Vacuum coating equipment with oxidation source and gas blocking mechanism arranged on side face

Abstract

The invention discloses vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side face. The vacuum coating equipment comprises a reaction container provided with a vacuum cavity; the rotary drum is rotationally arranged in the vacuum cavity; the guide rail is arranged at the bottom of the vacuum cavity, and the rotary drum can move on the guide rail in the first horizontal direction; the oxidation source is arranged on one side of the reaction container in the second horizontal direction, and a gas outlet of the oxidation source is located in the vacuum cavity and faces the rotary drum; the two groups of gas blocking mechanisms are symmetrically arranged on the two sides of the oxidation source in the first horizontal direction, and each gas blocking mechanism comprises a supporting rod, a gas blocking plate and a rotating cylinder; the gas baffle comprises a first part and a second part, the first part is fixedly connected with the supporting rod, the second part is far away from the supporting rod, and the included angle between the first part and the second part is an obtuse angle; the rotary air cylinder is connected with the supporting rod, so that the air baffle plate is switched between a first position and a second position; when the gas baffle is located at the first position, the second part is close to and faces the rotary drum; when the gas baffle is located at the second position, the second part is far away from the drum.

Description

Technical Field

[0001] This specification relates to the technical field of vacuum coating, and particularly to a vacuum coating apparatus with an oxidation source and a gas baffle mechanism arranged on the side. Background Art

[0002] Vacuum coating refers to a method of heating a metal or non-metal material under high vacuum conditions, causing it to evaporate and condense on the surface of a workpiece (metal, semiconductor, or insulator) to form a thin film. Vacuum coating is an important aspect of the field of vacuum applications. It is based on vacuum technology, uses physical or chemical methods, and incorporates a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency, and magnetron, providing a new process for thin film preparation in scientific research and practical production. Simply put, the method of evaporating or sputtering a metal, alloy, or compound in a vacuum and causing it to solidify and deposit on the object to be coated (referred to as a substrate, wafer, or matrix) is called vacuum coating.

[0003] By arranging an oxidation source, a vacuum coating device can oxidize a metal target, generate an oxide thin film, and deposit it on the surface of the substrate. The oxidation source plays a crucial role in the process of depositing a metal thin film, enabling the oxidation reaction of metal materials to form oxide film layers of metal materials such as tungsten, molybdenum, nickel, and aluminum. However, in a vacuum chamber, process gases are prone to overflow and cannot be well concentrated in the area of the oxidation source. Summary of the Invention

[0004] The inventors have found through research that by fixedly arranging a baffle at an appropriate position in a vacuum coating device, process gases can be effectively concentrated better on both sides of the oxidation source in the oxidation source area, preventing more overflow of process gases.

[0005] However, such a fixedly arranged baffle can only be used for the case where the oxidation source is arranged at the end of the drum path. As Figure 1 and Figure 2 shown, the oxidation source 3' is arranged on one side of the reaction vessel 1' in the first horizontal direction X (the drum 2' can move along the first horizontal direction X, that is, the oxidation source 3' is arranged at the end of the moving path of the drum 2'). By fixedly arranging a baffle 4' at a specific position (between the drum 2' and the oxidation source 3') in the vacuum chamber 11', process gases can be effectively concentrated better on both sides of the oxidation source 3' in the oxidation source area, preventing more overflow of process gases.

[0006] Due to space and function considerations, the position of the oxidation source needs to be adjusted so that the oxidation source is set on the side of the vacuum chamber during the movement path of the drum (i.e., the oxidation source is set on one side of the reaction vessel in the second horizontal direction Y). To prevent the drum from colliding with the baffle during movement, the baffle needs to completely avoid the maximum point on the outer diameter of the drum, and a traditional fixed arc-shaped plate cannot be used for gas blocking.

[0007] Therefore, an object of the present application is to provide a vacuum coating device with an oxidation source and a gas blocking mechanism arranged on the side, which can avoid interference and collision between the drum and the gas baffle during reciprocating movement.

