Slicing wire roller, slicing machine and slicing wire roller design method

Abstract

This invention provides a slicing roller, a slicing machine, and a design method for the slicing roller. The slicing roller has a winding outer diameter D that varies along the axial direction. S outer diameter of the winding D S The tension gradually increases from both ends of the slicing wire roller towards its center. This invention achieves compensating tension on the cutting wire, overcoming problems such as insufficient cutting force in the center of the cutting wire mesh, unacceptable kerf width, substandard slice thickness, and cutting wire misalignment / skipping. The closer to the center of the slicing wire roller, the greater the compensating tension on the cutting wire. Therefore, the problems of gradually decreasing tension and cutting force in the current slicing process are specifically solved. The cutting force, kerf width, and slice thickness are uniform along the axial direction of the slicing wire roller. Without changing the material or its mechanical properties, the rigidity of the slicing wire roller is improved, and it is less prone to deflection and bending under the pressure of the cutting wire mesh.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment manufacturing technology, and in particular to a slicing roller, a slicing machine, and a design method for the slicing roller. Background Technology

[0002] Multi-wire dicing is a process that uses a slicing machine and dicing wires to cut crystal rods into wafers. The slicing machine is equipped with cylindrical wire rollers that drive the dicing wires. Currently, multi-wire dicing has problems such as insufficient cutting force, unacceptable kerf width, and substandard wafer thickness. This is because the cylindrical wire rollers in current slicing machines are prone to deflection and deformation. The sag of the shaft section between the two ends of the cylindrical wire roller causes the entire cylindrical wire roller to bend, ultimately leading to the aforementioned wafer defects. Summary of the Invention

[0003] In view of this, the present invention provides a slicing roller, a slicing machine, and a design method for a slicing roller, aiming to overcome the problem of poor slicing caused by the deflection deformation of the cylindrical roller.

[0004] The slicing roller of the present invention has a winding outer diameter D that varies along the axial direction. S outer diameter of the winding D S Starting from both ends of the slicing roller and increasing towards the middle, the outer diameter D of the winding increases gradually in a pre-defined Cartesian coordinate system. S The axial position x of the slicing roller conforms to the quadratic function graph curve, the axis of the slicing roller coincides with the X coordinate axis, and the center of one end of the slicing roller coincides with the origin of the coordinate system.

[0005] The shape of the slicing wire roller of the present invention is similar to the shape of the space traversed by the current cylindrical wire roller when it rotates and undergoes deflection deformation. Compared with the volume of the current cylindrical wire roller, the extra volume of the slicing wire roller of the present invention forms a compensation redundancy. The compensation redundancy increases the radius of the arc segment when the cutting wire is wound around the slicing wire roller. The closer to the middle of the slicing wire roller, the greater the compensation redundancy and the larger the radius of the arc segment. That is, the increase in the radius of the arc segment increases from both ends of the slicing wire roller towards the middle of the slicing wire roller.

[0006] The beneficial effects of the slicing roller of the present invention are:

[0007] 1) It achieves tension compensation for the cutting wire. When the cutting wire roller of the present invention is used for slicing, the cutting wire is tensioned by obtaining compensation tension. Therefore, the cutting wire can apply sufficient cutting force to the crystal rod, thereby obtaining better slicing quality and overcoming the problems of poor slicing quality such as insufficient cutting force in the middle of the cutting wire mesh, non-compliant cut width, substandard slice thickness, and cutting wire deviation due to poor cutting wire tension.

[0008] 2) The tension compensation effect is differentiated along the axial direction of the slicing wire roller, the closer to the middle of the slicing wire roller, the greater the compensation tension obtained by the cutting wire, thus the problem of gradual attenuation of the wire mesh tension and cutting force in the current slicing process is solved, and the cutting force, cutting mark width and slicing thickness along the axial direction of the slicing wire roller are uniform when the slicing wire roller is used for slicing, and finally the wafers with equal performance and quality are obtained; in addition, the compensation tension obtained by the cutting wire is appropriate, neither excessive nor insufficient, and the final tension of the cutting wire and the cutting force acting on the crystal bar are closer to the ideal situation under the standard rigid body of the wire roller.

[0009] 3) The slicing wire roller of the present application improves the rigidity without changing the material and material mechanical properties of the slicing wire roller, and the higher rigidity makes the slicing wire roller not easy to deform and bend under the pressure of the wire mesh, thus solving the problem that the wire groove is damaged by being scraped and pressed by the cutting wire due to the deflection and bending of the current cylindrical wire roller.

[0010] In some embodiments, the slicing wire roller includes an inner roller and a roller sleeve sleeved with the inner roller, a plurality of wire grooves are formed on the outer periphery of the roller sleeve, and the outer diameter D of the wire groove is greater than the outer diameter D of the inner roller. S The distance from the bottom of the wire groove to the axis of the slicing wire roller is twice the distance.

