A device for measuring the temperature of a sapphire crystal growth furnace

By designing a cleaning mechanism and an online temperature measurement mechanism, the problem of dust affecting the infrared temperature sensor was solved, enabling accurate monitoring of the temperature inside the sapphire crystal growth furnace and dust removal, thus ensuring the quality and stability of sapphire crystal growth.

CN120274887BActive Publication Date: 2025-11-21YONGCHUN SEMICON (WUXI) CO LTD
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Patent Information

Application Number
CN202510306709.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-03-14
Publication Date
2025-11-21
Estimated Expiration
2045-03-14

AI Technical Summary

Technical Problem

Existing online temperature measurement devices for sapphire crystal growth furnaces suffer from inaccurate temperature data due to dust passing through the sapphire glass surface via infrared temperature sensors, which affects the quality and stability of sapphire crystal growth.

Method used

An online temperature measurement device for a sapphire crystal growth furnace, including a cleaning mechanism and an online temperature measurement mechanism, was designed. The device cleans the dust on the surface of the sapphire glass using components such as a high-temperature tube furnace, a fan, and a high-temperature resistant nozzle, and uses an infrared temperature sensor to monitor the furnace temperature in real time to ensure the accuracy of the temperature measurement data.

Benefits of technology

It effectively removes dust from the surface of sapphire glass, avoids thermal stress damage, improves the accuracy of temperature measurement data and the quality and stability of sapphire crystal growth, and ensures the real-time and reliable nature of temperature monitoring.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The application discloses a sapphire crystal growth furnace on-line temperature measuring device and relates to the technical field of sapphire, which comprises a furnace cover, wherein the cleaning mechanism comprises a high-temperature tubular furnace, a fan, a high-temperature resistant nozzle, an arc-shaped pipe, a first sub-valve and an exhaust pipe; a total valve for controlling air intake is arranged on the air inlet end of the high-temperature tubular furnace; a second sub-valve is arranged on one air outlet end of the tee pipe; and a temperature sensor for detecting the temperature of air entering the interior of the exhaust pipe is arranged on the detection end of the exhaust pipe. The dust on the surface of sapphire glass falling on the furnace cover can be cleaned away through the arrangement of the cleaning mechanism, and the temperature of the surface of sapphire glass on the furnace cover is not reduced during the cleaning process, so that the thermal stress of sapphire glass is ensured, and the sapphire glass is prevented from being damaged, that is, the accuracy of temperature data measured by the on-line temperature measuring device is improved.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sapphire, in particular to an on-line temperature measuring device for sapphire crystal growth furnace. BACKGROUND

[0002] Sapphire is a precious gem-grade corundum mineral, mainly composed of aluminum oxide, and is commonly used in the jewelry industry, optics, electronics and other fields.

[0003] When sapphire needs to meet the quality and size requirements in different application scenarios, sapphire crystal growth furnace is used, which can make sapphire crystals grow in a certain environment according to certain rules. In order to ensure the quality and stability of sapphire crystal growth, the staff often needs to monitor the temperature in the furnace in real time and accurately. At this time, the on-line temperature measuring device is used.

[0004] However, the existing on-line temperature measuring device for sapphire crystal growth furnace has the following disadvantages:

[0005] When the on-line temperature measuring device measures the temperature in the sapphire crystal growth furnace in real time, it uses an infrared temperature sensor to measure through the sapphire glass. The main reason is to prevent impurities or air in the environment from entering the furnace and affecting the growth of sapphire crystals. However, after long-term use of sapphire crystals, dust will fall on the surface of the sapphire glass. The dust will scatter or absorb infrared light, which will affect the accuracy of the data measured by the infrared temperature sensor.

[0006] Therefore, we propose an on-line temperature measuring device for sapphire crystal growth furnace to solve the problems raised in the above background technology. SUMMARY

[0007] The purpose of the present application is to provide an on-line temperature measuring device for sapphire crystal growth furnace, which can clean the dust on the surface of the sapphire glass without lowering the temperature of the sapphire glass surface, so as not to cause thermal stress of the sapphire glass due to thermal expansion and cold contraction, and thus avoid damage. The data accuracy of the on-line temperature measuring device for measuring the temperature in the sapphire crystal growth furnace is greatly improved to solve the problems raised in the above background technology.

