Strip-shaped reflector surface shape detection clamping strain unloading device and application method thereof

Abstract

The invention discloses a long-strip-shaped reflector surface shape detection clamping strain unloading device and an application method thereof.The device is characterized in that two oppositely-arranged detection positioning plates are arranged on the surface of a clamping tabletop, and a long-strip-shaped reflector installation position used for installing a detected long-strip-shaped reflector is formed between the two detection positioning plates; a plurality of ultralow friction coefficient supporting modules and a plurality of hole sites are arranged on the surface, located between the two detection positioning plates, of the clamping table top, and one or more pairs of strain unloading mechanisms are symmetrically arranged in the hole sites; the strain unloading mechanism is used for repeatedly lifting the long-strip-shaped reflecting mirror so as to gradually weaken clamping strain generated in the long axis direction in the process of clamping the tested long-strip-shaped reflecting mirror in combination with low-friction supporting release stress of the ultralow-friction-coefficient supporting module. The invention aims to realize unloading of strain caused by clamping stress in the surface shape measurement of the ultra-high-precision long-strip-shaped reflecting mirror, reduce the strain of the mirror surface during multiple times of clamping, reduce the influence of clamping deformation and improve the reproducibility of detection.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical engineering, and particularly relates to a clamping strain unloading device for detecting the surface shape of a long strip-shaped reflecting mirror and an application method thereof. Background Art

[0002] Ultra-high-precision long strip-shaped reflecting mirrors represented by X-ray reflecting mirrors require that the root mean square value of the surface shape accuracy is usually sub-nanometer. The length of the mirror in the meridional direction can reach several hundred millimeters or even 1 meter, and the length in the sagittal direction is only about 50 millimeters. To achieve sub-nanometer precision surface shape detection, an interference measurement method needs to be used, and the surface to be measured needs to be installed on a mounting fixture during measurement. However, due to the low stiffness caused by the large ratio of the length / width and length / height of the long strip mirror, the mechanical stress during the manual installation of the mirror surface during the installation process causes the mirror surface to deform in the range of sub-nanometer to nanometer, thereby affecting the reproducibility of detection during multiple different clamps and making it difficult to meet the measurement accuracy requirements. Summary of the Invention

[0003] The technical problem to be solved by the present invention: Aiming at the above problems of the prior art, a clamping strain unloading device for detecting the surface shape of a long strip-shaped reflecting mirror and an application method thereof are provided. The present invention aims to unload the strain caused by the clamping stress in the surface shape measurement of ultra-high-precision long strip-shaped reflecting mirrors, reduce the strain of the mirror surface during multiple clamps, reduce the influence of clamping deformation, and improve the reproducibility of detection.

[0004] To solve the above technical problems, the technical solution adopted by the present invention is as follows: A clamping strain unloading device for detecting the surface shape of a long strip-shaped reflecting mirror, including a clamping tabletop. On the surface of the clamping tabletop, there are two relatively arranged detection positioning plates. A long strip-shaped reflecting mirror installation position for installing the long strip-shaped reflecting mirror to be measured is formed between the two detection positioning plates. On the surface of the clamping tabletop between the two detection positioning plates, there are a plurality of ultra-low friction coefficient support modules and a plurality of holes. A pair or more pairs of symmetrically arranged strain unloading mechanisms are installed in the holes. The strain unloading mechanism is used to repeatedly lift the long strip-shaped reflecting mirror to gradually weaken the clamping strain generated along the long axis direction during the process of clamping the long strip-shaped reflecting mirror to be measured by combining the low friction support of the ultra-low friction coefficient support module to release stress.

[0005] Optionally, the support blocks arranged on the surface of the ultra-low friction coefficient support module are polished cylindrical lenses, polished spherical lenses, ultra-precision spherical balls or ultra-precision rollers.

[0006] Optionally, the ultra-low friction coefficient support module is arranged at the position of the Bessel point of the long strip-shaped reflecting mirror to be measured.

[0007] Optionally, the detection positioning plate includes a side plate and a rear plate arranged perpendicular to each other for positioning the long strip-shaped reflecting mirror to be measured.

