Chemical reaction kettle for processing electroplating additive for integrated circuit

Abstract

The invention relates to the technical field of chemical reaction kettles, in particular to a chemical reaction kettle for processing electroplating additives for integrated circuits, which comprises a kettle body, a kettle cover is movably mounted at the upper end of the kettle body, a stirring mechanism is mounted at the upper end of the kettle cover, and the kettle body comprises a shell, an inner cylinder, a heat insulation sleeve plate, an auxiliary heating assembly and a main heating assembly. The outer shell and the inner cylinder are installed at the upper end of the kettle base, the heat insulation sleeve plates are installed on the inner side of the outer shell at equal intervals, the heat insulation sleeve plates are connected to the outer side of the inner cylinder in a sleeving mode, the auxiliary heating assemblies are jointly arranged on the corresponding sides between the heat insulation sleeve plates, and the main heating assemblies are arranged on the outer side of the inner cylinder at equal intervals. According to the stirring device, the stirring working efficiency and the uniform stirring effect are effectively improved, the temperature in the kettle body can be conveniently and effectively monitored and controlled, a proper temperature environment required by electroplating additive processing is conveniently provided, and the processing effect and the product quality are effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical reaction kettles, and in particular to a chemical reaction kettle for processing electroplating additives for integrated circuits. Background Art

[0002] Electroplating additives for integrated circuits include brighteners, wetting agents, leveling agents, stress relievers, etc. The function of the brightener is to increase the brightness of the coating, thereby reducing the polishing process; the function of the wetting agent is to strengthen the interfacial tension between the metal and the solution; the function of the leveling agent is to change the microscopic flatness of the metal surface; the function of the stress reliever is to reduce the internal stress of the coating, thereby improving the toughness of the coating.

[0003] During the processing of electroplating additives, the amount of materials added, the reaction temperature, etc. will all affect the product performance of electroplating additives, thereby affecting the performance of electroplating agents. Most of the existing chemical reaction kettles for processing electroplating additives detect the temperature inside the kettle body by designing built-in thermometers or temperature sensors. However, since a single temperature measurement device can only detect the temperature at a specific height, it is impossible to measure the temperature value inside the kettle body more accurately, resulting in a poor actual effect of temperature measurement. As a result, it is impossible to control the real-time actual temperature during the processing of electroplating additives, and thus effective mixing and stirring processing cannot be carried out, affecting the product quality. Therefore, we provide a chemical reaction kettle for processing electroplating additives for integrated circuits to solve this problem. Summary of the Invention

[0004] The purpose of the present invention is to solve the disadvantages existing in the prior art, and provide a chemical reaction kettle for processing electroplating additives for integrated circuits, which has the advantages of effectively improving the working efficiency of stirring and the effect of uniform stirring, being convenient for effectively monitoring and controlling the temperature inside the kettle body, facilitating the provision of a suitable temperature environment required for the processing of electroplating additives, and effectively improving the processing effect and product quality.

[0005] In order to achieve the above purpose, the present invention adopts the following technical scheme: Design a chemical reaction kettle for processing electroplating additives for integrated circuits, including a kettle body, the upper end of the kettle body is movably installed with a kettle cover, the upper end of the kettle cover is connected with a feed pipe, the upper end of the kettle cover is installed with a stirring mechanism, the lower end of the stirring mechanism penetrates through the kettle cover and extends into the inner cavity of the kettle body, the lower end of the kettle body is integrally connected with a kettle seat, the lower end of the kettle seat is installed with a discharge pipe, and a discharge valve is installed on the outer side of the discharge pipe; The kettle body includes a housing, an inner cylinder, a heat insulation jacket plate, an auxiliary heating component, and a main heating component. The housing and the inner cylinder are installed at the upper end of the kettle base. The heat insulation jacket plates are equidistantly installed on the inner side of the housing. The heat insulation jacket plates are sleeved outside the inner cylinder. A corresponding side between the heat insulation jacket plates is jointly provided with an auxiliary heating component. The auxiliary heating component is in contact with the inner cylinder. The main heating components are equidistantly arranged outside the inner cylinder.

[0006] Furthermore, the auxiliary heating component includes a collar and a heater. The collar is screwed between the heat insulation jacket plates. A heater is installed in the inner cavity of the collar. The inner cavity of the collar is filled with pure water.

