A method and system for analyzing aerosol particle spectrum characteristics based on electron microscope

Abstract

The present invention discloses an electron microscope-based aerosol particle spectrum characteristic analysis method and system, which relates to the field of aerosol analysis technology. The electron microscope-based aerosol particle spectrum characteristic analysis method includes: aerosol particle filtration evaluation; aerosol particle spectrum pre-evaluation; electron microscope electron beam interference evaluation; aerosol particle spectrum characteristic analysis accuracy evaluation. The present invention performs an aerosol particle filtration evaluation, and after the aerosol particle filtration evaluation is qualified, performs an aerosol particle spectrum pre-evaluation, and after the aerosol particle spectrum pre-evaluation is qualified, performs an aerosol particle spectrum characteristic analysis accuracy evaluation, and after the aerosol particle spectrum characteristic analysis accuracy evaluation is qualified, performs an aerosol particle spectrum characteristic analysis accuracy evaluation, thereby achieving the effect of improving the accuracy of aerosol particle spectrum characteristic analysis, and solving the problem of low accuracy of aerosol particle spectrum characteristic analysis due to electrostatic interference of the filter membrane in the prior art.

Description

Technical Field

[0001] The present invention relates to the technical field of aerosol analysis, and in particular to an electron microscope-based aerosol particle spectrum characteristic analysis method and system. Background Art

[0002] With the development of environmental monitoring technology, the demand for aerosol particle analysis is increasing. Aerosol particle spectral characteristic analysis mainly studies the particle size distribution, concentration, chemical composition and optical properties of solid and liquid particles suspended in the air (i.e., aerosols). Aerosol particles have the characteristics of small particle size and complex composition, but the impact of aerosol particles on the environment cannot be ignored. Therefore, the spectral characteristic analysis of aerosol particles poses a challenge to the selection and design of equipment. Electron microscopy can be used to evaluate the analysis results, thereby optimizing the configuration of monitoring equipment and improving the accuracy and efficiency of aerosol particle spectral characteristic analysis. However, the analysis process of aerosol particles is easily interfered by factors such as particle shape, size distribution and composition diversity, which affects the accuracy of the analysis results.

[0003] In the existing technology, the aerosol particles are mainly filtered by using multiple layers of filter membranes to gradually reduce the pore size and enhance the capture ability of particles of different particle sizes, or by using gradient pore size filter membranes, that is, the pore size gradually becomes smaller, so that aerosol particles are captured between filter membranes of different levels, preventing small particle size particles from passing through the larger pore size layer.

[0004] For example, the invention patent with announcement number CN110487686B discloses a multimodal spectral diagnostic device and method for single-particle air aerosols, which includes a scattered light source, a deep ultraviolet light source, a near-ultraviolet light source, a high-energy pulse light source, a spectral collection and transmission optical path, and a light detector; the light beam emitted by the scattered light source is distributed at the front of the aerosol single-particle path, and the light beams emitted by the deep ultraviolet light source, the near-ultraviolet light source, and the high-energy pulse light source are all located on the aerosol single-particle path, behind the light beam emitted by the scattered light source; the same single aerosol particle passes through the light beams emitted by the scattered light source, the deep ultraviolet light source, the near-ultraviolet light source, and the high-energy pulse light source, generating a scattering signal, a fluorescence spectrum, and a laser-induced breakdown spectrum, which are transmitted to the light detector by the spectral collection and transmission optical path to jointly characterize the properties of the single aerosol particle.

[0005] For example, the invention patent with announcement number CN110823772B discloses a device and method for measuring micro-nanoparticles, which includes: a first chamber, a microporous membrane, an electrophoretic tank, and a second chamber, wherein the microporous membrane is located between the first chamber and the electrophoretic tank, and has micropores on the microporous membrane, and the first chamber and the electrophoretic tank are connected through the micropores; the second chamber is adjacent to the electrophoretic tank, and has a first side wall located between the second chamber and the electrophoretic tank, and the first side wall has a first opening for connecting the second chamber and the electrophoretic tank; the inner diameter of the micropore is smaller than the inner diameter of the electrophoretic tank, and the inner diameter of the electrophoretic tank is smaller than the inner diameter of the second chamber; the first chamber has a first electrode, and the second chamber has a second electrode.

[0006] However, in the process of implementing the technical solutions of the invention in the embodiments of the present application, the present application found that the above technology has at least the following technical problems:

[0007] In the existing technology, as aerosol particles accumulate, electrostatic attraction is generated on the surface of the filter membrane, causing the filter membrane to become clogged, thereby causing the filtration speed of certain layers of the filter membrane to decrease, and then causing local blockage points to form in certain areas of the filter membrane. These blockage points will change the airflow distribution near the filter membrane, resulting in increased blockage and uneven distribution of aerosol particles. The electrostatic interference of the filter membrane leads to low accuracy in the analysis of aerosol particle spectrum characteristics. Summary of the Invention

[0008] The embodiments of the present application provide an electron microscope-based aerosol particle spectrum characteristic analysis method and system, which solves the problem of low accuracy of aerosol particle spectrum characteristic analysis in the prior art due to electrostatic interference of the filter membrane, thereby achieving the effect of improving the accuracy of aerosol particle spectrum characteristic analysis.

[0009] The embodiment of the present application provides an electron microscope-based aerosol particle spectrum feature analysis method, comprising the following steps: during the aerosol particle filtration process, performing an aerosol particle filtration evaluation to quantitatively evaluate the degree of qualification of the aerosol particle filtration, judging whether to perform aerosol particle filtration optimization based on the filtration qualification conditions, and the aerosol particle filtration optimization is used to improve the qualification of the aerosol particle filtration during the aerosol particle filtration process; after the aerosol particle filtration evaluation is qualified, performing an aerosol particle spectrum pre-evaluation to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, judging whether to perform spectrum feature initial evaluation optimization based on the spectrum feature pre-evaluation qualification conditions, and the spectrum feature initial evaluation optimization is used to improve the aerosol particle spectrum pre-evaluation. accuracy; after the aerosol particle spectrum pre-assessment is qualified, the electron microscope electron beam interference assessment is performed to quantitatively assess the degree of interference of the electron microscope electron beam, and based on the electron microscope qualified conditions, it is determined whether to perform electron microscope electron beam interference optimization, and the electron microscope electron beam interference optimization is used to improve the anti-interference ability of the aerosol particle spectrum feature analysis; after the electron microscope electron beam interference assessment is qualified, the aerosol particle spectrum feature analysis accuracy assessment is performed to quantitatively assess the accuracy of the aerosol particle spectrum feature analysis, and based on the spectrum feature analysis qualified conditions, it is determined whether to perform aerosol particle spectrum feature analysis optimization, and the aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

[0010] The embodiment of the present application provides an electron microscope-based aerosol particle spectrum feature analysis system, comprising the following modules: an aerosol particle filtration evaluation module, an aerosol particle spectrum pre-evaluation module, an electron microscope electron beam interference evaluation module, and an aerosol particle spectrum feature analysis accuracy evaluation module; the aerosol particle filtration evaluation module is used to perform aerosol particle filtration evaluation during the aerosol particle filtration process to quantitatively evaluate the degree of qualification of the aerosol particle filtration, and to determine whether to perform aerosol particle filtration optimization based on the filtration qualification conditions, and the aerosol particle filtration optimization is used to improve the qualification of the aerosol particle filtration during the aerosol particle filtration process; the aerosol particle spectrum pre-evaluation module is used to perform aerosol particle spectrum pre-evaluation to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation after the aerosol particle filtration evaluation is qualified, and to determine whether to perform a spectrum feature initial evaluation based on the spectrum feature pre-evaluation qualification conditions. Optimization, the optimization of the initial spectral feature evaluation is used to improve the accuracy of the aerosol particle spectrum pre-evaluation; the electron microscope electron beam interference evaluation module is used to perform the electron microscope electron beam interference evaluation to quantitatively evaluate the interference degree of the electron microscope electron beam after the aerosol particle spectrum pre-evaluation is qualified, and to determine whether to perform the electron microscope electron beam interference optimization based on the electron microscope qualified conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference ability of the aerosol particle spectrum feature analysis; the aerosol particle spectrum feature analysis accuracy evaluation module is used to perform the aerosol particle spectrum feature analysis accuracy evaluation to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis after the electron microscope electron beam interference evaluation is qualified, and to determine whether to perform the aerosol particle spectrum feature analysis optimization based on the spectral feature analysis qualified conditions. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

[0011] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0012] 1. During the aerosol particle filtration process, an aerosol particle filtration evaluation is performed and it is determined whether aerosol particle filtration optimization is performed. Then, an aerosol particle spectrum pre-evaluation is performed and it is determined whether a spectrum feature initial evaluation optimization is performed. Then, an electron microscope electron beam interference evaluation is performed and it is determined whether an electron microscope electron beam interference optimization is performed. Finally, an aerosol particle spectrum feature analysis accuracy evaluation is performed and it is determined whether aerosol particle spectrum feature analysis optimization is performed. This enhances the stability of the aerosol particle spectrum feature analysis, thereby achieving the effect of improving the accuracy of the aerosol particle spectrum feature analysis, and solves the problem in the prior art of low accuracy of aerosol particle spectrum feature analysis due to electrostatic interference of the filter membrane.

