High-temperature annealing furnace for preparing heterojunction battery

Abstract

The invention relates to the technical field of copper grid line heterojunction battery annealing, in particular to a high-temperature annealing furnace for preparing a heterojunction battery. Comprising a plurality of heating units, each heating unit comprises a first air cavity shell, an air return cavity shell and a second air cavity shell, and a circulating fan forms circulating air flow above the production line. A heating assembly is reasonably arranged in each air cavity shell, so that a copper grid line different battery component in the high-temperature annealing furnace can be completely immersed in uniform hot air circulation, and the stability and uniformity of the process temperature in the large-process air cavity shell of the annealing furnace are realized; a basket annealing mode of a synchronous copper grid line different battery can realize high-productivity and high-temperature process operation under the condition that the occupied area is as small as possible. Compared with an external circulation air mode of a traditional annealing furnace, under the condition that heat sources such as a heating wire are the same in power, the maximum upper limit of the temperature in the furnace can be increased by 30-50 DEG C, efficiency is higher, the temperature rising time can be effectively shortened, and the temperature rising limit can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of annealing of copper grid line heterojunction cells, and more particularly to a high-temperature annealing furnace for preparing heterojunction cells. Background Art

[0002] Solar cells have received extensive attention in the photovoltaic (PV) industry due to their high power conversion efficiency and cost-effectiveness. Heterojunction cells, as the most promising mainstream high-efficiency technology for the next generation, have reached a consensus in the industry. Among them, the copper grid line heterojunction cell technology is more competitive in the market in terms of comprehensive cost compared with other heterojunction cell technologies.

[0003] Existing annealing furnaces mostly use external circulation fresh air heating. Due to the requirements of chamber space and production capacity transmission, it is impossible to ensure the uniform heating of heterojunction cell products throughout the annealing process. Secondly, due to the use of a flower basket annealing mode for copper grid line heterojunction cell components, it has high requirements for the uniformity of annealing temperature. Traditional annealing furnaces cannot meet the temperature requirements of copper grid line heterojunction cells under the flower basket annealing mode, and they occupy a large area and are difficult to arrange on the production line. Summary of the Invention

[0004] The present invention aims to at least improve one of the technical problems existing in the prior art. For this purpose, the present invention provides a high-temperature annealing furnace for preparing heterojunction cells.

[0005] A high-temperature annealing furnace for preparing heterojunction cells according to an embodiment of the first aspect of the present invention is provided on parallel frames on both sides of the production line of the heterojunction cells. Among them, it includes a plurality of heating units, and each heating unit includes: A first air chamber housing is provided on the frame, and the first air chamber housing has a first orifice plate facing the frame; A second air chamber housing is symmetrically arranged with the first air chamber housing with respect to the frame, and the second air chamber housing has a second orifice plate facing the frame; A first heating component is provided in the first air chamber housing and / or the second air chamber housing; A second heating component is provided on the first orifice plate facing the frame and / or the second orifice plate.

[0006] A return air chamber housing is respectively communicated with the first air chamber housing and the second air chamber housing, and the first air chamber housing, the second air chamber housing and the return air chamber housing form a circulating hot air flow above the frame. It should be noted that the return air chamber housing is communicated with the first air chamber housing facing away from the first orifice plate, and the return air chamber housing away from the first air chamber housing is communicated with the second air chamber housing facing away from the second orifice plate. In a possible technical solution, further, the first air chamber housing includes: A first orifice plate, on the surface of which a number of holes are evenly arrayed; An arc plate, connected to the first orifice plate, the arc plate having a curved surface facing away from the first orifice plate, and an air outlet is provided on the arc plate located in the middle of the curved surface; Side plates, respectively connected to the first orifice plate and the arc plate to form the first air chamber housing.

[0007] It should be noted that the cavity of the first air chamber housing is integrally arc-shaped, which is convenient for maintaining a more uniform hot air circulation.

