A semiconductor jitter mechanism

Abstract

This invention belongs to the field of semiconductor technology, and particularly relates to a semiconductor vibration mechanism. This invention provides a semiconductor vibration mechanism that, through the arrangement of a mounting plate, a flower basket hanging plate, a lifting rod assembly, a motor, an eccentric wheel assembly, and a grooved swaying plate assembly, enables: 1. The lifting rod assemblies located on both sides of the flower basket hanging plate support the hanging plate via the grooved swaying plate assembly, ensuring smooth lifting and lowering of the hanging plate during vibration, resulting in a more stable overall structure; 2. The eccentric wheel assembly converts the rotational motion of the motor into the lifting motion of the lifting rod assembly, satisfying the vertical vibration requirements of the flower basket hanging plate. Simultaneously, the hanging plate can slide horizontally on the grooved swaying plate assembly during lifting and lowering, satisfying the horizontal swaying requirements of the hanging plate, and the slight swaying of the hanging plate improves the cleaning effect of the flower basket.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology, and particularly relates to a semiconductor jitter mechanism. Background Technology

[0002] In semiconductor manufacturing processes, semiconductor wafers typically undergo multiple process steps such as thin film deposition, etching, and polishing. These processes are significant sources of contaminants. To maintain the cleanliness of the wafer surface, wet cleaning methods are commonly used. A basket containing the silicon wafer is placed in a cleaning tank filled with a cleaning solution. To enhance cleaning effectiveness, a vibration mechanism is typically used to subject the basket to up-and-down vibrations, thoroughly removing contaminants and impurities from the silicon wafer surface.

[0003] Chinese invention patent application with publication number CN110918545 A and publication date of March 27, 2020 discloses a vibration mechanism and a tank-type cleaning machine, the structure of which includes a motor assembly, a bearing assembly, a cam assembly, a linear motion assembly and a vibrating arm assembly connected in sequence.

[0004] The vibration mechanism in this invention patent has the following general structural principle: the speed-regulating motor rotates and transmits the motion to the cam assembly through the coupling and bearing assembly; the cam follower rolls continuously along the inclined circumference of the rotating cam and drives the moving plate to move up and down along the linear guide rail, thereby converting the circular motion into reciprocating linear motion through the cam structure; the moving plate then drives the vibration arm assembly to vibrate, which in turn drives the silicon wafer to move up and down in the cleaning tank. The continuous rotation of the motor can realize the continuous vibration motion of the silicon wafer.

[0005] However, in actual use, this vibration mechanism still has at least two shortcomings, which are the technical problems that this invention aims to solve.

[0006] The lower end of the vibrating arm assembly that carries the flower basket lacks a support structure, causing one end of the vibrating arm to be deformed and bent due to long-term stress, which affects the structural stability and the gripping accuracy of the robotic arm.

[0007] Its vibration mechanism only has a vertical vibration effect, resulting in poor cleaning performance.

[0008] Therefore, in summary, there is an urgent need for a new type of shaking mechanism that has a stable structure and better cleaning effect. Summary of the Invention

[0009] This invention provides a semiconductor vibration mechanism that, through the arrangement of a mounting plate, a flower basket hanging plate, a lifting rod assembly, a motor, an eccentric wheel assembly, and a grooved swaying plate assembly, enables the following: 1. The lifting rod assemblies located on both sides of the flower basket hanging plate support the hanging plate via the grooved swaying plate assembly, ensuring smooth lifting and lowering of the hanging plate during vibration, resulting in a more stable overall structure; 2. The eccentric wheel assembly converts the rotational motion of the motor into the lifting motion of the lifting rod assembly, satisfying the vertical vibration requirements of the hanging plate. Simultaneously, the hanging plate can slide horizontally on the grooved swaying plate assembly during lifting and lowering, satisfying the horizontal swaying requirements of the hanging plate. Furthermore, the slight swaying of the hanging plate enhances the cleaning effect of the flower basket.

[0010] The technical solution adopted by the present invention to solve the above problems is: a semiconductor shaking mechanism, the structure of which includes a mounting plate, a flower basket hanging plate disposed above the mounting plate and used to place the flower basket, two lifting rod assemblies disposed on the upper end of the mounting plate and located on both sides of the flower basket hanging plate, a motor disposed on the mounting plate, an eccentric wheel assembly disposed at the lower end of the lifting rod assemblies and converting the rotational motion of the motor into the lifting reciprocating motion of the lifting rod assemblies, and a grooved shaking plate assembly disposed at the upper end of the lifting rod assemblies and used to engage the flower basket hanging plate, wherein the flower basket hanging plate slides horizontally on the grooved shaking plate assembly.

