Detection equipment and detection method of micro projection device

Abstract

The invention provides micro projection device detection equipment and a detection method. The detection method comprises the following steps: providing a micro projection device to a carrying platform of a transfer and six-degree-of-freedom adjustment module; the visual alignment unit detects the position of the electric connection end of the micro projection device; the electric connection unit moves the electric contact end to electrically contact the electric connection end; the carrying table is moved to one side of the posture detection module; the posture detection module detects the posture of the micro projection device and adjusts the posture of the micro projection device; the transferring and six-degree-of-freedom adjusting module transfers the carrying platform to one side of the image analysis module. The micro projection device outputs an image, and the image analysis module analyzes the image.

Description

Technical Field

[0001] This case is related to a detection device and method for optical devices, particularly to a detection device and method for a micro-projection device. Background Art

[0002] A near-to-eye display is a head-mounted display device where the image display distance is less than the distance of distinct vision of the human eye. The near-to-eye display device mainly displays an image through a micro-projection device, and then converts the image displayed by the display into a virtual image at a long distance for the human eye to view through optical elements (such as a lens group or a waveguide element).

[0003] Based on this, since the distance between the image displayed by the near-to-eye display device and the human eye is quite close, the user can easily observe the quality of the image displayed by the near-to-eye display device. Therefore, the components of the near-to-eye display device and its assembled finished products must undergo precise quality measurement to ensure product quality. However, in terms of the existing technology, there is no detection of the quality of individual components of the near-to-eye display device. At most, only when all components are assembled into a finished product, the final product will be tested, and usually, a large amount of manpower is relied on to complete it. Not only can the detection accuracy not be controlled, but the large amount of manpower and time-consuming also cannot improve the detection efficiency, so there is a need for improvement. Summary of the Invention

[0004] The present application provides a detection device for a micro-projection device, which is suitable for detecting a micro-projection device including an electrical connection end. The detection device for the micro-projection device includes a frame, a transfer and six-degree-of-freedom adjustment module, an electrical connection unit, an attitude detection module, an image analysis module, and a controller. The transfer and six-degree-of-freedom adjustment module includes an adjustment mechanism and a stage. The adjustment mechanism is displaceably arranged on the frame. The stage is arranged on the adjustment mechanism to carry the micro-projection device. The electrical connection unit is displaceably arranged on the adjustment mechanism, and the electrical connection unit includes electrical contact ends. The attitude detection module and the image analysis module are respectively arranged on the frame. The controller is electrically connected to the transfer and six-degree-of-freedom adjustment module, the electrical connection unit, the attitude detection module, and the image analysis module. The controller controls the electrical connection unit to move the electrical contact ends to electrically contact the electrical connection ends of the micro-projection device; the controller controls the transfer and six-degree-of-freedom adjustment module to transfer the stage to one side of the attitude detection module, and controls the attitude detection module to detect the attitude of the micro-projection device; the controller controls the adjustment mechanism of the transfer and six-degree-of-freedom adjustment module to adjust the attitude of the micro-projection device according to the detection result of the attitude detection module; the controller controls the transfer and six-degree-of-freedom adjustment module to transfer the stage to one side of the image analysis module, the controller controls the micro-projection device to output an image, and controls the image analysis module to analyze the image.

[0005] In this way, the detection device of the micro-projection device can automatically complete the electrical connection, attitude detection and attitude adjustment of the micro-projection device through control automation, and perform image analysis after the attitude adjustment is completed. The testing process is mainly automatically completed by the detection device, which can not only ensure the testing accuracy, but also greatly reduce the manpower requirement and improve the testing speed.

[0006] In some embodiments, the aforementioned stage includes a receiving groove and an imaging opening. The imaging opening is disposed on the bottom surface of the receiving groove and penetrates the bottom surface. The micro-projection device is received in the receiving groove. The micro-projection device includes an image output portion, an adjacent lower surface and a side surface. The image output portion is located on the lower surface, and the electrical connection end is located on the side surface. The micro-projection device abuts against the bottom surface of the receiving groove with its lower surface.

