Multifunctional vacuum coating instrument experimental device

Abstract

The invention discloses a multifunctional vacuum coating instrument experimental device, which comprises a placement cabinet for placing a vacuum system, a vacuum chamber assembly is arranged on the upper surface of the placement cabinet; the vacuum chamber assembly comprises a vacuum chamber upper section, a vacuum chamber middle section and a vacuum chamber lower section from top to bottom, and the vacuum chamber upper section, the vacuum chamber middle section and the vacuum chamber lower section are connected through telescopic assemblies. A plurality of flange bases for mounting evaporation source components are uniformly arranged on the side wall and the bottom of the lower section of the vacuum chamber, and the bottom of the lower section of the vacuum chamber is communicated with a vacuum system; and a sample table assembly is arranged at the top of the vacuum chamber upper section. The vacuum chamber adopts a three-section structure, so that the spatial layout of each system is more compact, meanwhile, the upper section and the middle section of the vacuum chamber are lifted by utilizing the telescopic assembly, the operation load of an operator is reduced, and meanwhile, the comfort and convenience of different-height operations such as filling and substrate loading are greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating instruments, and particularly relates to a multifunctional vacuum coating instrument experimental device. Background Art

[0002] The development of functional devices based on the material innovation system is the high ground of future technological innovation. All kinds of sensors, memories, flexible display panels, drivers, logic devices, etc. based on organic semiconductor thin film devices will gradually meet the many application scenarios of the new generation of miniaturized, lightweight, and intelligent wearable devices. In order to complete the configuration design and verification of various devices, it is necessary to actually fabricate these thin film devices, and this process mainly relies on high-performance vacuum coating instruments.

[0003] A vacuum coating instrument is a professional coating equipment that uses a heating boat basket made of high-melting-point metals (such as tungsten and tantalum) to generate sufficient heat under high-current conditions in a high-vacuum environment, causing the evaporation material to undergo thermal evaporation or sublimation (thermal evaporation of low-melting-point metals or oxides, thermal sublimation of organic small molecules), and then preparing a nano-scale thin film on a substrate perpendicular to the evaporation track line.

[0004] Currently, such professional coating equipment is large in volume, expensive, has a single function (insufficient expandability), and cannot meet the difficulties of multi-process compatibility, such as difficult mask positioning, poor positioning accuracy of multiple evaporation coatings, difficult alignment of device arrays, controllability and reproducibility of deposition conditions, and poor controllability of the sample stage substrate temperature. The present invention designs and develops a multifunctional vacuum coating instrument experimental device to easily obtain a coating environment close to ultra-high vacuum, provide multiple expandable vacuum flange interfaces; develop two evaporation sources in a supporting manner to solve the problem of oblique incidence of the evaporation source at the same time; optimize the positioning device of the sample platform carrier to improve the positioning accuracy of multiple evaporation coatings; effectively improve the coating uniformity and reproducibility. Summary of the Invention

[0005] In view of the above problems in the prior art, the present invention provides a multifunctional vacuum coating instrument experimental device, which solves the problems of large volume, insufficient expandability, and inconvenient operation of existing professional coating equipment.

[0006] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0007] Provided is an experimental device for a multifunctional vacuum coating instrument, which includes a placement cabinet for placing a vacuum system; a vacuum chamber assembly is provided on the upper surface of the placement cabinet; the vacuum chamber assembly includes an upper section of the vacuum chamber, a middle section of the vacuum chamber, and a lower section of the vacuum chamber from top to bottom, and the upper section of the vacuum chamber, the middle section of the vacuum chamber, and the lower section of the vacuum chamber are connected by a telescopic assembly; a plurality of flange bases for installing an evaporation source assembly are uniformly provided on the side wall and the bottom of the lower section of the vacuum chamber, and the bottom of the lower section of the vacuum chamber is communicated with the vacuum system; a sample stage assembly is provided on the top of the upper section of the vacuum chamber.

[0008] The vacuum chamber of the present invention adopts a three-section structure, making the spatial layout of each system more compact. At the same time, the telescopic assembly is used to lift the upper section of the vacuum chamber and the middle section of the vacuum chamber, reducing the operating load of the operator. At the same time, it greatly improves the comfort and convenience of operations at different heights such as filling and loading substrates. And the evaporation source assembly can be directly installed through the flange base, maximizing the coating function of the equipment.

[0009] Further, the telescopic assembly includes two telescopic hydraulic cylinders oppositely installed on the upper surface of the placement cabinet. The telescopic end of the telescopic hydraulic cylinder is provided with a pressing plate, and the pressing plate overlaps on the upper surface of the upper section of the vacuum chamber and is connected by bolts.

[0010] Further, clamping grooves are circumferentially formed at the upper end openings of the middle section of the vacuum chamber and the lower section of the vacuum chamber, and sealing rings are embedded in the clamping grooves;

[0011] A plurality of clamping plates are circumferentially arranged at the connection between the upper section of the vacuum chamber and the middle section of the vacuum chamber, and the upper ends of the clamping plates are connected to the upper surface of the upper section of the vacuum chamber by bolts.