[0011] A further preferred technical solution is that: the lifting rod assembly includes a lifting rod, an I-shaped support plate disposed on the mounting plate and used to insert the lifting rod, a guide sleeve disposed on the I-shaped support plate and correspondingly sleeved with the lifting rod, and a limiting mounting plate disposed on the inner side of the I-shaped support plate and used to couple the lifting rod; the eccentric wheel assembly drives the lifting rod to rise and fall by rotating and lifting the limiting mounting plate.

[0012] A further preferred technical solution is that the eccentric wheel assembly includes a connecting rod with one end disposed on the output end of the motor and the other end extending to the lower part of the limiting mounting plate, a support plate disposed on the mounting plate and used to support the connecting rod, and at least two eccentric wheels respectively disposed at the ends of the connecting rod and used to drive the flower basket hanging plate to shake up and down by rotating and lifting the limiting mounting plate.

[0013] A further preferred technical solution is that the grooved swaying plate assembly includes a swaying horizontal plate disposed at the upper end of the lifting rod, a sliding groove disposed at the lower end of the swaying horizontal plate and used for inserting the flower basket hanging plate, and a lower end baffle disposed in the sliding groove and used for engaging the flower basket hanging plate.

[0014] A further preferred technical solution includes a pull rod disposed at one side of the grooved rocking plate assembly, with both ends respectively hinged to the flower basket hanging plate and the guide sleeve. When the lifting rod is raised or lowered, the pull rod drives the flower basket hanging plate to slide left and right in the sliding groove.

[0015] A further preferred technical solution is that the grooved rocking plate assembly further includes a spring disposed in the sliding groove and used to buffer the flower basket hanging plate.

[0016] A further preferred technical solution is that the lifting rod assembly further includes a mounting groove disposed on the limiting mounting plate and located above the eccentric wheel, and a rolling bearing disposed in the mounting groove and in contact with the eccentric wheel.

[0017] A further preferred technical solution includes a sensor assembly disposed on the mounting plate near the eccentric wheel and cooperating with the motor.

[0018] A further preferred technical solution includes: a telescopic cylinder mounted on the mounting plate, and a notch positioning block mounted on the connecting rod, wherein the extension / retraction of the telescopic cylinder and the notch of the notch positioning block cooperate to assist in limiting the rotational movement of the connecting rod.

[0019] A further preferred technical solution includes: a movable groove disposed at the upper end of the lifting rod, and an auxiliary rod hinged to the movable groove and the flower basket hanging plate respectively, for assisting the flower basket hanging plate to slide left and right.

[0020] The beneficial effects of this invention are:

[0021] The lifting rod assembly and the grooved swaying plate assembly are located on both sides of the flower basket hanging plate to support it, making the overall structure more stable and the movement of the flower basket hanging plate more stable;

[0022] The eccentric wheel assembly converts the rotational motion of the motor into the reciprocating motion of the lifting rod assembly, while the flower basket hanging plate can slide horizontally on the grooved swaying plate assembly, so that the flower basket hanging plate can not only vibrate up and down, but also sway slightly left and right, improving the cleaning effect, and making it easier to shake off the contaminants and chemicals adhering to the wafer during the lifting process. Attached Figure Description

[0023] Figure 1 This is a perspective view of the present invention.

[0024] Figure 2 This is a side view of the present invention.

[0025] Figure 3 This is a schematic diagram showing the connection between the lifting rod assembly and the eccentric wheel assembly in this invention.

[0026] Figure 4 This is a schematic diagram showing the position of the eccentric wheel assembly in this invention.

[0027] Figure 5 This is a side view of the positional structure of the slotted wobbling plate assembly of the present invention.

[0028] Figure 6 This is a schematic diagram of the extended state of the lifting rod assembly in this invention.

[0029] Figure 7 This is a schematic diagram of the retracted state of the lifting rod assembly in this invention.