[0007] Furthermore, side grooves are equidistantly arranged outside the inner cylinder. The main heating components are installed in the inner cavities of the side grooves. The main heating component includes a side plate and a heating wire. The heating wire is installed on one side of the side plate. The side plate is screwed in the inner cavity of the side groove.

[0008] Furthermore, both the kettle body and the heat insulation jacket plate are made of heat insulation and heat preservation materials.

[0009] Furthermore, the stirring mechanism includes a driving motor, a temperature monitoring component, a support seat, a support shaft, a first gear, an internal gear ring, a fixing plate, a stirring rod, and a second gear. The driving motor is installed at the upper end of the kettle cover. The output shaft of the driving motor penetrates through the kettle cover and is rotationally connected to the temperature monitoring component. A second gear is installed on the outer side of the output shaft of the driving motor. The top end of the inner cavity of the kettle cover is rotationally connected to the support shaft through the support seat. A first gear meshing with the second gear is installed on the outer side of the support shaft. An internal gear ring is meshed with the outer side of the first gear. The lower end of the internal gear ring is equidistantly connected with fixing plates. Stirring rods are installed at the lower ends of the fixing plates.

[0010] Furthermore, at least three groups of fixing plates are provided and are evenly distributed at the lower end of the internal gear ring. Spiral stirring blades are installed on the outer sides of the stirring rods.

[0011] Furthermore, the temperature monitoring component includes a bearing seat, a support tube, and a temperature sensor. The bearing seat is installed at the lower end of the output shaft of the driving motor. The support tube is rotationally connected in the inner cavity of the bearing seat. Temperature sensors are symmetrically and equidistantly installed on both sides of the support tube.

[0012] Furthermore, a slip ring is integrally connected to the lower end of the internal gear ring. A support ring is connected to the upper part of the inner cavity of the inner cylinder. A chute for sliding connection with the slip ring is provided at the upper end of the support ring.

[0013] Furthermore, sliding columns are symmetrically installed at the upper end of the internal gear ring. The inner cavity of the kettle cover is jointly connected with an annular slide rail through a plurality of connecting rods. The upper ends of the sliding columns are movably slid in the inner cavity of the annular slide rail.

[0014] A chemical reactor for electroplating additive processing in integrated circuits proposed by the present invention has the following beneficial effects: 1. It is heated by the heating wire of the main heating component, and the heat is dissipated in the inner cavity of the side groove. Then, heat conduction is carried out through the inner cylinder, and then the raw materials conduct heat, facilitating active heating and providing a temperature environment required for electroplating additive processing. At the same time, the temperature sensors of the temperature monitoring component are used to monitor the temperature at different height positions in the inner cavity of the inner cylinder in real time. When the temperatures detected by two temperature sensors at the same height position do not reach the temperature value set by the external temperature controller, the heater of the auxiliary heating component is automatically turned on to heat the pure water in the inner cavity of the collar to an appropriate temperature. The heat is transferred from the heated water to the collar, and the collar is attached to the outer side of the inner cylinder, so that the heat is quickly transferred to the outer wall of a certain height of the inner cylinder, and then the raw materials at this height quickly absorb the transmitted heat, enabling them to reach the temperature set by the external temperature controller as soon as possible, facilitating the attainment of the temperature required for electroplating additive mixing and processing, effectively improving the processing effect and product quality; 2. The output shaft of the drive motor drives the second gear to rotate, and the second gear drives the first gear installed on the outer side of the support shaft to rotate. The first gear drives the internally toothed ring meshing with it to rotate, and three or more groups of fixing plates at the lower end of the internally toothed ring and the stirring rods at their lower ends rotate synchronously. The spiral stirring blades on the outer side of the stirring rods fully mix and stir the raw materials of multiple electroplating additives in the inner cylinder of the reactor body. By simultaneously stirring with multiple stirring rods and the spiral stirring blades on their outer sides, the effect and working efficiency of uniform stirring are effectively improved, and the use effect is effectively enhanced. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic perspective view of the overall three-dimensional structure of a chemical reactor for electroplating additive processing in integrated circuits proposed by the present invention; Figure 2 It is a schematic perspective view from the bottom of the overall three-dimensional structure of a chemical reactor for electroplating additive processing in integrated circuits proposed by the present invention; Figure 3 It is a schematic perspective view of the stirring mechanism of a chemical reactor for electroplating additive processing in integrated circuits proposed by the present invention; Figure 4 Proposed by the present invention Figure 3 The enlarged structural schematic diagram of part A of the device; Figure 5 It is a schematic perspective view of the temperature monitoring component of a chemical reactor for electroplating additive processing in integrated circuits proposed by the present invention; Figure 6 It is a schematic perspective view of the half-section internal structure of the reactor body of a chemical reactor for electroplating additive processing in integrated circuits proposed by the present invention; Figure 7 Proposed by the present invention Figure 6 Schematic diagram of the enlarged structure of part B of the device in Figure 8 Schematic three-dimensional structure diagram of the auxiliary heating component of a chemical reaction kettle for processing electroplating additives for integrated circuits proposed by the present invention Figure 9 Schematic three-dimensional structure diagram of the half-section internal view of the kettle body of a chemical reaction kettle for processing electroplating additives for integrated circuits proposed by the present invention Figure 10 Schematic three-dimensional structure diagram of part of a chemical reaction kettle for processing electroplating additives for integrated circuits proposed by the present invention

