Laser processing equipment

Abstract

The present invention discloses a laser processing device (100), comprising: a beam shaping unit (2) and a focusing lens (3) arranged in sequence along a main optical path direction (D), wherein the beam shaping unit (2) comprises at least one set of optical wedge pairs, the optical wedge pairs being configured to be suitable for changing their positions relative to the main optical path to cover a predetermined optical path portion of the main optical path, and suitable for determining the optical path direction of the predetermined optical path portion by changing the deflection posture of at least one optical wedge in the optical wedge pair relative to the main optical path direction (D), so as to generate a main focus corresponding to the main optical path and an additional focus corresponding to the predetermined optical path portion through the focusing lens (3). According to certain exemplary embodiments, a laser processing device capable of generating multiple focal points and finely adjusting the focal position with high precision can be provided, which has a simple structure, is easy to manufacture, has strong compatibility, and is widely applicable.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a laser processing device, in particular a laser processing device for multi-focus welding, in particular dual-focus welding. Background Art

[0002] In some laser applications such as laser welding, it is often necessary to apply multiple focal points so that multiple beams are focused on the processing object at different positions to perform the desired laser processing. The power distribution and position layout of these focal points vary according to the specific processing needs. For example, sometimes only a very small offset is required between the two focal points, that is, it is desired to generate two beams with a very small relative deflection angle in the laser equipment, for example, a relative deflection angle of less than 0.1°, and it is desired to have an accuracy of 0.01° or even 0.005°. Laser processing equipment in the prior art usually splits the laser beam and uses a single optical wedge to deflect the corresponding laser beam. Under the above-mentioned very small deflection angle requirement, due to the high precision requirements of laser welding, the top angle of the single optical wedge used needs to reach 0.2°, and the manufacturing error is usually limited to within 0.05° or even 0.02°. However, the optical wedges currently in use have difficulty achieving a 0.2° apex angle due to their inherent manufacturing process. Furthermore, the manufacturing tolerance of optical wedges manufactured with current technology has reached approximately 0.1°, which obviously makes it difficult to achieve the extremely small angle deflection of the aforementioned magnitude and precision between laser beams. Therefore, the aforementioned disadvantages of a single optical wedge limit the application of the entire laser processing equipment. Summary of the Invention

[0003] An object of the present invention is to provide a laser processing device that can at least partially solve the above-mentioned problems existing in the prior art.

[0004] According to a first aspect of the present invention, there is provided a laser processing device, in particular a laser processing device for multi-focus welding, in particular dual-focus welding, comprising:

[0005] The beam shaping unit and focusing lens are arranged in sequence along the main light path.

[0006] The beam shaping unit includes at least one set of optical wedge pairs, each of which is configured to change its position relative to the main optical path to cover a predetermined optical path portion of the main optical path, and is configured to determine the optical path direction of the predetermined optical path portion by changing the deflection posture of at least one optical wedge in the optical wedge pair relative to the direction of the main optical path, so that a main focus corresponding to the main optical path and an additional focus corresponding to the predetermined optical path portion can be generated through the focusing lens.

[0007] According to an optional embodiment of the present invention, the optical wedge pair includes a first optical wedge and a second optical wedge arranged sequentially and placed substantially complementarily along the main optical path, and the first optical wedge and / or the second optical wedge are configured to be deflectable around a normal to a main cross section of the optical wedge.

[0008] According to an optional embodiment of the present invention, the first optical wedge is a deflectable optical wedge, the second optical wedge is a fixed optical wedge, and the light exit surface of the second optical wedge is perpendicular to the main optical path direction.

[0009] According to an optional embodiment of the present invention, the first optical wedge is a fixed optical wedge, the second optical wedge is a deflectable optical wedge, and the light incident surface of the first optical wedge is perpendicular to the main optical path direction.

[0010] According to an optional embodiment of the present invention, in at least one set of optical wedge pairs, the first optical wedge and the second optical wedge have substantially the same shape and size.

