Deflection magnet and magnetic deflection device with same

Abstract

The invention discloses a deflection magnet and a magnetic deflection device with the same. A deflection magnet belongs to the technical field of magnetic deflection devices and comprises a magnet frame, a magnetic pole sheath and at least one magnet coil, and the magnet coil is at least partially mounted between the magnet frame and the magnetic pole sheath to prevent particles from directly impacting the magnet frame and the magnet coil. The heat of the magnetic pole sheath can be taken away when the sheath cooling medium flows through the sheath cooling flow path, and the heat of the magnet coil can be taken away when the coil cooling medium flows through the coil cooling flow path, so that the temperature of the magnetic pole sheath and the temperature of the magnet coil are reduced; therefore, the temperature of the magnet coil can be quickly reduced, and the heat dissipation efficiency of the magnet coil is improved.

Description

Technical Field

[0001] The present invention relates to the field of magnetic deflection devices, and more particularly, to a deflection magnet and a magnetic deflection device having the same. Background Art

[0002] Neutral beam injection (NBI) is one of the important components of the high-power auxiliary heating and current drive system for controlled nuclear fusion. The magnetic deflection device of the neutral beam injection system can be used to separate charged particles in the beam to obtain pure neutral particles.

[0003] In the related art, the magnetic deflection device uses the magnetic field generated after the coil of its deflection magnet is energized to deflect charged particles and separate them from neutral particles. After the coil is energized, a large amount of heat is generated, and particles are likely to hit the deflection magnet to generate heat, resulting in a high temperature of the deflection magnet and making it difficult to operate stably. Summary of the Invention

[0004] The present invention aims to solve at least to some extent the technical problem of the high temperature of the deflection magnet in the prior art. To this end, the present invention provides a deflection magnet that can quickly reduce the temperature of the deflection magnet.

[0005] The present invention also provides a magnetic deflection device having the above-mentioned deflection magnet.

[0006] According to an embodiment of the present invention, the deflection magnet includes: a magnet frame that defines a central channel; a pole piece sheath that is at least partially disposed in the central channel, the pole piece sheath defines a particle channel in the central channel, the pole piece sheath has a sheath cooling flow path, a first inlet, and a first outlet, and the first inlet is communicated with the first outlet through the sheath cooling flow path; at least one magnet coil that is at least partially installed between the magnet frame and the pole piece sheath, the magnet coil deflects charged particles passing through the particle channel after being energized, the magnet coil has a coil cooling flow path, a second inlet, and a second outlet, and the second inlet is communicated with the second outlet through the coil cooling flow path; wherein, the magnet coil includes: a plurality of coil units that form a series circuit, each of the coil units has a coil cooling branch, and a plurality of the coil cooling branches are connected in parallel between the second inlet and the second outlet to form the coil cooling flow path.

[0007] According to the deflection magnet of the embodiment of the present invention, the magnet coil is at least partially installed between the magnet frame and the pole shield, the pole shield can protect the magnet frame and the magnet coil to prevent particles from directly impacting the magnet frame and the magnet coil, the shield cooling medium can take away the heat of the pole shield when flowing through the shield cooling flow path, and the coil cooling medium can take away the heat of the magnet coil when flowing through the coil cooling flow path to reduce the temperature of the pole shield and the magnet coil, wherein the multiple coil units of the magnet coil all have coil cooling branches to form multiple parallel coil cooling branches, which can quickly reduce the temperature of the magnet coil and improve the heat dissipation efficiency of the magnet coil, thereby facilitating the stable and reliable operation of the deflection magnet.

[0008] According to some embodiments of the present invention, the coil unit includes: a hollow cable, an inlet connector and an outlet connector, the hollow cable is wound inside the magnet frame, two ends of the hollow cable are respectively connected to the inlet connector and the outlet connector to form the coil cooling branch, and the inlet connector and the outlet connector are passed through and fixed to the magnet frame.

[0009] According to some embodiments of the present invention, the magnet coil further comprises: a coil mounting box, wherein the coil mounting box is sandwiched between the magnet frame and the pole sheath, and at least a portion of the hollow cable is located within the coil mounting box.

[0010] According to some embodiments of the present invention, the magnet frame includes a top plate, a first side plate, a bottom plate, and a second side plate connected end to end in sequence, the top plate, the first side plate, the bottom plate, and the second side plate jointly define the middle channel, the first side plate and the second side plate are oppositely and parallelly arranged, and the top plate and the bottom plate are partially oppositely and non-parallel; the magnet coils are installed on the first side plate and the second side plate facing the inner side of the middle channel.

[0011] According to some embodiments of the present invention, the pole shield includes: an inner shield assembly, at least a portion of which is arranged inside the middle channel, and the inner shield assembly corresponds to the inner side of the top plate, the first side plate, the bottom plate and the second side plate toward the middle channel; an outer shield assembly, at least a portion of which is arranged outside the middle channel, and on the movement path of the particles, at least a portion of the outer shield assembly is arranged on the front side of the magnet frame, and the outer shield assembly corresponds to the front side of the top plate, the first side plate, the bottom plate, the second side plate and the magnet coil; a cooling medium supply pipe, the cooling medium supply pipe has the first inlet; a cooling medium return pipe, the cooling medium return pipe has the first outlet; wherein the inner shield assembly and the outer shield assembly each include a plurality of hollow pipes connected side by side, each of the hollow pipes being connected in parallel between the cooling medium supply pipe and the cooling medium return pipe.

[0012] According to some embodiments of the present invention, the outer surface of the hollow pipeline has a stepped surface. Among any two adjacent hollow pipelines arranged side by side, there is a gap between the stepped surfaces of the two in the side-by-side direction, and the stepped surfaces of the two are lap-connected in a direction perpendicular to the side-by-side direction.

[0013] According to some embodiments of the present invention, the magnetic pole sheath further includes: a bottom sheath assembly, the bottom sheath assembly is arranged on the inner side of the inner sheath assembly away from the magnet frame, and the bottom sheath assembly is located on one side of the inner sheath assembly close to the bottom plate and corresponds to the bottom plate. The bottom sheath assembly includes: a strengthened heat exchange plate, the strengthened heat exchange plate is provided with cooling grooves, the cooling grooves include a first cooling groove, a second cooling groove and a communication groove, the first cooling groove and the second cooling groove are arranged side by side, the same ends of the first cooling groove and the second cooling groove are communicated through the communication groove, a partition ridge is formed between the first cooling groove and the second cooling groove, and a deformation release groove is provided in the partition ridge; a heat exchange cover plate, the heat exchange cover plate covers the notch of the cooling groove, the heat exchange cover plate has a first cover plate inlet, a second cover plate inlet, a first cover plate outlet and a second cover plate outlet, the communication groove is communicated with the cooling medium supply pipe through the first cover plate inlet and the second cover plate inlet, one end of the first cooling groove away from the communication groove is communicated with the cooling medium return pipe through the first cover plate outlet, and one end of the second cooling groove away from the communication groove is communicated with the cooling medium return pipe through the second cover plate outlet.

[0014] According to some embodiments of the present invention, the notch of the cooling groove faces the bottom plate, and a plurality of auxiliary heat exchange grooves are provided at the bottom of the cooling groove.