[0008] To achieve the above purpose, the present application provides the following technical scheme: an on-line temperature measuring device for sapphire crystal growth furnace, comprising a furnace cover, wherein the furnace cover is provided with an on-line temperature measuring mechanism, and the on-line temperature measuring mechanism is provided with a cleaning mechanism.

[0009] The cleaning mechanism comprises a high-temperature tube furnace, a fan, a high-temperature nozzle, an arc-shaped tube, a first sub-valve and an exhaust pipe, the high-temperature tube furnace is used for heating the air delivered, a total valve for controlling the air entering is arranged at the air inlet end of the high-temperature tube furnace, a sleeve ring and a group of fixing bolts are arranged on the outer surface of the high-temperature nozzle, the high-temperature nozzle is fixed in the sleeve ring through the group of fixing bolts, a tee pipe is arranged at the air inlet end of the first sub-valve, a second sub-valve is arranged at one of the air outlet ends of the tee pipe, the first sub-valve and the second sub-valve are used for controlling the air delivered by the tee pipe to enter the arc-shaped tube or the exhaust pipe, and a temperature sensor for detecting the temperature of the air entering the exhaust pipe is arranged at the detection end of the exhaust pipe.

[0010] Preferably, the air inlet end of the total valve is provided with a delivery pipe, the air inlet end of the delivery pipe is connected with the air outlet end of the fan, the air outlet end of the high-temperature tube furnace is provided with a flow regulating valve, and the air outlet end of the flow regulating valve is provided with a high-temperature hose.

[0011] Preferably, the high-temperature hose is connected with the air inlet end of the tee pipe, the air outlet end of the arc-shaped tube is connected with the air inlet end of the high-temperature nozzle, and the air inlet end of the arc-shaped tube is connected with the air outlet end of the first sub-valve.

[0012] Preferably, the air outlet end of the second sub-valve is connected with the air inlet end of the exhaust pipe, the detection end of the temperature sensor extends into the exhaust pipe, and the air inlet end of the fan is provided with a filter screen.

[0013] Preferably, the on-line temperature measuring mechanism comprises a shell, the shell is arranged on the top of the furnace cover, the outer wall of the shell is fixed with a heat insulation plate, and the upper side of the heat insulation plate is fixed with a mounting plate.

[0014] Preferably, the bottom of the heat insulation plate and the top of the furnace cover are at the same horizontal plane, the top of the heat insulation plate and the top of the mounting plate are at the same horizontal plane, the shell is arranged at the observation hole position of the furnace cover, and the high-temperature nozzle is arranged at the middle position of the top of the shell.

[0015] Preferably, the top of the mounting plate is provided with a controller, the wireless port of the controller is provided with a wireless transmitter, the top of the shell is fixed with a rotating rod, and the outer surface of the rotating rod is rotatably connected with a hollow block through a bearing.

[0016] Preferably, the surface of the hollow block is provided with a mounting frame, the upper side of the mounting frame is threadedly connected with an infrared temperature sensor, and the detection end bottom of the infrared temperature sensor, the air outlet end bottom of the high-temperature nozzle and the top of the shell are at the same horizontal plane.

[0017] Preferably, the upper side of the mounting frame is provided with two rectangular grooves, the inner part of the two rectangular grooves is fixed with a rotating shaft, and the outer surface of the two rotating shafts is rotatably connected with a stabilizing rod, and the lower side of the two stabilizing rods is respectively in contact with the bottom of the inner wall of the two rectangular grooves.

[0018] Preferably, the top of the two stabilizing rods is movably penetrated by a hand screw bolt, and the threaded end of the two hand screw bolts is respectively threadedly connected to the inner wall bottom of the two rectangular grooves, the high-temperature-resistant nozzle is movably sleeved in the upper side through hole of the mounting frame, and the sleeve ring is fixed on the upper side of the mounting frame.