[0011] In some embodiments, the outer diameter D of the inner roller increases from both ends of the inner roller to the middle of the inner roller, and reaches the maximum value D at the middle of the inner roller. max , and reaches the minimum value D min at at least one end of the inner roller.

[0012] In some embodiments, the minimum wall thickness of the roller sleeve is uniformly arranged along the axial direction.

[0013] In some embodiments, in a preset rectangular coordinate system, the radius y of the inner roller and the axial position x of the slicing wire roller comply with the outer diameter compensation calculation formula f(x), .

[0014] wherein L is the axial size of the inner roller, d is the maximum sag deformation amount of a preset reference cylindrical roller under the action of a preset radial load F uniformly distributed along the axial direction, the axial size of the preset reference cylindrical roller is equal to L, and the outer diameter of the preset reference cylindrical roller is equal to D min .

[0015] In some embodiments, the preset radial load F is uniformly distributed within the axial size interval of the preset reference cylindrical roller, D max =D min +2d, , and E is the elastic modulus of the inner roller, and E is equal to the elastic modulus of the preset reference cylindrical roller.

[0016] In some embodiments, at any axial position of the slicing wire roller, D S The difference between D and the minimum wall thickness of the sleeve at the axial position is 0.033≤ ≤0.06.

[0017] In some embodiments, the minimum wall thickness of the sleeve increases from both ends of the sleeve to the middle of the sleeve.

[0018] In some embodiments, the outer diameter D of the inner roller is uniformly arranged along the axial direction.

[0019] The slicing machine of the present application comprises a slicing wire roller.

[0020] In the slicing wire roller design method of the present application, the slicing wire roller has an axially differentiated wire winding outer diameter D S The wire winding outer diameter D S increases from both ends of the slicing wire roller to the middle of the slicing wire roller;

[0021] In a preset planar rectangular coordinate system:

[0022] The wire winding outer diameter D S obeys a quadratic function image with the axial position x of the slicing wire roller, the axis of the slicing wire roller coincides with the X coordinate axis, and the center of one end of the slicing wire roller coincides with the origin of the coordinate system;

[0023] The slicing wire roller comprises an inner roller and a sleeve arranged on the inner roller, the sleeve has a plurality of wire grooves on the outer periphery, the wire winding outer diameter D S is twice the distance from the groove bottom to the axis of the slicing wire roller; the outer diameter D of the inner roller increases from both ends of the inner roller to the middle of the inner roller, and reaches a maximum value D max at the middle of the inner roller, and reaches a minimum value D min at at least one end of the inner roller, and the minimum wall thickness of the sleeve is uniformly arranged along the axial direction;

[0024] The slicing wire roller design method comprises the following steps:

[0025] Step 1, according to Euler-Bernoulli beam theory, calculate the maximum sagging deformation d of a preset reference cylindrical roller under the action of a preset radially uniformly distributed load F;

[0026] Step 2, set the relative position of the preset reference cylindrical roller and the preset planar rectangular coordinate system, in the preset planar rectangular coordinate system, the axis of the preset reference cylindrical roller coincides with the X coordinate axis, and the center of one end of the preset reference cylindrical roller coincides with the coordinate origin;

[0027] Step 3: In the preset Cartesian coordinate system, use the function graph curve of the compensation calculation formula f(x) as the inner roller generatrix of the slicing roller, and determine the outer diameter D of the inner roller of the slicing roller at each axial position within the preset axial dimension range of the reference cylindrical roller, where:

[0028] The expression for f(x) is L is equal to the axial dimension of the preset reference cylindrical roller, D = 2 × f(i), f(i) is the function value of f(x) when x = i, and i is the axial distance from any position on the slicing roller to the origin of the coordinate system;

[0029] Step 4: Summate twice the minimum wall thickness of the roller sleeve with the outer diameter D of the inner roller at any axial position of the slicing wire roller. The sum is taken as the outer diameter D of the winding of the slicing wire roller at that axial position. S .

[0030] In some implementations, the ratio of the minimum wall thickness of the roller sleeve to the outer diameter D of the inner roller is not less than 0.033 and not greater than 0.06.

[0031] In some implementations, the formula for calculating the maximum sagging deformation d is: E equals the elastic modulus of the preset reference cylindrical roller, D min It is equal to the outer diameter of the preset reference cylindrical roller. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the slicing roller according to Embodiment 1 of the present invention;

[0033] Figure 2 for Figure 1 A partial structural schematic diagram of the slicing roller shown;

[0034] Figure 3 For use in determining Figure 1 The slice shown is analyzed using a function analysis image of a roller structure.

