and a second state; in the first state, the effective refractive index of the second input portion is different from that of the main waveguide, and the optical signal is transmitted inside the main waveguide along the direction from the first input end to the first output end; in the second state, the effective refractive index of the second input portion is the same as that of the main waveguide, and the optical signal in the main waveguide is coupled to the second input portion and transmitted from the second input portion to the second output portion.

[0008] In one embodiment, the optical waveguide array structure includes a plurality of metal films, and the plurality of metal films are provided in one-to-one correspondence with the second input portions of the plurality of sub-waveguides; the metal film can move relative to the corresponding second input portion to make the second input portion in the first state when approaching and covering the second input portion, and make the second input portion in the second state when moving away from the second input portion.

[0009] In one embodiment, the main waveguide is a straight waveguide; the second input part is arranged in parallel with the main waveguide, and / or the second output parts of the plurality of sub-waveguides are arranged in parallel with the main waveguide.

[0010] In one embodiment, on one side or both sides adjacent to the main waveguide, a plurality of the second input parts are arranged along the direction from the first input end to the first output end.

[0011] In one embodiment, the sub-waveguide includes an optical transmission part connected between the second input part and the second output part. The optical transmission part includes a straight transmission part and two bent transmission parts. The second input part, one of the bent transmission parts, the straight transmission part, the other bent transmission part, and the second output part are connected in sequence.

[0012] In one embodiment, the length of the main waveguide is greater than the length of any one of the sub-waveguides.

[0013] In one embodiment, the plurality of sub-waveguides are arranged in sequence along the direction from the first input end to the first output end, and their lengths decrease in sequence.

[0014] In one embodiment, the lengths of the second input parts of the plurality of sub-waveguides are equal; and / or the second input parts of the plurality of sub-waveguides are arranged at equal intervals along the direction from the first input end to the first output end.

[0015] An optical device, comprising:

[0016] The above-mentioned optical waveguide array structure;

[0017] A substrate, on which the optical waveguide array structure is arranged; and

[0018] A light source, installed on the substrate and corresponding to the first input end, for sending the optical signal to the first input end.

[0019] In one embodiment, the optical device further includes a control circuit, which is respectively connected to the light source and the optical waveguide array structure. When the optical waveguide array structure includes a metal film, the control circuit can control the activities of the plurality of metal films so that the plurality of second input parts are selectively in the second state.

[0020] In the above optical waveguide array structure, the effective refractive index of the second input part can be changed, so as to present different effective refractive indices in the first state and the second state. When the effective refractive index of the second input part is the same as that of the main waveguide, the second input part can be mutually coupled with the main waveguide, so that the optical signal transmitted along the main waveguide is coupled into the second input part and the transmission path is changed. When the effective refractive index of the second input part is different from that of the main waveguide, the second input part cannot be coupled with the main waveguide, so that the optical signal transmitted in the main waveguide will not be coupled into the second input part, but continue to be transmitted along the main waveguide to the first output end until it encounters another second input part that can be coupled with the main waveguide. In this way, only by controlling and adjusting the states of the second input parts in multiple sub-waveguides, the change of the optical signal transmission path can be realized, and no matter the optical signal is output from the second output part of any sub-waveguide, it only passes through the coupling path selection once, so the optical loss is small, which helps to improve the integrity of the optical signal transmission and ensure the quality of the optical signal transmission, and the consistency of the optical signals output from each second output part is relatively good.