[0011] According to an optional embodiment of the present invention, in at least one set of optical wedge pairs, the vertex angles of the first optical wedge and the second optical wedge have angle values ​​selected from a range of 5° to 25°.

[0012] According to an optional embodiment of the present invention, in the at least one set of optical wedge pairs, a vertex angle between the first optical wedge and the second optical wedge is 10° to 15°.

[0013] According to an optional embodiment of the present invention, in the at least one set of optical wedge pairs, a difference between the vertex angles of the first optical wedge and the second optical wedge is 0° to 2°, in particular, 0° to 0.5°.

[0014] According to an optional embodiment of the present invention, in at least one set of optical wedge pairs, the refractive index n of the first optical wedge and the second optical wedge are substantially equal.

[0015] According to an optional embodiment of the present invention, in at least one additional set of optical wedge pairs, the first optical wedge and the second optical wedge have different shapes and / or sizes.

[0016] According to an optional embodiment of the present invention, in at least one additional pair of optical wedges, a difference between the vertex angles of the first optical wedge and the second optical wedge is greater than 2°.

[0017] According to an optional embodiment of the present invention, the beam shaping unit further includes a movement execution mechanism corresponding to each group of optical wedge pairs, which is configured to execute position movement of the corresponding optical wedge pair.

[0018] According to an optional embodiment of the present invention, the beam shaping unit further includes a deflection actuator corresponding to at least one optical wedge in each set of optical wedge pairs, and configured to execute a deflection motion of the corresponding optical wedge.

[0019] According to an optional embodiment of the present invention, the beam shaping unit further comprises at least one group of single optical wedges, wherein the single optical wedges have a vertex angle smaller than 25° and / or are adapted to be deflected relative to the direction of the main optical path.

[0020] According to an optional embodiment of the present invention, the beam shaping unit further includes a diffraction optical device, in particular a diffraction grating.

[0021] According to an optional embodiment of the present invention, the laser processing apparatus further includes a control unit configured to control the beam shaping unit to perform various settings and operations.

[0022] According to certain exemplary embodiments of the present invention, a laser processing device can be provided that can generate multiple focal points and fine-tune the focal position with high precision. The device has a simple structure and is easy to manufacture, and has strong compatibility and wide application. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention will be described in more detail below with reference to the accompanying drawings, so that the principles, features and advantages of the present invention can be better understood. The accompanying drawings include:

[0024] Figure 1 A schematic structural diagram of a laser processing device according to an exemplary embodiment of the present invention is shown;

[0025] Figure 2 Schematically illustrates a working state of a beam shaping unit of a laser processing device according to an exemplary embodiment of the present invention;

[0026] Figures 3a to 3e The working principle of at least one set of optical wedge pairs of a beam shaping unit of a laser processing device according to another exemplary embodiment of the present invention is shown;

[0027] Figure 4a and Figure 4b The deflection of the incident laser beam by a single optical wedge at different incident angles is shown in an exaggerated scale. Figure 4c A graph showing the corresponding relationship between the angular deflection amount of the outgoing laser beam relative to the incident laser beam and the incident angle of the incident laser beam for a single optical wedge;

[0028] Figure 5a and Figure 5b The figures show the situation in which the laser beam passes through the two wedges in the wedge pair in sequence in an example. DETAILED DESCRIPTION

[0029] In order to make the technical problems, technical solutions, and beneficial technical effects to be solved by the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and a number of exemplary embodiments. It should be understood that the specific embodiments described herein are only intended to illustrate the present invention and are not intended to limit the scope of protection of the present invention. In addition, for the sake of clarity, some figure marks are omitted in some drawings, which of course does not mean that the corresponding embodiments do not include the unmarked parts.

[0030] Figure 1 FIG. 1 shows a schematic structural diagram of a laser processing device 100 according to an exemplary embodiment of the present invention. Figure 1 As shown, a laser processing device 100 according to an exemplary embodiment of the present invention includes at least a laser source 1 for emitting a laser beam, a beam shaping unit 2 and a focusing lens 3 sequentially arranged along a main optical path direction D of the laser beam. The laser beam emitted from the laser source 1 forms a corresponding focus on the focal plane of the focusing lens 3 after passing through the beam shaping unit 2 and the focusing lens 3 sequentially along the main optical path direction D, and is suitable for performing corresponding laser processing on a workpiece 900.