[0012] Further, the vacuum system includes a fore-vacuum pump, and a three-way pipe is provided at the air extraction port of the fore-vacuum pump;

[0013] One end of the three-way pipe is communicated with the air outlet of the turbomolecular pump through an electromagnetic valve and a vacuum silicone tube. The air inlet of the turbomolecular pump is connected to the bottom of the first connecting cylinder through a gate valve. The top of the first connecting cylinder is connected to the reserved port at the bottom of the lower section of the vacuum chamber;

[0014] The other end of the three-way pipe is communicated with the first connecting cylinder through an electromagnetic valve and a vacuum silicone tube.

[0015] Further, the evaporation source assembly includes a metal evaporation source feeder; the first feeder electrode of the metal evaporation source feeder is inserted into the lower section of the vacuum chamber from the vacuum flange seat reserved on the side wall of the lower section of the vacuum chamber, and is butt-connected to the vacuum flange seat through the first vacuum flange on the metal evaporation source feeder; a metal electrode piece is provided at the top end of the first feeder electrode, and a tungsten boat is arranged between the metal electrode pieces at the top ends of two opposite first feeder electrodes.

[0016] Further, the evaporation source assembly includes a small molecule evaporation source feeder; the small molecule evaporation source feeder includes an electrode feeder and a small molecule evaporation source;

[0017] The electrode feeder includes a feeding cylinder, at the bottom of the feeding cylinder, two second feeding electrodes and two first K-type thermocouples are hermetically arranged; the feeding cylinder is butt-connected to a vacuum flange seat on the lower segment of the vacuum chamber through a second vacuum flange;

[0018] The small molecule evaporation source includes a heat conducting block, at the top of the heat conducting block, a ceramic heating cylinder is arranged; at the top opening of the ceramic heating cylinder, a quartz crucible is placed;

[0019] The ceramic heating cylinder is connected to the two second feeding electrodes through wires; at the bottom of the heat conducting block, a temperature probe is arranged, and the temperature probe is connected to the two first K-type thermocouples;

[0020] At the top end of the feeding cylinder, a clamping block is arranged, on the outer side of the heat conducting block, a housing is arranged, and the clamping block and the housing are connected through a relative connecting member; on both sides of the connecting member, baffles fixed on the housing are respectively arranged.

[0021] Further, at the bottom inside the lower segment of the vacuum chamber, a baffle is arranged through two groups of fixing brackets; each group of fixing brackets includes two relatively arranged fixing sub-brackets, on the fixing sub-brackets, strip-shaped holes are opened, and the baffle is fixed between the two fixing sub-brackets by bolts passing through the strip-shaped holes and the baffle.

[0022] Further, the sample stage assembly includes a second connecting cylinder arranged at the top of the upper segment of the vacuum chamber, and a sample heating stage arranged inside the vacuum chamber assembly;

[0023] At the top of the second connecting cylinder, a bellows is connected through a flange, the bellows is provided with a magneto-fluid rotary seal through a flange, above the magneto-fluid rotary seal, a third feeder is arranged, the sample heating stage passes through the second connecting cylinder and the bellows and is connected to the bottom of the central axis of the magneto-fluid rotary seal, and is electrically connected to the third feeder.

[0024] Further, the third feeder includes a feeding straight cylinder, the bottom of the feeding straight cylinder is connected to the top of the central axis of the magneto-fluid rotary seal;

[0025] At the top of the feeding straight cylinder, two third feeding electrodes and two second K-type thermocouples are hermetically arranged; the third feeding electrodes are electrically connected to the heating furnace wire inside the sample heating stage through the central axis of the magneto-fluid rotary seal; the two second K-type thermocouples are electrically connected to the temperature probe inside the sample heating stage through the central axis of the magneto-fluid rotary seal.

[0026] Further, a rotating assembly is provided on the magneto - fluid rotary seal. The rotating assembly includes a motor disposed on the upper flange of the magneto - fluid rotary seal through a connecting plate. A driving pulley is provided on the output shaft of the motor, and a driven pulley is provided on the central axis of the magneto - fluid rotary seal. The driving pulley and the driven pulley are connected by a belt. An elevating assembly is provided beside the bellows. The elevating assembly includes an elevating plate, the bottom of which is connected to the bottom of the bellows. A ball screw is provided in the middle of the elevating plate, and the screw nut on the ball screw is connected to the top of the bellows through a connecting plate. A handwheel is provided at the end of the ball screw passing through the top of the elevating plate.

[0027] The present invention discloses an experimental device for a multifunctional vacuum coating instrument, and its beneficial effects are as follows:

[0028] 1. The vacuum chamber of the present invention adopts a three - section structure, making the spatial layout of each system more compact. At the same time, the telescopic assembly is used to lift the upper section and the middle section of the vacuum chamber, reducing the operating load of the operator. Meanwhile, it greatly improves the comfort and convenience of operations at different heights such as filling and loading substrates. And the evaporation source assembly can be directly installed through the flange base, maximizing the coating function of the equipment.

