A phosphorus trifluoride sample analysis sampling system

Abstract

The present invention discloses a phosphorus trifluoride sample analysis sampling system, comprising: a sample feed tube connected to a storage cylinder, with a feed valve installed at the discharge end; a nitrogen displacement tube connected in parallel to the discharge end of the feed valve; a fixed tube, one end of which is connected to the discharge end of the feed valve and the other end of which is downwardly connected to a sample discharge tube; a filter, comprising a first sealed bearing and a second sealed bearing fixed with a fixed ring plate, a baffle sealed and fixed on the fixed ring plate of the first sealed bearing, and corresponding filter plates fixed in a zigzag shape between the fixed ring plates; a dust removal mechanism, comprising a dust removal notch arranged on the bottom side of the outer ring of the first sealed bearing, a dust removal tube connected downwardly to the bottom of the fixed tube, and a spiral dust removal plate fixed to the outer end of the filter plate; and a driving mechanism for driving the baffle to rotate. The present invention can safely and conveniently sample phosphorus trifluoride and send the sample to a corresponding detection instrument for analysis, and can effectively ensure the accuracy of sampling and analysis.

Description

Technical Field

[0001] The present invention relates to the field of phosphorus trifluoride sample detection, in particular to a phosphorus trifluoride sample analysis and sampling system. Background Art

[0002] Phosphorus trifluoride can be used as a fluorinating agent, capable of ion transfer, and has applications in the electronics industry, battery manufacturing, polymer materials, and catalysts. In semiconductor manufacturing, phosphorus trifluoride, transformed into a plasma gas under microwave conditions and doped into semiconductors, can significantly improve semiconductor performance. The semiconductor industry is highly sensitive to product purity and impurity content, requiring precise quantification of impurity concentrations. Therefore, precise quantitative analysis of impurity components in phosphorus trifluoride using gas chromatography and Fourier transform infrared spectrometry is essential.

[0003] Because phosphorus trifluoride is a toxic and corrosive gas under normal conditions, it is difficult to analyze and sample it. Existing conventional sampling and analysis methods and analytical instruments cannot be directly applied. Moreover, when sampling and analyzing phosphorus trifluoride samples, existing conventional sampling and analysis methods and analytical instruments are not only prone to cross-contamination between materials from different batches, but also unable to fully and accurately filter particles in the sample gas and nitrogen, resulting in sampling and analysis accuracy that is difficult to meet design requirements.

[0004] Therefore, the research purpose of the present invention is to design a phosphorus trifluoride sample analysis sampling system that can safely and conveniently sample phosphorus trifluoride and send the sample to the feed end of the corresponding detection instrument for analysis; and can prevent cross contamination of materials from different batches during the sampling process, and can also effectively and accurately filter particles in the sample gas and nitrogen, thereby effectively ensuring the accuracy of sampling analysis. Summary of the Invention

[0005] In view of the technical problems existing in the above-mentioned prior art, the present invention provides a phosphorus trifluoride sample analysis and sampling system, which can effectively solve the technical problems existing in the above-mentioned prior art.

[0006] The technical solution of the present invention is:

[0007] A phosphorus trifluoride sample analysis and sampling system, comprising:

[0008] The feeding end of the sample feeding tube is connected to the corresponding storage cylinder, and the corresponding feeding valve is fixedly installed on the discharging end;

[0009] A nitrogen displacement pipe, the feed end of which is connected to an external nitrogen source, and the discharge end of which is connected in parallel to the discharge end of the feed valve through a corresponding nitrogen displacement valve;

[0010] A fixed tube is arranged horizontally and closed at both ends, wherein the upper portion of one end of the fixed tube is connected to the discharge end of the feed valve, and the other end of the fixed tube is downwardly connected to a sample discharge tube fixedly installed with a pressure regulating valve and a discharge valve;

[0011] The filter comprises a first sealed bearing fixedly connected to a fixed tube outside the discharge end of the feed valve, and a second sealed bearing fixedly connected to a fixed tube inside the sample discharge tube, wherein the inner rings of the first sealed bearing and the second sealed bearing are respectively fixedly connected to corresponding fixed ring plates, the fixed ring plates mounted on the first sealed bearing are sealed and fixedly connected to corresponding baffles, and the fixed ring plates mounted on the first sealed bearing and the second sealed bearing are fixedly connected in a zigzag pattern to corresponding filter plates;

[0012] The dust removal mechanism comprises a dust removal notch provided on the bottom side of the outer ring of the first sealed bearing, a dust removal pipe equipped with a dust removal valve is downwardly connected to the bottom of the fixed pipe outside the dust removal notch, and a corresponding spiral dust removal plate is fixedly connected to the outer end of the filter plate;

[0013] The driving mechanism is used to drive the baffle to rotate, thereby driving the filter to rotate, so that the spiral dust removal plate rotates to output the filtered particulate matter through the dust removal gap and discharge it outward through the dust removal pipe.