[0031] Figure 2 FIG. 1 schematically shows a working state of the beam shaping unit 2 of the laser processing device 100 according to an exemplary embodiment of the present invention. Figure 2 As shown, the beam shaping unit 2 may include multiple groups of beam shaping devices 21-24 for performing various adjustments to the laser beam. At least a portion, and preferably all, of these beam shaping devices 21-24 are configured to be able to change their respective positions relative to the main optical path and perform corresponding shaping operations on a predetermined optical path portion of the main optical path. In the laser processing device 100 according to the exemplary embodiment of the present invention, in order to be able to change the optical path direction of a portion of the laser beam by a small angle of, for example, 0.1° and ultimately obtain two focal points with a very small offset through the focusing lens 3, the beam shaping unit 2 is configured with at least one group of optical wedge pairs 21. The optical wedge pair 21 is composed of two identical or similar optical wedges placed substantially complementary to each other, and can deflect the portion of the laser beam transmitted through the optical wedge pair 21 by a small angle by deflecting at least one of the optical wedges relative to the other. "Complementarily placed" here refers to a placement method in which the apex angles of identical or similar optical wedges are opposite and the same or identical working surfaces are placed opposite to each other, for example Figures 3a to 3e In addition, the “vertex angle” here refers to the angle formed between the two working surfaces (refractive surfaces) of the optical wedge or its extended surface. In other words, the vertex angle here does not need to be a real angle, that is, the optical wedge can also be a trapezoidal optical wedge.

[0032] The principles underlying the embodiments of the present invention are as follows: Figures 3a to 3eAs shown, each optical wedge is shown in its main cross section (the optical axis cross section perpendicular to the edge of the intersection line of the working surface), and as described above, the two optical wedges are placed substantially complementary. Figure 3b and Figure 3c Two cases where the optical wedge located at the top of each figure is deflected are shown respectively. Figure 3d and Figure 3e Two cases where the optical wedge at the bottom of each figure is deflected are shown, and it is assumed that the vertex angles of the two optical wedges are the same. Figure 3a As shown in the figure, when two substantially identical optical wedges are placed complementarily to form an optical wedge pair, and the deflection angle between the two optical wedges is 0°, the incident laser beam undergoes two refractions at the same angle but in opposite directions, resulting in a slight positional offset, but its optical path direction is parallel to the original optical path direction, that is, the optical wedge pair deflects the corresponding optical path portion by 0° (no deflection). Figures 3b to 3e As shown in the figures, when one optical wedge is fixed and the other is rotated relative to the fixed wedge by a certain angle, as indicated by the hollow arrows in each figure, the incident laser beam undergoes multiple refractions in the two wedges at different angles and directions. This creates a counter-differentiation effect between the two wedge deflections experienced by the laser beam, resulting in a final output laser beam with only a slight deflection relative to the original optical path, with the deflection angle being much smaller than the wedge rotation angle. Note that for illustrative purposes, each deflection of the laser beam and the resulting slight deflection angle are schematically shown in an exaggerated manner in each figure. As can be seen, because a pair of substantially complementary optical wedges can offset each other's refractive effects on the optical path to a certain extent, using such a pair of optical wedges can achieve a very small deflection angle of the incident optical path through the relative deflection between the wedges. The deflection direction depends on the specific specifications and deflection method of the wedges.

