Micro-nano probe for realizing high-efficiency and high-precision measurement through active vibration reduction

Abstract

The invention discloses a micro-nano probe capable of realizing high efficiency and high precision through active vibration reduction. An optical measurement unit is arranged in a measurement cylinder; the measuring head unit is located below the measuring cylinder, an elastic mechanism is arranged between two annular reed pressing plates in the measuring head unit, a suspension piece is arranged in the center area of the elastic mechanism, a plane mirror is arranged on the side, facing the inside of the measuring cylinder, of the suspension piece, and a probe is installed on the side, facing the outside of the measuring cylinder, of the suspension piece. The probe sleeve which is a metal conductor is sheathed outside the probe, and the probe sleeve is fixedly connected with the suspension sheet; an electromagnetic coil is arranged on the lower side of the elastic mechanism; when the probe detects, the electromagnetic coil is powered on and forms an electromagnetic field, oscillation of the probe is transmitted to the probe sleeve through the elastic mechanism, the probe sleeve bears Ampere force opposite to the moving direction of the probe sleeve under electromagnetic induction to hinder vibration of the probe sleeve, and active vibration reduction of the micro-nano probe is achieved. According to the invention, high-efficiency and high-precision micro-nano detection is realized through active vibration reduction.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano measurement, and more specifically to a micro-nano probe applied to a nano coordinate measuring machine, which meets the rapid measurement requirements of micro-sized devices with an active vibration damping function. Background Art

[0002] With the development of micro-nano processing technology, various micro-nano scale micro-devices have emerged one after another, such as micro-lenses, micro-gears, micro-chips, fuel injectors, etc. These micro-devices have complex shapes and high precision requirements. To meet the measurement requirements of such devices, a coordinate measuring machine with nano-level measurement accuracy is required. As one of the core components of the coordinate measuring machine, the dynamic response characteristics of the probe directly determine the overall measurement accuracy and measurement efficiency of the coordinate measuring machine.

[0003] A contact probe generally consists of three parts, namely a probe, an elastic mechanism, and a sensor. The elastic mechanism converts the displacement of the measuring ball in three-dimensional directions into a physical quantity that is convenient for the sensor to sense. According to different sensing principles, contact probes can be divided into: capacitive, inductive, resistive, and optical sensing types, etc. In addition to processing the output signal, directly weakening the source of vibration at the physical level is also an important way to reduce the vibration of the probe output signal.

[0004] In the patent specification of the invention with the publication number CN 105698661 A, the applicant proposed a contact scanning probe for a micro-nano coordinate measuring machine, which uses a capacitive sensor as the sensing device. Compared with strain type, piezoresistive type, and inductive type, it improves the accuracy and dynamic response speed of the probe to a certain extent.

[0005] In the patent specification of the invention with the publication number CN 105758335 A, the applicant proposed a three-dimensional micro-nano contact scanning probe, which uses an optical sensor to sense, and obtains a faster dynamic response speed compared with the capacitive probe.

[0006] The above two methods shorten the response time of the probe and improve the dynamic response speed of the probe by replacing the sensor with a high response speed. However, the vibration attenuation of the elastic mechanism during the measurement process takes time, and the required stabilization time of the probe in actual use directly limits the improvement of the measurement efficiency. Summary of the Invention

[0007] The present invention aims to avoid the deficiencies of the above-mentioned prior art, and provides a micro-nano probe that realizes high-efficiency and high-precision measurement through active vibration damping, in order to obtain high measurement accuracy and dynamic response speed, and improve the measurement efficiency.

[0008] The present invention adopts the following technical solutions to solve the technical problems:

[0009] The characteristics of the micro-nano probe with high efficiency and high precision achieved by active vibration damping in the present invention are as follows: an optical measurement unit is arranged inside the measurement cylinder; the probe unit is located below the measurement cylinder, an elastic mechanism is arranged between two annular reed pressing plates in the probe unit, a floating plate is arranged in the central area of the elastic mechanism, a plane mirror is arranged on the side of the floating plate facing the inside of the measurement cylinder, a probe is installed on the side of the floating plate facing the outside of the measurement cylinder, a probe sleeve sheath made of a metal conductor is outside the probe, and the probe sleeve is fixedly connected to the floating plate; an electromagnetic coil is arranged on the lower side of the elastic mechanism; when the probe is detecting, the electromagnetic coil is energized to form an electromagnetic field, the oscillation of the probe is transmitted to the probe sleeve through the elastic mechanism, and the probe sleeve is hindered from vibrating by the Ampere force opposite to its movement direction under electromagnetic induction, realizing the active vibration damping of the micro-nano probe.