[0015] According to some embodiments of the present invention, the inner sheath assembly includes: a first pipeline assembly, the first pipeline assembly includes a plurality of the hollow pipelines, and the first pipeline assembly corresponds to the inner side of the first side plate, a part of the inner side of the top plate and a part of the inner side of the bottom plate respectively; a second pipeline assembly, the second pipeline assembly includes a plurality of the hollow pipelines, and the second pipeline assembly corresponds to the inner side of the second side plate, another part of the inner side of the top plate and another part of the inner side of the bottom plate respectively.

[0016] A magnetic deflection device according to another embodiment of the present invention includes: a vacuum chamber having an installation space, a particle outlet, and a plurality of particle inlets, wherein the particle outlet and the plurality of particle inlets are both in communication with the installation space; a plurality of deflection magnets, which are the above-mentioned deflection magnets, each of the deflection magnets is disposed in the installation space, the plurality of deflection magnets correspond to the plurality of particle inlets one by one, and the particle channel of each of the deflection magnets is located between the particle outlet and the corresponding particle inlet.

[0017] In the magnetic deflection device according to the embodiment of the present invention, at least part of the magnet coil is installed between the magnet frame and the pole sheath. The pole sheath can protect the magnet frame and the magnet coil to prevent particles from directly hitting the magnet frame and the magnet coil. When the sheath cooling medium flows through the sheath cooling flow path, it can take away the heat of the pole sheath, and when the coil cooling medium flows through the coil cooling flow path, it can take away the heat of the magnet coil to reduce the temperature of the pole sheath and the magnet coil. Among them, each of the multiple coil units of the magnet coil has a coil cooling branch to form multiple parallel coil cooling branches, which can quickly reduce the temperature of the magnet coil and improve the heat dissipation efficiency of the magnet coil, thereby facilitating the stable and reliable operation of the magnetic deflection device.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0019] Figure 1 is a schematic diagram of a neutral beam injection system according to an embodiment of the present invention; Figure 2 is a schematic diagram of a deflection magnet according to an embodiment of the present invention; Figure 3 is a schematic diagram of a magnet frame according to an embodiment of the present invention; Figure 4 is a schematic diagram of a cooling medium supply pipe and a cooling medium return pipe according to an embodiment of the present invention; Figure 5 is a schematic diagram of multiple coil units connected together according to an embodiment of the present invention; Figure 6 is a schematic diagram of a magnet coil according to an embodiment of the present invention; Figure 7 is a schematic diagram of an inner sheath assembly, an outer sheath assembly, a bottom sheath assembly, and a top sheath assembly according to an embodiment of the present invention; Figure 8 is an exploded view of an inner sheath assembly, an outer sheath assembly, a bottom sheath assembly, and a top sheath assembly according to an embodiment of the present invention; Figure 9 is a cross-sectional view of a hollow pipeline according to an embodiment of the present invention; Figure 10 is an exploded view of the bottom sheath assembly according to an embodiment of the present invention; Figure 11 is Figure 10 an enlarged view at A; Figure 12 is a schematic internal structure diagram of the deflection magnet at the bottom sheath assembly according to an embodiment of the present invention; Figure 13 is a schematic diagram of a magnetic deflection device according to an embodiment of the present invention; Figure 14 is a schematic diagram of the bottom bracket according to an embodiment of the present invention; Figure 15 is a schematic diagram of the top bracket according to an embodiment of the present invention; Figure 16 is a schematic diagram of the water-cooled busbar, deflection magnet, top bracket and bottom bracket according to an embodiment of the present invention.

[0020] Reference numerals: Magnet frame 1; top plate 11; top plate through-hole 111; first side plate 12; lug 121; bottom plate 13; base 131; double plug hole 1311; second side plate 14; magnetic pole 15; middle channel 16; Magnetic pole sheath 2; inner sheath assembly 21; first pipeline assembly 211; second pipeline assembly 212; outer sheath assembly 22; cooling medium supply pipe 23; first inlet 231; cooling medium return pipe 24; first outlet 241; bottom sheath assembly 25; enhanced heat exchange plate 251; cooling groove 2511; first cooling groove 25111; second cooling groove 25112; communication groove 25113; auxiliary heat exchange groove 25114; heat exchange cover plate 252; first cover plate inlet 2521; second cover plate inlet 2522; first cover plate outlet 2523; second cover plate outlet 2524; top sheath assembly 26; particle channel 27; Magnet coil 3; coil unit 31; first coil unit 31a; second coil unit 31b; hollow cable 311; inlet joint 312; outlet joint 313; coil installation box 32; connecting bridge 33; fixing frame 34; Hollow pipeline 41; stepped surface 411; dividing ridge 42; deformation release groove 421; Deflection magnet 10; vacuum chamber 20; particle outlet 201; particle inlet 202; installation space 203; water-cooled busbar 30; water supply main pipe 301; water return main pipe 302; bracket 40; top bracket 401; top single plug seat 4011; single plug hole 4012; bottom bracket 402; bottom single plug seat 4021; double plug seat 4022; ion eater 50; Magnetic deflection device 100; neutral beam injection system 1000. Detailed implementation mode

[0021] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention.

[0022] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "length", "upper", "lower", "front", "rear", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

[0023] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0024] In the present invention, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection or may communicate with each other; it may be directly connected, or indirectly connected through an intermediate medium, and may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] The deflection magnet 10 and the magnetic deflection device 100 having the same according to the embodiments of the present invention will be described in detail below with reference to the drawings.

[0026] Refer to Figures 1 - 7As shown, the deflection magnet 10 according to an embodiment of the present invention includes a magnet frame 1, a pole shoe sheath 2, and at least one magnet coil 3. The magnet frame 1 defines a central channel 16. The pole shoe sheath 2 is at least partially disposed in the central channel 16. The pole shoe sheath 2 defines a particle channel 27 in the central channel 16. The pole shoe sheath 2 has a sheath cooling flow path, a first inlet 231, and a first outlet 241. The first inlet 231 is communicated with the first outlet 241 through the sheath cooling flow path. The magnet coil 3 is at least partially installed between the magnet frame 1 and the pole shoe sheath 2. After the magnet coil 3 is energized, charged particles passing through the particle channel 27 are deflected. The magnet coil 3 has a coil cooling flow path, a second inlet, and a second outlet. The second inlet is communicated with the second outlet through the coil cooling flow path. Wherein, the magnet coil 3 includes a plurality of coil units 31. The plurality of coil units 31 form a series circuit. Each coil unit 31 has a coil cooling branch. The plurality of coil cooling branches are connected in parallel between the second inlet and the second outlet to form a coil cooling flow path.

[0027] It should be noted that the deflection magnet 10 can be used in the magnetic deflection device 100 of the neutral beam injection system 1000. The neutral beam injection system 1000 includes a particle source, a neutralizer, and a magnetic deflection device 100. The magnetic deflection device 100 is provided with a deflection magnet 10 and an ion catcher 50. The particle source emits a beam current to the neutralizer. After the beam current is neutralized by the neutralizer, high-energy neutral particles and un-neutralized charged particles are obtained. When the neutral particles and the charged particles pass through the magnetic deflection device 100, the path of the neutral particles is as Figure 1 shown by the arrow A in, and the path of the charged particles is as Figure 1 shown by the arrow B in, that is, most of the neutral particles can normally pass through the magnetic deflection device 100. The charged particles are affected by the Lorentz force in the magnetic field of the deflection magnet 10, so that the trajectory of the charged particles is deflected and swallowed by the ion catcher 50, thereby realizing the filtration of the charged particles and obtaining pure neutral particles to ensure the injection of the neutral beam.

