Pressure sensor for multidirectional pressure signal detection

Abstract

The invention belongs to the related technical field of pressure sensing, and discloses a pressure sensor for multidirectional pressure signal detection, the pressure sensor for multidirectional pressure signal detection comprises a working electrode, a counter electrode, a diaphragm, a lead and a shell, the working electrode and the counter electrode are both composed of a core sensing layer and a current collector; the working electrode and the counter electrode adopt an inner and outer lantern ring design; the diaphragm is used for physically isolating the working electrode from the counter electrode; the working electrode and the counter electrode are respectively connected with one lead so as to lead out electric signals on the working electrode and the counter electrode; and the shell is used for packaging the working electrode, the counter electrode and the diaphragm. According to the pressure sensor, 360-degree multi-azimuth pressure signals in the space can be detected, and the detection range of the pressure sensor is remarkably widened.

Description

Technical Field

[0001] The present invention belongs to the technical field related to pressure sensing, and more specifically, a pressure sensor for multi-directional pressure signal detection. Background Art

[0002] As an important device for environmental perception and status monitoring, pressure sensors are widely used in the fields of medical health monitoring, environmental monitoring, robot tactile systems, and industrial automation. With the rapid development of the Internet of Things, robotics technology, and environmental monitoring requirements, the market has put forward higher requirements for the sensitivity, response speed, stability, and 360-degree omnidirectional detection ability of sensors. Especially in the field of marine environment detection, such as wind speed, ocean current, and air pressure changes, achieving real-time and accurate monitoring of pressure signals from all directions has become a research hotspot in current pressure sensing technology.

[0003] Currently, the widely used pressure sensors mainly include piezoresistive, capacitive, piezoelectric, and fiber optic types. Traditional piezoresistive sensors usually use rigid materials such as single crystal silicon and metal foil, with simple structures and low costs. However, due to the strong rigidity, high brittleness, and difficulty in bending of these core materials, it is difficult to achieve uniform responses to pressure signals from different directions; capacitive sensors mostly adopt polymer diaphragm and metal electrode structures, are vulnerable to interference from temperature changes, environmental humidity, and mechanical vibrations, and have poor stability, especially prone to measurement errors in complex environments; piezoelectric sensors generally use piezoelectric ceramics (such as lead zirconate titanate PZT), polyvinylidene fluoride (PVDF), etc. as the core. These materials have excellent dynamic pressure response characteristics, but due to the high rigidity and brittleness characteristics of the materials themselves, it is difficult to stably detect quasi-static or slowly changing pressure signals for a long time; fiber optic sensors usually consist of quartz fibers and precision optical devices, with excellent electromagnetic interference resistance and long-term stability, but have complex structures, high costs, difficult installation and maintenance, and are difficult to be widely applied.

[0004] Although the rapid development of flexible materials and new manufacturing technologies in recent years has promoted the application of flexible pressure sensors, these sensors can achieve a certain degree of bending and curved surface detection and are widely used in the field of wearable devices. However, such flexible sensors are generally limited to the detection of single-plane or specific curved surface pressures and cannot effectively sense truly 360-degree omnidirectional pressure signals, especially unable to accurately and real-time detect the pressure changes from all directions caused by complex fluid dynamics in the marine environment. This limitation mainly stems from the limitations of material properties, structural design, and manufacturing processes. In particular, the core sensitive materials often cannot fully adapt to complex external environmental conditions or continuous deformation requirements.

[0005] Therefore, the development of a new type of pressure sensor with a simple structure, economical cost, high sensitivity, and capable of achieving true 360° omnidirectional pressure signal detection, as well as its preparation method, is of great practical significance and broad application prospects for promoting the progress of environmental monitoring technology, improving the accuracy and reliability of pressure monitoring in the marine and air environments, and meeting the development needs of robot touch and intelligent equipment. Summary of the Invention

[0006] In view of the above-mentioned defects or improvement requirements of the prior art, the present invention provides a pressure sensor and a preparation method for multi-directional pressure signal detection, which can detect 360° multi-directional pressure signals and significantly improve the detection range of the pressure sensor.