[0007] In some embodiments, the detection device of the micro-projection device further includes an auxiliary positioning unit, which is displaceably disposed on the adjustment mechanism. The controller controls the auxiliary positioning unit to displace relative to the adjustment mechanism to push against the side surface of the micro-projection device, so that the micro-projection device abuts against one side wall of the receiving groove.

[0008] In some embodiments, the detection device of the micro-projection device further includes a pressing unit, which is displaceably disposed on the stage. The controller controls the pressing unit to displace relative to the stage to press against the upper surface of the micro-projection device. The upper surface is opposite to the lower surface, so that the lower surface of the micro-projection device abuts against the bottom surface of the receiving groove.

[0009] In some embodiments, the lower surface of the aforementioned micro-projection device further includes a plurality of positioning reference marks. The attitude detection module determines the attitude of the micro-projection device according to the positioning reference marks. The positioning reference marks are located around the image output portion.

[0010] In some embodiments, the aforementioned stage further includes a plurality of detection openings penetrating the bottom surface of the receiving groove. The detection openings are located around the imaging opening. When the micro-projection device abuts against the bottom surface of the receiving groove with its lower surface, the positions of the positioning reference marks correspond to the positions of the detection openings.

[0011] In some embodiments, the detection device of the micro-projection device further includes a vision alignment unit, which is disposed on the adjustment mechanism and electrically connected to the controller. The controller controls the vision alignment unit to detect the position of the electrical connection end of the micro-projection device, and controls the electrical connection unit to move the electrical contact end to electrically contact the electrical connection end of the micro-projection device according to the detection result of the vision alignment unit.

[0012] In some embodiments, the aforementioned attitude detection module includes an optical element, a telecentric measurement unit, and a confocal measurement unit. The telecentric measurement unit and the optical element are arranged at intervals along the optical axis, and the confocal measurement unit is located on one side of the optical axis and corresponds to the optical element. When the controller controls the transfer and six-degree-of-freedom adjustment module to transfer the stage to one side of the attitude detection module, the micro-projection device is located on the optical axis.

[0013] The present application further provides a detection method for a micro-projection device, which is suitable for detecting a micro-projection device including an image output unit and an electrical connection terminal. The detection method for the micro-projection device includes the following steps: providing the micro-projection device to the stage of the transfer and six-degree-of-freedom adjustment module; the electrical connection unit moves the electrical contact end to electrically contact the electrical connection terminal; the transfer and six-degree-of-freedom adjustment module transfers the stage to one side of the attitude detection module; the attitude detection module detects the attitude of the micro-projection device, and the transfer and six-degree-of-freedom adjustment module adjusts the attitude of the micro-projection device according to the detection result of the attitude detection module; the transfer and six-degree-of-freedom adjustment module transfers the stage to one side of the image analysis module; the micro-projection device outputs an image, and the image analysis module analyzes the image.

[0014] In some embodiments, the aforementioned attitude detection module includes a confocal measurement unit and a telecentric measurement unit. When the attitude detection module detects the attitude of the micro-projection device, it sequentially includes the following steps: the confocal measurement unit measures the pitch attitude of the micro-projection device rotating around the Y axis and the roll attitude rotating around the X axis; the telecentric measurement unit measures the displacement attitude of the micro-projection device in the X-axis direction, the displacement attitude in the Y-axis direction, and the yaw attitude rotating around the Z axis; and the confocal measurement unit measures the displacement attitude of the micro-projection device in the Z-axis direction. Description of the Drawings

[0015] Figure 1 It is a three-dimensional external view schematic diagram of an embodiment of the detection device for the micro-projection device of the present application.

[0016] Figure 2 It is a partial external view of the detection device for the micro-projection device of the present application and a schematic diagram of the micro-projection device.

[0017] Figure 3 Is along Figure 1 The cross-sectional schematic diagram drawn along the cutting plane line 3-3 in

[0018] Figure 4 It is a front view schematic diagram of an embodiment of the detection device for the micro-projection device of the present application.

[0019] Figure 5 It is a top view schematic diagram of an embodiment of the detection device for the micro-projection device of the present application.

[0020] Figure 6It is a flowchart of the steps of an embodiment of the detection method for the micro projection device of the present application.

[0021] Figure 7A It is a partial perspective schematic diagram of the detection device for the micro projection device of the present application.

