An unlocking and lifting assembly in an ion implanter

Abstract

The present invention discloses an unlocking and lifting assembly for an ion implanter, comprising a base plate, a drive motor mounted thereon and connected to a ball screw transmission, a slider on the ball screw connected to a movable plate, a guide transmission rod fixedly disposed on either side of the movable plate, one end of an unlocking plate sleeved on the guide transmission rod and elastically connected to the movable plate via a spring, the other end of the unlocking plate extending to a wafer processing station; guide transmission rods located on either side of the unlocking plate, the ends of the guide transmission rods connected to one end of a first connecting rod, the other end of the first connecting rod tilted downward and movably connected to one end of a second connecting rod via a first rotating member, a second rotating member disposed at the other end of the second connecting rod, and a lifting block disposed on the inner side of each of the first and second rotating members, the lifting block being capable of rotating and lifting the wafer under the drive of the guide transmission rod. The present invention can simultaneously unlock and lift the target plate assembly by providing a drive motor.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing equipment, and in particular to an unlocking and lifting component in an ion implanter and a method thereof. Background Art

[0002] Wafers, a core material in semiconductor manufacturing, are thin, circular sheets made of high-purity single-crystal silicon or other semiconductor materials. They are primarily used in the manufacture of integrated circuits, sensors, optoelectronic devices, and other semiconductor products. An ion implanter is used to implant ions into the wafer surface to alter its electrical properties. This process is typically performed in a vacuum environment. The wafer is placed on a target disk, which secures the wafer and ensures its precise position during the implantation process.

[0003] To prevent wafer displacement during high-speed rotation of the target, existing targets are typically equipped with electrostatic adsorption or mechanical stoppers. However, after wafer processing is complete, mechanical stoppers cannot be equipped with both an unlocking mechanism and a lifting mechanism due to the limited space between the target and the base. Consequently, existing mechanical stoppers are often manually removed.

[0004] Therefore, it is necessary for us to improve such a structure to overcome the above-mentioned defects. Summary of the Invention

[0005] The purpose of the present invention is to provide an unlocking and lifting assembly in an ion implanter to solve the problems existing in the prior art.

[0006] The above technical objectives of the present invention are achieved through the following technical solutions:

[0007] An unlocking and lifting assembly in an ion implanter includes a base plate, an output end of a drive motor arranged below the base plate and transmission-connected to a ball screw arranged above the base plate, a slider arranged on the ball screw is connected to a movable plate that moves synchronously, a guide transmission rod is fixedly provided on both sides of the movable plate, one end of the unlocking plate is sleeved on the guide transmission rod and elastically connected to the movable plate by a spring, and the other end of the unlocking plate extends to a wafer processing station of a rotating target disk.

[0008] Furthermore, the guide transmission rod is respectively located on both sides of the unlocking plate, the end portion of the guide transmission rod is connected to one end of the first connecting rod, the other end of the first connecting rod is inclined downward, and is movably connected to one end of the second connecting rod through the first rotating member, and a second rotating member is provided at the other end of the second connecting rod, and a lifting block is respectively provided at the inner end of the first rotating member and the second rotating member. The lifting block can be rotated to lift the wafer under the push of the guide transmission rod, and the two lifting blocks located on opposite sides are connected by a synchronous rotating shaft, and a torsion spring for resetting the lifting block is provided on the synchronous rotating shaft.

[0009] Furthermore, a movable base is provided at the bottom of the unlocking plate, and a through hole is provided on each side of the movable base, and the movable base is sleeved on the guide shaft through the through hole. The two ends of the guide shaft are respectively installed through a positioning seat, and the positioning seat is fixedly set on the top surface of the movable base plate. A sliding block is provided on the bottom surface of the movable base plate, and the sliding block cooperates with a slide rail arranged parallel to the side of the ball screw.

[0010] Furthermore, the working method of the unlocking and lifting assembly in the ion implanter is as follows:

[0011] S1. Unlock

[0012] After the wafer on the rotating target plate is processed, it enters the unlocking and lifting stage. The drive motor is started to drive the ball screw, so that the slider and movable plate set on the ball screw move forward, and then the unlocking plate connected to the movable plate moves, thereby completing the unlocking action;

[0013] S2. Lifting

[0014] After unlocking the wafer, the unlocking plate will continue to move until the movable base connected to the bottom of the unlocking plate reaches the position of the positioning seat. Due to the obstruction of the positioning seat, the unlocking plate cannot move forward any further.