[0035] Figure 4 This is a schematic diagram of the slicing roller according to Embodiment 2 of the present invention;

[0036] Figure 5 A statistical chart of surface deformation data for existing cylindrical rollers;

[0037] Figure 6 This is a statistical chart of surface deformation data of a slicing roller according to one embodiment of the present invention.

[0038] Reference numerals: 100, slicing roller; 10, inner roller; 20, roller sleeve. Detailed Implementation

[0039] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0041] The present application provides a slicing wire roller 100 and a slicing machine comprising the slicing wire roller 100, the slicing machine is a device for driving multiple cutting wires to slide and rub a crystal bar so as to cut the crystal bar into multiple wafers, the slicing wire roller 100 is rotatably installed in a frame in the slicing machine and is wound by the multiple cutting wires, the slicing wire roller 100 is driven to rotate by a wire roller driving unit in the slicing machine, so as to drive the cutting wires to move relative to the crystal bar. Multiple slicing wire rollers 100 are mounted in the slicing machine, and the cutting wires are wound around at least two slicing wire rollers 100, and when slicing is performed, the crystal bar is rubbed and cut off by the cutting wire segment located between the two slicing wire rollers 100.

[0042] The wire roller mounted on the existing slicing machine is in a cylindrical shape, the number of wire rollers in the slicing machine is multiple, the multiple wire rollers are arranged in parallel and spaced apart in the axial direction, the multiple cutting wires are wound around the outer circumferential side of the multiple wire rollers and are arranged in the axial direction of the wire rollers to form a cutting net, the axial direction of the crystal bar is consistent with the axial direction of the wire roller during slicing, and the crystal bar moves relative to the cutting net in a direction perpendicular to the axial direction. A plurality of circular wire grooves are arranged in the axial direction on the outer circumferential side of each wire roller, each wire groove extends annularly along the axis of the wire roller, the cutting wire is wound in the wire groove of the wire roller, and the diameters of all the wire grooves in the existing cylindrical wire roller are equal, that is, the distance from the groove bottom of all the wire grooves to the axis of the cylindrical wire roller is equal, so that when the multiple cutting wires are wound around the wire roller, multiple arc segments with equal radii are formed in the multiple wire grooves.

[0043] In order to enable the cutting wire to load sufficient cutting force on the crystal bar, the cutting wire needs to be in a tensioned state. At present, the means for realizing the tensioning of the cutting wire includes adjusting the distance between the axes of the multiple wire rollers, and the cutting wire is tensioned as the multiple wire rollers move away from each other, so as to realize the tensioning of the cutting net.

[0044] However, the existing slicer is prone to have the following problems in slicing process: the cutting force of local cutting line is insufficient, the cutting mark of local position of the crystal bar does not meet the requirements, the thickness of some wafers is inconsistent, and the thickness of the sliced wafers does not meet the requirements. The main reason for the above slicing defects is that the wire roller is deformed, and the shaft section between the two ends of the wire roller is drooping, causing the whole wire roller to bend. The cutting wire in the tension state applies radial load to the outer circumferential side of the crystal bar, the wire roller is deformed due to the radial load, and the maximum deformation of the whole wire roller occurs in the middle part of the wire roller. Therefore, the slicing defects mainly occur in the shaft section between the two ends of the crystal bar and the wafers formed by the shaft section between the two ends of the crystal bar.

[0045] Therefore, the slicing wire roller 100 is improved in the present application: the slicing wire roller 100 has a wire winding outer diameter D S When the cutting wire is wound around the outer circumferential side of the slicing wire roller 100, the double radius of the arc segment of the cutting wire is equal to the wire winding outer diameter D S The wire winding outer diameter D S From the two ends of the slicing wire roller 100 to the middle part of the slicing wire roller 100, in the preset plane rectangular coordinate system, the wire winding outer diameter D S Complies with a quadratic function image curve with the axial position x of the slicing wire roller, the axis of the slicing wire roller coincides with the X coordinate axis, and the center of one end of the slicing wire roller coincides with the origin of the coordinate system. The middle part of the slicing wire roller 100 is located between the two ends of the slicing wire roller 100, that is, the wire winding outer diameter D S From one end of the slicing wire roller 100 to the middle part of the slicing wire roller 100, the wire winding outer diameter D

[0046] In some embodiments, the distance from the middle part of the slicing wire roller 100 to the two ends of the slicing wire roller 100 is equal, that is, the wire winding outer diameter D S The maximum value appears at the midpoint of the slicing wire roller 100. In other embodiments, the distance from the middle part of the slicing wire roller 100 to the two ends of the slicing wire roller 100 is not equal.

