Inspection jig

Abstract

Provided is a difficult-to-damage inspection jig. The inspection jig (1) is provided with: a substrate that can be electrically connected to a connector (100) to be inspected; a movable member that is movable; a stretchable member that is stretchable; a stretchable member holding unit that holds the stretchable member; and an elastic member that biases the movable member and the stretchable member holding portion away from each other, the movable member pushing the stretchable member and the stretchable member pushing the substrate when the movable member is brought close to the stretchable member holding portion and the elastic member contracts by a predetermined amount or more, and the stretchable member pushing the substrate when the movable member is brought close to the stretchable member holding portion and the elastic member contracts by a predetermined amount or more. The substrate and the inspection object connector (100) are in a state of being electrically connected.

Description

Technical Field

[0001] The present invention relates to an inspection jig. Background Art

[0002] Conventionally, as disclosed in Patent Document 1, an inspection jig using a probe has been proposed.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Patent Publication No. 6380549 Summary of the Invention

[0006] However, in this structure, the probe directly contacts the object to be inspected, and the inspection jig is easily damaged.

[0007] Therefore, an object of the present invention is, for example, to provide an inspection jig that is difficult to be damaged. Other objects of the present invention will become clear from the description of this specification.

[0008] One aspect of the present invention is an inspection jig, which includes: a substrate capable of being electrically connected to an inspection object connector; a movable member capable of moving; a telescopic member capable of telescoping; a telescopic member holding portion for holding the telescopic member; and an elastic member that applies a force to move the movable member and the telescopic member holding portion away from each other. When the movable member approaches the telescopic member holding portion and the elastic member contracts by a predetermined amount or more, the movable member pushes the telescopic member, and the telescopic member pushes the substrate, bringing the substrate into an electrically connected state with the inspection object connector.

[0009] According to the above aspect of the present invention, an inspection jig that is difficult to be damaged can be provided. Brief Description of the Drawings

[0010] Figure 1 FIG. is an exploded perspective view of the inspection jig of the present embodiment as viewed from below.

[0011] Figure 2 FIG. is an exploded perspective view of the inspection jig as viewed from above.

[0012] Figure 3 FIG. is a perspective view of the inspection jig and the inspection object connector as viewed from above.

[0013] Figure 4 FIG. is a perspective view of the inspection jig and the inspection object connector as viewed from below.

[0014] Figure 5 FIG. is an exploded perspective view of the front substrate assembly.

[0015] Figure 6It is a perspective view of the assembly of the front flexible substrate and the front connector, the front probe holding part, the front connector base, and the front probe group.

[0016] Figure 7 It is a perspective view of the area where the tongue of the front flexible substrate is located, observed from the front and from below.

[0017] Figure 8 It is an exploded perspective view of the rear substrate assembly.

[0018] Figure 9 It is a yz cross-sectional view of the inspection jig and the inspection target connector in the first state.

[0019] Figure 10 It is an xz cross-sectional view of the area where the tongue of the front flexible substrate is located in the first state, enlarged.

[0020] Figure 11 It is a yz cross-sectional view of the inspection jig and the inspection target connector in the second state.

[0021] Figure 12 It is a yz cross-sectional view of the inspection jig and the inspection target connector in the third state.

[0022] Figure 13 It is a yz cross-sectional view of the inspection jig and the inspection target connector in the fourth state.

[0023] Figure 14 It is an xz cross-sectional view of the area where the tongue of the front flexible substrate is located in the fourth state, enlarged. Detailed implementation mode

[0024] Hereinafter, use Figures 1 to 8 to describe this implementation mode. In addition, the implementation mode is not limited to the following implementation modes. Also, as a principle, the content described in one implementation mode can also be applied equally to other implementation modes. In addition, each implementation mode and each modification example can be combined appropriately.

[0025] (Inspection jig 1)

[0026] As Figures 1 to 8 shown, the inspection jig 1 of this implementation mode has a substrate holding part 20, a substrate part 30, and a horizontal position adjustment part 40. The inspection jig 1 contacts the inspection target connector (BtoB connector, Board to Board connector) 100 through the connector contact part 21a at the lower end of the lower holding part 21 of the substrate holding part 20, and is electrically connected to the internal front flexible substrate 31a and rear flexible substrate 32a. In addition, Figure 1 , Figure 2 in, the illustration of the inspection target connector 100 is omitted.

[0027] To explain the directions, the horizontal direction (front-rear direction) in which the two substrate assemblies (front substrate assembly 31 and rear substrate assembly 32) are arranged is set as the x-direction, the direction (left-right direction) perpendicular to the x-direction and in which the two support portions 43 (right support member 43a and left support member 43b) are arranged is set as the y-direction, and the direction (up-down direction) perpendicular to the x-direction and the y-direction is set as the z-direction (first direction) for explanation. Figure 1 In this case, the directions pointed by the arrows of the xyz axes are defined as the front, right, and up directions, respectively. Specifically, the direction from the rear substrate assembly 32 toward the front substrate assembly 31 is defined as the front. Additionally, the direction from the left support member 43b located in the upper right among the two support portions 43 Figure 1 toward the right support member 43a located in the lower left is defined as the right. Further, the direction from the lower holding portion 21 toward the horizontal position adjustment portion 40 is defined as the up. Figure 1

[0028] (Substrate holding portion 20)

[0029] The substrate holding portion 20 includes a lower holding portion (workpiece guide) 21 and an upper holding portion (connection plate) 23. The lower holding portion 21 is provided on the lower side of the substrate portion 30 in the z-direction. The upper holding portion 23 is provided on the upper side of the substrate portion 30 in the z-direction. The lower holding portion 21 and the upper holding portion 23 sandwich the substrate portion 30 in the z-direction.