[0008] Optionally, micrometers are provided at the central positions of the side plates and the rear plate of the detection and positioning plate on at least one side, and the measuring heads of the micrometers are arranged towards the side of the long strip mirror mounting position to adjust the protruding length of the measuring heads to adapt to long strip mirrors to be measured with different specifications.

[0009] Optionally, the strain unloading mechanism is an electric lifting mechanism.

[0010] Optionally, a bottom plate arranged parallel to the clamping tabletop is provided on the back of the clamping tabletop. One side of the bottom plate is fixedly connected to the clamping tabletop through a weight-reducing support plate, and the other side is fixedly connected to the clamping tabletop through an unloading mechanism fixing plate.

[0011] Optionally, the strain unloading mechanism is installed and fixed on the unloading mechanism fixing plate and is located in the space formed by enclosing the clamping tabletop, the bottom plate, the weight-reducing support plate and the unloading mechanism fixing plate.

[0012] Optionally, three adjusting support balls with V-shaped seats arranged in a triangle are provided at the bottom of the bottom plate. The adjusting support balls are threadedly connected to the bottom plate to adjust the pitch and yaw of the clamping tabletop by rotating the threads to adjust the interference fringes of the laser interferometer.

[0013] In addition, the present invention also provides an application method of the above-mentioned long strip mirror surface shape detection clamping strain unloading device, including the following steps: S101, assembling and fixing the clamping tabletop, the weight-reducing support plate and the unloading mechanism fixing plate, and installing and fixing the strain unloading mechanism on the unloading mechanism fixing plate; S102, installing and fixing the long strip mirror to be measured between two detection and positioning plates; S103, controlling a pair or multiple pairs of symmetrically arranged strain unloading mechanisms to lift and lower synchronously, repeatedly lifting the long strip mirror to gradually weaken the clamping strain generated in the process of clamping the long strip mirror along the long axis direction by combining the low-friction support of the ultra-low friction coefficient support module to release stress; S104, connecting and fixing the bottom plate to the weight-reducing support plate and the unloading mechanism fixing plate respectively by bolts to complete the assembly and fixing of the long strip mirror surface shape detection clamping strain unloading device; S105, using a laser interferometer to detect the long strip mirror to be measured, and adjusting the interference fringes of the laser interferometer to meet the measurement requirements by adjusting the threaded connection stroke between the adjusting support ball and the bottom plate to adjust the pitch and yaw of the clamping tabletop by rotating the threads.

[0014] Compared with the prior art, the present invention mainly has the following advantages: The clamping strain unloading device for the long-strip reflecting mirror surface shape detection of the present invention can unload the strain caused by the clamping stress in the ultra-high-precision long-strip reflecting mirror surface shape measurement, reduce the strain of the mirror surface during multiple clamps, reduce the influence of the clamping deformation, and improve the reproducibility of the detection. The present invention can repeatedly lift the reflecting mirror through the strain unloading mechanism and release the stress by combining the low-friction support of the ultra-low friction coefficient support module, so as to gradually weaken the clamping strain generated along the long axis direction during the process of clamping the long-strip mirror to be measured. Applied to the ultra-high-precision long-strip reflecting mirror surface shape detection, it can unload the strain caused by the clamping stress in the ultra-high-precision long-strip reflecting mirror surface shape measurement, reduce the strain of the mirror surface during multiple clamps, reduce the influence of the clamping deformation, and ensure the reproducibility and measurement accuracy of the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic three-dimensional structure diagram of the upper side direction of the device in the embodiment of the present invention.

[0016] Figure 2 It is a schematic three-dimensional structure diagram of the lower side direction of the device in the embodiment of the present invention.

[0017] Figure 3 It is the data curve of the device in the embodiment of the present invention before stress release.

[0018] Figure 4 It is the data curve of the device in the embodiment of the present invention after stress release.

