Attachment for substrate support member and assembly jig for attachment for substrate support member

Abstract

The substrate support member attachment is attached to a substrate support member when the substrate support member that supports a substrate is held by a transfer jig and is transferred to a substrate working machine, the substrate support member attachment comprising: a first support member that is attached to one side of the substrate support member; a second support member mounted on the other side opposite to the one side of the substrate support member; a connecting portion that connects the first support member and the second support member so that the distance between the first support member and the second support member can be adjusted; and a held part held by the transport jig.

Description

Technical Field

[0001] This specification discloses an attachment for a substrate support member and an assembly jig for the attachment for the substrate support member. Background Art

[0002] Conventionally, the following has been disclosed: A substrate support member that supports a substrate from below for a printing apparatus that prints solder on the substrate moves between a printing machine and a storage rack while being held by a transfer jig (for example, Patent Document 1).

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: International Publication No. 2016 / 199207 Summary of the Invention

[0006] Problems to be Solved by the Invention

[0007] In addition, the substrate support member is sometimes held by the transfer jig via an attachment for the substrate support member. The width of the substrate varies depending on the type of the substrate. Therefore, when the substrate support member is attached to the transfer jig via the attachment for the substrate support member, it is necessary to prepare an attachment for the substrate support member corresponding to the width of the substrate.

[0008] The main object of the present disclosure is to attach the substrate support member to the transfer member via the attachment for the substrate support member regardless of the width of the substrate.

[0009] The present disclosure employs the following means to achieve the above main object.

[0010] Means for Solving the Problems

[0011] A first attachment for a substrate support member of the present disclosure is attached to the substrate support member when holding the substrate support member that supports a substrate by a transfer jig and transporting the substrate to a substrate processing machine. The first attachment for a substrate support member includes: a first support member attached to one side of the substrate support member; a second support member attached to the other side of the substrate support member facing the one side; a connecting portion connecting the first support member and the second support member in a manner that enables adjustment of the interval between the two; and a held portion held by the transfer jig.

[0012] In this first attachment for a substrate support member, the first support member and the second support member are connected in a manner that enables change in the width between the two. Thus, the substrate support member can be attached to the transfer member via the attachment for the substrate support member regardless of the width of the substrate.

[0013] The assembly jig of the present disclosure is an assembly jig for an attachment for a substrate support member. When the substrate support member that supports a substrate is held by a pair of opposing holding portions of a transfer jig and transferred to a substrate processing machine, the attachment for the substrate support member is attached to the substrate support member. The attachment for the substrate support member includes: a first support member attached to one side of the substrate support member; a second support member attached to the other side of the substrate support member opposite to the one side; a first connecting member that connects one end portion of the first support member and one end portion of the second support member and forms a first held portion that is held by one of the pair of holding portions of the transfer jig; and a second connecting member that connects the other end portion of the first support member and the other end portion of the second support member and forms a second held portion that is held by the other of the pair of holding portions of the transfer jig. The gist of the assembly jig for the attachment for the substrate support member is to include: a first positioning member that detachably holds the first connecting member to position the first held portion at a first position held by the one holding portion; a second positioning member that detachably holds the second connecting member to position the second held portion at a second position held by the other holding portion; a first moving portion that supports the first support member in parallel with a center line passing through the first position and the second position and is movable in an orthogonal direction orthogonal to the center line; and a second moving portion that supports the second support member on the side opposite to the first moving portion with respect to the center line in parallel with the center line and is movable in an orthogonal direction orthogonal to the center line.

[0014] In this assembly jig, the attachment for the substrate support member is assembled as follows. That is, first, the distance from the center line to the first moving portion and the distance from the center line to the second moving portion are set to widths corresponding to the width of the substrate support member in the orthogonal direction. In this state, the first and second support members are held by the assembly jig. Then, the first and second held portions are held by the first and second positioning members, the one end portions of the first and second support members are connected to each other by the first connecting member, and the other end portions of the first and second support members are connected to each other by the second connecting member. Thereby, the center position of the held portion in the orthogonal direction can be made to coincide with the center position of the substrate support member. Therefore, the substrate support member can be stably held by the transfer jig.

[0015] The accessory for the second substrate support member of the present disclosure is mounted on the substrate support member when the substrate support member for supporting the substrate is held by a pair of opposing holding portions of a transfer jig and transferred to a substrate processing machine. The gist thereof is to include: a first support member mounted on one side of the substrate support member; a second support member mounted on the other side of the substrate support member opposite to the one side; a third support member mounted between the first support member and the second support member and extending along the extending directions of the first support member and the second support member; and a pair of held portions provided at both ends in the extending direction of the third support member and held by the pair of holding portions of the transfer jig.

[0016] In this accessory for the second substrate support member, the first support member to the third support member can be mounted on the substrate support member at positions corresponding to the width of the substrate member. Thus, regardless of the width of the substrate, the substrate support member can be mounted on the transfer member via the accessory for the substrate support member. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of the working device 10.

[0018] Figure 2 is a perspective view showing the internal structure of the working device 10.

[0019] Figure 3 is a side view showing the internal structure of the working device 10.

[0020] Figure 4 is a perspective view of the transfer jig 70.

[0021] Figure 5A is a perspective view showing a state where an accessory 90 for the substrate support member is mounted on a substrate support member 80 with a narrow width.

[0022] Figure 5B is a perspective view showing a state where an accessory 90 for the substrate support member is mounted on a substrate support member 80 with a wide width.

[0023] Figure 5C is a perspective view when observing the substrate support member 80 on which the accessory 90 for the substrate support member is mounted from the lower surface side.

[0024] Figure 6A is a bottom view showing a state where a first engaging member 74 and a second engaging member 76 engage a first pin member 93a and a second pin member 94a in a correct orientation.

[0025] Figure 6BIt is a side view showing a state where the first engaging member 74 and the second engaging member 76 engage the first pin member 93a and the second pin member 94a in the correct orientation.

[0026] Figure 7A It is a bottom view showing a state where the first engaging member 74 and the second engaging member 76 engage the first pin member 93a and the second pin member 94a in the wrong orientation.

[0027] Figure 7B It is a side view showing a state where the first engaging member 74 and the second engaging member 76 engage the first pin member 93a and the second pin member 94a in the wrong orientation.

[0028] Figure 8 It is a perspective view showing a schematic structure of the assembly jig 110.

[0029] Figure 9A It is a perspective view of the first positioning member 112.

[0030] Figure 9B It is a perspective view of the second positioning member 113.

[0031] Figure 10 It is a flowchart showing an example of a process for attaching an accessory for the substrate support member.

[0032] Figure 11A It is an explanatory diagram showing a state where the substrate support member 80 is placed on the placement table 111 of the assembly jig 110.

[0033] Figure 11B It is an explanatory diagram showing a state where the first connecting member 93 and the second connecting member 94 are placed on the substrate support member 80.

[0034] Figure 11C It is an explanatory diagram showing a state where the first accessory member 91 and the second accessory member 92 are placed on the substrate support member 80.

[0035] Figure 11D It is an explanatory diagram showing a state where the first rail members 91b and 92b are connected to each other by the first connecting member 93 and the second rail members 91c and 92c are connected to each other by the second connecting member 94.