[0021] In the above optical device, due to the above optical waveguide array structure, its optical loss is small, the integrity of the optical signal transmission is good, the quality of the optical signal transmission is high, and the consistency of the optical signals output from each path is relatively good. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 It is a top view of the optical waveguide array structure according to an embodiment of the present application, wherein the second input part of a sub-waveguide is coupled with the main waveguide;

[0024] Figure 2 is Figure 1 a schematic diagram showing that multiple sub-waveguides in the shown optical waveguide array structure are not coupled with the main waveguide;

[0025] Figure 3 It is a schematic structural diagram of the optical waveguide array structure according to another embodiment of the present application;

[0026] Figure 4 It is a schematic structural diagram of the optical waveguide array structure according to still another embodiment of the present application;

[0027] Description of the reference numerals:

[0028] 10. Optical waveguide array structure; 100. Main waveguide; 110. First input end; 120. First output end; 200. Sub-waveguide; 210. Second input part; 220. Second output part; 230. Optical transmission part; 231. Straight transmission part; 232. Bending transmission part; 300. Metal film. Detailed implementation manners

[0029] To make the above objects, features, and advantages of the present application more apparent and understandable, the following will describe the detailed implementation manners of the present application with reference to the accompanying drawings. Many specific details are set forth in the following description to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0030] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application.

[0031] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0032] In the present application, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0033] In this application, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0034] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.

[0035] Combined Figure 1 With Figure 2 As shown, this application protects an optical waveguide array structure 10, which includes a main waveguide 100 and a plurality of sub-waveguides 200. The main waveguide 100 has a first input end 110 and a first output end 120 far from the first input end 110. Among the plurality of sub-waveguides 200, any sub-waveguide 200 includes a second input portion 210 and a second output portion 220 far from the second input portion 210. The second input portion 210 is disposed adjacent to the main waveguide 100 and has a first state and a second state. In the first state, the effective refractive index of the second input portion 210 is different from that of the main waveguide 100, and the optical signal is transmitted inside the main waveguide 100 along the direction from the first input end 110 to the first output end 120. In the second state, the effective refractive index of the second input portion 210 is the same as that of the main waveguide 100, and the optical signal in the main waveguide 100 is coupled to the second input portion 210 and transmitted from the second input portion 210 to the second output portion 220.

[0036] It can be understood that the effective refractive index of the second input portion 210 can be changed, so as to exhibit different effective refractive indices in the first state and the second state. When the effective refractive index of the second input portion 210 is the same as that of the main waveguide 100, the second input portion 210 can be mutually coupled with the main waveguide 100, so that the optical signal transmitted along the main waveguide 100 is coupled into the second input portion 210 and the transmission path is changed. When the effective refractive index of the second input portion 210 is different from that of the main waveguide 100, the second input portion 210 cannot be coupled with the main waveguide 100, so that the optical signal transmitted in the main waveguide 100 will not be coupled into the second input portion 210, but continues to be transmitted to the first output end 120 along the main waveguide 100 until it encounters another second input portion 210 that can be coupled with the main waveguide 100.

[0037] In this way, only by controlling and adjusting the states of the second input portions 210 in the plurality of sub-waveguides 200, the change of the optical signal transmission path can be realized, and no matter the optical signal is output from the second output portion 220 of any one of the sub-waveguides 200, it only passes through a coupling path selection once, so that the optical loss is small, which helps to improve the integrity of the optical signal transmission and ensure the quality of the optical signal transmission, and the consistency of the optical signals output from the respective second output portions 220 is relatively good.

[0038] Specifically, in the present application, the optical waveguide array structure 10 includes a plurality of metal films 300, and the plurality of metal films 300 are arranged in one-to-one correspondence with the second input portions 210 of the plurality of sub-waveguides 200. The metal film 300 can move relative to the corresponding second input portion 210 to make the second input portion 210 in the first state when approaching and covering the second input portion 210, and make the second input portion 210 in the second state when away from the second input portion 210. It can be understood that by correspondingly arranging the metal films 300 for the second input portions 210 of the plurality of sub-waveguides 200, the effective refractive index of the second input portion 210 is changed by the movement of the metal film 300 relative to the second input portion 210.

[0039] It should be noted that the projection of the metal film 300 on the main waveguide 100 needs to completely cover the projection of the second input portion 210 on the main waveguide 100, so that when the metal film 300 approaches and covers the second input portion 210, all of the second input portion 210 will contact the metal film 300 and the effective refractive index is changed.