[0033] The following is a detailed description using an optical wedge with a vertex angle of 13° and a refractive index n=1.46 as an example. Figure 4a and Figure 4b The figure shows the deflection of the incident laser beam by a single optical wedge at different incident laser beam angles on an exaggerated scale. As can be seen from the figure, as the incident laser beam angle changes, or relatively speaking, as the optical wedge deflects, the deflection angle of the outgoing laser beam from the single optical wedge relative to the incident laser beam also changes. Figure 4c The graph of the corresponding relationship between the angular deflection δ of the outgoing laser beam relative to the incident laser beam and the incident angle α of the incident laser beam for the single optical wedge is shown. Figure 4cAfter obtaining the corresponding relationship of the laser beam deflection angle shown, when two optical wedges are used to form an optical wedge pair, the corresponding angular deflection amounts can be queried in the curve graph for the two optical wedges in turn based on the incident angle of the incident laser beam on the first optical wedge, thereby obtaining the angular deflection amount of the final laser beam relative to the incident laser beam when it is emitted from the second optical wedge, that is, from the optical wedge pair.

[0034] As an example, two of the above-mentioned wedges (vertex angle 13°, refractive index n=1.46) are used to form a wedge pair, and according to Figure 3d The pattern shown deflects the second wedge, and the laser beam passes through the two wedges in sequence. Figure 5a and Figure 5b As shown in Figure 5a As shown, the incident laser beam A is at a first incident angle (0° is shown in the figure as an example) incident on the first optical wedge , you can Figure 4c The first outgoing laser beam B relative to the first incident angle is found in the curve diagram Angular deflection , then consider the second optical wedge Relative to the first wedge The deflection angle β can be calculated to indicate that the first outgoing laser beam B enters the second optical wedge The second incident angle It should be noted that since the two identical wedges are placed complementary, that is, at opposite apex angles, the first wedge Corresponding Figure 4c For the curve graph, the second incident angle Reverse the sign of the , and then query (you may need to query the part with negative incident angle, Figure 4c (not shown), it is found that the corresponding second outgoing laser beam C is relative to the second incident angle Angular deflection , and then based on The total angular deflection of the second outgoing laser beam C relative to the incident laser beam A can be calculated by using β and β. Conversely, according to the desired deflection angle of the outgoing laser beam, the second optical wedge can be Reverse query the corresponding curve graph to determine its second incident angle , and then according to the fixed angle deflection amount of the first outgoing laser beam B Determine the second optical wedge Relative to the first wedge Similarly, in Figure 3b 、 3c In the modes shown in 3e and 3e, the posture or deflection angle of the corresponding optical wedge can also be determined according to the desired deflection angle of the outgoing laser beam by reversely querying the corresponding curve graph.

[0035] from Figure 5a and Figure 5b It can also be seen from the schematic diagram that after being refracted in opposite directions by the two optical wedges, the deflection of the final second outgoing laser beam C relative to the incident laser beam A is smaller than that of a single optical wedge. The deflection amount of the incident laser beam A. Generally, when the two optical wedges are essentially identical or similar, when one optical wedge is deflected by approximately 5°, the resulting deflection angle of the output laser beam relative to the initial incident laser beam is less than 0.1°. Thus, by using an appropriately selected optical wedge pair, the deflection angle of the output laser beam can be minutely and precisely altered through controllable deflection of the optical wedges.

[0036] In addition, Figure 3d and 3e Taking the example of the mode where the incident angle of the first wedge along the optical path is 0° and only the second wedge is deflected, the angle of the final outgoing laser beam can also be calculated by applying the following formula. 、 、 、 Represent in turn Figure 3d and Figure 3e The laser beam angles at the four surfaces of the two optical wedges from top to bottom are defined as follows: Figure 3d and Figure 3e For an axis facing outward from the paper, clockwise rotation is positive and counterclockwise rotation is negative. and is the apex angle of the optical wedge, and β is also the deflection angle of the second optical wedge. is the refractive index of the two wedges, for example, about 1.5. Assuming that the light beam propagates only in air (vacuum) and optical elements, and assuming that the refractive index of air or vacuum is 1, the calculation formula for refraction can be obtained:

[0037]

[0038] Likewise, in turn, depending on the angle of the desired outgoing laser beam , and fixed 、 and , which can be deduced in reverse and the deflection angle β of the second wedge. Similarly, Figure 3b and 3c In each of the modes shown, the posture or deflection angle of the corresponding optical wedge can also be determined according to the corresponding formula.