[0008] In a possible technical solution, further, the width dimension of the first orifice plate is greater than the width dimension of the return air chamber housing, which is convenient for expanding the air flow circulation space to improve the high-temperature process operation environment of the heterojunction battery.

[0009] In a possible technical solution, further, the structure of the second air chamber housing is the same as that of the first air chamber housing, which is convenient for providing a uniform hot air internal circulation space.

[0010] In a possible technical solution, further, the return air chamber housing includes at least one C-shaped pipe, and both ends of each C-shaped pipe communicate with the first air chamber housing and the second air chamber housing respectively to form a circulating air flow, while ensuring a reduction in the heat loss of the internal circulation and reducing the floor area of the annealing furnace.

[0011] It should be noted that when the number of the C-shaped pipes exceeds one, each of the C-shaped pipes is symmetrically arranged about the central axis of the return air chamber housing to ensure that a circulating hot air flow is formed above the frame by the first air chamber housing, the second air chamber housing and the return air chamber housing.

[0012] In a possible technical solution, further, each heating unit further includes a circulating fan, which is communicated with the surface of the first air chamber housing facing away from the frame, and is used to accelerate the hot air convection circulation, improve the furnace temperature limit, and reduce the furnace heating-up time.

[0013] In a possible technical solution, further, the first heating component is a resistance heating wire, which has two connecting parts, the connecting parts pass through the side plates and are fixedly connected to the side plates, and the connecting parts are electrically connected to an external power supply, which is convenient for providing a high-temperature heat source for the annealing furnace.

[0014] In a possible technical solution, further, the resistance heating wire is a W-shaped U-shaped heating wire, which is arranged on the side plate close to the first orifice plate, and is convenient for uniformly heating the circulating air flowing through the first air chamber housing.

[0015] It should be noted that the outer contour area of the resistance heating wire accounts for more than 80% of the overall area of the first orifice plate, which improves the uniformity of hot air circulation on the premise of ensuring that the air flowing out of the first air chamber housing is high-temperature hot air.

[0016] In a possible technical solution, further, the second heating component includes a plurality of infrared heating tubes, and the infrared heating tubes are arranged in parallel on the first orifice plate and / or the second orifice plate facing the frame, and are used to provide an infrared heating mode for the annealing furnace, improve the heating limit of the annealing furnace, and finally realize a high-temperature process.

[0017] In a possible technical solution, further, it further includes a furnace wall composed of a plurality of furnace baffles. The furnace baffles are sequentially connected to form a passage for the frame to pass through, and the heating unit is installed in the passage. The furnace baffles located at the inlet and outlet of the passage are installed with inlet and outlet shutter curtains to prevent energy loss, which is beneficial to increasing the temperature inside the furnace.

[0018] The high-temperature annealing furnace for preparing heterojunction batteries according to the embodiments of the present invention, through the reasonable arrangement of the heating unit on the production line frame, enables the copper grid line heterojunction battery components in the high-temperature annealing furnace to be completely immersed in a uniform hot air circulation. By changing the array position of the heat source arrangement and optimizing the internal circulation air power, the stability and uniformity of the process temperature in the large process air chamber housing of the annealing furnace are realized; synchronizing the basket annealing mode of the copper grid line heterojunction battery can achieve high-production and high-temperature process operations with as small a floor area as possible. Compared with the external circulation air mode of the traditional annealing furnace, under the condition of the same power of heat sources such as heating wires, the internal circulation heating scheme of the present application can increase the highest upper limit of the temperature inside the furnace by 30 to 50 degrees Celsius, with higher efficiency, effectively reducing the heating time and improving the heating limit.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0021] Figure 1 It is a schematic structural diagram of the heating unit of the high-temperature annealing furnace for preparing heterojunction batteries according to the embodiments of the present invention; Figure 2Schematic diagram of the internal structure of the heating unit of a high-temperature annealing furnace for preparing a heterojunction battery according to an embodiment of the present invention; Figure 3 Schematic diagram of the air return cavity housing of a high-temperature annealing furnace for preparing a heterojunction battery according to an embodiment of the present invention; Figure 4 is Figure 3 cross-sectional view of; Figure 5 Schematic diagram of the distribution of the heating units of a high-temperature annealing furnace for preparing a heterojunction battery according to an embodiment of the present invention.