[0013] 2. By multi-dimensionally coupling the filtration ratio values, the aerosol particle filtration qualification value is obtained. Based on the monitored aerosol particle filtration qualification value, it is judged whether the filtration qualification conditions are met, thereby enhancing the aerosol particle filtration qualification during the aerosol particle filtration process, and further improving the qualification of the aerosol particle spectrum feature analysis.

[0014] 3. The accurate value of the spectral feature analysis is obtained by multi-dimensional coupling of the spectral feature analysis deviation value. Based on the monitored accurate value of the spectral feature analysis, it is judged whether the qualified conditions of the spectral feature analysis are met, thereby enhancing the integrity of the aerosol particle spectral feature analysis and further improving the accuracy of the aerosol particle spectral feature analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A flowchart of an electron microscope-based aerosol particle spectrum characteristic analysis method provided in an embodiment of the present application;

[0016] Figure 2 A logical framework diagram of aerosol particle filtration assessment based on an electron microscope-based aerosol particle spectrum characteristic analysis method provided in an embodiment of the present application;

[0017] Figure 3 A logical framework diagram of aerosol particle spectrum pre-assessment for an electron microscope-based aerosol particle spectrum characteristic analysis method provided in an embodiment of the present application;

[0018] Figure 4 A logical framework diagram of electron microscope electron beam interference assessment for an electron microscope-based aerosol particle spectrum characteristic analysis method provided in an embodiment of the present application;

[0019] Figure 5 A logical framework diagram for evaluating the accuracy of aerosol particle spectrum characteristic analysis based on an electron microscope provided in an embodiment of the present application;

[0020] Figure 6 This is a system flow chart of an electron microscope-based aerosol particle spectrum characteristic analysis system provided in an embodiment of the present application. DETAILED DESCRIPTION

[0021] The embodiment of the present application solves the problem of low accuracy of aerosol particle spectrum feature analysis due to electrostatic interference of filter membrane in the prior art by providing an aerosol particle spectrum feature analysis method based on an electron microscope. The embodiment of the present application solves the problem of low accuracy of aerosol particle spectrum feature analysis due to electrostatic interference of filter membrane in the prior art by performing aerosol particle filtration evaluation in the aerosol particle filtration process to quantitatively evaluate the qualification degree of aerosol particle filtration, judging whether to perform aerosol particle filtration optimization based on the filtration qualification conditions, and if the monitored aerosol particle filtration qualification value meets the filtration qualification conditions, the corresponding aerosol particles are marked as qualified aerosol particles, and qualified aerosol particles are obtained. Then, after the aerosol particle filtration evaluation is qualified, an aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and judging whether to perform spectrum feature initial evaluation optimization based on the spectrum feature pre-evaluation qualification conditions, and if the monitored aerosol particle size distribution ratio deviation value meets the spectrum feature pre-evaluation qualification conditions, the spectrum feature pre-evaluation optimization is judged. Qualified aerosol particles that meet the pre-evaluation qualification conditions are collected and marked as qualified samples. Immediately after the aerosol particle spectrum pre-evaluation is qualified, the electron microscope electron beam interference evaluation is performed to quantitatively evaluate the interference degree of the electron microscope electron beam. Based on the electron microscope qualified conditions, it is determined whether to perform electron microscope electron beam interference optimization. If the monitored electron microscope electron beam interference value meets the electron microscope qualified conditions, a qualified prompt is sent to obtain the aerosol particle spectrum. Finally, after the electron microscope electron beam interference evaluation is qualified, the aerosol particle spectrum feature analysis accuracy evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis. Based on the spectrum feature analysis qualified conditions, it is determined whether to perform aerosol particle spectrum feature analysis optimization. If the monitored spectrum feature analysis accuracy value meets the spectrum feature analysis qualified conditions, a qualified prompt is sent, thereby achieving the improvement of the accuracy of the aerosol particle spectrum feature analysis due to the electrostatic interference of the filter membrane.

[0022] The technical solution in the embodiments of the present application is to solve the above-mentioned problem of inaccurate analysis of aerosol particle spectrum characteristics due to electrostatic interference of the filter membrane. The overall idea is as follows:

[0023] During the aerosol particle filtration process, an aerosol particle filtration evaluation is performed to quantitatively evaluate the degree of aerosol particle filtration qualification, and whether aerosol particle filtration optimization is performed is determined based on the filtration qualification conditions. Then, after the aerosol particle filtration evaluation is qualified, an aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and whether to perform spectrum feature initial evaluation optimization is determined based on the spectrum feature pre-evaluation qualification conditions. Immediately after the aerosol particle spectrum pre-evaluation is qualified, an electron microscope electron beam interference evaluation is performed to quantitatively evaluate the degree of interference of the electron microscope electron beam, and whether to perform electron microscope electron beam interference optimization is determined based on the electron microscope qualification conditions. Finally, after the electron microscope electron beam interference evaluation is qualified, an aerosol particle spectrum feature analysis accuracy evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum feature analysis, and whether to perform aerosol particle spectrum feature analysis optimization is determined based on the spectrum feature analysis qualification conditions. This achieves the effect of improving the accuracy of aerosol particle spectrum feature analysis.

[0024] In order to better understand the above technical solution, the above technical solution will be described in detail below with reference to the accompanying drawings and specific implementation methods.

[0025] like Figure 1 As shown, it is a flow chart of an aerosol particle spectrum characteristic analysis method based on an electron microscope provided in an embodiment of the present application, comprising the following steps: aerosol particle filtration evaluation: during the aerosol particle filtration process, aerosol particle filtration evaluation is performed to quantitatively evaluate the qualification degree of aerosol particle filtration, and whether aerosol particle filtration optimization is performed based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; aerosol particle spectrum pre-evaluation: after the aerosol particle filtration evaluation is qualified, aerosol particle spectrum pre-evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and whether the spectrum feature initial evaluation optimization is performed based on the spectrum feature pre-evaluation qualification conditions. The spectrum feature initial evaluation optimization is used to improve the aerosol particle spectrum pre-evaluation. Accuracy; Electron microscope electron beam interference assessment: After the aerosol particle spectrum pre-assessment is qualified, the electron microscope electron beam interference assessment is performed to quantitatively assess the degree of interference of the electron microscope electron beam, and whether to perform electron microscope electron beam interference optimization is determined based on the electron microscope qualified conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference ability of aerosol particle spectrum feature analysis; Aerosol particle spectrum feature analysis accuracy assessment: After the electron microscope electron beam interference assessment is qualified, the aerosol particle spectrum feature analysis accuracy assessment is performed to quantitatively assess the accuracy of the aerosol particle spectrum feature analysis, and whether to perform aerosol particle spectrum feature analysis optimization is determined based on the spectrum feature analysis qualified conditions. The aerosol particle spectrum feature analysis optimization is used to improve the accuracy of the aerosol particle spectrum feature analysis.