[0007] To achieve the above object, according to one aspect of the present invention, there is provided a pressure sensor for multi-directional pressure signal detection. Each layer of the pressure sensor from the outside to the inside is a working electrode, a diaphragm, and a counter electrode in sequence; the working electrode, the diaphragm, and the counter electrode form an inner and outer sleeve ring structure; it also includes wires respectively connected to the working electrode and the counter electrode; several layers of pressure sensors are provided.

[0008] Among them, each layer of the working electrode from the outside to the inside is composed of a core sensing layer and a current collector of the working electrode, and the working electrodes in each layer of the pressure sensor are set as several continuous layers; the counter electrode from the outside to the inside is composed of a core sensing layer and a current collector of the counter electrode. The diaphragm is used for physically blocking the working electrode and the counter electrode; the working electrode and the counter electrode are respectively connected to one of the wires to lead out the electrical signals on the working electrode and the counter electrode; the housing is used for encapsulating the working electrode, the counter electrode, and the diaphragm. The present invention can detect 360° omnidirectional pressure signals and significantly improve the detection range of the pressure sensor.

[0009] Preferably, the core sensing layers of the working electrode and the counter electrode are carbon materials with a sensing effect (such as carbon nanotubes and / or graphene), and the bending stiffness is 0.01 - 200 mN·m;

[0010] Further preferably, the core sensing layers of the working electrode and the counter electrode are carbon nanotubes, and the bending stiffness is 0.01 - 200 mN·m. Preferably, the bending stiffness is 0.1 - 20 mN·m, and more preferably, the bending stiffness is 1 - 10 mN·m.

[0011] Preferably, the current collectors of the working electrode and the counter electrode are inert metal foils with conductivity (such as copper, platinum, gold, silver, etc.).

[0012] Preferably, the diaphragm is made of a polymer material.

[0013] Further preferably, the diaphragm is made of a flexible polymer material (such as polytetrafluoroethylene, polyimide, etc.).

[0014] Preferably, the housing is made of a polymer material.

[0015] Further preferably, the housing is made of a sound-transmitting polymer material, such as polyurethane, polyethylene, epoxy resin, etc., with an acoustic impedance value of 1×10 6 -3×10 6 kg / (m 2 ·s).

[0016] Preferably, the housing is designed in a spherical shape.

[0017] Preferably, the housing is encapsulated by casting.

[0018] Generally speaking, compared with the prior art by the above technical solutions conceived by the present invention, a real-time pressure change monitoring device for the inside of a battery provided by the present invention has the following beneficial effects:

[0019] 1. The pressure sensor for multi-directional pressure signal detection of the present invention can achieve 360° omnidirectional pressure signal detection, significantly broadening the pressure signal detection range.

[0020] 2. The working electrode and the counter electrode adopt an inner and outer sleeve ring design, effectively amplifying the difference in the perceived pressure signals between the working electrode and the counter electrode, maximizing the signal strength, and eliminating the anisotropy brought by the laminate design.

[0021] 3. The core sensing layers of the working electrode and the counter electrode can be provided in multiple layers, thereby further enhancing the signal strength.

[0022] 4. The coherent assembly of the working electrode and the counter electrode reduces the interfacial impedance attenuation of pressure conduction and effectively improves the pressure detection sensitivity.

[0023] 5. The housing encapsulation adopts the casting method, which has no strict requirements during preparation, has a simple process, and has great prospects for industrial production applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a three-dimensional view of the core structure of the pressure sensor of the present invention;

[0025] Figure 2 is a front cross-sectional view of the pressure sensor of the present invention.

[0026] Figure 3 is a top cross-sectional view of the pressure sensor of the present invention.

[0027] Figure 4 is a schematic diagram of the appearance of the pressure sensor of the present invention after encapsulation;

[0028] Figure 5 It is the pressure response effect diagram of the pressure sensor in Embodiment 1 of the present invention at different angles.