[0008] To achieve the above object, an embodiment of the present specification provides a vacuum coating device with an oxidation source and a gas blocking mechanism arranged on the side, including: A reaction vessel provided with a vacuum chamber; A drum rotatably arranged in the vacuum chamber for carrying substrates; A guide rail fixedly arranged at the bottom of the vacuum chamber, the guide rail extending along the first horizontal direction; the bottom of the drum is movably connected to the guide rail and can move along the first horizontal direction on the guide rail; An oxidation source arranged on one side of the reaction vessel in the second horizontal direction, the gas outlet of the oxidation source being located in the vacuum chamber and facing the drum; the second horizontal direction is perpendicular to the first horizontal direction; Two groups of gas blocking mechanisms symmetrically arranged on both sides of the oxidation source in the first horizontal direction, including a support rod, a gas baffle and a rotary cylinder, the support rod extending along the vertical direction; the gas baffle includes a connected first part and a second part, the first part is fixedly connected to the support rod, the second part is away from the support rod, and the included angle between the first part and the second part is an obtuse angle; the rotary cylinder is connected to the support rod for driving the support rod to drive the gas baffle to rotate, so that the gas baffle switches between a first position and a second position; when the gas baffle is in the first position, the second part is close to and faces the drum; when the gas baffle is in the second position, the second part is away from the drum.

[0009] As a preferred embodiment, the rotary cylinder drives the support rod to rotate reciprocally by 90°.

[0010] As a preferred embodiment, when the gas baffle is in the first position, the first part is perpendicular to the first horizontal direction, and the second part is parallel to the outer peripheral surface of the drum.

[0011] As a preferred embodiment, when the air baffle is in the second position, the first portion is parallel to the first horizontal direction, and the second portion and the support rod are located on a side of the first portion away from the drum.

[0012] As a preferred embodiment, in the second horizontal direction, the distance between the support rod and the side of the drum closest to the oxidation source is greater than 0.

[0013] As a preferred embodiment, in the vertical direction, the length of the air baffle covers the length of the oxidation source, the length of the air baffle covers the length of the drum, and the length of the support rod covers the length of the air baffle.

[0014] As a preferred embodiment, the drum is connected with a first driving member and a second driving member. The first driving member is used to drive the drum to rotate around a rotation axis extending vertically, and the second driving member is used to drive the drum to move along the guide rail; when the air baffle is in the first position, the second driving member is in a shutdown state.

[0015] As a preferred embodiment, the air baffle mechanism further includes a top bearing seat and a top bearing. The top bearing seat is fixedly connected to the inner side wall of the top plate of the reaction vessel, and the top bearing is rotatably connected between the top bearing seat and the support rod.

[0016] As a preferred embodiment, the rotary cylinder is connected with a tracheal joint, and the rotary cylinder is fixedly connected to the top of the support rod through a coupling and a connecting shaft.

[0017] As a preferred embodiment, the air baffle mechanism further includes a bottom bearing seat and a bottom bearing. The bottom bearing seat is fixedly connected to the inner side wall of the bottom plate of the reaction vessel; the bottom bearing seat is provided with a receiving groove extending in the vertical direction, the bottom of the support rod and the bottom bearing are received in the receiving groove, and the bottom bearing is rotatably connected between the bottom bearing seat and the support rod. Beneficial effects

[0018] For the vacuum coating equipment provided with an oxidation source and an air baffle mechanism on the side in this embodiment, the oxidation source is arranged on one side of the reaction vessel in the second horizontal direction, and the bottom of the drum is movably connected to the guide rail and can move along the first horizontal direction on the guide rail. The first horizontal direction and the second horizontal direction are perpendicular to each other, that is, the oxidation source is arranged on the side of the vacuum cavity in the moving path of the drum rather than at the end of the moving path, which can optimize the space and function of the vacuum coating equipment.