[0015] Then, the movable plate will compress the spring and continue to move forward under the action of the ball screw and the slider. Since the unlocking plate is blocked, the guide transmission rod fixedly connected to the movable plate will move forward along the shaft hole at the end of the unlocking plate.

[0016] The first connecting rod and the second connecting rod arranged at the end of the guide transmission rod will rotate under the transmission of the guide transmission rod, thereby driving the lifting blocks arranged at the inner ends of the first rotating member and the second rotating member to rotate, thereby completing the lifting action.

[0017] In summary, the present invention has the following beneficial effects:

[0018] The structure is simple and the design is ingenious. By setting a drive motor, the unlocking plate can be driven to complete linear movement and the lifting movement of the jacking block arranged on the side of the unlocking plate, thereby greatly reducing the installation space of the unlocking and lifting assembly, and at the same time realizing the unlocking and lifting actions of the target plate assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the unlocking and lifting assembly described in the present invention.

[0020] Figure 2 It is a top view of the unlocking and lifting assembly described in the present invention. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below with reference to diagrams and specific embodiments.

[0022] like Figures 1 to 2 As shown, the present invention proposes an unlocking and lifting assembly in an ion implanter, including a base plate 1, an output end of a driving motor 2 arranged below the base plate 1 is transmission-connected to a ball screw 3 arranged above the base plate 1, a slider 4 arranged on the ball screw 3 is connected to a movable plate 5 that moves synchronously, and a guide transmission rod 6 is fixedly provided on both sides of the movable plate 5, one end of an unlocking plate 7 is sleeved on the guide transmission rod 6, and is elastically connected to the movable plate 5 by a spring 8, and the other end of the unlocking plate 7 extends to the wafer processing station of the rotating target disk.

[0023] The guide transmission rod 6 is respectively located on both sides of the unlocking plate 7, and the end of the guide transmission rod 6 is connected to one end of the first connecting rod 61. The other end of the first connecting rod 61 is inclined downward and is movably connected to one end of the second connecting rod 63 through the first rotating member 62. A second rotating member 64 is provided at the other end of the second connecting rod 63, and a lifting block 65 is provided at the inner end of the first rotating member 62 and the second rotating member 64 respectively. The lifting block 65 can be rotated to lift the wafer under the push of the guide transmission rod 6. The two lifting blocks 65 on opposite sides are connected by a synchronous rotating shaft 66, and a torsion spring 67 for resetting the lifting block 65 is provided on the synchronous rotating shaft 66.

[0024] A movable base 71 is provided at the bottom of the unlocking plate 7, and a through hole is provided on both sides of the movable base 71, and is sleeved on the guide shaft 72 through the through hole. The two ends of the guide shaft 72 are respectively installed through a positioning seat 73, and the positioning seat 73 is fixedly set on the top surface of the movable base plate 74. A sliding block 75 is provided on the bottom surface of the movable base plate 74, and the sliding block 75 cooperates with a slide rail 76 arranged parallel to the side of the ball screw 3.

[0025] The working method of the unlocking and lifting assembly in the ion implanter is as follows:

[0026] S1. Unlock

[0027] After the wafer on the rotating target is processed, it enters the unlocking and lifting stage. The drive motor 2 is started to drive the ball screw 3, so that the slider 4 and the movable plate 5 set on the ball screw 3 move forward, and then the unlocking plate 7 connected to the movable plate 5 moves, thereby completing the unlocking action;

[0028] S2. Lifting

[0029] After the wafer is unlocked, the unlocking plate 7 will continue to move until the movable base 71 connected to the bottom of the unlocking plate 7 reaches the position of the positioning seat 73. Due to the obstruction of the positioning seat 73, the unlocking plate 7 cannot move forward any further.

