Online barium replenishment method, device, electronic equipment and medium for single crystal furnace

Abstract

The present application provides an online barium replenishment method, device, electronic device, and medium for a single crystal furnace, which effectively solves the problem that the quartz crucible of a traditional single crystal furnace cannot be replenished with barium online during the production of single crystal silicon, thereby affecting the production of single crystal silicon. The method includes: the multiple state acquisition instrument detects multiple state data of the quartz crucible in real time and inputs the data into the industrial computer; the industrial computer calculates the multiple state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, and evaluates the multiple barium replenishment settlement results to obtain a barium replenishment demand result; the industrial computer generates a barium replenishment instruction based on the barium replenishment demand result and sends the barium replenishment instruction to the barium replenishment execution mechanism; the barium replenishment execution mechanism responds to the barium replenishment instruction and executes the barium replenishment method to replenish the target barium replenishment area of ​​the quartz crucible online at the barium replenishment rate.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon production, and in particular to an online barium replenishment method, device, electronic equipment and medium for a single crystal furnace. Background Art

[0002] In the process of producing single crystal silicon, the single crystal furnace needs to provide an environment that is pollution-proof, high-temperature-resistant, and corrosion-resistant. The quartz crucible can not only carry materials and prevent pollution, but also withstand high temperatures and chemical reactions under high temperature and high pressure. It is not corroded, does not release any elements, and will not cause any impact on the production process, thereby ensuring the production quality of single crystal silicon.

[0003] However, during the single crystal silicon growth process, quartz crucibles are exposed to high temperatures (>1500°C) and the corrosive environment of high-purity molten silicon for long periods of time, making them susceptible to phase transformations (such as crystallization) and structural degradation, shortening the life of the quartz crucible and reducing the purity of the single crystal silicon. The traditional remedy is to pre-coat it with barium powder (BaO or BaCO3) to form a protective layer. However, this coating easily evaporates or consumes at high temperatures for long periods of time and cannot be dynamically replenished, causing the protective effect to decay over time. Furthermore, shutting down the machine to replenish the barium powder interrupts the production process, reducing efficiency and increasing costs, affecting single crystal silicon production. Summary of the Invention

[0004] In view of this, the purpose of the present application is to provide an online barium replenishment method, device, electronic equipment and medium for a single crystal furnace. The online barium replenishment method, device, electronic equipment and medium for a single crystal furnace effectively solve the problem that the quartz crucible of a traditional single crystal furnace cannot be replenished with barium online during the production of single crystal silicon, thereby affecting the production of single crystal silicon.

[0005] In a first aspect, an embodiment of the present application provides an online barium replenishment method for a single crystal furnace, wherein the single crystal furnace is equipped with multiple state acquisition instruments and a barium replenishment actuator, wherein the multiple state acquisition instruments are connected to an industrial computer, and the industrial computer is connected to the barium replenishment actuator; the method comprises:

[0006] The multiple status acquisition instrument detects multiple status data of the quartz crucible of the single crystal furnace in real time during use, and inputs the multiple status data into the industrial computer;

[0007] The industrial computer calculates the multiple state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, and evaluates the multiple barium replenishment settlement results to obtain a barium replenishment demand result; the barium layer loss model is pre-trained;

[0008] The industrial computer generates a barium supplementation instruction based on the barium supplementation demand result, and sends the barium supplementation instruction to the barium supplementation execution mechanism; the barium supplementation instruction includes a barium supplementation rate, a barium supplementation method, and a target barium supplementation area based on PID;

[0009] The barium replenishment execution mechanism responds to the barium replenishment instruction and executes the barium replenishment method to online replenish barium in the target barium replenishment area of ​​the quartz crucible at the barium replenishment rate.

[0010] In combination with the first aspect, the embodiment of the present application provides a first possible implementation of the first aspect, wherein the industrial computer generates a barium supplementation instruction based on the barium supplementation demand result, including:

[0011] determining in real time whether the type of the barium supplementation requirement result is a target type, and calling a target barium supplementation correction factor based on the target type;

[0012] The target barium supplement correction factor and the barium supplement demand result are processed based on a preset barium supplement rate calculation network to obtain the barium supplement rate in the barium supplement instruction.

[0013] In combination with the first aspect, the embodiment of the present application provides a second possible implementation of the first aspect, wherein calling the target barium supplementation correction factor based on the target type includes:

[0014] Pre-establishing a mapping relationship between the type of the barium supplementation requirement result and the barium supplementation correction factor;

[0015] Based on the mapping relationship and the additional status data corresponding to the target type, a target barium supplement correction factor of the single crystal furnace is determined.

[0016] In combination with the first aspect, the embodiment of the present application provides a third possible implementation of the first aspect, wherein, before performing the barium replenishment method and online barium replenishment in the target barium replenishment area of ​​the quartz crucible at the barium replenishment rate, the method includes:

[0017] determining a barium-filling direction for the quartz crucible based on the barium-filling method, and judging whether the barium-filling direction matches the rotation direction of the single crystal furnace;

[0018] If so, the barium supplement execution structure is controlled to execute the barium supplement method to perform online barium supplementation.