[0029] 2. The flange base of the lower section of the vacuum chamber of the present invention can directly install the evaporation source assembly designed in cooperation with the present invention, ensuring that the evaporation track line is parallel to the substrate direction to the greatest extent, effectively expanding the coating function and experimental convenience.

[0030] 3. The evaporation source assembly provided in cooperation with the present invention can meet the evaporation requirements of various materials. Replaceable evaporation boats (baskets) are used: tungsten and tantalum boats are suitable for metal evaporation sources, and quartz boats are suitable for organic evaporation sources. Among them, the temperature control of the organic evaporation source is more accurate, effectively improving the stability of the evaporation process and the experimental reproducibility.

[0031] 4. The sample platform of the present invention adopts a Z - direction adjustable structure, which can flexibly adjust the distance between the substrate and the evaporation source; the sample platform can rotate at a low speed, be heated with temperature control, and installing the substrate positioning bracket designed in cooperation with the present invention can effectively improve the film - forming quality and masking accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic structural diagram of an experimental device for a multifunctional vacuum coating instrument of the present invention.

[0033] Figure 2 is a schematic structural diagram of the vacuum chamber assembly of the present invention.

[0034] Figure 3 is a schematic structural diagram of the vacuum chamber assembly from another angle of the present invention.

[0035] Figure 4 is a schematic structural diagram of the vacuum system of the present invention.

[0036] Figure 5 This is a schematic structural diagram of the evaporation source assembly of the present invention.

[0037] Figure 6 This is a schematic structural diagram of the small molecule evaporation source feeder of the present invention.

[0038] Figure 7 This is a schematic internal structural diagram of the small molecule evaporation source feeder of the present invention.

[0039] Figure 8 This is a schematic structural diagram of the sample stage assembly of the present invention.

[0040] Among them, 1. Placing cabinet;

[0041] 2. Vacuum system; 21. Fore-vacuum pump; 22. Turbomolecular pump; 23. Gate valve;

[0042] 3. Vacuum chamber assembly; 31. Upper segment of the vacuum chamber; 32. Middle segment of the vacuum chamber; 33. Lower segment of the vacuum chamber; 331. Vacuum flange seat; 34. Telescopic assembly; 35. Telescopic hydraulic cylinder; 36. Compression plate; 37. Card slot; 38. Sealing ring; 39. Clamping plate;

[0043] 4. Evaporation source assembly; 41. Metal evaporation source feeder; 411. First feeder electrode; 412. First vacuum flange; 413. Metal electrode plate; 414. Tungsten boat; 42. Small molecule evaporation source feeder; 43. Electrode feeder; 431. Feeding cylinder; 432. Second feeder electrode; 433. First K-type thermocouple; 434. Second vacuum flange; 44. Small molecule evaporation source; 441. Heat conducting block; 442. Ceramic heating cylinder; 443. Quartz crucible; 45. Clamping block; 46. Outer shell; 47. Connecting piece; 48. Baffle;

[0044] 5. Sample stage assembly; 51. Second connecting cylinder; 52. Sample heating stage; 53. Bellows; 54. Magnetic fluid rotary seal; 55. Third feeder; 551. Feeding straight cylinder; 552. Third feeder electrode; 553. Second K-type thermocouple; 561. Motor; 562. Driving pulley; 563. Driven pulley; 571. Lifting plate; 572. Ball screw; 573. Screw nut; 574. Connecting plate; 575. Handwheel;

[0045] 61. Fixed bracket; 62. Baffle plate; 63. Fixed sub-bracket; 64. Slotted hole. Detailed implementation manners

[0046] The specific embodiments of the present invention are described to facilitate those skilled in the art of this technology to understand the present invention. However, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art of this technology, as long as various changes are within the spirit and scope of the present invention defined and determined by the appended claims, these changes are obvious, and all inventions and creations using the concept of the present invention are within the scope of protection.

[0047] Example 1

[0048] This embodiment provides a multi-functional vacuum coating instrument experimental device, the purpose of which is to solve the problems of large volume, insufficient expandability, and inconvenient operation of existing professional coating equipment. Referring to Figures 1 - 4 , the specific structure in this embodiment will be elaborated in detail below.

[0049] A multi-functional vacuum coating instrument experimental device includes a sample stage assembly 5, a vacuum chamber assembly 3, a vacuum system 2, and a storage cabinet 1.

[0050] Among them, the vacuum system 2 is placed in the storage cabinet 1, the vacuum chamber assembly 3 is arranged on the upper surface of the storage cabinet 1, and the vacuum system 2 passes through the storage cabinet 1 and is connected to the vacuum chamber assembly 3.