[0014] A pressure gauge is installed on the pressure regulating valve, and an exhaust pipe equipped with an exhaust valve and a vacuum pipe equipped with a vacuum valve are connected in parallel to the sample discharge pipe between the pressure regulating valve and the discharge valve. The exhaust pipe is connected to an external exhaust gas treatment system, and the vacuum pipe is connected to an external vacuum pump.

[0015] The driving mechanism includes a driving impeller fixedly connected to the center of the baffle, and a high-pressure nitrogen outlet pipe connected to the upper side of the driving impeller, the air inlet end of the high-pressure nitrogen outlet pipe is connected to an external nitrogen source through a first booster pump, and the air outlet end of the high-pressure nitrogen outlet pipe faces the driving impeller.

[0016] A recoil pipe connected to the nitrogen replacement pipe is sealed and penetrated on the fixed pipe, a corresponding recoil valve is fixedly installed on the recoil pipe, the recoil pipe is arranged on the outer side of the fixed ring plate to which the baffle is not fixed, and the part of the recoil pipe located inside the fixed pipe is arranged horizontally and is provided with corresponding first recoil air outlets at intervals downward.

[0017] Alternatively, the driving mechanism includes a driving air intake pipe that is sealed and connected to the outside of a fixed ring plate to which the baffle is not fixed. The driving air intake pipe is connected to an external nitrogen source through a second boost pump. The portion of the driving air intake pipe located in the fixed pipe is transversely arranged at the axis of the fixed pipe, and corresponding second recoil air outlets are arranged downward at intervals. A corresponding driving pipe is sealed and fixed at the center of the baffle. One end of the driving pipe is rotatably sleeved on the driving air intake pipe through a sealed bearing. The other end of the driving pipe is closed and vertically connected to a plurality of arc-shaped jet reverse thrust pipes at intervals outward, and the air outlet ends of the jet reverse thrust pipes are respectively arranged in a constricted shape.

[0018] The fixed ring plate is staggered with corresponding V-shaped metal frames, the filter plates are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames, and the spiral dust removal plates are fixed to the V-shaped metal frames.

[0019] The filter pores of the filter plate are no more than 0.3 μm.

[0020] A corresponding high-pressure resistant one-way valve is also fixedly installed on the nitrogen replacement pipe.

[0021] The discharge end of the sample discharge pipe is connected in parallel to a group of discharge branch pipes equipped with a distribution valve; the group of discharge branch pipes is respectively connected to the feed end of the gas chromatograph and the Fourier transform infrared spectrometer.

[0022] A curved cover is fixedly connected to the fixed tube for covering the dust removal tube, and the inner end of the curved cover is spaced apart from the first sealing bearing to form an air flow channel; a corresponding siphon tube is connected in parallel to the dust removal tube, and the end of the siphon tube that is not connected to the dust removal tube is connected to the fixed tube on the lower side of the dust removal notch.

[0023] Advantages of the present invention:

[0024] 1) The analysis sampling system of the present invention is additionally provided with a fixed tube, which is arranged horizontally and closed at both ends. The upper part of one end of the fixed tube is connected to the discharge end of the feed valve, and the lower part of the other end is downwardly connected to the sample discharge pipe. Then, a filter is added inside the fixed tube, which includes a first sealed bearing fixed to the outside of the discharge end of the feed valve, and a second sealed bearing fixed to the inside of the sample discharge pipe. The inner rings of the first and second sealed bearings are respectively fixed with corresponding fixed ring plates. The fixed ring plates installed on the first sealed bearing are sealed and fixed with corresponding baffles, and the fixed ring plates installed on the first and second sealed bearings are serrated and fixed with corresponding filter plates. The sample gas and the replacement nitrogen in the analysis sampling process are filtered through the filter plates and then the samples are output or emptied, thereby effectively filtering the sample gas and the particles in the nitrogen to effectively ensure the accuracy of the sampling analysis.