[0030] The meanings of the markings in the diagram are as follows:

[0031] Flower basket (a), cleaning tank (b);

[0032] Mounting plate 1, flower basket hanging plate 2, lifting rod assembly 3, motor 4, eccentric wheel assembly 5, grooved swaying plate assembly 6, pull rod 7, sensor assembly 8, telescopic cylinder 9, notch positioning block 10, movable groove 11, auxiliary rod 12;

[0033] Lifting rod 31, C-shaped support plate 32, guide sleeve 33, limit mounting plate 34, mounting groove 35, rolling bearing 36, connecting rod 51, support plate 52, eccentric wheel 53, swaying cross plate 61, sliding groove 62, lower end baffle 63, spring 64, sensor fixing plate 81, sensor 82, sensing plate 83. Detailed Implementation

[0034] The following description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention.

[0035] As attached Figure 1-7 As shown, a semiconductor shaking mechanism includes a mounting plate 1, a flower basket hanging plate 2 disposed above the mounting plate 1 for placing a flower basket a, two lifting rod assemblies 3 disposed on the upper end of the mounting plate 1 and located on both sides of the flower basket hanging plate 2, a motor 4 disposed on the mounting plate 1, an eccentric wheel assembly 5 disposed at the lower end of the lifting rod assembly 3 and converting the rotational motion of the motor 4 into the lifting reciprocating motion of the lifting rod assembly 3, and a grooved shaking plate assembly 6 disposed at the upper end of the lifting rod assembly 3 for engaging the flower basket hanging plate 2, wherein the flower basket hanging plate 2 slides horizontally on the grooved shaking plate assembly 6.

[0036] In this embodiment, the flower basket a needs to be rinsed in multiple cleaning tanks b, and the semiconductor shaking mechanism does not affect the installation and placement of the cleaning tanks b. The mounting plate 1 is located at the lower end of the cleaning tank b, and the width of the mounting plate 1 is greater than the width of the cleaning tank b, so as to facilitate the installation of the two lifting rod assemblies 3 located on both sides of the cleaning tank b. The upper end of the lifting rod assembly 3 is provided with the grooved shaking plate assembly 6. The two grooved shaking plate assemblies 6 are used to engage the flower basket hanging plate 2, thereby supporting both ends of the flower basket hanging plate 2 and avoiding deformation caused by single-end support. The flower basket hanging plate 2 used to place the flower basket a is located directly above the cleaning tank b, and the flower basket hanging plate 2 is connected to the lifting rod assembly 3 through the grooved shaking plate assembly 6. When the lifting rod assembly 3 rises and falls, it drives the flower basket hanging plate 2 on the grooved shaking plate assembly 6 to rise and fall, thereby ensuring that the flower basket a located on the flower basket hanging plate 2 can be cleaned up and down in the cleaning tank b.

[0037] Furthermore, the lifting rod assembly 3 is driven by the motor 4 and the eccentric wheel assembly 5. The motor 4 is mounted on the mounting plate 1. When the motor 4 is driven, it drives the eccentric wheel assembly 5, which is located at the output end of the motor 4, to rotate. The eccentric wheel assembly 5 uses the height change of its own components after rotation to convert the rotational motion of the motor 4 into the lifting rod assembly 3, thereby achieving the up-and-down vibration effect of the flower basket hanging plate 2.

[0038] In addition, the grooved swaying plate assembly 6 engages with the flower basket hanging plate 2, and the grooved swaying plate assembly 6 and the flower basket hanging plate 2 are connected in a movable manner. When the grooved swaying plate assembly 6 is raised or lowered, the flower basket hanging plate 2 will also sway slightly left and right during the raising and lowering process, thereby increasing the cleaning effect of the flower basket a during the reciprocating raising and lowering process.

[0039] The lifting rod assembly 3 includes a lifting rod 31, an I-shaped support plate 32 disposed on the mounting plate 1 and used to insert the lifting rod 31, a guide sleeve 33 disposed on the I-shaped support plate 32 and correspondingly sleeved with the lifting rod 31, and a limiting mounting plate 34 disposed on the inner side of the I-shaped support plate 32 and used to couple the lifting rod 31. The eccentric wheel assembly 5 drives the lifting rod 31 to rise and fall by rotating and lifting the limiting mounting plate 34.