[0040] Specifically, the metal film 300 is arranged above the second input portion 210. Without the action of an electric field, the metal film 300 is in a suspended state; and under the action of an electric field, the suspended metal film 300 moves due to the electric field / electrostatic attraction and adheres to the second input portion 210, thereby changing the effective refractive index of the second input portion 210.

[0041] For the convenience of description, it is set thatFigure 1 If the multiple secondary waveguides 200 shown are 1#, 2#, 3# and 4# respectively, then Figure 1 in the 4# secondary waveguide 200, the second input portion 210 is not covered by the metal film 300 because the metal film 300 is suspended, while Figure 1 in the 1#, 2# and 3# secondary waveguides 200, the second input portions 210 are all covered by the metal film 300. At this time, the optical signal in the main waveguide 100 will be coupled into the 4# secondary waveguide 200 to be transmitted along the 4# secondary waveguide 200. As Figure 2 shown, the second input portions 210 of the 1#, 2#, 3# and 4# secondary waveguides 200 are all covered by the metal film 300, so that the optical signal is transmitted inside the main waveguide 100 from the first input end 110 to the first output end 120.

[0042] In this application, the main waveguide 100 is a straight waveguide, and the second input portion 210 is arranged in parallel with the main waveguide 100. It can be understood that the second input portion 210 is located on one side of the main waveguide 100. By arranging the second input portion 210 in parallel and close to the main waveguide 100, all of the second input portion 210 can be coupled with the main waveguide 100. In addition, the optical signal is transmitted inside the main waveguide 100 along a straight line direction from the first input end 110 to the first output end 120 (i.e., Figure 1 the direction indicated by the X-axis in the figure, that is, the transverse direction of the optical waveguide array structure), and the optical loss can be reduced to the lowest, which helps to maintain the integrity of the optical signal.

[0043] In this application, the main waveguide 100 is a straight waveguide, and the second output portions 220 of the multiple secondary waveguides 200 are arranged in parallel with the main waveguide 100. It can be understood that the second output portions 220 of the multiple secondary waveguides 200 all extend along a direction parallel to the straight extension direction of the main waveguide 100. In this way, in the longitudinal direction perpendicular to the transverse direction (i.e., Figure 1 the direction indicated by the Y-axis in the figure), the multiple second output portions 220 and the first output end 120 are arranged at intervals, and the intervals between them are not sufficient to cause optical coupling, so as to jointly determine the longitudinal dimension of the overall structure.

[0044] Furthermore, on one side or both sides adjacent to the main waveguide 100, multiple second input portions 210 are arranged along the direction from the first input end 110 to the first output end 120. It can be understood that the second input portions 210 of the multiple secondary waveguides 200 can be located on the same side of the main waveguide 100 (as Figure 4 shown), or distributed on both sides of the main waveguide 100 (as Figure 1 , 2 , 3 shown), and at the same time, multiple second input portions 210 are also correspondingly arranged at multiple positions in the straight extension direction of the main waveguide 100 (as Figure 1 , 2, as shown in FIGS. 3 and 4, this can help maximize the utilization of space in this direction. By setting a relatively large number of secondary waveguides 200, the number of optical signal transmission paths is increased, and the length of the main waveguide 100 also determines the lateral dimension of the overall structure of the optical waveguide array structure.

[0045] Thus, the optical waveguide array structure 10 of the present application can achieve multi-port output with the shortest lateral dimension and longitudinal dimension, which helps to ensure the stability of optical signal transmission and the consistency of optical signal output from different ports, and is also beneficial to system integration and optical signal processing.