[0029] Figure 6 It is the response signal diagram of the pressure sensor in Embodiment 1 of the present invention at 0° angle to different pressures.

[0030] Figure 7 It is the response signal diagram of the pressure sensors in Comparative Examples 1, 2, 5, and 6 of the present invention at 0° angle to pressure.

[0031] In all the drawings, the same reference numerals are used to represent the same elements or structures, where:

[0032] 110 - working electrode; 111 - core sensing layer of the working electrode; 112 - current collector; 120 - diaphragm; 130 - counter electrode; 131 - core sensing layer of the counter electrode; 132 - current collector; 140 - wire; 150 - housing. Detailed Embodiments

[0033] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0034] Please refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4 , the present invention provides a pressure sensor for multi-directional pressure signal detection, which can detect 360° omnidirectional pressure signals. Each layer of the pressure sensor from outside to inside is successively a working electrode 110, a diaphragm 120, and a counter electrode 130; the working electrode 110, the diaphragm 120, and the counter electrode 130 form an inner and outer sleeve ring structure; it also includes a wire 140 respectively connected to the working electrode 110 and the counter electrode 130; several layers of the pressure sensor are provided;

[0035] Wherein, each layer of the working electrode 110 is composed of a core sensing layer 111 of the working electrode and a current collector 112 from outside to inside, and the working electrode 110 in each layer of the pressure sensor is arranged as several continuous layers; the counter electrode 130 is composed of a core sensing layer 131 of the counter electrode and a current collector 132 from outside to inside.

[0036] The core sensing layer 111 of the working electrode and the core sensing layer 131 of the counter electrode are materials with sensing effects, and the current collectors 112 and 132 are inert metals with conductivity.

[0037] In a further preferred embodiment, the core sensing layers 111 and 131 are carbon materials with sensing effects (such as carbon nanotubes and / or graphene), and the bending stiffness is 0.01 - 200 mN·m; the current collectors 112 and 132 are inert metal foils with conductivity, such as copper, platinum, gold, silver, etc.

[0038] The separator 120 is made of a polymer material and is used to physically isolate the working electrode and the counter electrode.

[0039] In a further preferred embodiment, the separator 120 is made of a flexible polymer material, such as polytetrafluoroethylene, polyimide, etc.

[0040] The housing 150 is made of a polymer material and is used to encapsulate the working electrode, the counter electrode, and the separator.

[0041] In a further preferred embodiment, the housing is made of a sound-transmitting polymer material, such as polyurethane, polyethylene, epoxy resin, etc., and the acoustic impedance value is 1×10 6 -3×10 6 kg / (m 2 ·s).

[0042] In a further preferred embodiment, the housing is designed in a spherical shape.

[0043] The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electrical signal.

[0044] This pressure sensor realizes 360° omnidirectional pressure signal detection in space through the inner and outer ring structures of the working electrode and the counter electrode, and the spherical configuration of the housing. When there is a pressure signal input in the external space, the working electrode responds first, senses the pressure by virtue of its sensing characteristics, and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted to the counter electrode through the internal separator, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electrical signal, thereby achieving real-time monitoring of the pressure within a 360° range.

[0045] Example 1

[0046] In this example, the working electrode 110, the separator 120, and the counter electrode 130 are assembled using an inner and outer ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electrical signal, as shown in Figure 1 、 Figure 2 and Figure 3 ; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the separator 120, and the counter electrode 130, as shown in Figure 4 .

[0047] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array, with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper, with a bending stiffness of 1 mN·m, and the material of the current collector 132 is copper foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane, and the acoustic resistance value is 1×10 6 kg / (m 2 ·s).

[0048] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal separator to the counter electrode, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing real-time monitoring of the pressure.

[0049] Referring to Figure 5 it can be seen that the pressure sensor can effectively detect pressure signals within the spatial range of 0 to 330°.