[0030] The lower holding portion 21 is a member that contacts the housing of the connector 100 to be inspected. The housing of the connector 100 to be inspected is a member that holds the electrodes connected to the front flexible substrate 31a or the rear flexible substrate 32a. The lower holding portion 21 has a hole penetrating in the z-direction. The lower end of the substrate portion 30 is inserted into the hole of the lower holding portion 21 from the upper side in the z-direction. A convex portion (connector contact portion 21a) is formed on the lower side in the z-direction of the lower holding portion 21. The upper end of the connector 100 to be inspected is inserted into the connector contact portion 21a from the lower side in the z-direction. That is, the connector 100 to be inspected is mounted on the connector contact portion 21a in a detachable state.

[0031] ​On the upper side in the z - direction of the lower holding part 21, a front - side probe holding part 31c of the front - side substrate assembly 31 and a rear - side probe holding part 32c of the rear - side substrate assembly 32 are installed. The installation of the front - side probe holding part 31c to the lower holding part 21 is carried out by screwing from the lower side in the z - direction. The installation of the rear - side probe holding part 32c to the lower holding part 21 is carried out by screwing from the lower side in the z - direction. Therefore, the front - side probe holding part 31c and the rear - side probe holding part 32c are installed on the lower holding part 21 in a state where the distance in the z - direction between the area where they are in contact with the housing of the inspection target connector 100 of the lower holding part 21 (connector contact part 21a) does not change.

[0032] The upper holding part 23 has an upper - right holding member 23a and an upper - left holding member 23b. On the lower side in the z - direction of the upper holding part 23, a front - side pusher 31i of the front - side substrate assembly 31 and a rear - side pusher 32i of the rear - side substrate assembly 32 are installed. The installation of the front - side pusher 31i to the upper holding part 23 is carried out by screwing from the upper side in the z - direction. The installation of the rear - side pusher 32i to the upper holding part 23 is carried out by screwing from the upper side in the z - direction.

[0033] (Substrate part 30)

[0034] The substrate part 30 has a front - side substrate assembly 31 and a rear - side substrate assembly 32. The front - side substrate assembly 31 is arranged on the front side in the x - direction, and the rear - side substrate assembly 32 is arranged on the rear side in the x - direction.

[0035] (Front - side substrate assembly 31)

[0036] As Figure 5 shown, the front - side substrate assembly 31 has a front - side flexible substrate (flexible substrate) 31a, a front - side connector 31b, a front - side probe holding part (telescopic member holding part) 31c, a front - side connector base 31d, a front - side connector cover 31f, a front - side probe group 31g, a front - side spring 31h, and a front - side pusher (movable member) 31i.

[0037] (Front - side flexible substrate 31a)

[0038] As Figure 6 、 Figure 7 shown, the front - side flexible substrate 31a has a connector connection end (one end) 31a1, a holding - part connection end (the other end) 31a2, and a pattern part 31a3.

[0039] The connector connection end 31a1 is the end of the front flexible substrate 31a on the front side in the x direction and the upper side in the z direction. At the connector connection end 31a1, a front connector 31b is mounted by soldering or the like. The holding part connection end 31a2 is the end of the front flexible substrate 31a on the rear side in the x direction and the upper side in the z direction, and is mounted on the front probe holding part 31c. For example, the through hole 31a21 provided in the holding part connection end 31a2 is inserted into a mounting seat (not shown) provided on the upper side in the z direction of the probe accommodating part 31c1 of the front probe holding part 31c. However, the mounting of the holding part connection end 31a2 and the front probe holding part 31c is not limited to the insertion of the through hole 31a21 and the mounting seat.

[0040] The pattern part 31a3 is the area between the connector connection end 31a1 and the holding part connection end 31a2. On the lower side (front side) surface in the z direction of the pattern part 31a3, patterns of signal lines and ground lines extending from the connector connection end 31a1 are formed. The pattern part 31a3 is bent in a substantially V shape when viewed from the y direction. At the lower end part in the state of being bent in a substantially V shape in the lower side surface in the z direction of the pattern part 31a3, ends of the signal lines and the ground lines are provided. The ends of the signal lines and the ground lines are used as substrate side electrodes that are electrically connected to the electrodes of the inspection target connector 100. In addition, a slit S is provided around the ends of the signal lines and the ground lines (the area including the part of the pattern part 31a3 that is electrically connected to the inspection target connector 100). Through the slit S, a substantially U-shaped tongue piece 31a4 is formed. The slit S is a notch (slit) with both ends being closed ends, but it can also be that one end is an open end and the other end is a closed end. In addition, the patterns provided on the lower side (front side) surface in the z direction of the pattern part 31a3 are not limited to signal lines and ground lines.