[0036] Figure 12A It is a perspective view of the substrate support member 80 with the accessory 190 for the substrate support member mounted thereon when viewed from the upper surface side.

[0037] Figure 12B It is a perspective view of the substrate support member 80 with the accessory 190 for the substrate support member mounted thereon when viewed from the lower surface side.

[0038] Figure 13 It is a flowchart showing the attachment installation process for the substrate support member representing the modified example.

[0039] Figure 14A It is an explanatory diagram of a modified example showing a state where the first rail members 91b and 92b are connected to each other by the first connection member 93 and the second rail members 91c and 92c are connected to each other by the second connection member 94.

[0040] Figure 14B It is an enlarged view of the mounted portions 91f and 92f in a state where the second connection member 94 is removed. Detailed implementation manner

[0041] Next, a manner for implementing the present disclosure will be described with reference to the accompanying drawings.

[0042] Figure 1 It is a schematic structural diagram of the working device 10. Figure 2 It is a perspective view showing the internal structure of the working device 10. Figure 3 It is a side view showing the internal structure of the working device 10. Figure 4 It is a perspective view of the handling jig 70. In each figure, the left - right direction is set as the X - axis, the front - rear direction is set as the Y - axis, and the up - down direction is set as the Z - axis.

[0043] The working device 10 performs a predetermined operation on the substrate S supported by the substrate support member 80. In the present embodiment, the working device 10 is configured as a printing device: as the predetermined operation, the solder paste on the screen mask M is pressed into the pattern holes P1 and P2 formed in the screen mask M using the squeegee 22, and thus the solder paste is applied (printed) to the substrate S below through the pattern holes P1 and P2. The working device 10 is combined with a mounting device for mounting electronic components on the substrate S printed with solder to form a component mounting system. Moreover, when the working device 10 performs a change - over adjustment for changing the printing object to a different type of substrate S, it can perform automatic replacement of the screen mask M and automatic replacement of the handling jig 70 using the substrate support member 80.

[0044] As Figures 1 - 3 shown, the working device 10 includes a working device main body 11, a replacement device 50, a housing bracket 60, and a control device 100. The working device main body 11 has: a head device 20 including a head 21; a support rail 29 for supporting the screen mask M and the handling jig 70; and first and second substrate handling and support devices 30 and 40 for handling and supporting the substrate S through a dual - channel. In addition, the working device 10 further includes an operation panel provided on the front surface of the working device main body 11, which displays various information and enables various input operations by the operator.

[0045] The head device 20 is provided on the upper layer of the working device main body 11. As Figure 1 shown, the head device 20 includes a head 21 and a head moving device 26 that moves the head 21 in the front-rear direction (Y-axis direction) as the printing direction. The head moving device 26 has a Y-axis slider 27 that moves along a guide rail 28 extending in the front-rear direction and a motor that drives the Y-axis slider 27. The head 21 has a squeegee 22, a squeegee lifting device that raises and lowers the squeegee 22 by, for example, a cylinder, a pusher 24, and a pusher lifting device that raises and lowers the pusher 24 by, for example, a cylinder. The squeegee 22 is a plate-shaped member extending in the left-right direction (X-axis direction) orthogonal to the printing direction. The pusher 24 moves back and forth by the head moving device 26 in a state where it protrudes downward by being lowered by the pusher lifting device 25, thereby pushing the screen mask M and the handling jig 70 on the support rail 29 back and forth for handling. In addition, the pusher 24 is also used to retrieve the substrate support member 80 on the worktables 36, 46 into the handling jig 70 carried onto the support rail 29 or take out the substrate support member 80 from the handling jig 70 carried onto the support rail 29 while holding the substrate support member 80 and place it on the worktables 36, 46 when replacing the substrate support member 80 using the handling jig 70.

[0046] The screen mask M is a thin metal plate fixed to a rectangular frame F with a predetermined tension. Pattern holes P1, P2 are formed in the screen mask M for printing solder on the substrates S transported and supported by the first and second substrate handling and support devices 30, 40, respectively.

[0047] As Figure 3 shown, the support rail 29 is a pair of left and right rails extending in the front-rear direction (Y-axis direction), and is provided between the head device 20 and the first and second substrate handling and support devices 30, 40. The support rail 29 supports the screen mask M and the handling jig 70 in a horizontal posture, and guides the screen mask M and the handling jig 70 pushed by the pusher 24 to move along the front-rear direction.

[0048] The first and second substrate handling and support devices 30, 40 carry in and support the substrate S, and bring the supported substrate S into contact with and separate from the screen mask M on the support rail 29. As Figure 2 , Figure 3As shown, the first and second substrate handling and supporting devices 30 and 40 include conveyor devices 31 and 41, conveyor interval changing devices, conveyor lifting devices 35 and 45, worktables 36 and 46, and support member lifting devices 37 and 47. The conveyor devices 31 and 41 have conveyor belts respectively provided on a pair of front and rear side frames 33s and 43s and motors for driving the conveyor belts around. The pair of side frames 33s and 43s are erected on base frames 33b and 43b, and substrate guides 32 and 42 are provided at the upper ends of the pair of side frames 33s and 43s. The conveyor interval changing devices 34 and 44 change (adjust) the interval of the conveyor belts by approaching or separating one or both of the pair of side frames 33s and 43s. Thus, the first and second substrate handling and supporting devices 30 and 40 can handle and support substrates S of different sizes. The conveyor lifting devices 35 and 45 lift the conveyor devices 31 and 41 (conveyor belts) by lifting the columns supporting the base frames 33b and 43b. The worktables 36 and 46 are support tables having a setting surface on the upper surface where a substrate support member 80 can be set. The support member lifting devices 37 and 47 lift the substrate support member 80 provided on the worktables 36 and 46 by lifting the columns supporting the worktables 36 and 46.

[0049] The replacement device 50 receives a receiving bracket 60 that houses replacement components such as a screen mask M and a handling jig 70, and transports the replacement components between the receiving bracket 60 and the main body 11 of the working device. The replacement device 50 has: a left unit 51a provided on the left side of the front surface of the main body 11 of the working device; and a right unit 51b provided on the right side of the front surface of the main body 11 of the working device. The left unit 51a and the right unit 51b have a bracket support member 52 that receives the receiving bracket 60 and supports its lower surface from the left and right sides, and a bracket lifting device 53 that lifts the bracket support member 52. The bracket lifting device 53 is constituted by, for example, a combination of a ball screw mechanism and a motor, or a linear motor. The receiving bracket 60 supported by the bracket support member 52 is lifted together with the bracket support member 52 by the bracket lifting device 53. Further, the left unit 51a and the right unit 51b have a frame forward and backward moving device 54 that transports a frame of the replacement components in the receiving bracket 60 from the left and right sides to the front and back using a belt, a roller, or the like.