[0026] In this embodiment, the aerosol particle filtration evaluation, aerosol particle spectrum pre-evaluation, electron microscope electron beam interference evaluation and aerosol particle spectrum feature analysis accuracy evaluation are interconnected and progressive, such as Figure 2 As shown in the figure, it is a logical framework diagram of an aerosol particle filtration evaluation method based on an electron microscope provided in an embodiment of the present application. During the aerosol particle filtration process, an aerosol particle filtration evaluation is performed to quantitatively evaluate the degree of qualification of the aerosol particle filtration. Based on the monitored aerosol particle filtration qualification value, it is determined whether the filtration qualification condition is met. If the monitored aerosol particle filtration qualification value meets the filtration qualification condition, the corresponding aerosol particle is marked as a qualified aerosol particle. Based on the obtained qualified aerosol particles, an aerosol particle spectrum pre-evaluation is performed. If the monitored aerosol particle filtration qualified value does not meet the filtration qualified conditions, the aerosol particle filtration optimization is performed. After the aerosol particle filtration optimization, the aerosol particle filtration qualified value obtained again is checked to see whether it meets the filtration qualified conditions and whether the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration. If the aerosol particle filtration qualified value obtained again after the aerosol particle filtration optimization meets the filtration qualified conditions and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, the aerosol particle spectrum pre-assessment is performed. Otherwise, an alarm is sent to the preset personnel, such as Figure 3 As shown, it is a logical framework diagram of aerosol particle spectrum pre-assessment of an aerosol particle spectrum characteristic analysis method based on an electron microscope provided in an embodiment of the present application. After the aerosol particle filtration assessment is qualified, an aerosol particle spectrum pre-assessment is performed to quantitatively assess the accuracy of the aerosol particle spectrum pre-assessment. Based on the aerosol particle size distribution ratio deviation value, it is judged whether the spectrum characteristic pre-assessment qualification conditions are met. If the monitored aerosol particle size distribution ratio deviation value meets the spectrum characteristic pre-assessment qualification conditions, an electron microscope electron beam interference assessment is performed. If the monitored aerosol particle size distribution ratio deviation value does not meet the spectrum characteristic pre-assessment qualification conditions, a spectrum characteristic initial assessment optimization is performed. After the spectrum characteristic initial assessment optimization, it is re-judged whether the aerosol particle size distribution ratio deviation value meets the spectrum characteristic pre-assessment qualification conditions. If the re-acquired aerosol particle size distribution ratio deviation value meets the spectrum characteristic pre-assessment qualification conditions, an electron microscope electron beam interference assessment is performed. Otherwise, an alarm is sent to a preset person, such as Figure 4As shown, a logic framework diagram of electron microscope electron beam interference evaluation of an aerosol particle spectrum characteristic analysis method based on an electron microscope provided in an embodiment of the present application, after the aerosol particle spectrum pre-evaluation is qualified, an electron microscope electron beam interference evaluation is performed to quantitatively evaluate the interference degree of the electron microscope electron beam, and whether the electron microscope qualified conditions are met is judged based on the monitored electron microscope electron beam interference value, if the monitored electron microscope electron beam interference value meets the electron microscope qualified conditions, a qualified prompt is sent, the aerosol particle spectrum is obtained and the aerosol particle spectrum characteristic analysis accuracy evaluation is performed, if the monitored electron microscope electron beam interference value does not meet the electron microscope qualified conditions, electron microscope electron beam interference optimization is performed, after the electron microscope electron beam interference optimization is performed, the electron microscope electron beam interference value is re-judged to determine whether it meets the electron microscope qualified conditions, if the electron microscope electron beam interference value re-obtained after the electron microscope electron beam judgment meets the electron microscope qualified conditions, a qualified prompt is sent, the aerosol particle spectrum is obtained and the aerosol particle spectrum characteristic analysis accuracy evaluation is performed, otherwise, an alarm is sent to the preset personnel, such as Figure 5 As shown, it is a logical framework diagram of an aerosol particle spectrum characteristic analysis accuracy evaluation method based on an electron microscope provided in an embodiment of the present application. After the electron beam interference evaluation of the electron microscope is qualified, the aerosol particle spectrum characteristic analysis accuracy evaluation is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum characteristic analysis. Based on the monitored spectrum characteristic analysis accuracy value, it is judged whether the spectrum characteristic analysis qualification condition is met. If the monitored spectrum characteristic analysis accuracy value meets the spectrum characteristic analysis qualification condition, a qualified prompt is sent. If the monitored spectrum characteristic analysis accuracy value does not meet the spectrum characteristic analysis qualification condition, an aerosol particle spectrum characteristic analysis is performed. Optimization of sol particle spectrum characteristic analysis. After the optimization of aerosol particle spectrum characteristic analysis, re-judge whether the accurate value of the spectrum characteristic analysis meets the qualified conditions of the spectrum characteristic analysis. If the monitored accurate value of the spectrum characteristic analysis meets the qualified conditions of the spectrum characteristic analysis, a qualified prompt will be sent; if the monitored accurate value of the spectrum characteristic analysis does not meet the qualified conditions of the spectrum characteristic analysis, an alarm will be sent to the preset personnel. Through aerosol particle filtration evaluation, aerosol particle spectrum pre-evaluation, electron microscope electron beam interference evaluation and aerosol particle spectrum characteristic analysis accuracy evaluation, layer-by-layer evaluation and step-by-step optimization are carried out to achieve the improvement of the accuracy of aerosol particle spectrum characteristic analysis.

[0027] By analyzing the spectral characteristics of aerosol particles including aerosol particle composition, aerosol particle size distribution ratio, aerosol particle morphology, etc., it is found that in the process from aerosol particle filtration to aerosol particle spectral characteristic analysis, electrostatic interference of the filter membrane may occur, thereby causing aerosol particles to aggregate on a single-layer filter membrane, resulting in interference with the analysis of the aerosol particle size distribution ratio, thereby interfering with the accuracy of aerosol particle spectral characteristic analysis. In the process of aerosol particle filtration and aerosol particle spectral characteristic analysis, aerosol particle filtration evaluation, aerosol particle spectrum pre-evaluation, electron microscope electron beam interference evaluation and aerosol particle spectrum characteristic analysis accuracy evaluation are interrelated. Through the interaction between aerosol particle filtration evaluation, aerosol particle spectrum pre-evaluation, electron microscope electron beam interference evaluation and aerosol particle spectrum characteristic analysis accuracy evaluation, the stability of aerosol particles in filtration and observation and the accuracy of aerosol particle spectral characteristic analysis are improved.

[0028] It should be added that in the present application, a database for storing various types of setting data is established before the design of an aerosol particle spectrum characteristic analysis method based on an electron microscope. The database includes but is not limited to preset filtering influence values, preset aerosol particle filtration qualification values, preset aerosol particle size distribution ratio deviation values, preset electron beam energy, preset irradiation time period, preset electron microscope electron beam interference value, preset spectrum characteristic analysis interference value, preset spectrum characteristic analysis accuracy value, etc., and various values ​​are directly set by technical personnel; for example, the preset electron microscope electron beam interference value is represented by the average value of the electron microscope electron beam interference value in the historical time period.

[0029] Furthermore, during the aerosol particle filtration process, an aerosol particle filtration evaluation is performed to quantitatively assess the pass rate of aerosol particle filtration. The specific process is as follows: After performing a ratio analysis on the filter membrane aerosol particle penetration rate and the preset filter membrane aerosol particle penetration rate, the ratio analysis means performing a ratio operation, and combining the penetration influence rate to perform a weighted analysis to obtain the filter membrane aerosol particle penetration rate ratio value, which is used to reflect the influence of the filter membrane aerosol particle penetration rate on the pass rate of aerosol particle filtration during the preset filtration time period; specifically, the expression for the filter membrane aerosol particle penetration rate ratio value is: , Indicates the percentage of aerosol particle penetration rate of the filter membrane in the t-th preset filtering time period, represents the aerosol particle penetration rate of the filter membrane during the t-th preset filtering time period, Indicates the preset filter membrane aerosol particle penetration rate, represents the penetration impact rate, , t represents the number of the preset filtering time period, It indicates the total number of preset filtration time periods; the preset filtration time period indicates the preset time period for performing aerosol particle filtration evaluation. The final aerosol particle amount and initial aerosol particle amount in the preset filtration time period are monitored by a light scattering particle counter, and the value after the ratio calculation is used as the filter membrane aerosol particle penetration rate.

[0030] After analyzing the proportion of aerosol particle amount and the preset aerosol particle amount, a weighted analysis is performed in combination with the speed influence rate to obtain the aerosol particle amount proportion value, which is used to reflect the influence of the aerosol particle amount in the preset filtration time period on the qualified degree of aerosol particle filtration. Specifically, the expression of the aerosol particle amount proportion value is: , Indicates the proportion of aerosol particles in the t-th preset filtering time period, represents the amount of aerosol particles in the tth preset filtering time period, Indicates the preset aerosol particle amount, It represents the speed influence rate. The aerosol particle counter monitors the initial aerosol particle quantity and the final aerosol particle quantity corresponding to each preset filter membrane monitoring point in the preset filtration time period, and the average value corresponding to the difference is taken as the aerosol particle quantity.

[0031] After analyzing the ratio of the preset membrane pressure difference to the change in membrane pressure difference, a weighted analysis is performed in combination with the pressure influence rate to obtain the membrane pressure difference ratio, which is used to reflect the influence of the membrane pressure difference on the qualified degree of aerosol particle filtration during the preset filtration time period. Specifically, the expression of the membrane pressure difference ratio is: , Indicates the ratio of membrane pressure difference in the t-th preset filtration time period, It represents the change of the membrane pressure difference in the t-th preset filtering time period, wherein the membrane pressure difference change is obtained by summing the absolute value of the difference between the membrane pressure difference and the preset membrane pressure difference with a constant. The constant is used to avoid the denominator in the membrane pressure difference change formula being equal to 0. Indicates the preset filter membrane pressure difference, It represents the pressure influence rate. The absolute value corresponding to the difference between the final membrane pressure and the initial membrane pressure at the preset membrane monitoring point within the preset filtration time period is monitored by a differential pressure gauge, and the corresponding average value is taken as the membrane pressure difference.

[0032] The obtained filtration ratio values ​​are multi-dimensionally coupled to obtain the aerosol particle filtration qualification value.

[0033] Among them, the aerosol particle filtration qualified value is obtained by the following method:

[0034] ;

[0035] Where, Indicates the aerosol particle filtration pass value for the t-th preset filtration time period;

[0036] It should be added that the aerosol particle filtration pass value is used to reflect the comprehensive influence of the filtration impact value and the preset filtration impact value on the pass degree of aerosol particle filtration; the filtration ratio value includes: the filter membrane aerosol particle penetration rate ratio value, the aerosol particle amount ratio value and the filter membrane pressure difference ratio value; the filtration impact value includes: the filter membrane aerosol particle penetration rate, the aerosol particle amount and the filter membrane pressure difference; the preset filtration impact value includes: the preset filter membrane aerosol particle penetration rate, the preset aerosol particle amount and the preset filter membrane pressure difference, and the filtration influence rate includes: the penetration influence rate, the speed influence rate and the pressure influence rate.