[0047] In some embodiments, the slicing wire roller 100 comprises an inner roller 10 and a roller sleeve 20, the inner roller 10 is a rotary body structure, the roller sleeve 20 is coaxially sleeved on the outer circumferential side of the inner roller 10, the axis of the slicing wire roller 100 is the axis of the inner roller 10 and the roller sleeve 20, and the outer circumferential side of the roller sleeve 20 is provided with a plurality of wire grooves arranged at intervals along the axial direction of the slicing wire roller 100, each wire groove is a circular groove and extends along the circumferential direction of the slicing wire roller 100 to surround the axis of the slicing wire roller 100; the wire winding outer diameter D SThat is, the groove diameter, which is twice the distance from the bottom of the groove to the axis of the slicing roller 100. In other words, at any position where a groove is formed along the axial direction of the slicing roller 100, the groove diameter at that location is the outer diameter D of the winding of the slicing roller 100 at that location. S The diameter of the multiple grooves increases from both ends of the slicing roller 100 toward the middle of the slicing roller 100.

[0048] When the slicing wire roller 100 includes the roller sleeve 20, the outer periphery of the slicing wire roller 100 is the outer periphery of the roller sleeve 20. At any position in the axial direction of the slicing wire roller 100, the outer diameter D of the winding is always satisfied. S > Outer diameter D of inner roller 10; In other embodiments, the slicing wire roller 100 does not include roller sleeve 20 and is formed only by inner roller 10. The wire groove of the slicing wire roller 100 is formed on the outer peripheral side of inner roller 10, and the outer peripheral side of inner roller 10 is the outer peripheral side of slicing wire roller 100. At any position in the axial direction of slicing wire roller 100, the outer diameter D of the winding wire is... S = Outer diameter D of inner roller 10.

[0049] Specifically, in some embodiments, the inner roller 10 is a metal part, and the roller sleeve 20 is a rubber coating layer that covers at least the outer periphery of the inner roller 10. The material of the inner roller 10 is preferably 40Cr.

[0050] See Figures 1-2 In some embodiments, the outer diameter D of the inner roller 10 increases from both ends of the inner roller 10 towards the middle, with the middle located between the two ends. That is, the outer diameter D of the inner roller 10 gradually increases from one end towards the middle and then gradually decreases from the middle towards the other end. The distance from the middle to both ends of the inner roller 10 is equal. The minimum wall thickness of the roller sleeve 20 is evenly distributed along the axial direction of the slicing wire roller 100. A groove is formed on the outer periphery of the roller sleeve 20, including the bottom of the groove. The inner periphery of the roller sleeve 20 is attached to the outer periphery of the inner roller 10. The minimum wall thickness of the roller sleeve 20 is the distance from the bottom of the groove to the inner periphery of the roller sleeve 20.

[0051] The outer diameter of the inner roller 10 reaches its maximum value D at the middle of the inner roller 10. max Furthermore, the outer diameter of the inner roller 10 reaches its minimum value D at at least one end of the inner roller 10. min D max With D min The difference is 2d, where d refers to: assuming a cylindrical wire roller, the inner roller of which is made of the same material as the inner roller 10 of the slicing wire roller 100 of the present invention, the inner roller of which has the same axial dimension as the inner roller 10 of the slicing wire roller 100 of the present invention, and the two have the same mechanical properties, and the outer diameter of the inner roller of which is equal to D.min When the cylindrical wire roller is subjected to a preset radial load F exerted by the cutting wire, and the preset radial load F is uniformly distributed along the axial direction of the cylindrical wire roller, and the direction of the preset radial load F is directed to the axis of the cylindrical wire roller, the cylindrical wire roller is deformed to bend, and the maximum sag deformation of the shaft section between the two ends of the cylindrical wire roller is d, as shown in Figure 2 For convenience of description, the inner roller of the above imaginary cylindrical wire roller is referred to as a preset reference cylindrical roller hereinafter.

[0052] It can be understood that if the slicing machine is equipped with the above cylindrical wire roller, the cylindrical wire roller will be deformed by a maximum sag deformation of d under the pressure of the cutting wire, which not only causes the cylindrical wire roller to bend, but also causes the cutting net to be insufficiently tensioned locally, and causes the cutting force of part of the cutting wire to decrease, the cutting mark at a local position of the crystal bar to not meet the requirements, and the thickness of part of the wafers to have errors or inconsistencies, and other slicing processing problems.

[0053] Under ideal conditions, the load exerted on the wire roller by the plurality of cutting wires is a radial load directed to the axis of the wire roller, and the load exerted on the wire roller by the plurality of cutting wires is uniformly distributed along the axial direction of the wire roller, and the wire roller is a standard rigid body without deflection deformation, and the plurality of cutting wires arranged on the wire roller should have the same tension, so under ideal conditions, the cutting force of the plurality of cutting wires acting on the crystal bar is equal, the cutting mark width is uniform along the axial direction of the crystal bar and the wire roller, and the slicing thickness is uniform along the axial direction of the crystal bar and the wire roller. The preset radial load F borne by the wire roller from the cutting wire under ideal conditions is obtained in advance according to the slicing process and related parameters.