[0050] The housing bracket 60 is a housing body that has a pair of left and right support rails 61 with multiple layers vertically and can house replacement parts in each support rail 61. In addition, opening parts 62, 62 are formed on the front surface and the back surface of the working device main body 11 of the housing bracket 60. The replacement parts enter and exit through the opening part 62 on the front surface side by an operator or the like, and are carried in and out by the frame front and back moving device 54 through the opening part 62 on the back surface side. When the housing bracket 60 is received by the replacement device 50, the frame front and back moving device 54 sends out the replacement parts supported on the support rail 61 in the multiple support rails 61 of the housing bracket 60, which is at approximately the same height as the support rail 29 of the working device main body 11, to the working device main body 11 through the support lifting device 53. In addition, the frame front and back moving device 54 conveys the replacement parts supported on the support rail 29 of the working device main body 11 to the support rail 61 of the housing bracket 60 that is at approximately the same height as the support rail 29. In addition, the housing bracket 60 can be carried by an operator to the receiving position of the replacement device 50, or can be mounted on an automatic guided vehicle (AGV) and automatically carried to the receiving position of the replacement device 50 by the automatic guided vehicle.

[0051] The handling jig 70 is a jig for carrying in and out the substrate support member 80. As Figure 4 shown, it includes a rectangular frame body 71, a first arm member 72, and a second arm member 75. The first arm member 72 and the second arm member 75 are fixed to the frame body 71 with their front ends facing each other and hold the substrate support member 80 from both sides. The first arm member 72 has an arm main body 73 and a first engaging member 74 provided at the front end of the arm main body 73 and engaging with a first pin member 93a of an accessory 90 for the substrate support member, which will be described later, mounted on the substrate support member 80. The second arm member 75 has an arm main body 73 and a second engaging member 76 provided at the front end of the arm main body 73 and engaging with a second pin member 94a of the accessory 90 for the substrate support member. The first arm member 72 and the second arm member 75 are normally biased upward by a spring (not shown) and are in a first state of maintaining a horizontal position facing each other. Moreover, when the first arm member 72 and the second arm member 75 are pressed from above, they rotate against the elastic force of the spring and thus become a second state of spreading downward. The first arm member 72 and the second arm member 75 hold the substrate support member 80 in the first state and release the holding of the substrate support member 80 in the second state. In addition, the pressing of the first arm member 72 and the second arm member 75 is performed by the pusher 24. In the present embodiment, the handling jig 70 has two sets of a pair of first arm members 72 and second arm members 75 for holding the substrate support member 80, and can carry the substrate support members 80 used in the first and second substrate handling and support devices 30, 40 at one time.

[0052] The substrate support member 80 supports the substrate S from the lower surface side, and is replaced with a member having a size suitable for supporting the substrate S according to the substrate S. The substrate support member 80 is used in a state where the attachment 90 for the substrate support member is mounted. The attachment 90 for the substrate support member is assembled using the assembly jig 110 described later.

[0053] The attachment 90 for the substrate support member is used to mount the substrate support member 80 to the transfer jig 70. As Figures 5A - 5C shown, the attachment 90 for the substrate support member includes a first attachment member 91, a second attachment member 92, a first connection member 93, a second connection member 94, a pair of first pin members 93a, and a pair of second pin members 94a.

[0054] As Figures 5A - 5C shown, the first attachment member 91 is a member mounted on one side of the rear side of the substrate support member 80. The first attachment member 91 has a first attachment member body 91a, a first rail member 91b, and a second rail member 91c. The first attachment member body 91a is a member extending in the left-right direction (X-axis direction). An installation portion 91d extending in the front-rear direction (Y-axis direction) is integrally formed at the left end portion (one end portion) of the first attachment member body 91a. An installation portion 91f extending in the front-rear direction is integrally formed at the right end portion (the other end portion) of the first attachment member body 91a. The installation portions 91d and 91f are formed to be one layer lower than the surface of the first attachment member 91 that contacts the substrate support member 80. The base end portion of the first rail member 91b is fixed to the upper surface of the installation portion 91d by a bolt. The first rail member 91b extends in the front-rear direction (Y-axis direction orthogonal to the first attachment member body 91a). The base end portion of the second rail member 91c is fixed to the upper surface of the installation portion 91f by a bolt. The second rail member 91c extends in the front-rear direction and in the same direction as the first rail member 91b. A long hole L11 extending in the longitudinal direction (front-rear direction) is formed in the first rail member 91b. In addition, a long hole L12 extending in the longitudinal direction (front-rear direction) is formed in the second rail member 91c.

[0055] The second attachment member 92 is a member installed on the front side edge of the substrate support member 80. The second attachment member 92 has a second attachment member main body 92a, a first rail member 92b, and a second rail member 92c. The second attachment member main body 92a is a member extending in the left-right direction (X-axis direction) with substantially the same dimensions as the first attachment member main body 91a. An installation portion 92d extending in the front-back direction (Y-axis direction) is integrally formed at the left end portion (one end portion) of the second attachment member main body 92a. An installation portion 92f extending in the front-back direction is integrally formed at the right end portion (the other end portion) of the second attachment member main body 92a. The installation portions 92d and 92f are formed to be one layer lower than the surface of the second attachment member 92 that contacts the substrate support member 80. The first rail member 92b is fixed to the upper surface of the installation portion 92d by bolts at a position offset in the left-right direction from the position where the first rail member 91b is fixed to the installation portion 91d. The second rail member 92c extends in the front-back direction (Y-axis direction orthogonal to the second attachment member main body 92a). The second rail member 92c is fixed to the upper surface of the installation portion 92f by bolts at a position offset in the left-right direction from the position where the second rail member 91c is fixed to the installation portion 91f. The second rail member 92c extends in the front-back direction and in the same direction as the first rail member 92b. A long hole L21 extending in the longitudinal direction (front-back direction) is formed in the first rail member 92b. In addition, a long hole L22 extending in the longitudinal direction (front-back direction) is formed in the second rail member 92c.

[0056] The first connecting member 93 connects the first rail member 91b of the first attachment member 91 and the first rail member 92b of the second attachment member 92 to each other. On the lower surface of the first connecting member 93, a long groove G11 extending in the front-back direction (X-axis direction) and capable of receiving the first rail member 91b of the first attachment member 91 to be inserted therein and a long groove G21 extending in the front-back direction and capable of receiving the first rail member 92b of the second attachment member 92 to be inserted therein are formed in a left-right (Y-axis direction) arrangement. As Figure 5C shown, a plurality of threaded holes H11 are provided at regular intervals on the bottom surface of the long groove G11. A plurality of threaded holes H21 are provided at regular intervals on the bottom surface of the long groove G21. In a state where the first rail member 91b of the first attachment member 91 is inserted into the long groove G11 and the first rail member 92b of the second attachment member 92 is inserted into the long groove G21, the first connecting member 93 inserts a screw B through the long hole L11 and fastens the screw B to the threaded hole H11, and inserts the screw B through the long hole L21 and fastens the screw B to the threaded hole H21, thereby connecting the first rail member 91b of the first attachment member 91 and the first rail member 92b of the second attachment member 92 to each other.

[0057] The second connecting member 94 connects the second rail member 91c of the first attachment member 91 and the second rail member 92c of the second attachment member 92 to each other. On the lower surface of the second connecting member 94, a long groove G12 extending in the front-rear direction and into which the second rail member 91c of the first attachment member 91 can be inserted and a long groove G22 extending in the front-rear direction and into which the second rail member 92c of the second attachment member 92 can be inserted are formed in a left-right arrangement. As Figure 5C shown, a plurality of threaded holes H12 are provided at regular intervals on the bottom surface of the long groove G12. A plurality of threaded holes H22 are provided at regular intervals on the bottom surface of the long groove G22. In a state where the second rail member 91c of the first attachment member 91 is inserted into the long groove G21 and the second rail member 92c of the second attachment member 92 is inserted into the long groove G22, the second connecting member 94 inserts the screw B through the long hole L11 and fastens the screw B to the threaded hole H11, and inserts the screw B through the long hole L21 and fastens the screw B to the threaded hole H21, thereby connecting the second rail member 91c of the first attachment member 91 and the second rail member 92c of the second attachment member 92 to each other.