[0028] It can be understood that after the magnet coil 3 of the deflection magnet 10 is energized, a magnetic field is generated. The heat generated after the magnet coil 3 is energized is relatively large. At the same time, a small part of the neutral particles and charged particles are easily hit on the deflection magnet 10 to generate heat, resulting in a relatively large heat dissipation pressure on the deflection magnet 10.

[0029] Specifically, the deflection magnet 10 includes: a magnet frame 1, a pole shoe 2, and at least one magnet coil 3. The material of the magnet frame 1 can be industrial soft iron. The magnet frame 1 defines a central channel 16. At least a part of the pole shoe 2 of the deflection magnet 10 is disposed in the central channel 16. That is to say, a part of the pole shoe 2 can be disposed inside the magnet frame 1, and another part of the pole shoe 2 can also be disposed outside the magnet frame 1. The magnet coil 3 is at least partially installed between the magnet frame 1 and the pole shoe 2. After the magnet coil 3 is energized, the magnet frame 1 is magnetized to form a magnetic field. The pole shoe 2 defines a particle channel 27 in the central channel 16. After neutral particles and charged particles enter the particle channel 27, the charged particles are deflected and separated from the neutral particles. Most of the neutral particles and most of the charged particles form different paths after passing through the particle channel 27. The charged particles can be absorbed by the ion eater 50 to achieve the neutralization of the beam. At the same time, a small part of the charged particles and a small part of the neutral particles will impact on the pole shoe 2 when they do not pass through the particle channel 27. The pole shoe 2 can protect the magnet frame 1 and the magnet coil 3 to prevent particles from directly impacting on the magnet frame 1 and the magnet coil 3.

[0030] The pole shoe 2 has a shoe cooling flow path, a first inlet 231, and a first outlet 241. The first inlet 231 is communicated with the first outlet 241 through the shoe cooling flow path. The shoe cooling medium can flow through the first inlet 231, the shoe cooling flow path, and then flow out from the first outlet 241 in sequence to cool the pole shoe 2. When particles collide with the pole shoe 2, heat will be generated. The shoe cooling medium flowing through the shoe cooling flow path can take away the heat of the pole shoe 2 to reduce the temperature of the pole shoe 2 and prevent the pole shoe 2 from being damaged due to overheating.

[0031] The magnet coil 3 has a coil cooling flow path, a second inlet, and a second outlet. The second inlet is communicated with the second outlet through the coil cooling flow path. The coil cooling medium can flow through the second inlet, the coil cooling flow path, and then flow out from the second outlet in sequence to cool the magnet coil 3. After the magnet coil 3 is energized, heat will be generated. The coil cooling medium flowing through the coil cooling flow path can take away the heat of the magnet coil 3 to reduce the temperature of the magnet coil 3 and prevent the magnet coil 3 from being damaged due to overheating.

[0032] Among them, the magnet coil 3 includes: a plurality of coil units 31. The plurality of coil units 31 form a series circuit. Each coil unit 31 has a coil cooling branch. The plurality of coil cooling branches are connected in parallel between the second inlet and the second outlet to form a coil cooling flow path.

[0033] It can be understood that in the circuit of the magnet coil 3, the plurality of coil units 31 are electrically connected in sequence to form a series circuit to ensure the total length of the magnet coil 3 and make the magnetic field intensity generated after the magnet coil 3 is energized meet the design requirements.

[0034] In the coil cooling flow path of the magnet coil 3, the coil cooling branches of each coil unit 31 are connected in parallel between the second inlet and the second outlet. That is to say, when the coil cooling medium flows from the second inlet to the second outlet, it will be shunted to the coil cooling branches of each coil unit 31. Each coil unit 31 can dissipate heat independently through its corresponding coil cooling branch. When the total length of the coil cooling flow path of the magnet coil 3 is certain, multiple parallel coil cooling branches can shorten the flow path of the coil cooling medium in the coil cooling flow path, so that the residence time of the coil cooling medium in each coil cooling branch is short, and the temperature of the magnet coil 3 can be quickly reduced, improving the heat dissipation efficiency of the magnet coil 3.

[0035] According to the deflection magnet 10 of the embodiment of the present invention, the magnet coil 3 is at least partially installed between the magnet frame 1 and the pole sheath 2. The pole sheath 2 can protect the magnet frame 1 and the magnet coil 3 to prevent particles from directly hitting the magnet frame 1 and the magnet coil 3. When the sheath cooling medium flows through the sheath cooling flow path, it can take away the heat of the pole sheath 2. When the coil cooling medium flows through the coil cooling flow path, it can take away the heat of the magnet coil 3 to reduce the temperature of the pole sheath 2 and the magnet coil 3. Among them, multiple coil units 31 of the magnet coil 3 all have coil cooling branches to form multiple parallel coil cooling branches, which can quickly reduce the temperature of the magnet coil 3 and improve the heat dissipation efficiency of the magnet coil 3, thereby facilitating the stable and reliable operation of the deflection magnet 10.

[0036] In some embodiments of the present invention, the magnet coil 3 may include a connection bridge 33, and a series circuit can be formed between each coil unit 31 through the connection bridge 33.

[0037] In some embodiments of the present invention, with reference to Figure 2 , Figure 3 , Figure 5 and Figure 6 shown, the coil unit 31 includes: a hollow cable 311, an inlet joint 312, and an outlet joint 313. The hollow cable 311 is wound around the magnet frame 1. Both ends of the hollow cable 311 are communicated with the inlet joint 312 and the outlet joint 313 respectively to form a coil cooling branch. The inlet joint 312 and the outlet joint 313 are fixedly penetrated through the magnet frame 1.

[0038] Among them, the hollow cable 311 can be a hollow conductive structure with a square cross-section on the outside and a circular cross-section on the inside. The coil cooling medium can flow in the circular flow channel inside the hollow cable 311. At least one protruding structure magnetic pole 15 can be formed on the inner side of the magnet frame 1 facing the middle channel 16. The hollow cable 311 can be arranged around the magnetic pole 15 within the magnet frame 1. The inlet joint 312 and the outlet joint 313 can be L-shaped hollow tubular structures. One end of the hollow cable 311 is communicated with one end of the inlet joint 312. The end of the inlet joint 312 facing away from the hollow cable 311 is the inlet where the coil cooling medium flows into the coil cooling branch and is communicated with the second inlet. The other end of the hollow cable 311 is communicated with one end of the outlet joint 313. The end of the outlet joint 313 facing away from the hollow cable 311 is the outlet where the coil cooling medium flows into the coil cooling branch and is communicated with the second outlet. That is to say, the hollow cable 311, a corresponding inlet joint 312 and an outlet joint 313 can be communicated to form a coil cooling branch.