[0037] Among them, the preset filter membrane aerosol particle penetration rate is expressed by the average value of the filter membrane aerosol particle penetration rate in the historical time period; the preset aerosol particle amount is expressed by the average value of the aerosol particle amount in the historical time period; the preset filter membrane pressure difference is expressed by the average value of the filter membrane pressure difference in the historical time period; among them, the filter membrane aerosol particle penetration rate and the preset filter membrane aerosol particle penetration rate are both unitless, the aerosol particle amount and the preset aerosol particle amount are both units, and the filter membrane pressure difference and the preset filter membrane pressure difference are both units of Pascal.

[0038] It should be noted that this embodiment provides a set of mappings extracted from a database. The mapping relationships within the mapping set can be one-to-one or many-to-one. This mapping set contains mapping relationships between filter impact values ​​and corresponding filter impact rates, and is obtained from the database. By inputting the filter impact values ​​monitored in real time into the mapping set, the corresponding filter impact rates can be obtained. The mapping set is constructed by pre-configured personnel using pre-set mapping relationships to assign filter impact values ​​to filter impact rates in a one-to-one correspondence. In this embodiment, the filter impact rates range from 0 to 1.

[0039] In this embodiment, the filtration impact value is analyzed for the qualified degree of aerosol particle filtration to obtain the filter membrane aerosol particle penetration rate ratio value; the larger the filter membrane aerosol particle penetration rate ratio value, the stronger the effect of the filter membrane aerosol particle penetration rate on the qualified degree of aerosol particle filtration, resulting in a larger aerosol particle filtration qualified value; the larger the aerosol particle amount ratio value, the stronger the effect of the aerosol particle amount on the qualified degree of aerosol particle filtration, resulting in a larger aerosol particle filtration qualified value; the larger the filter membrane pressure difference ratio value, the stronger the effect of the filter membrane pressure difference on the qualified degree of aerosol particle filtration, resulting in a larger aerosol particle filtration qualified value; in summary, the filtration impact value is positively correlated with the aerosol particle filtration qualified value.

[0040] In this embodiment, the filtration impact values ​​are not independent but interrelated, requiring comprehensive analysis. As the amount of aerosol particles increases, the membrane pores gradually become clogged due to the continuous deposition of aerosol particles, leading to a continuous increase in membrane pressure, which in turn increases the membrane pressure differential. When the membrane pressure differential increases, aerosol particles may be filtered from areas that do not meet the preset membrane pore size, shortening the aerosol particle movement time and thus increasing the aerosol particle penetration rate of the membrane. By analyzing the interrelated relationships between the filtration impact values, the effect of improving the aerosol particle filtration qualification is achieved, thereby achieving an improvement in the accuracy of the aerosol particle spectrum characteristic analysis due to the electrostatic interference of the filter membrane.

[0041] In summary, if the proportion of aerosol particles increases, more aerosol particles will pass through as the aerosol particles increase, which will lead to an increase in the proportion of aerosol particle penetration rate of the filter membrane. If the proportion of filter membrane pressure difference is larger, aerosol particles will easily deposit on the surface of the filter membrane, causing the pores of the filter membrane to be blocked, thereby increasing the pressure difference of the filter membrane and forming new pores, which will increase the aerosol particle penetration rate and increase the proportion of aerosol particle penetration rate of the filter membrane.

[0042] Furthermore, the specific process of judging whether to perform aerosol particle filtration optimization based on the filtration qualification condition is as follows: judging whether the filtration qualification condition is met based on the monitored aerosol particle filtration qualification value; the filtration qualification condition indicates that the aerosol particle filtration qualification value is greater than the preset aerosol particle filtration qualification value; if the monitored aerosol particle filtration qualification value meets the filtration qualification condition, the corresponding aerosol particles are marked as qualified aerosol particles, and based on the obtained qualified aerosol particles, aerosol particle spectrum pre-assessment is performed; qualified aerosol particles represent samples of aerosol particles corresponding to qualified aerosol particles; if the monitored aerosol particle filtration qualification value does not meet the filtration qualification condition, aerosol particle filtration optimization is performed.

[0043] In this embodiment, by real-time monitoring of the aerosol particle filtration pass value and comparing it with the preset aerosol particle filtration pass value, the pass degree of aerosol particle filtration can be effectively evaluated, the integrity of the aerosol particles can be avoided from being disturbed, and the aerosol particle size distribution ratio can be ensured to be not disturbed, thereby improving the passivity of the aerosol particles and further achieving an improvement in the accuracy of the aerosol particle spectrum feature analysis.

[0044] Furthermore, a membrane filter step operation is performed; performing a membrane filter step operation means sending a prompt to a preset person, and using the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value as a standard, the membrane filter pore size is gradually reduced by the corresponding preset multiple; performing a membrane filter step operation also includes performing a guide plate operation and performing an aerosol flow rate operation; performing a guide plate operation means sending a prompt to a preset person to set the guide plate device; performing an aerosol flow rate operation means sending a prompt to a preset person, and using the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value as a standard, the aerosol particle flow rate is gradually reduced by the corresponding preset multiple; if the aerosol particle filtration qualified value re-obtained after the membrane filter step operation meets the filtration qualified conditions, and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, the corresponding aerosol particles are marked as qualified aerosol particles, and an aerosol particle spectrum pre-assessment is performed based on the obtained qualified aerosol particles, otherwise, an alarm is sent to the preset person.

[0045] In this embodiment, the multiple relationship between the aerosol particle filtration qualified value obtained from the database and the preset aerosol particle filtration qualified value is used as a standard, and the filter membrane pore size is gradually reduced by the corresponding preset multiple. If the aerosol particle filtration qualified value obtained again after the filter membrane step operation meets the filtration qualified condition, and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, wherein the aerosol particle concentration at the preset filter membrane center of gravity at the preset filtration time point is monitored by a β-ray absorption method monitor, and is used as the aerosol particle concentration, then the filter membrane step operation is stopped; the filter membrane step operation is used to reduce the filtration resistance to improve the qualification of aerosol particle filtration, and can also make each layer of filter membrane operate stably to improve the quality of aerosol particle filtration by the filter membrane, thereby improving the accuracy of aerosol particle filtration; monitoring the aerosol particle concentration is used to ensure the optimization process of aerosol particle filtration. The accuracy of aerosol particle filtration qualification; using the multiple relationship between the aerosol particle filtration qualification value obtained from the database and the preset aerosol particle filtration qualification value as the standard, the aerosol particle flow rate is reduced step by step with the corresponding preset multiples. If the aerosol particle filtration qualification value obtained again after the filter membrane step operation meets the filtration qualification conditions, and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, the aerosol flow rate operation is stopped; the sampling rate operation is used to reduce the pressure of aerosol particles on the filter membrane surface, ensure the stability of the aerosol particle filtration process to improve the qualification of aerosol particle filtration, and perform the guide plate operation to make the aerosol particles pass through the filter membrane evenly, reduce the impact force of the aerosol particles on the filter membrane, and thereby improve the qualification of the aerosol particle filtration, thereby achieving the improvement of the accuracy of aerosol particle spectrum characteristic analysis due to the electrostatic interference of the filter membrane.

[0046] Furthermore, the specific process of performing aerosol particle spectrum pre-assessment is as follows: obtaining the aerosol particle size distribution ratio deviation value; the aerosol particle size distribution ratio deviation value is used to reflect the accuracy of the aerosol particle spectrum pre-assessment; the aerosol particle size distribution ratio deviation value is represented by the absolute value corresponding to the difference between the monitored aerosol particle size distribution ratio and the preset aerosol particle size distribution ratio; wherein, the aerosol particle size distribution ratio of each preset filter membrane monitoring point in the preset time period is directly monitored by the laser particle size analyzer, and the corresponding average value is used as the aerosol particle size distribution ratio. The preset aerosol particle size distribution ratio is represented by the average value of the aerosol particle size distribution ratio in the historical time period; based on the aerosol particle size distribution ratio deviation value, it is judged whether the spectrum feature pre-assessment qualification condition is met; the spectrum feature pre-assessment qualification condition indicates that the aerosol particle size distribution ratio deviation value is not greater than the preset aerosol particle size distribution ratio deviation value; if the monitored aerosol particle size distribution ratio deviation value meets the spectrum feature pre-assessment qualification condition, the electron microscope electron beam interference assessment is performed; if the monitored aerosol particle size distribution ratio deviation value does not meet ... If the pre-assessment conditions are met, the spectrum feature initial assessment optimization is performed; the specific process of the spectrum feature initial assessment optimization is as follows: perform humidification treatment; perform humidification treatment means sending a prompt to the preset personnel to obtain the aerosol particle size distribution ratio deviation value from the database and the multiple relationship of the preset aerosol particle size distribution ratio deviation value as the standard, and gradually increase the water pump speed with the corresponding preset multiples; perform humidification treatment to increase the conductivity of aerosol particles to improve the accuracy of aerosol particle spectrum pre-assessment; if the aerosol particle size distribution ratio deviation value re-obtained after humidification treatment meets the requirements of the pre-assessment conditions; if the aerosol particle size distribution ratio deviation value re-obtained after humidification treatment meets the requirements of the pre-assessment conditions, the water pump speed will be gradually increased with the corresponding preset multiples; perform humidification treatment to increase the conductivity of aerosol particles to improve the accuracy of aerosol particle spectrum pre-assessment ... If the spectral feature pre-evaluation qualification conditions are met, the electron microscope electron beam interference evaluation is performed, otherwise, an alarm is sent to the preset personnel; the qualified aerosol particles that meet the spectral feature pre-evaluation qualification conditions are marked as qualified samples; a pre-evaluation judgment is performed; the pre-evaluation judgment means that after the initial spectral feature evaluation is optimized, the aerosol particle size distribution ratio deviation value is re-judged whether it meets the spectral feature pre-evaluation qualification conditions; if the re-acquired aerosol particle size distribution ratio deviation value meets the spectral feature pre-evaluation qualification conditions, the electron microscope electron beam interference evaluation is performed, otherwise, an alarm is sent to the preset personnel.