[0019] In addition, two groups of gas baffle mechanisms are symmetrically arranged on both sides of the oxidation source in the first horizontal direction. The gas baffle mechanism fixedly connects the gas baffle to the support rod and sets a rotary cylinder to drive the support rod to drive the gas baffle to rotate, so that the gas baffle can be switched between a first position and a second position; the included angle between the first part and the second part of the gas baffle is an obtuse angle, which is convenient for the second part to be close to the drum. When the gas baffle is in the first position, the second part is close to and faces the drum, and at this time the gas baffle can effectively reduce the overflow and waste of the process gas of the oxidation source; when the gas baffle is in the second position, the second part is far away from the drum, and at this time it can avoid interference and collision between the drum and the gas baffle when the drum reciprocates in the first horizontal direction.

[0020] Referring to the following description and the accompanying drawings, specific embodiments of the present invention are disclosed in detail, indicating the ways in which the principles of the present invention can be employed. It should be understood that the embodiments of the present invention are not limited in scope thereby.

[0021] Features described and / or illustrated for one embodiment can be used in the same or similar way in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0022] It should be emphasized that the term "comprising / including" when used herein refers to the presence of features, whole things, steps or components, but does not exclude the presence or addition of one or more other features, whole things, steps or components. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 FIG. 18 is a partial cross-sectional schematic view of a vacuum coating apparatus having an oxidation source gas baffle function in the prior art; Figure 2 FIG. Figure 1 is an enlarged schematic view of the baffle and the oxidation source in FIG. Figure 3 FIG. 26 is a schematic structural view of a vacuum coating apparatus provided with an oxidation source and a gas baffle mechanism on the side in the present embodiment; Figure 4 FIG. Figure 3 is a sectional view of Figure 5 FIG. Figure 4 is an enlarged schematic view of part A in FIG. Figure 6Structural schematic diagram of a gas baffle mechanism provided in this embodiment; Figure 7 is Figure 6 explosion structural schematic diagram; Figure 8 Top view of the vacuum coating equipment when the gas baffle is in the second position; Figure 9 is Figure 8 enlarged structural schematic diagram of part B in Figure 10 Top view of the vacuum coating equipment when the gas baffle is in the first position; Figure 11 is Figure 10 enlarged structural schematic diagram of part C in

[0025] Explanation of reference numerals: 1’, reaction vessel; 11’, vacuum chamber; 2’, drum; 3’, oxidation source; 4’, baffle; 20, reaction vessel; 201, vacuum chamber; 30, drum; 40, oxidation source; 50, guide rail; 60, gas baffle mechanism; 1, support rod; 2, gas baffle; 21, first part; 22, second part; 23, screw; 3, top bearing; 4, top bearing seat; 5, bottom bearing; 6, bottom bearing seat; 61, receiving groove; 7, rotary cylinder; 8, gas pipe joint; 9, coupling; 10, connecting shaft; 11, connecting seat; 12, sealing ring; X, first horizontal direction; Y, second horizontal direction; Z, vertical direction. Detailed implementation manners

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0027] It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or there can also be an intermediate element therebetween. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element therebetween at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation manners.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. The terms used in the description of the present invention herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0029] Please refer to Figures 3 to 11 An embodiment of this application provides a vacuum coating apparatus with an oxidation source 40 and a gas blocking mechanism 60 arranged on the side, including: a reaction vessel 20, a drum 30, a guide rail 50, an oxidation source 40, and two groups of gas blocking mechanisms 60.

[0030] Among them, the reaction vessel 20 is provided with a vacuum chamber 201. The vacuum chamber 201 can be evacuated through a vacuum pumping assembly connected to the vacuum chamber 201. The drum 30 is rotatably arranged in the vacuum chamber 201 for carrying substrates. The substrate is rotatably arranged on the circumference of the drum 30 and rotates together with the drum 30. The guide rail 50 is fixedly arranged at the bottom of the vacuum chamber 201, and the number thereof can be two. The guide rail 50 extends along the first horizontal direction X. The bottom of the drum 30 is movably connected to the guide rail 50, so that the drum 30 can move along the first horizontal direction X on the guide rail 50. The oxidation source 40 is arranged on one side of the reaction vessel 20 in the second horizontal direction Y. The gas outlet of the oxidation source 40 is located in the vacuum chamber 201 and is arranged facing the drum 30, so that an oxide film can be deposited on the surface of the substrate on the circumference of the drum 30. The second horizontal direction Y is perpendicular to the first horizontal direction X, and both the first horizontal direction X and the second horizontal direction Y are perpendicular to the vertical direction Z and parallel to the horizontal plane.