[0019] In combination with the first aspect, the embodiment of the present application provides a fourth possible implementation of the first aspect, wherein controlling the barium supplementation actuator to execute the barium supplementation method to perform online barium supplementation includes:

[0020] determining whether the ejection direction of the barium powder ejection unit in the barium replenishment actuator is consistent with the target barium replenishment area;

[0021] If not, the spraying direction of the barium powder spraying unit is adjusted to perform online barium replenishment on the target barium replenishment area.

[0022] In combination with the first aspect, the embodiment of the present application provides a fifth possible implementation of the first aspect, wherein evaluating the multiple barium supplementation settlement results to obtain a barium supplementation demand result includes:

[0023] determining whether the plurality of barium supplementation settlement results meet corresponding barium supplementation conditions to generate a corresponding determination result;

[0024] The judgment results corresponding to the multiple barium supplementation settlement results are integrated to obtain the barium supplementation demand result.

[0025] In combination with the first aspect, the embodiment of the present application provides a sixth possible implementation of the first aspect, wherein the industrial computer calculates the multiple state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, including:

[0026] Matching the plurality of state data with a plurality of barium replenishment calculation sub-models preset in the barium layer loss model to obtain a matching result;

[0027] Based on the matching result, the barium supplementation calculation sub-model is called to calculate corresponding state data to obtain a plurality of barium supplementation calculation results.

[0028] In a second aspect, an embodiment of the present application provides an online barium replenishment device for a single crystal furnace, wherein the single crystal furnace is equipped with multiple state acquisition instruments and a barium replenishment actuator, wherein the multiple state acquisition instruments are connected to an industrial computer, and the industrial computer is connected to the barium replenishment actuator; the device comprises:

[0029] a detection module, configured to detect, in real time, various state data of the quartz crucible of the single crystal furnace during use by the various state acquisition instruments, and input the various state data into the industrial computer;

[0030] a control module configured to calculate the plurality of state data based on a preset barium layer loss model in the industrial computer to obtain a plurality of barium replenishment calculation results, and to evaluate the plurality of barium replenishment settlement results to obtain a barium replenishment demand result; the barium layer loss model being pre-trained;

[0031] a sending module, configured for the industrial computer to generate a barium supplementation instruction based on the barium supplementation demand result, and send the barium supplementation instruction to the barium supplementation execution mechanism; the barium supplementation instruction includes a PID-based barium supplementation rate, a barium supplementation method, and a target barium supplementation area;

[0032] An execution module is used for the barium-filling execution mechanism to respond to the barium-filling instruction and execute the barium-filling method to online fill the target barium-filling area of ​​the quartz crucible with barium at the barium-filling rate.

[0033] In a third aspect, an embodiment of the present application provides an electronic device comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, any one of the steps of the online barium replenishment method for a single crystal furnace is performed.

[0034] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the computer program executes any one of the steps of the online barium replenishment method for a single crystal furnace.

[0035] An embodiment of the present application provides an online barium replenishment method for a single crystal furnace, wherein the single crystal furnace is equipped with a plurality of state acquisition instruments and a barium replenishment actuator, wherein the plurality of state acquisition instruments are connected to an industrial computer, and the industrial computer is connected to the barium replenishment actuator; wherein the method firstly detects in real time a plurality of state data of the quartz crucible of the single crystal furnace during use by the plurality of state acquisition instruments, and inputs the plurality of state data into the industrial computer; secondly, the industrial computer calculates the plurality of state data based on a preset barium layer loss model to obtain a plurality of barium replenishment calculation results, and evaluates the plurality of barium replenishment settlement results to obtain a barium replenishment demand result; the barium layer loss model is pre-trained; then the industrial computer generates a barium replenishment instruction based on the barium replenishment demand result, and sends The barium replenishment instruction is sent to the barium replenishment actuator; the barium replenishment instruction includes a PID-based barium replenishment rate, a barium replenishment method and a target barium replenishment area; finally, the barium replenishment actuator responds to the barium replenishment instruction, executes the barium replenishment method, and replenishes the target barium replenishment area of ​​the quartz crucible online at the barium replenishment rate, thereby achieving the barium replenishment effect of the quartz crucible while the single crystal furnace is still producing single crystal silicon, and achieving continuous regeneration of the barium protective layer, thereby extending the life of the crucible and improving the quality of single crystal silicon, thereby avoiding the problem that the shutdown operation for barium replenishment will interrupt the production process, reduce efficiency and increase cost, and affect the production of single crystal silicon, and also avoids the problem of poor protective effect of the remedial method of pre-coating barium powder (BaO or BaCO3) to form a protective layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 A first flow chart of an online barium replenishment method for a single crystal furnace provided in an embodiment of the present application is shown;

[0038] Figure 2 A second flow chart of an online barium replenishment method for a single crystal furnace provided in an embodiment of the present application is shown;

[0039] Figure 3 A schematic diagram of the process of online barium supplementation by the barium supplementation actuator provided in an embodiment of the present application is shown;

[0040] Figure 4 The following is a structural block diagram of an online barium replenishing device for a single crystal furnace provided in an embodiment of the present application;

[0041] Figure 5 The figure shows a structural block diagram of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of illustration and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn to scale. The flowcharts used in this application illustrate the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowcharts can be implemented out of sequence, and steps without logical context can be reversed or implemented simultaneously. In addition, those skilled in the art, under the guidance of the contents of this application, can add one or more other operations to the flowchart, or remove one or more operations from the flowchart.