[0019] Compared with the prior art, the present application has the following advantages:

[0020] 1、The cleaning mechanism is provided, which can clean the dust on the sapphire glass surface of the furnace cover, and the temperature of the sapphire glass surface of the furnace cover is not reduced during the cleaning process, so that the sapphire glass will not produce thermal stress and be damaged, that is, when the online temperature measuring device measures the temperature in the sapphire crystal growth furnace in the later period, the dust on the sapphire glass will not affect the accuracy of the temperature data obtained after detection, thereby improving the use effect of the online temperature measuring device.

[0021] 2、The three-way pipe, the opened second branch valve, the exhaust pipe, the controller, the temperature threshold value set in advance by the controller and the temperature sensor are used in sequence, so that the normal temperature air in the above-mentioned connected parts can be discharged to the environment, when the normal temperature air in the above-mentioned connected parts is exhausted, the first branch valve is opened first, and then the second branch valve is closed, so that the high-temperature air in the three-way pipe enters the inside of the arc-shaped pipe, and then the high-temperature air in the arc-shaped pipe is sprayed to the surface of the sapphire glass on the furnace cover by using the high-temperature-resistant nozzle, that is, the dust on the surface of the sapphire glass is removed by using the high-temperature air flowing rapidly.

[0022] 3、The present application can monitor the temperature of the sapphire crystal growth furnace in real time by setting the online temperature measuring mechanism, which can ensure the quality and stability of sapphire crystal growth, and when temperature measurement is needed, the infrared temperature sensor can be used to measure the temperature in the sapphire crystal growth furnace by emitting infrared light to the sapphire crystal growth furnace, and then the controller, the temperature threshold range set in advance, the infrared temperature sensor and the wireless transmitter can be used to allow the staff in the monitoring room to view the temperature data and determine whether the temperature in the sapphire crystal growth furnace is suitable for sapphire crystal growth, and when the temperature is not suitable for sapphire crystal growth, an alarm prompt can be sent to remind the staff to take timely action.

[0023] 4、When the staff needs to observe the sapphire crystal growth furnace more comprehensively through the furnace cover, the two hand screws can be removed to allow the stabilizing rod to rotate, and then the fixing bolt can be removed to allow the high-temperature-resistant nozzle to be removed from the collar, and then the rotating rod, bearing, hollow block and mounting bracket can be used to remove the infrared temperature sensor, rotating shaft and stabilizing rod from the top of the shell, and when the mounting bracket is rotated to the appropriate position, the rotation of the mounting bracket can be stopped. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a front view of the structure of the sapphire crystal growth furnace online temperature measuring device of the present application;

[0025] Figure 2 It is a bottom view of the structure of the sapphire crystal growth furnace online temperature measuring device of the present application;

[0026] Figure 3 It is a top view of the structure of the sapphire crystal growth furnace online temperature measuring device of the present application;

[0027] Figure 4 It is a front view of the sapphire crystal growth furnace online temperature measuring device of the present application; Figure 3 It is an enlarged view of A in the above figure;

[0028] Figure 5 It is a three-dimensional structure diagram of the second valve, exhaust pipe and temperature sensor of the sapphire crystal growth furnace online temperature measuring device of the present application;

[0029] Figure 6 It is a cross-sectional view of the furnace cover of the sapphire crystal growth furnace online temperature measuring device of the present application;

[0030] Figure 7 It is a bottom view of the sapphire crystal growth furnace online temperature measuring device of the present application;

[0031] Figure 8 Figure is a schematic diagram of the shell, rotating rod and rectangular slot of the on-line temperature measuring device of the sapphire crystal growth furnace.