[0041] In order to increase the amount of displacement of the tongue piece downward in the z direction by the probe P of the front probe group 31g described later, it is desired to increase the length in the long side direction of the slit S that forms the tongue piece 31a4. On the other hand, in order not to deteriorate the characteristics in the high-frequency region of the signal line, it is desired to shorten the length in the long side direction of the slit S that forms the tongue piece 31a4. Therefore, while considering both the amount of displacement of the tongue piece 31a4 downward in the z direction and the characteristics in the high-frequency region of the signal line, the length in the long side direction of the slit S that forms the tongue piece 31a4 is determined. For one tongue piece 31a4, only one signal line, ground line, or power line may be provided, or at least one of the signal line, ground line, and power line may be provided in multiple numbers. On the tongue piece 31a4, other types of lines other than the signal line, ground line, and power line may also be provided.

[0042] In addition, the tongue piece 31a4 formed by the slit S is not limited to a substantially U-shaped configuration. As long as the tongue piece can be displaced from the upper side in the z direction to the lower side in the z direction by the probe P of the front probe group 31g in a state where the pattern portion 31a3 does not extend, it may also have other shapes such as a substantially V-shaped configuration, a substantially C-shaped configuration, a substantially L-shaped configuration, a substantially groove-shaped configuration, etc.

[0043] In addition, Figure 1 , Figure 4 , Figure 5 , Figure 7 In the figures other than those mentioned above, the illustration of the signal lines and ground lines of the pattern portion 31a3, the slit S, and the tongue piece 31a4 is omitted.

[0044] (Front connector 31b)

[0045] The front connector 31b is mounted on the connector connection end 31a1 of the front flexible substrate 31a. The front connector 31b is used to electrically connect the front flexible substrate 31a to an inspection device (not shown).

[0046] (Front probe holding portion 31c)

[0047] The front probe holding portion 31c holds the front connector base 31d on the front side in the x direction. The front probe holding portion 31c holds the holding portion connection end 31a2 of the front flexible substrate 31a on the rear side in the x direction.

[0048] (Probe housing portion 31c1)

[0049] On the rear side in the x direction and on the lower side in the z direction of the front probe holding portion 31c, there is provided a probe housing portion 31c1 that holds the front probe group 31g.

[0050] The probe housing portion 31c1 is formed by a hole extending in the z direction. However, the probe housing portion 31c1 may also be formed by a groove extending in the z direction, or may be formed by a combination of a groove and a hole. The width in the x direction and the y direction above the hole (31c11) of the probe housing portion 31c1 is larger than the outer diameter of the spring housing portion (tube) P2 of the probe P that constitutes the front probe group 31g. The width in the x direction and the y direction below the hole (31c12) of the probe housing portion 31c1 is larger than the outer diameter of the tip portion P1 of the probe P that constitutes the front probe group 31g and smaller than the outer diameter of the spring housing portion P2. The upper end and the lower end of the groove and / or hole of the probe housing portion 31c1 are open. The upper end portion of the probe P protrudes upward through the upper portion 31c11 of the hole of the probe housing portion 31c1 and contacts the front pusher 31i. The lower end portion of the probe P passes through the lower portion 31c12 of the hole of the probe housing portion 31c1, protrudes downward, and contacts the tongue piece 31a4.

[0051] (Installation of the front flexible substrate 31a to the front probe holding part 31c)

[0052] The front flexible substrate 31a is installed to the front probe holding part 31c in such a manner as to satisfy the following two conditions.

[0053] First condition: The lower side in the z direction of the front probe holding part 31c faces the upper side surface in the z direction of the pattern part 31a3 of the front flexible substrate 31a.

[0054] Second condition: The ends of the signal lines and ground lines of the pattern part 31a3 of the front flexible substrate 31a are located on the lower side in the z direction of the probe accommodating part 31c1 of the front probe holding part 31c.

[0055] (Front connector base 31d)

[0056] The front connector base 31d holds the front connector 31b (refer to Figure 5 ) on the front side in the x direction. The front connector base 31d is located on the upper side in the z direction compared to the front probe holding part 31c and is installed to the front probe holding part 31c.

[0057] The assembly of the front flexible substrate 31a and the front connector 31b is installed to the assembly of the front probe holding part 31c and the front connector base 31d in such a manner as to clamp the front probe holding part 31c and the front connector base 31d in the x direction and to enclose the lower end of the front probe holding part 31c. The installation of the front probe holding part 31c to the front connector base 31d is performed by screwing from the lower side in the z direction.

[0058] (Front connector cover 31f)

[0059] The front connector cover 31f covers a part of the pattern part 31a3 of the front flexible substrate 31a and the front side in the x direction of the front connector 31b. The installation of the front connector cover 31f to the front connector base 31d is performed by screwing from the front side in the x direction. The front connector cover 31f and the front connector base 31d clamp the front connector 31b in the x direction.

[0060] (Front probe group 31g)

[0061] The front probe group 31g has a plurality of probes (expansion and contraction members) P that expand and contract in the z direction (refer to Figure 6 ). The plurality of probes P are arranged in the y direction. Each of the probes P constituting the front probe group 31g has a tip part P1 on the lower side in the z direction and a spring accommodating part P2 on the upper side in the z direction compared to the tip part P1. A spring (not shown) is accommodated in the spring accommodating part P2. The tip part P1 is urged in the direction in which the entire length of the spring in the spring accommodating part P2 expands.