[0025] 2) To ensure the overall airtightness of the entire analysis and sampling system, it is not advisable to frequently disassemble and assemble the components of the analysis and sampling system. However, if the filtered particulate matter is not discharged in time, it will not only affect the normal analysis and sampling operation of the analysis and sampling system, but also aggravate the pollution of the sample gas. In order to balance this problem, the present invention first provides a corresponding dust removal notch on the bottom side of the outer ring of the first sealed bearing, and then a dust removal pipe is fixedly connected to the bottom of the fixed pipe outside the dust removal notch. A dust removal valve is installed on the dust removal pipe. Most importantly, it also includes a spiral dust removal plate provided at the outer end of the filter plate. Therefore, after the nitrogen replacement is completed, the baffle can be directly driven to rotate by the driving mechanism, thereby driving the filter to rotate, causing the spiral dust removal plate to rotate to transfer the filtered dust through the dust removal notch for discharge. Therefore, without affecting the overall airtightness of the entire analysis and sampling system, the filtered particulate matter can be effectively and regularly discharged to ensure that the filter of the present invention can be used smoothly, so as to assist in ensuring the sampling and analysis accuracy of the present invention.

[0026] 3) The sample discharge pipe between the pressure regulating valve and the discharge valve of the present invention is connected in parallel with an exhaust pipe equipped with an exhaust valve and a vacuum pipe equipped with a vacuum valve. The exhaust pipe is connected to the external exhaust gas treatment system, and the vacuum pipe is connected to the external vacuum pump. During the sample analysis and sampling process, first, open the feed valve, pressure regulating valve and exhaust valve. When the pressure gauge of the pressure regulating valve is 0, close the exhaust valve; open the vacuum valve and vacuum to -0.1 MPa, then the vacuum is completed and the vacuum valve is closed; after closing the exhaust valve, open the nitrogen replacement valve until the pressure gauge of the pressure regulating valve is 0.1 MPa, and perform nitrogen purge replacement; repeat the above-mentioned emptying and vacuuming three times to effectively remove the air and water introduced by the disassembly and assembly of the storage cylinder; then, open the storage cylinder to introduce the sample gas into the analysis system, and after repeatedly emptying and vacuuming three times, open the discharge valve to allow the sample to enter the corresponding detection instrument for analysis. Phosphorus trifluoride can be sampled safely and conveniently, and sent to the feed end of the corresponding detection instrument for analysis. In addition, cross contamination of materials from different batches can be prevented during the sampling process, thereby effectively further ensuring the accuracy of sampling and analysis.

[0027] 4) The driving mechanism of the present invention includes a driving impeller fixed to the center of the baffle, and a high-pressure nitrogen outlet pipe connected to the upper side of the driving impeller. The air inlet end of the high-pressure nitrogen outlet pipe is connected to the external nitrogen source through a first booster pump, and the air outlet end of the high-pressure nitrogen outlet pipe faces the driving impeller. A recoil pipe connected to the nitrogen replacement pipe through a recoil valve is sealed and connected to the fixed pipe. The recoil pipe is arranged on the outer side of the fixed ring plate to which the baffle is not fixed, and the part of the recoil pipe located inside the fixed pipe is arranged horizontally, and corresponding recoil outlets are arranged downward at intervals. After nitrogen purge replacement is complete, the feed valve and pressure regulating valve are closed, and the first booster pump is started to introduce high-pressure nitrogen to impact the driving impeller, causing the driving impeller to rotate and drive the baffle to rotate. At the same time, the backflush valve is opened, and nitrogen is blown downward through the first backflush outlet of the backflush pipe to remove dust particles attached to the filter plate. During this process, the dust removal valve is opened, and the spiral dust removal plate rotates with the rotation of the baffle, transferring the filtered dust through the dust removal gap for external discharge. This ensures that the filtered particulate matter is fully and effectively removed without affecting the overall airtightness of the entire analysis and sampling system.