[0058] A pair of first pin members 93a are engaged portions that are engaged with a first engaging member 74 of a first arm member 72, which is one of a pair of arm members of the transfer jig 70. The pair of first pin members 93a are provided on the lower surface of the first connecting member 93 such that the centers in the front-rear direction (Y-axis direction) thereof coincide with the center in the front-rear direction of the first connecting member 93. The width D1 in the front-rear direction between the pair of first pin members 93a (refer to Figure 6A ) is a width slightly wider than the width d1 in the front-rear direction of the first engaging member 74. The pair of first pin members 93a are engaged with the first engaging member 74 by inserting the first engaging member 74 therebetween.

[0059] A pair of second pin members 94a are engaged portions that are engaged with a second engaging member 76 of a second arm member 75, which is the other of a pair of arm members of the transfer jig 70. The pair of second pin members 94a are provided on the lower surface of the second connecting member 94 such that the centers in the front-rear direction (Y-axis direction) thereof coincide with the center in the front-rear direction of the second connecting member 94. The width D2 in the front-rear direction between the pair of second pin members 94a (D2 > D1) (refer to Figure 6A ) is a width slightly wider than the width d2 in the front-rear direction of the second engaging member 76. The pair of second pin members 94a are engaged with the second engaging member 76 by inserting the second engaging member 76 therebetween.

[0060] In the attachment 90 for the substrate support member, in a state where the first attachment member 91 and the second attachment member 92 are brought close to each other in the front-rear direction, the first rail member 91b of the first attachment member 91 and the first rail member 92b of the second attachment member 92 can be connected to each other by the first connecting member 93, and the second rail member 91c of the first attachment member 91 and the second rail member 92c of the second attachment member 92 can be connected to each other by the second connecting member 94. Further, in a state where the first attachment member 91 and the second attachment member 92 are separated from each other in the front-rear direction, the first rail member 91b of the first attachment member 91 and the first rail member 92b of the second attachment member 92 can be connected to each other by the first connecting member 93, and the second rail member 91c of the first attachment member 91 and the second rail member 92c of the second attachment member 92 can be connected to each other by the second connecting member 94. Thus, in the attachment 90 for the substrate support member, the interval between the first attachment member 91 and the second attachment member 92 can be adjusted, and thus, regardless of the width of the substrate S, the substrate support member 80 can be attached to the transfer jig 70 via the attachment 90 for the substrate support member.

[0061] Further, as Figure 6A shown, the width d1 of the first engaging member 74 is narrower than the width d2 of the second engaging member 76, and the interval D1 between the pair of first pin members 93a held by the first engaging member 74 is configured to be narrower than the interval D2 between the pair of second pin members 94a that engage with the second engaging member 76. Thus, as Figure 6B shown, when the substrate support member 80 is attached to the transfer jig 70 in the correct direction in the left-right direction, it is held in a horizontal posture. On the other hand, as Figure 7A 、 7B shown, when the substrate support member 80 is attached to the transfer jig 70 in a manner of being flipped 180 degrees in the left-right direction, the second engaging member 76 having a width d2 wider than the interval D1 between the first pin members 93a does not engage with the first pin members 93a normally, and thus it is held in a state inclined with respect to the transfer jig 70. Thereby, an operator can be made aware that the substrate support member 80 is attached in the wrong direction. Further, the width d1 of the first engaging member 74 is smaller than the minimum width among the substrate support members 80 that can be used by the working device 10.

[0062] The control device 100 is configured as a microprocessor centered on a CPU, and in addition to the CPU, it further includes a ROM, a RAM, an input / output port, etc. The control device 100 exchanges signals with the head device 20, the first and second substrate transfer support devices 30, 40, the replacement device 50, etc. Further, the control device 100 is connected to a management device 200 that manages the entire operation system including the working device 10 in a communicable manner. The management device 200 manages the progress status of the production line including the working device 10, etc.

[0063] The operation of the working device 10 configured as such will be described. In the present embodiment, the operation of the changeover adjustment for replacing the screen mask M and the substrate support member 80 will be described. The changeover adjustment is performed by successively executing a mask unloading process, a support member unloading process, a support member loading process, and a mask loading process with the storage bracket 60 set in the replacement device 50.

[0064] The mask unloading process is a process of unloading the used screen mask M from the working device main body 11 and storing it in the storage bracket 60. In this mask unloading process, the control device 100 controls the bracket lifting device 53 so that the empty support rail 61 of the storage bracket 60 becomes approximately the same height as the support rail 29 of the working device main body 11. Next, the control device 100 controls the head moving device 26 so that the screen mask M supported on the support rail 29 is pushed forward by the pusher 24 and unloaded from the working device main body 11. Then, the control device 100 controls the frame forward and backward moving device 54 to store the unloaded screen mask M in the storage bracket 60. The mask loading process is a process of taking out the next screen mask M to be used from the storage bracket 60 and loading it into the working device main body 11. In addition, since the mask loading process is basically performed by the reverse operation of the mask unloading process, its description is omitted.

[0065] In the process of carrying out the support member, it is a process of carrying out the used substrate support member 80 from the main body 11 of the working device and accommodating it in the accommodation bracket 60. First, the control device 100 controls the bracket lifting device 53 so that the support rail 61 of the accommodation bracket 60 that supports the idle handling jig 70 for recovering the substrate support member 80 becomes approximately the same height as the support rail 29 of the main body 11 of the working device. Next, the control device 100 controls the frame forward and backward movement device 54 to carry the idle handling jig 70 from the accommodation bracket 60 into the main body 11 of the working device, and controls the pusher lifting device and the head movement device 26 to move the carried idle handling jig 70 above the worktables 36 and 46 by using the pusher 24. Next, the control device 100 controls the head movement device 26 so that the pusher 24 moves directly above the first arm member 72 and the second arm member 75 of the idle handling jig 70. Next, the control device 100 controls the pusher lifting device 25 to lower the pusher 24. As described above, when the pusher 24 descends, it abuts against the first arm member 72 and the second arm member 75. When the pusher 24 further descends, the pair of first arm members 72 and second arm members 75 expand downward to a state where they can receive the substrate support member 80 (second state). Next, the control device 100 controls the support member lifting device 37 or the support member lifting device 47 to raise the worktable 36 or the worktable 46. Then, the control device 100 controls the pusher lifting device 25 to raise the pusher 24. As a result, the first arm member 72 and the second arm member 75 become the first state facing each other, and the substrate support member 80 is held by the handling jig 70 (the first arm member 72 and the second arm member 75). In addition, the control device 100 holds the other substrate support member 80 placed on the worktable 36 and the worktable 46 in the handling jig 70 by the same control.