[0039] Referring to Figure 5 As shown, the number of coil units 31 is two, namely the first coil unit 31a and the second coil unit 31b. It can be understood that the flow path of the coil cooling medium in the magnet coil 3 is two. The coil cooling medium can flow into the hollow cable 311 of the first coil unit 31a from the inlet joint 312 of the first coil unit 31a and flow out from the outlet joint 313 of the first coil unit 31a. Similarly, the coil cooling medium can flow into the hollow cable 311 of the second coil unit 31b from the inlet joint 312 of the second coil unit 31b and flow out from the outlet joint 313 of the second coil unit 31b. The coil cooling medium flows in two parallel coil cooling branches to quickly reduce the temperature of the magnet coil 3. A series circuit can be formed between the two coil units 31 through the connection bridge 33. The tail end of the hollow cable 311 of the first coil unit 31a can be electrically connected to the head end of the hollow cable 311 of the second coil unit 31b through the connection bridge 33. It can be understood that the current path in the coil unit 31 is one. The inlet joint 312 of the first coil unit 31a and the outlet joint 313 of the second coil unit 31b are both electrically connected to the external power supply system. The current can flow into the head end of the hollow cable 311 of the first coil unit 31a from the inlet joint 312 of the first coil unit 31a. After flowing through the hollow cable 311 of the first coil unit 31a, the current flows from the tail end of the hollow cable 311 of the first coil unit 31a through the connection bridge 33 into the head end of the hollow cable 311 of the second coil unit 31b. Subsequently, after flowing through the hollow cable 311 of the second coil unit 31b, the current flows out of the magnet coil 3 through the outlet joint 313 of the second coil unit 31b.

[0040] Referring to Figure 2 、 Figure 3 and Figure 6As shown, the magnet coil 3 may further include a fixing bracket 34, which may be made of an insulating material, such as a PEEK (polyether ether ketone) material part. The fixing bracket 34 may be provided with connection holes, and the inlet connector 312 and the outlet connector 313 may be clamped in the connection holes of the fixing bracket 34. The inlet connector 312 and the outlet connector 313 pass through the magnet frame 1 and are fixed to the magnet frame 1 through the fixing bracket 34. In addition, the middle channel 16 inside the magnet frame 1 can accommodate components such as the magnetic pole sheath 2 and the magnet coil 3. The internal structure of the magnet frame 1 is relatively complex. The inlet connector 312 and the outlet connector 313 can both be fixed on the outside of the magnet frame 1 to facilitate the assembly of each inlet connector 312 with the second inlet, the assembly of each outlet connector 313 with the second outlet, and the connection of the magnet coil 3 to electricity through the inlet connector 312 or the outlet connector 313 outside the magnet frame 1.

[0041] It should be noted that the cooling medium in each coil cooling branch may be a non-conductive medium such as deoxygenated water or fluorinated liquid.

[0042] In some embodiments of the present invention, referring to Figure 2 、 Figure 3 and Figure 6 As shown, the magnet coil 3 further includes: a coil installation box 32, which is clamped between the magnet frame 1 and the magnetic pole sheath 2, and at least part of the hollow cable 311 is located inside the coil installation box 32.

[0043] Specifically, the coil installation box 32 may correspond to the shape of the hollow cable 311 wound around it, and at least part of the hollow cable 311 is located inside the coil installation box 32 to realize the fixation and protection of the plurality of hollow cables 311. The hollow cables 311 of the plurality of coil units 31 are integrated into a whole through the coil installation box 32 to facilitate the assembly of the magnet coil 3 into the magnet frame 1. The coil installation box 32 can be clamped between the magnet frame 1 and the magnetic pole sheath 2 through the magnetic pole 15 to facilitate the stable fixation of the plurality of hollow cables 311 inside the magnet frame 1. At the same time, the contact area between the coil installation box 32 and the magnetic pole sheath 2 at the joint is relatively large. A part of the heat generated after the hollow cable 311 is energized can be conducted to the magnetic pole sheath 2 through the coil installation box 32, and the magnet coil 3 can be cooled through the sheath cooling flow path of the magnetic pole sheath 2.

[0044] In some embodiments of the present invention, referring to Figure 2 and Figure 3As shown, the magnet frame 1 includes a top plate 11, a first side plate 12, a bottom plate 13 and a second side plate 14 which are connected end to end in sequence, the top plate 11, the first side plate 12, the bottom plate 13 and the second side plate 14 jointly define a middle channel 16, the first side plate 12 and the second side plate 14 are arranged oppositely and in parallel, the top plate 11 and the bottom plate 13 are partially opposite and not parallel, and the first side plate 12 and the second side plate 14 are both installed with magnet coils 3 on the inner side of the middle channel 16.

[0045] Among them, the top plate 11, the first side plate 12, the bottom plate 13 and the second side plate 14 of the magnet frame 1 can be connected end to end in sequence by bolts. It can be understood that the size of the magnet frame 1 is relatively large. During processing and manufacturing, the top plate 11, the first side plate 12, the bottom plate 13 and the second side plate 14 can be processed separately, and the processing technology is relatively simple to reduce the difficulty of processing the magnet frame 1, thereby reducing the production cost of the magnet frame 1. At the same time, the magnet frame 1 can be enlarged in proportion according to the design requirements, and the size enlargement of the top plate 11, the first side plate 12, the bottom plate 13 and the second side plate 14 is relatively simple and convenient.

[0046] The first side plate 12 and the second side plate 14 are arranged oppositely and in parallel, the top plate 11 and the bottom plate 13 are partially oppositely and not parallel, the magnet frame 1 is a special-shaped structure in which the top plate 11 and the bottom plate 13 are at a certain angle, the magnet frame 1 can be arranged obliquely in the magnetic deflection device 100, and the neutral particles can pass through the particle channel 27 roughly in a direction parallel to the bottom plate 13. The ion eater 50 in the magnetic deflection device 100 can be arranged obliquely on one side of the magnet frame 1 according to the path of the charged particles and avoid the path of the neutral particles, thereby increasing the length of the beam flow passing through the particle channel 27, so that the charged particles can be fully affected by the magnetic field in the particle channel 27 and separated from the neutral particles, and the space utilization rate in the magnetic deflection device 100 can also be improved.

[0047] Magnetic coils 3 are installed on the inner sides of the first side plate 12 and the second side plate 14 facing the middle channel 16. The first side plate 12 and the second side plate 14 have magnetic poles 15. The number of the magnetic coils 3 can be two. The two magnetic coils 3 are respectively connected to the corresponding magnetic poles 15 through corresponding coil mounting boxes 32 to enhance the Lorentz force exerted on the charged particles in the particle channel 27, so that the magnetic field strength generated after the magnetic coils 3 are energized is enhanced and meets the design requirements.