[0019] Legend: 101, clamping table; 102, detection positioning plate; 103, ultra-low friction coefficient support module; 104, micrometer; 201, weight reduction support plate; 202, fixing plate of unloading mechanism; 203, strain unloading mechanism; 301, bottom plate; 302, adjusting support ball; 303, V-shaped seat. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0021] As Figure 1As shown in the figure, the clamping strain unloading device for the long-strip reflective mirror surface shape detection in this embodiment includes a clamping tabletop 101. On the surface of the clamping tabletop 101, there are two detection positioning plates 102 arranged oppositely. A long-strip reflective mirror installation position for installing the long-strip reflective mirror to be measured is formed between the two detection positioning plates 102. On the surface of the clamping tabletop 101 between the two detection positioning plates 102, there are multiple ultra-low friction coefficient support modules 103 and multiple holes. In the holes, a pair or multiple pairs of strain unloading mechanisms 203 are symmetrically arranged. The strain unloading mechanism 203 is used to repeatedly lift the long-strip reflective mirror to gradually weaken the clamping strain generated in the process of clamping the long-strip reflective mirror to be measured along the long axis direction by combining the low-friction support of the ultra-low friction coefficient support module 103 to release stress. In this embodiment, there are a total of three ultra-low friction coefficient support modules 103, and the ultra-low friction coefficient support modules 103 are symmetrically arranged on the clamping tabletop 101. The top surface of the ultra-low friction coefficient support module 103 can be used to place supports of different specifications for experimental research, including but not limited to polished cylindrical lenses, polished spherical lenses, ultra-precision spherical balls, ultra-precision rollers, etc.

[0022] In this embodiment, the ultra-low friction coefficient support module 103 is arranged at the position of the Bessel point of the long-strip reflective mirror to be measured. The top surface of the ultra-low friction coefficient support module 103 can be used to place support points of different specifications for experimental research. The Bessel point is the position where the distance between two support points is 0.55938L, that is, the position 0.22031L from each end face. This kind of support minimizes the change in the size of the neutral plane of the object after being affected by gravity deformation. For example, when the linear scale is supported at the Bessel point, the change in the length due to the self-weight of the scale on the neutral plane of the scale is the smallest.

[0023] As Figure 1 shown in the figure, in this embodiment, the detection positioning plate 102 includes a side plate and a rear plate arranged perpendicular to each other for positioning the long-strip reflective mirror to be measured. The side plate and the rear plate are respectively arranged on the left / right side and the rear side of the long-strip reflective mirror to be measured.

[0024] As Figure 1 shown in the figure, in this embodiment, micrometers 104 are provided at the central positions of the side plate and the rear plate of at least one side of the detection positioning plate 102, and the measuring heads of the micrometers 104 are all arranged towards the long-strip reflective mirror installation position side to adjust the protruding length of the measuring heads to adapt to long-strip reflective mirrors of different specifications.

[0025] In this embodiment, the strain unloading mechanism 203 is an electric lifting mechanism.

[0026] As Figure 2As shown in the figure, in this embodiment, a bottom plate 301 parallel to the clamping table surface 101 is provided on the back of the clamping table surface 101. One side of the bottom plate 301 is fixedly connected to the clamping table surface 101 through a weight-reducing support plate 201, and the other side is fixedly connected to the clamping table surface 101 through an unloading mechanism fixing plate 202. In this embodiment, there are two unloading mechanism fixing plates 202 in total, and they are arranged in parallel under the clamping table surface 101. The two ends of the unloading mechanism fixing plate 202 are flush with the two ends of the clamping table surface 101. The strain unloading mechanism 203 is fixed on the unloading mechanism fixing plate 202 and passes through the strain unloading mechanism 203 through hole on the clamping table surface 101 in the extended state. The two weight-reducing support plates 201 are arranged on both sides of the unloading mechanism fixing plate 202 and their two ends are flush with it.

[0027] In this embodiment, the strain unloading mechanism 203 is installed and fixed on the unloading mechanism fixing plate 202 and is located in the space formed by enclosing the clamping table surface 101, the bottom plate 301, the weight-reducing support plate 201 and the unloading mechanism fixing plate 202. The bottom plate 301 is provided with bolt connection holes and is connected to the unloading mechanism fixing plate 202 and the weight-reducing support plate 201 through bolts.

[0028] As Figure 2 shown in the figure, in this embodiment, three adjusting support balls 302 with V-shaped seats 303 arranged in a triangular shape are provided at the bottom of the bottom plate 301. The adjusting support balls 302 are threadedly connected to the bottom plate 301 to adjust the pitch and yaw of the clamping table surface 101 by rotating the thread to adjust the interference fringes of the laser interferometer. The adjusting support balls 302 support the whole device through round head bolts and are connected to the bottom 301 plate through threads.