[0051] Specifically, the vacuum chamber assembly 3 includes a vacuum chamber upper section 31, a vacuum chamber middle section 32, and a vacuum chamber lower section 33 from top to bottom, and the vacuum chamber upper section 31, the vacuum chamber middle section 32, and the vacuum chamber lower section 33 are connected by a telescopic assembly 34; a plurality of flange bases for installing the evaporation source assembly 4 are uniformly arranged on the side wall and bottom of the vacuum chamber lower section 33, and the bottom of the vacuum chamber lower section 33 is connected to the vacuum system 2; the top of the vacuum chamber upper section 31 is provided with a sample stage assembly 5.

[0052] In this embodiment, the vacuum chamber of this device adopts a three-section structure, that is, the vacuum chamber is divided into a vacuum chamber upper section 31, a vacuum chamber middle section 32, and a vacuum chamber lower section 33, so that the spatial layout of each system is more compact. At the same time, this design has stronger expandability and is very convenient for experimental personnel to operate, meeting the requirements of ergonomics.

[0053] And reserved openings for installing the evaporation source assembly 4 are uniformly arranged on the side wall and bottom of the vacuum chamber lower section 33. A cylindrical flange base is arranged in the reserved opening. The flange base adopts a CF vacuum flange, and the cylindrical flange base is embedded in the reserved opening. Thus, the evaporation source assembly 4 can be quickly installed through the flange base and positioned, so as to facilitate the direct installation of various evaporation sources, feed-in components and other loads in the later stage, effectively ensuring the vacuum sealing requirements of the equipment and maximizing the coating function expansion of the equipment.

[0054] Meanwhile, the telescopic component 34 can be used to lift the upper section 31 and the middle section 32 of the vacuum chamber, reducing the operating load of the operator. At the same time, it greatly improves the comfort and convenience of operations at different heights such as filling and loading substrates.

[0055] Specifically, the telescopic component 34 includes two telescopic hydraulic cylinders 35 relatively installed on the upper surface of the placement cabinet 1. The telescopic end of the telescopic hydraulic cylinder 35 is provided with a pressing plate 36, and the pressing plate 36 overlaps on the upper surface of the upper section 31 of the vacuum chamber and is connected by bolts.

[0056] In this embodiment, the telescopic hydraulic cylinder 35 can adopt a hydraulic cylinder. The two telescopic hydraulic cylinders 35 are relatively installed on the bottom surface of the placement cabinet 1, so as to apply pressure to the upper section 31 of the vacuum chamber through the telescopic hydraulic cylinder 35, connecting the upper section 31, the middle section 32 and the lower section 33 of the vacuum chamber.

[0057] A pressing plate 36 is provided at the output end of the telescopic hydraulic cylinder 35. A clamping groove that fits the upper surface of the upper section 31 of the vacuum chamber is opened at one end of the pressing plate 36 close to the upper section 31 of the vacuum chamber. Thus, when the pressing plate 36 is installed on the upper surface of the upper section 31 of the vacuum chamber through bolts, it fits the upper surface of the upper section 31 of the vacuum chamber, so as to lift or lower the upper section 31 of the vacuum chamber through the telescopic hydraulic cylinder 35 during the test.

[0058] Specifically, clamping grooves 37 are circumferentially opened at the upper end openings of the middle section 32 and the lower section 33 of the vacuum chamber, and sealing rings 38 are embedded in the clamping grooves 37; a plurality of clamping plates 39 are circumferentially arranged at the connection between the upper section 31 and the middle section 32 of the vacuum chamber, and the upper ends of the clamping plates 39 are connected to the upper surface of the upper section 31 of the vacuum chamber by bolts.

[0059] In this embodiment, the sealing ring 38 is an O-shaped rubber sealing ring, which is respectively arranged at the connection between the middle section 32 and the lower section 33 of the vacuum chamber and at the connection between the upper section 31 and the middle section 32 of the vacuum chamber to ensure the sealing performance of the vacuum chamber.

[0060] The clamping plate 39 is a C-shaped plate, and a plurality of clamping plates 39 are circumferentially arranged at the connection between the upper section 31 and the middle section 32 of the vacuum chamber. The specific number can be set by itself. The upper end of the clamping plate 39 extends, and the extended part is connected to the upper surface of the upper section 31 of the vacuum chamber by bolts. Thus, when the telescopic hydraulic cylinder 35 lifts or lowers the upper section 31 of the vacuum chamber, the middle section 32 of the vacuum chamber is driven.

[0061] Specifically, the vacuum system 2 includes a roughing vacuum pump 21, and a three-way pipe 24 is provided at the air extraction port of the roughing vacuum pump 21; one end of the three-way pipe 24 is communicated with the air outlet of the turbo molecular pump 22 through a solenoid valve and a vacuum silicone tube, and the air inlet of the turbo molecular pump 22 is connected with the bottom of the first connecting cylinder 25 through a gate valve 23, and the top of the first connecting cylinder 25 is connected with the reserved port at the bottom of the lower segment 33 of the vacuum chamber; the other end of the three-way pipe 24 is communicated with the first connecting cylinder 25 through a solenoid valve and a vacuum silicone tube.