[0032] In the figure: 1, furnace cover; 2, on-line temperature measuring mechanism; 201, shell; 202, heat insulation plate; 203, mounting plate; 204, controller; 205, wireless transmitter; 206, rotating rod; 207, hollow block; 208, mounting bracket; 209, infrared temperature measuring sensor; 210, rectangular slot; 211, rotating shaft; 212, stabilizing rod; 213, hand screw bolt; 3, cleaning mechanism; 301, high-temperature tube furnace; 302, main valve; 303, conveying pipe; 304, fan; 305, flow regulating valve; 306, high-temperature resistant hose; 307, high-temperature resistant nozzle; 308, collar; 309, fixing bolt; 310, arc-shaped pipe; 311, first sub-valve; 312, tee pipe; 313, second sub-valve; 314, exhaust pipe; 315, temperature sensor; 316, filter screen. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0034] Embodiment one: please refer to Figures 1-8As shown, the present application provides a technical scheme: a sapphire crystal growth furnace on-line temperature measuring device, including the furnace cover 1, the furnace cover 1 is equipped with on-line temperature measuring mechanism 2, on-line temperature measuring mechanism 2 is equipped with cleaning mechanism 3, on-line temperature measuring mechanism 2 includes the casing 201, the casing 201 is installed on the top of the furnace cover 1, the outer wall of the casing 201 is fixed with the heat insulation plate 202, the upper side of the heat insulation plate 202 is fixed with the mounting plate 203, the bottom of the heat insulation plate 202 and the top of the furnace cover 1 are in the same horizontal plane, the top of the heat insulation plate 202 and the top of the mounting plate 203 are in the same horizontal plane, the casing 201 is in the observation hole position of the furnace cover 1, the top of the mounting plate 203 is installed with the controller 204, the wireless port of the controller 204 is installed with the wireless transmitter 205, the top of the casing 201 is fixed with the rotating rod 206, the outer surface of the rotating rod 206 is rotatably connected with the hollow block 207 through the bearing, the surface of the hollow block 207 is installed with the mounting rack 208, the upper side of the mounting rack 208 is threadedly connected with the infrared temperature sensor 209, the upper side of the mounting rack 208 is provided with two rectangular grooves 210, the inside of the two rectangular grooves 210 is fixed with the rotating shaft 211, and the outer surface of the two rotating shafts 211 is rotatably connected with the stabilizing rod 212, the lower side of the two stabilizing rods 212 respectively contacts with the inner wall bottom of the two rectangular grooves 210, the top of the two stabilizing rods 212 is movably penetrated with the hand screw bolt 213, and the threaded end of the two hand screw bolts 213 is respectively threadedly connected with the inner wall bottom of the two rectangular grooves 210, the cleaning mechanism 3 includes the high-temperature tube furnace 301, the fan 304, the high-temperature nozzle 307, the arc-shaped pipe 310, the first valve 311 and the exhaust pipe 314, the outer surface of the high-temperature nozzle 307 is provided with the sleeve ring 308 and a group of fixed bolts 309.

[0035] When the temperature in the sapphire crystal growth furnace needs to be measured, the infrared temperature sensor 209 is first turned on by the controller 204. The infrared temperature sensor 209 emits infrared light to the inside of the sapphire crystal growth furnace through the cooperation of the rotating rod 206, the bearing, the hollow block 207, the mounting frame 208, the rectangular groove 210, the rotating shaft 211, the stabilizing rod 212, the hand screw bolt 213, and the shell 201. The infrared light emitted by the auxiliary infrared temperature sensor 209 (the infrared light emitted by the auxiliary infrared temperature sensor 209 can be superimposed with the infrared radiation of the target object, so that the sensor receives a stronger signal, thereby improving the accuracy and reliability of the measurement) measures the temperature in the sapphire crystal growth furnace. The measured temperature data (the accuracy of the temperature data is improved because the sapphire surface on the furnace cover 1 is free of dust) is transmitted to the controller 204 in the form of an electrical signal. The controller 204 compares the received temperature data with the temperature threshold range set in advance by the controller 204. When the received temperature data is not within the temperature threshold range set in advance by the controller 204, it indicates that the temperature in the sapphire crystal growth furnace is too low or too high. The controller 204 transmits the result to the monitoring equipment in the ground control room through the cooperation of the wireless transmitter 205, reminding the staff in the monitoring room to handle it in time. The received temperature data is also transmitted wirelessly to the monitoring equipment in the ground control room for the staff to view. When the received temperature data is within the temperature threshold range set in advance by the controller 204, it indicates that the temperature in the sapphire crystal growth furnace is suitable for sapphire crystal growth. The controller 204 does not alarm the monitoring equipment in the ground control room through the wireless transmitter 205, but transmits the received temperature data wirelessly to the monitoring equipment in the ground control room for the staff to view. When the staff needs to observe the inside of the sapphire crystal growth furnace through the furnace cover 1, the staff first removes the two hand screw bolts 213 from the two stabilizing rods 212, then rotates them 90 degrees around the corresponding rotating shaft 211 as the pivot, loosens the two fixing bolts 309, removes the high-temperature-resistant nozzle 307 from the collar 308, and then rotates the mounting frame 208 around the rotating rod 206 with the cooperation of the bearing and the hollow block 207. The rotating mounting frame 208 moves the infrared temperature sensor 209, the rotating shaft 211, and the stabilizing rod 212 away from the top of the shell 201. When the mounting frame 208 is rotated to the appropriate position, the rotation of the mounting frame 208 is stopped.