[0028] 5) The drive mechanism of the present invention includes a drive air intake pipe that is sealed and connected to the outside of a fixed ring plate to which a baffle is not fixed. The drive air intake pipe is connected to an external nitrogen source through a second boost pump. The portion of the drive air intake pipe located within the fixed pipe is transversely arranged at the axis of the fixed pipe and is provided with corresponding recoil holes at intervals downward. A corresponding drive pipe is sealed and fixed at the center of the baffle. One end of the drive pipe is rotatably sleeved onto the drive air intake pipe through a sealed bearing. The other end of the drive pipe is sealed and vertically connected to a plurality of arc-shaped jet reverse thrust pipes at intervals outward. The outlet ends of the jet reverse thrust pipes are respectively configured in a constricted shape. After nitrogen purge replacement is complete, the feed valve and pressure regulating valve are closed, and the second booster pump is activated to introduce high-pressure nitrogen. A portion of the high-pressure gas is discharged downward through the second backwash outlet to backwash the filter plate, thereby removing dust particles attached to the filter plate. A portion of the high-pressure gas is ejected longitudinally and obliquely through the arc-shaped jet reverse thrust pipe. Driven by the reaction force generated by the jet, the drive pipe rotates, thereby driving the baffle and filter as a whole to rotate. During this process, the dust removal valve is opened, and the spiral dust removal plate rotates with the rotation of the baffle, transferring the filtered dust through the dust removal gap for external discharge. This ensures that the filtered particulate matter is fully and effectively removed without affecting the overall airtightness of the entire analysis and sampling system.

[0029] 6) The fixed ring plate of this invention is staggered with corresponding V-shaped metal frames. The filter plates are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames. The spiral dust removal plate is fixed to the V-shaped metal frames. The V-shaped metal frames provide sufficient support for the filter plates and form a fixed connection with the spiral dust removal plate, thereby ensuring the overall rigidity of the filter and the structural stability of the filter under continuous negative pressure.

[0030] 7) A curved cover is fixedly connected to the fixed tube of the present invention for covering the dust removal tube. The inner end of the curved cover is spaced apart from the first sealing bearing to form an air flow channel. A corresponding siphon tube is connected in parallel to the dust removal tube. The end of the siphon tube that is not connected to the dust removal tube is connected to the fixed tube on the lower side of the dust removal notch.

[0031] This is because: the high-pressure nitrogen outlet pipe or the jet reverse thrust pipe will cause high-pressure airflow to be generated in the fixed pipe outside the baffle during the process of spraying nitrogen, which will cause the particulate matter to roll in the fixed pipe outside the baffle and cannot be quickly discharged. Through the arrangement of the arc cover of the present invention, the nitrogen entering the fixed pipe outside the baffle can flow into the arc cover along the gap between the inner end of the arc cover and the first sealing bearing, and then be discharged along the dust removal pipe. During this process, the material pushed out by the spiral dust removal plate can be carried and discharged with the circulating airflow without entering the fixed pipe outside the baffle, thereby ensuring that the filtered particulate matter can be discharged smoothly; and the high-pressure airflow can form a siphon on the siphon pipe during the discharge process of the dust removal pipe, thereby sucking away the material in the fixed pipe part located below the dust removal gap, further ensuring that the filtered particulate matter can be discharged smoothly, thereby ensuring the practical effect of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a structural diagram of embodiment 1 of the present invention.

[0033] Figure 2 This is a structural diagram of the filter of Example 1 installed in a fixed tube.

[0034] Figure 3 This is a cross-sectional view of the filter of Example 1 installed in a fixed pipe.

[0035] Figure 4 This is a schematic structural diagram of the filter of Example 1.

[0036] Figure 5 This is a schematic structural diagram of the other side of the filter in Example 1.

[0037] Figure 6 This is a structural diagram of embodiment 2 of the present invention.

[0038] Figure 7This is a cross-sectional view of the filter of Example 2 installed in a fixed pipe.

[0039] Figure 8 This is a schematic structural diagram of the filter of Example 2.

[0040] Figure 9 This is a structural diagram of embodiment 3 of the present invention.

[0041] In the figure: sampling tube 1, feeding valve 101, storage cylinder 2, nitrogen replacement tube 3, nitrogen replacement valve 301, high pressure one-way valve 302, fixed tube 4, sample discharge tube 5, pressure regulating valve 501, discharge valve 502, filter 6, first sealing bearing 601, second sealing bearing 602, fixed ring plate 603, baffle 604, filter plate 605, dust removal mechanism 7, dust removal gap 701, dust removal valve 702, dust removal tube 703, spiral dust removal plate 704, drive mechanism 8, drive blade Wheel 801, high-pressure nitrogen outlet pipe 802, first booster pump 803, drive inlet pipe 804, second booster pump 805, drive pipe 806, jet reverse thrust pipe 807, exhaust pipe 9, exhaust valve 901, vacuum pipe 10, vacuum valve 1001, recoil pipe 11, recoil valve 1101, first recoil outlet 12, second recoil outlet 13, sealed bearing 14, V-shaped metal frame 15, discharge branch pipe 16, distribution valve 1601, arc cover 17, siphon pipe 18. DETAILED DESCRIPTION