[0066] Next, the control device 100 controls the bracket lifting device 53 so that the accommodation bracket 60 rises until the idle support rail 61 of the accommodation bracket 60 becomes approximately the same height as the support rail 29 of the main body 11 of the working device. Next, the control device 100 controls the head movement device 26 so that the pusher 24 is lowered by the pusher lifting device 25, and the handling jig 70 on the support rail 29 is pushed forward and carried out by the pusher 24. Then, the control device 100 controls the frame forward and backward movement device 54 to carry the substrate support member 80 held by the handling jig 70 to the accommodation bracket 60.

[0067] The support member loading process is a process of taking out the substrate support member 80 to be used next from the storage bracket 60 and loading it into the main body 11 of the working device. The support member loading process is controlled as follows: The transfer jig 70 holding two substrate support members 80 is loaded into the main body 11 of the working device, and the pusher 24 is used to move the transfer jig 70 above the worktable 36 or the worktable 46. Then, the control device 100 controls the worktable 36 or the worktable 46 to rise, and then controls the pusher 24 to descend directly above the first arm member 72 and the second arm member 75 of the transfer jig 70 that holds one of the two substrate support members 80. As a result, the pair of first arm member 72 and second arm member 75 expand downward (second state), and the substrate support member 80 disengages from the pair of first arm member 72 and second arm member 75 and is placed on the worktable 36 or the worktable 46. In addition, the control device 100 places the other substrate support member 80 held by the transfer jig 70 on the other worktable by the same control. Then, the control device 100 controls the worktable 36 and the worktable 46 to descend, and controls to take out the empty transfer jig 70 from which the two substrate support members 80 have been taken out from the main body 11 of the working device and store it in the storage bracket 60.

[0068] Next, the process of Figures 8 - 11D installing the substrate support member attachment 90 to the substrate support member 80 will be described. First, the process of Figure 8 , Figure 9A , Figure 9B describing the details of the assembly jig 110 used for assembling the substrate support member attachment 90 will be described.

[0069] The assembly jig 110 includes a first positioning member 112, a second positioning member 113, a first moving portion 114, a second moving portion 117, a first clamping mechanism 122, and a second clamping mechanism 123. They are provided on the mounting table 111.

[0070] At the rear sides of both end portions of the mounting table 111 in the left - right direction, a pair of left - right elongated holes 120 extending in the front - rear direction (Y - axis direction) are formed. On the outer sides of the pair of elongated holes 120 in the left - right direction (X - axis direction), a scale SC indicating the position of the first moving portion 114 relative to the mounting table 111 is provided. At the front sides of both end portions of the mounting table 111 in the left - right direction, a pair of left - right elongated holes 121 extending in the front - rear direction are formed. On the outer sides of the pair of elongated holes 121 in the left - right direction, a scale SC indicating the position of the second moving portion 117 relative to the mounting table 111 is provided. The scale SC is marked with the distance from the center line L connecting the front - rear center of the first positioning member 112, which will be described later, and the front - rear center of the second positioning member 113. In addition, this distance corresponds to the width of the substrate support member 80 in the front - rear direction to which the accessory 90 for the substrate support member is attached, for example, a distance that is half of the width of the substrate support member 80 in the front - rear direction.

[0071] The first positioning member 112 is used to position the first connecting member 93 when assembling the accessory 90 for the substrate support member. The first positioning member 112 is detachably attached to the approximate center of the mounting table 111 in the front - rear direction and the left - hand side of the mounting table 111 by screws or the like. As Figure 9A shown, the width of the first positioning member 112 in the front - rear direction is the same width (width d1) as that of the first engaging member 74 in the front - rear direction. The first positioning member 112 is installed on the mounting table 111 in a state of being embedded between a pair of first pin members 93a of the first connecting member 93, thereby positioning the first connecting member 93.

[0072] The second positioning member 113 is used to position the second connecting member 94 when assembling the accessory 90 for the substrate support member. The second positioning member 113 is detachably attached to the approximate center of the mounting table 111 in the front - rear direction and the right - hand side of the mounting table 111 by screws or the like. As Figure 9B shown, the width of the second positioning member 113 in the front - rear direction is the same width (width d2) as that of the second engaging member 76 in the front - rear direction. The second positioning member 113 is installed on the mounting table 111 in a state of being embedded between a pair of second pin members 94a of the second connecting member 94, thereby positioning the second connecting member 94.

[0073] The first moving portion 114 supports the first accessory member 91 when assembling the accessory 90 for the substrate support member. The first moving portion 114 is provided at the rear side of the mounting table 111 in the front - rear direction (Y - axis direction). The first moving portion 114 includes a first slider 115 capable of moving back and forth along the elongated hole 120 and a first block 116 fixed to the upper surface of the first slider 115. The first moving portion 114 causes the first accessory member 91 to abut against and support the front side surface of the first block 116.

[0074] The second moving part 117 supports the second attachment part 92 when assembling the attachment 90 for the substrate support member. The second moving part 117 is provided on the front side in the front-rear direction (Y-axis direction) of the mounting table 111. The second moving part 117 includes a second slider 118 capable of moving back and forth along the long hole 121 and a second block 119 fixed to the upper surface of the second slider 118. The second moving part 117 causes the second attachment part 92 to abut against and be supported by the rear side surface of the second block 119.

[0075] The first clamping mechanism 122 is used to fix the first moving part 114 at an arbitrary position within the moving range. The first clamping mechanism 122 includes: a clamping screw that penetrates the long hole 120 in the up-down direction; a screw seat provided on the lower surface of the mounting table 111 and capable of moving back and forth together with the first slider 115; and a clamping rod that tightens or loosens the screw relative to the screw seat. In the first clamping mechanism 122, when the clamping rod is operated to loosen the screw relative to the screw seat, the first slider 115 is allowed to move back and forth. On the other hand, in the first clamping mechanism 122, when the clamping rod is operated to tighten the screw to the screw seat, the back-and-forth movement of the first slider 115 is restricted.

[0076] The second clamping mechanism 123 is used to fix the second moving part 117 at an arbitrary position within the moving range. The second clamping mechanism 123 includes: a clamping screw that penetrates the long hole 121 in the up-down direction; a screw seat provided on the lower surface of the mounting table 111 and capable of moving back and forth together with the second slider 118; and a clamping rod that tightens or loosens the screw relative to the screw seat. In the second clamping mechanism 123, when the clamping rod is operated to loosen the screw relative to the screw seat, the second slider 118 is allowed to move back and forth. On the other hand, in the second clamping mechanism 123, when the clamping rod is operated to tighten the screw to the screw seat, the back-and-forth movement of the second slider 118 is restricted.

[0077] Next, use Figures 10 - 11D The process of mounting the attachment 90 for the substrate support member to the substrate support member 80 will be described. First, the operator prepares the assembly jig 110 (S100). Next, as Figure 11AAs shown, the operator moves the first moving part 114 to a position corresponding to the width in the front-rear direction (Y-axis direction) of the substrate support member 80 to which the substrate support member attachment 90 is attached while observing the scale SC, and operates the first clamping mechanism 122 to fix the first moving part 114 at this position (S105). At this time, the distance from the center line L to the first moving part 114 (the first block 116) is half of the length of the width in the front-rear direction of the substrate support member 80 to which the substrate support member attachment 90 is attached. Next, the operator places the substrate support member 80 on the placement table 111 in such a manner that the rear side surface of the substrate support member 80 abuts against the front side surface of the first block 116 of the first moving part 114 (S110). Then, the operator moves the second moving part 117 until the rear side surface of the second block 119 abuts against the front side surface of the substrate support member 80, and operates the second clamping mechanism 123 to fix the second moving part 117 at this position (S115). At this time, the distance from the center line L to the second moving part 117 (the second block 119) is half of the length of the width in the front-rear direction of the substrate support member 80 to which the substrate support member attachment 90 is attached. In addition, the operator confirms the scale SC indicating the position of the first moving part 114 and the scale SC indicating the position of the second moving part 117, and if the two do not match, finely adjusts the positions of the first moving part 114 and the second moving part 117 with respect to the placement table 111.