[0040] In this embodiment, two lifting rod assemblies 3 are disposed at both ends of the mounting plate 1. The lifting rod 31 is mounted on the mounting plate 1 via the C-shaped support plate 32, with the opening of the C-shaped support plate 32 facing downwards, thereby reserving space for the extension and retraction of the lifting rod 31. The lifting rod 31 is inserted through the upper end plate of the C-shaped support plate 32. The guide sleeve 33 is fixedly disposed on the upper end plate of the C-shaped support plate 32 and inserted into the lifting rod 31. The lifting rod 31 extends and retracts within the guide sleeve 33, which provides support and guidance to prevent the lifting rod 31 from tilting or deforming. The limiting mounting plate 34 is disposed inside the C-shaped support plate 32 for coupling the lifting rod 31. The limiting mounting plate 34 contacts the eccentric wheel assembly 5, and the eccentric wheel assembly 5 drives the lifting rod 31 to perform reciprocating motion by raising / lowering the limiting mounting plate 34. To improve structural stability, one of the lifting rod assemblies 3 can be equipped with two lifting rods 31, resulting in better support and vibration resistance. The limiting mounting plate 34 can connect the two lifting rods 31 by means of clamps or screws. The eccentric wheel assembly 5 can also lift the lifting rods 31 by lifting the limiting mounting plate 34.

[0041] The eccentric wheel assembly 5 includes a connecting rod 51 with one end disposed on the output end of the motor 4 and the other end extending below the limiting mounting plate 34, a support plate 52 disposed on the mounting plate 1 and used to support the connecting rod 51, and at least two eccentric wheels 53 respectively disposed at the ends of the connecting rod 51 and used to drive the flower basket hanging plate 2 to shake up and down by rotating and lifting the limiting mounting plate 34.

[0042] In this embodiment, the motor 4 is the power source, and the connecting rod 51 is located at the output end of the motor 4 and extends below the limiting mounting plate 34. The motor 4 can be two single-axis motors or one dual-axis motor, ensuring that the connecting rod 51 can lift the two limiting mounting plates 34 located at both ends of the mounting plate. The support plate 52 supports the connecting rod 51, and the eccentric wheel 53 is located at the end of the connecting rod 51, below the limiting mounting plate 34. The eccentric wheel 53 rotates to drive the limiting mounting plate 34 to rise and fall. The shape of the eccentric wheel 53 is not limited. When the eccentric wheel 53 is a circular block, the central axis of the eccentric wheel 53 is not on the same straight line as the axis of the connecting rod 51, so that when the connecting rod 51 drives the eccentric wheel 53 to rotate, the limiting mounting plate 34 can move up and down with the rotation of the eccentric wheel 53. The eccentric wheel 53 can also be replaced with an elliptical one. The center point of the elliptical eccentric wheel 53 is on the same straight line as the axis of the connecting rod 51, which can also realize the up and down movement of the limiting mounting plate 34. When it is elliptical, the swing frequency of the limiting mounting plate 34 is higher.

[0043] Furthermore, by adjusting the connection position between the eccentric wheel 53 and the connecting rod 51, the output speed can be changed, thereby achieving continuous speed change. The eccentric wheel assembly 5 has a simple structure and few components, resulting in a low failure rate and high reliability.

[0044] The grooved swaying plate assembly 6 includes a swaying horizontal plate 61 disposed at the upper end of the lifting rod 31, a sliding groove 62 disposed at the lower end of the swaying horizontal plate 61 and used for inserting the flower basket hanging plate 2, and a lower end baffle 63 disposed in the sliding groove 62 and used for engaging the flower basket hanging plate 2.

[0045] In this embodiment, the swaying horizontal plate 61 is disposed at the upper end of the lifting rod 31 to support the flower basket hanging plate 2. Due to the lower end baffle 63, the flower basket hanging plate 2 slides within the sliding groove 62 without falling off. The sliding groove 62 is disposed near the end of the flower basket hanging plate 2, and the groove opening should not be too large to prevent difficulty in removing the flower basket a.

[0046] It also includes a pull rod 7 located at the position of the grooved rocking plate assembly 6 on one side, and with both ends hinged to the flower basket hanging plate 2 and the guide sleeve 33 respectively. When the lifting rod 31 is raised or lowered, the pull rod 7 drives the flower basket hanging plate 2 to slide left and right in the sliding groove 62.

[0047] In this embodiment, the pull rod 7 is located at the position of the grooved rocking plate assembly 6 on one side. One end of the pull rod 7 is hinged to the upper end of the guide sleeve 33, and the other end is hinged to the flower basket hanging plate 2. When the lifting rod 31 rises and falls, the flower basket hanging plate 2 will also move accordingly. Due to the presence of the pull rod 7, the flower basket hanging plate 2 will slide left and right regularly in the sliding groove 62 after the distance changes. The specific length and position of the pull rod 7 can be set according to the requirements.