[0042] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the embodiments and the accompanying drawings:

[0043] Example 1:

[0044] refer to Figure 1-5 , a phosphorus trifluoride sample analysis sampling system, comprising:

[0045] The feeding end of the sample feeding tube 1 is connected to the corresponding storage cylinder 2, and the corresponding feeding valve 101 is fixedly installed at the discharge end;

[0046] The nitrogen displacement pipe 3 has a feed end connected to an external nitrogen source and a discharge end connected in parallel to the discharge end of the feed valve 101 through a corresponding nitrogen displacement valve 301;

[0047] A fixed tube 4 is arranged horizontally and closed at both ends. One end of the fixed tube 4 is connected to the discharge end of the feed valve 101 at the upper part, and the other end of the fixed tube 4 is connected downward to a sample discharge tube 5 fixedly installed with a pressure regulating valve 501 and a discharge valve 502;

[0048] The filter 6 includes a first sealed bearing 601 fixed to the fixed tube 4 outside the discharge end of the feed valve 101, and a second sealed bearing 602 fixed to the fixed tube 4 inside the sample discharge tube 5. The inner rings of the first sealed bearing 601 and the second sealed bearing 602 are respectively fixed with corresponding fixed ring plates 603. The fixed ring plates 603 mounted on the first sealed bearing 601 are sealed and fixed with corresponding baffles 604. The corresponding filter plates 605 are fixed in a zigzag pattern between the fixed ring plates 603 mounted on the first sealed bearing 601 and the second sealed bearing 602.

[0049] The dust removal mechanism 7 includes a dust removal notch 701 provided on the bottom side of the outer ring of the first sealed bearing 601. A dust removal pipe 703 equipped with a dust removal valve 702 is connected downwardly to the bottom of the fixed pipe 4 outside the dust removal notch 701. The outer end of the filter plate 605 is fixedly connected to a corresponding spiral dust removal plate 704.

[0050] The driving mechanism 8 is used to drive the baffle 604 to rotate, thereby driving the filter 6 to rotate, causing the spiral dust removal plate 704 to rotate to output the filtered particulate matter through the dust removal gap 701 and discharge it to the outside through the dust removal pipe 703.

[0051] The analysis and sampling system of the present invention is additionally provided with a fixed tube 4, which is arranged horizontally and closed at both ends. The upper part of one end of the fixed tube 4 is connected to the discharge end of the feed valve 101, and the lower part of the other end is downwardly connected to the sample discharge pipe 5, and then a filter 6 is added inside the fixed tube 4, which includes a first sealed bearing 601 fixed to the outside of the discharge end of the feed valve 101 in the fixed tube 4, and a second sealed bearing 602 fixed to the inside of the sample discharge pipe 5 in the fixed tube 4. The inner rings of the first sealed bearing 601 and the second sealed bearing 602 are respectively fixed with corresponding fixed ring plates 603, and the fixed ring plate 603 installed on the first sealed bearing 601 is sealed and fixed with a corresponding baffle 604, and the corresponding filter plate 605 is serrated and fixed between the fixed ring plates 603 installed on the first sealed bearing 601 and the second sealed bearing 602. The sample gas and the replacement nitrogen gas in the analysis sampling process are filtered through the filter plate 605 respectively to realize sample output or emptying, thereby effectively filtering the sample gas and particles in the nitrogen gas to effectively ensure the sampling analysis accuracy.

[0052] In order to ensure the overall airtightness of the entire analysis and sampling system, it is not advisable to frequently disassemble and assemble the components of the analysis and sampling system. However, if the filtered particulate matter is not discharged in a timely manner, it will not only affect the normal analysis and sampling operation of the analysis and sampling system, but also aggravate the pollution of the sample gas. To balance this problem, the present invention first provides a corresponding dust removal gap 701 on the bottom side of the outer ring of the first sealed bearing 601, and then fixes a dust removal pipe 703 to the bottom of the fixed pipe 4 outside the dust removal gap 701. The dust removal pipe 703 is installed with a dust removal valve 702. Most importantly, it also includes a spiral dust removal plate 704 provided on the outer end of the filter plate 605. Therefore, after the nitrogen replacement is completed, the baffle 604 can be directly driven to rotate by the driving mechanism 8, thereby driving the filter 6 to rotate, causing the spiral dust removal plate 704 to rotate to transfer the filtered dust through the dust removal gap 701 for external discharge. Therefore, without affecting the overall airtightness of the entire analysis and sampling system, the filtered particulate matter can be effectively and regularly discharged to ensure that the filter 6 of the present invention can be used smoothly, thereby helping to ensure the sampling and analysis accuracy of the present invention.

