Heater structure, semiconductor equipment and heater levelness adjusting method

Abstract

The invention discloses a heater structure, a semiconductor device and a heater levelness adjusting method, the heater structure comprises a heater body and a bottom heater, the bottom heater is provided with a center hole, and a handle of the heater body passes through the center hole; the first distance measuring assembly comprises at least two first distance measuring instruments used for detecting the distance between the bottom heater and the heater body, and the first distance measuring instruments are fixed to the bottom heater and distributed around the center hole. The adjusting assemblies are in one-to-one correspondence with the first range finders, and the output ends are connected with the heater body. The controller receives a detection result of the first distance measuring instrument and controls the corresponding adjusting assembly to work according to the detection result so as to adjust the height of the corresponding position of the heater body. In order to solve the technical problems of low efficiency and large error of manual leveling in the prior art, the first distance measuring assembly is adopted for automatically collecting data, the controller controls the adjusting assembly in a closed-loop mode, manual intervention is eliminated, the adjusting effect is improved, and the adjusting precision is also guaranteed.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment, and particularly to a heater structure, a semiconductor equipment, and a method for adjusting the levelness of a heater. Background Art

[0002] In precision process manufacturing such as semiconductor manufacturing and photovoltaic coating, the levelness of the heater and the relative position difference between the heater and key components such as the spray plate are core parameters determining the process quality. Taking chemical vapor deposition as an example, the heater needs to heat the wafer to a high temperature of 400 - 1200 °C. If the heater has a micron-level tilt, it will cause uneven temperature distribution on the wafer surface, directly resulting in an increase in the electrical performance dispersion of the device and a decrease in the product yield.

[0003] To ensure the levelness of the heater, during the installation process of the heater, traditional mechanical structures are needed for measurement and adjustment. For example, an operator uses a micrometer to measure multiple points on the surface of the heater and adjusts the height point by point by manually screwing the bottom support bolts. The "measurement - adjustment - remeasurement" cycle needs to be repeated, and the single leveling takes a long time. At the same time, there are also small manual errors, which may affect the process. And during use, only open-loop adjustment can be performed based on the set relative position difference value, and real-time monitoring feedback and automatic adjustment cannot be carried out. For a long-term process, the levelness cannot be guaranteed, which will affect the stability of the process operation. Summary of the Invention

[0004] Embodiments of the present invention provide a heater structure, a semiconductor equipment, and a method for adjusting the levelness of a heater, which solve the technical problems of time-consuming and laborious manual adjustment of the heater levelness and the inability to precisely control the levelness.

[0005] To solve the above problems, according to one aspect of the present application, embodiments of the present invention provide a heater structure. The heater structure includes a heater body, a bottom heater, a first distance measurement component, an adjustment component, and a controller. A central hole is provided on the bottom heater, and the handle of the heater body passes through the central hole. The first distance measurement component includes at least two first distance meters for detecting the distance between the bottom heater and the heater body. The first distance meters are fixed on the bottom heater and distributed around the central hole. The adjustment component corresponds to the first distance meter one by one, and its output end is connected to the heater body. The controller receives the detection results of the first distance meters and controls the corresponding adjustment component to work according to the detection results to adjust the height at the corresponding position of the heater body.

[0006] In some embodiments, the adjusting assembly includes a motor and a linear unit. The input end of the linear unit is connected to the motor, and the output end of the linear unit passes through the handle and is connected to the bottom of the heater body. Wherein, the motor is also connected to the controller.

[0007] In some embodiments, the linear unit includes a lead screw, a nut and a coupling. The input end of the coupling is connected to the motor, the output end of the coupling is connected to the lead screw, and the nut cooperates with the lead screw and acts on the bottom of the heater body.

[0008] In some embodiments, there are three first distance measuring instruments, and the three first distance measuring instruments are evenly distributed around the central hole. The output end of the adjusting assembly is located at the bottom of the heater body, and the output ends of the three adjusting assemblies are evenly distributed in the circumferential direction and correspond to the three first distance measuring instruments one by one.