[0047] In this embodiment, by real-time monitoring of the aerosol particle size distribution ratio deviation value and comparing it with the preset aerosol particle size distribution ratio deviation value, the accuracy of the aerosol particle spectrum pre-assessment can be ensured, and the aerosol particle spectrum characteristics can be avoided from being disturbed, thereby improving the accuracy of the aerosol particle spectrum pre-assessment; by using the multiple relationship between the aerosol particle size distribution ratio deviation value obtained from the database and the preset aerosol particle size distribution ratio deviation value as a standard, the water pump speed is increased step by step with the corresponding preset multiples. If the aerosol particle size distribution ratio deviation value re-obtained after humidification treatment meets the spectrum characteristic pre-assessment qualification condition, the humidification treatment is stopped; the humidification treatment is used to increase the water dosage, thereby increasing the conductivity of the aerosol particles, and then the surface charge of the aerosol particles is neutralized by water, reducing electrostatic adsorption, thereby improving the accuracy of the aerosol particle spectrum pre-assessment, and thus achieving the improvement of the accuracy of the aerosol particle spectrum characteristic analysis due to the electrostatic interference of the filter membrane.

[0048] Furthermore, the specific process of performing the electron microscope electron beam interference evaluation is as follows: obtaining the electron microscope electron beam interference value; the electron microscope electron beam interference value is represented by the absolute value corresponding to the difference between the preset electron microscope electron beam energy and the preset electron beam energy during the preset irradiation time period monitored by the acceleration voltmeter; the preset irradiation time period represents the preset time period corresponding to the execution of the electron microscope electron beam interference evaluation; the electron microscope electron beam interference value is used to reflect the degree of interference of the electron microscope electron beam on the aerosol particle spectrum characteristic analysis; based on the monitored electron microscope electron beam interference value, it is judged whether the electron microscope qualification conditions are met; the electron microscope qualification conditions indicate that the electron microscope electron beam interference value is not greater than the preset electron microscope electron beam interference value; if the monitored electron microscope electron beam interference value meets the electron microscope qualification conditions, a qualified prompt is sent, the aerosol particle spectrum is obtained and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed; if the monitored electron microscope electron beam interference value does not meet the electron microscope qualification conditions, electron microscope electron beam interference optimization is performed.

[0049] In this embodiment, by real-time monitoring of the electron microscope electron beam interference value and comparative analysis with the preset electron microscope electron beam interference value, it is helpful to evaluate the degree of interference of the electron microscope electron beam on the aerosol particle spectrum characteristic analysis, avoid the interference of the electron microscope electron beam on the aerosol particle size distribution, ensure the stability of the aerosol particle spectrum density analysis, thereby improving the anti-interference ability of the aerosol particle spectrum density analysis, and further achieving the improvement of the accuracy of the aerosol particle spectrum characteristic analysis due to the electrostatic interference of the filter membrane.

[0050] Furthermore, the specific process of optimizing the electron microscope electron beam interference is as follows: performing an acceleration voltage reduction operation; performing an acceleration voltage reduction operation means sending a prompt to a preset person, and using the multiple relationship between the electron microscope electron beam interference value obtained from the database and the preset electron microscope electron beam interference value as a standard, reducing the acceleration voltage of the electron microscope step by step with the corresponding preset multiple; performing an acceleration voltage reduction operation also includes performing an irradiation time reduction operation; performing an irradiation time reduction operation means sending a prompt to a preset person, and using the multiple relationship between the electron microscope electron beam interference value obtained from the database and the preset electron microscope electron beam interference value as a standard, shortening the irradiation time step by step with the corresponding preset multiple; the irradiation time is greater than the preset minimum irradiation time; wherein, the electron beam of the electron microscope in the preset time period is monitored by an electron beam oscilloscope. The irradiation time is used as the preset minimum irradiation time. If the electron microscope electron beam interference value obtained after the acceleration voltage reduction operation meets the electron microscope qualification conditions, and the monitored irradiation time is greater than the preset minimum irradiation time, a qualified prompt is sent, the aerosol particle spectrum is obtained, and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed; the electron microscope electron beam judgment is performed; the electron microscope electron beam judgment means that after the electron microscope electron beam interference optimization is performed, the electron microscope electron beam interference value is re-judged to determine whether it meets the electron microscope qualification conditions; if the electron microscope electron beam interference value obtained after the electron microscope electron beam judgment meets the electron microscope qualification conditions, a qualified prompt is sent, the aerosol particle spectrum is obtained, and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed, otherwise, an alarm is sent to the preset personnel.

[0051] In this embodiment, the multiple relationship between the electron microscope electron beam interference value obtained from the database and the preset electron microscope electron beam interference value is used as a standard, and the irradiation time is shortened step by step with the corresponding preset multiples. If the electron microscope electron beam interference value obtained again after the acceleration voltage reduction operation meets the electron microscope qualification conditions, the acceleration voltage reduction operation is stopped; the acceleration voltage reduction operation is used to reduce the penetration and damage of the electron microscope electron beam to qualified aerosol particles so as to reduce the interference of the electron microscope electron beam to the aerosol particle spectrum characteristic analysis; the irradiation time shortening operation is used to reduce the interference of the electron microscope electron beam to qualified samples, thereby reducing the interference of the electron microscope electron beam to the aerosol particle spectrum characteristic analysis, thereby achieving the improvement of the accuracy of the aerosol particle spectrum characteristic analysis due to the existence of electrostatic interference of the filter membrane.

[0052] Furthermore, after the electron microscope electron beam interference assessment is qualified, the aerosol particle spectrum characteristic analysis accuracy assessment is performed to quantitatively evaluate the accuracy of the aerosol particle spectrum characteristic analysis. The specific process is as follows: After analyzing the ratio of the preset particle surface charge to the particle surface charge, a weighted analysis is performed in combination with the density deviation rate to obtain the particle surface charge deviation value, which is used to reflect the impact of the particle surface charge on the accuracy of the aerosol particle spectrum characteristic analysis during the preset analysis time period. Specifically, the expression of the particle surface charge deviation value is: , Indicates the The particle surface charge deviation value for a preset analysis time period, Indicates the The particle surface charge during a preset analysis period, Indicates the preset particle surface charge, represents the density deviation rate, , Indicates the number of the preset analysis time period, Represents the total number of preset analysis time periods; a preset analysis time period represents the preset time period corresponding to the accuracy assessment of aerosol particle spectrum characteristic analysis, and the preset point charge on the surface of the aerosol particles of the preset qualified samples in the preset analysis time period is monitored by the Faraday cup charge analyzer and is used as the particle surface charge.

[0053] After performing a ratio analysis on the preset charge distribution ratio and the charge distribution ratio, a weighted analysis is performed in combination with the distribution deviation rate to obtain the charge distribution ratio deviation value, which is used to reflect the impact of the charge distribution ratio on the accuracy of aerosol particle spectrum feature analysis during the preset analysis time period. Specifically, the expression of the charge distribution ratio deviation value is: , Indicates the The charge distribution ratio deviation value of a preset analysis time period, Indicates the The charge distribution ratio of a preset analysis time period, Indicates the preset charge distribution ratio, It represents the distribution deviation rate. The charge distribution ratio of aerosol particles of preset qualified samples in a preset analysis time period is monitored by an electrostatic low-pressure impactor, and its average value is taken as the charge distribution ratio.

[0054] After performing a ratio analysis on the preset electron microscope electron beam interference value and the electron microscope electron beam interference value, a weighted analysis is performed in combination with the interference deviation rate to obtain the electron microscope electron beam interference deviation value, which is used to reflect the influence of the electron microscope electron beam interference value on the accuracy of aerosol particle spectrum characteristic analysis in the preset analysis time period. Specifically, the expression of the electron microscope electron beam interference deviation value is: , Indicates the The electron microscope electron beam interference deviation value for a preset analysis time period, Indicates the The electron microscope electron beam interference value for a preset analysis time period, Indicates the preset electron microscope electron beam interference value, It represents the interference deviation rate. The electron microscope electron beam interference value of the preset qualified samples in the preset analysis time period is monitored by a condensation particle counter, and the average value is taken as the electron microscope electron beam interference value.

[0055] The obtained spectral feature analysis deviation value is multi-dimensionally coupled to obtain the spectral feature analysis accurate value.