[0030] Then, the movable plate 5 will compress the spring 8 and continue to move forward under the action of the ball screw 3 and the slider 4. Since the unlocking plate 7 is blocked, the guide transmission rod 6 fixedly connected to the movable plate 5 will move forward along the shaft hole at the end of the unlocking plate 7.

[0031] The first connecting rod 61 and the second connecting rod 63 provided at the ends of the guide transmission rod 6 will rotate under the transmission of the guide transmission rod 6, thereby driving the lifting block 65 provided at the inner ends of the first rotating member 62 and the second rotating member 64 to rotate, thereby completing the lifting action.

[0032] In this document, the directions or positional relationships indicated by terms such as "up", "down", "front", "back", "left", "right", "top", "bottom", "inside", "outside", "vertical", and "horizontal" are based on the directions or positional relationships shown in the accompanying drawings and are only for the clarity of the technical solution and the convenience of description, and therefore should not be understood as limiting the present invention.

[0033] As used herein, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion of elements other than the listed elements and may also include additional elements not specifically listed.

[0034] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. An unlocking and lifting assembly in an ion implanter, characterized in that: The invention comprises a base plate (1), an output end of a driving motor (2) arranged below the base plate (1) is transmission-connected to a ball screw (3) arranged above the base plate (1), a slider (4) arranged on the ball screw (3) is connected to a movable plate (5) that moves synchronously, a guide transmission rod (6) is fixedly arranged on both sides of the movable plate (5), one end of an unlocking plate (7) is sleeved on the guide transmission rod (6) and elastically connected to the movable plate (5) via a spring (8), and the other end of the unlocking plate (7) extends to a wafer processing station of a rotating target disk; The guide transmission rod (6) is respectively located on both sides of the unlocking plate (7), and the end of the guide transmission rod (6) is connected to one end of the first connecting rod (61), and the other end of the first connecting rod (61) is tilted downward and movably connected to one end of the second connecting rod (63) through the first rotating member (62). A second rotating member (64) is provided at the other end of the second connecting rod (63), and a lifting block (65) is provided at the inner side end of the first rotating member (62) and the second rotating member (64). The lifting block (65) can be rotated to lift the wafer under the push of the guide transmission rod (6), and the two lifting blocks (65) on the opposite sides are connected by a synchronous rotating shaft (66), and a torsion spring (67) for resetting the lifting block (65) is provided on the synchronous rotating shaft (66); The bottom of the unlocking plate (7) is provided with a movable base (71), and a through hole is respectively provided on both sides of the movable base (71), and the movable base (71) is sleeved on the guide shaft (72) through the through hole. The two ends of the guide shaft (72) are respectively installed through a positioning seat (73), and the positioning seat (73) is fixedly set on the top surface of the movable base plate (74). A sliding block (75) is provided on the bottom surface of the movable base plate (74), and the sliding block (75) cooperates with a slide rail (76) arranged parallel to the side of the ball screw (3).

2. The unlocking and lifting assembly in the ion implanter according to any one of claim 1, characterized in that: The working method of the unlocking and lifting assembly in the ion implanter is as follows: S1. Unlock After the wafer on the rotating target disk is processed, the unlocking and lifting stage is entered, and the driving motor (2) is started to drive the ball screw (3), so that the slider (4) and the movable plate (5) provided on the ball screw (3) move forward, thereby driving the unlocking plate (7) connected to the movable plate (5) to move, thereby completing the unlocking action; S2. Lifting After the wafer is unlocked, the unlocking plate (7) will continue to move until the movable base (71) connected to the bottom of the unlocking plate (7) reaches the position of the positioning seat (73). Due to the obstruction of the positioning seat (73), the unlocking plate (7) cannot continue to move forward; Then, the movable plate (5) will continue to move forward under the action of the ball screw (3) and the slider (4) by compressing the spring (8). Since the unlocking plate (7) is blocked, the guide transmission rod (6) fixedly connected to the movable plate (5) will move forward along the shaft hole at the end of the unlocking plate (7); The first connecting rod (61) and the second connecting rod (63) provided at the end of the guide transmission rod (6) will rotate under the transmission of the guide transmission rod (6), thereby driving the lifting block (65) provided at the inner side end of the first rotating member (62) and the second rotating member (64) to rotate, thereby completing the lifting action.

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