[0022] Reference numerals: Heating unit 100, furnace baffle 200, production line 300: First air cavity housing 110, first orifice plate 111, arc plate 112, side plate 113, second air cavity housing 120, first heating assembly 130, second heating assembly 140, air return cavity housing 150, circulation fan 160. Detailed implementation manners

[0023] The embodiments of the present invention will be described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0024] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present invention belongs. The terms used in the specification of the present invention herein are only for the purpose of describing specific implementation manners and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0026] In the specification and claims of the present application and the accompanying drawings, the terms "first", "second", "third", etc. are used to distinguish different objects and are not used to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a series of steps or units are included, or optionally, steps or units not listed are also included, or optionally, other steps or units inherent in these processes, methods, products or devices are also included.

[0027] Only the parts relevant to the present application are shown in the drawings, rather than all the content. Before discussing the exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe the operations (or steps) as sequential processes, many of the operations can be performed in parallel, concurrently, or simultaneously. In addition, the order of the operations can be rearranged. The process can be terminated when its operations are completed, but it can also have additional steps not included in the drawings. The process can correspond to a method, function, procedure, subroutine, subprogram, and so on.

[0028] The terms "component", "module", "system", "unit", etc. used in this specification are used to represent computer-related entities, hardware, firmware, combinations of hardware and software, software, or software in execution. For example, a unit can be, but is not limited to, a process running on a processor, a processor, an object, an executable file, an execution thread, a program, and / or distributed between two or more computers. In addition, these units can be executed from various computer-readable media storing various data structures. A unit can communicate, for example, through signals with other systems via local and / or remote processes according to signals having one or more data packets (e.g., data from a second unit interacting with a local system, a distributed system, and / or a network. For example, the Internet interacting with other systems through signals).

[0029] Embodiment 1 Refer to Figures 1 to 4 As shown, this embodiment provides a high-temperature annealing furnace for preparing a heterojunction battery, which is arranged on parallel frames on both sides of the production line 300 of the heterojunction battery. Among them, it includes a plurality of heating units 100, and each heating unit 100 includes: A first air cavity housing 110 is arranged on the frame, and the first air cavity housing 110 has a first orifice plate 111 facing the production line 300; A second air cavity housing 120 is symmetrically arranged with the first air cavity housing 110 with respect to the production line 300, and the second air cavity housing 110 has a second orifice plate facing the production line 300; A first heating assembly 130 is arranged in the first air cavity housing 110 and / or the second air cavity housing 120. In this embodiment, an equal amount of the first heating assemblies 130 are arranged in both the first air cavity housing 110 and the second air cavity housing 120. And the first heating assemblies 130 in each cavity are arranged in the same plane; The second heating component 140 is disposed on the first orifice plate 111 facing the production line and / or on the second orifice plate. In this embodiment, an equal number of second heating components 140 are disposed on both the first orifice plate 111 and the second orifice plate. And the positions of each of the second heating components 140 are parallel to each other.

[0030] The return air chamber housing 150 communicates with the first air chamber housing 110 and the second air chamber housing 120 respectively. The first air chamber housing 110, the second air chamber housing 120, and the return air chamber housing 150 form a circulating hot air flow above the production line 300. It should be noted that the return air chamber housing 150 communicates with the first air chamber housing facing away from the first orifice plate 111, and the return air chamber housing away from the first air chamber housing communicates with the second air chamber housing 120 facing away from the second orifice plate. It should be noted that the first air chamber housing 110 includes: The first orifice plate 111 has a plurality of holes uniformly arrayed on its surface. In this embodiment, the holes are in a long strip shape. The arc-shaped plate 112 is connected to the first orifice plate 111. The arc-shaped plate 112 has a curved surface facing away from the first orifice plate 111, and an air outlet is provided in the middle of the curved surface of the arc-shaped plate 112. The side plates 113 are connected to the first orifice plate 111 and the arc-shaped plate 112 respectively to form the first air chamber housing 110.