[0050] Referring to Figure 6 it can be seen that the pressure sensor of the present invention can effectively respond to a pressure as low as 100 mPa at the lowest. The pressure sensor obtained by the present invention can effectively respond to a pressure as high as 60 MPa at the highest.

[0051] Embodiment 2

[0052] In this embodiment, the working electrode 110, the separator 120, and the counter electrode 130 are assembled using an inner and outer collar design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 adopts a spherical design to encapsulate the working electrode 110, the separator 120, and the counter electrode 130, as Figure 4 shown.

[0053] In this embodiment, the material of the core sensing layer 111 of the working electrode is a graphene film, with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper, with a bending stiffness of 1 mN·m, and the material of the current collector 132 is copper foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane, and the acoustic resistance value is 1×10 6 kg / (m 2 ·s).

[0054] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal diaphragm to the counter electrode, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing the real-time monitoring of pressure.

[0055] The pressure sensor can effectively respond to a pressure as low as 200 mPa and as high as 60 MPa.

[0056] Example 3

[0057] In this embodiment, the working electrode 110, the diaphragm 120 and the counter electrode 130 are assembled using an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the diaphragm 120 and the counter electrode 130, as Figure 4 shown.

[0058] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is a graphene film with a bending stiffness of 1 mN·m, and the material of the current collector 132 is copper foil; the material of the diaphragm 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic impedance of 1×10 6 kg / (m 2 ·s).

[0059] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal diaphragm to the counter electrode, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing the real-time monitoring of pressure.

[0060] The pressure sensor can effectively respond to a pressure as low as 300 mPa and as high as 60 MPa.

[0061] Example 4

[0062] In this embodiment, the working electrode 110, the diaphragm 120 and the counter electrode 130 are assembled using an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 ,Figure 2 and Figure 3 as shown in Figure 3 ; the housing 150 adopts a spherical design to encapsulate the working electrode 110, the diaphragm 120 and the counter electrode 130, as Figure 4 shown in Figure 4 .

[0063] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 0.01 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 0.01 mN·m, and the material of the current collector 132 is copper foil; the material of the diaphragm 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0064] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. It senses the pressure by virtue of its sensing characteristics and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal diaphragm to the counter electrode, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing the real-time monitoring of pressure.

[0065] Embodiment 5

[0066] In this embodiment, the working electrode 110, the diaphragm 120 and the counter electrode 130 are assembled using an inner and outer collar design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 , Figure 2 and Figure 3 shown in Figure 3 ; the housing 150 adopts a spherical design to encapsulate the working electrode 110, the diaphragm 120 and the counter electrode 130, as Figure 4 shown in Figure 4 .

[0067] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 200 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 200 mN·m, and the material of the current collector 132 is copper foil; the material of the diaphragm 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0068] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal diaphragm to the counter electrode, causing a corresponding change in the electric potential of the counter electrode as well. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing real-time monitoring of the pressure.

[0069] Example 6

[0070] In this embodiment, the working electrode 110, the diaphragm 120 and the counter electrode 130 are assembled using an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the diaphragm 120 and the counter electrode 130, as Figure 4 shown.

[0071] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array, with a bending stiffness of 1 mN·m. The material of the current collector 112 is platinum foil; the core sensing layer 131 of the counter electrode is buckypaper, with a bending stiffness of 1 mN·m. The material of the current collector 132 is platinum foil; the material of the diaphragm 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane, with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0072] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal diaphragm to the counter electrode, causing a corresponding change in the electric potential of the counter electrode as well. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing real-time monitoring of the pressure.

[0073] Example 7

[0074] In this embodiment, the working electrode 110, the diaphragm 120 and the counter electrode 130 are assembled using an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the diaphragm 120 and the counter electrode 130, as Figure 4 shown.

[0075] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array, with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper, with a bending stiffness of 1 mN·m, and the material of the current collector 132 is copper foil; the material of the separator 120 is polyimide; the material used for the housing 150 is polyurethane, and the acoustic resistance value is 1×10 6 kg / (m 2 ·s).