[0053] A pressure gauge is installed on the pressure regulating valve 501, and a drain pipe 9 equipped with a drain valve 901 and a vacuum pipe 10 equipped with a vacuum valve 1001 are connected in parallel to the sample discharge pipe 5 between the pressure regulating valve 501 and the discharge valve 502. The drain pipe 9 is connected to an external exhaust gas treatment system, and the vacuum pipe 10 is connected to an external vacuum pump.

[0054] During the sample analysis and sampling process, first, open the feed valve 101, the pressure regulating valve 501 and the drain valve 901. When the pressure gauge of the pressure regulating valve 501 is 0, close the drain valve 901; open the vacuum valve 1001 and evacuate to -0.1 MPa, the vacuum is completed, and the vacuum valve 1001 is closed; after closing the drain valve 901, open the nitrogen replacement valve 301 until the pressure gauge of the pressure regulating valve 501 is 0.1 MPa, and perform nitrogen purge and replacement; repeat the above emptying and vacuuming three times to effectively remove the air and water introduced by the disassembly and assembly of the storage cylinder 2; then, open the storage cylinder 2 to introduce the sample gas into the analysis system, and after repeatedly emptying and evacuating three times, open the discharge valve 502 to allow the sample to enter the corresponding detection instrument for analysis. Phosphorus trifluoride can be sampled safely and conveniently, and sent to the feed end of the corresponding detection instrument for analysis. In addition, cross contamination of materials from different batches can be prevented during the sampling process, thereby effectively further ensuring the accuracy of sampling and analysis.

[0055] The driving mechanism 8 includes a driving impeller 801 fixed to the center of the baffle 604, and a high-pressure nitrogen outlet pipe 802 connected to the upper side of the driving impeller 801. The air inlet end of the high-pressure nitrogen outlet pipe 802 is connected to an external nitrogen source through a first booster pump 803, and the air outlet end of the high-pressure nitrogen outlet pipe 802 faces the driving impeller 801.

[0056] A recoil pipe 11 connected to the nitrogen replacement pipe 3 is sealed and penetrated on the fixed pipe 4, and a corresponding recoil valve 1101 is fixedly installed on the recoil pipe 11. The recoil pipe 11 is arranged on the outer side of the fixed ring plate 603 to which the baffle 604 is not fixed, and the part of the recoil pipe 11 located in the fixed pipe 4 is arranged horizontally and has corresponding first recoil air outlets 12 arranged downward at intervals.

[0057] After nitrogen purge replacement is complete, the feed valve 101 and the pressure regulating valve 501 are closed, and the first booster pump 803 is started to introduce high-pressure nitrogen to impact the driving impeller 801, causing the driving impeller 801 to rotate and drive the baffle 604 to rotate. At the same time, the backflush valve 1101 is opened, and nitrogen is blown downward through the first backflush outlet 12 of the backflush pipe 11 to remove dust particles attached to the filter plate 605. During this process, the dust removal valve 702 is opened, and the spiral dust removal plate 704 rotates with the rotation of the baffle 604, conveying the filtered dust through the dust removal gap 701 for external discharge. This ensures that the filtered particulate matter is fully and effectively removed without affecting the overall airtightness of the entire analysis and sampling system.

[0058] The fixed ring plate 603 is staggered with corresponding V-shaped metal frames 15, and the filter plates 605 are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames 15. The spiral dust removal plate 704 is fixed to the V-shaped metal frames 15. The filter pores of the filter plates 605 do not exceed 0.3 μm.

[0059] The V-shaped metal skeleton 15 can provide sufficient support for the filter plate 605 and form a fixed connection with the spiral dust removal plate 704, thereby ensuring the overall rigidity of the filter 6 and ensuring the structural stability of the filter 6 under continuous negative pressure.

[0060] A corresponding high-pressure one-way valve 302 is also fixedly installed on the nitrogen displacement pipe 3. A set of discharge branch pipes 16 equipped with a distribution valve 1601 are connected in parallel to the discharge end of the sample discharge pipe 5. These discharge branch pipes 16 are connected to the feed end of a gas chromatograph and a Fourier transform infrared spectrometer, respectively.