[0036] Embodiment Two: According to Figures 1-8As shown, the cleaning mechanism 3 includes a high-temperature tubular furnace 301, a fan 304, a high-temperature resistant nozzle 307, an arc-shaped pipe 310, a first branch valve 311, and an exhaust pipe 314. The high-temperature tubular furnace 301 is used to heat the supplied air. A main valve 302 controlling the air intake is installed at the air inlet end of the high-temperature tubular furnace 301. The outer surface of the high-temperature resistant nozzle 307 is provided with a collar 308 and a set of fixing bolts 309. The high-temperature resistant nozzle 307 is pressed and fixed inside the collar 308 by a set of fixing bolts 309. A three-way pipe 312 is installed at the air inlet end of the first branch valve 311, and one of the air outlet ends of the three-way pipe 312 is installed with... The system is equipped with a second branch valve 313. The first branch valve 311 and the second branch valve 313 are used to control the air supplied from the three-way pipe 312 to enter the arc-shaped pipe 310 or the exhaust pipe 314. A temperature sensor 315 is installed at the detection end of the exhaust pipe 314 to detect the temperature of the air entering the exhaust pipe 314. A delivery pipe 303 is installed at the air inlet end of the main valve 302. The air inlet end of the delivery pipe 303 is connected to the air outlet end of the blower 304. A flow regulating valve 305 is installed at the air outlet end of the high-temperature tubular furnace 301. A high-temperature resistant hose 306 is installed at the air outlet end of the flow regulating valve 305. The high-temperature resistant hose 306 is connected to the three-way valve. The air inlet end of pipe 312 is installed with the air outlet end of arc-shaped pipe 310, which is installed with the air inlet end of high-temperature resistant nozzle 307. The air inlet end of arc-shaped pipe 310 is installed with the air outlet end of first branch valve 311, and the air outlet end of second branch valve 313 is installed with the air inlet end of exhaust pipe 314. The detection end of temperature sensor 315 extends into the interior of exhaust pipe 314. A filter screen 316 is installed at the air inlet port of fan 304. The online temperature measuring mechanism 2 includes a housing 201. A heat insulation plate 202 is fixed to the outer wall of housing 201. A mounting plate 203 is fixed to the upper side of heat insulation plate 202. A controller is installed on the top of mounting plate 203. 204. The high-temperature resistant nozzle 307 is located at the top center of the housing 201. A rotating rod 206 is fixed to the top of the housing 201. A hollow block 207 is rotatably connected to the outer surface of the rotating rod 206 through a bearing. A mounting bracket 208 is installed on the surface of the hollow block 207. An infrared temperature sensor 209 is threadedly connected to the upper side of the mounting bracket 208. The bottom of the detection end of the infrared temperature sensor 209, the bottom of the jet end of the high-temperature resistant nozzle 307, and the top of the housing 201 are on the same horizontal plane. The high-temperature resistant nozzle 307 is movably sleeved inside the upper through hole of the mounting bracket 208. The collar 308 is fixed to the upper side of the mounting bracket 208.