[0029] The long strip-shaped reflection mirror surface shape detection clamping strain unloading device of this embodiment can release the mirror surface deformation in the range of sub-nanometer to nanometer caused by installation mechanical stress during the artificial installation of the mirror surface through unloading during the ultra-high-precision long strip-shaped reflection mirror surface shape detection process, improving the detection reproducibility and measurement accuracy. Applied to detection, the long strip-shaped reflection mirror surface shape detection clamping strain unloading device of this embodiment improves the reproducibility and detection accuracy of ultra-high-precision long strip-shaped mirror measurement; the table surface of the present invention is provided with ultra-low friction coefficient support modules 103, detection positioning plates 104, and holes for the strain unloading mechanism 203 to extend that adapt to different lengths to achieve support for mirrors of different lengths, clamping stress unloading and strain release. The bottom mounting bolts of the long strip-shaped reflection mirror surface shape detection clamping strain unloading device of this embodiment can also ensure the adjustment requirements for measurement while ensuring the stability of the device, and adjust the fringes of the mirror to adapt to high-precision measurement.

[0030] In addition, this embodiment also provides an application method of the foregoing long strip-shaped reflection mirror surface shape detection clamping strain unloading device, including the following steps: S101, Assemble and fix the clamping table 101, the weight reduction support plate 201, and the unloading mechanism fixing plate 202 together, and install and fix the strain unloading mechanism 203 on the unloading mechanism fixing plate 202; S102, Install and fix the measured long strip mirror between the two detection and positioning plates 102; S103, Control a pair or multiple pairs of symmetrically arranged strain unloading mechanisms 203 to lift and lower synchronously, repeatedly lift the long strip mirror to combine the low friction support of the ultra-low friction coefficient support module 103 to release stress, and gradually weaken the clamping strain generated along the long axis direction during the process of clamping the measured long strip mirror; As an optional implementation manner, in this embodiment, the strain unloading mechanism 203 is started and controlled through the PLC on the computer side, and the heads of the two symmetric strain unloading mechanisms 203 are controlled to Figure 1 simultaneously lift the height from the holes on the middle clamping table surface, repeatedly lift and lower the long strip mirror, unload the mechanical stress caused during the manual clamping of the mirror surface and the contact friction force generated when the mirror surface is installed on the bottom surface of the fixture, so as to release the strain generated by the mirror; S104, Connect and fix the bottom plate 301 to the weight reduction support plate 201 and the unloading mechanism fixing plate 202 respectively through bolts to complete the assembly and fixation of the long strip mirror surface shape detection clamping strain unloading device; S105, Use a laser interferometer to detect the measured long strip mirror, and adjust the thread connection travel between the adjusting support ball 302 and the bottom plate 301 to adjust the pitch and yaw of the clamping table surface 101 by rotating the thread to adjust the interference fringes of the laser interferometer to meet the measurement requirements.

[0031] In this embodiment, the data before and after stress release using the device of this embodiment is compared through experiments, Figure 3 is the deformation data curve before stress release using the device of this embodiment, Figure 4 is the deformation data curve after stress release using the device of this embodiment, where the x-axis is the distance and the y-axis is the height. Comparing Figure 3 and Figure 4 it can be seen that the deformation becomes smaller and the reproducibility is improved after stress release using the device of this embodiment. It can be seen that using the device of this embodiment for stress release can achieve the unloading of the strain caused by clamping stress in the ultra-high precision long strip mirror surface shape measurement, reduce the strain of the mirror surface during multiple clampings, reduce the influence of clamping deformation, and ensure the reproducibility and measurement accuracy of the measurement.

[0032] The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions falling within the concept of the present invention belong to the protection scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements should also be regarded as within the protection scope of the present invention.

Claims

1. A clamping strain unloading device for detecting the shape of a long strip-shaped reflecting mirror, characterized in that, It includes a clamping tabletop (101). On the surface of the clamping tabletop (101), there are two detection and positioning plates (102) arranged oppositely. Between the two detection and positioning plates (102), a long-strip mirror mounting position for mounting the measured long-strip mirror is formed. On the surface of the clamping tabletop (101) between the two detection and positioning plates (102), there are multiple ultra-low friction coefficient support modules (103) and multiple hole positions. In the hole positions, a pair or multiple pairs of symmetrically arranged strain unloading mechanisms (203) are installed. The strain unloading mechanisms (203) are used to repeatedly lift the long-strip mirror to gradually weaken the clamping strain generated in the long-axis direction during the process of clamping the measured long-strip mirror by combining the low-friction support of the ultra-low friction coefficient support modules (103) to release stress.