[0043] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present application.

[0044] It should be noted that the term "comprising" will be used in the embodiments of the present application to indicate the existence of the features declared thereafter, but does not exclude the addition of other features.

[0045] Current quartz crucibles are exposed to high temperatures (>1500°C) and the corrosive environment of high-purity molten silicon for extended periods during the single crystal silicon growth process. This makes them susceptible to phase transitions (such as crystallization) and structural degradation, shortening the crucible's lifespan and reducing the purity of the single crystal silicon. The traditional remedy involves pre-coating with barium powder (BaO or BaCO3) to form a protective layer. However, this coating easily evaporates or is consumed at high temperatures over time, making it difficult to replenish dynamically. This results in a decrease in protective effectiveness over time. Furthermore, shutting down the production process to replenish barium powder disrupts the production process, reducing efficiency and increasing costs, impacting single crystal silicon production.

[0046] Based on this, the embodiments of the present application provide an online barium replenishment method, device, electronic equipment and medium for a single crystal furnace, which are described below through examples.

[0047] Example 1

[0048] To facilitate understanding of this embodiment, firstly, a method for online barium replenishment of a single crystal furnace disclosed in the embodiment of this application is introduced in detail. Figure 1 The first flow chart of an online barium replenishment method for a single crystal furnace is shown in FIG. Figure 2 The second flow chart of an online barium replenishment method for a single crystal furnace is shown. The present application provides an online barium replenishment method for a single crystal furnace, wherein the single crystal furnace is equipped with multiple state acquisition instruments and a barium replenishment actuator, wherein the multiple state acquisition instruments are connected to an industrial computer, and the industrial computer is connected to the barium replenishment actuator; the method comprises:

[0049] S101, the multiple status acquisition instrument detects multiple status data of the quartz crucible of the single crystal furnace in real time during use, and inputs the multiple status data into the industrial computer;

[0050] S102: The industrial computer calculates the multiple state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, and evaluates the multiple barium replenishment settlement results to obtain a barium replenishment demand result; the barium layer loss model is pre-trained;

[0051] S103, the industrial computer generates a barium supplementation instruction based on the barium supplementation demand result, and sends the barium supplementation instruction to the barium supplementation execution mechanism; the barium supplementation instruction includes a PID-based barium supplementation rate, a barium supplementation method, and a target barium supplementation area;

[0052] S104: The barium replenishment execution mechanism responds to the barium replenishment instruction and executes the barium replenishment method to online replenish the target barium replenishment area of ​​the quartz crucible at the barium replenishment rate.

[0053] In step S101, the single crystal furnace is equipped with a variety of state acquisition instruments, including an infrared thermal imager, a laser thickness gauge, and a gas mass spectrometer. The infrared thermal imager monitors the temperature field of the outer wall of the crucible in real time through a quartz observation window (50 mm in diameter, made of fused quartz), with a resolution of 640×480 pixels and a temperature measurement range of 800-1800°C. The laser thickness gauge uses a laser interferometer system with a wavelength of 532 nm and realizes non-contact thickness measurement through a 45° reflector group with a measurement frequency of 1 Hz. The sampling tube of the gas mass spectrometer extends to 10 cm from the top of the crucible to detect the Ba vapor partial pressure in real time (detection limit 1×10⁻ 6 Pa). Correspondingly, the various state data collected include crucible outer wall temperature data, barium layer thickness data, and Ba vapor concentration data in the furnace. The various state data are transmitted to an industrial computer via an RS485 communication protocol. The industrial computer is pre-installed with a barium layer loss model and a PID control algorithm. The barium replenishment actuator includes a storage tank, a pneumatic conveying pipeline, a micro-metering valve, and a rotating nozzle. The argon protection system is independently connected to the storage tank and the pneumatic conveying pipeline. When barium replenishment is required, the opening of the micro-metering valve is controlled by a 4-20mA current signal. The pneumatic conveying pipeline outputs the barium powder stored in the storage tank to the micro-metering valve. After reaching a suitable barium powder spraying flow rate, the barium powder is sprayed onto the outer wall of the quartz crucible through the rotating nozzle, thereby achieving barium replenishment. Therefore, during the production of single crystal silicon in the single crystal furnace, the crucible outer wall temperature data, the barium layer thickness data, and the Ba vapor concentration data in the furnace are collected every 10 minutes, thereby achieving an online monitoring effect.

[0054] The storage tank refers to a high-temperature resistant barium powder storage tank, which adopts a double-layer stainless steel structure, is filled with inert gas (such as argon) to prevent oxidation, and is connected to the pneumatic conveying pipeline through an airtight flange; the pneumatic conveying device: includes a spiral powder feeder (adjustable speed 0-50rpm) and an argon injector (pressure 0.2-0.5MPa), which conveys the barium powder to the nozzle through a high-temperature resistant alloy pipe (Φ10mm); the micro-metering valve: installed at the end of the conveying pipeline, adopts an electromagnetically driven ceramic valve core, and the flow control accuracy is ±0.1g / min.