[0031] As Figure 9 and Figure 11 shown, the two groups of gas blocking mechanisms 60 are symmetrically arranged on both sides of the oxidation source 40 in the first horizontal direction X, so that air leakage can be prevented from both sides and the gas blocking effect is better. As Figure 5 shown, the gas blocking mechanism 60 includes a support rod 1, a gas blocking plate 2, and a rotary cylinder 7. The support rod 1 extends along the vertical direction Z. As Figure 6 and Figure 7As shown, the baffle 2 includes a connected first part 21 and second part 22. The first part 21 is fixedly connected to the support rod 1, and the second part 22 is away from the support rod 1. The included angle between the first part 21 and the second part 22 is an obtuse angle. The rotary cylinder 7 is connected to the support rod 1 and is used to drive the support rod 1 to drive the baffle 2 to rotate, so that the baffle 2 switches between a first position and a second position. When the baffle 2 is in the first position, the second part 22 is close to and faces the drum 30; when the baffle 2 is in the second position, the second part 22 is away from the drum 30. The two rotary cylinders 7 control the rotation directions of the two support rods 1 to be opposite.

[0032] For the vacuum coating equipment with the oxidation source 40 and the gas baffle mechanism 60 arranged on the side provided in this embodiment, the oxidation source 40 is arranged on one side of the reaction vessel 20 in the second horizontal direction Y, and the bottom of the drum 30 is movably connected to the guide rail 50 and can move along the first horizontal direction X on the guide rail 50. The first horizontal direction X and the second horizontal direction Y are perpendicular to each other, that is, the oxidation source 40 is arranged on the side of the vacuum chamber 201 in the moving path of the drum 30, rather than at the end of the moving path, which can optimize the space and function of the vacuum coating equipment.

[0033] In addition, two groups of gas baffle mechanisms 60 are symmetrically arranged on both sides of the oxidation source 40 in the first horizontal direction X. The gas baffle mechanism 60 fixedly connects the baffle 2 to the support rod 1 and sets a rotary cylinder 7 to drive the support rod 1 to drive the baffle 2 to rotate, so that the baffle 2 can switch between a first position and a second position; the included angle between the first part 21 and the second part 22 of the baffle 2 is an obtuse angle, which is convenient for the second part 22 to be close to the drum 30. When the baffle 2 is in the first position, the second part 22 is close to and faces the drum 30. At this time, the baffle 2 can effectively reduce the overflow and waste of the process gas of the oxidation source 40; when the baffle 2 is in the second position, the second part 22 is away from the drum 30. At this time, it can avoid interference and collision between the drum 30 and the baffle 2 when the drum 30 reciprocates in the first horizontal direction X.

[0034] In this embodiment, as Figure 3 and Figure 4 shown, the rotation axis of the drum 30 extends along the vertical direction Z, and the support rod 1 also extends along the vertical direction Z. When the drum 30 rotates around the rotation axis extending along the vertical direction Z, the substrates on the circumferential side of the drum 30 are sequentially rotated to the position facing the oxidation source 40, thereby completing the deposition of the oxide film.

[0035] In this embodiment, in the vertical direction Z, the length of the air baffle 2 covers the length of the oxidation source 40, so that the leakage of the oxidation source 40 can be completely blocked. Specifically, when there is an upper and lower offset between the oxidation source 40 and the drum 30, the length of the air baffle 2 can be appropriately extended so that the length of the air baffle 2 in the vertical direction Z also covers the length of the drum 30 in the vertical direction Z, which can appropriately improve the deposition efficiency of the oxide film. Since the support rod 1 needs to support the air baffle 2, in the vertical direction Z, the length of the support rod 1 covers the length of the air baffle 2.