[0062] In a state where the front flexible substrate 31a is not mounted on the front probe holder 31c, when the probes P constituting the front probe group 31g are each placed on the probe receiving portion 31c1 of the front probe holder 31c, the tip portion P1 of the probe P protrudes downward in the z direction from the groove and / or hole of the probe receiving portion 31c1. However, the spring receiving portion P2 is held by the step difference between the upper 31c11 and the lower 31c12 of the hole of the probe receiving portion 31c1, so the probe P does not fall from the probe receiving portion 31c1.

[0063] In a state where the front flexible substrate 31a is mounted on the front probe holder 31c, when the probes P constituting the front probe group 31g are each placed on the probe receiving portion 31c1 of the front probe holder 31c, the tip portion P1 of the probe P abuts against the back side of the region where the tongue piece 31a4 of the front flexible substrate 31a is located. For example, the first probe P among the plurality of probes P is in a positional relationship of abutting against one of the regions (one of the tongue pieces 31a4) electrically connected to the inspection object connector 100 of the front flexible substrate 31a. In addition, the second probe P different from the first probe P among the plurality of probes P is in a positional relationship of abutting against one of the regions (one of the tongue pieces 31a4) electrically connected to the inspection object connector 100 of the front flexible substrate 31a and a tongue piece 31a4 different from the tongue piece 31a4 corresponding to the first probe P. However, the probe P is very light, so it only abuts and hardly displaces the tongue piece 31a4 downward in the z direction.

[0064] The installation of the assembly of the front flexible substrate 31a and the front connector 31b on the assembly of the front probe holder 31c and the front connector base 31d is performed in a state where the probes P constituting the front probe group 31g are each placed on the probe receiving portion 31c1.

[0065] (Front spring 31h, front pusher 31i)

[0066] The front pusher 31i is fixed to the upper holder 23 (the upper right holder 23a, the upper left holder 23b). The fixing of the front pusher 31i to the upper holder 23 is performed by screwing from the upper side in the z direction. Therefore, the front pusher 31i is mounted on the bracket 45 via the support portion 43 in a state where the distance in the z direction between it and the bracket 45 does not change.

[0067] In addition, the front side push block 31i is held by the front side probe holding portion 31c and the front side connector base 31d in a state where it can move in the z direction. The front side push block 31i based on the front side probe holding portion 31c is held in a state where it can move in the z direction by screwing from the rear side in the x direction. The front side push block 31i is used to press the probes P constituting the front side probe group 31g to the lower side in the z direction. In other words, the plurality of probes P constituting the front side probe group 31g are arranged between the front side flexible substrate 31a and the front side push block 31i.

[0068] A front spring 31h is provided between the front probe holder 31c and the front push block 31i. The front spring 31h applies force in such a manner that the front push block 31i and the front probe holder 31c are separated from each other in the z direction. Therefore, the front spring 31h maintains the front push block 31i and the front probe holder 31c separated. The spring force of the front spring 31h is set to such an amount that the lower holder (workpiece guide) 21 is embedded without applying excessive force to the inspection object connector 100, and the probe (telescopic component) P is not pushed.

[0069] (Rear side substrate assembly 32)

[0070] like Figure 8 As shown, the rear substrate assembly 32 has a rear flexible substrate (flexible substrate) 32a, a rear connector 32b, a rear probe holding portion 32c, a rear connector base 32d, a rear connector cover 32f, a rear probe group 32g, a rear spring 32h, and a rear push block (movable component) 32i.

[0071] Except for the orientation reversal in the x direction, the configuration of the rear substrate assembly 32 is the same as that of the front substrate assembly 31. The rear flexible substrate 32a of the rear substrate assembly 32 corresponds to the front flexible substrate 31a of the front substrate assembly 31. The rear connector 32b of the rear substrate assembly 32 corresponds to the front connector 31b of the front substrate assembly 31. The rear probe holding part 32c of the rear substrate assembly 32 corresponds to the front probe holding part 31c of the front substrate assembly 31. The rear connector base 32d of the rear substrate assembly 32 corresponds to the front connector base 31d of the front substrate assembly 31. The rear connector cover 32f of the rear substrate assembly 32 corresponds to the front connector cover 31f of the front substrate assembly 31. The rear probe group 32g of the rear substrate assembly 32 corresponds to the front probe group 31g of the front substrate assembly 31. The rear spring 32h of the rear substrate assembly 32 corresponds to the front spring 31h of the front substrate assembly 31. The rear pusher 32i of the rear substrate assembly 32 corresponds to the front pusher 31i of the front substrate assembly 31. In addition, in the present embodiment, the numbers of the front connector 31b and the rear connector 32b are different, but the numbers of the front connector 31b and the rear connector 32b may also be the same.

[0072] (Horizontal position adjustment unit 40)

[0073] The horizontal position adjustment unit 40 has a support part (movable head) 43 and a bracket 45 (refer to Figures 1 to 4 ).

[0074] (Support part 43)

[0075] The support part 43 has a right support member 43a and a left support member 43b. The right support member 43a and the left support member 43b are arranged in the y direction. Elastic members such as annular spiral springs (not shown) are respectively built in the right support member 43a and the left support member 43b.