[0037] When the sapphire glass on the furnace cover 1 needs to be cleaned of dust, and the temperature measurement operation has not yet begun, but there is already a high-temperature melt (for sapphire crystal growth) in the sapphire crystal growth furnace, at this time, first press the start switch of the high-temperature tube furnace 301, then manually open the total valve 302 and the second sub-valve 313, then use the controller 204 to start the fan 304 and the temperature sensor 315, after the fan 304 is started, it will first filter the air in the environment and then suck it in, then transport it to the inside of the delivery pipe 303, then through the open total valve 302, to the inside of the high-temperature tube furnace 301, then the air entering the high-temperature tube furnace 301 will first be heated to a high temperature (a parameter set in advance, which comes from the temperature required for sapphire crystal growth), then transported to the inside of the flow regulating valve 305, and finally through the cooperation of the high-temperature hose 306, transported to the inside of the three-way pipe 312, and after being transported to the inside of the three-way pipe 312, through the cooperation of the open second sub-valve 313 and the exhaust pipe 314, transported back to the environment. At the same time, when the fan 304 sucks in the air in the environment, the air in the communication part will also start to be transported. At this time, the started temperature sensor 315 will measure the temperature of the air entering the exhaust pipe 314, and transmit the detected temperature data to the controller 204 in the form of an electrical signal. Then the controller 204 compares the received temperature data with the temperature threshold set by the controller 204 in advance. When the temperature data received by the controller 204 is lower than the temperature threshold set by the controller 204 in advance, the second sub-valve 313 is kept open at this time. When the temperature data received by the controller 204 is the same as the temperature threshold set by the controller 204 in advance (the analysis on the screen of the controller 204 can be observed on site), first open the first sub-valve 311, then close the second sub-valve 313. At this time, the air entering the three-way pipe 312 will enter the inside of the open first sub-valve 311, then enter the inside of the arc-shaped pipe 310, then enter the inside of the fixed high-temperature nozzle 307, and then spray out of its outlet, spraying on the sapphire glass on the furnace cover 1. When the high-temperature air sprayed quickly contacts the surface of the sapphire glass, the high-temperature air flowing quickly will take away the dust on the surface of the sapphire glass. When the sapphire glass on the furnace cover 1 has been cleaned for a period of time, first use the controller 204 to close the fan 304 and the temperature sensor 315, then manually close the total valve 302, the first sub-valve 311 and the high-temperature tube furnace 301.

[0038] The effect and working principle of the whole mechanism are:

[0039] In the preparation stage, firstly connect the high-temperature tube furnace 301 and the controller 204 with the external power supply together, then open the controller 204, set the temperature threshold range (corresponding to the infrared temperature sensor 209) and the temperature threshold (corresponding to the temperature sensor 315, the temperature is the same as the air heating temperature parameter set by the high-temperature tube furnace 301), then use the cooperation of the wireless transmitter 205 to wirelessly connect the controller 204 with the monitoring equipment in the ground control room, then open the high-temperature tube furnace 301, set the air heating temperature parameter, and manually adjust the opening degree of the valve of the flow regulating valve 305, then install the shell 201 on the furnace cover 1 (the furnace cover 1 is the cover of the observation hole of the sapphire crystal growth furnace), then place the high-temperature tube furnace 301 on the ground or the prepared placing rack, and install the fan 304 on the placing rack or the ground;

[0040] Cleaning stage: when the need to clean the sapphire glass on the furnace cover 1 of the dust, and has not yet begun to perform temperature measurement operation, but the sapphire crystal growth furnace has already had a high temperature melt (for sapphire crystal growth), at this time first press the start switch of high temperature tube furnace 301, then manually open the total valve 302 and the second valve 313, then use the controller 204 to start the fan 304 and the temperature sensor 315, after the start of the fan 304 will be in the cooperation of the filter screen 316, the air in the environment is first filtered and then sucked into the inside of the conveying pipe 303, and then through the opening of the total valve 302, to the inside of the high temperature tube furnace 301, and then into the high temperature tube furnace 301 in the air will be heated to high temperature (the parameter is set in advance, which comes from the temperature required for sapphire crystal growth), and then delivered to the pipe inside the flow regulating valve 305, and finally through the cooperation of the high temperature hose 306, delivered to the inside of the three-way pipe 312, and after being delivered to the inside of the three-way pipe 312, through the cooperation of the opened second valve 313 and the exhaust pipe 314, delivered back to the environment, at the same time, when the fan 304 sucks the air in the environment, the air in the communication part will also start the delivery operation, at this time the started temperature sensor 315 will measure the temperature of the air entering the exhaust pipe 314, and transmit the detected temperature data to the controller 204 in the form of electrical signal, then the controller 204 will compare the received temperature data with the temperature threshold set by the controller 204 in advance, when the temperature data received by the controller 204 is lower than the temperature threshold set by the controller 204 in advance, at this time keep the second valve 313 open, when the temperature data received by the controller 204 is the same as the temperature threshold set by the controller 204 in advance (the analysis on the screen of the controller 204 can be observed on site), at this time first open the first valve 311, then close the second valve 313, at this time the air entering the inside of the three-way pipe 312 will enter the inside of the opened first valve 311, then enter the inside of the arc-shaped pipe 310, and then enter the inside of the fixed high temperature nozzle 307, and then sprayed from its outlet, sprayed on the sapphire glass on the furnace cover 1, when the high temperature air sprayed quickly contacts the surface of the sapphire glass, at this time the high temperature air flowing quickly will take away the dust on the surface of the sapphire glass, when the sapphire glass on the furnace cover 1 is cleaned for a period of time, at this time first use the controller 204 to close the fan 304 and the temperature sensor 315, then manually close the total valve 302, the first valve 311 and the high temperature tube furnace 301;