[0048] The grooved rocking plate assembly 6 also includes a spring 64 disposed within the sliding groove 62 and used to cushion the flower basket hanging plate 2.

[0049] In this embodiment, the spring 64 can support the flower basket hanging plate 2 on the one hand, preventing the flower basket hanging plate 2 from hitting the swaying horizontal plate 61 when it slides, and on the other hand, it can react to the flower basket hanging plate 2 when it is squeezed, thereby increasing the swaying effect.

[0050] The lifting rod assembly 3 also includes a mounting groove 35 disposed on the limiting mounting plate 34 and located above the eccentric wheel 53, and a rolling bearing 36 disposed in the mounting groove 35 and in contact with the eccentric wheel 53.

[0051] In this embodiment, the mounting groove 35 is located above the eccentric wheel 53, and the rolling bearing 36 is hinged to the mounting groove 35. When the eccentric wheel 53 rotates, it drives the rolling bearing 36 to roll, and at the same time lifts the rolling bearing 36. This does not affect the lifting and reciprocating effect of the eccentric wheel 53 on the limiting mounting plate 34. Moreover, the use of a rolling friction pair provides good durability and stability when subjected to a certain load.

[0052] It also includes a sensor assembly 8 disposed on the mounting plate 1 near the eccentric wheel 53 and cooperating with the motor 4.

[0053] In this embodiment, the sensor component 8 can be in the form of a photoelectric sensor or an infrared sensor, which is a conventional sensor. (See attached image.) Figure 4As shown, the sensor assembly 8 includes the sensor mounting plate 81, the sensor 82, and the sensing plate 83. The sensor 82 is mounted on the mounting plate 1 via the sensor mounting plate 81, and the sensing plate 83 is mounted on the eccentric wheel 53. The rotation of the eccentric wheel 53 drives the sensing plate 83 to rotate. When the sensing plate 83 rotates to the vicinity of the sensor 82, the sensor 82 sends a positioning signal. Upon receiving a stop command and the aforementioned positioning signal, the system instructs the motor 4 to stop running. However, when the system issues a stop command, it does not necessarily immediately instruct the motor 4 to stop; the position of the sensing plate 83 must also be considered. When the sensing plate 83 reaches a specific position, i.e., when the sensor 82 triggers the sensing plate 83, it indicates that the flower basket a has stopped at the corresponding specific height, at which point the system instructs the motor 4 to stop running.

[0054] It also includes a telescopic cylinder 9 disposed on the mounting plate 1 and a notch positioning block 10 disposed on the connecting rod 51. The extension / retraction of the telescopic cylinder 9 and the notch of the notch positioning block 10 cooperate to assist in restricting the rotational movement of the connecting rod 51.

[0055] In this embodiment, to further improve positioning accuracy, the connecting rod 51 is provided with a notch positioning block 10, and the telescopic cylinder 9 is correspondingly arranged with the notch positioning block 10. When the motor 4 stops running, the notch positioning block 10 stops rotating along with the connecting rod 51. At this time, the telescopic cylinder 9 is driven to extend and correspond to the notch of the notch positioning block 10, thus restricting the rotational movement of the connecting rod 51 and assisting in positioning. Before the connecting rod 51 needs to be operated, the telescopic cylinder 9 is driven to retract, thereby not restricting the rotational movement of the notch positioning block 10 and improving positioning accuracy.

[0056] It also includes a movable groove 11 disposed on the upper end of the lifting rod 31, and an auxiliary rod 12 that is respectively hinged to the movable groove 11 and the flower basket hanging plate 2 and is used to assist the flower basket hanging plate 2 in sliding left and right.

[0057] In this embodiment, the movable groove 11 is located at the exposed position of the lifting rod 31, and the two ends of the auxiliary rod 12 are respectively hinged to the movable groove 11 and the flower basket hanging plate 2. (See attached...) Figure 6 and 7As shown, when the lifting rod 31 rises, the flower basket hanging plate 2 is pulled towards the pull rod 7 while rising due to the pulling force of the pull rod 7. The auxiliary rod 12 supports the flower basket hanging plate 2. Due to the close distance, the hinge point between the auxiliary rod 12 and the movable groove 11 slides upward. Similarly, when the lifting rod 31 falls, the flower basket hanging plate 2 falls and moves away from the pull rod 7. The hinge point between the auxiliary rod 12 and the movable groove 11 slides downward. The auxiliary rod 12 makes the left and right sliding of the flower basket hanging plate 2 more stable.