[0076] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal separator to the counter electrode, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing the real-time monitoring of pressure.

[0077] Example 8

[0078] In this embodiment, the working electrode 110, separator 120 and counter electrode 130 are assembled using an inner and outer collar design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electric signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 adopts a spherical design to encapsulate the working electrode 110, separator 120 and counter electrode 130, as Figure 4 shown.

[0079] In this embodiment, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array, with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper, with a bending stiffness of 10 mN·m, and the material of the current collector 132 is copper foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is epoxy resin, and the acoustic resistance value is 2×10 6 kg / (m 2 ·s).

[0080] When using the pressure sensor to detect pressures in different directions, the working electrode responds first. Relying on its sensing characteristics, it senses the pressure and causes a change in its own electric potential. Subsequently, the pressure signal is transmitted through the internal separator to the counter electrode, causing a corresponding change in the electric potential of the counter electrode. Through this process, the pressure signal is successfully converted into an electric signal, thereby realizing the real-time monitoring of pressure.

[0081] Comparative Example 1

[0082] In this embodiment, the working electrode 110, the diaphragm 120, and the counter electrode 130 are assembled using an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export electrical signals, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the diaphragm 120, and the counter electrode 130, as Figure 4 shown.

[0083] In this comparative example, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 0.005 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 0.005 mN·m, and the material of the current collector 132 is copper foil; the material of the diaphragm 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0084] Referring to Figure 7 , it can be seen that at this time, the core sensing layer is easily broken, and the pressure sensor cannot effectively detect the pressure.

[0085] Comparative Example 2

[0086] In this embodiment, the working electrode 110, the diaphragm 120, and the counter electrode 130 are assembled using an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export electrical signals, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the diaphragm 120, and the counter electrode 130, as Figure 4 shown.

[0087] In this comparative example, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 250 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 250 mN·m, and the material of the current collector 132 is copper foil; the material of the diaphragm 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0088] Referring to Figure 7 , it can be seen that at this time, the core sensing layer is damaged during the bending ring nesting, and the pressure sensor cannot effectively detect the pressure.

[0089] Comparative Example 3

[0090] In this embodiment, the working electrode 110, the separator 120 and the counter electrode 130 are assembled by an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electrical signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the separator 120 and the counter electrode 130, as Figure 4 shown.

[0091] In this comparative example, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 1 mN·m, and the material of the current collector 112 is zinc foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 1 mN·m, and the material of the current collector 132 is zinc foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0092] At this time, the current collector easily reacts with the electrolyte, resulting in a poor pressure response effect.

[0093] Comparative Example 4

[0094] In this embodiment, the working electrode 110, the separator 120 and the counter electrode 130 are assembled by an inner and outer sleeve ring design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electrical signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the separator 120 and the counter electrode 130, as Figure 4 shown.

[0095] In this comparative example, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 1 mN·m, and the material of the current collector 112 is zinc foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 1 mN·m, and the material of the current collector 132 is zinc foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is polyurethane with an acoustic resistance value of 1×10 6 kg / (m 2 ·s).

[0096] At this time, the current collector easily reacts with the electrolyte, resulting in a poor pressure response effect.

[0097] Comparative Example 5

[0098] In this embodiment, the working electrode 110, the separator 120, and the counter electrode 130 are assembled using an inner and outer collar design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electrical signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the separator 120, and the counter electrode 130, as Figure 4 shown.

[0099] In this comparative example, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 1 mN·m, and the material of the current collector 132 is copper foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is polypropylene with an acoustic resistance value of 5×10 6 kg / (m 2 ·s).

[0100] Referring to Figure 7 , it can be seen that due to the large acoustic impedance value of the housing, which is too different from the acoustic impedance of the medium, large reflection and refraction of sound waves occur at the interface, resulting in a decrease in the detection accuracy of the sensor.