[0078] Next, the operator arranges the first connecting member 93 at the left end on the substrate support member 80 with the first pin member 93a facing upward, and arranges the second connecting member 94 at the right end on the substrate support member 80 with the second pin member 94a facing upward (S120). Next, as Figure 11C shown, the operator arranges the first attachment member 91 on the substrate support member 80 in such a manner that the first rail member 91b and the second rail member 91c of the first attachment member 91 are respectively inserted into the long grooves G11 of the first connecting member 93 and the long grooves G12 of the second connecting member 94 and the side surface of the first attachment member main body 91a abuts against the first block 116 (S125). Then, as Figure 11C shown, the operator arranges the second attachment member 92 on the substrate support member 80 in such a manner that the first rail member 92b and the second rail member 92c of the second attachment member 92 are respectively inserted into the long grooves G21 of the first connecting member 93 and the long grooves G22 of the second connecting member 94 and the side surface of the second attachment member main body 92a abuts against the second block 119 (S130).

[0079] Next, as Figure 11CAs shown, with the first positioning member 112 clamped between a pair of first pin members 93a, the operator thread-fastens (fixes) the first positioning member 112 to the left end side of the mounting table 111 (S135). Next, as Figure 11C shown, with the second positioning member 113 clamped between a pair of second pin members 94a, the operator thread-fastens (fixes) the second positioning member 113 to the right end side of the mounting table 111 (S140). Then, the operator inserts screw B through the long hole L11 and fastens screw B to the threaded hole H11, inserts screw B through the long hole L21 and fastens screw B to the threaded hole H21, inserts screw B through the long hole L12 and fastens screw B to the threaded hole H12, and inserts screw B through the long hole L22 and fastens screw B to the threaded hole H22, thereby connecting the first attachment member 91 and the second attachment member 92 (S145). Thus, the first attachment member 91 and the second attachment member 92 can be connected in a state where the centers of a pair of first pin members 93a in the front-rear direction coincide with the centers of a pair of second pin members 94a in the front-rear direction.

[0080] Next, the operator removes the first positioning member 112 and the second positioning member 113 from the assembly jig 110 (S150). Then, the operator removes the attachment 90 for the substrate support member from the assembly jig 110 (S155). Next, the operator removes the substrate support member 80 from the assembly jig 110 (S160). Then, the operator assembles the attachment 90 for the substrate support member to the substrate support member 80 using screws or the like (S165), and this process is completed.

[0081] In the assembly jig 110, it is possible to assemble the attachment 90 for the substrate support member with the centers of a pair of first pin members 93a in the front-rear direction and the centers of a pair of second pin members 94a. Therefore, the substrate support member 80 can be held stably by the transfer jig 70.

[0082] Here, the correspondence between the main elements of the embodiment and the main elements of the present disclosure recited in the claims will be described. That is, the attachment 90 for the substrate support member of the present embodiment corresponds to the first attachment for the substrate support member of the present disclosure, the first attachment member 91 corresponds to the first support member, the second attachment member 92 corresponds to the second support member, the first connection member 93 and the second connection member 94 correspond to the connection portion, and the first pin member 93a and the second pin member 94a correspond to the held portion. In addition, the first attachment member main body 91a corresponds to the first support member main body, the first rail member 91b and the second rail member 91c correspond to the first extension portion, the second attachment member main body 92a corresponds to the second support member main body, and the first rail member 92b and the second rail member 92c correspond to the second extension portion. In addition, the assembly jig 110 corresponds to the assembly jig for the attachment for the substrate support member, the first positioning member 112 corresponds to the first positioning member, the second positioning member 113 corresponds to the second positioning member, the first moving portion 114 corresponds to the first moving portion, and the second moving portion 117 corresponds to the second moving portion. In addition, the placement table 111 corresponds to the placement table, the first clamping mechanism 122 corresponds to the first fixing portion, and the second clamping mechanism 123 corresponds to the second fixing portion.

[0083] In the attachment 90 for the substrate support member described in detail above, the first attachment member 91 and the second attachment member 92 are connected in such a manner that the width between the two can be changed. Therefore, regardless of the width of the substrate S, the substrate support member 80 can be attached to the transfer jig 70 via the attachment 90 for the substrate support member.

[0084] In addition, in the attachment 90 for the substrate support member, the first attachment member 91 has a first attachment member main body 91a and first rail members 91b and second rail members 91c extending in the front-rear direction from the left and right end portions of the first attachment member main body 91a. In addition, the second attachment member 92 has a second attachment member main body 92a and first rail members 92b and second rail members 92c extending in the front-rear direction from the left and right end portions of the second attachment member main body 92a. In addition, the attachment 90 for the substrate support member has a first connection member 93 that connects the first rail member 91b and the first rail member 92b and a second connection member 94 that connects the second rail member 91c and the second rail member 92c. Thereby, the widths of the first attachment member 91 and the second attachment member 92 can be adjusted relatively easily.

[0085] In addition, in the assembly jig 110, the distance from the center line L to the first moving part 114 and the distance from the center line L to the second moving part 117 are set to half the width of the substrate support member 80 in the front-rear direction. In this state, the first attachment member 91 and the second attachment member 92 are supported by the assembly jig 110. Then, the first pin member 93a and the second pin member 94a are respectively held by the first positioning member 112 and the second positioning member 113, the first rail member 91b and the first rail member 92b are connected by the first connecting member 93, and the second rail member 91c and the second rail member 92c are connected by the second connecting member 94. Thereby, the center positions of the first pin member 93a and the second pin member 94a in the front-rear direction can be made to coincide with the center position of the substrate support member 80. Therefore, the substrate support member can be held by the transfer jig in a stable state.

[0086] In addition, in the assembly jig 110, a first positioning member 112, a second positioning member 113, a first clamping mechanism 122 for fixing the first moving part 114 at an arbitrary position within the movable range, and a second clamping mechanism 123 for fixing the second moving part 117 at an arbitrary position within the movable range are provided. Thereby, when aligning the positions of the first attachment member 91 and the second attachment member 92 with the positions of the first moving part 114 and the second moving part 117 respectively, the positions of the first moving part 114 and the second moving part 117 are not likely to shift.

[0087] In addition, the present disclosure is not limited to any of the above-described embodiments, and can of course be implemented in various ways as long as it belongs to the technical scope of the present disclosure.