[0055] Before starting to produce single crystal silicon, the single crystal furnace of the present application is pre-coated with an initial barium layer (80 μm thick) to form basic protection.

[0056] In step S102, the industrial computer receives the multiple state data through the RS485 communication protocol, calls the barium layer loss model preset in the industrial computer to calculate the multiple state data, obtains multiple barium replenishment calculation results, and evaluates the multiple barium replenishment settlement results to obtain the barium replenishment demand result; the barium layer loss model is pre-trained, and the barium layer loss model has also undergone an accelerated experiment in a high-temperature vacuum furnace (10⁻³ Pa) simulating the single crystal furnace environment. The test conditions of the accelerated experiment are: temperature gradient 1500-1650℃ (interval 50℃), time 0-100h, and measurement parameters of the accelerated experiment are: barium layer thickness change (SEM observation), volatile component (EDS analysis), weight loss rate (accuracy 0.1mg), wherein the mathematical modeling formula of the accelerated experiment is expressed by formula (1):

[0057] \frac{dδ}{dt} = -A \cdot e^{(-E_a / (R·T))} · (δ / δ_0)^n(1);

[0058] Where δ: current thickness of the barium layer (μm); A: frequency factor (3.2×10 4 μm / h); E_a: activation energy (182 kJ / mol obtained by fitting the Arrhenius curve); R: gas constant; T: absolute temperature (K); n: reaction order (n=0.85 determined experimentally). Therefore, the barium layer loss model can calculate the various state data collected in real time to obtain corresponding barium replenishment calculation results, that is, the barium layer loss model calculates the crucible outer wall temperature data, the barium layer thickness data, and the Ba vapor concentration data in the furnace to obtain corresponding barium replenishment calculation results, and evaluates the barium replenishment calculation results to obtain the barium replenishment demand result for the quartz crucible.

[0059] In the specific implementation process of step S102, there is an embodiment in which the industrial computer calculates the multiple state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, including:

[0060] S10211. Matching the plurality of state data with a plurality of barium replenishment calculation sub-models preset in the barium layer loss model to obtain a matching result;

[0061] S10212. Based on the matching result, call the barium supplementation calculation sub-model to calculate corresponding state data to obtain multiple barium supplementation calculation results.

[0062] In steps S10211-S10212, the preset barium layer loss model in the industrial computer is composed of a plurality of barium supplement calculation sub-models, that is, the present application matches the plurality of state data based on the plurality of barium supplement calculation sub-models, so that the matched plurality of barium supplement calculation sub-models processes the corresponding state data, that is, the data types of the plurality of state data are matched with the plurality of barium supplement calculation sub-models, that is, the crucible outer wall temperature data, barium layer thickness data and Ba vapor concentration data in the plurality of state data belong to the temperature type, thickness type and concentration type respectively, then corresponding barium supplement calculation sub-models are set for the temperature type, thickness type and concentration type respectively, based on the matching results, the barium supplement calculation sub-model is called to calculate the corresponding state data to obtain a plurality of barium supplement calculation results, thereby realizing targeted processing of the plurality of state data, thereby improving the accuracy of the targeted processing of the plurality of state data.

[0063] In the specific implementation process of step S102, there is another embodiment in which: evaluating the multiple barium supplementation settlement results to obtain the barium supplementation demand result includes:

[0064] S10221, determining whether the plurality of barium supplementation settlement results meet corresponding barium supplementation conditions to generate a corresponding determination result;

[0065] S10222. Integrate the judgment results corresponding to the multiple barium supplementation settlement results to obtain the barium supplementation demand result.

[0066] In steps S10221-S10222, the present application sets corresponding barium supplementation conditions based on each data type. For example, in the temperature type, the corresponding barium supplementation condition is local temperature>1550°C, that is, when the barium supplementation calculation result obtained by the crucible outer wall temperature data satisfies the local temperature>1550°C, the judgment result is that barium supplementation is required. If it is not satisfied, the judgment result is that barium supplementation is not required. In the thickness type, the corresponding barium supplementation condition is barium layer thickness<60μm, that is, when the barium supplementation calculation result obtained by the barium layer thickness data satisfies the barium layer thickness<60μm, the judgment result is that barium supplementation is required. If it is not satisfied, The judgment result is that barium supplementation is not required; in the concentration type, the corresponding barium supplementation condition is that the Ba vapor concentration data in the furnace is greater than the preset concentration threshold, that is, when the barium supplementation calculation result obtained by the Ba vapor concentration data in the furnace satisfies the condition that the Ba vapor concentration data in the furnace is greater than the preset concentration threshold, the judgment result is that barium supplementation is required; if it is not satisfied, the judgment result is that barium supplementation is not required. After obtaining the corresponding judgment result, if there is at least one judgment result that barium supplementation is required, the obtained barium supplementation demand result is that a barium supplementation operation is required; otherwise, the obtained barium supplementation demand result is that a barium supplementation operation is not required.