[0010] The characteristics of the micro-nano probe with high efficiency and high precision achieved by active vibration damping in the present invention also lie in:

[0011] The optical measurement unit arranged inside the measurement cylinder is composed of a laser, an optical mirror and a quadrant detector;

[0012] For the said probe unit, the two annular reed pressing plates are respectively a reed upper pressing plate and a reed lower pressing plate, the reed upper pressing plate is fixedly connected to the lower cylinder cover of the measurement cylinder, so that the probe unit is located below the measurement cylinder; the floating plate is fixedly connected to the outer ring of the elastic mechanism through a cantilever, forming a floating mechanism in the central hollow area between the two annular reed pressing plates; a measuring ball is fixedly installed at the end of the probe; the electromagnetic coil is fixed on the coil base by a coil buckle, and the coil base is fixedly installed with the reed lower pressing plate, so that the probe sleeve is in the electromagnetic field formed by the energized electromagnetic coil;

[0013] The method for setting active vibration damping is as follows: while the probe is detecting, keep the electromagnetic coil in the energized state to form an electromagnetic field. For the process that the probe gradually stabilizes during a period of oscillation when it contacts and separates from the measured object, the oscillation of the probe is transmitted to the probe sleeve through the elastic mechanism, and the probe sleeve in the electromagnetic field is hindered from vibrating by the Ampere force opposite to its movement direction under electromagnetic induction, realizing the active vibration damping of the micro-nano probe.

[0014] The characteristics of the micro-nano probe with high efficiency and high precision achieved by active vibration damping in the present invention also lie in: the reed upper pressing plate, the elastic mechanism and the reed lower pressing plate are fixedly connected together by screws; the coil buckle, the coil base and the reed lower pressing plate are fixedly connected together by screws.

[0015] The characteristics of the micro-nano probe with high efficiency and high precision achieved by active vibration damping in the present invention also lie in that the structure of the measurement unit is set as follows: inside the measurement cylinder, a laser fixing seat, a two-dimensional adjustment seat, and a quadrant detector fixing seat are respectively arranged on one side wall. The upper cylinder cover is fixedly connected to the top of the cylinder wall of the measurement cylinder. The laser is fixedly installed on the laser fixing seat by the upper cover of the laser fixing seat; a plane mirror is arranged on one side of the two-dimensional adjustment seat facing the laser; the quadrant detector is fixedly installed on the quadrant detector fixing seat by the quadrant detector fixing seat pressing plate; the optical path structure of the measurement unit is that the collimated light emitted by the laser is projected onto the plane mirror on the two-dimensional adjustment seat. After being reflected by the plane mirror, it is projected onto the central plane mirror on the floating sheet, and after being reflected by it, it is projected onto the quadrant detector to achieve optical measurement.

[0016] The characteristics of the micro-nano probe with high efficiency and high precision achieved by active vibration damping in the present invention also lie in that the two-dimensional adjustment seat is set as an angle adjustment structure, and by adjusting the two-dimensional angle of the two-dimensional adjustment seat, part of the reflected light of the plane mirror is projected onto the central position of the central plane mirror.

[0017] Compared with the prior art, the beneficial effects of the present invention are reflected in:

[0018] 1. The present invention does not require structural adjustment of the probe elastic mechanism. Without increasing the stiffness of the elastic mechanism, by setting a vibration damping unit, when the probe vibrates, the coil is energized to generate a magnetic field, and the vibration damping unit works, thereby reducing the vibration attenuation time and effectively improving the dynamic characteristics of the probe.

[0019] 2. The present invention adds a coil and a probe sleeve on the probe to achieve active vibration damping, and its structure is simple, with high practicability and universality.

[0020] 3. The present invention sets a probe sleeve made of a metal conductor material outside the probe to increase the induced electromotive force generated when the probe vibrates and cuts the magnetic induction line, thereby increasing the induced current and Ampere force generated by cutting the magnetic induction line and improving the vibration damping effect.

