Film thickness measuring device of confocal, white light interference and microscope all-in-one machine

Abstract

The invention discloses a confocal, white light interference and microscope all-in-one machine film thickness measuring device, which comprises a mounting bottom plate, supporting legs are respectively arranged at four corners below the mounting bottom plate, an upper light shielding plate is arranged above the mounting bottom plate, a spectroscope is obliquely arranged in the upper light shielding plate, one end of the spectroscope is arranged on an L-shaped mounting rack, and the other end of the spectroscope is arranged on the mounting rack. A first connecting sleeve is arranged on one side of the upper shading box, the interior of the first connecting sleeve is connected with a first connecting rod through a first adjusting bolt, the upper portion of the first connecting rod is connected with a first semi-arc-shaped clamping plate, a second semi-arc-shaped clamping plate is arranged above the first semi-arc-shaped clamping plate, and a second semi-arc-shaped clamping plate is arranged above the second semi-arc-shaped clamping plate. A light source emitter is clamped between the first semi-arc-shaped clamping plate and the second semi-arc-shaped clamping plate, a first light transmitting hole is formed in the position, corresponding to the light source emitter, of the upper shading box, and a second light transmitting hole is formed in the top of the upper shading box. The device is convenient for measuring the film thickness.

Description

Technical Field

[0001] The present invention relates to the technical field of film thickness measurement devices, specifically a film thickness measurement device integrating confocal microscopy, white light interferometry, and microscopy. Background Art

[0002] Wafers are crucial for semiconductor devices, and film thickness is one of the important parameters affecting the physical properties of wafers. Usually, methods for measuring film thickness include ellipsometry, probe method, optical method, etc. Ellipsometry equipment is expensive, and the probe method will damage the wafer surface. Therefore, it is necessary to use the optical method for detection.

[0003] White light interferometry is a technique based on the wave nature of light. By measuring the phase difference of light waves when reflected or transmitted at different interfaces, it can obtain information about the surface topography of an object. When two or more coherent light waves meet at a certain point in space, if their phase difference is an integer multiple of 2π, light enhancement, i.e., the interference phenomenon, will occur at that point. A white light interferometer utilizes this principle. By allowing the multi-color light waves emitted by a white light source to interact with the light waves reflected or transmitted by the surface of the object to be measured, interference fringes are formed, thereby achieving high-precision measurement of the surface topography of the object.

[0004] In the thickness measurement of opaque products, white light interferometry indirectly calculates the thickness of the object by measuring the changes in the interference fringes formed after light is reflected on the surface and inside the object to be measured. Specifically, when light irradiates the surface of the object to be measured, part of the light is reflected back, and part of the light enters the object and is reflected at a certain interface and then returns to the surface again. These two reflected light waves interfere near the surface of the object, and the distribution and spacing of the interference fringes are directly related to the thickness of the object. By analyzing the changes in the interference fringes, the thickness of the object can be accurately calculated.

[0005] Compared with traditional thickness measurement methods, white light interferometry for thickness measurement has significant advantages. First, white light interferometry has extremely high measurement accuracy, which can reach nanometer or even sub-nanometer accuracy, and is suitable for occasions with extremely high accuracy requirements. Second, white light interferometry has a fast measurement speed and can achieve real-time online measurement, greatly improving production efficiency. In addition, white light interferometry also has the characteristic of non-contact measurement and will not damage the object to be measured, and is suitable for the measurement of various materials.

[0006] Currently, there is a lack of a method for measuring the film thickness of wafers by combining white light interferometry with confocal microscopy technology in the prior art. Therefore, in view of the above problems, a film thickness measurement device integrating confocal microscopy, white light interferometry, and microscopy is proposed. Summary of the Invention