[0062] In this embodiment, the roughing vacuum pump 21 is used as the first-stage pump, and a two-stage rotary vane roughing vacuum pump is adopted. The turbo molecular pump 22 is used as the second-stage pump, and a turbo molecular pump is adopted. The gate valve 23 is an ultra-high vacuum gate valve; a three-way pipe 24 is provided at the air extraction port of the roughing vacuum pump 21, and two air flow channels are formed at both ends of the three-way pipe 24:

[0063] The first air flow channel: The three-way pipe 24 is communicated with the turbo molecular pump 22 through a solenoid valve and a vacuum silicone tube, and the turbo molecular pump 22 is connected with the bottom of the first connecting cylinder 25 through a gate valve 23. Thus, when the second air flow channel is closed, the first air flow channel is communicated to perform vacuum pumping on the inside of the vacuum chamber.

[0064] The second air flow channel: The three-way pipe 24 is communicated with the bottom of the first connecting cylinder 25 through a solenoid valve and a vacuum silicone tube. Thus, when the first air flow channel is closed, the second air flow channel is communicated to perform vacuum pumping on the inside of the vacuum chamber.

[0065] Optionally, an observation window is provided on the side wall of the middle segment 32 of the vacuum chamber, and the coating condition inside the vacuum chamber can be observed through the observation window.

[0066] Embodiment 2

[0067] Based on Embodiment 1, this embodiment gives a further solution for the evaporation source assembly 4, the purpose of which is to meet the evaporation requirements of various materials. Refer to Figures 5 - 7 , and the evaporation source assembly 4 in this embodiment will be elaborated in detail below.

[0068] The evaporation source assembly 4 includes a metal evaporation source feeder 41 and a small molecule evaporation source feeder 42, and the two feeders can be installed and combined according to actual needs.

[0069] Specifically, the evaporation source assembly 4 includes a metal evaporation source feeder 41; the first feeder electrode 411 of the metal evaporation source feeder 41 is inserted into the lower segment 33 of the vacuum chamber from the vacuum flange seat 331 reserved on the side wall of the lower segment 33 of the vacuum chamber, and is butt-connected with the vacuum flange seat 331 through the first vacuum flange 412 on the metal evaporation source feeder 41;

[0070] A metal electrode piece 413 is provided at the top end of the first feeding electrode 411, and a tungsten boat 414 is provided between the metal electrode pieces 413 at the top ends of two opposite first feeding electrodes 411.

[0071] In this embodiment, the metal evaporation source feeding members 41 are installed pairwise opposite on the side walls of the lower segment 33 of the vacuum chamber, thereby clamping and fixing the tungsten boat 414 between two metal evaporation source feeding members 41.

[0072] The first feeding electrode 411 is a copper core rod-shaped electrode. A first vacuum flange 412 is sleeved on the first feeding electrode 411 through brazing ceramics. Thus, when the first feeding electrode 411 is inserted into the lower segment 33 of the vacuum chamber from the vacuum flange seat 331, the first vacuum flange 412 and the vacuum flange seat 331 are butt-connected by bolts for fixed installation. An external thread is provided at the end of the first feeding electrode 411 in the lower segment 33 of the vacuum chamber, and a metal electrode piece 413 is fixed by a nut. The tungsten boat 414 is fixed between two metal electrode pieces 413.

[0073] Specifically, the evaporation source assembly 4 includes a small molecule evaporation source feeding member 42; the small molecule evaporation source feeding member 42 includes an electrode feeding member 43 and a small molecule evaporation source 44;

[0074] Among them, the electrode feeding member 43 includes a feeding cylinder 431. Two second feeding electrodes 432 and two first K-type thermocouples 433 are hermetically arranged at the bottom of the feeding cylinder 431; the feeding cylinder 431 is butt-connected to the vacuum flange seat 331 on the lower segment 33 of the vacuum chamber through a second vacuum flange 434.

[0075] In this embodiment, two second feeding electrodes 432 and two first K-type thermocouples 433 are hermetically sealed at the bottom of the feeding cylinder 431 through brazing ceramics. A second vacuum flange 434 is provided on the outer surface of the feeding cylinder 431. When the feeding cylinder 431 is inserted into the lower segment 33 of the vacuum chamber through the vacuum flange seat 331 on the lower segment 33 of the vacuum chamber, the second vacuum flange 434 and the vacuum flange seat 331 are butt-connected by bolts for fixed installation. The second feeding electrode 432 is a copper core rod-shaped electrode, and the first K-type thermocouple 433 is used to connect to a temperature probe to monitor the temperature of the heat conduction block 441.