[0009] In some embodiments, the heater structure further includes a spray plate and a second distance measuring assembly. The spray plate is located above the heater body. The second distance measuring assembly is arranged around the first distance measuring assembly. The second distance measuring assembly includes at least two second distance measuring instruments for measuring the distance between the spray plate and the bottom heater, and the second distance measuring instruments are fixed on the bottom heater and distributed in the circumferential direction.

[0010] In some embodiments, a corresponding relationship between the distance difference and the motor speed is preset in the controller. Wherein, the distance difference is the difference between the target distance and the current distance, the current distance is the real-time distance detected by the first distance measuring instrument, and the target distance is the distance between the corresponding target height of the heater body and the bottom heater.

[0011] According to another aspect of the present application, an embodiment of the present invention provides a semiconductor device, and the semiconductor device includes the above-mentioned heater structure.

[0012] According to another aspect of the present application, an embodiment of the present invention provides a method for adjusting the level of a heater, which is based on the above-mentioned heater structure. The method for adjusting the level includes:

[0013] S1, detecting the distance between the bottom heater and the heater body through the first distance measuring instrument to obtain at least two real-time distances;

[0014] S2, the controller compares at least two real-time distances in S1, and controls the adjusting assembly according to the comparison result so that all real-time distances in at least two real-time distances are the same.

[0015] In some embodiments, controlling the adjusting assembly according to the comparison result in S2 includes:

[0016] When all the real-time distances are the same, the adjusting assembly does not work;

[0017] When one of all the real-time distances is different from the other real-time distances, the other real-time distances are target distances, and the adjusting assembly in the area where the first rangefinder corresponding to the different real-time distance is located is adjusted until the different real-time distance is the same as the target distance;

[0018] When all the real-time distances are different, calculate the average distance of all the real-time distances, and adjust the adjusting assembly in the area where the first rangefinder corresponding to each real-time distance is located until all the real-time distances are the same as the average distance.

[0019] In some embodiments, when one of all the real-time distances is different from the other real-time distances, when adjusting the adjusting assembly in the area where the first rangefinder corresponding to the different real-time distance is located, the adjusting assembly adopts an adjusting method of accelerating first and then decelerating.

[0020] Compared with the prior art, the heater structure of the present invention has at least the following beneficial effects:

[0021] The heater structure provided by the present invention includes a heater body, a bottom heater, a first ranging assembly, an adjusting assembly and a controller. A central hole is provided on the bottom heater, and the handle of the heater body passes through the central hole; the first ranging assembly includes at least two first rangefinders for detecting the distance between the bottom heater and the heater body, and the first rangefinders are fixed on the bottom heater and distributed around the central hole; the adjusting assembly corresponds to the first rangefinder one by one, and its output end is connected to the heater body; the controller receives the detection results of the first rangefinders, and controls the corresponding adjusting assembly to work according to the detection results to adjust the height of the corresponding position of the heater body. Aiming at the technical problems of low efficiency and large error existing in the manual leveling of the traditional technology, the present invention automatically collects data by using the first ranging assembly, and the controller closed-loop controls the adjusting assembly, eliminating manual intervention, improving the adjusting effect, and ensuring the adjusting accuracy.

[0022] The semiconductor device provided by the present invention is designed based on the above heater structure, and its beneficial effects refer to the beneficial effects of the above heater structure, which will not be elaborated here one by one.

[0023] The heater level adjustment method provided by the present invention is designed based on the above heater structure, and its beneficial effects refer to the beneficial effects of the above heater structure, which will not be elaborated here one by one.