[0031] It should be noted that the cavity of the first air chamber housing 110 is integrally arc-shaped, which is convenient for maintaining a more uniform hot air circulation. Specifically, through the arc-shaped structure of the arc-shaped plate 112 of the first air chamber housing 110, the local resistance and turbulent perturbation of the circulating hot air flow in the air chamber housing can be significantly reduced. The air flow turns gently along the curved surface, reducing energy loss, thereby maintaining a more stable flow velocity distribution. In addition, the arc-shaped path in the air chamber housing increases the effective flow distance of the air flow in the air chamber housing, prolongs the contact time between the hot air and the heated surface, is conducive to the uniform transfer of heat, and can also avoid the occurrence of air flow separation phenomenon.

[0032] It should be noted that the width dimension of the first orifice plate 111 is greater than the width dimension of the return air chamber housing 150, which is convenient for expanding the air flow circulation space to improve the high-temperature process operation environment of the heterojunction battery.

[0033] It should be noted that the structure of the second air chamber housing 120 is the same as that of the first air chamber housing 110, which is convenient for providing a uniform hot air internal circulation space.

[0034] It should be noted that the return air chamber housing 150 includes at least one C-shaped duct. Both ends of each C-shaped duct communicate with the first air chamber housing 110 and the second air chamber housing 120 respectively, forming a circulating air flow, which reduces the heat loss of the internal circulation while reducing the floor area of the annealing furnace.

[0035] It should be noted that when the number of the C-shaped ducts exceeds one, each of the C-shaped ducts is symmetrically arranged about the central axis of the return air chamber housing 150 to ensure that a circulating hot air flow is formed above the production line 300 by the first air chamber housing 110, the second air chamber housing 120 and the return air chamber housing 150.

[0036] It should be noted that in this embodiment, the return air chamber housing has two symmetrically arranged bending parts. An installation cavity 1501 is provided on the opposite surface of each bending part and is connected to the first air chamber housing 110 or the second air chamber housing 120. A filter screen 1502 is fixedly installed in the installation cavity 1501, and the filter screen 1502 is made of a high-temperature resistant material.

[0037] It should be noted that the first heating component 130 is a resistance heating wire, which has two connecting parts. The connecting parts pass through the side plate and are fixedly connected to the side plate 113, and the connecting parts are electrically connected to an external power supply, which is convenient for providing a high-temperature heat source for the annealing furnace.

[0038] It should be noted that the resistance heating wire is a W-shaped U-shaped heating wire, which is arranged on the side plate 113 close to the first orifice plate 111, so as to uniformly heat the circulating air flowing through the first air chamber housing 110.

[0039] In this embodiment, each heating unit 100 includes six of the resistance heating wires, which are respectively arranged in an array in the first air chamber housing 110 and the second air chamber housing 120 to achieve rapid heating up. The three resistance heating wires in each air chamber housing are connected in parallel with an external controller power supply.

[0040] It should be noted that the outer contour area of the resistance heating wire accounts for more than 80% of the overall area of the first orifice plate 113, which improves the uniformity of the hot air circulation on the premise of ensuring that the air flowing out of the first air chamber housing 110 is high-temperature hot air.

[0041] It should be noted that the second heating component 140 includes a plurality of infrared heating tubes, which are arranged in parallel on the first orifice plate 111 and / or the second orifice plate facing the production line, and are used to provide an infrared heating mode for the annealing furnace, improve the heating limit of the annealing furnace, and finally realize a high-temperature process.