[0036] Specifically, the first part 21 and the support rod 1 are fixedly connected by a plurality of screws 23, and the plurality of screws 23 are spaced apart in the vertical direction Z, which can realize the stable connection between the air baffle 2 and the support rod 1.

[0037] In this embodiment, the rotary cylinder 7 drives the support rod 1 to reciprocally rotate by 90°, that is, the included angle between the first position and the second position is 90°.

[0038] As Figure 8 and Figure 9 shown, when the air baffle 2 is in the second position, it is in the retracted state, the first part 21 is parallel to the first horizontal direction X. At this time, the second part 22 and the support rod 1 are located on the side of the first part 21 away from the drum 30, and the distance between the first part 21 and the outer diameter of the drum 30 in the second horizontal direction Y is greater than 0, providing sufficient space for the movement of the drum 30. Thus, the drum 30 can reciprocally move in the first horizontal direction X, and the air baffle 2 will not interfere with the drum 30.

[0039] When the drum 30 moves in place, the rotary cylinder 7 drives the air baffle 2 to rotate by 90°, so that the air baffle 2 is in the first position, as Figure 10 and Figure 11 shown. At this time, the first part 21 is perpendicular to the first horizontal direction X, and the second part 22 faces and is close to and parallel to the outer peripheral surface of the drum 30, ensuring that during the film coating process, the air baffle 2 can effectively reduce the overflow of process gas during oxidation.

[0040] In this embodiment, in the second horizontal direction Y, the distance between the support rod 1 and the closest side of the drum 30 to the oxidation source 40 is greater than 0, so that the support rod 1 will never interfere with or collide with the drum 30.

[0041] Specifically, the drum 30 is connected to a first driving member and a second driving member (not shown in the figure). The first driving member is used to drive the drum 30 to rotate around a vertically extending rotation axis. The first driving member can be a rotating motor. The second driving member is used to drive the drum 30 to move along the guide rail 50. The second driving member can be a linear motor. When the air baffle 2 is in the first position, the deposition process of the oxide film can be carried out. The second driving member is in a stopped state and cannot move the drum 30 along the guide rail 50, and the first driving member can be in an operating state. When the air baffle 2 is in the second position, the second driving member can be in an operating state.

[0042] In this embodiment, the air baffle mechanism 60 further includes a top bearing seat 4 and a top bearing 3. The top bearing seat 4 is fixedly connected to the inner side wall of the top plate of the reaction vessel 20, and the top bearing 3 is rotatably connected between the top bearing seat 4 and the support rod 1.

[0043] Specifically, the rotary cylinder 7 is connected to an air pipe joint 8. As Figure 7 shown, the rotary cylinder 7 is fixedly connected to the top of the support rod 1 through a coupling 9 and a connecting shaft 10. The rotary cylinder 7 is arranged outside the vacuum chamber 201, and the support rod 1, the top bearing 3, and the top bearing seat 4 are arranged inside the vacuum chamber 201. The connecting shaft 10 and the coupling 9 pass through the top plate of the vacuum chamber 201 to realize the connection between the rotary cylinder 7 and the support rod 1.

[0044] The rotary cylinder 7 and the connecting shaft 10 are combined into a rotating shaft through the coupling 9, and the support rod 1 is fixed to the bottom of the connecting shaft 10 so as to rotate synchronously with the rotary cylinder 7. The connecting shaft 10, the sealing ring 12, and the top bearing 3 form a local vacuum rotary sealing component as a whole, ensuring the sealing performance of the vacuum chamber 201 during rotation.

[0045] Specifically, a connecting seat 11 is provided between the rotary cylinder 7 and the top bearing seat 4. The top of the connecting seat 11 is connected to the rotary cylinder 7, and the bottom of the connecting seat 11 is connected to the outer side wall of the top plate of the vacuum chamber 201. The coupling 9 is located inside the connecting seat 11, and the connecting seat 11 can protect the coupling 9 and support the rotary cylinder 7.