[0016] In the figure: kettle body 1, outer shell 11, inner cylinder 12, heat insulation jacket plate 13, auxiliary heating component 14, collar 141, heater 142, support ring 15, chute 16, main heating component 17, side groove 18, kettle cover 2, feed pipe 3, stirring mechanism 4, drive motor 41, temperature monitoring component 42, bearing seat 421, support pipe 422, temperature sensor 423, support seat 43, support shaft 44, first gear 45, internal gear ring 46, fixing plate 47, stirring rod 48, spiral stirring blade 49, second gear 410, sliding column 411, sliding ring 412, kettle base 5, discharge pipe 6, discharge valve 7, connecting rod 8, annular slide rail 9 Specific embodiments

[0017] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments

[0018] Refer to Figure 1-10, A chemical reactor processed by an electroplating additive for integrated circuits, including a reactor body 1. The upper end of the reactor body 1 is movably installed with a reactor cover 2. The upper end of the reactor cover 2 is connected with a feed pipe 3. The upper end of the reactor cover 2 is installed with a stirring mechanism 4. The lower end of the stirring mechanism 4 penetrates through the reactor cover 2 and extends into the inner cavity of the reactor body 1. The lower end of the reactor body 1 is integrally connected with a reactor base 5. The lower end of the reactor base 5 is installed with a discharge pipe 6. A discharge valve 7 is installed on the outer side of the discharge pipe 6. The stirring mechanism 4 includes a driving motor 41, a support base 43, a support shaft 44, a first gear 45, an internal gear ring 46, a fixing plate 47, a stirring rod 48 and a second gear 410. The driving motor 41 is installed on the upper end of the reactor cover 2. The output shaft of the driving motor 41 is installed with the second gear 410 on the outer side. The top end of the inner cavity of the reactor cover 2 is rotatably connected with the support shaft 44 through the support base 43. The outer side of the support shaft 44 is installed with a first gear 45 meshing with the second gear 410. The outer side of the first gear 45 is meshed with the internal gear ring 46. The lower end of the internal gear ring 46 is equally spaced and connected with the fixing plates 47. Stirring rods 48 are installed at the lower ends of the fixing plates 47. At least three groups of fixing plates 47 are arranged and evenly distributed at the lower end of the internal gear ring 46. Helical stirring blades 49 are installed on the outer sides of the stirring rods 48. The lower end of the internal gear ring 46 is integrally connected with a sliding ring 412. The upper part of the inner cavity of the inner cylinder 12 is connected with a support ring 15. A sliding groove 16 for sliding connection with the sliding ring 412 is arranged at the upper end of the support ring 15. The upper end of the internal gear ring 46 is symmetrically installed with sliding columns 411. The inner cavity of the reactor cover 2 is jointly connected with an annular sliding rail 9 through a plurality of connecting rods 8. The upper ends of the sliding columns 411 are movably slidably connected in the inner cavity of the annular sliding rail 9. By turning on the switch of the driving motor 41 through an external controller, the output shaft of the driving motor 41 drives the second gear 410 to rotate. The second gear 410 drives the first gear 45 installed on the outer side of the support shaft 44 to rotate. The first gear 45 drives the internal gear ring 46 meshing with it to rotate. The sliding ring 412 at the lower end of the internal gear ring 46 stably slides in the inner cavity of the sliding groove 16 at the upper end of the support ring 15. At the same time, the sliding columns 411 at the upper end of the internal gear ring 46 slide in the inner cavity of the annular sliding rail 9, effectively improving the effect of stably supporting the internal gear ring 46 and facilitating the stable rotation of the internal gear ring 46, effectively improving the stability of its operation. At this time, three groups or more groups of fixing plates 47 at the lower end of the internal gear ring 46 and the stirring rods 48 at their lower ends rotate synchronously. The helical stirring blades 49 on the outer sides of the stirring rods 48 fully mix and stir the raw materials of a plurality of electroplating additives in the inner cylinder 12 of the reactor body 1. Through the simultaneous stirring of a plurality of stirring rods 48 and the helical stirring blades 49 on their outer sides, the effect of uniform stirring and the working efficiency are effectively improved, and the use effect is effectively improved.