[0022] Figure 7B For Figure 7A plan view.

[0023] Figures 8A to 8D It is a schematic diagram of some embodiments of the detection device for the micro projection device of the present application to position the micro projection device.

[0024] Among them, reference numerals:

[0025] 10: Frame

[0026] 20: Transfer and six-degree-of-freedom adjustment module

[0027] 21: Adjustment mechanism

[0028] 211: Lateral translation component

[0029] 212: First platform

[0030] 213: Linear actuator

[0031] 214: Second platform

[0032] 22: Carrier stage

[0033] 221: Receiving groove

[0034] 2211: Bottom surface

[0035] 222: Imaging port

[0036] 223: Detection opening

[0037] 30: Electrical connection unit

[0038] 31: Linear displacement component

[0039] 32: Electrical contact end

[0040] 40: Attitude detection module

[0041] 41: Conjugate focus measurement unit

[0042] 42: Telecentric measurement unit

[0043] 43: Housing

[0044] 44: Optical element

[0045] 45: Autocollimation measurement unit

[0046] 50: Image analysis module

[0047] 60: Controller

[0048] 70: Visual alignment unit

[0049] 80: Auxiliary positioning unit

[0050] 90: Pressing unit

[0051] D: Micro-projection device

[0052] D1: Upper surface

[0053] D2: Lower surface

[0054] D21: Positioning reference mark

[0055] D3: Side surface

[0056] D4: Electrical connection terminal

[0057] D5: Image output section

[0058] X, Y, Z: Axes

[0059] U: Pitch

[0060] V: Roll

[0061] W: Yaw

[0062] S01~S06: Steps Detailed implementation manners

[0063] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but it is not intended to limit the present invention.

[0064] Before the detection device of the micro-projection device of the present application is described in detail in various embodiments, please note that in the following description, the drawings of the present application are only for illustrative purposes, and they are not necessarily drawn to scale, and not all details are necessarily presented in the drawings.

[0065] Refer to Figure 1 and Figure 2 , Figure 1 is a three-dimensional external view schematic diagram of an embodiment of the detection device of the micro-projection device of the present application; Figure 2 is a partial external view of the detection device of the micro-projection device of the present application and a schematic diagram of the micro-projection device. The detection device of the micro-projection device is used to detect the micro-projection device D applied to the near-eye display device.

[0066] In some embodiments, a near-eye display (NED), such as but not limited to, a virtual reality display (VR display), an augmented reality display (AR display), a mixed reality display (MR display), or an extended reality display (XR display).

[0067] Refer to Figure 1 , the detection device of the micro-projection device includes a frame 10, a transfer and six-degree-of-freedom adjustment module 20, an electrical connection unit 30, an attitude detection module 40, an image analysis module 50, and a controller 60. The controller 60 controls the transfer and six-degree-of-freedom adjustment module 20 to transfer the micro-projection device D to a position corresponding to the attitude detection module 40 and the image analysis module 50, controls the attitude detection and adjustment of the micro-projection device D, and analyzes the displayed image after the attitude of the micro-projection device D is adjusted.

[0068] Herein, the micro-projection device D is assembled on a near-eye display device and can output an optical image to project the image onto a target object. In some embodiments, the micro-projection device D has a light source, a light valve, and a projection lens. The light source provides a light beam to the light valve to generate an image light beam, which is then transmitted to the projection lens to be projected onto the target object. The light source can be but is not limited to a diode light-emitting device, and the light valve can be but is not limited to a liquid crystal panel (LCD), a liquid crystal on silicon panel (LCOS), or a digital micromirror device (DMD). The projection lens can include multiple lenses with diopters. In a specific embodiment, the light source of the micro-projection device D is a light-emitting diode (LED) light source, and the projection lens composed of a digital micromirror device and six lenses constitutes the micro-projection device D.

[0069] In some embodiments, the micro-projection device D is assembled on a near-eye display device in the form of glasses. In these embodiments, the near-eye display device in the form of glasses includes an image incident port provided on the frame or the lens, and the micro-projection device D outputs an image through the image incident port.