[0076] The right support member 43a is installed on the lower side in the z direction of the upper right side holding member 23a. The installation of the right support member 43a on the upper right side holding member 23a is performed by screwing from the upper side in the z direction. In addition, the right support member 43a is installed on the lower side in the z direction of the bracket 45. The right support member 43a and the bracket 45 clamp the upper right side holding member 23a in the z direction. The installation of the right support member 43a on the bracket 45 is performed by screwing from the upper side in the z direction through the hole of the upper right side holding member 23a.

[0077] The region of the right support member 43a mounted on the upper right holding member 23a can move relative to the region of the right support member 43a mounted on the bracket 45 in the xy direction (a direction perpendicular to the z direction) via the elastic member of the right support member 43a. Accordingly, the upper right holding member 23a is held between the right support member 43a and the bracket 45 in a state where it can move in the xy direction.

[0078] The left support member 43b is mounted on the lower side in the z direction of the upper left holding member 23b. The mounting of the left support member 43b to the upper left holding member 23b is performed by screwing from the upper side in the z direction. Further, the left support member 43b is mounted on the lower side in the z direction of the bracket 45. The left support member 43b and the bracket 45 sandwich the upper left holding member 23b in the z direction. The mounting of the left support member 43b to the bracket 45 is performed by screwing from the upper side in the z direction through the hole of the upper left holding member 23b.

[0079] The region of the left support member 43b mounted on the upper left holding member 23b can move relative to the region of the left support member 43b mounted on the bracket 45 in the xy direction via the elastic member of the left support member 43b. Accordingly, the upper left holding member 23b is held between the left support member 43b and the bracket 45 in a state where it can move in the xy direction.

[0080] The support portion 43 (right support member 43a, left support member 43b) is used to absorb deviations starting from positions that are opposite to the electrodes of the inspection target connector 100 in the z direction in regions where the tongues 31a4 of the front flexible substrate 31a of the front substrate assembly 31 and the tongues of the rear flexible substrate 32a of the rear substrate assembly 32 are located.

[0081] For example, assume that the regions where the tongues 31a4 of the front flexible substrate 31a of the front substrate assembly 31 and the tongues of the rear flexible substrate 32a of the rear substrate assembly 32 are located deviate in the xy plane from positions that are opposite to the electrodes of the inspection target connector 100 in the z direction. In this case, when the inspection jig 1 is mounted on the inspection target connector 100, the bracket 45, the region of the right support member 43a mounted on the bracket 45, and the region of the left support member 43b mounted on the bracket 45 do not need to move, and the substrate holding portion 20, the substrate portion 30, the region of the right support member 43a mounted on the upper right holding member 23a, and the region of the left support member 43b mounted on the upper left holding member 23b can move in the xy plane.

[0082] (bracket 45)

[0083] The bracket 45 holds the inspection jig 1 such as an inspection device and a machine tool, and is installed on a device (not shown) that moves it. The bracket 45 holds the front pusher 31i and the rear pusher 32i in a state where they can move in a direction perpendicular to the z-direction via the support portion 43 and the upper holding portion 23.

[0084] The bracket 45 has a first region 45a, a second region 45b, and a third region 45c. The first region 45a is located at the right end of the bracket 45, the second region 45b is located at the left end of the bracket 45, and the third region 45c is located between the first region 45a and the second region 45b. The upper right holding member 23a and the right support member 43a are arranged below the first region 45a in the z-direction. The upper left holding member 23b and the left support member 43b are arranged below the second region 45b in the z-direction.

[0085] The third region 45c has a notch for accommodating the front connector 31b of the front substrate assembly 31 and the rear connector 32b of the rear substrate assembly 32. The third region 45c is sandwiched in the x-direction by the front connector 31b of the front substrate assembly 31 and the rear connector 32b of the rear substrate assembly 32. Therefore, the upper ends of the front connector 31b and the rear connector 32b are located above the upper holding portion 23 and the support portion 43 in the z-direction.

[0086] (Position relationship between the front pusher 31i, etc. and the support portion 43)

[0087] The front pusher 31i and the rear pusher 32i are arranged at positions closer to the bracket 45 than the support portion 43.

[0088] (Materials of each component, metal components, resin components)

[0089] Among the components constituting the inspection jig 1, the conduction regions such as the front flexible substrate 31a, the front probe group 31g, the rear probe group 32g, and the screws are made of metal. The other components constituting the inspection jig 1 are made of non-conductive components such as resin.

[0090] (Connection process of the inspection jig 1 to the inspection object connector 100)

[0091] Next, the change in the expansion and contraction state of the front spring 31h, etc. when the inspection jig 1 is moved from the upper side in the z-direction to the lower side in the z-direction and connected to the inspection object connector 100 will be described ( Figures 9 to 14 ).

[0092] In addition, Figure 9 , Figures 11 to 13 The yz cross-sectional composition diagram is enlarged compared to the probe P shown in other diagrams such as Figure 1 in order to make it easier to understand the composition of the region where the probe P is located. Therefore,Figure 9 , Figures 11 to 13 The yz cross-sectional configuration diagrams of Figure 1 and other diagrams such as show inconsistent numbers of probes P and aspect ratios of various components.