[0007] The object of the present invention is to provide a film thickness measuring device for a confocal, white light interference and microscope integrated machine, including a mounting base plate. Support legs are respectively arranged at the four corners below the mounting base plate. An upper light shielding plate is arranged above the mounting base plate. A beam splitter is obliquely arranged inside the upper light shielding plate. One end of the beam splitter is arranged on an L-shaped mounting frame, and the other end of the beam splitter is arranged on an inverted L-shaped mounting frame. A connecting sleeve one is arranged on one side of the upper light shielding box. Inside the connecting sleeve one, a connecting rod one is connected through an adjusting bolt one. Above the connecting rod one, a semi-circular clamping plate one is connected. Above the semi-circular clamping plate one, a semi-circular clamping plate two is arranged. A light source emitter is clamped between the semi-circular clamping plate one and the semi-circular clamping plate two. A light transmission hole one is opened on the upper light shielding box at the corresponding position of the light source emitter. A light transmission hole two is opened at the top of the upper light shielding box. Mounting vertical plates are respectively arranged on both sides at the top of the upper light shielding box. A detector is arranged between the two mounting vertical plates. A stepped hole is opened at the center position inside the mounting base plate. An objective lens is arranged inside the stepped hole. A lower light shielding box is arranged at the bottom of the mounting base plate. Connecting vertical plates are respectively arranged on both sides inside the lower light shielding box. Below the inner side of the connecting vertical plate, a connecting sleeve two is arranged. Inside the connecting sleeve two, a connecting rod two is connected through an adjusting bolt two. The connecting rod two is connected with a clamping frame. A threaded rod is arranged through the top end inside the clamping frame. A clamping plate is arranged below the threaded rod. A rotating handle is arranged above the threaded rod.

[0008] Preferably, the L-shaped mounting frame is fixed on the upper light shielding box through a fastening bolt two, and the inverted L-shaped mounting frame is fixed on the upper light shielding box through a fastening bolt three.

[0009] Preferably, edge plates one are respectively arranged on both sides above the outside of the semi-circular clamping plate one, and edge plates two are respectively arranged on both sides below the outside of the semi-circular clamping plate two. The edge plates one and the edge plates two are connected through the cooperation of a fastening bolt one and a fastening nut.

[0010] Preferably, the right side of the front surface of the outside of the upper light shielding box is rotatably connected with one side of a box door one through a connecting hinge one, and a box door handle one is arranged on the right side of the front surface of the outside of the box door one.

[0011] Preferably, the right side of the front surface of the outside of the lower light shielding box is rotatably connected with one side of a box door two through a connecting hinge two, and a box door handle two is arranged on the right side of the front surface of the outside of the box door two.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0013] By setting the connecting sleeve one, the connecting rod one and the adjusting bolt one, when the adjusting bolt one is loosened, the length of the connecting rod one inside the connecting sleeve one is adjusted, and then the height of the light source emitter is adjusted.

[0014] In the present invention, by providing the semi-circular clamping plate I, semi-circular clamping plate II, edge plate I, edge plate II, fastening bolt I, and fastening nut, removing the fastening bolt I and the fastening nut, and separating the semi-circular clamping plate I and the semi-circular clamping plate II, it is possible to facilitate the clamping of light source emitters of different sizes.

[0015] The L-shaped mounting bracket of the present invention is fixed on the upper light-shielding box through the fastening bolt II, and the inverted L-shaped mounting bracket is fixed on the upper light-shielding box through the fastening bolt III. Removing the fastening bolt II and the fastening bolt III can facilitate the adjustment of the installation angle and position of the beam splitter.

[0016] In the present invention, by providing the connecting sleeve II, connecting rod II, adjusting bolt II, and clamping frame, loosening the adjusting bolt II and adjusting the length of the connecting rod II in the connecting sleeve II, and then the two clamping frames approach each other, thereby facilitating the clamping of the wafer to be measured. Brief Description of the Drawings

[0017] Figure 1 is the external structural schematic diagram of the present invention;

[0018] Figure 2 is the internal structural schematic diagram of the present invention.

[0019] The reference numerals and names in the drawings are as follows:

[0020] 1. Mounting base plate; 101. Step-shaped hole; 2. Support leg; 3. Upper light-shielding box; 301. Light-transmitting hole I; 302. Light-transmitting hole II; 4. Connecting hinge I; 5. Door I of the box; 501. Door handle I of the box; 6. Mounting vertical plate; 7. Detector; 8. Lower light-shielding box; 9. Door II of the box; 10. Connecting hinge II; 11. Door handle II of the box; 12. Connecting sleeve I; 13. Connecting rod I; 14. Adjusting bolt I; 15. Semi-circular clamping plate I; 16. Semi-circular clamping plate II; 17. Edge plate I; 18. Edge plate II; 19. Fastening bolt I; 20. Fastening nut; 21. L-shaped mounting bracket; 22. Fastening bolt II; 23. Inverted L-shaped mounting bracket; 24. Fastening bolt III; 25. Beam splitter; 26. Objective lens; 27. Connecting vertical plate; 28. Connecting sleeve II; 29. Connecting rod II; 30. Adjusting bolt II; 31. Clamping frame; 32. Light source emitter; 33. Threaded rod; 34. Clamping plate; 35. Rotating handle. Detailed Description of the Invention