[0024] The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and be able to implement it according to the content of the specification, the following describes in detail with reference to the preferred embodiments of the present invention and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0026] Figure 1 FIG. shows a schematic structural diagram of a heater structure provided by an embodiment of the present invention;

[0027] Figure 2 FIG. shows a schematic block diagram of a heater structure provided by an embodiment of the present invention;

[0028] Figure 3 FIG. shows a schematic structural diagram of a part of a heater structure provided by an embodiment of the present invention;

[0029] Figure 4 FIG. shows a schematic structural diagram of a bottom heater in a heater structure provided by an embodiment of the present invention;

[0030] Figure 5 FIG. shows a flowchart of a method for adjusting the level of a heater provided by an embodiment of the present invention;

[0031] Reference Numerals:

[0032] 1, heater body; 11, handle; 2, bottom heater; 21, central hole; 3, first distance measuring assembly; 31, first rangefinder; 4, adjusting assembly; 41, motor; 42, linear unit; 5, controller; 6, spray plate; 7, second distance measuring assembly; 71, second rangefinder. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0033] In order to further elaborate on the technical means and effects adopted by the present invention to achieve the intended invention purpose, the following describes in detail the specific implementation manners, structures, features, and effects of the present invention application with reference to the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0034] In the description of the present invention, it should be clear that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence; the terms "vertical", "lateral", "longitudinal", "front", "rear", "left", "right", "upper", "lower", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position shown in the drawings, and are only for the convenience of describing the present invention, rather than meaning that the indicated device or element must have a specific orientation or position, so it cannot be understood as a limitation to the present invention.

[0035] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the drawings of the specification and specific embodiments.

[0037] Embodiment 1

[0038] This embodiment provides a heater structure, as Figures 1 - 4 shown. The heater structure includes a heater body 1, a bottom heater 2, a first distance measuring assembly 3, an adjustment assembly 4, and a controller 5. A central hole 21 is formed in the bottom heater 2, and the handle 11 of the heater body 1 passes through the central hole 21; the first distance measuring assembly 3 includes at least two first distance meters 31 for detecting the distance between the bottom heater 2 and the heater body 1. The first distance meters 31 are fixed on the bottom heater 2 and are distributed around the central hole 21; the adjustment assembly 4 corresponds to the first distance meters 31 one by one, and its output end is connected to the heater body 1; the controller 5 receives the detection results of the first distance meters 31 and controls the corresponding adjustment assembly 4 to work according to the detection results to adjust the height at the corresponding position of the heater body 1.

[0039] In this embodiment, the heater body 1 is located above the bottom heater 2, and its handle 11 passes through the central hole 21 of the bottom heater 2. The heater body 1 directly carries the wafer and provides the heating function, and its level directly affects the process uniformity. The bottom heater 2, as a support base, is located below the heater body 1 and has a central hole 21 for the handle to pass through. The first distance measuring assembly 3 is fixed on the bottom heater 2 and is symmetrically distributed around the central hole 21 (for example, at 120° intervals). The first distance measuring assembly 3 detects the multi-point distances between the bottom heater 2 and the heater body 1 in real time through a plurality of first distance measuring instruments 31, and provides the level deviation data. Each adjusting assembly 4 corresponds to a first distance measuring instrument 31, and its output end (such as the end of the ball screw) is mechanically connected to the support structure of the heater body 1. The adjusting assembly 4 receives the instruction from the controller 5 and adjusts the height of the corresponding position of the heater body 1 through the vertical displacement to achieve dynamic leveling. The controller 5 is independently installed in the equipment control cabinet and is connected to the first distance measuring instrument 31 and the adjusting assembly 4 through cables. It can process the ranging data in real time, calculate the horizontal deviation, generate an adjustment instruction to drive the corresponding adjusting assembly 4 to act, and form a closed-loop control. In addition, the first distance measuring instrument 31 is a laser distance measuring instrument.