[0048] In some embodiments of the present invention, reference Figure 4 , Figures 7 - 9As shown, the magnetic pole sheath 2 includes: an inner sheath assembly 21, an outer sheath assembly 22, a cooling medium supply pipe 23, and a cooling medium return pipe 24. At least part of the inner sheath assembly 21 is disposed inside the middle channel 16, and the inner sheath assembly 21 corresponds to the inner sides of the top plate 11, the first side plate 12, the bottom plate 13, and the second side plate 14 facing the middle channel 16 respectively. At least part of the outer sheath assembly 22 is disposed outside the middle channel 16. On the movement path of the particles, at least part of the outer sheath assembly 22 is disposed on the front side of the magnet frame 1, and the outer sheath assembly 22 corresponds to the front sides of the top plate 11, the first side plate 12, the bottom plate 13, the second side plate 14, and the magnet coil 3 respectively. The cooling medium supply pipe 23 has a first inlet 231, and the cooling medium return pipe 24 has a first outlet 241. Wherein, both the inner sheath assembly 21 and the outer sheath assembly 22 include a plurality of hollow pipelines 41 connected in parallel. Each hollow pipeline 41 is connected in parallel between the cooling medium supply pipe 23 and the cooling medium return pipe 24.

[0049] Specifically, at least part of the inner sheath assembly 21 is disposed inside the middle channel 16, and the inner sheath assembly 21 corresponds to the inner sides of the top plate 11, the first side plate 12, the bottom plate 13, and the second side plate 14 facing the middle channel 16 respectively, so as to prevent the particles from colliding with the inner sides of the magnet coil 3 and the magnet frame 1. At least part of the outer sheath assembly 22 is disposed outside the middle channel 16. On the movement path of the particles, that is Figure 7 in the front-back direction in , the particles move from front to back and enter the deflection magnet 10. At least part of the outer sheath assembly 22 is disposed on the front side of the magnet frame 1, and the outer sheath assembly 22 corresponds to the front sides of the top plate 11, the first side plate 12, the bottom plate 13, the second side plate 14, and the magnet coil 3 respectively. When the angle of the particles emitted by the neutralizer to the deflection magnet 10 is relatively deviated, the particles deviating from the deflection magnet 10 will hit the outer sheath assembly 22 before entering the particle channel 27. The outer sheath assembly 22 can prevent the particles from colliding with the front side of the magnet coil 3 and the front side of the magnet frame 1, thereby achieving the protection effect on the magnet coil 3 and the magnet frame 1.

[0050] The cooling medium supply pipe 23 has a first inlet 231, and the cooling medium return pipe 24 has a first outlet 241. Both the inner sheath assembly 21 and the outer sheath assembly 22 include a plurality of hollow pipelines 41 connected in parallel. The hollow pipelines 41 can be made of chromium zirconium copper. Each hollow pipeline 41 is connected in parallel between the cooling medium supply pipe 23 and the cooling medium return pipe 24. The flow path of the sheath cooling medium is as follows: the first inlet 231, the cooling medium supply pipe 23, a plurality of parallel hollow pipelines 41, the cooling medium return pipe 24, and the first outlet 241. That is to say, when the sheath cooling medium enters the cooling medium supply pipe 23 through the first inlet 231, it will be diverted to each hollow pipeline 41. Each hollow pipeline 41 can dissipate heat independently. When the total length of the hollow pipelines 41 in the magnetic pole sheath 2 is fixed, the flow path of the sheath cooling medium in the sheath cooling flow path can be shortened. The plurality of parallel hollow pipelines 41 can shorten the flow path of the sheath cooling medium in the sheath cooling flow path, reduce the residence time of the sheath cooling medium in each hollow pipeline 41, improve the heat dissipation efficiency of the magnetic pole sheath 2, and reduce the temperature of the magnetic pole sheath 2.

[0051] In the above embodiment, at least part of the inner sheath assembly 21 is arranged inside the middle channel 16, and at least part of the outer sheath assembly 22 is arranged outside the middle channel 16 to prevent particles from colliding with the magnet frame 1 and the magnet coil 3. Both the inner sheath assembly 21 and the outer sheath assembly 22 include a plurality of hollow pipelines 41 connected in parallel. The length of each hollow pipeline 41 is relatively short, and the flow speed of the sheath cooling medium in the hollow pipeline 41 is relatively fast and the path is short, so as to improve the heat dissipation efficiency of the magnetic pole sheath 2.

[0052] In some embodiments of the present invention, referring to Figure 9 As shown, the outer surface of the hollow pipeline 41 has a stepped surface 411. Among any two adjacent hollow pipelines 41 connected in parallel, the stepped surfaces 411 of the two have a gap in the parallel direction, and the stepped surfaces 411 of the two are lap-connected perpendicular to the parallel direction.

[0053] Among them, there is a gap between the two adjacent stepped surfaces 411 in the parallel direction, and particles may enter the gap between the stepped surfaces 411. That is to say, this gap increases the area of the hollow pipeline 41 that can withstand particle impacts in the particle channel 27, so as to disperse the heat generation area of the hollow pipeline 41 and avoid local overheating of the hollow pipeline 41, which is difficult to cool. Therefore, it is beneficial to improve the heat dissipation effect of the magnetic pole sheath 2. At the same time, there is a gap between two adjacent hollow pipelines 41, which can accommodate the deformation of the hollow pipeline 41 when it expands due to heat, thereby releasing the thermal stress generated by the thermal expansion and contraction of the hollow pipeline 41 and reducing the risk of damage to the magnetic pole sheath 2.

[0054] The two connected step surfaces 411 are overlapped and connected perpendicularly to the side-by-side direction. The overlapping step surfaces 411 can prevent particles from continuing to move toward the magnet coil 3 and the magnet frame 1, avoiding particles from passing through the gap and colliding with the magnet coil 3 and the magnet frame 1, so as to achieve a protective effect on the magnet frame 1 and the magnet coil 3.

[0055] In the above embodiment, in any two hollow pipes 41 connected side by side, the step surfaces 411 of the two have a gap in the side-by-side direction, which can improve the heat dissipation effect of the pole sheath 2 and reduce the risk of damage to the pole sheath 2. The step surfaces 411 of the two are overlapped and connected perpendicular to the side-by-side direction, which can achieve the protection effect of the magnet frame 1 and the magnet coil 3.

[0056] In some embodiments of the present invention, reference Figure 7 , Figure 8 , Figures 10 - 12 As shown, the magnetic pole jacket 2 also includes: a bottom jacket component 25, the bottom jacket component 25 is arranged on the inner side of the inner jacket component 21 away from the magnet frame 1, and the bottom jacket component 25 is located on the side of the inner jacket component 21 close to the bottom plate 13 and corresponds to the bottom plate 13, the bottom jacket component 25 includes: an enhanced heat exchange plate 251 and a heat exchange cover plate 252, the enhanced heat exchange plate 251 is provided with a cooling groove 2511, the cooling groove 2511 includes a first cooling groove 25111, a second cooling groove 25112 and a connecting groove 25113, the first cooling groove 25111 and the second cooling groove 25112 are arranged side by side, the same end of the first cooling groove 25111 and the second cooling groove 25112 are connected through the connecting groove 25113, the first cooling groove 25111 and the second cooling groove 25112 are connected A partition ridge 42 is formed between the grooves 25112, and the partition ridge 42 is provided with a deformation release groove 421. The heat exchange cover plate 252 covers the slot of the cooling groove 2511. The heat exchange cover plate 252 has a first cover plate inlet 2521, a second cover plate inlet 2522, a first cover plate outlet 2523 and a second cover plate outlet 2524. The connecting groove 25113 is connected to the cooling medium supply pipe 23 through the first cover plate inlet 2521 and the second cover plate inlet 2522. The end of the first cooling groove 25111 away from the connecting groove 25113 is connected to the cooling medium return pipe 24 through the first cover plate outlet 2523. The end of the second cooling groove 25112 away from the connecting groove 25113 is connected to the cooling medium return pipe 24 through the second cover plate outlet 2524.