[0088] For example, in the above-described embodiment, an attachment for the substrate support member that can adjust the interval in the front-rear direction between the first attachment member 91 and the second attachment member 92 is used to hold the substrate support member 80 by the transfer jig 70. However, it is also possible to use Figure 12A , 12BThe substrate support member 80 is held by the attachment 190 for the substrate support member as shown in the figure by the handling jig 70. The attachment 190 for the substrate support member includes: a first attachment member 191 that extends in the left-right direction (X-axis direction) and is mounted on one side of the front side of the substrate support member 80; a second attachment member 192 that extends in the left-right direction and is mounted on one side of the rear side of the substrate support member 80; and a third attachment member 193 that extends in the left-right direction and is mounted between the first attachment member 191 and the second attachment member 192. The third attachment member 193 is mounted on the substrate support member 80 such that the center in the front-rear direction coincides with the center of the substrate support member 80 in the front-rear direction. A pair of first pin members 193a that engage with the first engaging member 74 provided on the first arm member 72 of the handling jig 70 are provided at the left end portion of the third attachment member 193. A pair of second pin members 194a that engage with the second engaging member 76 provided on the second arm member 75 of the handling jig 70 are provided at the right end portion of the third attachment member 193. The width between the first pin members 193a in the front-rear direction is the same width (width D1) as the width between the first pin members 93a in the attachment 90 for the substrate support member. In addition, the width between the second pin members 194a in the front-rear direction is the same width (width D2) as the width between the second pin members 94a in the attachment 90 for the substrate support member. Thus, regardless of the width of the substrate S, the substrate support member 80 can be mounted on the handling jig 70 via the attachment 190 for the substrate support member.

[0089] In the above-described embodiment, the width D1 in the front-rear direction between the first pin members 93a is narrower than the width D2 in the front-rear direction between the second pin members 94a. However, the width D1 may also be wider than the width D2. Alternatively, the width D1 may be set to the same width as the width D2.

[0090] In the above-described embodiment, in the attachment mounting process for the substrate support member, after detaching the attachment 90 for the substrate support member and the substrate support member 80 from the assembly jig 110, the attachment 90 for the substrate support member is mounted on the substrate support member 80. However, in the attachment mounting process for the substrate support member, the attachment 90 for the substrate support member may be mounted on the substrate support member 80, and then the substrate support member 80 and the attachment 90 for the substrate support member may be detached from the assembly jig 110 together.

[0091] In the above-described embodiment, the held portions of the present disclosure are described as a pair of first pin members 93a and a pair of second pin members 94a. However, the held portions of the present disclosure may also be configured otherwise. For example, instead of the pair of first pin members 93a, a recess that engages with the first engaging member 74 may be provided, and instead of the pair of second pin members 94a, a recess that engages with the second engaging member 76 may be provided.

[0092] Here, the attachment mounting process for the substrate support member of the modified example will be described. In the attachment mounting process for the substrate support member of the modified example, the direction when placing the first attachment member 91 and the second attachment member 92 on the substrate support member 80 may be opposite to that in the above-described embodiment in the vertical direction. That is, when mounting the attachment 90 for the substrate support member on the substrate support member 80, the first attachment member 91 and the second attachment member 92 may be placed on the substrate support member 80 in a state where the surfaces in contact with the substrate support member 80 are facing upward for assembly. In this case, when connecting the first rail members 91b and 92b of the first and second attachment members 91 and 92 to each other using the first connecting member 93, the connection is made with a pair of first pin members 93a facing downward. In addition, when connecting the second rail members 91c and 92c of the first and second attachment members 91 and 92 to each other using the second connecting member 94, the connection is made with a pair of second pin members 94a facing downward.

[0093] In the attachment mounting process for the substrate support member of the modified example, before the operator places the first attachment member 91 and the second attachment member 92 on the substrate support member 80, the operator thread-fastens (fixes) the first positioning member 212 and the second positioning member 213 to the mounting table 111. Then, the operator covers the first connecting member 93 from above the first rail member 91b of the first attachment member 91 and the first rail member 92b of the second attachment member 92, inserts the screw B through each long hole, and fastens the screw B to each threaded hole. In this case, it is preferable that the long hole L11 and the long hole L21 are formed on the side of the first connecting member 93, the threaded hole H11 is formed on the side of the first rail member 91b of the first attachment member 91, and the threaded hole H21 is formed on the side of the first rail member 92b of the second attachment member 92. In addition, the operator covers the second connecting member 94 from above the second rail member 91c of the first attachment member 91 and the second rail member 92c of the second attachment member 92, inserts the screw B through each long hole, and fastens the screw B to each threaded hole. In this case, it is preferable that the long hole L12 and the long hole L22 are formed on the side of the second connecting member 94, the threaded hole H12 is formed on the side of the second rail member 92c of the first attachment member 91, and the threaded hole H22 is formed on the side of the second rail member 92c of the second attachment member 92. This is because, similar to the above-described embodiment, when each threaded hole is formed in the first connecting member 93 and the second connecting member 94 and each long hole is formed in the first rail members 91b, 92b and the second rail members 91c, 92c, it is necessary to fasten the screw B from the back side, and it is difficult to connect the first attachment member 91 and the second attachment member 92. In addition, the attachment mounting process for the substrate support member of the modified example is used to assemble the substrate support member attachment 90 that is mounted on the substrate support member 80 having a relatively short length in the front-rear direction. This is because, when the width of the substrate support member 80 in the front-rear direction is short, if the substrate support member attachment 90 is assembled in the same order as the above-described embodiment, it may not be possible to connect the first attachment member 91 and the second attachment member 92. Now, as Figure 14A , 14B shown, consider the case where, in order to mount the substrate support member attachment 90 on the substrate support member 80 having a short width in the front-rear direction, the first attachment member 91 and the second attachment member 92 are brought close to each other such that the mounting portions 91d, 92d and the mounting portions 91f, 92f are in contact with each other. In this case, if the surface that comes into contact with the substrate support member 80 when the substrate support member attachment 90 is mounted on the substrate support member 80 is turned downward, the first rail member 91b and the second rail member 91c are respectively hidden under the mounting portions 92d, 92f, and the first rail member 92b and the second rail member 92c are respectively hidden under the mounting portions 91d, 91f. Therefore, it is not possible to fasten the screw B in the same process as the above-described embodiment.

[0094] Use Figure 13 , Figure 14 will be used to illustrate the details of this process. In addition, in Figure 13 , the same step numbers are assigned to the same processes as Figure 10 and detailed descriptions are omitted.