[0046] Continue to refer to Figure 1 As shown, specifically in the present application, the secondary waveguide 200 includes an optical transmission portion 230 connected between the second input portion 210 and the second output portion 220. The optical transmission portion 230 includes a straight transmission portion 231 and two bent transmission portions 232. The second input portion 210, one bent transmission portion 232, the straight transmission portion 231, the other bent transmission portion 232, and the second output portion 220 are sequentially connected. By setting the optical transmission portion 230, the smooth transmission of the optical signal from the second input portion 210 to the second output portion 220 can be realized. In addition, by making the optical transmission portion 230 have a three-section structure, the smooth connection of the second input portion 210, the optical transmission portion 230, and the second output portion 220 can be achieved, not only realizing the smooth transmission of the optical signal, but also providing a shorter transmission path for the optical signal to help reduce optical loss.

[0047] Specifically, in the present application, the straight transmission portion 231 is inclined relative to the main waveguide 100, and the value range of the included angle θ between the two is 40° to 50°. The curvature radius of the bent transmission portion 232 is greater than 10 μm. It can be understood that for the convenience of understanding, in the present application, the case where the included angle θ is equal to 45° is taken as an example for detailed description. Among the multiple secondary waveguides 200, the included angle θ between the straight transmission portion 231 of each optical transmission portion 230 and the main waveguide 100 is equal, and is equal to 45 degrees. In addition, the curvature radii of the two bent transmission portions 232 in any optical transmission portion 230 are equal, and the curvature radii of the bent transmission portions 232 of each optical transmission portion 230 are also equal. It can be understood that by limiting the inclination angle of the straight transmission portion 231 and the curvature radius of the bent transmission portion 232, the straight transmission portion 231 can realize the smooth transmission of the optical signal and provide a shorter transmission path for the optical signal.

[0048] Specifically in the present application, the length of the main waveguide 100 is greater than the length of any secondary waveguide 200. Such a setting can help make full use of the length of the main waveguide 100 to set a relatively large number of secondary waveguides 200 to achieve multi-port output. At the same time, since the optical signal needs to be transmitted inside the entire secondary waveguide 200, by making the length of the secondary waveguide 200 smaller, it can help shorten the transmission path of the optical signal and thus reduce optical loss.

[0049] Further, a plurality of sub-waveguides 200 are sequentially arranged along the direction from the first input end 110 to the first output end 120, and their lengths are sequentially decreasing. It can be understood that when any sub-waveguide 200 is coupled to the main waveguide 100, the transmission path of the optical signal is equal to the sum of the path of the optical signal transmitted on the main waveguide 100 and the path of the optical signal transmitted on the sub-waveguide 200. "A plurality of sub-waveguides 200 are sequentially arranged along the direction from the first input end 110 to the first output end 120" can be understood as that the second input parts 210 of the plurality of sub-waveguides 200 are sequentially arranged along the direction from the first input end 110 to the first output end 120. As Figure 1 shown, the second input parts 210 of the 1#, 2#, 3#, and 4# sub-waveguides 200 are sequentially arranged along the X-axis direction, and the lengths of the 1#, 2#, 3#, and 4# sub-waveguides 200 are sequentially decreasing. Further, since the lengths of the plurality of sub-waveguides 200 are gradually decreasing, for the 1# sub-waveguide 200 close to the first input end 110, when its second input part 210 is coupled to the main waveguide 100, the path of the optical signal transmitted in the main waveguide 100 is shorter, while the path of the optical signal transmitted in the 1# sub-waveguide 200 is longer. For the 4# sub-waveguide 200 close to the first output end 120, when its second input part 210 is coupled to the main waveguide 100, the path of the optical signal transmitted in the main waveguide 100 is longer, while the path of the optical signal transmitted in the 4# sub-waveguide 200 is shorter. Thus, when any sub-waveguide 200 is coupled to the main waveguide 100, the transmission paths of the optical signals can be made substantially equal, which helps to improve the consistency of the output optical signals.