[0057] The bottom sheath assembly 25 is disposed on the inner side of the inner sheath assembly 21 away from the magnet frame 1, and the bottom sheath assembly 25 is located on the side of the inner sheath assembly 21 close to the bottom plate 13 and corresponds to the bottom plate 13, refer to Figure 7 and Figure 12As shown in the figure, the bottom sheath assembly 25 is installed above the bottom plate 13. Part of the inner sheath assembly 21 is sandwiched between the bottom sheath assembly 25 and the bottom plate 13. The particles emitted by the neutralizer towards the deflection magnet 10 tend to converge towards the side close to the bottom plate 13, resulting in a relatively large heat dissipation pressure on the inner sheath assembly 21 on the side close to the bottom plate 13. Above the inner sheath assembly 21 corresponding to the bottom plate 13, there is a bottom sheath assembly 25. The particles can first collide with the bottom sheath assembly 25 in the particle channel 27, and the heat generated by the collision is dissipated through the bottom sheath assembly 25, avoiding excessive heat accumulation in the inner sheath assembly 21 on the side close to the bottom plate 13. Thus, the heat dissipation efficiency of the magnetic pole sheath 2 can be improved. There are part of the inner sheath assembly 21 and the bottom sheath assembly 25 above the bottom plate 13, which can provide double protection for the bottom plate 13 and prevent the bottom plate 13 from being damaged.

[0058] The bottom sheath assembly 25 includes: a strengthened heat exchange plate 251 and a heat exchange cover plate 252. There is a flow channel for the sheath cooling medium between the strengthened heat exchange plate 251 and the heat exchange cover plate 252. The sheath cooling medium flowing through the flow channel can take away the heat of the bottom sheath assembly 25.

[0059] Specifically, the strengthened heat exchange plate 251 is provided with cooling grooves 2511. The cooling grooves 2511 can be configured as U-shaped grooves. A partition ridge 42 is formed between the first cooling groove 25111 and the second cooling groove 25112. The partition ridge 42 is provided with a deformation release groove 421. The deformation release groove 421 can be a blind groove structure. The deformation release groove 421 can release the stress received by the strengthened heat exchange plate 251 to adapt to the deformation of the strengthened heat exchange plate 251 under the alternation of heat and cold, and reduce the risk of damage to the strengthened heat exchange plate 251. The heat exchange cover plate 252 can be a U-shaped flat plate corresponding to the notch shape of the cooling grooves 2511. The heat exchange cover plate 252 covers the notch of the cooling grooves 2511, enabling the sheath cooling medium to flow in the cooling grooves 2511. At the same time, the U-shaped flat plate can also release its stress under the alternation of heat and cold.

[0060] The communication groove 25113 is communicated with the cooling medium supply pipe 23 through the first cover plate inlet 2521 and the second cover plate inlet 2522. One end of the first cooling groove 25111 far from the communication groove 25113 is communicated with the cooling medium return pipe 24 through the first cover plate outlet 2523. One end of the second cooling groove 25112 far from the communication groove 25113 is communicated with the cooling medium return pipe 24 through the second cover plate outlet 2524. That is to say, the first cover plate inlet 2521 and the first cover plate outlet 2523 are respectively arranged on the front and rear sides of the first cooling groove 25111, and the second cover plate inlet 2522 and the second cover plate outlet 2524 are respectively arranged on the front and rear sides of the second cooling groove 25112. When the sheath cooling medium flows from the cooling medium supply pipe 23 to the cooling medium return pipe 24, the sheath cooling medium is branched to the first cooling groove 25111 and the second cooling groove 25112 at the communication groove 25113, so that the sheath cooling medium in the cooling groove 2511 takes away the heat of the bottom sheath assembly 25, thereby realizing the heat dissipation effect of the bottom sheath assembly 25.

[0061] In some embodiments of the present invention, referring to Figures 10 - 12 as shown, the notch of the cooling groove 2511 faces the bottom plate 13, and a plurality of auxiliary heat exchange grooves 25114 are formed at the bottom of the cooling groove 2511.

[0062] Specifically, the notch of the cooling groove 2511 faces the bottom plate 13. In the up and down direction, the particles can collide with the outside corresponding to the bottom of the cooling groove 2511 of the enhanced heat exchange plate 251, resulting in more heat at the bottom of the cooling groove 2511. A plurality of auxiliary heat exchange grooves 25114 are formed at the bottom of the cooling groove 2511. The plurality of auxiliary heat exchange grooves 25114 form a serrated structure at the bottom of the cooling groove 2511. The plurality of auxiliary heat exchange grooves 25114 can increase the contact area between the sheath cooling medium and the bottom of the cooling groove 2511, and the sheath cooling medium flowing through the cooling groove 2511 can fully take away the heat at the bottom of the cooling groove 2511, thereby improving the heat dissipation effect of the bottom sheath assembly 25.

[0063] In some embodiments of the present invention, referring to Figure 2 、 Figure 8 and Figure 9 as shown, the inner sheath assembly 21 includes: a first pipeline assembly 211 and a second pipeline assembly 212. The first pipeline assembly 211 includes a plurality of hollow pipelines 41, and the first pipeline assembly 211 respectively corresponds to the inner side of the first side plate 12, a part of the inner side of the top plate 11, and a part of the inner side of the bottom plate 13. The second pipeline assembly 212 includes a plurality of hollow pipelines 41, and the second pipeline assembly 212 respectively corresponds to the inner side of the second side plate 14, another part of the inner side of the top plate 11, and another part of the inner side of the bottom plate 13.

[0064] Specifically, the first pipeline component 211 and the second pipeline component 212 can be constructed as a C-shaped structure with openings facing each other. The first pipeline component 211 and the second pipeline component 212 are connected in parallel in the middle channel 16. Half of the middle channel 16 corresponds to the first pipeline component 211, and the other half of the middle channel 16 corresponds to the second pipeline component 212. When the total area on the inner side of the middle channel 16 is constant, compared with the inner jacket component 21 surrounding the entire circle in the middle channel 16, the parallel first pipeline component 211 and the second pipeline component 212 can shorten the flow path of the jacket cooling medium in the hollow pipeline 41, so that the jacket cooling medium has a shorter residence time in each hollow pipeline 41, which can quickly reduce the temperature of the inner jacket component 21 and improve the heat dissipation efficiency of the inner jacket component 21.

[0065] In some embodiments of the present invention, reference Figure 2 and Figure 3 As shown, the top plate 11 of the magnet frame 1 also has a top plate through hole 111, and the inlet connector 312 and the outlet connector 313 can be passed through the top plate through hole 111 and fixed to the magnet frame 1, so as to facilitate the assembly of each inlet connector 312 with the second inlet, the assembly of each outlet connector 313 with the second outlet, and facilitate the connection of the magnet coil 3 to electricity through the inlet connector 312 or the outlet connector 313 outside the magnet frame 1.