[0056] The accurate value of the spectrum feature analysis is obtained by the following method:

[0057] ;

[0058] Where, Indicates the Accurate value of spectrum characteristic analysis for a preset analysis time period;

[0059] It should be added that the spectral feature analysis accuracy value is used to reflect the comprehensive influence of the spectral feature analysis interference value in the preset analysis time period and the preset spectral feature analysis interference value on the accuracy of the aerosol particle spectral feature analysis; the spectral feature analysis deviation value includes: particle surface charge deviation value, charge distribution ratio deviation value and electron microscope electron beam interference deviation value, and the spectral feature analysis deviation values ​​all consider the case where they are greater than 0; the spectral feature analysis interference value includes: particle surface charge, charge distribution ratio and electron microscope electron beam interference value; the preset spectral feature analysis interference value includes: preset particle surface charge, preset charge distribution ratio and preset electron microscope electron beam interference value, and the analysis deviation rate includes: density deviation rate, distribution deviation rate and interference deviation rate.

[0060] Among them, the preset particle surface charge is represented by the average value of the particle surface charge in the historical time period; the preset charge distribution ratio is represented by the average value of the charge distribution ratio in the historical time period; among them, the units of the preset particle surface charge and the particle surface charge are both kilograms per cubic meter, the preset charge distribution ratio and the charge distribution ratio are both unitless, and the units of the preset electron microscope electron beam interference value and the electron microscope electron beam interference value are both joules.

[0061] It should be added that the present embodiment provides a set of mapping sets extracted from a database, and the mapping relationship in the mapping set can be a one-to-one mapping or a many-to-one mapping. The mapping set contains the mapping relationship between the spectral feature analysis interference value and the corresponding analysis deviation rate, and the mapping set is obtained from the database. By inputting the spectral feature analysis interference value monitored in real time into the mapping set, the corresponding analysis deviation rate can be obtained, wherein the mapping set is constructed by preset personnel after matching the spectral feature analysis interference value with the analysis deviation rate one by one through a preset mapping relationship; in this embodiment, the value range of the analysis deviation rate is 0 to 1.

[0062] In this embodiment, the spectral feature analysis interference value is analyzed for the accuracy of the aerosol particle spectral feature analysis to obtain a spectral feature analysis deviation value; a larger electron microscope electron beam interference deviation value means that the electron microscope electron beam interference value has a stronger effect on the accuracy of the aerosol particle spectral feature analysis, resulting in a larger spectral feature analysis accuracy value; a larger particle surface charge deviation value means that the particle surface charge has a stronger effect on the accuracy of the aerosol particle spectral feature analysis, resulting in a larger spectral feature analysis accuracy value; a larger charge distribution ratio deviation value means that the charge distribution ratio has a stronger effect on the accuracy of the aerosol particle spectral feature analysis, resulting in a larger spectral feature analysis accuracy value; in summary, the spectral feature analysis deviation value is positively correlated with the spectral feature analysis accuracy value.

[0063] In this embodiment, the spectral feature analysis interference value does not exist independently, but is interrelated and requires comprehensive analysis. The increase in the surface charge of the particles increases the electric field strength of the aerosol particles. When the electron microscope electron beam approaches the aerosol particles, it will be affected by the Coulomb force, resulting in an increase in the range of the electron microscope electron beam, thereby increasing the electron microscope electron beam interference value and the charge distribution ratio. Since the electron microscope electron beam is subjected to Coulomb forces of different angles and intensities when passing through, the electron microscope electron beam path changes, thereby increasing the electron microscope electron beam interference value. By analyzing the interrelationships between the spectral feature analysis interference values, the stability of the aerosol particle spectral feature analysis is improved, thereby achieving an improvement in the accuracy of the aerosol particle spectral feature analysis.

[0064] In summary, the electron microscope electron beam interference deviation value increases, because the electron microscope electron beam irradiation will cause the charge on the surface of qualified samples to increase, thereby causing the aerosol particle surface charge deviation value to increase, and the charge distribution ratio deviation value to increase. Since the charge of aerosol particles is concentrated on the aerosol particle surface, a tip effect will be produced. When the electron microscope electron beam approaches the aerosol particle surface, it will be scattered due to the Coulomb force, resulting in an increase in the electron microscope electron beam interference deviation value.

[0065] Furthermore, the specific process of judging whether to perform aerosol particle spectrum feature analysis optimization based on the spectrum feature analysis qualification condition is as follows: judging whether the spectrum feature analysis qualification condition is met based on the monitored spectrum feature analysis accuracy value; the spectrum feature analysis qualification condition indicates that the monitored spectrum feature analysis accuracy value is greater than the preset spectrum feature analysis accuracy value; if the monitored spectrum feature analysis accuracy value meets the spectrum feature analysis qualification condition, a qualified prompt is sent; if the monitored spectrum feature analysis accuracy value does not meet the spectrum feature analysis qualification condition, aerosol particle spectrum feature analysis optimization is performed; the specific process of performing aerosol particle spectrum feature analysis optimization is as follows: the first step is to perform a dilution operation; performing a dilution operation means sending a prompt to the preset personnel by obtaining the spectrum feature analysis accuracy value from the database and the preset spectrum feature analysis accuracy value by a multiple relationship of Standard, reducing the particle concentration step by step with the corresponding preset multiples; performing the dilution operation also includes monitoring the residence time; monitoring the residence time means monitoring the residence time of aerosol particles in the aerosol diluter; if the accurate value of the spectral feature analysis re-obtained after the dilution operation meets the qualified conditions of the spectral feature analysis, a qualified prompt is sent, otherwise, proceed to the second step; the second step is to adjust the voltage operation; performing the voltage adjustment operation means sending a prompt to the preset personnel, using the multiple relationship between the accurate value of the spectral feature analysis obtained from the database and the preset accurate value of the spectral feature analysis as a standard, and gradually reducing the angle of the charger voltage adjustment knob with the corresponding preset multiples; if the accurate value of the spectral feature analysis re-obtained after the voltage adjustment operation meets the qualified conditions of the spectral feature analysis, a qualified prompt is sent, otherwise, an alarm is sent to the preset personnel.

[0066] In this embodiment, by comparing and analyzing the accurate value of the spectrum characteristic analysis with the preset accurate value of the spectrum characteristic analysis in real time, the accuracy of the aerosol particle spectrum characteristic analysis can be ensured, the interference of electrostatic effects on the aerosol particle spectrum characteristic analysis can be avoided, and the timeliness of the aerosol particle spectrum density analysis can be improved, thereby improving the accuracy of the aerosol particle spectrum density analysis. By using the multiple relationship between the accurate value of the spectrum characteristic analysis obtained from the database and the preset accurate value of the spectrum characteristic analysis as a standard, the particle concentration is gradually reduced with the corresponding preset multiples. If the accurate value of the spectrum characteristic analysis re-obtained after the dilution operation meets the qualified conditions of the spectrum characteristic analysis, the dilution operation is stopped; the monitoring residence time is used to determine the shortest effective dilution time to achieve improved accuracy of the aerosol particle spectrum characteristic analysis; the dilution operation is performed to reduce Low aerosol particle concentration is used to improve the accuracy of aerosol particle spectrum feature analysis; the accuracy of aerosol particle spectrum feature analysis can be reflected by performing a dilution operation; the multiple relationship between the spectrum feature analysis accuracy value obtained from the database and the preset spectrum feature analysis accuracy value is used as a standard. If the spectrum feature analysis accuracy value re-obtained after the voltage adjustment operation meets the spectrum feature analysis qualification conditions, the voltage adjustment operation is stopped; the voltage adjustment operation is used to reduce the electrode voltage to avoid the charge distribution ratio deviating from the preset value due to high voltage, thereby achieving an improvement in the accuracy of aerosol particle spectrum feature analysis; the voltage adjustment operation can reflect the accuracy of aerosol particle spectrum feature analysis, thereby achieving an improvement in the accuracy of aerosol particle spectrum feature analysis due to the electrostatic interference of the filter membrane.

[0067] Furthermore, there are an aerosol particle filtration evaluation module, an aerosol particle spectrum pre-evaluation module, an electron microscope electron beam interference evaluation module and an aerosol particle spectrum feature analysis accuracy evaluation module; the aerosol particle filtration evaluation module is used to perform aerosol particle filtration evaluation during the aerosol particle filtration process to quantitatively evaluate the degree of qualification of the aerosol particle filtration, and to determine whether to perform aerosol particle filtration optimization based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; the aerosol particle spectrum pre-evaluation module is used to perform aerosol particle spectrum pre-evaluation after the aerosol particle filtration evaluation is qualified to quantitatively evaluate the accuracy of the aerosol particle spectrum pre-evaluation, and to determine whether to perform spectrum feature initial evaluation optimization based on the spectrum feature pre-evaluation qualification conditions. The spectrum feature initial evaluation optimization is used to improve the aerosol particle filtration quality. The accuracy of the colloidal particle spectrum pre-assessment; the electron microscope electron beam interference assessment module is used to perform the electron microscope electron beam interference assessment to quantitatively assess the degree of interference of the electron microscope electron beam after the aerosol particle spectrum pre-assessment is qualified, and to determine whether to perform electron microscope electron beam interference optimization based on the electron microscope qualified conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference ability of the aerosol particle spectrum characteristic analysis; the aerosol particle spectrum characteristic analysis accuracy assessment module is used to perform the aerosol particle spectrum characteristic analysis accuracy assessment to quantitatively assess the accuracy of the aerosol particle spectrum characteristic analysis after the electron microscope electron beam interference assessment is qualified, and to determine whether to perform aerosol particle spectrum characteristic analysis optimization based on the spectrum characteristic analysis qualified conditions. The aerosol particle spectrum characteristic analysis optimization is used to improve the accuracy of the aerosol particle spectrum characteristic analysis.