[0050] Further, the lengths of the second input parts 210 of the plurality of sub-waveguides 200 are equal, so that when the second input parts 210 of the respective sub-waveguides 200 are coupled to the main waveguide 100, a consistent coupling loss can be maintained, which helps to improve the consistency of the output optical signals. It should be noted that the lengths of the second input parts 210 of the plurality of sub-waveguides 200 being equal can be understood as that the lengths of the second input parts 210 of the plurality of sub-waveguides 200 are equal to the coupling length at which optical coupling occurs between the main waveguide and the sub-waveguide during the transmission of the optical signal in the waveguide. When the coupling length is fixed, the optical coupling loss can be reduced to the minimum. As Figure 1 shown, the length of the second input part 210 in each sub-waveguide 200 is D.

[0051] As Figure 1As shown, in the present application, the second input portions 210 of the plurality of sub-waveguides 200 are arranged at equal intervals along the direction from the first input end 110 to the first output end 120. Such an arrangement can enable a relatively large number of sub-waveguides 200 to be provided on both sides of the main waveguide 100 without mutual interference between adjacent second input portions 210, and also helps to reasonably plan the shapes of the plurality of sub-waveguides 200 to facilitate controlling the consistency of the output optical signals.

[0052] It can be understood that for the plurality of sub-waveguides 200, they can be arranged on the same side of the main waveguide 100 (as Figure 4 shown), or they can also be distributed on both sides of the main waveguide 100 (as Figure 1 , 2 , and Figure 3 shown). As Figure 3 shown, when sub-waveguides 200 are provided on both sides of the main waveguide 100, for the two sub-waveguides 200, namely 1# and 2#, located on both sides of the main waveguide 100, their two second input portions 210 can be arranged oppositely and their projections on the main waveguide 100 completely overlap. At this time, the lengths of the two sub-waveguides 200, namely 1# and 2#, are equal. Or, as Figure 3 shown in Figure 3 for the two sub-waveguides 200, namely 3# and 4#, their second input portions 210 can also be arranged offset in the length direction of the main waveguide 100 and their projections on the main waveguide 100 do not overlap at all.

[0053] The present application also protects an optical device. The optical device includes a substrate (not shown), a light source (not shown), and the above-mentioned optical waveguide array structure 10. The optical waveguide array structure 10 is provided on the substrate. The light source is mounted on the substrate and is arranged corresponding to the first input end 110. The light source is used to send an optical signal to the first input end 110. It can be understood that the first input end 110 of the main waveguide 100 serves as the optical signal input port of the entire optical waveguide array structure to receive the optical signal sent by the light source, and the first output end 120 of the main waveguide 100 and the second output portions 220 of the plurality of sub-waveguides 200 both serve as the optical signal output ports of the entire optical waveguide array structure 10. Thus, the entire optical waveguide array structure has one optical signal input port and a plurality of optical signal output ports.

[0054] Further, the optical device includes a control circuit, which is respectively connected to the light source and the optical waveguide array structure 10. When the optical waveguide array structure 10 includes the metal film 300, the control circuit can control the activities of the plurality of metal films 300 so that the plurality of second input portions 210 are alternatively in the second state. It can be understood that the control circuit controls the activities of the metal film 300 so that the metal film 300 approaches and covers the second input portion 210 or moves away from the second input portion 210 and is suspended above the second input portion 210. In this way, the metal film 300 approaches or moves away from the corresponding second input portion 210 to cause the second input portion 210 to switch between the first state and the second state. At the same time, according to the received control instruction, the control circuit can control one or more of the plurality of metal films 300 to move, as long as it is ensured that only one second output portion 220 is in the second state and is coupled to the main waveguide 100.

[0055] It can be understood that when the user needs to make the optical signal transmit along a certain specific sub-waveguide 200, the control circuit can control the synchronous activities of the plurality of metal films 300 to cover the plurality of second input portions 210, and the second input portion 210 of the specific sub-waveguide 200 remains uncovered and is coupled to the main waveguide 100. Alternatively, the control circuit can also be made to control the movement of one metal film 300 corresponding to the second input portion 210 of the specific sub-waveguide 200 away from the second output portion 220, so that the second input portion 210 of the specific sub-waveguide 200 is coupled to the main waveguide 100, while the other plurality of metal films 300 all remain covering the second input portion 210 to prevent the second input portion 210 from being coupled to the main waveguide 100.