[0066] In some embodiments of the present invention, reference Figure 2 , Figures 7 - 9 As shown, the pole shield 2 further includes a top shield assembly 26, which includes a plurality of hollow pipes 41 connected in parallel, each of which is connected in parallel between the cooling medium supply pipe 23 and the cooling medium return pipe 24, and the top shield assembly 26 is arranged on the inner side of the inner shield assembly 21 away from the magnet frame 1, and a part of the top shield assembly 26 is located on a side of the inner shield assembly 21 close to the top plate 11 and corresponds to the top plate 11, and the other part corresponds to the front side of the top plate 11, and the top plate 11 is provided on the inner side of the inner shield assembly 21. A top sheath assembly 26 is provided below the inner sheath assembly 21 corresponding to the magnetic pole sheath 2. The particles may collide with the top sheath assembly 26 first in the particle channel 27, and the heat generated by the collision is dissipated by the top sheath assembly 26, so as to avoid excessive heat gathering on the side of the inner sheath assembly 21 close to the top plate 11, thereby improving the heat dissipation efficiency of the magnetic pole sheath 2. Part of the inner sheath assembly 21 and the top sheath assembly 26 are provided below the top plate 11, so as to provide double-layer protection for the top plate 11 and avoid damage to the top plate 11.

[0067] Reference Figure 1 and Figure 13As shown, a magnetic deflection device 100 according to another embodiment of the present invention includes: a vacuum chamber 20 and a plurality of deflection magnets 10 of the above embodiment. The vacuum chamber 20 has an installation space 203, a particle outlet 201, and a plurality of particle inlets 202. The particle outlet 201 and the plurality of particle inlets 202 are both in communication with the installation space 203. Each deflection magnet 10 is disposed in the installation space 203. The plurality of deflection magnets 10 correspond to the plurality of particle inlets 202 one by one, and the particle channel 27 of each deflection magnet 10 is located between the particle outlet 201 and the corresponding particle inlet 202.

[0068] Among them, the vacuum chamber 20 has an installation space 203, a particle outlet 201, and a plurality of particle inlets 202. The vacuum chamber 20 can provide a vacuum environment and support for the deflection magnets 10. The installation space 203 can accommodate a plurality of deflection magnets 10. The particle outlet 201 and the plurality of particle inlets 202 are both in communication with the installation space 203. In the front-rear direction, the plurality of particle inlets 202 are located in front of the particle outlet 201. The plurality of deflection magnets 10 correspond to the plurality of particle inlets 202 one by one, and the particle channel 27 of each deflection magnet 10 is located between the particle outlet 201 and the corresponding particle inlet 202. Particles enter the deflection magnet 10 from the particle inlet 202. The neutral particles passing through the particle channel 27 can converge at the particle outlet 201 and flow out of the vacuum chamber 20 through the particle outlet 201.

[0069] For the magnetic deflection device 100 according to an embodiment of the present invention, at least a part of the magnet coil 3 is installed between the magnet frame 1 and the pole sheath 2 to prevent particles from directly hitting the magnet frame 1 and the magnet coil 3. When the sheath cooling medium flows through the sheath cooling flow path, it can take away the heat of the pole sheath 2. When the coil cooling medium flows through the coil cooling flow path, it can take away the heat of the magnet coil 3 to reduce the temperatures of the pole sheath 2 and the magnet coil 3. Among them, each of the plurality of coil units 31 of the magnet coil 3 has a coil cooling branch to form a plurality of parallel coil cooling branches, which can quickly reduce the temperature of the magnet coil 3 and improve the heat dissipation efficiency of the magnet coil 3, thereby facilitating the stable and reliable operation of the magnetic deflection device 100.

[0070] In some embodiments of the present invention, referring to Figure 2 and Figure 13 As shown, the magnetic deflection device 100 includes a water-cooled busbar 30. The water-cooled busbar 30 includes a water supply main pipe 301 and a water return main pipe 302. The water-cooled busbar 30 can be in communication with an external water supply system. The water supply main pipe 301 can be in communication with the first inlet 231 of each deflection magnet 10 and provide a sheath cooling medium for the first inlet 231. The water return main pipe 302 can be in communication with the first outlet 241 of each deflection magnet 10, and the sheath cooling medium can flow into the water return main pipe 302 through the first outlet 241.

[0071] In some embodiments of the present invention, reference Figure 2 and Figures 13 - 16 As shown, the magnetic deflection device 100 includes a bracket 40, and the bracket 40 includes a bottom bracket 402 and a top bracket 401. The bottom bracket 402 has a bottom single latch seat 4021 and a double latch seat 4022, and the top bracket 401 has a top single latch seat 4011 and a single latch hole 4012. A plurality of deflection magnets 10 can be installed in layers in the installation space 203 through the bottom bracket 402 and the top bracket 401, so that the bracket 40 can support and fix the plurality of deflection magnets 10.

[0072] Specifically, refer to Figure 2 As shown, the first side plate 12 and the second side plate 14 may be formed with a support ear 121 on the side away from the central channel 16, and the bottom plate 13 may be formed with a base 131 on the side away from the central channel 16, and the base 131 has a double pin hole 1311, referring to Figure 13 As shown, the six deflection magnets 10 are evenly divided into two rows, the bottom plate 13 of the deflection magnets 10 in the upper row is opposite to the bottom plate 13 of the deflection magnets 10 in the corresponding lower row, and the deflection magnets 10 in the upper and lower rows are symmetrical. The bottom single latch seat 4021 can be connected to the ear 121 and the single latch hole 4012 of the deflection magnets in the lower row, the double latch seat 4022 can be connected to the upper row of deflection magnets 10 and the double latch hole 1311 of the deflection magnets 10 in the lower row, and the top single latch seat 4011 can be connected to the ear 121 of the deflection magnets 10 in the upper row. After assembly, the deflection magnet 10, the bottom bracket 402 and the top bracket 401 can be fixed in the installation space 203 by the bottom bracket 402 and the top bracket 401, so as to facilitate the installation and disassembly of the deflection magnet 10. At the same time, the bottom bracket 402 and the top bracket 401 can adjust the inclination angle of the magnet frame 1 according to the angle of the particles emitted by the neutralizer to the deflection magnet 10, and adjust the combination mode of the magnet frame 1 according to the particle inlet 202 to meet the needs of different particle sources.

[0073] Reference Figure 1 As shown, a neutral beam injection system 1000 according to another embodiment of the present invention includes the magnetic deflection device 100 mentioned above.

[0074] The neutral beam injection system 1000 includes: a particle source, a neutralizer, and a magnetic deflection device 100. A deflection magnet 10 and an ion eater 50 are provided in the magnetic deflection device 100. The particle source emits a beam current towards the neutralizer. After the beam current is neutralized by the neutralizer, high-energy neutral particles and un-neutralized charged particles are obtained. When the neutral particles and the charged particles pass through the magnetic deflection device 100, most of the neutral particles can pass through the magnetic deflection device 100 normally. The charged particles are affected by the Lorentz force in the magnetic field of the deflection magnet 10, so that the trajectory of the charged particles deflects and is eaten by the ion eater 50, thereby realizing the filtering of the charged particles and obtaining pure neutral particles to ensure the injection of the neutral beam. The neutral beam injection system 1000 provides neutral particles for the controllable nuclear fusion research of large scientific devices such as fusion reactors. The neutral particles can enter the interior of the Tokamak main body and be heated.