[0068] In this embodiment, if Figure 6As shown, it is a system flow chart of an aerosol particle spectrum characteristic analysis system based on an electron microscope provided in an embodiment of the present application. The aerosol particle filtration evaluation module, the aerosol particle spectrum pre-evaluation module, the electron microscope electron beam interference evaluation module and the aerosol particle spectrum characteristic analysis accuracy evaluation module are interconnected. The aerosol particle filtration evaluation module is used to determine whether to perform aerosol particle filtration optimization. If the monitored aerosol particle filtration qualified value does not meet the filtration qualified condition, the aerosol particle filtration is optimized; then the aerosol particle spectrum pre-evaluation module is used to determine whether to perform spectrum characteristic initial evaluation optimization. If the monitored aerosol particle size distribution ratio deviation value does not meet the spectrum characteristic, the aerosol particle filtration is optimized. If the pre-assessment qualification conditions are met, the initial spectral feature evaluation and optimization are carried out; secondly, the electron microscope electron beam interference evaluation module is used to determine whether the electron microscope electron beam interference optimization is to be carried out. If the monitored electron microscope electron beam interference value does not meet the electron microscope qualification conditions, the electron microscope electron beam interference optimization is to be carried out; finally, the aerosol particle spectrum feature analysis accuracy evaluation module is used to determine whether the aerosol particle spectrum feature analysis optimization is to be carried out. If the monitored spectrum feature analysis accuracy value does not meet the spectrum feature analysis qualification conditions, the aerosol particle spectrum feature analysis optimization is to be carried out, thereby achieving the improvement of the accuracy of the aerosol particle spectrum feature analysis due to the existence of filter membrane electrostatic interference.

[0069] In summary, by performing aerosol particle filtration evaluation and determining whether to perform aerosol particle filtration optimization during the aerosol particle filtration process, then performing aerosol particle spectrum pre-evaluation and determining whether to perform spectrum feature initial evaluation optimization, then performing electron microscope electron beam interference evaluation and determining whether to perform electron microscope electron beam interference optimization, and finally performing aerosol particle spectrum feature analysis accuracy evaluation and determining whether to perform aerosol particle spectrum feature analysis optimization, the stability of aerosol particle spectrum feature analysis is enhanced, thereby achieving the effect of improving the accuracy of aerosol particle spectrum feature analysis, and solving the problem of low accuracy of aerosol particle spectrum feature analysis due to electrostatic interference of the filter membrane in the prior art.

[0070] Those skilled in the art will appreciate that embodiments of the present invention may be provided as methods, systems, or computer program products. Thus, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to magnetic disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0071] The present invention is described with reference to flowcharts and / or block diagrams of methods, devices (systems), and computer program products according to embodiments of the present invention. It should be understood that each process and / or block in the flowcharts and / or block diagrams, as well as combinations of processes and / or blocks in the flowcharts and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowcharts and / or block diagrams. Figure 1 a process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0072] These computer program instructions may also be stored in a computer readable memory that can direct a computer or other programmable data processing device to work in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 a process or multiple processes and / or boxes Figure 1 The function specified in one or more boxes.

[0073] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operational steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing the instructions executed on the computer or other programmable device for implementing the process. Figure 1 a process or multiple processes and / or boxes Figure 1 The steps for the function specified in one or more boxes.

[0074] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0075] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. A method for analyzing aerosol particle spectrum characteristics based on an electron microscope, characterized in that: The following steps are involved: During the aerosol particle filtration process, performing an aerosol particle filtration evaluation to quantitatively evaluate the degree of aerosol particle filtration qualification, and determining whether to perform aerosol particle filtration optimization based on the filtration qualification conditions, wherein the aerosol particle filtration optimization is used to improve the aerosol particle filtration qualification during the aerosol particle filtration process; After the aerosol particle filtration assessment is qualified, an aerosol particle spectrum pre-assessment is performed to quantitatively assess the accuracy of the aerosol particle spectrum pre-assessment. Based on the qualified conditions of the spectrum feature pre-assessment, it is determined whether to perform the spectrum feature initial assessment optimization. The spectrum feature initial assessment optimization is used to improve the accuracy of the aerosol particle spectrum pre-assessment. After the aerosol particle spectrum pre-assessment is qualified, an electron microscope electron beam interference assessment is performed to quantitatively assess the degree of interference of the electron microscope electron beam. Based on the electron microscope qualification conditions, it is determined whether to perform electron microscope electron beam interference optimization. The electron microscope electron beam interference optimization is used to improve the anti-interference performance of the aerosol particle spectrum feature analysis. After the electron microscope electron beam interference assessment is qualified, the aerosol particle spectrum characteristic analysis accuracy assessment is performed to quantitatively assess the accuracy of the aerosol particle spectrum characteristic analysis. Based on the spectrum characteristic analysis qualification conditions, it is determined whether to perform aerosol particle spectrum characteristic analysis optimization, and the aerosol particle spectrum characteristic analysis optimization is used to improve the accuracy of the aerosol particle spectrum characteristic analysis.

2. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 1, characterized in that: During the aerosol particle filtration process, an aerosol particle filtration evaluation is performed to quantitatively evaluate the degree of aerosol particle filtration qualification. The specific process is as follows: After analyzing the ratio of the filter membrane aerosol particle penetration rate to the preset filter membrane aerosol particle penetration rate, a weighted analysis is performed in combination with the penetration influence rate to obtain the filter membrane aerosol particle penetration rate ratio value, which is used to reflect the impact of the filter membrane aerosol particle penetration rate in the preset filtration time period on the qualified degree of aerosol particle filtration; After analyzing the proportion of aerosol particle amount and the preset aerosol particle amount, a weighted analysis is performed in combination with the speed influence rate to obtain the aerosol particle amount proportion value, which is used to reflect the influence of the aerosol particle amount in the preset filtration time period on the qualified degree of aerosol particle filtration; After analyzing the proportion of the preset membrane pressure difference and the change in the membrane pressure difference, a weighted analysis is performed in combination with the pressure influence rate to obtain the membrane pressure difference proportion value, which is used to reflect the influence of the membrane pressure difference in the preset filtration time period on the qualified degree of aerosol particle filtration; The obtained filtration ratio values ​​are multi-dimensionally coupled to obtain the qualified value of aerosol particle filtration; The aerosol particle filtration qualified value is used to reflect the comprehensive impact of the filtration impact value and the preset filtration impact value on the qualified degree of aerosol particle filtration; The filtration ratio values ​​include: the filter membrane aerosol particle penetration ratio value, the aerosol particle amount ratio value and the filter membrane pressure difference ratio value.

3. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 2, characterized in that: The specific process of determining whether to perform aerosol particle filtration optimization based on the filtration qualification conditions is as follows: Determine whether the filtration qualification conditions are met based on the monitored aerosol particle filtration qualification value; The qualified filtration condition indicates that the qualified aerosol particle filtration value is greater than the preset qualified aerosol particle filtration value; If the monitored aerosol particle filtration qualified value meets the filtration qualified condition, the corresponding aerosol particles are marked as qualified aerosol particles, and the aerosol particle spectrum pre-assessment is performed based on the obtained qualified aerosol particles; If the monitored aerosol particle filtration qualified value does not meet the filtration qualified conditions, aerosol particle filtration optimization is performed.

4. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 3, characterized in that: The specific process of aerosol particle filtration optimization is as follows: Perform membrane step operation; The step-by-step operation of the filter membrane means sending a prompt to a preset person to gradually reduce the pore size of the filter membrane; The membrane step operation further includes guide plate operation and aerosol flow rate operation; The said performing the deflector operation means sending a prompt to a preset person to set the deflector device; The aerosol flow rate operation means sending a prompt to a preset person to reduce the aerosol particle flow rate step by step; If the aerosol particle filtration qualified value re-obtained after aerosol particle filtration optimization meets the filtration qualified conditions, and the monitored aerosol particle concentration is greater than the preset minimum aerosol particle concentration, the corresponding aerosol particles will be marked as qualified aerosol particles, and based on the obtained qualified aerosol particles, an aerosol particle spectrum pre-assessment will be performed. Otherwise, an alarm will be sent to the preset personnel.

5. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 1, characterized in that: The specific process of performing the aerosol particle spectrum pre-assessment is as follows: Obtain the aerosol particle size distribution ratio deviation value; The aerosol particle size distribution ratio deviation value is used to reflect the accuracy of the aerosol particle spectrum pre-assessment; Determine whether the spectral feature pre-assessment qualification conditions are met based on the aerosol particle size distribution ratio deviation value; The spectral feature pre-assessment qualification condition indicates that the aerosol particle size distribution ratio deviation value is not greater than a preset aerosol particle size distribution ratio deviation value; If the monitored aerosol particle size distribution ratio deviation value meets the spectral feature pre-assessment qualification conditions, the electron microscope electron beam interference assessment is performed; If the deviation value of the monitored aerosol particle size distribution ratio does not meet the spectral feature pre-assessment qualification conditions, the spectral feature initial assessment optimization is performed; The specific process of the initial evaluation and optimization of the spectral features is as follows: Perform humidification treatment; The humidification process is performed by sending a reminder to a preset person based on the relationship between the aerosol particle size distribution ratio deviation value obtained from the database and the preset aerosol particle size distribution ratio deviation value, and gradually increasing the water pump speed by the corresponding preset multiples; If the aerosol particle size distribution ratio deviation value re-obtained after humidification meets the spectral feature pre-assessment qualification conditions, an electron microscope electron beam interference assessment is performed; otherwise, an alarm is sent to the preset personnel; The qualified aerosol particles that meet the spectral feature pre-evaluation qualification conditions are marked as qualified samples; Conduct preliminary assessments; The pre-evaluation judgment means re-judging whether the aerosol particle size distribution ratio deviation value meets the pre-evaluation qualification conditions of the spectrum characteristics after the initial evaluation and optimization of the spectrum characteristics; If the recovered aerosol particle size distribution ratio deviation value meets the spectral feature pre-assessment qualification conditions, the electron microscope electron beam interference assessment is performed; otherwise, an alarm is sent to the preset personnel.

6. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 1, characterized in that: The specific process of performing electron microscope electron beam interference evaluation is as follows: Obtain electron beam interference value of electron microscope; The electron microscope electron beam interference value is used to reflect the degree of interference of the electron microscope electron beam on the aerosol particle spectrum characteristic analysis; Determine whether the electron microscope meets the qualified conditions based on the monitored electron microscope electron beam interference value; The qualified condition of the electron microscope indicates that the electron beam interference value of the electron microscope is not greater than the preset electron beam interference value of the electron microscope; If the monitored electron microscope electron beam interference value meets the electron microscope qualification conditions, a qualified prompt is sent, the aerosol particle spectrum is obtained, and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed; If the monitored electron microscope electron beam interference value does not meet the electron microscope qualification conditions, the electron microscope electron beam interference optimization is performed.

7. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 6, characterized in that: The specific process of performing electron microscope electron beam interference optimization is as follows: Perform an operation to reduce the accelerating voltage; The operation of reducing the accelerating voltage means sending a prompt to a preset person to gradually reduce the accelerating voltage of the electron microscope; The operation of reducing the accelerating voltage also includes the operation of shortening the irradiation time; The operation of shortening the irradiation time means sending a prompt to a preset person to shorten the irradiation time step by step; If the electron microscope beam interference value reacquired after reducing the accelerating voltage meets the electron microscope qualification conditions, and the monitored irradiation time is greater than the preset minimum irradiation time, a qualified prompt is sent, the aerosol particle spectrum is obtained, and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed; Conduct electron microscope electron beam judgment; The performing of electron microscope electron beam judgment means re-judging the electron microscope electron beam interference value after performing electron microscope electron beam interference optimization to determine whether it meets the electron microscope qualification conditions; If the electron microscope electron beam interference value re-obtained after the electron microscope electron beam judgment meets the electron microscope qualification conditions, a qualified prompt is sent, the aerosol particle spectrum is obtained and the accuracy evaluation of the aerosol particle spectrum characteristic analysis is performed. Otherwise, an alarm is sent to the preset personnel.

8. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 1, characterized in that: After the electron microscope electron beam interference assessment is qualified, the aerosol particle spectrum feature analysis accuracy assessment is performed to quantitatively assess the accuracy of the aerosol particle spectrum feature analysis. The specific process is as follows: After analyzing the ratio of the preset particle surface charge to the particle surface charge, a weighted analysis is performed in combination with the density deviation rate to obtain the particle surface charge deviation value, which is used to reflect the impact of the particle surface charge on the accuracy of aerosol particle spectrum characteristic analysis during the preset analysis time period; After performing a ratio analysis on the preset charge distribution ratio and the charge distribution ratio, a weighted analysis is performed in combination with the distribution deviation rate to obtain the charge distribution ratio deviation value, which is used to reflect the impact of the charge distribution ratio on the accuracy of aerosol particle spectrum feature analysis during the preset analysis time period. After performing a ratio analysis on the preset electron microscope electron beam interference value and the electron microscope electron beam interference value, a weighted analysis is performed in combination with the interference deviation rate to obtain the electron microscope electron beam interference deviation value, which is used to reflect the impact of the electron microscope electron beam interference value on the accuracy of aerosol particle spectrum characteristic analysis during the preset analysis time period; The obtained spectrum feature analysis deviation value is multi-dimensionally coupled to obtain the spectrum feature analysis accurate value; The spectrum feature analysis accuracy value is used to reflect the combined influence of the spectrum feature analysis interference value in the preset analysis time period and the preset spectrum feature analysis interference value on the accuracy of the aerosol particle spectrum feature analysis; The spectrum feature analysis deviation values ​​include: particle surface charge deviation value, charge distribution ratio deviation value and electron microscope electron beam interference deviation value.

9. The method for analyzing aerosol particle spectrum characteristics based on an electron microscope according to claim 8, characterized in that: The specific process of determining whether to perform aerosol particle spectrum characteristic analysis optimization based on the spectrum characteristic analysis qualification condition is as follows: Determine whether the spectrum feature analysis qualification conditions are met based on the monitored spectrum feature analysis accuracy value; The spectrum feature analysis qualified condition indicates that the monitored spectrum feature analysis accuracy value is greater than the preset spectrum feature analysis accuracy value; If the monitored spectrum feature analysis accuracy value meets the spectrum feature analysis qualification condition, a qualified prompt is sent; If the monitored spectrum characteristic analysis accuracy value does not meet the spectrum characteristic analysis qualification conditions, the aerosol particle spectrum characteristic analysis optimization is performed; The specific process of performing aerosol particle spectrum characteristic analysis and optimization is as follows: The first step is to perform dilution operation; The dilution operation means reducing the particle concentration step by step by sending prompts to preset personnel; The dilution operation further includes monitoring the residence time; The monitoring residence time refers to the residence time of the monitored aerosol particles in the aerosol diluter; If the accurate value of the spectrum feature analysis re-obtained after the dilution operation meets the qualified condition of the spectrum feature analysis, a qualified prompt is sent; otherwise, the second step is performed; The second step is to adjust the voltage; The voltage adjustment operation is performed by sending a prompt to a preset person to gradually reduce the angle of the charger voltage adjustment knob; If the accurate value of the spectrum feature analysis reacquired after the voltage adjustment operation meets the spectrum feature analysis qualification conditions, a qualified prompt is sent; otherwise, an alarm is sent to the preset personnel.

10. An aerosol particle spectrum characteristic analysis system based on an electron microscope, characterized in that: It includes an aerosol particle filtration evaluation module, an aerosol particle spectrum pre-evaluation module, an electron microscope electron beam interference evaluation module, and an aerosol particle spectrum feature analysis accuracy evaluation module; The aerosol particle filtration evaluation module is used to perform aerosol particle filtration evaluation during the aerosol particle filtration process to quantitatively evaluate the degree of aerosol particle filtration qualification, and determine whether to perform aerosol particle filtration optimization based on the filtration qualification conditions. The aerosol particle filtration optimization is used to improve the qualification of aerosol particle filtration during the aerosol particle filtration process; The aerosol particle spectrum pre-assessment module is used to perform aerosol particle spectrum pre-assessment to quantitatively assess the accuracy of the aerosol particle spectrum pre-assessment after the aerosol particle filtration assessment is qualified, and to determine whether to perform spectrum feature preliminary assessment optimization based on the spectrum feature pre-assessment qualification conditions. The spectrum feature preliminary assessment optimization is used to improve the accuracy of the aerosol particle spectrum pre-assessment; The electron microscope electron beam interference assessment module is used to perform electron microscope electron beam interference assessment to quantitatively assess the degree of interference of the electron microscope electron beam after the aerosol particle spectrum pre-assessment is qualified, and to determine whether to perform electron microscope electron beam interference optimization based on the electron microscope qualification conditions. The electron microscope electron beam interference optimization is used to improve the anti-interference performance of the aerosol particle spectrum feature analysis; The aerosol particle spectrum characteristic analysis accuracy assessment module is used to perform aerosol particle spectrum characteristic analysis accuracy assessment to quantitatively assess the accuracy of aerosol particle spectrum characteristic analysis after the electron microscope electron beam interference assessment is qualified, and to determine whether to perform aerosol particle spectrum characteristic analysis optimization based on the spectrum characteristic analysis qualification conditions. The aerosol particle spectrum characteristic analysis optimization is used to improve the accuracy of aerosol particle spectrum characteristic analysis.

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