[0056] Specifically, the control circuit forms positive and negative electrodes on both sides of the metal film 300. The conduction of the positive and negative electrodes can generate an electric field, and the traction effect of the electric field can be used to move the metal film 300.

[0057] It can be understood that the optical device provided in this application can be an optical scanning device such as a lidar. The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as these combinations of technical features do not conflict, they should all be considered as the scope described in this specification.

[0058] The above-described embodiments only represent several implementation manners of this application. Their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of this application, several deformations and improvements can still be made, and these all belong to the protection scope of this application. Therefore, the protection scope of this application patent should be subject to the appended claims.

Claims

1. An optical waveguide array structure, characterized in that, Comprising: A main waveguide having a first input end and a first output end remote from the first input end; And A plurality of sub-waveguides, any one of the sub-waveguides including a second input portion and a second output portion remote from the second input portion; the second input portion is disposed adjacent to the main waveguide and has a first state and a second state; in the first state, the effective refractive index of the second input portion is different from the effective refractive index of the main waveguide, and an optical signal is transmitted inside the main waveguide along the direction from the first input end to the first output end; in the second state, the effective refractive index of the second input portion is the same as the effective refractive index of the main waveguide, and the optical signal in the main waveguide is coupled to the second input portion and transmitted from the second input portion to the second output portion.

2. The optical waveguide array structure according to claim 1, wherein The optical waveguide array structure includes a plurality of metal films, and the plurality of metal films are provided in one-to-one correspondence with the second input portions of the plurality of sub-waveguides; the metal film can move relative to the corresponding second input portion to make the second input portion in the first state when approaching and covering the second input portion, and make the second input portion in the second state when moving away from the second input portion.

3. The optical waveguide array structure according to claim 1, characterized in that, The main waveguide is a straight waveguide; the second input portion is arranged parallel to the main waveguide, and / or the second output portions of the plurality of sub-waveguides are arranged parallel to the main waveguide.

4. The optical waveguide array structure according to claim 3, wherein On one side or both sides adjacent to the main waveguide, a plurality of the second input portions are arranged along the direction from the first input end to the first output end.

5. The optical waveguide array structure according to claim 3, wherein, The sub-waveguide includes an optical transmission portion connected between the second input portion and the second output portion, and the optical transmission portion includes a straight transmission portion and two bent transmission portions, and the second input portion, one of the bent transmission portions, the straight transmission portion, the other bent transmission portion, and the second output portion are sequentially connected.

6. The optical waveguide array structure according to claim 1, characterized in that, The length of the main waveguide is greater than the length of any one of the sub-waveguides.

7. The optical waveguide array structure according to claim 6, wherein, The plurality of sub-waveguides are sequentially arranged along the direction from the first input end to the first output end, and the lengths are sequentially decreasing.

8. The optical waveguide array structure according to claim 4 or 7, characterized in that, The lengths of the second input portions of the plurality of sub-waveguides are equal; and / or the second input portions of the plurality of sub-waveguides are arranged at equal intervals along the direction from the first input end to the first output end.

9. An optical device, characterized in that, Comprising: The optical waveguide array structure according to any one of claims 1 to 8; A substrate, on which the optical waveguide array structure is disposed; And A light source, mounted on the substrate and corresponding to the first input end, and the light source is used to send the optical signal to the first input end.

10. The optical device according to claim 9, characterized in that, The optical device further includes a control circuit, and the control circuit is respectively connected to the light source and the optical waveguide array structure. When the optical waveguide array structure includes a metal film, the control circuit can control the plurality of metal films to move so that the plurality of second input portions are selectively in the second state.

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