[0046] In this embodiment, as Figure 6 and Figure 7As shown, the air baffle mechanism 60 further includes a bottom bearing seat 6 and a bottom bearing 5. By providing a top bearing 3 and a bottom bearing 5, the support rod 1 can be rotatably arranged within the vacuum chamber 201. The bottom bearing seat 6 is fixedly connected to the inner sidewall of the bottom plate of the reaction vessel 20. The bottom bearing seat 6 is provided with a receiving groove 61 extending along the vertical direction Z. The bottom of the support rod 1 and the bottom bearing 5 are received within the receiving groove 61. The bottom bearing 5 is rotatably connected between the bottom bearing seat 6 and the support rod 1.

[0047] The bottom of the support rod 1 is connected to the bottom bearing seat 6 and the bottom bearing 5, facilitating the restriction of the irregular swing of the bottom of the support rod 1 when the top of the support rod 1 rotates, thereby ensuring that the entire air baffle 2 does not collide with the drum 30 due to the cantilever swing during rotation.

[0048] In the present embodiment, the air baffle 2 extends along the vertical direction Z. Preferably, the second part 22 of the air baffle 2 can be arc-shaped, similar to the outer peripheral surface shape of the drum 30. While having a good air baffle effect, it can maximize the area of the drum 30 facing the gas outlet of the oxidation source 40 to improve the deposition efficiency. In other embodiments, the second part 22 of the air baffle 2 can also be flat.

[0049] More preferably, the second part 22 of the air baffle 2 is concentric with the outer diameter of the drum 30, facilitating the second part 22 of the air baffle 2 to be closer to the drum 30 and preventing more air leakage.

[0050] It should be noted that in the description of this specification, terms such as "first", "second", etc. are only used for descriptive purposes and to distinguish similar objects, and there is no sequential order between them, nor can they be understood as indicating or implying relative importance. In addition, in the description of this specification, unless otherwise stated, the meaning of "a plurality" is two or more.

[0051] Any numerical value cited herein includes all values from the lower limit value to the upper limit value increasing in increments of one unit, provided that there is an interval of at least two units between any lower value and any higher value. For example, if the value of the quantity of a component or a process variable (such as temperature, pressure, time, etc.) is stated as ranging from 1 to 90, preferably from 20 to 80, more preferably from 30 to 70, then the purpose is to illustrate that values such as 15 to 85, 22 to 68, 43 to 51, 30 to 32, etc. are also explicitly listed in this specification. For values less than 1, a unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1. These are merely examples of what is intended to be clearly expressed, and it can be considered that all possible combinations of the numerical values listed between the lowest value and the highest value are explicitly stated in this specification in a similar manner.

[0052] Unless otherwise indicated, all ranges include the endpoints and all numbers between the endpoints. The term "about" or "approximate" used in connection with a range is applicable to both endpoints of that range. Thus, "about 20 to 30" is intended to cover "about 20 to about 30", inclusive of the recited endpoints.

[0053] All articles and references disclosed, including patent applications and publications, are incorporated herein by reference for various purposes. The term "consisting essentially of" in describing a combination shall include the identified elements, ingredients, components, or steps as well as other elements, ingredients, components, or steps that do not materially affect the basic novel characteristics of the combination. The use of the terms "comprising" or "including" to describe the combinations of elements, ingredients, components, or steps herein also contemplates embodiments consisting essentially of these elements, ingredients, components, or steps. By using the term "may" herein, it is meant that any of the attributes so-described "may" include are optional.

[0054] Plural elements, ingredients, components, or steps can be provided by a single integrated element, ingredient, component, or step. Alternatively, a single integrated element, ingredient, component, or step may be divided into separate plural elements, ingredients, components, or steps. The disclosure of the term "a" or "an" used to describe an element, ingredient, component, or step is not intended to exclude other elements, ingredients, components, or steps.