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0022] As shown in the Figure 1 and 2 shown, the film thickness measuring device of the confocal, white light interference and microscope integrated machine provided by the present invention includes a mounting base plate 1. Above the mounting base plate 1, there is an upper light shielding plate 3. Inside the upper light shielding plate 3, a beam splitter 25 is inclined. One end of the beam splitter 25 is arranged on an L-shaped mounting bracket 21, and the other end of the beam splitter 25 is arranged on an inverted L-shaped mounting bracket 23. On one side of the upper light shielding box 3, there is a connecting sleeve 12. Inside the connecting sleeve 12, a connecting rod 13 is connected through an adjusting bolt 14. Above the connecting rod 13, a semi-circular clamping plate 15 is connected. Above the semi-circular clamping plate 15, there is a semi-circular clamping plate 16. A light source emitter 32 is clamped between the semi-circular clamping plate 15 and the semi-circular clamping plate 16. A light transmission hole 301 is opened on the upper light shielding box 3 at the corresponding position of the light source emitter 32. A light transmission hole 302 is opened at the top of the upper light shielding box 3. On both sides of the top of the upper light shielding box 3, there are respectively arranged mounting vertical plates 6. Between the two mounting vertical plates 6, there is a detector 7. At the center position inside the mounting base plate 1, a stepped hole 101 is opened. Inside the stepped hole 101, an objective lens 26 is arranged. At the bottom of the mounting base plate 1, there is a lower light shielding box 8. On both sides inside the lower light shielding box (8), there are respectively arranged connecting vertical plates 27. Below the inner side of the connecting vertical plate 27, there is a connecting sleeve 28. Inside the connecting sleeve 28, a connecting rod 29 is connected through an adjusting bolt 30. The connecting rod 29 is connected with a clamping frame 31. Inside the clamping frame 31, a threaded rod 33 is penetrated through the top end. Below the threaded rod 33, there is a clamping plate 34. Above the threaded rod 33, there is a rotating handle 35.

[0023] Specifically, support legs 2 are respectively arranged at the four corners below the mounting base plate 1.

[0024] Specifically, the L-shaped mounting bracket 21 is fixed on the upper light shielding box 3 through a fastening bolt 22, and the inverted L-shaped mounting bracket 23 is fixed on the upper light shielding box 3 through a fastening bolt 24.

[0025] Specifically, on both sides above the outside of the semi-circular clamping plate 15, there are respectively arranged edge plates 17. On both sides below the outside of the semi-circular clamping plate 16, there are respectively arranged edge plates 18. The edge plates 17 and the edge plates 18 are connected in cooperation through a fastening bolt 19 and a fastening nut 20.

[0026] Specifically, the right side of the front surface of the outside of the upper light shielding box 3 is rotatably connected with one side of a box door 5 through a connecting hinge 1. On the right side of the front surface of the outside of the box door 5, there is a box door handle 501.

[0027] Specifically, the right side of the front surface of the lower light-shielding box 8 is rotatably connected to one side of the second box door 9 through the second connecting hinge 10, and a second box door handle 11 is arranged on the right side of the front surface of the second box door 9.

[0028] Working principle: During use, remove the first fastening bolt 19 and the fastening nut 20, separate the first semi-circular clamping plate 15 and the second semi-circular clamping plate 16, clamp light source emitters 32 of different sizes, then loosen the first adjusting bolt 14, adjust the length of the first connecting rod 13 inside the first connecting sleeve 12, adjust the height of the light source emitter 32 so that the emission point of the light source generator 32 is aligned with the first light-transmitting hole 301, then pull the first box door handle 501 to open the first box door 5, remove the second fastening bolt 22 and the third fastening bolt 24, adjust the installation angle and position of the beam splitter 25, after adjustment, close the first box door 5, pull the second box door handle 11 to open the second box door 9, further loosen the second adjusting bolt 30, adjust the length of the second connecting rod 29 inside the second connecting sleeve 28, and then the two clamping frames 31 approach each other, rotate the rotating handle 35, the rotating handle 35 drives the threaded rod 33 to rotate, and then the clamping plate 34 moves downward to clamp the wafer to be measured. After installation, the film thickness is detected;

[0029] The light source emitter 32 emits white light. The white light enters through the first light-transmitting hole 301, is split by the beam splitter 25, and is focused on the surface of the wafer to be measured through the objective lens 26. The light of the wafer to be measured enters the detector 7 through the beam splitter 25 and the second light-transmitting hole 302 to detect the film thickness.