[0039] It can also be concluded from the formula that when light passes through two complementary wedges, the two deflections of the light form an opposite difference effect, so that a very small deflection angle can be obtained.

[0040] Based on the above principles, Figure 2 As shown, in the laser processing device 100, as a wedge pair 21 in the beam shaping unit 2, the substantially identical first wedge and the second wedge They are arranged in sequence along the main optical path direction D and are placed substantially complementary to each other. The beam shaping unit 2 further includes a movement actuator corresponding to the optical wedge pair 21 and a deflection actuator corresponding to the deflectable optical wedge in the optical wedge pair (both not shown). The movement actuator can be, for example, a fixture, and is configured to execute the position movement of the corresponding optical wedge pair 21 so that the corresponding optical wedge pair 21 can cover a predetermined optical path portion of a predetermined proportion of the main optical path, and determine the power ratio of the predetermined optical path portion to be deflected to the remaining portion of the main optical path; the deflection actuator is configured to execute the deflection movement of the corresponding deflectable optical wedge so that the corresponding first optical wedge and / or a second optical wedge The optical wedge pair 21 is capable of deflecting about the normal to the main cross-section of the optical wedge. Thus, the optical wedge pair 21 is configured to change its position relative to the main optical path to determine the power ratio of the predetermined optical path portion it covers, and is also configured to determine the optical path direction of the predetermined optical path portion covered by changing the deflection posture of at least one of the deflectable optical wedges relative to the main optical path direction D, thereby enabling a main focus corresponding to the main optical path and an additional focus corresponding to the predetermined optical path portion to be generated through the focusing lens 3.

[0041] As explained above, since appropriate deflection of the optical wedges in the optical wedge pair 21 can cause a small angle deflection of the laser beam, a correspondingly small magnitude adjustment of the distance between the main focus and the additional focus can be achieved.

[0042] On the other hand, the wedge pair 21 in the beam shaping unit 2 as described above can also reduce the manufacturing requirements of the wedge and increase the tolerance range of the wedge manufacturing, or compensate for the manufacturing tolerance of the wedge. For example, in certain high-precision processing situations, such as dual-focus welding, the required deflection angle of the partial laser beam is 0.2±0.02. The vertex angle of the single wedge corresponding to this angle has reached the angular tolerance limit for the wedge manufacturer, resulting in low manufacturing yield and high cost. However, according to the laser processing device 100 of the embodiment of the present invention, this small deflection angle can be achieved by a pair of conventional wedges (for example, with a vertex angle of 12°), thereby reducing the parameter requirements for the wedge and saving manufacturing costs. For another example, for a wedge with a vertex angle of 12°, the tolerance of the wedges produced by an optical component manufacturer is ±0.5°. When two wedges with vertex angles of 12° and 12.5° are selected without loss of generality, it is obvious that they cannot offset the deflection of the laser beam by simply placing them in a complementary manner due to their different vertex angles. In this case, for example, by fixing the first wedge as described above And for the second optical wedge By reversing the curve or the formula, we can still determine the second optical wedge The relative posture or deflection angle of the optical wedge can be adjusted to obtain a desired laser beam deflection angle of, for example, less than 0.1 degrees, without being affected by the manufacturing tolerance of the optical wedge.

[0043] In an optional exemplary embodiment, the first optical wedge The second optical wedge is a deflectable optical wedge. is a fixed wedge, and the second wedge The light exit surface of the second optical wedge is perpendicular to the main light path direction D. The light emitting surface is fixed and perpendicular to the main light path direction D, so it is convenient to determine the first optical wedge according to the deflection angle of the final emitted laser beam by querying the above-mentioned curve graph corresponding to each optical wedge or by deducing it through a relatively simple formula. deflection posture.