[0041] When the temperature of the sapphire crystal growth furnace needs to be measured, the controller 204 first opens the infrared temperature sensor 209. The infrared temperature sensor 209 is then activated and emits infrared light to the sapphire crystal growth furnace through the cooperation of the rotating rod 206, the bearing, the hollow block 207, the mounting frame 208, the rectangular groove 210, the rotating shaft 211, the stabilizing rod 212, the hand screw bolt 213, and the shell 201. The infrared light emitted by the auxiliary infrared temperature sensor 209 can superimpose with the infrared radiation of the target object, making the sensor receive a stronger signal and improving the accuracy and reliability of the measurement. The measured temperature data is then transmitted to the controller 204 in the form of an electrical signal. The controller 204 compares the received temperature data with the temperature threshold range set in advance. If the received temperature data is not within the temperature threshold range set in advance, it indicates that the temperature of the sapphire crystal growth furnace is too low or too high. The controller 204 then transmits the result to the monitoring equipment in the ground control room through the wireless transmitter 205, reminding the staff in the monitoring room to handle it in time. The received temperature data is also transmitted wirelessly to the monitoring equipment in the ground control room for the staff to view. If the received temperature data is within the temperature threshold range set in advance, it indicates that the temperature of the sapphire crystal growth furnace is suitable for sapphire crystal growth. The controller 204 will not alarm the monitoring equipment in the ground control room through the wireless transmitter 205, but will transmit the received temperature data wirelessly to the monitoring equipment in the ground control room for the staff to view. When the staff needs to observe the sapphire crystal growth furnace through the furnace cover 1, they first remove the two hand screw bolts 213 from the two stabilizing rods 212, then rotate them 90 degrees around the corresponding rotating shaft 211, loosen the two fixing bolts 309, remove the high-temperature-resistant nozzle 307 from the collar 308, and then rotate the mounting frame 208 around the rotating rod 206 using the cooperation of the bearing and the hollow block 207. When the mounting frame 208 is rotated to the appropriate position, stop rotating it. The staff can then observe the sapphire crystal growth furnace through the cooperation of the shell 201 and the sapphire glass on the furnace cover 1.

[0042] The furnace cover 1 is composed of a furnace cover plate with holes, a sapphire glass, and a circular ring for fixing the sapphire glass.

[0043] The controller 204 (PLC controller), wireless transmitter 205, infrared temperature sensor 209, high-temperature tube furnace 301, total valve 302, fan 304, flow regulating valve 305, first sub-valve 311, second sub-valve 313, and temperature sensor 315 are all prior art, and their models can be selected according to actual conditions, and will not be explained in detail here.