[0040] The controller 5 receives the detection result of the first distance measuring instrument 31 and controls the corresponding adjusting assembly 4 to work according to the detection result to adjust the height of the corresponding position of the heater body 1. That is to say, when a certain first distance measuring instrument 31 detects that the distance between the bottom heater 2 and the heater body 1 at its installation position (such as point A) is abnormal, the controller 5 marks this point as a deviation point. The controller 5 sends a pulse instruction to the corresponding adjusting assembly 4 (such as the motor at point A) to drive the ball screw to generate a vertical displacement. The ball screw of the adjusting assembly 4 pushes the heater body 1 to rise or fall at point A until the ranging value at this point is the same as that of other points.

[0041] For a clearer explanation, assume that in a certain embodiment, there are two first rangefinders 31, namely first rangefinder a and first rangefinder b, which are respectively installed at symmetrical positions (for example, 180° apart) of the bottom heater 2. The corresponding adjusting components a and b are respectively connected to the corresponding areas of the heater body 1. Among them, the adjusting component a and the first rangefinder a are located in the same area, and the adjusting component b and the first rangefinder b are located in the same area. For example, both the adjusting component a and the first rangefinder a are located in the left half area, and both the adjusting component b and the first rangefinder b are located in the right half area. At a certain moment, the data collected by the first rangefinder a is h1, the data collected by the first rangefinder b is h2, h1 is greater than h2, and the difference between the two is Δh. Then, there can be the following three adjustment methods at this time: The first is to make the heater body 1 in the left half area move downward by Δh through the adjusting component a; the second is to make the heater body 1 in the right half area move upward by Δh through the adjusting component b; the third method is to make the heater body 1 in the left half area move downward by Δh / 2 through the adjusting component a, and at the same time make the heater body 1 in the right half area move upward by Δh / 2 through the adjusting component b. Of course, during the operation of the adjusting component a and / or the adjusting component b, h1 and h2 will change at any time, and at this time, the adjustment amounts of the adjusting component a and the adjusting component b will also change accordingly.

[0042] Of course, three, four or more first rangefinders 31 can also be set. If three first rangefinders 31 are set, the three first rangefinders 31 are distributed at intervals of 120°, and each adjusting component 4 is responsible for the local height adjustment of a 1 / 3 sector area on the circumference of the heater body 1. When the first rangefinder 31 detects that the distance at point B is too large, only the adjusting component 4 corresponding to point B is driven to adjust this area, avoiding the coupling error caused by global adjustment.

[0043] In the specific operation process, it is preferred to set three first rangefinders 31.

[0044] Aiming at the technical problems of low efficiency and large error in manual leveling in the traditional technology, in this embodiment, the first ranging component 3 automatically collects data, and the controller 5 controls the adjusting component 4 in a closed loop, eliminating manual intervention, improving the adjustment effect, and ensuring the adjustment accuracy.

[0045] In a specific embodiment, the adjusting component 4 includes a motor 41 and a linear unit 42. The input end of the linear unit 42 is connected to the motor 41, and the output end of the linear unit 42 passes through the handle 11 and is connected to the bottom of the heater body 1; wherein, the motor 41 is also connected to the controller 5.

[0046] The motor 41 serves as a power source, receives instructions (such as pulse signals or analog voltages) from the controller 5, outputs rotational torque, and drives the linear unit 42 to generate precise linear displacement. The linear unit 42 is rigidly connected to the output shaft of the motor 41, and its output end passes through the central channel of the handle 11 and is mechanically connected to the bottom of the heater body 1 through a flange or a ball hinge joint. The handle 11 serves as a connecting component between the heater body 1 and an external mechanism, usually having a hollow cylindrical structure. The output end of the linear unit 42 passes through the central channel of the handle 11, enabling the driving force to be transmitted along the geometric central axis of the heater body 1 and avoiding torque interference caused by eccentric loads.

[0047] In a specific embodiment, the linear unit 42 includes a lead screw, a nut, and a coupling. The input end of the coupling is connected to the motor 41, the output end of the coupling is connected to the lead screw, and the nut cooperates with the lead screw and acts on the bottom of the heater body 1.