[0021] 4. In the actual application of the present invention, the larger the vibration amplitude of the probe, the greater the induced electromotive force generated in the probe sleeve, the greater the Ampere force received by the probe sleeve, and the stronger the hindering effect, which has self-adaptability. Description of the Drawings

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a schematic exploded view of the structure of the probe unit of the present invention;

[0024] Figure 3Schematic diagram of the probe sleeve installation of the present invention;

[0025] Figure 4 Schematic diagram of the measurement optical path structure in the present invention;

[0026] Figure 5 Schematic diagram of the two-dimensional adjustment seat structure in the present invention;

[0027] Figure 6 Exploded schematic diagram of the fixed structure of the quadrant detector in the present invention;

[0028] Figure 7 Exploded schematic diagram of the fixed structure of the laser in the present invention;

[0029] Figure 8 Schematic diagram of the force on the probe sleeve when vibrating to the left in the magnetic field in the present invention;

[0030] Figure 9 Output curve of the probe with the coil not energized;

[0031] Figure 10 Output curve of the probe with the coil energized after the probe vibrates.

[0032] Reference numerals in the figure: 1a upper cylinder cover, 1b lower cylinder cover, 2a laser fixing seat, 2b laser, 2c upper laser seat, 3a quadrant detector fixing seat, 3b quadrant detector, 3c quadrant detector fixing seat pressing plate, 4a two-dimensional adjustment seat, 4b adjustment screw, 5 plane mirror, 6 central plane mirror, 7 probe unit, 8a reed upper pressing plate, 8b reed lower pressing plate, 9 elastic mechanism, 10a coil, 10b coil iron core, 11 coil buckle, 12 coil base, 13 probe, 14 suspension piece, 15 probe sleeve. Specific implementation mode

[0033] In this embodiment, the structural settings of the micro-nano probe for achieving high-efficiency and high-precision measurement through active vibration damping include:

[0034] See Figure 1 、 Figure 2 and Figure 3, in the probe unit 7, an elastic mechanism 9 is provided between the reed upper pressure plate 8a and the reed lower pressure plate 8b. The reed upper pressure plate 8a is fixedly connected to the lower cylinder cover 1b. There is a floating piece 14 in the middle of the elastic mechanism 9. An "S-shaped curve structure" cantilever connection is provided between the floating piece 14 and the outer ring of the elastic mechanism 9 to form a floating mechanism for the floating piece 14 in the center of the reed pressure plate; on the plane on the inner side of the floating piece 14 facing the cylinder, a central plane mirror 6 is fixedly provided at the central position of the floating piece 14; on the plane on the outer side of the floating piece 14 facing the cylinder, the probe 13 is fixedly installed at the center of the floating piece, the measuring ball is fixedly installed at the end of the probe 13, and the probe sleeve 15 is sleeved outside the probe 13 and fixedly connected to the floating piece 14.

[0035] See Figure 1 , Figure 4 , Figure 5 , Figure 6 and Figure 7 , the measuring unit, a laser fixed seat 2a, a two-dimensional adjustment seat 4a and a quadrant detector fixed seat 3a are provided on the inner side of one cylinder wall. The cylinder wall is fixedly connected to the upper cylinder cover 1a. The laser 2b is fixedly installed by the laser fixed seat 2a and the laser fixed seat upper cover 2c; a plane mirror 5 is provided on one side of the two-dimensional adjustment seat 4a facing the laser 2b; the quadrant detector 3b is fixedly installed by the quadrant detector fixed seat 3a and the quadrant detector fixed seat pressure plate 3c. The optical path structure of the measuring unit is set as follows: the collimated light emitted by the laser 2b is projected onto the plane mirror 5 on the two-dimensional adjustment seat 4a, and after being reflected by the plane mirror 5, it is projected onto the central plane mirror 6 on the floating piece 14, and after being reflected by it, it is finally projected onto the quadrant detector 3b.

[0036] See Figure 2 , Figure 3 and Figure 8, A vibration damping unit. A coil 10a is arranged at a certain distance below the elastic mechanism 9. The coil is evenly wound around a coil iron core 10b. A coil base 12 is arranged below the coil 10a. The coil 10a is arranged in a groove of the coil base 12. Four coil buckles 11 are arranged above the coil 10a. The coil base 12 is fixedly installed with the reed lower pressing plate 8b. After the coil 10a is energized, a magnetic field is formed. The Ampere force generated by the probe sleeve 15 cutting the magnetic force lines is used to achieve the effect of vibration damping. During the working process of the probe, there is a process of gradually stabilizing oscillation after the probe 13 contacts and separates from the object to be measured. The probe 13 and the probe sleeve 15 are fixedly connected to the elastic mechanism 9. The probe sleeve 15 and the elastic mechanism 9 also have a process of gradually stabilizing oscillation, which causes the oscillation of the output value of the probe. The time required for the output value of the probe to start oscillating and stabilize within a certain range is called the stabilization time t. When the stabilization time t starts, that is, when the output value of the probe starts to vibrate, the coil 10a is energized. The metal probe sleeve 15 vibrates in the magnetic field of the coil 10a, cutting the magnetic force lines. According to the principle of electromagnetic induction, the metal probe sleeve 15 is subjected to an Ampere force opposite to its movement direction to hinder its vibration, reducing the stabilization time t, and active vibration damping is achieved by controlling the energization of the coil 10a. In practical applications, the energized coil can be replaced by other devices that can generate a controllable magnetic field, and the probe sleeve can be placed in a controllable magnetic field.