[0093] In addition, the rear spring 32h is not shown in the Figure 9 , Figures 11 to 13 yz cross-sectional configuration diagrams of . However, the rear spring 32h is located behind the front spring 31h in the x direction and expands and contracts in the same manner as the front spring 31h. In addition, the rear pusher 32i is not shown in the Figure 9 , Figures 11 to 13 yz cross-sectional configuration diagrams of . However, the rear pusher 32i is located behind the front pusher 31i in the x direction and moves in the same manner as the front pusher 31i. In addition, the rear probe group 32g is not shown in the Figure 9 , Figures 11 to 13 yz cross-sectional configuration diagrams of . However, the rear probe group 32g is located behind the front probe group 31g in the x direction and operates in the same manner as the front probe group 31g. In addition, the tongue of the rear flexible substrate 32a is not shown. However, the tongue of the rear flexible substrate 32a is located behind the tongue 31a4 of the front flexible substrate 31a in the x direction and is displaced in the same manner as the tongue 31a4 of the front flexible substrate 31a.

[0094] As Figure 9 shown, before the inspection jig 1 contacts the inspection target connector 100, the front spring 31h and the rear spring 32h are in a stretched state, and the distances between the front pusher 31i and the front probe holding part 31c, and between the rear pusher 32i and the rear probe holding part 32c do not become shorter (the first state). At this time, the tip part P1 on the lower side in the z direction of the probe P constituting the front probe group 31g contacts the tongue 31a4 of the front flexible substrate 31a (refer to Figure 10 ). However, since the probe P is very light, the tongue 31a4 of the front flexible substrate 31a is hardly pressed downward in the z direction. Similarly, the tip part P1 on the lower side in the z direction of the probe P constituting the rear probe group 32g contacts the tongue of the rear flexible substrate 32a. However, since the probe P is very light, the tongue of the rear flexible substrate 32a is hardly pressed downward in the z direction.

[0095] As Figure 11As shown, after the connector under inspection 100 is tightly embedded in the connector contact portion 21a of the inspection jig 1, the front spring 31h and the rear spring 32h are in a stretched state, and the distances between the front pusher 31i and the front probe holding portion 31c, and between the rear pusher 32i and the rear probe holding portion 32c do not become shorter (second state). At this time, the tongue piece 31a4 of the front flexible substrate 31a and the tongue piece of the rear flexible substrate 32a do not contact the connector under inspection 100.

[0096] As Figure 12 shown, if the inspection jig 1 further moves downward in the z direction from the second state, the front spring 31h contracts in the z direction, and the front pusher 31i approaches the front probe holding portion 31c (third state). At this time, the front pusher 31i contacts the upper end portion of the probe P of the front probe group 31g. Similarly, the rear spring 32h contracts in the z direction, and the rear pusher 32i approaches the rear probe holding portion 32c. At this time, the rear pusher 32i contacts the upper end portion of the probe P of the rear probe group 32g. However, the front probe group 31g and the rear probe group 32g do not press down the tongue piece 31a4 of the front flexible substrate 31a and the tongue piece of the rear flexible substrate 32a, and thus do not contact the connector under inspection 100.

[0097] As Figure 13 shown, if the inspection jig 1 further moves downward in the z direction from the third state, the front spring 31h further contracts in the z direction, and the front pusher 31i further approaches the front probe holding portion 31c (fourth state). At this time, the probe P of the front probe group 31g is pressed by the front pusher 31i. Similarly, the rear pusher 32i contracts further in the z direction, and the rear pusher 32i approaches the rear probe holding portion 32c. At this time, the probe P of the rear probe group 32g is pressed by the rear pusher 32i.

[0098] By moving the front pusher 31i downward in the z direction, the probe P of the front probe group 31g moves downward in the z direction, and the tip portion P1 of the probe P pushes the back side (upper side in the z direction) of the front flexible substrate 31a. As a result, the tongue piece 31a4 of the front flexible substrate 31a is pressed downward in the z direction (see Figure 14)。That is, the tongue piece 31a4 of the front flexible substrate 31a is brought close to the electrode of the DUT connector 100 by the probe P of the front probe group 31g. Similarly, by moving the rear pusher 32i downward in the z direction, the probe P of the rear probe group 32g is moved downward in the z direction, and the tip P1 of the probe P pushes the back side (upper side in the z direction) of the rear flexible substrate 32a. As a result, the tongue piece of the rear flexible substrate 32a is pressed downward in the z direction. That is, the tongue piece of the rear flexible substrate 32a is brought close to the electrode of the DUT connector 100 by the probe P of the rear probe group 32g.

[0099] Therefore, when the front pusher 31i is brought close to the front probe holder 31c so that the front spring 31h is contracted by a predetermined amount or more, the front pusher 31i pushes the probe P of the front probe group 31g, and the probe P of the front probe group 31g pushes the tongue piece 31a4 of the front flexible substrate 31a, resulting in a state where the front flexible substrate 31a is electrically connected to the DUT connector 100. Similarly, when the rear pusher 32i is brought close to the rear probe holder 32c so that the rear spring 32h is contracted by a predetermined amount or more, the rear pusher 32i pushes the probe P of the rear probe group 32g, and the probe P of the rear probe group 32g pushes the tongue piece of the rear flexible substrate 32a, resulting in a state where the rear flexible substrate 32a is electrically connected to the DUT connector 100.

[0100] As a result, the front flexible substrate 31a and the rear flexible substrate 32a are in a state of being electrically connected to the DUT connector 100. In addition, the front pusher 31i and the rear pusher 32i are pressed to the lowermost end of the movable range in the z direction.