[0054] The key to determining the outer shape structure of the slicing wire roller 100 of the present application lies in determining the wire outer diameter D S in the axial dimension interval of the slicing wire roller 100. The inner roller 10 structure of the slicing wire roller 100 and the determination method of the inner roller outer diameter D of the slicing wire roller 100 are introduced below. Figures 1-2

[0055] The structural features of the slicing wire roller 100 need to be disclosed in combination with a preset planar rectangular coordinate system, and the relative positions of the slicing wire roller 100 and the preset planar rectangular coordinate system of the present application are set according to the following rules: as shown in Figure 3 , the X coordinate axis of the preset planar rectangular coordinate system coincides with the axis of the slicing wire roller 100, and the coordinate system origin of the preset planar rectangular coordinate system is located at the center of one end of the slicing wire roller 100, so the Y coordinate axis of the preset planar rectangular coordinate system is perpendicular to the axis of the slicing wire roller 100, the normal projection of the inner roller 10 outer periphery side in the first quadrant of the preset planar rectangular coordinate system forms an inner roller 10 generatrix curve, and the function expression of the inner roller 10 generatrix curve is:

[0056] ; ​

[0057] The above function expression is called an outer diameter compensation calculation formula, where L is the axial dimension of the inner roller 10, d is the maximum sagging deformation amount of a preset reference cylindrical roller under the action of a preset radial load F, the axial dimension of the preset reference cylindrical roller is equal to L, and the outer diameter of the preset reference cylindrical roller is equal to D min At any position in the axial dimension interval of the slicing wire roller 100, the outer diameter D of the inner roller 10 is equal to 2xf(x), for example, along the axial direction of the slicing wire roller 100, the outer diameter of the inner roller 10 at a position away from the origin i of the preset planar rectangular coordinate system is equal to 2xf(i), where f(i) is the function value of the outer diameter compensation calculation formula f(x) when x=i. In this way, the outer diameter of the inner roller 10 at any position can be calculated according to the above outer diameter compensation calculation formula, so as to determine the shape of the inner roller 10.

[0058] It can be understood that when a preset reference cylindrical roller with an axial dimension of L and an outer diameter equal to D min undergoes a preset radial load F applied by the cutting wire, the preset reference cylindrical roller is bent and deformed. In the case where the X coordinate axis of the preset planar rectangular coordinate system coincides with the axis of the preset reference cylindrical roller and the origin of the coordinate system of the preset planar rectangular coordinate system is located at the center of one end of the preset reference cylindrical roller, the outer peripheral side of the preset reference cylindrical roller in the first quadrant of the preset planar rectangular coordinate system forms a quadratic function curve, and the corresponding function of the quadratic function curve is the outer diameter compensation calculation formula f(x). At the same time, the quadratic function curve is the generatrix of the inner roller 10 of the slicing wire roller 100 of the present application.

[0059] When the preset reference cylindrical roller undergoes a preset radial load F uniformly distributed along the axial direction, the axial length of the preset reference cylindrical roller is L, and the outer diameter of the preset reference cylindrical roller is D min , the calculation formula of the maximum sagging deformation amount d of the preset reference cylindrical roller is derived according to the Euler-Bernoulli beam theory as follows: , D max =D min +2d, where E is the elastic modulus of the inner roller 10 of the slicing wire roller 100 of the present application, and E is also equal to the elastic modulus of the preset reference cylindrical roller. Alternatively, when the material of the inner roller 10 is 40Cr, the elastic modulus E of the inner roller 10 is 206 GPa when calculating the maximum sagging deformation amount d.

[0060] Figures 1-2 After the structure and outer diameter of the inner roller 10 of the slicing wire roller 100 shown in the figure are determined, the minimum wall thickness of the roller sleeve 20 sleeved on the outer peripheral side of the inner roller 10 is determined according to 0.033 ≤0.06, where at any axial position of the slicing wire roller 100, the wire winding outer diameter D SThe difference between the outer diameter D of the inner roller 10 and the outer diameter of the sleeve 20 is the minimum wall thickness of the sleeve 20 at the axial position. The sleeve 20 is provided with a wire groove on the outer periphery, and the minimum wall thickness of the sleeve 20 is the distance from the groove bottom to the inner periphery of the sleeve 20.

[0061] Optionally, when the outer diameter D of the inner roller 10 at a certain axial position is 150mm, the minimum wall thickness of the sleeve 20 at the position is in the range of 4.95mm to 9mm, and the outer diameter D of the wire around the wire roller 100 at the position is in the range of 159.9mm to 168mm. S / The wire groove diameter is in the range of 159.9mm to 168mm.