[0061] Example 2:

[0062] refer to Figure 6-8 The difference between this embodiment and the first embodiment is that the driving mechanism 8 includes a driving air inlet pipe 804 that is sealed and connected to the outside of the fixed ring plate 603 to which the baffle 604 is not fixed. The driving air inlet pipe 804 is connected to an external nitrogen source via a second booster pump 805. The portion of the driving air inlet pipe 804 located within the fixed pipe 4 is transversely arranged at the axis of the fixed pipe 4 and is provided with corresponding second recoil air outlets 13 at intervals downward. A corresponding driving pipe 806 is sealed and fixedly connected to the center of the baffle 604. One end of the driving pipe 806 is rotatably connected to the driving air inlet pipe 804 via a sealed bearing 14. The other end of the driving pipe 806 is sealed and connected to a plurality of arc-shaped jet reverse thrust pipes 807 vertically and outwardly at intervals. The outlet ends of the jet reverse thrust pipes 807 are respectively configured in a constricted shape.

[0063] After nitrogen purge replacement is completed, the feed valve 101 and the pressure regulating valve 501 are closed, and the second booster pump 805 is started to introduce high-pressure nitrogen. A portion of the high-pressure gas is discharged downward through the second backwash outlet 13 to backwash the filter plate 605, thereby removing dust particles attached to the filter plate 605. A portion of the high-pressure gas is ejected longitudinally and obliquely through the arc-shaped jet reverse thrust pipe 807. Driven by the reaction force generated by the jet, the drive pipe 806 is driven to rotate, thereby driving the baffle 604 and the filter 6 as a whole to rotate. During this process, the dust removal valve 702 is opened, and the spiral dust removal plate 704 rotates with the rotation of the baffle 604, transferring the filtered dust through the dust removal gap 701 for external discharge. This effectively and fully removes the filtered particulate matter without affecting the overall airtightness of the entire analysis and sampling system.

[0064] It should be noted that the implementation principle and technical effects of this embodiment are the same as those of the first embodiment. For the sake of brief description, for matters not mentioned in this embodiment, reference may be made to the corresponding contents in the first embodiment.

[0065] Example 3:

[0066] refer to Figure 9 The difference between this embodiment and the first and second embodiments is that: a curved cover 17 for covering the dust removal pipe 703 is fixedly connected to the fixed pipe 4, and the inner end of the curved cover 17 is spaced apart from the first sealing bearing 601 to form an air flow channel; a corresponding siphon pipe 18 is connected in parallel to the dust removal pipe 703, and the siphon pipe 18 is not connected to the fixed pipe 4 on the lower side of the dust removal notch 701 at one end of the dust removal pipe 703.

[0067] Since the high-pressure nitrogen outlet pipe 802 or the jet reverse thrust pipe 807 will cause high-pressure airflow in the fixed pipe 4 outside the baffle 604 during the process of spraying nitrogen, the particulate matter is likely to roll in the fixed pipe 4 outside the baffle 604 and cannot be quickly discharged. Through the arrangement of the arc cover 17 of the present invention, the nitrogen in the fixed tube 4 outside the baffle 604 can flow into the arc cover 17 along the gap between the inner end of the arc cover 17 and the first sealed bearing 601, and then be discharged along the dust removal pipe 703. During this process, the material pushed out by the spiral dust removal plate 704 can be carried and discharged along the circulating air flow without entering the fixed tube 4 outside the baffle 604, thereby ensuring that the filtered particulate matter can be discharged smoothly; and the high-pressure airflow can form a siphon on the siphon tube 18 during the discharge process of the dust removal pipe 703, thereby drawing away the material in the part of the fixed tube 4 located on the lower side of the dust removal notch 701, so as to further ensure that the filtered particulate matter can be discharged smoothly, thereby ensuring the practical effect of the present invention.

[0068] It should be pointed out that the implementation principle and technical effects of this embodiment are the same as those of Embodiment 1 and Embodiment 2. For the sake of brief description, for matters not mentioned in this embodiment, reference may be made to the corresponding contents of Embodiment 1 and Embodiment 2.