[0019] The kettle body 1 includes a housing 11, an inner cylinder 12, a heat insulation jacket plate 13, an auxiliary heating component 14 and a main heating component 17. The housing 11 and the inner cylinder 12 are installed at the upper end of the kettle base 5. The heat insulation jacket plates 13 are installed equidistantly inside the housing 11. The heat insulation jacket plates 13 are sleeved outside the inner cylinder 12. An auxiliary heating component 14 is jointly arranged on one side corresponding to the heat insulation jacket plates 13. The auxiliary heating component 14 is attached to the inner cylinder 12. The main heating components 17 are arranged equidistantly outside the inner cylinder 12. The auxiliary heating component 14 includes a collar 141 and a heater 142. The collar 141 is screwed between the heat insulation jacket plates 13. The heater 142 is installed in the inner cavity of the collar 141. The inner cavity of the collar 141 is filled with pure water. Side grooves 18 are arranged equidistantly outside the inner cylinder 12. The main heating components 17 are installed in the inner cavities of the side grooves 18. The main heating component 17 includes a side plate and a heating wire. The heating wire is installed on one side of the side plate. The side plate is screwed in the inner cavity of the side groove 18. The output shaft of the driving motor 41 penetrates through the kettle cover 2 and is rotatably connected with a temperature monitoring component 42. The temperature monitoring component 42 includes a bearing seat 421, a support tube 422 and a temperature sensor 423. The bearing seat 421 is installed at the lower end of the output shaft of the driving motor 41. The support tube 422 is rotatably connected in the inner cavity of the bearing seat 421. The temperature sensors 423 are symmetrically and equidistantly installed on both sides of the support tube 422. When this reactor mixes and processes electroplating additives, the temperature control and adjustment of the heating of the main heating component 17 are carried out through an external temperature controller. Then, the heating wire of the main heating component 17 is heated, and heat is provided and dissipated in the inner cavity of the side groove 18. Subsequently, the inner cylinder 12 conducts heat, and then heat is transferred to the raw materials in the inner cavity of the inner cylinder 12, facilitating active heating. The temperature at different heights inside the inner cylinder 12 is monitored in real time by the temperature sensors 423 at different heights on the outer side of the support tube 422 of the temperature monitoring component 42. And two temperature sensors 423 are arranged at different height positions on the outer side of the support tube 422. When two temperature sensors 423 at the same height position detect that the temperature at this height position has not reached the temperature value set by the external temperature controller, the heater 142 of the auxiliary heating component 14 is automatically turned on through the external temperature controller. And the heater 142 heats the pure water in the inner cavity of the collar 141 to an appropriate temperature. The heat is transferred to the collar 141 through the heated water. And the collar 141 is attached to the outer side of the inner cylinder 12. Since the inner cavity area of the collar 141 is small and the capacity of the injected pure water is small, it is convenient, effective and fast to heat the pure water to the required temperature. And both the kettle body 1 and the heat insulation jacket plates 13 are made of heat insulation and heat preservation materials, effectively improving the heat preservation effect. Then, the heat is quickly transferred to the outer wall of a certain height of the inner cylinder 12, and then the raw materials at this height position quickly absorb the transmitted heat, so that the temperature quickly reaches the temperature value set by the external temperature controller, facilitating the attainment of the temperature required for the mixing and processing of electroplating additives, effectively improving the processing effect and the product quality.