[0075] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0076] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A deflection magnet, characterized in that, Comprising: A magnet frame (1), the magnet frame (1) defining a middle channel (16); A pole shoe sheath (2), at least part of the pole shoe sheath (2) being disposed within the middle channel (16), the pole shoe sheath (2) defining a particle channel (27) within the middle channel (16), the pole shoe sheath (2) having a sheath cooling flow path, a first inlet (231) and a first outlet (241), the first inlet (231) being in communication with the first outlet (241) through the sheath cooling flow path; At least one magnet coil (3), at least part of the magnet coil (3) being mounted between the magnet frame (1) and the pole shoe sheath (2), the magnet coil (3) deflecting charged particles passing through the particle channel (27) when energized, the magnet coil (3) having a coil cooling flow path, a second inlet and a second outlet, the second inlet being in communication with the second outlet through the coil cooling flow path; Wherein, the magnet coil (3) includes: a plurality of coil units (31), the plurality of coil units (31) forming a series circuit, each of the coil units (31) having a coil cooling branch, and the plurality of coil cooling branches being connected in parallel between the second inlet and the second outlet to form the coil cooling flow path.

2. The deflection magnet according to claim 1, wherein The coil unit (31) includes: a hollow cable (311), an inlet connector (312) and an outlet connector (313), the hollow cable (311) being wound within the magnet frame (1), both ends of the hollow cable (311) being in communication with the inlet connector (312) and the outlet connector (313) respectively to form the coil cooling branch, and the inlet connector (312) and the outlet connector (313) being fixedly disposed through the magnet frame (1).

3. The deflection magnet according to claim 2, wherein, The magnet coil (3) further includes: a coil mounting box (32), the coil mounting box (32) being clamped between the magnet frame (1) and the pole shoe sheath (2), and at least part of the hollow cable (311) being located within the coil mounting box (32).

4. The deflection magnet according to claim 1, characterized in that, The magnet frame (1) includes a top plate (11), a first side plate (12), a bottom plate (13) and a second side plate (14) connected end to end in sequence, the top plate (11), the first side plate (12), the bottom plate (13) and the second side plate (14) jointly defining the middle channel (16), the first side plate (12) and the second side plate (14) being opposite and parallel to each other, and the top plate (11) and the bottom plate (13) being partially opposite and non-parallel; The magnet coils (3) are mounted on the inner sides of both the first side plate (12) and the second side plate (14) facing the middle channel (16).

5. The deflection magnet according to claim 4, characterized in that, The pole shoe sheath (2) includes: An inner sheath assembly (21), at least part of the inner sheath assembly (21) being disposed inside the middle channel (16), and the inner sheath assembly (21) corresponding to the inner sides of the top plate (11), the first side plate (12), the bottom plate (13) and the second side plate (14) facing the middle channel (16) respectively; An outer sheath assembly (22), at least part of the outer sheath assembly (22) is disposed outside the middle channel (16). On the movement path of the particles, at least part of the outer sheath assembly (22) is disposed on the front side of the magnet frame (1), and the outer sheath assembly (22) corresponds to the front sides of the top plate (11), the first side plate (12), the bottom plate (13), the second side plate (14), and the magnet coil (3) respectively; A cooling medium supply pipe (23), the cooling medium supply pipe (23) has the first inlet (231); A cooling medium return pipe (24), the cooling medium return pipe (24) has the first outlet (241); Wherein, both the inner sheath assembly (21) and the outer sheath assembly (22) include a plurality of hollow pipelines (41) connected in parallel side by side, and each of the hollow pipelines (41) is connected in parallel between the cooling medium supply pipe (23) and the cooling medium return pipe (24).

6. The deflection magnet according to claim 5, characterized in that, The outer surface of the hollow pipeline (41) has a stepped surface (411). Among any two hollow pipelines (41) connected in parallel side by side, there is a gap between the stepped surfaces (411) of the two in the side-by-side direction, and the stepped surfaces (411) of the two are connected in a lap joint perpendicular to the side-by-side direction.

7. The deflection magnet according to claim 5, characterized in that, The magnetic pole sheath (2) further includes: a bottom sheath assembly (25), the bottom sheath assembly (25) is disposed on the inner side of the inner sheath assembly (21) away from the magnet frame (1), and the bottom sheath assembly (25) is located on the side of the inner sheath assembly (21) close to the bottom plate (13) and corresponds to the bottom plate (13), and the bottom sheath assembly (25) includes: A heat transfer enhancement plate (251), the heat transfer enhancement plate (251) is provided with cooling grooves (2511), the cooling grooves (2511) include a first cooling groove (25111), a second cooling groove (25112), and a communication groove (25113). The first cooling groove (25111) and the second cooling groove (25112) are arranged side by side, and the same ends of the first cooling groove (25111) and the second cooling groove (25112) are connected through the communication groove (25113). A partition ridge (42) is formed between the first cooling groove (25111) and the second cooling groove (25112), and a deformation release groove (421) is provided in the partition ridge (42); A heat exchange cover plate (252) that seals the opening of the cooling tank (2511). The heat exchange cover plate (252) has a first cover plate inlet (2521), a second cover plate inlet (2522), a first cover plate outlet (2523), and a second cover plate outlet (2524). The communication groove (25113) is communicated with the cooling medium supply pipe (23) through the first cover plate inlet (2521) and the second cover plate inlet (2522). One end of the first cooling tank (25111) away from the communication groove (25113) is communicated with the cooling medium return pipe (24) through the first cover plate outlet (2523). One end of the second cooling tank (25112) away from the communication groove (25113) is communicated with the cooling medium return pipe (24) through the second cover plate outlet (2524).

8. The deflection magnet according to claim 7, characterized in that, The opening of the cooling tank (2511) faces the bottom plate (13), and a plurality of auxiliary heat exchange grooves (25114) are provided at the bottom of the cooling tank (2511).

9. The deflection magnet according to any one of claims 5-8, characterized in that, The inner sheath assembly (21) includes: A first pipeline assembly (211) that includes a plurality of the hollow pipelines (41), and the first pipeline assembly (211) corresponds to the inner side of the first side plate (12), a part of the inner side of the top plate (11), and a part of the inner side of the bottom plate (13) respectively; A second pipeline assembly (212) that includes a plurality of the hollow pipelines (41), and the second pipeline assembly (212) corresponds to the inner side of the second side plate (14), another part of the inner side of the top plate (11), and another part of the inner side of the bottom plate (13) respectively.

10. A magnetic deflection device, characterized in that, Includes: A vacuum chamber (20) that has an installation space (203), a particle outlet (201), and a plurality of particle inlets (202). The particle outlet (201) and the plurality of particle inlets (202) are both communicated with the installation space (203); A plurality of deflection magnets (10), where the deflection magnets (10) are the deflection magnets (10) according to any one of claims 1-9. Each deflection magnet (10) is disposed in the installation space (203). The plurality of deflection magnets (10) correspond to the plurality of particle inlets (202) one by one, and the particle channel (27) of each deflection magnet (10) is located between the particle outlet (201) and the corresponding particle inlet (202).

Images