[0037] In specific implementation, the corresponding structure also includes:

[0038] Such as Figure 2 shown, between the reed upper pressing plate 8a, the reed lower pressing plate 8b and the elastic mechanism 9, between the coil buckle 11 and the coil base 12, and between the coil base 12 and the reed lower pressing plate 8b, screw fixed connections are adopted.

[0039] Such as Figure 3 shown, a metal probe sleeve 15 is arranged outside the probe 13. The probe 13 and the probe sleeve 15 are fixedly installed on the lower side of the suspension piece 14.

[0040] Such as Figure 1 and Figure 6 shown, a laser fixed seat 2a is arranged on the inner side of the cylinder wall, and the laser fixed seat 2a is fixedly connected to the cylinder wall by screws. The laser 2b is placed in a groove of the laser fixed seat 2a, and a laser fixing upper cover 2c is provided, which is fixedly connected to the laser fixed seat 2a by screws to fix the laser 2b.

[0041] Such as Figure 1 and Figure 5 shown, a quadrant detector fixed seat 3a is arranged on the inner side of the cylinder wall, and the quadrant detector fixed seat 3a is fixedly connected to the cylinder wall by screws. The quadrant detector 3b is embedded in the quadrant detector fixed seat 3a, and a quadrant detector fixed seat pressing plate 3c is arranged on the back side of the quadrant detector to fix it.

[0042] As shown Figure 5 in the figure, a two-dimensional adjustment base 4a capable of angle adjustment is provided, and a plane mirror 5 is provided on the laser direction side of the two-dimensional adjustment base 4a. The adjustment screw 4b is adjusted so that a part of the reflected light of the plane mirror 5 is projected at the center position of the central plane mirror 6.

[0043] The working principle of the measuring unit in this embodiment is as Figure 2 and Figure 3 shown

[0044] The light emitted from the laser 2b is reflected by the plane mirror 5 on the two-dimensional adjustment base 4a and then projected onto the central plane mirror 6, and then reflected by the central plane mirror 6 and projected onto the quadrant detector 3b. When the probe 13 is touched by a horizontal or vertical force, the suspension piece 14 and the central plane mirror 6 are laterally or vertically displaced, resulting in a change in the position of the light spot projected onto the quadrant detector 3b, and further resulting in a change in the magnitude of the current signal output by the quadrant detector 3b. The current / voltage conversion circuit is used to convert the current signals output from the four quadrants into voltage signals, and the change in the position of the light spot is converted into a displacement signal for output.

[0045] Performance test of the micro-nano probe with active vibration damping function in this embodiment

[0046] Taking the vibration process after the probe is separated from the object to be measured as an example

[0047] A three-dimensional high-precision nano-positioning platform (Physik Instrumente, model P-561.3CD, Germany) is selected to provide the trigger displacement standard quantity to test the probe. The output value of the probe is sampled every 10 ms, and the output curve of the probe is recorded. The output curve of the probe with the coil not energized during the working process of the probe is as Figure 8 shown, and the output curve of the probe with the coil energized for active vibration damping after the probe vibrates is as Figure 9 shown

[0048] Figure 9 It can be seen that after the probe is separated from the object to be measured and vibrates, after about 230 samplings, that is, after about 2.3 s, the output value can be stabilized within 1 μm.

[0049] Figure 10 It can be seen that when the coil is energized when the output value of the probe starts to oscillate, under the influence of the Ampere force between the probe sleeve and the coil magnetic field, after about 20 samplings, that is, after about 0.2 s, the output value can be stabilized within 1 μm. The time required for the probe output to be stabilized within 1 μm is reduced by about 91%, and the active vibration damping effect is remarkable. For higher vibration damping effect requirements, it can be achieved by replacing coils with different parameters or changing the magnitude of the coil energizing current.