[0020] Working principle: In the present invention, an external controller is connected to a driving motor 41 and a temperature sensor 423 for control, and an external thermostat is connected to a heating wire device of a main heating component 17 and a heater 142 for control, and the external controller is connected to the thermostat. During use, raw materials with various weight ratios are sequentially introduced into a kettle body 1 through a feed pipe 3. The temperature of the main heating component 17 is controlled and adjusted by the external temperature controller for heating, and then the heating wire of the main heating component 17 is heated to provide heat that dissipates in the inner cavity of a side groove 18. Subsequently, heat conduction is carried out by an inner cylinder 12, and heat is transferred to the raw materials in the inner cavity of the inner cylinder 12, facilitating active heating and conveniently providing a temperature environment required for electroplating additive processing. At the same time, temperature sensors 423 at different heights on the outer side of a support pipe 422 of a temperature monitoring component 42 are used to monitor the temperature at different height positions in the inner cavity of the inner cylinder 12 in real time. When two temperature sensors 423 at the same height position detect that the temperature at this height position has not reached the temperature value set by the external temperature controller, the heater 142 of an auxiliary heating component 14 is automatically turned on by the external thermostat. The heater 142 heats the purified water in the inner cavity of a collar 141 to an appropriate temperature, and the heat is transferred to the collar 141 through the heated water. The collar 141 is attached to the outer side of the inner cylinder 12. Since the inner cavity area of the collar 141 is small and the injected amount of purified water is small, it is convenient to effectively and quickly heat the purified water to the required temperature. Both the kettle body 1 and a heat insulation jacket plate 13 are made of heat insulation and heat preservation materials, effectively improving the heat preservation effect. Then, the heat is quickly transferred to the outer wall of a certain height of the inner cylinder 12, enabling the raw materials at this height position to quickly absorb the transmitted heat and reach the temperature set by the external temperature controller as soon as possible, facilitating the attainment of the temperature required for electroplating additive mixing processing, effectively improving the processing effect and product quality. At this time, the external controller turns on the switch of the driving motor 41. The output shaft of the driving motor 41 drives a second gear 410 to rotate, and the second gear 410 drives a first gear 45 installed on the outer side of a support shaft 44 to rotate. The first gear 45 drives an internal gear ring 46 meshing with it to rotate. A slip ring 412 at the lower end of the internal gear ring 46 stably slides in a chute 16 on the upper end of a support ring 15. At the same time, a sliding column 411 at the upper end of the internal gear ring 46 slides in an annular slide rail 9, effectively improving the effect of stably supporting the internal gear ring 46 and facilitating the stable rotation of the internal gear ring 46, effectively improving its working stability. At this time, three or more groups of fixing plates 47 at the lower end of the internal gear ring 46 and stirring rods 48 at their lower ends rotate synchronously, and spiral stirring blades 49 on the outer sides of the stirring rods 48 fully mix and stir multiple electroplating additive raw materials in the inner cylinder 12 of the kettle body 1. Through the simultaneous stirring of multiple stirring rods 48 and spiral stirring blades 49 on their outer sides, the effect of uniform stirring and working efficiency are effectively improved, and the use effect is effectively improved.

[0021] The above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention should cover within the protection scope of the present invention any equivalent substitution or change made according to the technical solution and inventive concept of the present invention.