[0062] Figures 1-2 The structure and outer diameter of the inner roller 10 of the wire roller 100 shown are determined according to the structure parameters of the preset reference cylindrical roller, the elastic modulus of the inner roller 10, and the preset radial load F, Figures 1-2 The wire roller 100 shown is an upgraded replacement for the corresponding preset reference cylindrical roller, and the preset reference cylindrical roller is equivalent to the improved structure basis of the wire roller 100. As shown in the figure, Figure 3 As shown, the X-axis of the preset plane coordinate system coincides with the axis of the wire roller 100, and coincides with the axis of the corresponding preset reference cylindrical roller of the wire roller 100, and the dashed line parallel to the X-axis of the preset plane coordinate system represents the generatrix of the preset reference cylindrical roller. The curve indicated by S is the image of the outer diameter compensation calculation formula f(x) in the horizontal interval [0, L], and the curve indicated by S represents the generatrix of the inner roller 10 of the wire roller 100.

[0063] Compared with the existing cylindrical wire roller, Figures 1-2 The overall rigidity of the inner roller 10 of the wire roller 100 shown is improved, and it is not easy to be deflected and bent under the pressure of the cutting wire; the uniform wall thickness of the sleeve 20 ensures the balanced mechanical properties of the sleeve 20 everywhere, and improves the service life of the wire roller 100.

[0064] Referring to Figure 4 In other embodiments, the minimum wall thickness of the sleeve 20 increases from both ends of the sleeve 20 to the middle of the sleeve 20, i.e. the minimum wall thickness of the sleeve 20 gradually increases from one end of the sleeve 20 to the middle of the sleeve 20, and then gradually decreases from the middle of the sleeve 20 to the other end of the sleeve 20. The distance from the middle of the sleeve 20 to both ends of the sleeve 20 is equal, and the outer diameter D of the inner roller 10 is equal along the axial direction of the wire roller 100. The outer diameter D of the inner roller 10 can also increase from both ends of the inner roller 10 to the middle of the inner roller 10.

[0065] The shape of the slicing wire roller 100 of the present application tends to be similar to the shape of the space passed by the current cylindrical wire roller when rotating and deforming by deflection, compared with the volume of the current cylindrical wire roller, the excess part of the volume of the slicing wire roller 100 of the present application forms a compensation redundancy, if the shape of the space passed by the cylindrical wire roller when rotating is denoted as Q, the actual occupied space volume of the cylindrical wire roller is P, then the compensation redundancy is the part remaining after P is removed from Q, the compensation redundancy increases the arc segment radius of the cutting wire when winding the slicing wire roller 100, the closer to the middle of the slicing wire roller 100, the greater the compensation redundancy and the arc segment radius, that is, the increase of the arc segment radius increases from both ends of the slicing wire roller 100 to the middle of the slicing wire roller 100;

[0066] The beneficial effects of the slicing wire roller 100 of the present application are:

[0067] 1) The compensation tension for the cutting wire is realized, when slicing processing is carried out using the slicing wire roller 100 of the present application, the cutting wire is tensioned by obtaining compensation tension, so that the cutting wire can apply sufficient cutting force to the crystal bar, so that better slicing processing quality can be obtained, and the problems of slicing processing such as insufficient cutting force in the middle of the cutting wire net, non-compliance of the width of the cutting mark, non-standard thickness of the slicing, and cutting wire offset and jumping are overcome;

[0068] 2) The tension compensation effect is differentiated along the axial direction of the slicing wire roller 100, the closer to the middle of the slicing wire roller 100, the greater the compensation tension obtained by the cutting wire, so that the problems of gradual change of the cutting wire net tension and gradual attenuation of the cutting force in the current slicing processing are solved, when slicing processing is carried out using the slicing wire roller 100 of the present application, the cutting force, the width of the cutting mark, and the thickness of the slicing can be ensured to be uniform along the axial direction of the slicing wire roller 100, and finally the wafers with equal performance and quality are obtained, in addition, the compensation tension obtained by the cutting wire is appropriate, neither excessive nor insufficient, and the final tension of the cutting wire and the final cutting force acting on the crystal bar are closer to the ideal situation under the standard rigid body of the wire roller;

[0069] 3) The slicing wire roller 100 of the present application has improved rigidity without changing the material and material mechanical properties of the slicing wire roller 100, the higher rigidity makes the slicing wire roller 100 not easy to deform and bend under the pressure of the cutting wire net, and solves the problem that the wire groove is damaged by being scraped and pressed by the cutting wire due to the deflection and bending of the current cylindrical wire roller.