[0076] Among them, the small molecule evaporation source 44 includes a heat conduction block 441. A ceramic heating cylinder 442 is provided at the top of the heat conduction block 441; a quartz crucible 443 is placed at the top opening of the ceramic heating cylinder 442;

[0077] The ceramic heating cylinder 442 is connected to two second feeding electrodes 432 through wires; a temperature probe is provided at the bottom of the heat conduction block 441, and the temperature probe is connected to two first K-type thermocouples 433.

[0078] In this embodiment, a groove is reserved at the top of the heat-conducting block 441 for placing the ceramic heating cylinder 442. The quartz crucible 443 is placed at the top opening of the ceramic heating cylinder 442. The ceramic heating cylinder 442 is connected to two second feeding electrodes 432 through wires, so as to connect a heating current to the ceramic heating cylinder 442. A temperature probe is arranged at the bottom of the heat-conducting block 441, and the temperature probe is electrically connected to two first type-K thermocouples 433, so as to monitor the temperature of the heat-conducting block 441 through the temperature probe.

[0079] Wherein, a clamping block 45 is arranged at the top end of the feeding cylinder 431, and a housing 46 is arranged outside the heat-conducting block 441. The clamping block 45 and the housing 46 are connected by a pair of opposing connecting members 47; baffles 48 fixed to the housing 46 are respectively arranged on both sides of the connecting member 47.

[0080] In this embodiment, the clamping block 45 is circular and fixedly arranged at the top opening of the feeding cylinder 431. The clamping block 45 can also be a broken circle, and the broken part is clamped at the top opening of the feeding cylinder 431 through bolts.

[0081] The clamping block 45 and the housing 46 are connected by a pair of opposing connecting members 47. The connecting member 47 is two connecting plates rotatably connected by a pin shaft. One of the connecting plates is fixedly connected to the clamping block 45, and the other connecting plate is rotatably connected to the housing 46 through a pin shaft, so that the housing 46 can be angularly adjusted relative to the clamping block 45 through the connecting member 47.

[0082] And baffles 48 fixed to the housing 46 are oppositely arranged between the two connecting members 47. The width of the baffle 48 is smaller than the distance between the connecting members 47 to prevent interference, so as to provide a certain protection for the internally connected wires through the baffle 48.

[0083] Specifically, a baffle 62 is arranged at the bottom inside the lower segment 33 of the vacuum chamber through two groups of fixing brackets 61; each group of fixing brackets 61 includes two oppositely arranged fixing sub-brackets 63, and strip-shaped holes 64 are formed in the fixing sub-brackets 63. The baffle 62 is fixed between the two fixing sub-brackets 63 by passing bolts through the strip-shaped holes 64 and the baffle 62.

[0084] Embodiment 3

[0085] Based on Embodiment 1, this embodiment gives a further solution for the sample stage assembly 5. Refer to Figure 8 , and the sample stage assembly 5 in this embodiment will be elaborated in detail below.

[0086] The sample stage assembly 5 includes a second connecting cylinder 51 arranged at the top of the upper segment 31 of the vacuum chamber, and a sample heating stage 52 arranged inside the vacuum chamber assembly 3;

[0087] Specifically, a corrugated pipe 53 is connected to the top of the second connecting cylinder 51 through a flange. A magnetorheological fluid rotary seal 54 is arranged on the corrugated pipe 53 through a flange. Above the magnetorheological fluid rotary seal 54, a third feeding member 55 is arranged. The sample heating stage 52 passes through the second connecting cylinder 51 and the corrugated pipe 53 and is connected to the bottom of the central axis of the magnetorheological fluid rotary seal 54, and is electrically connected to the third feeding member 55.

[0088] In this embodiment, the third feeding member 55 provides the current required for heating to the sample heating stage 52. The corrugated pipe 53 ensures communication during the lifting and lowering process of the sample heating stage 52, and the magnetorheological fluid rotary seal 54 realizes the mechanical seal of the corrugated pipe 53.

[0089] Optionally, a card slot for placing the substrate positioning bracket is opened at the bottom of the sample heating stage 52. After the substrate is placed in the substrate positioning bracket, the substrate positioning bracket can be embedded in the card slot for fixation.

[0090] Specifically, the third feeding member 55 includes a feeding straight cylinder 551, and the bottom of the feeding straight cylinder 551 is connected to the top of the central axis of the magnetorheological fluid rotary seal 54;

[0091] At the top of the feeding straight cylinder 551, two third feeding electrodes 552 and two second K-type thermocouples 553 are hermetically arranged; the third feeding electrodes 552 are electrically connected to the heating furnace wire in the sample heating stage 52 through the central axis of the magnetorheological fluid rotary seal 54; the two second K-type thermocouples 553 are electrically connected to the temperature probe in the sample heating stage 52 through the central axis of the magnetorheological fluid rotary seal 54.