[0044] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can make modifications to the technical solutions described in the foregoing embodiments, or make equivalent replacements to some of the technical features, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A device for measuring the temperature of a sapphire crystal growth furnace on line, comprising a furnace cover (1), characterized in that: The furnace cover (1) is provided with an on-line temperature measuring mechanism (2), and the on-line temperature measuring mechanism (2) is provided with a cleaning mechanism (3). The cleaning mechanism (3) comprises a high-temperature tubular furnace (301), a fan (304), a high-temperature nozzle (307), an arc-shaped pipe (310), a first sub-valve (311) and an exhaust pipe (314), the high-temperature tubular furnace (301) is used for heating the air delivered, a total valve (302) for controlling the air inlet is arranged at the air inlet end of the high-temperature tubular furnace (301), a sleeve ring (308) and a group of fixing bolts (309) are arranged on the outer surface of the high-temperature nozzle (307), the high-temperature nozzle (307) is fixed in the sleeve ring (308) by the group of fixing bolts (309), a tee pipe (312) is arranged at the air inlet end of the first sub-valve (311), a second sub-valve (313) is arranged at one of the air outlet ends of the tee pipe (312), the first sub-valve (311) and the second sub-valve (313) are used for controlling the air delivered by the tee pipe (312) to enter the arc-shaped pipe (310) or the exhaust pipe (314), and a temperature sensor (315) for detecting the temperature of the air entering the exhaust pipe (314) is arranged at the detection end of the exhaust pipe (314).

2. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, characterized in that: A delivery pipe (303) is arranged at the air inlet end of the total valve (302), the air inlet end of the delivery pipe (303) is arranged at the air outlet end of the fan (304), a flow regulating valve (305) is arranged at the air outlet end of the high-temperature tubular furnace (301), and a high-temperature hose (306) is arranged at the air outlet end of the flow regulating valve (305).

3. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, characterized in that: The high-temperature hose (306) is arranged at the air inlet end of the tee pipe (312), the air outlet end of the arc-shaped pipe (310) is arranged at the air inlet end of the high-temperature nozzle (307), and the air inlet end of the arc-shaped pipe (310) is arranged at the air outlet end of the first sub-valve (311).

4. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, characterized in that: The air outlet end of the second sub-valve (313) is arranged at the air inlet end of the exhaust pipe (314), the detection end of the temperature sensor (315) extends into the exhaust pipe (314), and a filter screen (316) is arranged at the air inlet end of the fan (304).

5. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, characterized in that: The on-line temperature measuring mechanism (2) comprises a shell (201), the shell (201) is arranged at the top of the furnace cover (1), a heat insulation plate (202) is fixed to the outer wall of the shell (201), and an installation plate (203) is fixed to the upper side of the heat insulation plate (202).

6. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 5, characterized in that: The bottom of the heat insulation plate (202) and the top of the furnace cover (1) are at the same horizontal plane, the top of the heat insulation plate (202) and the top of the installation plate (203) are at the same horizontal plane, the shell (201) is arranged at the observation hole position of the furnace cover (1), and the high-temperature nozzle (307) is arranged at the middle position of the top of the shell (201).

7. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 5, characterized in that: The top of the mounting plate (203) is provided with a controller (204), a wireless transmitter (205) is mounted on the wireless port of the controller (204), the top of the shell (201) is fixedly provided with a rotating rod (206), and the outer surface of the rotating rod (206) is rotatably connected with a hollow block (207) through a bearing.

8. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 7, characterized in that: The surface of the hollow block (207) is provided with a mounting rack (208), the upper side of the mounting rack (208) is threadedly connected with an infrared temperature measurement sensor (209), and the detection end bottom of the infrared temperature measurement sensor (209), the air injection end bottom of the high-temperature-resistant nozzle (307) and the top of the shell (201) are located at the same horizontal plane.

9. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 8, characterized in that: The upper side of the mounting rack (208) is provided with two rectangular grooves (210), the inner sides of the two rectangular grooves (210) are fixedly provided with rotating shafts (211), and the outer surfaces of the two rotating shafts (211) are rotatably connected with stabilizing rods (212), and the lower sides of the two stabilizing rods (212) are respectively in contact with the inner wall bottoms of the two rectangular grooves (210).

10. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 9, characterized in that: The top of the two stabilizing rods (212) is movably penetrated by hand screws (213), the threaded ends of the two hand screws (213) are respectively threadedly connected with the inner wall bottoms of the two rectangular grooves (210), the high-temperature-resistant nozzle (307) is movably sleeved in the upper side through hole of the mounting rack (208), and the sleeve ring (308) is fixed on the upper side of the mounting rack (208).

Citation Information

Patent Citations

  • Crystal constant temperature furnace

    CN114792923A

  • Infrared temperature measurement structure for industrial furnace

    CN222211975U