[0070] Figure 5The diagram illustrates the deformation of an existing cylindrical roller under a preset radial load F from a cutting line. The preset radial load F is evenly distributed along the axial direction of the cylindrical roller. The amount of sagging deformation of the cylindrical roller under the pressure of the cutting line increases from both ends of the cylindrical roller towards the middle, with the maximum sagging deformation at the middle reaching 1.036 mm.

[0071] Figure 6 The diagram illustrates the deformation of the slicing roller 100 of the present invention under a preset radial load F from the cutting line. The preset radial load F is uniformly distributed along the axial direction of the slicing roller 100. The maximum deformation of the slicing roller 100 occurs at both ends of the slicing roller 100, specifically 0.1219 mm. Furthermore, a peak deformation of 0.0373 mm occurs between the two ends of the slicing roller 100. Both the maximum and peak deformation values ​​are less than 1.036 mm. Therefore, when subjected to the same radial load from the cutting line, the deformation amplitude of the slicing roller 100 of the present invention is reduced, and the attenuation of the cutting line tension is lessened. This reduces the attenuation of the cutting force, alleviates the phenomenon of the cutting line shifting or skipping due to slack, and improves processing defects such as excessively wide cuts and insufficient slice thickness.

[0072] The two ends of the slicing roller 100 are also the two ends of the inner roller 10. This invention does not limit the shape of the inner roller 10 in the slicing roller 100. When the axis of the slicing roller 100 coincides with the X-axis of a preset planar rectangular coordinate system, and the origin of the coordinate system is located at the center of one end of the slicing roller 100, the orthogonal projections of the bottoms of the multiple grooves in the first quadrant of the preset planar rectangular coordinate system respectively form multiple groove bottom projection points. The distance from each groove bottom projection point to the X-axis is equal to the outer diameter D of the winding at the axial position of that groove bottom projection point. S By connecting these bottom projection points of the trench one by one with a smooth curve, a quadratic function curve can be obtained, which is simply called the plotted quadratic function curve. The plotted quadratic function curve is located on the side of the function graph of the compensation calculation formula f(x) that is relatively far away from the X-axis. It can be determined that the plotted quadratic function curve and the function graph of f(x) can be translated closer along the Y-axis until they coincide. After multiple bottom projection points are translated closer to the X-axis along the negative Y-axis, they can all fall on the function graph curve of the compensation calculation formula f(x).

[0073] The following describes the design method for the slicing roller of the invention, which includes:

[0074] Step 1: Based on the Euler-Bernoulli beam theory, calculate the maximum sagging deformation d of the preset reference cylindrical roller under the action of a preset radial load F that is uniformly distributed in the axial direction.

[0075] Step 2, set the relative position of the preset reference cylindrical roller and the preset plane rectangular coordinate system, in which the axis of the preset reference cylindrical roller coincides with the X coordinate axis and the center of one end of the preset reference cylindrical roller coincides with the coordinate origin;

[0076] Step 3, in the preset plane rectangular coordinate system, take the function image curve of the compensation calculation formula f(x) as the inner roller generatrix of the slicing wire roller, and determine the outer diameter D of the inner roller of the slicing wire roller at each axial position in the axial dimension interval of the preset reference cylindrical roller;

[0077] The expression of f(x) is , where L is equal to the axial dimension of the preset reference cylindrical roller, D = 2xf(i), f(i) is the function value of f(x) when x = i, and i is the axial distance from any position on the slicing wire roller to the coordinate origin;

[0078] Step 4, sum the double of the minimum wall thickness of the roller cover and the outer diameter D of the inner roller of the slicing wire roller, and take the sum as the winding outer diameter D of the slicing wire roller S .

[0079] In some embodiments, the ratio of the minimum wall thickness of the roller cover to the outer diameter D of the inner roller is not less than 0.033 and not greater than 0.06; and / or,

[0080] The calculation formula of the maximum sag deformation d is: , where E is equal to the elastic modulus of the preset reference cylindrical roller, D min is equal to the outer diameter of the preset reference cylindrical roller.

[0081] The above slicing wire roller design method is used to determine Figures 1-2 The structure of the slicing wire roller 100 as shown in the figure, as described above, Figures 1-2 The slicing wire roller 100 adopts a uniform wall thickness design, that is, the distance from the groove bottom of all wire grooves on the outer peripheral side of the roller cover 20 to the inner peripheral side of the roller cover 20 is equal. Therefore, when the inner roller 10 generatrix of the slicing wire roller 100 determined according to step 3 is a quadratic function image curve, the radius y of the inner roller 10 and the axial position x of the slicing wire roller 100 conform to a quadratic function image, and at any axial position of the slicing wire roller, the inner roller outer diameter D is equal to twice the inner roller 10 radius y, so the inner roller outer diameter D and the axial position x of the slicing wire roller 100 also conform to a quadratic function image, and further, the winding outer diameter D S is obtained by adding twice the minimum wall thickness of the roller cover to the inner roller outer diameter D S , and the axial position x of the slicing wire roller 100 also conforms to a quadratic function image.