[0044] In a particularly preferred exemplary embodiment, the first optical wedge For fixed optical wedge, the second optical wedge is a deflectable optical wedge, and the first optical wedge The light incident surface is perpendicular to the main light path direction D. With this arrangement, the first optical wedge Fixed and its light incident surface is perpendicular to the main light path direction D, so from the first wedge The deflection angle of the emitted laser beam is fixed, so it is more convenient to query the second optical wedge according to the emission angle and the desired deflection angle of the final emitted laser beam. The corresponding curve above or the second optical wedge can be determined by simple formula derivation deflection posture.

[0045] Alternatively or additionally, the first optical wedge and the second wedge Furthermore, the beam shaping unit 2 may include a plurality of different wedge pairs 21, in which only the first wedge For deflectable wedges, in one or more additional wedge pairs 21, only the second wedge The optical wedges 21 are deflectable optical wedges, and in the remaining optical wedge pairs 21, both optical wedges are deflectable optical wedges. These optical wedge pairs 21 can be selectively called and set according to different application requirements.

[0046] In one exemplary embodiment, in at least one set of optical wedge pairs, the first optical wedge and the second wedge The vertex angle of the first optical wedge has an angle value selected from the range of 5° to 25°. In a more preferred embodiment, the first optical wedge and the second wedge The top angle is 10° to 15°, for example, 11° or 12°. Two optical wedges with substantially the same shape and size within this angle range or angle value are more conducive to causing a slight angular shift in the corresponding laser beam parts through deflection.

[0047] First optical wedge With the second optical wedge There may be a slight angle difference between the top angles of the first optical wedge, which may be in the range of 0° to 2°, more preferably 0° to 0.5°. The vertex angle is 11°, and the second optical wedge The vertex angle is 11.3°, as long as the required small-scale laser beam angle deflection can be achieved. With the second optical wedge The vertex angles of the same first wedge can be close, but not necessarily identical. and the second wedge It is more convenient for angle adjustment and more conducive to mass production.

[0048] In a laser processing apparatus according to an exemplary embodiment of the present invention, the adjustment of the deflection angle, or optical path direction, of a portion of the laser beam is not limited to small angles. In one exemplary embodiment, the beam shaping unit 2 further includes an additional optical wedge pair 22 capable of adjusting the direction of a portion of the optical path at a larger angle and with high precision. For example, in this additional optical wedge pair 22, the two optical wedges may have different shapes and / or sizes, or the difference in vertex angle between the first and second optical wedges may be relatively large, for example, greater than 2° or even greater, so that deflecting one of the optical wedges can cause a larger angular deflection of the optical path direction of the outgoing laser beam. In one example, using an optical wedge pair with vertex angles of 13° and 15°, respectively, when one optical wedge is deflected by 5°, an angular deflection of the outgoing laser beam of 1.0° to 1.1° can be achieved.

[0049] In an exemplary embodiment, the beam shaping unit 2 further includes at least one set of single optical wedges 23, which may have a vertex angle less than 25° and / or be adapted to be deflected relative to the main optical path direction D, thereby enabling desired optical path adjustment of the corresponding optical path portion.

[0050] In one exemplary embodiment, wedge pair 21, the wedges in additional wedge pair 22, and / or single wedge 23 are all coated with an antireflection coating. The antireflection coating is applied to all faces and corners of the wedges. If the angles of the wedges are very small, for example, less than 20°, the same antireflection coating can be used to cover different surfaces of the wedges, which is advantageous for mass production of wedges.

[0051] In an exemplary embodiment, the beam shaping unit 2 further includes a diffraction optical device 24, in particular a diffraction grating, which can also be configured to change its position relative to the main light path to perform corresponding shaping processing on a predetermined light path portion of the main light path.

[0052] In an exemplary embodiment, the beam shaping unit 2 includes multiple beam shaping devices 21-24 described in the above embodiments and / or other known beam shaping devices not mentioned above. These beam shaping devices can be selectively used simultaneously in parallel or in series to split the main laser beam into multiple parts and perform one or more shaping processes on each part, thereby obtaining multiple focal spots with desired power distribution and position layout for target processing.