[0030] Using the technical solution of the present invention, or those skilled in the art inspired by the technical solution of the present invention to design a similar technical solution and achieving the above technical effects shall fall within the protection scope of the present invention.

Claims

1. A film thickness measuring device for a confocal, white light interference and microscope integrated machine, comprising a mounting base plate (1), characterized in that: Above the installation base plate (1), there is an upper light-shielding plate (3). Inside the upper light-shielding plate (3), a beam splitter (25) is inclined. One end of the beam splitter (25) is arranged on an L-shaped mounting bracket (21), and the other end of the beam splitter (25) is arranged on an inverted L-shaped mounting bracket (23). On one side of the upper light-shielding box (3), there is a connecting sleeve one (12). Inside the connecting sleeve one (12), it is connected to a connecting rod one (13) through an adjusting bolt one (14). Above the connecting rod one (13), it is connected to a semi-circular clamping plate one (15). Above the semi-circular clamping plate one (15), there is a semi-circular clamping plate two (16). A light source emitter (32) is clamped between the semi-circular clamping plate one (15) and the semi-circular clamping plate two (16). A light-transmitting hole one (301) is opened on the upper light-shielding box (3) at the corresponding position of the light source emitter (32). A light-transmitting hole two (302) is opened at the top of the upper light-shielding box (3). On both sides of the top of the upper light-shielding box (3), there are installation vertical plates (6) respectively. Between the two installation vertical plates (6), there is a detector (7). At the central position inside the installation base plate (1), there is a stepped hole (101). Inside the stepped hole (101), there is an objective lens (26). At the bottom of the installation base plate (1), there is a lower light-shielding box (8). On both sides inside the lower light-shielding box (8), there are connecting vertical plates (27) respectively. Below the inner side of the connecting vertical plate (27), there is a connecting sleeve two (28). Inside the connecting sleeve two (28), it is connected to a connecting rod two (29) through an adjusting bolt two (30). The connecting rod two (29) is connected to a clamping frame (31). Inside the clamping frame (31), a threaded rod (33) runs through the top end. Below the threaded rod (33), there is a clamping plate (34). Above the threaded rod (33), there is a rotating handle (35).

2. The film thickness measuring device of the confocal, white light interference and microscope integrated machine according to claim 1, characterized in that: At the four corners below the installation base plate (1), there are support legs (2) respectively.

3. The film thickness measuring device of the confocal, white light interference and microscope integrated machine according to claim 1, characterized in that: The L-shaped mounting bracket (21) is fixed on the upper light-shielding box (3) through a fastening bolt two (22), and the inverted L-shaped mounting bracket (23) is fixed on the upper light-shielding box (3) through a fastening bolt three (24).

4. The film thickness measuring device of the confocal, white light interference and microscope integrated machine according to claim 1, characterized in that: On both sides above the outside of the semi-circular clamping plate one (15), there are edge plates one (17) respectively. On both sides below the outside of the semi-circular clamping plate two (16), there are edge plates two (18) respectively. The edge plates one (17) and the edge plates two (18) are connected in cooperation through a fastening bolt one (19) and a fastening nut (20).

5. The film thickness measuring device of the confocal, white light interference and microscope integrated machine according to claim 1, characterized in that: On the right side of the front surface of the outside of the upper light-shielding box (3), it is rotatably connected to one side of a box door one (5) through a connecting hinge one (4). On the right side of the front surface of the outside of the box door one (5), there is a box door handle one (501).

6. The film thickness measuring device of the confocal, white light interference and microscope integrated machine according to claim 1, characterized in that: On the right side of the front surface of the outside of the lower light-shielding box (8), it is rotatably connected to one side of a box door two (9) through a connecting hinge two (10). On the right side of the front surface of the outside of the box door two (9), there is a box door handle two (11).

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