[0048] During the specific use process, when the first distance measuring instrument 31 detects a height deviation at a certain point of the heater body 1, the controller 5 calculates the displacement amount to be compensated and converts it into the number of pulses that the motor 41 needs to rotate. The output shaft of the motor 41 drives the ball screw to rotate through an elastic coupling. When the ball screw rotates, the nut moves linearly and pushes the corresponding point of the heater body 1 to rise and fall. During this process, the motor encoder real-time feeds back the actual rotation angle, the controller 5 compares the target and the actual position, and dynamically adjusts the output; at the same time, the first distance measuring instrument 31 continuously monitors the height, forming a double closed-loop verification.

[0049] In a specific embodiment, there are three first distance measuring instruments 31, and the three first distance measuring instruments 31 are evenly distributed around the central hole 21; the output end of the adjusting component 4 is located at the bottom of the heater body 1, and the output ends of the three adjusting components 4 are evenly distributed in the circumferential direction and correspond to the three first distance measuring instruments 31 one by one. The three first distance measuring instruments 31 are evenly distributed around the central hole 21 (for example, symmetrically arranged at 120° intervals). According to geometric principles, three non-collinear points can uniquely determine a plane. By continuously monitoring the three-point distances between the heater body 1 and the bottom heater 2 through the three first distance measuring instruments 31, the controller 5 can accurately calculate the overall inclination of the heater.

[0050] In a specific embodiment, the heater structure further includes a spray plate 6 and a second distance measuring component 7. The spray plate 6 is located above the heater body 1, the second distance measuring component 7 is arranged around the first distance measuring component 3, and the second distance measuring component 7 includes at least two second distance measuring instruments 71 for measuring the distance between the spray plate 6 and the bottom heater 2. The second distance measuring instruments 71 are fixed on the bottom heater 2 and are distributed in the circumferential direction. Moreover, the second distance measuring component 7 is connected to the controller 5. The second distance measuring instrument 71 is a laser distance measuring instrument.

[0051] Structurally, the second distance measurement component 7 is arranged around the first distance measurement component 3 to form an inner and outer double-loop monitoring structure. Specifically, for example, the three first rangefinders 31 are evenly distributed around the central hole 21 with a smaller radius, and the three second rangefinders 71 are distributed around the first distance measurement component 3 in the same circumferential direction with a larger radius, forming a concentric double-loop layout. Functionally, the first distance measurement component 3 focuses on the self-deformation and installation inclination of the heater body 1, and the second distance measurement component 7 monitors the overall alignment relationship between the spray plate 6 and the heater system. Through the data fusion of the inner and outer loops, the controller 5 can perform hierarchical adjustment methods. For example, the inner loop has priority. When it is detected that the heater body 1 is tilted, the priority adjustment component 4 acts first; for the outer loop calibration, if the gap of the spray plate 6 is abnormal while the inner loop data is normal, it is determined that the spray plate 6 is offset, and at this time, the spray plate 6 needs to be adjusted.

[0052] In a specific embodiment, a corresponding relationship between the distance difference and the rotation speed of the motor 41 is preset in the controller 5; wherein, the distance difference is the difference between the target distance and the current distance, the current distance is the real-time distance detected by the first rangefinder 31, and the target distance is the distance between the target height corresponding to the heater body 1 and the bottom heater 2.

[0053] In this embodiment, a corresponding relationship between the distance difference and the rotation speed of the motor 41 is preset in the controller 5, that is, a closed-loop control algorithm is embedded in the controller 5, and the real-time distance deviation (Δh) detected by the first rangefinder 31 is converted into a rotation speed command (v) for driving the motor 41. Its essence is to establish a dynamic association between the error quantity and the adjustment speed through a mathematical model.