[0067] In step S103, the industrial computer generates a barium supplement instruction based on the barium supplement demand result. The barium supplement instruction includes three aspects: a barium supplement rate based on a PID algorithm, a barium supplement method, and a target barium supplement area. The target barium supplement area is selected from multiple areas in the quartz crucible. Not every area of ​​the quartz crucible needs to be supplemented with barium. The target barium supplement area is generally the upper high-temperature area of ​​the quartz crucible, while the lower part does not need to be supplemented with barium because of the presence of silicon material. The barium supplement rate is converted based on the barium supplement method. It is the control quantity of the barium supplement actuator. For example, the barium supplement rate based on the PID algorithm can be to start barium supplement at an initial rate of 5L / min, and automatically reduce the speed to 1L / min when the content approaches the target value, so that the fluctuation range of the barium layer thickness is controlled within ±10%. The barium supplement method means that the barium supplement direction of the barium supplement actuator is synchronized with the rotation direction of the single crystal furnace and the speed is matched, thereby avoiding the phenomenon of air flow tangent in the single crystal furnace, thereby ensuring the effect of barium supplement, and sending the barium supplement instruction to the barium supplement actuator, wherein the sending method can be RS485 communication protocol.

[0068] In the specific implementation process of step S103, there is an embodiment in which the industrial computer generates a barium supplementation instruction based on the barium supplementation demand result, including:

[0069] S1031. Determine whether the type of the barium supplementation requirement result is a target type, and call a target barium supplementation correction factor based on the target type;

[0070] S1032: Process the target barium supplement correction factor and the barium supplement demand result based on a preset barium supplement rate calculation network to obtain the barium supplement rate in the barium supplement instruction.

[0071] In steps S1031-S1032, the present application determines the type of the barium supplementation requirement result after obtaining the barium supplementation requirement result, that is, the type of the status data of the barium supplementation calculation result that meets the barium supplementation condition is the type of the barium supplementation requirement result, that is, the type of the barium supplementation requirement result also includes temperature type, thickness type, and concentration type. After determining the type of the barium supplementation requirement result, it is judged whether the type of the barium supplementation requirement result is a target type. The target type is a temperature type. If the type of the barium supplementation requirement result is not a temperature type, a target barium supplementation correction factor is not required. The barium supplementation rate calculation network processes the barium supplementation requirement result to obtain the barium supplementation rate in the barium supplementation instruction. If the type of the barium supplementation requirement result is a temperature type, it is a target type, and the target barium supplementation correction factor is required. Based on a preset barium supplementation rate calculation network, the target barium supplementation correction factor and the barium supplementation requirement result are processed to obtain the barium supplementation rate in the barium supplementation instruction. The barium supplementation rate calculation network is expressed by formula (2):

[0072] Q_{add} = k_p·(δ_{target}-δ_{real}) + k_i·\int_{0}^{t}(δ_{target}-δ)dt + k_d·\frac{d(Δδ)}{dt} (2);

[0073] Where Q_add is the barium powder addition rate (g / min); k_p = 0.15; k_i = 0.02; k_d = 0.08 (adjusted by the Ziegler-Nichols method); δ_target = 80 μm (control target value), δ_real is the actual value, k_p = 0.15 (proportional term (0.15 × (current distance difference))); k_i = 0.02 (integral term (0.02 × accumulated distance difference)); k_d = 0.08 (differential term (0.08 × distance change rate)). The parameters 0.15 / 0.02 / 0.08 are equivalent to the "customary parameters" that have been professionally debugged to ensure neither overshoot nor undershoot, and always maintain an accurate distance of 80 microns.

[0074] In the specific implementation process of step S1031, there is an embodiment in which the calling of the target barium supplementation correction factor based on the target type includes:

[0075] S10311. Pre-establishing a mapping relationship between the type of the barium supplementation requirement result and the barium supplementation correction factor;

[0076] S10312. Determine a target barium supplement correction factor for the single crystal furnace based on the mapping relationship and the additional status data corresponding to the target type.

[0077] In steps S10311-S10312, the present application pre-establishes a mapping relationship between the type of the barium supplement demand result and the barium supplement correction factor, that is, the temperature type corresponds to a barium supplement correction factor, while the concentration type and the thickness type do not have a barium supplement correction factor. After determining the type of the barium supplement demand result, the preliminary barium supplement correction factor is determined based on the mapping relationship. When T>1550℃, Q_add is multiplied by the compensation coefficient 1.2, and on this basis, based on the additional state data corresponding to the target type, the additional state data is the temperature field distribution detected by the infrared thermal imager, and an additional 15% barium supplement amount is added to the high temperature area (ΔT>30℃). The final target barium supplement correction factor is determined based on the temperature field distribution of the crucible outer wall temperature data. On this basis, for the quality of single crystal silicon, the present application sets the maximum barium supplement rate to no more than 2.5g / min to prevent silicon melt contamination.