2. The clamping strain unloading device for detecting the shape of a long strip-shaped reflecting mirror according to claim 1, characterized in that, The support blocks arranged on the surface of the ultra-low friction coefficient support module (103) are polished cylindrical lenses, polished spherical lenses, ultra-precision spherical balls or ultra-precision rollers.

3. The clamping strain unloading device for detecting the shape of the long strip-shaped reflecting mirror according to claim 2, characterized in that, The ultra-low friction coefficient support module (103) is arranged at the position of the Bessel point of the measured long-strip mirror.

4. The elongated reflection mirror surface shape detection clamping strain unloading device according to claim 3, characterized in that, The detection and positioning plate (102) includes a side plate and a rear plate arranged perpendicular to each other for positioning the measured long-strip mirror.

5. The elongated reflective mirror surface shape detection clamping strain unloading device according to claim 4, characterized in that, On the central positions of the side plate and the rear plate of at least one side of the detection and positioning plate (102), micrometers (104) are provided, and the measuring heads of the micrometers (104) are all arranged towards the side of the long-strip mirror mounting position to adjust the protruding length of the measuring heads to adapt to measured long-strip mirrors of different specifications.

6. The elongated reflective mirror surface shape detection clamping strain unloading device according to claim 5, characterized in that The strain unloading mechanism (203) is an electric lifting mechanism.

7. The elongated reflective mirror surface shape detection clamping strain unloading device according to claim 6, wherein On the back of the clamping tabletop (101), there is a bottom plate (301) arranged parallel to the clamping tabletop (101). One side of the bottom plate (301) is fixedly connected to the clamping tabletop (101) through a weight-reducing support plate (201), and the other side is fixedly connected to the clamping tabletop (101) through an unloading mechanism fixing plate (202).

8. The elongated reflective mirror surface shape detection clamping strain unloading device according to claim 7, characterized in that, The strain unloading mechanism (203) is installed and fixed on the unloading mechanism fixing plate (202) and is located in the space formed by enclosing the clamping tabletop (101), the bottom plate (301), the weight-reducing support plate (201) and the unloading mechanism fixing plate (202).

9. The clamping strain unloading device for detecting the shape of a long strip-shaped reflecting mirror according to claim 8, wherein, At the bottom of the bottom plate (301), there are three adjusting support balls (302) with V-shaped seats (303) arranged in a triangular shape. The adjusting support balls (302) are threadedly connected to the bottom plate (301) to adjust the pitch and yaw of the clamping tabletop (101) by rotating the threads to adjust the interference fringes of the laser interferometer.

10. An application method of the clamping strain unloading device for the long-strip reflective mirror surface shape detection described in claim 9, characterized in that, It includes the following steps: S101, assemble and fix the clamping tabletop (101), the weight-reducing support plate (201) and the unloading mechanism fixing plate (202), and install and fix the strain unloading mechanism (203) on the unloading mechanism fixing plate (202); S102, install and fix the measured long-strip mirror between the two detection and positioning plates (102); S103. Control the synchronous lifting of a pair or more pairs of symmetrically arranged strain unloading mechanisms (203), repeatedly lift the long strip mirror to gradually weaken the clamping strain generated along the long axis during the process of clamping the measured long strip mirror by combining the low friction support of the ultra-low friction coefficient support module (103) to release stress; S104. Connect and fix the bottom plate (301) to the weight reduction support plate (201) and the unloading mechanism fixing plate (202) respectively by bolts to complete the assembly and fixation of the clamping strain unloading device for the long strip mirror surface shape detection; S105. Use a laser interferometer to detect the measured long strip mirror, and adjust the interference fringes of the laser interferometer to meet the measurement requirements by adjusting the thread connection travel between the adjusting support ball (302) and the bottom plate (301) to adjust the pitch and yaw of the clamping table surface (101) by rotating the thread.

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