[0101] (Effect of using movable parts (front pusher 31i, etc.) and telescopic parts (probe P) in the inspection jig 1)

[0102] First, the front pusher 31i pushes the probe P of the front probe group 31g, and the rear pusher 32i pushes the probe P of the rear probe group 32g. The pushed probe P pushes the tongue piece 31a4 of the front flexible substrate 31a and the tongue piece of the rear flexible substrate 32a, connecting the front flexible substrate 31a and the rear flexible substrate 32a to the DUT connector 100. Therefore, without causing significant deformation or displacement of the front flexible substrate 31a and the rear flexible substrate 32a, electrical connection between the front flexible substrate 31a and the rear flexible substrate 32a included in the inspection jig 1 and the DUT connector 100 can be achieved. That is, electrical connection between the front flexible substrate 31a and the rear flexible substrate 32a included in the inspection jig 1 and the DUT connector 100 can be achieved in a state where the inspection jig 1 including the front flexible substrate 31a and the rear flexible substrate 32a is hardly damaged.

[0103] (Effect of arranging movable parts (such as the front pusher 31i) closer to the bracket 45 than the support part 43)

[0104] At least a part of each of the right support member 43a, the movable parts (front pusher 31i, rear pusher 32i), and the left support member 43b can be arranged in a direction (y direction) perpendicular to the first direction. Specifically, at least a part of each of the right support member 43a, the front pusher 31i, and the left support member 43b overlap when viewed from the y direction. In addition, at least a part of each of the right support member 43a, the rear pusher 32i, and the left support member 43b overlap when viewed from the y direction. Therefore, components can be efficiently arranged, and the size of the inspection jig 1 in the z direction can be reduced. By reducing the size of the inspection jig 1 in the z direction, the load when adjusting the deviation in the xy direction using the support part 43 can be reduced.

[0105] (Effect of providing a notch in the third region 45c of the bracket 45)

[0106] The upper end portions (such as the front connector 31b) of the front substrate assembly 31 and the upper end portions (such as the rear connector 32b) of the rear substrate assembly 32 can be accommodated in the notch, and the size of the inspection jig 1 in the z direction can be reduced.

[0107] (Effect of not changing the distance in the z direction between the front pusher 31i, etc. and the bracket 45)

[0108] In addition to the movement in the xy direction achieved by the support part 43, the front pusher 31i and the rear pusher 32i are fixed to the bracket 45 in a desired posture. Thus, even when installing the inspection jig 1 and the inspection object connector 100 in an inclined state, damage to the inspection jig 1 or the inspection object connector 100 can be prevented.

[0109] (Effect of not changing the distance in the z direction between the front probe holding part 31c and the area in contact with the housing of the inspection object connector 100)

[0110] The front probe holding part 31c and the rear probe holding part 32c are fixed to the lower holding part 21 in a desired posture. Thus, even when installing the inspection jig 1 and the inspection object connector 100 in an inclined state, damage to the inspection jig 1 or the inspection object connector 100 can be prevented.

[0111] (Effect of independently pressing by the probe P)

[0112] Considering the height deviation of the portion (electrode) of the signal line or ground line that contacts the connector 100 to be inspected, by individually pushing a telescopic component such as the probe P against each electrode, reliable connection between each electrode and the connector 100 to be inspected can be achieved.

[0113] (Effect of providing tongues on the front flexible substrate 31a and the rear flexible substrate 32a)

[0114] To absorb the height deviation of the electrodes, when the telescopic component such as the probe P is pressed against and a force is locally applied, the tongue 31a4 of the front flexible substrate 31a formed in the region including the portion where the force is applied separates from other regions adjacent to the tongue 31a4 of the front flexible substrate 31a via the slit S and is displaced in the direction of the push (lower side in the z direction). In addition, the tongue of the rear flexible substrate 32a formed in the region including the portion where the force is applied separates from other regions adjacent to the tongue of the rear flexible substrate 32a via the slit S and is displaced in the direction of the push (lower side in the z direction). Therefore, compared with the case where no tongue is provided, even if there is displacement, the flexible substrates (front flexible substrate 31a, rear flexible substrate 32a) are less likely to be damaged.

[0115] (Effect of using the end as an electrode)

[0116] When making an electrical connection with other components in the middle of the signal line, there is a risk of receiving and transmitting noise as the connection portion and the end function as an antenna. By making the electrical connection with other components near the end, the reception and transmission of noise can be reduced. In addition, when making an electrical connection with other components in the middle of the ground line, there is a risk of impedance matching breakdown.

[0117] (Other embodiments, telescopic components other than the probe)

[0118] In this embodiment, a method of using the probe P as a telescopic component that pushes the front flexible substrate 31a from the back side (upper side in the z direction) to the lower side in the z direction and a telescopic component that pushes the rear flexible substrate 32a from the back side (upper side in the z direction) to the lower side in the z direction is described. However, as long as it is a component that can be telescoped in the z direction, it is not limited to the probe P, and other elastic components such as rubber can also be used as the telescopic component.

[0119] (Other embodiments, elastic components other than the spring)

[0120] In this embodiment, a method of providing a front spring 31h between the front probe holder 31c and the front pusher 31i and a rear spring 32h between the rear probe holder 32c and the rear pusher 32i is described. However, as long as it is a component that can be telescoped in the z direction, it is not limited to the spring, and other elastic components can also be used.