[0078] In step S104, after receiving the barium replenishment instruction, the barium replenishment actuator reads and analyzes the barium replenishment instruction, responds to the barium replenishment instruction, executes the barium replenishment method, and replenishes the target barium replenishment area of ​​the quartz crucible online at the barium replenishment rate, thereby realizing online barium replenishment of the quartz crucible during the production process of the single crystal furnace. This application is the first to replenish barium powder in real time during the operation of the single crystal furnace, avoiding downtime losses and improving production efficiency by ≥15%. Combining multi-data fusion and volatilization dynamics model, it realizes precise closed-loop control of the thickness of the barium layer and adopts a zoned barium replenishment strategy (only for the high-temperature zone in the upper and middle part of the crucible) to reduce the potential contamination risk of barium powder to the silicon melt. This application can effectively extend the life of the quartz crucible from 500 hours in the traditional process to more than 550 hours; the oxygen content of single crystal silicon is increased from 1.5×10¹ 8 atoms / cm³ down to 8×10¹ 7 atoms / cm³; the comprehensive energy consumption in production costs and the crucible replacement cost are reduced by 22%, and after the execution structure performs online barium replenishment, the quartz crucible is re-tested based on the multiple state acquisition instruments to ensure the barium replenishment effect. If the barium replenishment effect does not meet expectations, the industrial computer calculates the barium replenishment demand result based on the real-time multiple state data of the multiple state acquisition instruments to generate a barium replenishment instruction, thereby performing online barium replenishment again.

[0079] In a specific implementation process of step S104, there is an embodiment in which, before performing the barium replenishment method and online barium replenishment at the barium replenishment rate to the target barium replenishment area of ​​the quartz crucible, the method includes:

[0080] S10411. Determine a barium-filling direction for the quartz crucible based on the barium-filling method, and judge whether the barium-filling direction matches the rotation direction of the single crystal furnace;

[0081] S10412: If yes, control the barium supplementation execution structure to execute the barium supplementation method to perform online barium supplementation.

[0082] In steps S10411-S10412, the barium supplement execution mechanism reads the barium supplement method in the barium supplement instruction, determines the barium supplement direction for the quartz crucible, and obtains the rotation direction of the single crystal furnace in real time to determine whether the barium supplement direction matches the rotation direction of the single crystal furnace, that is, whether the barium supplement direction is consistent with the rotation direction of the single crystal furnace. If so, the barium supplement execution structure is controlled to execute the barium supplement method to perform online barium supplement. Otherwise, the barium supplement execution structure is controlled to feed back the information to the industrial computer, and the industrial computer and the rotation direction of the single crystal furnace regenerate the barium supplement instruction containing the barium supplement direction for the quartz crucible, so that the execution structure executes the barium supplement method to perform online barium supplement, thereby ensuring the barium supplement effect for the quartz crucible.

[0083] In the specific implementation process of step S104, there is another embodiment: Figure 3 As shown, the controlling the barium supplementation actuator to execute the barium supplementation method to perform online barium supplementation includes:

[0084] S10421, determining whether the ejection direction of the barium powder ejection unit in the barium replenishment actuator is consistent with the target barium replenishment area;

[0085] S10422: If not, adjust the spraying direction of the barium powder spraying unit to perform online barium replenishment in the target barium replenishment area.

[0086] In steps S10421-S10422, when the barium supplement execution mechanism of the present application performs online barium supplementation, it also determines in real time whether the spraying direction of the barium powder spraying unit in the barium supplement execution mechanism is consistent with the target barium supplementation area. If so, the barium powder spraying unit is controlled to start online barium supplementation for the target barium supplementation area. If not, the spraying direction of the barium powder spraying unit is adjusted to perform online barium supplementation for the target barium supplementation area. The barium powder spraying unit is a rotating nozzle. The nozzle of the barium powder spraying unit of the present application adopts a rotatable fan-shaped nozzle (opening angle 60°), and the nozzle is controlled by a servo motor. The direction of the shot is adjusted so that the barium powder concentrates on covering the upper and middle area of ​​the crucible (50-200mm height range from the top). The temperature gradient in this area is the largest (ΔT=80-120℃ / m), and the barium layer loss rate is 2.3 times that of the bottom. Therefore, barium replenishment operation is required. The pneumatic conveying pipeline is installed at a 30° angle to the single crystal furnace body. The centrifugal force (furnace body speed 8-12rpm) is used to make the barium powder adhere to the wall and deposit. At the same time, a barium powder capture ring (porous ceramic structure, pore size 10μm) is set on the inner wall of the quartz crucible, which can adsorb more than 98% of free barium particles, thereby ensuring the effect of online barium replenishment.

[0087] Example 2

[0088] The present application also provides an online barium replenishing device for a single crystal furnace, such as Figure 4 The figure shows a block diagram of an online barium replenishment device for a single crystal furnace. The functions implemented by this online barium replenishment device for a single crystal furnace correspond to the steps of executing an online barium replenishment method for a single crystal furnace on a terminal device. The device can be understood as a component of a server including a processor. The online barium replenishment device for a single crystal furnace described in this application is equipped with multiple status acquisition instruments and a barium replenishment actuator in the single crystal furnace. The multiple status acquisition instruments are connected to an industrial computer, which is connected to the barium replenishment actuator. The device includes:

[0089] The detection module 401 is used for the multiple status acquisition instrument to detect multiple status data of the quartz crucible of the single crystal furnace in real time during use, and input the multiple status data into the industrial computer;

[0090] A control module 402 is configured to calculate the plurality of state data based on a preset barium layer loss model in the industrial computer to obtain a plurality of barium replenishment calculation results, and evaluate the plurality of barium replenishment settlement results to obtain a barium replenishment demand result; the barium layer loss model is pre-trained;

[0091] a sending module 403 for the industrial computer to generate a barium supplementation instruction based on the barium supplementation demand result and send the barium supplementation instruction to the barium supplementation execution mechanism; the barium supplementation instruction includes a PID-based barium supplementation rate, a barium supplementation method, and a target barium supplementation area;

[0092] The execution module 404 is configured to configure the barium-filling execution mechanism to respond to the barium-filling instruction and execute the barium-filling method to online fill the target barium-filling area of ​​the quartz crucible with barium at the barium-filling rate.