[0055] It should be understood that the above description is for purposes of illustration and not limitation. Many embodiments and many applications other than the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but should be determined with reference to the appended claims and the full scope of equivalents to which such claims are entitled. For the purpose of completeness, all articles and references, including patent applications and published disclosures, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein from the foregoing claims is not intended to forego that subject matter nor should it be considered that the inventors did not consider that subject matter to be part of the disclosed inventive subject matter.

Claims

1. A vacuum coating device with an oxidation source and a gas blocking mechanism arranged on the side, characterized in that, include: A reaction container provided with a vacuum cavity; Rotating a drum disposed in the vacuum chamber to carry a substrate; A guide rail fixedly arranged at the bottom of the vacuum chamber, the guide rail extending along a first horizontal direction; the bottom of the rotating drum is movably connected to the guide rail and can move along the first horizontal direction on the guide rail; an oxidation source disposed on one side of the reaction container in a second horizontal direction, wherein a gas outlet of the oxidation source is located in the vacuum chamber and is disposed toward the drum; the second horizontal direction is perpendicular to the first horizontal direction; Two groups of air baffle mechanisms are symmetrically arranged on both sides of the oxidation source in the first horizontal direction, including a support rod, an air baffle plate and a rotating cylinder, and the support rod extends in the vertical direction; the air baffle plate includes a first part and a second part that are connected, the first part is fixedly connected to the support rod, and the second part is away from the support rod, and the angle between the first part and the second part is an obtuse angle; the rotating cylinder is connected to the support rod, and is used to drive the support rod to drive the air baffle plate to rotate, so that the air baffle plate switches between a first position and a second position; when the air baffle plate is in the first position, the second part is close to and faces the rotating drum; when the air baffle plate is in the second position, the second part is away from the rotating drum.

2. The vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side according to claim 1, characterized in that The rotary cylinder drives the support rod to reciprocate by 90°.

3. The vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side according to claim 2, wherein, When the air baffle is located at the first position, the first portion is perpendicular to the first horizontal direction, and the second portion is parallel to the outer circumferential surface of the rotating drum.

4. The vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side according to claim 2, wherein, When the air baffle is located at the second position, the first part is parallel to the first horizontal direction, and the second part and the support rod are located on a side of the first part away from the rotating drum.

5. The vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side according to claim 1, characterized in that, In the second horizontal direction, the distance between the support rod and the side of the drum closest to the oxidation source is greater than 0.

6. The vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side according to claim 1, characterized in that, In the vertical direction, the length of the air baffle covers the length of the oxidation source, the length of the air baffle covers the length of the drum, and the length of the support rod covers the length of the air baffle.

7. The vacuum coating equipment with an oxidation source and a gas baffle mechanism arranged on the side according to claim 1, characterized in that, The drum is connected to a first driving member and a second driving member, the first driving member is used to drive the drum to rotate around a vertically extending rotation axis, and the second driving member is used to drive the drum to move along the guide rail; when the air baffle is located at the first position, the second driving member is in a shutdown state.

8. The vacuum coating equipment with an oxidation source and a gas blocking mechanism arranged on the side according to claim 1, characterized in that, The air blocking mechanism also includes a top bearing seat and a top bearing. The top bearing seat is fixedly connected to the inner wall of the top plate of the reaction container, and the top bearing is rotatably connected between the top bearing seat and the support rod.

9. The vacuum coating equipment with an oxidation source and a gas baffle mechanism arranged on the side according to claim 8, characterized in that, The rotary cylinder is connected with an air pipe joint, and the rotary cylinder is fixedly connected to the top of the support rod through a coupling and a connecting shaft.

10. The vacuum coating equipment with an oxidation source and a gas barrier mechanism arranged on the side according to claim 9, characterized in that, The air blocking mechanism also includes a bottom bearing seat and a bottom bearing, wherein the bottom bearing seat is fixedly connected to the inner wall of the bottom plate of the reaction container; the bottom bearing seat is provided with a receiving groove extending in a vertical direction, the bottom of the support rod and the bottom bearing are accommodated in the receiving groove, and the bottom bearing is rotatably connected between the bottom bearing seat and the support rod.

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