[0058] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various modifications can be made without departing from the spirit of the present invention. These are non-inventive modifications and are protected by patent law as long as they fall within the scope of the claims of the present invention.

Claims

1. A semiconductor dithering mechanism, characterized by: The structure comprises a mounting plate (1), a flower basket hanging plate (2) arranged above the mounting plate (1) and used for placing a flower basket (a), two lifting rod assemblies (3) arranged at the upper end of the mounting plate (1) and located on both sides of the flower basket hanging plate (2), a motor (4) arranged on the mounting plate (1), an eccentric wheel assembly (5) arranged at the lower end of the lifting rod assembly (3) and used for converting the rotating motion of the motor (4) into the lifting and reciprocating motion of the lifting rod assembly (3), and a slotted shaking plate assembly (6) arranged at the upper end of the lifting rod assembly (3) and used for clamping the flower basket hanging plate (2), wherein the flower basket hanging plate (2) horizontally slides on the slotted shaking plate assembly (6); The lifting rod assembly (3) comprises a lifting rod (31), a Z-shaped support plate (32) arranged on the mounting plate (1) and used for inserting the lifting rod (31), a guide sleeve (33) arranged on the Z-shaped support plate (32) and correspondingly sleeved with the lifting rod (31), and a limiting mounting plate (34) arranged on the inner side of the Z-shaped support plate (32) and used for coupling the lifting rod (31), and the eccentric wheel assembly (5) drives the lifting rod (31) to lift and lower by rotating to lift the limiting mounting plate (34). The slotted shaking plate assembly (6) comprises a shaking horizontal plate (61) arranged at the upper end of the lifting rod (31), a sliding groove (62) arranged at the lower end of the shaking horizontal plate (61) and used for inserting the flower basket hanging plate (2), a lower end baffle (63) arranged in the sliding groove (62) and used for clamping the flower basket hanging plate (2), and a spring (64) arranged in the sliding groove (62) and used for buffering the flower basket hanging plate (2). Further comprising a pull rod (7) arranged at the position of the slotted shaking plate assembly (6) on one side and hingedly arranged on the flower basket hanging plate (2) and the guide sleeve (33) at both ends, when the lifting rod (31) lifts and lowers, the pull rod (7) drives the flower basket hanging plate (2) to slide left and right in the sliding groove (62), and the flower basket hanging plate (2) regularly slides left and right in the sliding groove (62).

2. The semiconductor dithering mechanism of claim 1, wherein: The eccentric wheel assembly (5) comprises a connecting rod (51) arranged at one end of the output end of the motor (4) and extending to below the limiting mounting plate (34), a support plate (52) arranged on the mounting plate (1) and used for supporting the connecting rod (51), and at least two eccentric wheels (53) arranged at the end of the connecting rod (51) and used for driving the flower basket hanging plate (2) to shake up and down by rotating to lift the limiting mounting plate (34).

3. A semiconductor dithering mechanism according to claim 2, wherein: The lifting rod assembly (3) further comprises a mounting groove (35) arranged on the limiting mounting plate (34) and located above the eccentric wheel (53), and a rolling bearing (36) arranged in the mounting groove (35) and in contact with the eccentric wheel (53).

4. The semiconductor dithering mechanism of claim 2, wherein: Further comprising a sensor assembly (8) arranged on the mounting plate (1) near the eccentric wheel (53) and matched with the motor (4).

5. The semiconductor dithering mechanism of claim 2, wherein: Further comprising a telescopic cylinder (9) arranged on the mounting plate (1), and a notch positioning block (10) arranged on the connecting rod (51), the extension / retraction of the telescopic cylinder (9) and the notch of the notch positioning block (10) are matched to assist in limiting the rotating movement of the connecting rod (51).

6. The semiconductor dithering mechanism of claim 1, wherein: Further comprising a movable slot (11) arranged on the upper end of the lifting rod (31), and an auxiliary rod (12) respectively hingedly arranged on the movable slot (11) and the flower basket hanging plate (2) and used for assisting the left and right sliding of the flower basket hanging plate (2).

Images