[0054] For example, in the controller 5, it can be set that when Δh > L1, the rotation speed v of the corresponding motor 41 = v1; when L2 < Δh ≤ L1, the rotation speed v of the corresponding motor 41 = v2; when Δh ≤ L2, the rotation speed v of the corresponding motor 41 = v3; of course, more detailed divisions can also be made, and the rotation speed of the motor 41 can also be determined by combining the method of adaptive PID control.

[0055] The heater structure provided in this embodiment realizes the full-automatic high-precision control of the heater level through three-point ranging closed-loop feedback and intelligent adjustment algorithms, solves the core defects of traditional manual leveling and open-loop systems, and significantly improves the process stability and equipment reliability.

[0056] Embodiment 2

[0057] This embodiment provides a semiconductor device, and the semiconductor device includes the heater structure described in Embodiment 1.

[0058] Embodiment 3

[0059] A method for adjusting the level of a heater based on the heater structure described in Embodiment 1, as Figure 5 shown, the method for adjusting the level includes:

[0060] S1. Detect the distance between the bottom heater 2 and the heater body 1 through the first rangefinder 31 to obtain at least two real-time distances;

[0061] S2. The controller 5 compares at least two real-time distances in S1 and controls the adjusting component 4 according to the comparison result, so that all real-time distances in at least two real-time distances are the same.

[0062] In S1, preferably three real-time distances are obtained. S1 replaces manual measurement with high-precision ranging to solve the problems of low efficiency and large error. S2 realizes dynamic leveling through closed-loop control, achieving full-automatic high-precision control of the heater level.

[0063] In a specific embodiment, controlling the adjusting component 4 according to the comparison result in S2 includes:

[0064] When all the real-time distances are the same, the adjusting component 4 does not work;

[0065] When one of all the real-time distances is different from the other real-time distances, the other real-time distances are target distances, and the adjusting component 4 in the area where the first rangefinder 31 corresponding to the different real-time distance is located is adjusted until the different real-time distance is the same as the target distance;

[0066] When all the real-time distances are different, calculate the average distance of all real-time distances, and adjust the adjusting component 4 in the area where each first rangefinder 31 corresponding to the real-time distance is located until all real-time distances are the same as the average distance.

[0067] To more clearly explain the above three situations, assume that in a certain embodiment, there are three first rangefinders 31, and the data collected by the three first rangefinders 31 are h1, h2, and h3 respectively.

[0068] Then when h1 = h2 = h3, no adjustment is required, and the adjusting component 4 remains stationary.

[0069] When h1 = h2 = H, h3 = K, and K ≠ H, taking the majority-consistent distance H as the benchmark, at this time, the first rangefinder 31 that measures the data h3 is an abnormal point, and it deviates from the target value. In this case, only drive the adjusting component 4 corresponding to this abnormal point to lift or lower it until h3 = H;

[0070] When h1 = A, h2 = B, h3 = C, and A ≠ B ≠ C, calculate the average distance Havg = (A + B + C) / 3, and adjust all ranging points to Havg. At this time, synchronously drive all three adjustment components 4 to adjust the height of the area corresponding to the first rangefinder 31 respectively until A = Havg, B = Havg, and C = Havg.

[0071] Through the above three adjustment logics in this embodiment, the method can cover all the abnormal leveling modes that the heater may present, realizing full-scenario adaptive closed-loop control.

[0072] In a specific embodiment, when one of all the real-time distances is different from the rest of the real-time distances, when adjusting the adjustment component 4 in the area where the first rangefinder 31 corresponding to the different real-time distance is located, the adjustment component 4 adopts an adjustment method of accelerating first and then decelerating.

[0073] This embodiment emphasizes that in a specific situation, the adjustment component 4 adopts an adjustment method of accelerating first and then decelerating. Through the initial rapid acceleration stage, quickly approach the target position and reduce the overall adjustment time. For example, if the target displacement is ΔZ, the time taken for uniform motion is t = ΔZ / v, while using the uniform acceleration-uniform deceleration mode can shorten the time to (a is the acceleration), with higher efficiency. When approaching the target position, switch to decelerating motion, and accurately stop by reducing the speed to avoid overshoot caused by inertia or system delay. In addition, the sudden start and stop of uniform motion will generate impact stress on mechanical components such as ball screws and couplings, while a smooth acceleration and deceleration curve can reduce the instantaneous torque change and extend the equipment life.