[0101] Comparative Example 6

[0102] In this embodiment, the working electrode 110, the separator 120, and the counter electrode 130 are assembled using an inner and outer collar design. The working electrode 110 and the counter electrode 130 are respectively connected to a wire 140 to export the electrical signal, as Figure 1 , Figure 2 and Figure 3 shown; the housing 150 is designed in a spherical shape to encapsulate the working electrode 110, the separator 120, and the counter electrode 130, as Figure 4 shown.

[0103] In this comparative example, the material of the core sensing layer 111 of the working electrode is a carbon nanotube array with a bending stiffness of 1 mN·m, and the material of the current collector 112 is copper foil; the core sensing layer 131 of the counter electrode is buckypaper with a bending stiffness of 1 mN·m, and the material of the current collector 132 is copper foil; the material of the separator 120 is polytetrafluoroethylene; the material used for the housing 150 is nitrile rubber with an acoustic resistance value of 5×10 5 kg / (m 2 ·s).

[0104] Referring to Figure 7It can be seen that due to the small acoustic impedance value of the housing, which is too different from the acoustic impedance of the medium, large reflection and refraction of sound waves occur at the interface, resulting in a decrease in the detection accuracy of the sensor.

[0105] In summary, it can be seen that the pressure sensor disclosed in the present invention for detecting weak pressure signals has a simple structure, higher sensitivity, adjustable properties, and great application value.

[0106] It is easy for those skilled in the art to understand that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A pressure sensor for multi-directional pressure signal detection, characterized in that: Each of the pressure sensors includes, from outside to inside in sequence, a working electrode (110), a diaphragm (120), and a counter electrode (130); the working electrode (110), the diaphragm (120), and the counter electrode (130) form an inner and outer collar structure; it further includes wires (140) respectively connected to the working electrode (110) and the counter electrode (130); a plurality of layers of the pressure sensors are provided. Among them, each working electrode (110) includes, from outside to inside, a core sensing layer (111) of the working electrode and a current collector (112); the working electrodes (110) in each layer of the pressure sensors are provided as a plurality of continuous layers; the counter electrode (130) includes, from outside to inside, a core sensing layer (131) of the counter electrode and a current collector (132).

2. The pressure sensor for multi-directional pressure signal detection according to claim 1, wherein: The core sensing layer (111) of the working electrode and the core sensing layer (131) of the counter electrode are materials with a sensing effect, and the current collector (112) of the working electrode (110) and the current collector (132) of the counter electrode (130) are inert metals with conductivity.

3. The pressure sensor for multi-directional pressure signal detection according to claim 2, wherein: The materials with a sensing effect include carbon materials; the bending stiffness of the carbon materials is 0.01 - 200 mN·m.

4. The pressure sensor for multi-directional pressure signal detection according to claim 3, characterized in that: The carbon materials include carbon nanotubes and / or graphene.

5. The pressure sensor for multi-directional pressure signal detection according to claim 2, wherein: The inert metals with conductivity include one or more of copper, platinum, gold, and silver.

6. The pressure sensor for multi-directional pressure signal detection according to any one of claims 1 to 5, characterized in that: The diaphragm (120) is made of a flexible polymer material.

7. The pressure sensor for multi-directional pressure signal detection according to claim 6, characterized in that: The flexible polymer materials include polytetrafluoroethylene or polyimide.

8. The pressure sensor for multi-directional pressure signal detection according to any one of claims 1 to 5, characterized in that: It further includes a housing (150), and the housing (150) is made of a sound-transmitting polymer material.

9. The pressure sensor for multi-directional pressure signal detection according to claim 8, characterized in that: The sound-transmitting polymer material includes one or more of polyurethane, polyethylene, and epoxy resin; the acoustic impedance value of the sound-transmitting polymer material is 1×10 6 -3×10 6 kg / (m 2 ·s).

10. The pressure sensor for multi-directional pressure signal detection according to claim 8, characterized in that: The pressure sensors are encapsulated by a casting method.

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