[0082] The technical features of the above-described embodiments can be combined in any manner. For the sake of brevity, not all possible combinations of the technical features in the above-described embodiments are described, however, as long as the combinations of the technical features do not contradict each other, they should be considered to fall within the scope of the present specification.

[0083] Those skilled in the art should recognize that the above-described embodiments are merely used to illustrate the present application, but not to limit the present application, and any suitable modification and change made to the above-described embodiments within the spirit and principle of the present application should fall within the scope of the present application.

Claims

1. A method of designing a thread roller for slicing, characterized by, The method comprises: Step 1, calculating the maximum sagging deformation d of a preset reference cylindrical roller under the action of a preset radially distributed load F in the axial direction; Step 2, setting the position of the preset reference cylindrical roller relative to a preset planar rectangular coordinate system, in which the axis of the preset reference cylindrical roller coincides with the X coordinate axis, and the center of one end of the preset reference cylindrical roller coincides with the coordinate origin; Step 3, in the preset planar rectangular coordinate system, taking the function image curve of the compensation calculation formula f(x) as the inner roll generatrix of the slicing wire roller, and determining the outer diameter D of the inner roll of the slicing wire roller at each axial position in the axial dimension interval of the preset reference cylindrical roller, wherein: The expression of f(x) is L is equal to the axial dimension of the preset reference cylindrical roller, D=2xf(i), f(i) is the function value of f(x) when x=i, and i is the axial distance from any position on the slicing wire roller to the coordinate origin. Step 4, summing double the minimum wall thickness of the sleeve with the inner roll diameter D of the slicing wire roll, the resulting sum being the winding outer diameter D of the slicing wire roll S ; the ratio of the minimum wall thickness of the sleeve to the outer diameter D of the inner roll is not less than 0.033 and not more than 0.06; and / or, The calculation formula of the maximum sag deformation d is: E is equal to the elastic modulus of the preset reference cylindrical roller, and D min is equal to the outer diameter of the preset reference cylindrical roller.

2. A slicing thread roller characterized by comprising: The slicing thread roller includes an inner roller (10) and a roller sleeve (20) sleeved with the inner roller (10), and has an axially differentiated thread winding outer diameter D S , the thread winding outer diameter D S is obtained according to the slicing thread roller design method of claim 1; The roller cover (20) is provided with a plurality of wire grooves on the outer periphery, and the wire winding outer diameter D S The wire winding outer diameter D is twice the distance from the wire groove bottom to the wire roller axis S The wire winding outer diameter D increases from the two ends of the wire roller to the middle part of the wire roller in the preset planar rectangular coordinate system: The wire winding outer diameter D S The axial position x of the slicing wire roller coincides with a quadratic function image, the axis of the slicing wire roller coincides with the X coordinate axis, and the center of one end of the slicing wire roller coincides with the origin of the coordinate system. The radius y of the inner roll (10) and the axial position x of the slicing wire roll conform to an outer diameter compensation calculation formula f(x), ; L is the axial dimension of the inner roll (10), d is the maximum sagging deformation of a preset reference cylindrical roll under the action of a preset radial load F uniformly distributed in the axial direction, the axial dimension of the preset reference cylindrical roll is equal to L, and the outer diameter of the preset reference cylindrical roll is equal to D min .

3. The thread roller for slicing as claimed in claim 2, wherein The outer diameter D of the inner roll (10) increases from both ends of the inner roll (10) to the middle of the inner roll (10) and reaches a maximum value D at the middle of the inner roll (10) max and a minimum value D at at least one end of the inner roll (10) min The minimum wall thickness of the roll cover (20) is arranged equidistantly in the axial direction.

4. The slicing thread roller according to claim 2, wherein the preset radially distributed load F is uniformly distributed in the axial dimension interval of the preset reference cylindrical roller, D max = D min + 2d, E is the modulus of elasticity of the inner roller (10) and is equal to the modulus of elasticity of the preset reference cylindrical roller.

5. The slicing thread roller according to claim 2, wherein D - d is the minimum wall thickness of the sleeve (20) at the axial position of the slice with the wire roll, 0.033 ≤ D - d ≤ 0.

06. S D - d is the minimum wall thickness of the sleeve (20) at the axial position of the slice with the wire roll, 0.033 ≤ D - d ≤ 0.

06. ≤0.

06.

6. The slicing thread roller according to claim 2, wherein the minimum wall thickness of the sleeve (20) increases from both ends of the sleeve (20) to the middle of the sleeve (20), and the outer diameter D of the inner roll (10) is uniformly arranged along the axial direction.

7. A microtome, characterized by The slicing wire roller comprises any one of the sleeves according to claims 2-6.

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