[0069] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A phosphorus trifluoride sample analysis and sampling system, characterized in that: include: The sample feeding tube (1) has a feeding end connected to a corresponding material storage cylinder (2) and a corresponding feeding valve (101) fixedly installed at the discharging end; A nitrogen displacement pipe (3), the feed end of which is connected to an external nitrogen source, and the discharge end of which is connected in parallel to the discharge end of the feed valve (101) via a corresponding nitrogen displacement valve (301); A fixed tube (4) is arranged transversely and closed at both ends, wherein the upper portion of one end of the fixed tube (4) is connected to the discharge end of the feed valve (101), and the other end of the fixed tube (4) is downwardly connected to a sample discharge tube (5) fixedly mounted with a pressure regulating valve (501) and a discharge valve (502); The filter (6) comprises a first sealed bearing (601) fixedly connected to the fixed tube (4) outside the discharge end of the feed valve (101), and a second sealed bearing (602) fixedly connected to the fixed tube (4) inside the sample discharge tube (5), wherein the inner rings of the first sealed bearing (601) and the second sealed bearing (602) are respectively fixedly connected to corresponding fixed ring plates (603), a corresponding baffle (604) is sealed and fixedly connected to the fixed ring plate (603) installed on the first sealed bearing (601), and a corresponding filter plate (605) is fixedly connected in a serrated manner between the fixed ring plates (603) installed on the first sealed bearing (601) and the second sealed bearing (602); A dust removal mechanism (7) comprising a dust removal notch (701) provided on the bottom side of the outer ring of the first sealed bearing (601), a dust removal pipe (703) equipped with a dust removal valve (702) being connected downwardly to the bottom of the fixed pipe (4) outside the dust removal notch (701), and a corresponding spiral dust removal plate (704) being fixedly connected to the outer end of the filter plate (605); A driving mechanism (8) is used to drive the baffle (604) to rotate, thereby driving the filter (6) to rotate, causing the spiral dust removal plate (704) to rotate so as to output the filtered particulate matter through the dust removal gap (701) and discharge it to the outside through the dust removal pipe (703); The driving mechanism (8) comprises a driving air inlet pipe (804) which is sealed and connected to the outside of a fixed ring plate (603) to which the baffle (604) is not fixed. The driving air inlet pipe (804) is provided with corresponding second recoil air outlets (13) at intervals downward. A corresponding driving pipe (806) is sealed and fixed at the center of the baffle (604). One end of the driving pipe (806) is rotatably sleeved on the driving air inlet pipe (804) through a sealing bearing (14). The other end of the driving pipe (806) is sealed and vertically connected to a plurality of arc-shaped jet reverse thrust pipes (807) at intervals outward. The outlet ends of the jet reverse thrust pipes (807) are respectively provided in a constricted shape. A curved cover (17) for covering the dust removal pipe (703) is fixedly connected to the fixed pipe (4), and an inner end of the curved cover (17) is spaced from the first sealing bearing (601) to form an airflow channel.

2. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: A pressure gauge is installed on the pressure regulating valve (501), and a drain pipe (9) installed with a drain valve (901) and a vacuum pipe (10) installed with a vacuum valve (1001) are connected in parallel to the sample discharge pipe (5) between the pressure regulating valve (501) and the discharge valve (502), the drain pipe (9) is connected to an external exhaust gas treatment system, and the vacuum pipe (10) is connected to an external vacuum pump.

3. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: The driving air intake pipe (804) is connected to an external nitrogen source via a second booster pump (805), and the portion of the driving air intake pipe (804) located inside the fixed pipe (4) is transversely arranged at the axis of the fixed pipe (4).

4. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: Corresponding V-shaped metal frames (15) are arranged at intervals and staggered on the fixed ring plate (603); the filter plates (605) are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames (15); and the spiral dust removal plates (704) are fixed to the V-shaped metal frames (15).

5. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: The filter pores of the filter plate (605) do not exceed 0.3 μm.

6. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: A corresponding high-pressure resistant one-way valve (302) is also fixedly mounted on the nitrogen replacement pipe (3).

7. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: The discharge end of the sample discharge pipe (5) is connected in parallel to a group of discharge branch pipes (16) equipped with a distribution valve (1601); the group of discharge branch pipes (16) are respectively connected to the feed end of the gas chromatograph and the Fourier transform infrared spectrometer.

8. A phosphorus trifluoride sample analysis and sampling system according to claim 1, characterized in that: A corresponding siphon tube (18) is connected in parallel to the dust removal tube (703), and one end of the siphon tube (18) not connected to the dust removal tube (703) is connected to the fixed tube (4) on the lower side of the dust removal notch (701).

Images