Claims

1. A chemical reactor processed by an electroplating additive for an integrated circuit, comprising a kettle body (1), characterized in that, The upper end of the kettle body (1) is movably installed with a kettle cover (2). The upper end of the kettle cover (2) is connected with a feed pipe (3). The upper end of the kettle cover (2) is installed with a stirring mechanism (4). The lower end of the stirring mechanism (4) penetrates through the kettle cover (2) and extends into the inner cavity of the kettle body (1). The lower end of the kettle body (1) is integrally connected with a kettle base (5). The lower end of the kettle base (5) is installed with a discharge pipe (6). A discharge valve (7) is installed on the outer side of the discharge pipe (6). The kettle body (1) includes a housing (11), an inner cylinder (12), a heat insulation jacket plate (13), an auxiliary heating component (14), and a main heating component (17). The housing (11) and the inner cylinder (12) are installed on the upper end of the kettle base (5). Heat insulation jacket plates (13) are equidistantly installed inside the housing (11). The heat insulation jacket plates (13) are sleeved on the outer side of the inner cylinder (12). Corresponding sides between the heat insulation jacket plates (13) are jointly provided with an auxiliary heating component (14). The auxiliary heating component (14) is in contact with the inner cylinder (12). Main heating components (17) are equidistantly arranged on the outer side of the inner cylinder (12).

2. The chemical reactor processed by the electroplating additive for integrated circuits according to claim 1, characterized in that, The auxiliary heating component (14) includes a collar (141) and a heater (142). The collar (141) is screwed between the heat insulation jacket plates (13). A heater (142) is installed in the inner cavity of the collar (141). The inner cavity of the collar (141) is filled with pure water.

3. A chemical reactor processed with an electroplating additive for an integrated circuit according to claim 2, characterized in that, Side grooves (18) are equidistantly arranged on the outer side of the inner cylinder (12). The main heating components (17) are installed in the inner cavities of the side grooves (18). The main heating components (17) include side plates and heating wires. The heating wires are installed on one side of the side plates. The side plates are screwed in the inner cavities of the side grooves (18).

4. A chemical reactor processed by an electroplating additive for an integrated circuit according to claim 1, characterized in that, Both the kettle body (1) and the heat insulation jacket plates (13) are made of heat insulation and heat preservation materials.

5. A chemical reactor processed by an electroplating additive for an integrated circuit, characterized in that, The stirring mechanism (4) includes a driving motor (41), a temperature monitoring component (42), a support seat (43), a support shaft (44), a first gear (45), an internal gear ring (46), a fixing plate (47), a stirring rod (48), and a second gear (410). The driving motor (41) is installed on the upper end of the kettle cover (2). The output shaft of the driving motor (41) penetrates through the kettle cover (2) and then rotatably connects to the temperature monitoring component (42). A second gear (410) is installed on the outer side of the output shaft of the driving motor (41). The top end inside the kettle cover (2) is rotatably connected to a support shaft (44) through a support seat (43). A first gear (45) meshing with the second gear (410) is installed on the outer side of the support shaft (44). The outer side of the first gear (45) meshes with an internal gear ring (46). Fixing plates (47) are equidistantly connected to the lower end of the internal gear ring (46). Stirring rods (48) are installed at the lower ends of the fixing plates (47).

6. A chemical reactor processed by an electroplating additive for an integrated circuit according to claim 5, characterized in that, At least three groups of fixing plates (47) are provided and are evenly distributed at the lower end of the internal gear ring (46). Spiral stirring blades (49) are installed on the outer sides of the stirring rods (48).

7. A chemical reactor processed by an electroplating additive for an integrated circuit according to claim 5, characterized in that, The temperature monitoring component (42) includes a bearing housing (421), a support pipe (422) and a temperature sensor (423). The bearing housing (421) is installed at the lower end of the output shaft of the driving motor (41). The inner cavity of the bearing housing (421) is rotationally connected to the support pipe (422). The temperature sensors (423) are symmetrically and equidistantly installed on both sides of the support pipe (422).

8. A chemical reactor processed with an electroplating additive for an integrated circuit, characterized in that, A slip ring (412) is integrally connected to the lower end of the internal gear ring (46). A support ring (15) is connected to the upper part of the inner cavity of the inner cylinder (12). A chute (16) for slidingly contacting the slip ring (412) is provided at the upper end of the support ring (15).

9. A chemical reactor processed by an electroplating additive for an integrated circuit, characterized in that, Sliding columns (411) are symmetrically installed at the upper end of the internal gear ring (46). An annular slide rail (9) is commonly connected to the inner cavity of the kettle lid (2) through a plurality of connecting rods (8). The upper ends of the sliding columns (411) are movably slid in the inner cavity of the annular slide rail (9).

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