[0053] The laser processing apparatus 100 may further include a control unit 4 configured to control the beam shaping unit 2 to perform various settings and operations. For example, the control unit 4 determines the operation of each shaping optical component, such as the position of a wedge pair 21 relative to the main optical path and the deflection angle of one or both wedges, based on processing requirements (the number of focal points required, power ratio, and relative position), and controls the execution of these operations, such as the translation and deflection of the wedge pair.

[0054] It is obvious to those skilled in the art that the technical concept of the present invention is not limited to laser welding lithium battery casings, but can also be used to weld structures of any shape. At the same time, it is not limited to a fully enclosed arrangement, but can be adjusted according to actual welding needs.

[0055] Although specific embodiments of the present invention have been described in detail herein, they are provided for illustrative purposes only and should not be considered to limit the scope of the present invention. Various replacements, changes, and modifications may be conceived without departing from the spirit and scope of the present invention.

Claims

1. A laser processing device (100) for multi-focus welding, comprising: A beam shaping unit (2) and a focusing lens (3) are sequentially arranged along a main optical path direction (D), wherein the beam shaping unit (2) comprises at least one set of optical wedge pairs, the optical wedge pairs being configured to be suitable for changing their positions relative to the main optical path so as to cover a predetermined optical path portion of the main optical path, and being suitable for determining the optical path direction of the predetermined optical path portion by changing the deflection posture of one optical wedge in the optical wedge pair relative to the main optical path direction (D) by deflecting the optical wedge around the normal of the main cross section of the optical wedge, so as to enable a main focus corresponding to the main optical path and an additional focus corresponding to the predetermined optical path portion to be generated through the focusing lens (3), wherein the optical wedge pair comprises a first optical wedge ( ) and the second optical wedge ( ), and the light incident surface or light exit surface of the fixed wedge side of the wedge pair is perpendicular to the main light path direction (D), and wherein, in at least one set of wedge pairs (21): the first wedge ( ) and the second optical wedge ( ) has a vertex angle of 10°~15°, and the first optical wedge ( ) and the second optical wedge ( ) have an angular difference of no more than 2° between their vertex angles.

2. The laser processing device (100) according to claim 1, wherein: The first optical wedge ( ) is a deflectable optical wedge, the second optical wedge ( ) is a fixed optical wedge, and the second optical wedge ( ) is perpendicular to the main optical path direction (D); or the first optical wedge ( ) is a fixed optical wedge, the second optical wedge ( ) is a deflectable optical wedge, and the first optical wedge ( ) is perpendicular to the main light path direction (D).

3. The laser processing device (100) according to claim 2, wherein: In at least one set of optical wedge pairs (21): the first optical wedge ( ) and the second optical wedge ( ) are substantially the same in shape and size; and / or the first optical wedge ( ) and the second optical wedge ( ) have a substantially equal refractive index n.

4. The laser processing device (100) according to claim 3, wherein: In at least one additional set of wedge pairs (22): the first wedge and the second wedge have different shapes and / or sizes; and / or the difference between the vertex angles of the first wedge and the second wedge is greater than 2°.

5. The laser processing device (100) according to any one of claims 1, 2 and 4, wherein: The beam shaping unit (2) further comprises: a movement actuator corresponding to each group of optical wedge pairs, which is configured to execute position movement of the corresponding optical wedge pair; and a deflection actuator corresponding to at least one optical wedge in each group of optical wedge pairs, which is configured to execute deflection movement of the corresponding optical wedge.

6. The laser processing device (100) according to any one of claims 1, 2 and 4, wherein: The beam shaping unit (2) further comprises at least one group of single optical wedges (23), wherein the single optical wedges (23) have a vertex angle less than 25° and / or are suitable for deflection relative to the main optical path direction (D).

7. The laser processing device (100) according to any one of claims 1, 2 and 4, wherein: The beam shaping unit (2) further comprises a diffraction optical device (24).

8. The laser processing device (100) according to any one of claims 1, 2, and 4, further comprising: A control unit (4) is configured to control the beam shaping unit (2) to perform various settings and operations.

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