[0092] In this embodiment, the two third feeding electrodes 552 and the two second K-type thermocouples 553 are both hermetically sealed at the top of the feeding straight cylinder 551 by brazing ceramics, and the central axis of the magnetorheological fluid rotary seal 54 is hollow. Thus, the wires of the two third feeding electrodes 552 pass through the bottom of the feeding straight cylinder 551 and through the central axis of the magnetorheological fluid rotary seal 54 to be electrically connected to the sample heating stage 52, and the wires of the two second K-type thermocouples 553 pass through the bottom of the feeding straight cylinder 551 and through the central axis of the magnetorheological fluid rotary seal 54 to be electrically connected to the temperature probe.

[0093] Specifically, a rotating assembly is arranged on the magnetorheological fluid rotary seal 54. The rotating assembly includes a motor 561 arranged on the flange of the magnetorheological fluid rotary seal 54 through a connecting plate. A driving pulley 562 is arranged on the output shaft of the motor 561. A driven pulley 563 is arranged on the central axis of the magnetorheological fluid rotary seal 54. The driving pulley 562 and the driven pulley 563 are connected by a belt;

[0094] A lifting component is provided beside the bellows 53; the lifting component includes a lifting plate 571, the bottom of the lifting plate 571 is connected to the bottom of the bellows 53; a ball screw 572 is arranged in the middle of the lifting plate 571, and a lead screw nut 573 on the ball screw 572 is connected to the top of the bellows 53 through a connecting plate 574; a hand wheel 575 is arranged at the end of the ball screw 572 passing through the top of the lifting plate 571.

[0095] In this embodiment, the motor 561 is driven to rotate the driving pulley 562, the driving pulley 562 drives the driven pulley 563 to rotate through the belt, and then drives the central axis of the magnetic fluid rotary seal 54 to rotate, thereby driving the sample heating stage 52 to rotate.

[0096] By rotating the hand wheel 575, the ball screw 572 is rotated, so that the lead screw nut 573 on the ball screw 572 moves up and down along the ball screw 572. Further, the lead screw nut 573 drives the top flange of the bellows 53 to move up and down through the connecting plate 574. Since the top flange of the bellows 53 is connected to the magnetic fluid rotary seal 54, when the top flange of the bellows 53 moves up and down, it drives the magnetic fluid rotary seal 54 to move up and down, and finally drives the sample heating stage 52 to move up and down.

[0097] Although the specific embodiments of the invention have been described in detail with reference to the accompanying drawings, it should not be construed as a limitation on the protection scope of this patent. Within the scope described in the claims, various modifications and deformations that can be made by those skilled in the art without creative efforts still fall within the protection scope of this patent.

Claims

1. A multifunctional vacuum coating instrument experimental device, characterized in that: A placement cabinet (1) for placing a vacuum system (2); The upper surface of the placement cabinet (1) is provided with a vacuum chamber assembly (3); the vacuum chamber assembly (3) includes a vacuum chamber upper segment (31), a vacuum chamber middle segment (32), and a vacuum chamber lower segment (33) from top to bottom, and the vacuum chamber upper segment (31), the vacuum chamber middle segment (32), and the vacuum chamber lower segment (33) are connected by a telescopic assembly (34); A plurality of flange bases for installing an evaporation source assembly (4) are uniformly arranged on the side wall and bottom of the vacuum chamber lower segment (33), and the bottom of the vacuum chamber lower segment (33) is communicated with the vacuum system (2); The top of the vacuum chamber upper segment (31) is provided with a sample stage assembly (5).

2. The experimental device of the multifunctional vacuum coating instrument according to claim 1, wherein: The telescopic assembly (34) includes two telescopic hydraulic cylinders (35) oppositely installed in the placement cabinet (1), the telescopic end of the telescopic hydraulic cylinder (35) is provided with a pressing plate (36), and the pressing plate (36) overlaps on the upper surface of the vacuum chamber upper segment (31) and is connected by bolts.

3. The experimental device of the multifunctional vacuum coating instrument according to claim 2, characterized in that: A clamping groove (37) is circumferentially formed at the upper end opening of the vacuum chamber middle segment (32) and the vacuum chamber lower segment (33), and a sealing ring (38) is embedded in the clamping groove (37); A plurality of clamping plates (39) are circumferentially arranged at the connection between the vacuum chamber upper segment (31) and the vacuum chamber middle segment (32), and the upper ends of the clamping plates (39) are connected to the upper surface of the vacuum chamber upper segment (31) by bolts.

4. The experimental device of the multifunctional vacuum coating instrument according to claim 1, wherein: The vacuum system (2) includes a fore-vacuum pump (21), and a three-way pipe (24) is arranged at the air extraction port of the fore-vacuum pump (21); One end of the three-way pipe (24) is communicated with the air outlet of a turbo molecular pump (22) through an electromagnetic valve and a vacuum silicone tube, the air inlet of the turbo molecular pump (22) is connected to the bottom of a first communication cylinder (25) through a gate valve (23), and the top of the first communication cylinder (25) is connected to a reserved port at the bottom of the vacuum chamber lower segment (33); The other end of the three-way pipe (24) is communicated with the first communication cylinder (25) through an electromagnetic valve and a vacuum silicone tube.