[0074] As described above, the above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A heater structure, characterized in that, The heater structure includes a heater body, a bottom heater, a first distance measuring component, an adjusting component, and a controller. A central hole is provided on the bottom heater, and the handle of the heater body passes through the central hole. The first distance measuring component includes at least two first distance meters for detecting the distance between the bottom heater and the heater body. The first distance meters are fixed on the bottom heater and distributed around the central hole. The adjusting component corresponds to the first distance meter one by one, and its output end is connected to the heater body. The controller receives the detection results of the first distance meters and controls the corresponding adjusting component to work according to the detection results to adjust the height at the corresponding position of the heater body.

2. The heater structure according to claim 1, characterized in that, The adjusting component includes a motor and a linear unit. The input end of the linear unit is connected to the motor, and the output end of the linear unit passes through the handle and is connected to the bottom of the heater body. Among them, the motor is also connected to the controller.

3. The heater structure according to claim 2, wherein The linear unit includes a lead screw, a nut, and a coupling. The input end of the coupling is connected to the motor, the output end of the coupling is connected to the lead screw, and the nut cooperates with the lead screw and acts on the bottom of the heater body.

4. The heater structure according to any one of claims 1 to 3, characterized in that, There are three first distance meters, and the three first distance meters are evenly distributed around the central hole. The output ends of the adjusting components are located at the bottom of the heater body, and the output ends of the three adjusting components are evenly distributed in the circumferential direction and correspond to the three first distance meters one by one.

5. The heater structure according to claim 1, characterized in that, The heater structure further includes a spray plate and a second distance measuring component. The spray plate is located above the heater body. The second distance measuring component is arranged around the first distance measuring component. The second distance measuring component includes at least two second distance meters for measuring the distance between the spray plate and the bottom heater. The second distance meters are fixed on the bottom heater and distributed in the circumferential direction.

6. The heater structure according to claim 4, wherein The corresponding relationship between the distance difference and the motor speed is preset in the controller. Among them, the distance difference is the difference between the target distance and the current distance. The current distance is the real-time distance detected by the first distance meter, and the target distance is the distance between the target height corresponding to the heater body and the bottom heater.

7. A semiconductor device, characterized in that, The semiconductor device includes the heater structure according to any one of claims 1-6.

8. A method for adjusting the levelness of a heater based on the heater structure according to any one of claims 1-6, characterized in that, The levelness adjustment method includes: S1. Detect the distance between the bottom heater and the heater body through the first distance meter to obtain at least two real-time distances. S2. The controller compares the at least two real-time distances in S1 and controls the adjusting component according to the comparison result so that all the real-time distances among the at least two real-time distances are the same.

9. The method for adjusting the level of the heater according to claim 8, characterized in that, Controlling the adjusting component according to the comparison result in S2 includes: When all the real-time distances are the same, the adjusting component does not work. When one of all the real-time distances is different from the other real-time distances, the other real-time distances are the target distances. Adjust the adjusting component in the area where the first distance meter corresponding to the different real-time distance is located until the different real-time distance is the same as the target distance. When all the real-time distances are different, calculate the average distance of all the real-time distances, and adjust the adjusting components in the areas where the first rangefinders corresponding to each real-time distance are located until all the real-time distances are the same as the average distance.

10. The method for adjusting the level of the heater according to claim 9, characterized in that, When one of all the real-time distances is different from the other real-time distances, when adjusting the adjusting components in the area where the first rangefinder corresponding to the different real-time distance is located, the adjusting components adopt an adjusting method of accelerating first and then decelerating.

Images