[0093] In a feasible implementation manner, the sending module includes:

[0094] A first calling module is used to determine in real time whether the type of the barium supplementation requirement result is a target type, and to call a target barium supplementation correction factor based on the target type;

[0095] The processing module is used to process the target barium supplement correction factor and the barium supplement demand result based on a preset barium supplement rate calculation network to obtain the barium supplement rate in the barium supplement instruction.

[0096] In a feasible implementation manner, the sending module further includes:

[0097] An establishment module, configured to pre-establish a mapping relationship between the type of the barium supplementation requirement result and the barium supplementation correction factor;

[0098] A determination module is used to determine the target barium supplement correction factor of the single crystal furnace based on the mapping relationship and the additional status data corresponding to the target type.

[0099] In a feasible implementation, the execution module includes:

[0100] a first matching module, configured to determine a barium-filling direction for the quartz crucible based on the barium-filling method, and to determine whether the barium-filling direction matches a rotation direction of the single crystal furnace;

[0101] The barium supplementation module is configured to, if yes, control the barium supplementation execution structure to execute the barium supplementation method to perform online barium supplementation.

[0102] In a feasible implementation manner, the execution module further includes:

[0103] a judgment module, configured to judge whether the ejection direction of the barium powder ejection unit in the barium replenishment actuator is consistent with the target barium replenishment area;

[0104] The adjustment module is used to adjust the spraying direction of the barium powder spraying unit to perform online barium replenishment on the target barium replenishment area if the answer is no.

[0105] In a feasible implementation manner, the control module includes:

[0106] a generating module, configured to determine whether the plurality of barium supplementation settlement results meet corresponding barium supplementation conditions to generate a corresponding determination result;

[0107] A fusion module is used to fuse the judgment results corresponding to the multiple barium supplementation settlement results to obtain the barium supplementation demand result.

[0108] In a feasible implementation manner, the control module further includes:

[0109] A second matching module is configured to match the plurality of state data with a plurality of barium replenishment calculation sub-models preset in the barium layer loss model to obtain a matching result;

[0110] The second calling module is used to call the barium supplementation calculation sub-model to calculate corresponding state data based on the matching result to obtain multiple barium supplementation calculation results.

[0111] Example 3

[0112] The present application also provides an electronic device, such as Figure 5 As shown, it includes: a processor 501, a memory 502 and a bus 503, the memory 502 stores machine-readable instructions executable by the processor 501, and when the electronic device is running, the processor 501 communicates with the memory 502 through the bus 503, and when the machine-readable instructions are executed by the processor 501, any one of the steps of the online barium replenishment method for a single crystal furnace is performed.

[0113] Example 4

[0114] The present application also provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the computer program executes any one of the steps of the online barium replenishment method for a single crystal furnace.

[0115] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system and device described above can refer to the corresponding process in the method embodiment, and will not be repeated in this application. In the several embodiments provided in this application, it should be understood that the disclosed system, device and method can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the modules is only a logical function division. There may be other division methods in actual implementation. For example, multiple modules or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, indirect coupling or communication connection of devices or modules, which can be electrical, mechanical or other forms.

[0116] The modules described as separate components may or may not be physically separate, and the components shown as modules may or may not be physical units, that is, they may be located in one place or distributed across multiple network elements. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0117] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0118] If the functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, or the portion that contributes to the prior art, or the portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, platform server, or network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this application. The aforementioned storage media include various media that can store program code, such as USB flash drives, mobile hard drives, ROM, RAM, magnetic disks, or optical disks.