5. The experimental device of the multifunctional vacuum coating instrument according to claim 1, wherein: The evaporation source assembly (4) includes a metal evaporation source feeder (41); the first feeder electrode (411) of the metal evaporation source feeder (41) is inserted into the vacuum chamber lower segment (33) from a vacuum flange seat (331) reserved on the side wall of the vacuum chamber lower segment (33), and is butt-connected to the vacuum flange seat (331) through a first vacuum flange plate (412) on the metal evaporation source feeder (41); A metal electrode sheet (413) is arranged at the top end of the first feeder electrode (411), and a tungsten boat (414) is arranged between the metal electrode sheets (413) at the top ends of two opposite first feeder electrodes (411).

6. The experimental device of the multifunctional vacuum coating instrument according to claim 1, characterized in that: The evaporation source assembly (4) includes a small molecule evaporation source feeder (42); the small molecule evaporation source feeder (42) includes an electrode feeder (43) and a small molecule evaporation source (44); The electrode feeder (43) includes a feeder cylinder (431), at the bottom of which two second feeder electrodes (432) and two first K-type thermocouples (433) are hermetically arranged; the feeder cylinder (431) is connected in butt joint with a vacuum flange seat (331) on the lower segment (33) of the vacuum chamber through a second vacuum flange (434); The small molecule evaporation source (44) includes a heat conducting block (441), at the top of which a ceramic heating cylinder (442) is arranged; a quartz crucible (443) is placed at the top opening of the ceramic heating cylinder (442); The ceramic heating cylinder (442) is connected to the two second feeder electrodes (432) through wires; a temperature probe is arranged at the bottom of the heat conducting block (441), and the temperature probe is connected to the two first K-type thermocouples (433); A clamping block (45) is arranged at the top end of the feeder cylinder (431), and a housing (46) is arranged outside the heat conducting block (441). The clamping block (45) is connected to the housing (46) through a relative connecting member (47); baffles (48) fixed to the housing (46) are respectively arranged on both sides of the connecting member (47).

7. The experimental device of the multifunctional vacuum coating instrument according to claim 2, characterized in that: A baffle (62) is arranged at the bottom in the lower segment (33) of the vacuum chamber through two groups of fixing brackets (61); each group of the fixing brackets (61) includes two relatively arranged fixing sub-brackets (63), and strip-shaped holes (64) are formed in the fixing sub-brackets (63). The baffle (62) is fixed between the two fixing sub-brackets (63) by bolts passing through the strip-shaped holes (64) and the baffle (62).

8. The experimental device of the multifunctional vacuum coating instrument according to claim 2, characterized in that: The sample stage assembly (5) includes a second connecting cylinder (51) arranged at the top of the upper segment (31) of the vacuum chamber, and a sample heating stage (52) arranged inside the vacuum chamber assembly (3); The top of the second connecting cylinder (51) is connected with a corrugated pipe (53) through a flange. A magnetic fluid rotary seal (54) is arranged through the flange. A third feeder (55) is arranged above the magnetic fluid rotary seal (54). The sample heating stage (52) passes through the second connecting cylinder (51) and the corrugated pipe (53) and is connected to the bottom of the central axis of the magnetic fluid rotary seal (54), and is electrically connected to the third feeder (55).

9. The experimental device of the multifunctional vacuum coating instrument according to claim 8, characterized in that: The third feeder (55) includes a feeder straight cylinder (551), and the bottom of the feeder straight cylinder (551) is connected to the top of the central axis of the magnetic fluid rotary seal (54); Two third feeder electrodes (552) and two second K-type thermocouples (553) are hermetically arranged at the top of the feeder straight cylinder (551); the third feeder electrodes (552) are electrically connected to the heating furnace wires in the sample heating stage (52) through the central axis of the magnetic fluid rotary seal (54); the two second K-type thermocouples (553) are electrically connected to the temperature probes in the sample heating stage (52) through the central axis of the magnetic fluid rotary seal (54).

10. The experimental device of the multifunctional vacuum coating instrument according to claim 9, characterized in that: A rotating assembly is provided on the magnetic fluid rotary seal (54). The rotating assembly includes a motor (561) disposed on the flange of the magnetic fluid rotary seal (54) through a connecting plate. A driving pulley (562) is provided on the output shaft of the motor (561). A driven pulley (563) is provided on the central axis of the magnetic fluid rotary seal (54). The driving pulley (562) and the driven pulley (563) are connected by a belt. A lifting assembly is provided beside the bellows (53). The lifting assembly includes a lifting plate (571), and the bottom of the lifting plate (571) is connected to the bottom of the bellows (53). A ball screw (572) is provided in the middle of the lifting plate (571). A lead screw nut (573) on the ball screw (572) is connected to the top of the bellows (53) through a connecting plate (574). A handwheel (575) is provided at the end of the ball screw (572) passing through the top of the lifting plate (571).

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