[0095] First, the operator prepares the assembly jig 110 in the same manner as in the above-described embodiment, fixes the first moving part 114 at a position corresponding to the width of the substrate support member 80, and places the substrate support member 80 on the placement table 111 (S100~110). Next, the operator moves the second moving part 117 until the second block 119 abuts against the side surface of the substrate support member 80, and fixes the second moving part 117 (S110, S115). Next, as Figure 14AAs shown, the operator thread-fastens (fixes) the first positioning member 212 to the right end side of the placement table 111 (S200). Then, the operator thread-fastens (fixes) the second positioning member 213 to the left end side of the placement table 111 (S205). Here, the lengths of the first positioning member 212 and the second positioning member 213 in the vertical direction are shorter than the lengths of the above-mentioned first positioning member 112 and second positioning member 113 in the vertical direction. Next, the operator turns the surface that abuts against the substrate support member 80 when mounted on the substrate support member 80 upward, and places the first attachment member 91 on the substrate support member 80 while making the side surface abut against the first block 116 (S210). Next, the operator turns the surface that abuts against the substrate support member 80 when mounted on the substrate support member 80 upward, and places the second attachment member 92 on the substrate support member 80 while making the side surface abut against the second block 119 (S215). Then, the operator configures the first connecting member 93 in the following manner: with a pair of first pin members 93a facing downward, the first rail member 91b of the first attachment member 91 and the first rail member 92b of the second attachment member 92 are respectively inserted into the long grooves G11 and G21, and the first positioning member 212 is clamped by the first pin members 93a (S220). Next, the operator configures the second connecting member 94 in the following manner: with a pair of second pin members 94a facing downward, the second rail member 91c of the first attachment member 91 and the second rail member 92c of the second attachment member 92 are respectively inserted into the long grooves G12 and G22, and the second positioning member 213 is clamped by the second pin members 94a (S225). Next, the operator inserts the screw B through each long hole and fastens the screw B to each threaded hole, thereby connecting the first attachment member 91 and the second attachment member 92 (S145). Next, the operator sequentially removes the substrate support member attachment 90, the first positioning member 212, the second positioning member 213, and the substrate support member 80 from the assembly jig 110 (S155, S150, S160). Then, the operator assembles the substrate support member attachment 90 to the substrate support member 80 using screws or the like (S165), and this process ends.

[0096] In addition, in the above-described embodiment, the working device 10 has two channels for transporting and supporting the substrate S, but it may also have only one channel.

[0097] In addition, in the above-described embodiment, the working device of the present disclosure has been described as being applied as a printing device, but it is not limited thereto. For example, as long as it is a working device that performs operations on a substrate supported by a support member, such as a component mounting device, and can automatically replace the support member, it can be applied to any working device.

[0098] Industrial Applicability

[0099] The present disclosure can be used in the manufacturing industries such as accessories for substrate support members, assembly jigs, and printing devices.

[0100] Description of Reference Numerals

[0101] 10 Working device, 11 Working device main body, 20 Head device, 21 Head, 22 Squeegee, 23 Squeegee lifting device, 24 Pusher, 25 Pusher lifting device, 26 Head moving device, 27 Y-axis slider, 28 Guide rail, 29 Support rail, 30 Second substrate handling and support device, 31 Conveyor device, 32 Substrate guide, 33b Base frame, 33s Side frame, 35 Conveyor lifting device, 36 Workbench, 37 Support member lifting device, 40 Second substrate handling and support device, 41 Conveyor device, 42 Substrate guide, 43b Base frame, 43s Side frame, 45 Conveyor lifting device, 46 Workbench, 47 Support member lifting device, 50 Replacement device, 51a Left unit, 51b Right unit, 52 Bracket support member, 53 Bracket lifting device, 54 Frame front-back moving device, 60 Receiving bracket, 61 Support rail, 62 Opening, 70 Handling jig, 71 Frame body, 72 First arm member, 73 Arm main body, 74 First engaging member, 75 Second arm member, 76 Second engaging member, 80 Substrate support member, 90 Accessories for substrate support member, 91 First accessory member, 91a First accessory member main body, 91b First rail member, 91c Second rail member, 91d, 91f Mounted portion, 92 Second accessory member, 92a Second accessory member main body, 92b First rail member, 92c Second rail member, 92d, 92f Mounted portion, 93 First connecting member, 93a First pin member, 94 Second connecting member, 94a Second pin member, 100 Control device, 110 Assembly jig, 111 Mounting table, 112 First positioning member, 113 Second positioning member, 114 First moving portion, 115 First slider, 116 First block, 117 Second moving portion, 118 Second slider, 119 Second block, 120 Long hole, 121 Long hole, 122 First clamping mechanism, 123 Second clamping mechanism, 190 Accessories for substrate support member, 191 First accessory member, 192 Second accessory member, 193 Third accessory member, 193a First pin member, 194a Second pin member, 200 Management device, 212 First positioning member, 213 Second positioning member, B Screw, G11, G12, G21, G22 Long slot, H11, H12, H21, H22 Threaded hole, L Center line, L11, L12, L21, L22 Long hole, M Screen mask, P1, P2 Pattern hole, S Substrate, SC Scale.

Claims

1. An accessory for a substrate support member, which is attached to the substrate support member when the substrate support member for supporting a substrate is held by a transfer jig and transferred to a substrate processing machine. Among them, the accessory for the substrate support member includes: a first support member, which is attached to one side of the substrate support member; a second support member, which is attached to the other side of the substrate support member opposite to the one side; a connecting portion, which connects the first support member and the second support member in a manner that the interval between the two can be adjusted; and a held portion, which is held by the transfer jig.

2. The accessory for the substrate support member according to claim 1, wherein, the first support member has a first support member main body and a pair of first extending portions extending in orthogonal directions from both end portions of the first support member main body, the second support member has a second support member main body and a pair of second extending portions extending in orthogonal directions from both end portions of the second support member main body, the connecting portion has: a first connecting member, which connects one of the pair of first extending portions and one of the pair of second extending portions; and a second connecting member, which connects the other of the pair of first extending portions and the other of the pair of second extending portions.

3. An assembly jig for an accessory for a substrate support member, which is attached to the substrate support member when the substrate support member for supporting a substrate is held by a pair of opposing holding portions of a transfer jig and transferred to a substrate processing machine. The accessory for the substrate support member includes: a first support member, which is attached to one side of the substrate support member; a second support member, which is attached to the other side of the substrate support member opposite to the one side; a first connecting member, which connects one end portion of the first support member and one end portion of the second support member, and forms a first held portion held by one of the pair of holding portions of the transfer jig; and a second connecting member, which connects the other end portion of the first support member and the other end portion of the second support member, and forms a second held portion held by the other of the pair of holding portions of the transfer jig. Among them, the assembly jig for the accessory for the substrate support member includes: a first positioning member, which detachably holds the first connecting member to position the first held portion at a first position held by the one holding portion; a second positioning member, which detachably holds the second connecting member to position the second held portion at a second position held by the other holding portion; a first moving portion, which supports the first support member in a manner parallel to the center line passing through the first position and the second position, and can move in an orthogonal direction orthogonal to the center line; and a second moving portion, which is on the side opposite to the first moving portion with respect to the center line, supports the second support member in a manner parallel to the center line, and can move in an orthogonal direction orthogonal to the center line.

4. The assembling jig for the accessory for the substrate support member according to claim 3, wherein, the assembling jig for the accessory for the substrate support member includes: a placing table for placing the first positioning member, the second positioning member, the first moving part and the second moving part; a first fixing part for fixing the first moving part at an arbitrary position within a movable range relative to the placing table; and a second fixing part for fixing the second moving part at an arbitrary position within a movable range relative to the placing table.

5. An accessory for a substrate support member, which is mounted on the substrate support member when the substrate support member for supporting a substrate is held by a pair of opposing holding parts of a transfer jig and transferred to a substrate processing machine, wherein, the accessory for the substrate support member includes: a first support member mounted on one side of the substrate support member; a second support member mounted on the other side of the substrate support member opposite to the one side; a third support member mounted between the first support member and the second support member and extending along the extending directions of the first support member and the second support member; and a pair of held parts provided at both ends in the extending direction of the third support member and held by the pair of holding parts of the transfer jig.

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