[0042] In this embodiment, each heating unit 100 includes six of the infrared heating tubes, which are respectively arranged in an array on the first orifice plate 111 and the second orifice plate to achieve uniform hot air and improve the high-temperature limit. The three infrared heating tubes on each side of the orifice plate are connected in parallel with an external controller power supply.

[0043] In this embodiment, the number of operating infrared heating tubes and / or resistance heating wires can be controlled by an external controller to perform basket annealing on the copper grid line heterojunction battery components with different temperature requirements.

[0044] According to the high-temperature annealing furnace for preparing heterojunction batteries in the embodiments of the present invention, through the reasonable arrangement of the heating units on the production line, the copper grid line heterojunction battery components in the high-temperature annealing furnace can be completely immersed in a uniform hot air circulation. By changing the array position of the heat source arrangement and optimizing the internal circulation air power, the stability and uniformity of the process temperature in the large process air cavity housing of the annealing furnace are achieved; synchronizing the basket annealing mode of the copper grid line heterojunction battery can achieve high-capacity and high-temperature process operations with as small a floor area as possible. Compared with the external circulation air mode of the traditional annealing furnace, under the same power conditions of heat sources such as heating wires, the internal circulation heating scheme of the present application can increase the highest upper limit of the furnace temperature by 30 to 50 degrees Celsius, with higher efficiency, effectively reducing the heating-up time and increasing the heating limit.

[0045] Embodiment 2 Refer to Figures 1 to 4 As shown, this embodiment makes a further improvement on the basis of Embodiment 1, and specifically provides a high-temperature annealing furnace for preparing heterojunction batteries, which is arranged on the frames on both sides of the production line 300 of the heterojunction battery. Among them, it includes a plurality of heating units 100, and each heating unit 100 includes: A first air cavity housing 110, which is arranged on the frame, and the first air cavity housing 110 has a first orifice plate 111 facing the production line 300; A second air cavity housing 120, which is symmetrically arranged with the first air cavity housing 110 about the production line 300, and the second air cavity housing 110 has a second orifice plate facing the production line 300; A first heating component 130, which is arranged in the first air cavity housing 110 and / or the second air cavity housing 120; A second heating component 140, which is arranged on the first orifice plate 111 facing the production line and / or the second orifice plate.

[0046] A return air cavity housing 150, which is respectively communicated with the first air cavity housing 110 and the second air cavity housing 120, and the first air cavity housing 110, the second air cavity housing 120 and the return air cavity housing 150 form a circulating hot air flow above the production line 300; The circulating fan 160 is communicated with the surface of the first air chamber housing 110 facing away from the production line 300, which is used to accelerate the convective circulation of hot air, improve the temperature limit in the furnace, and reduce the heating time in the furnace.

[0047] According to the high-temperature annealing furnace for preparing heterojunction batteries in the embodiments of the present invention, through the reasonable arrangement of the heating units on the production line, the copper grid heterojunction battery components in the high-temperature annealing furnace can be completely immersed in the uniform hot air circulation. By changing the array position of the heat source arrangement and optimizing the internal circulation air power, the stability and uniformity of the process temperature in the large process air chamber housing of the annealing furnace are realized; the basket annealing mode of the copper grid heterojunction battery can achieve high-capacity and high-temperature process operations with as small a floor area as possible. Compared with the external circulation air mode of the traditional annealing furnace, under the condition of the same power of heat sources such as heating wires, the internal circulation heating scheme of the present application can increase the maximum upper limit of the furnace temperature by 30 to 50 degrees Celsius, with higher efficiency, effectively reduce the heating time, and improve the heating limit.