[0121] (Other embodiments, substrate)

[0122] In this embodiment, it is described that the substrate built in the inspection jig 1 is a flexible substrate. However, the substrate built in the inspection jig 1 may also be a non-flexible substrate.

[0123] Several embodiments of the present invention have been described, but these embodiments are given as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are equally included in the scope and gist of the invention, and are included within the same scope as the invention described in the claims.

[0124] According to this specification, an inspection jig in the following manner is provided.

[0125] (Mode 1)

[0126] Mode 1 is an inspection jig having: a substrate capable of being electrically connected to an inspection target connector; a movable member capable of moving; a telescopic member capable of telescoping; a telescopic member holding portion for holding the telescopic member; and an elastic member that applies a force to separate the movable member and the telescopic member holding portion from each other. When the movable member approaches the telescopic member holding portion such that the elastic member contracts by a predetermined amount or more, the movable member pushes the telescopic member, and the telescopic member pushes the substrate, resulting in a state where the substrate is electrically connected to the inspection target connector.

[0127] According to the above mode, first, the movable member pushes the telescopic member. The pushed telescopic member pushes the substrate to electrically connect the substrate to the inspection target connector. Therefore, the substrate can be electrically connected to the inspection target connector without causing significant deformation or displacement of the substrate. That is, the electrical connection between the substrate included in the inspection jig and the inspection target connector can be achieved in a state where the inspection jig including the substrate is hardly damaged.

[0128] (Mode 2)

[0129] Mode 2 further includes: a support portion; and a bracket that holds the movable member via the support portion in a state capable of moving in a direction perpendicular to the first direction, and the movable member is disposed closer to the bracket than the support portion.

[0130] According to the above mode, components can be efficiently arranged, and the size of the inspection jig in the first direction can be reduced. By reducing the size of the inspection jig in the first direction, the load when adjusting the deviation in the direction perpendicular to the first direction using the support portion can be reduced.

[0131] (Method 3)

[0132] In Method 3, the substrate further has a connector used for electrical connection with the inspection device, and the bracket has a notch for accommodating the connector.

[0133] According to the above method, the size of the inspection jig in the first direction can be reduced.

[0134] (Method 4)

[0135] In Method 4, the movable member is mounted on the bracket via the support portion in a state where the distance in the first direction between the movable member and the bracket does not change.

[0136] According to the above method, in addition to the movement in the direction perpendicular to the first direction achieved by the support portion, the movable member is fixed to the bracket in a desired posture. Thus, even when the inspection jig and the inspection target connector are installed in an inclined state, damage to the inspection jig or the inspection target connector can be prevented.

[0137] (Method 5)

[0138] In Method 5, there is also a member that contacts the housing of the inspection target connector, and the telescopic member holding portion is mounted on the member in a state where the distance in the first direction between the telescopic member holding portion and the area of the member that contacts the housing does not change.

[0139] According to the above method, the telescopic member holding portion is fixed to the member that contacts the housing of the inspection target connector in a desired posture. Thus, even when the inspection jig and the inspection target connector are installed in an inclined state, damage to the inspection jig or the inspection target connector can be prevented.

[0140] Description of Reference Numerals

[0141] 1 Inspection jig

[0142] 21 Lower holding portion (workpiece guide, member that contacts the housing of the inspection target connector)

[0143] 31a Front flexible substrate (flexible substrate)

[0144] 31b Front connector

[0145] 31c Front probe holding portion (telescopic member holding portion)

[0146] 31h Front spring (elastic member)

[0147] 31i Front pusher (movable member)

[0148] 32a Rear flexible substrate (flexible substrate)

[0149] 32b Rear connector

[0150] 32c Rear probe holding part (telescopic part holding part)

[0151] 32h Rear spring (elastic part)

[0152] 32i Rear pusher (movable part)

[0153] 43 Support part

[0154] 45 Bracket

[0155] 100 Connector to be inspected

[0156] P probe (telescopic part).

Claims

1. An inspection jig, wherein, Comprising: A substrate capable of being electrically connected to the inspection object connector; A movable member capable of moving; A telescopic member capable of telescoping; A telescopic member holding portion for holding the telescopic member; And An elastic member that applies a force to keep the movable member and the telescopic member holding portion away from each other, When the movable member approaches the telescopic member holding portion so that the elastic member contracts by more than a specified amount, the movable member pushes the telescopic member, and the telescopic member pushes the substrate, resulting in a state where the substrate is electrically connected to the inspection object connector.

2. The inspection jig according to claim 1, wherein, Further comprising: A support portion; and A bracket that holds the movable member via the support portion in a state capable of moving in a direction perpendicular to the first direction, The movable member is disposed at a position closer to the bracket than the support portion.

3. The inspection jig according to claim 2, wherein The substrate further has a connector used for electrical connection to the inspection device, The bracket has a notch for receiving the connector.

4. The inspection jig according to claim 2 or 3, wherein The movable member is mounted on the bracket via the support portion in a state where the distance in the first direction between the movable member and the bracket does not change.

5. The inspection jig according to claim 4, wherein It further has a member that contacts the housing of the inspection object connector, The telescopic member holding portion is mounted on the member in a state where the distance in the first direction between the telescopic member holding portion and the area of the member that contacts the housing does not change.

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