[0119] The above are only specific embodiments of the present application, but the scope of protection of this application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. An online barium replenishment method for a single crystal furnace, characterized in that: The single crystal furnace is equipped with a plurality of state acquisition instruments and a barium supplementation actuator, the plurality of state acquisition instruments are connected to an industrial computer, and the industrial computer is connected to the barium supplementation actuator; the method includes: The multiple status acquisition instrument detects multiple status data of the quartz crucible of the single crystal furnace in real time during use, and inputs the multiple status data into the industrial computer; The industrial computer calculates the multiple state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, and evaluates the multiple barium replenishment calculation results to obtain a barium replenishment demand result; the barium layer loss model is pre-trained; The industrial computer generates a barium supplementation instruction based on the barium supplementation demand result and sends the barium supplementation instruction to the barium supplementation execution mechanism; the barium supplementation instruction includes a barium supplementation rate based on a PID algorithm, a barium supplementation method, and a target barium supplementation area; The barium replenishment execution mechanism responds to the barium replenishment instruction and executes the barium replenishment method to online replenish the target barium replenishment area of ​​the quartz crucible at the barium replenishment rate; The industrial computer generates a barium supplementation instruction based on the barium supplementation demand result, including: determining in real time whether the type of the barium supplementation requirement result is a target type, and calling a target barium supplementation correction factor based on the target type; Processing the target barium supplement correction factor and the barium supplement demand result based on a preset barium supplement rate calculation network to obtain the barium supplement rate in the barium supplement instruction; Before performing the barium replenishment method and replenishing barium in the target barium replenishment area of ​​the quartz crucible online at the barium replenishment rate, the method includes: determining a barium-filling direction for the quartz crucible based on the barium-filling method, and judging whether the barium-filling direction matches the rotation direction of the single crystal furnace; If yes, controlling the barium supplementation execution mechanism to execute the barium supplementation method to perform online barium supplementation; The step of evaluating the plurality of barium supplementation calculation results to obtain a barium supplementation requirement result includes: determining whether the plurality of barium supplementation calculation results meet corresponding barium supplementation conditions to generate a corresponding determination result; fusing the judgment results corresponding to the multiple barium supplementation calculation results to obtain the barium supplementation demand result; The industrial computer calculates the various state data based on a preset barium layer loss model to obtain multiple barium replenishment calculation results, including: Matching the plurality of state data with a plurality of barium replenishment calculation sub-models preset in the barium layer loss model to obtain a matching result; Based on the matching result, the barium supplementation calculation sub-model is called to calculate corresponding state data to obtain a plurality of barium supplementation calculation results.

2. The method according to claim 1, characterized in that The calling of the target barium supplement correction factor based on the target type includes: Pre-establishing a mapping relationship between the type of the barium supplementation requirement result and the barium supplementation correction factor; Based on the mapping relationship and the additional status data corresponding to the target type, a target barium supplement correction factor of the single crystal furnace is determined.

3. The method according to claim 1, characterized in that The controlling the barium supplementation actuator to execute the barium supplementation method to perform online barium supplementation includes: determining whether the ejection direction of the barium powder ejection unit in the barium replenishment actuator is consistent with the target barium replenishment area; If not, the spraying direction of the barium powder spraying unit is adjusted to perform online barium replenishment on the target barium replenishment area.

4. An online barium replenishing device for a single crystal furnace, characterized in that: The single crystal furnace is equipped with a variety of state acquisition instruments and a barium supplementation actuator. The various state acquisition instruments are connected to an industrial computer, and the industrial computer is connected to the barium supplementation actuator. The device includes: a detection module, configured to detect, in real time, various state data of the quartz crucible of the single crystal furnace during use by the various state acquisition instruments, and input the various state data into the industrial computer; a control module configured to calculate the plurality of state data based on a preset barium layer loss model in the industrial computer to obtain a plurality of barium replenishment calculation results, and to evaluate the plurality of barium replenishment calculation results to obtain a barium replenishment demand result; the barium layer loss model being pre-trained; a sending module, configured for the industrial computer to generate a barium supplementation instruction based on the barium supplementation demand result, and send the barium supplementation instruction to the barium supplementation execution mechanism; the barium supplementation instruction includes a PID-based barium supplementation rate, a barium supplementation method, and a target barium supplementation area; An execution module, configured for the barium-filling execution mechanism to respond to the barium-filling instruction and execute the barium-filling method to online fill the target barium-filling area of ​​the quartz crucible with barium at the barium-filling rate; Sending module, including: A first calling module is used to determine in real time whether the type of the barium supplementation requirement result is a target type, and to call a target barium supplementation correction factor based on the target type; a processing module, configured to process the target barium supplement correction factor and the barium supplement demand result based on a preset barium supplement rate calculation network to obtain the barium supplement rate in the barium supplement instruction; Execution module, including: a first matching module, configured to determine a barium-filling direction for the quartz crucible based on the barium-filling method, and to determine whether the barium-filling direction matches a rotation direction of the single crystal furnace; a barium supplementation module, configured to control the barium supplementation actuator to execute the barium supplementation method to perform online barium supplementation if the answer is yes; Control module, including: a generating module, configured to determine whether the plurality of barium supplementation calculation results meet corresponding barium supplementation conditions to generate a corresponding determination result; A fusion module, configured to fuse the judgment results corresponding to the plurality of barium supplementation calculation results to obtain the barium supplementation demand result; The control module also includes: A second matching module is configured to match the plurality of state data with a plurality of barium replenishment calculation sub-models preset in the barium layer loss model to obtain a matching result; The second calling module is used to call the barium supplementation calculation sub-model to calculate corresponding state data based on the matching result to obtain multiple barium supplementation calculation results.

5. An electronic device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor and the memory communicate via the bus. When the machine-readable instructions are executed by the processor, the steps of the online barium replenishment method for a single crystal furnace as described in any one of claims 1 to 4 are performed.

6. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, which, when executed by a processor, executes the steps of the online barium replenishment method for a single crystal furnace according to any one of claims 1 to 4.

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