[0048] In this embodiment, adding a circulating fan can, on the one hand, drive the air flow mechanically to break the heat transfer limit of natural convection and significantly improve the convective heat transfer coefficient, and on the other hand, the high-speed air flow generated by the circulating fan can eliminate the local temperature gradient (such as the low-temperature area in the corner of the furnace chamber), realizing temperature uniformity. The high-temperature annealing furnace for preparing heterojunction batteries based on the circulating fan can perform forced convection in the furnace, enabling the heat to quickly penetrate into the copper grid heterojunction battery, reducing the heating time by 30% - 50%.

[0049] Embodiment 3 Refer to Figures 1 to 5 As shown, this embodiment makes further improvements on the basis of Embodiment 1 or Embodiment 2. It further includes a furnace wall composed of multiple furnace baffles 200. The furnace baffles 200 are sequentially connected to form a passage for the production line to pass through. The heating unit 100 is installed in the passage. The furnace baffles at the inlet and outlet of the passage are installed with inlet and outlet shutter curtains to prevent energy loss, which is beneficial to increasing the temperature in the furnace.

[0050] Compared with the external circulation air mode of the traditional annealing furnace, under the condition of the same power of heat sources such as heating wires, the internal circulation heating scheme of the high-temperature annealing furnace for preparing heterojunction batteries according to the embodiments of the present invention can increase the maximum upper limit of the furnace temperature by 30 to 50 degrees Celsius, with higher efficiency, effectively reduce the heating time, and improve the heating limit.

[0051] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the invention.

[0052] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example.

[0053] Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The mention of "embodiment" in this context means that the specific features, structures, or characteristics described in connection with the embodiment can be included in at least one embodiment of this application. The phrase may not necessarily refer to the same embodiment at various positions in the specification, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. Those skilled in the art can explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of this application.

[0054] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A high-temperature annealing furnace for preparing heterojunction batteries, which is arranged on parallel frames, and is characterized in that, It includes several heating units, and each heating unit includes: A first air chamber housing, which is arranged on the frame, and the first air chamber housing has a first orifice plate facing the frame; A second air chamber housing, which is symmetrically arranged with respect to the frame with the first air chamber housing, and the second air chamber housing has a second orifice plate; A first heating component, which is arranged in the first air chamber housing and / or the second air chamber housing; A second heating component, which is arranged on the first orifice plate and / or the second orifice plate; A return air chamber housing, which is respectively communicated with the first air chamber housing and the second air chamber housing to form a circulating hot air flow above the parallel frame.

2. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 1, characterized in that, The first air chamber housing includes: A first orifice plate, on the surface of which several holes are formed; An arc-shaped plate, which is connected to the first orifice plate, the arc-shaped plate has a curved surface facing away from the first orifice plate, and an air outlet is formed in the arc-shaped plate located in the middle of the curved surface; Side plates, which are respectively connected to the first orifice plate and the arc-shaped plate to form the first air chamber housing.

3. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 2, characterized in that, The width of the first orifice plate is greater than the width of the return air chamber housing.

4. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 1, wherein The structure of the second air chamber housing is the same as that of the first air chamber housing.

5. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 3, wherein, The return air chamber housing includes at least one C-shaped pipe, and the ends of which are respectively communicated with the first air chamber housing and the second air chamber housing.

6. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 1, wherein Each of the heating units further includes a circulating fan, which is communicated with the surface of the first air chamber housing facing away from the frame.

7. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 1, characterized in that, The first heating component is a resistance heating wire, which has two connection parts, and the connection parts are electrically connected to an external power supply.

8. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 7, characterized in that, The resistance heating wire is a W-shaped U-shaped heating wire, which is connected to the side plate of the first air chamber housing.

9. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 1, characterized in that, The second heating component includes a plurality of infrared heating tubes, and the infrared heating tubes are arranged in parallel on the first orifice plate.

10. The high-temperature annealing furnace for preparing a heterojunction battery according to claim 1, wherein It further includes a channel formed by sequentially connecting multiple furnace baffles, and the heating units are installed in the channel, and the furnace baffles located at the inlet and outlet of the channel are installed with inlet and outlet shutter curtains.

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