Claims

1. A micro-nano probe that achieves high efficiency and high precision through active vibration damping, characterized in that: An optical measurement unit is provided inside the measuring cylinder; the probe unit (7) is located below the measuring cylinder. An elastic mechanism (9) is provided between two annular reed pressing plates in the probe unit. A floating plate (14) is provided in the central area of the elastic mechanism (9). A plane mirror (6) is provided on the side of the floating plate (14) facing the inside of the measuring cylinder, and a probe (13) is installed on the side of the floating plate (14) facing the outside of the measuring cylinder. A probe sleeve (15) made of a metal conductor sheathes the outside of the probe (13), and the probe sleeve (15) is fixedly connected to the floating plate (14); an electromagnetic coil (10a) is provided on the lower side of the elastic mechanism; when the probe detects, the electromagnetic coil (10a) is energized to form an electromagnetic field. The oscillation of the probe (13) is transmitted to the probe sleeve (15) through the elastic mechanism. The probe sleeve (15) is hindered from vibrating by the Ampere force opposite to its moving direction under electromagnetic induction, realizing active vibration damping of the micro-nano probe.

2. The micro-nano probe for achieving high efficiency and high precision through active vibration damping according to claim 1, characterized in that: The optical measurement unit provided inside the measuring cylinder is composed of a laser, an optical mirror and a quadrant detector; For the probe unit (7), the two annular reed pressing plates are respectively a reed upper pressing plate (8a) and a reed lower pressing plate (8b). The reed upper pressing plate (8a) is fixedly connected to the lower cylinder cover (1b) of the measuring cylinder, so that the probe unit (7) is located below the measuring cylinder; the floating plate (14) is fixedly connected to the outer ring of the elastic mechanism (9) through a cantilever, forming a floating mechanism in the central hollow area between the two annular reed pressing plates; a measuring ball is fixedly installed at the end of the probe (13); the electromagnetic coil (10a) is fixed on the coil base (12) by a coil buckle (11), and the coil base (12) is fixedly installed with the reed lower pressing plate (8b), so that the probe sleeve (15) is in the electromagnetic field formed by the energized electromagnetic coil (10a); The active vibration damping method is set as: while the probe (13) is detecting, keep the electromagnetic coil (10a) in the energized state to form an electromagnetic field. For the process that the oscillation of the probe (13) gradually stabilizes when it contacts the object to be measured and after it separates from the object to be measured, the oscillation of the probe (13) is transmitted to the probe sleeve (15) through the elastic mechanism (9). The probe sleeve (15) in the electromagnetic field is hindered from vibrating by the Ampere force opposite to its moving direction under electromagnetic induction, realizing active vibration damping of the micro-nano probe.

3. The micro-nano probe for achieving high efficiency and high precision through active vibration damping according to claim 1, characterized in that: The reed upper pressing plate (8a), the elastic mechanism (9) and the reed lower pressing plate (8b) are fixedly connected together by screws; the coil buckle (11), the coil base (12) and the reed lower pressing plate (8b) are fixedly connected together by screws.

4. The micro-nano probe for achieving high efficiency and high precision through active vibration damping according to claim 1, characterized in that: The structure of the measurement unit is set as follows: inside the measurement cylinder, a laser fixed seat (2a), a two-dimensional adjustment seat (4a), and a four-quadrant detector fixed seat (3a) are respectively arranged on one side wall. The upper cylinder cover (1a) is fixedly connected to the top of the cylinder wall of the measurement cylinder. The laser (2b) is fixedly installed on the laser fixed seat (2a) by using the upper cover (2c) of the laser fixed seat; a plane mirror (5) is arranged on one side of the two-dimensional adjustment seat (4a) facing the laser (2b); the four-quadrant detector (3b) is fixedly installed on the four-quadrant detector fixed seat (3a) by using the four-quadrant detector fixed seat pressing plate (3c). The optical path structure of the measurement unit is: the collimated light emitted by the laser (6a) is projected onto the plane mirror (5) on the two-dimensional adjustment seat (4a), and after being reflected by the plane mirror (5), it is projected onto the central plane mirror (6) on the floating sheet (14), and after being reflected by it, it is projected onto the four-quadrant detector (3b) to achieve optical measurement.

5. The micro-nano probe for achieving high efficiency and high precision through active vibration damping according to claim 1, wherein: The two-dimensional adjustment seat (4) is set as an angle adjustment structure, and by adjusting the two-dimensional angle of the two-dimensional adjustment seat (4), part of the reflected light of the plane mirror (12) is projected onto the central position of the central plane mirror (11).

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