[0070] Refer to Figures 1 to 3 , Figure 3 For Figure 1 is a schematic cross-sectional view drawn along the 3-3 cutting plane line in. In some embodiments, the micro-projection device D is in the form of a polyhedron structure and includes an opposite upper surface D1, a lower surface D2, and a side surface D3 located between the upper surface D1 and the lower surface D2. In such asFigure 2 , Figure 3 In the illustrated embodiments, the micro - projection device D further includes an electrical connection terminal D4 and an image output unit D5. The electrical connection terminal D4 is used to electrically connect to a power source to provide the power source required for the operation of the micro - projection device D and the signal source for displaying an image. In these embodiments, the electrical connection terminal D4 is located on the side surface D3. The image output unit D5 is located on the lower surface D2 and is used to output an image. It should be noted that the appearance form of the micro - projection device D shown in each figure is only an example illustration of one of the embodiments. In other embodiments, the appearance form of the micro - projection device D is not limited thereto, and the position of the electrical connection terminal D4 can also be changed according to requirements, not limited to Figure 2 , Figure 3 the form shown.

[0071] Referring to Figure 1 , in some embodiments, the transfer and six - degree - of - freedom adjustment module 20 includes an adjustment mechanism 21 and a stage 22. The adjustment mechanism 21 is displaceably arranged on the frame 10 and is electrically connected to the controller 60. The stage 22 is arranged on the adjustment mechanism 21 to carry the micro - projection device D. The electrical connection unit 30 is displaceably arranged on the adjustment mechanism 21 and includes an electrical contact end 32. The attitude detection module 40 and the image analysis module 50 are respectively arranged on the frame 10 and are electrically connected to the controller 60.

[0072] The controller 60 controls the electrical connection unit 30 to move the electrical contact end 32 to electrically contact the electrical connection terminal D4 of the micro - projection device D; the controller 60 controls the transfer and six - degree - of - freedom adjustment module 20 to transfer the stage 22 to one side of the attitude detection module 40 and controls the attitude detection module 40 to detect the attitude of the micro - projection device D; the controller 60 controls the adjustment mechanism 21 of the transfer and six - degree - of - freedom adjustment module 20 to adjust the attitude of the micro - projection device D according to the detection result of the attitude detection module 40; the controller 60 controls the transfer and six - degree - of - freedom adjustment module 20 to transfer the stage 22 to one side of the image analysis module 50, the controller 60 controls the micro - projection device D to output an image, and controls the image analysis module 50 to analyze the image.

[0073] Thus, the detection device of the micro - projection device can automatically complete the electrical connection, attitude detection and attitude adjustment of the micro - projection device D through control, and perform image analysis after the attitude adjustment. The testing process is mainly automatically completed by the detection device, which can not only ensure the testing accuracy, but also greatly reduce the manpower requirement and improve the testing speed.

[0074] Referring to Figure 1 , the frame 10 serves as the main support of the detection device of the micro - projection device and is used to support and maintain the required testing work. The transfer and six - degree - of - freedom adjustment module 20, the attitude detection module 40 and the image analysis module 50 are respectively arranged on the frame 10.

[0075] Refer to Figure 1 Figure 1 , the adjustment mechanism 21 of the transfer and six-degree-of-freedom adjustment module 20 is movably arranged on the frame 10, and the stage 22 is arranged on the adjustment mechanism 21 to carry the micro-projection device D. Here, the adjustment mechanism 21 can drive the stage 22 to generate displacements with six degrees of freedom relative to the frame 10. In some embodiments, the six degrees of freedom that the adjustment mechanism 21 can generate include three translational degrees of freedom and three rotational degrees of freedom. Among them, in a three-dimensional space where the X-axis, Y-axis, and Z-axis are perpendicular to each other, the three translational degrees of freedom include the front-back translational degree of freedom of displacement along the X-axis, the left-right translational degree of freedom of displacement along the Y-axis, and the up-down translational degree of freedom of displacement along the Z-axis. The three rotational degrees of freedom include the roll (Roll) V rotational degree of freedom of rotation around the X-axis, the pitch (Pitch) U rotational degree of freedom of front-back rotation around the Y-axis, and the yaw (Yaw) W rotational degree of freedom of left-right rotation around the Z-axis.

[0076] Refer to Figure 1 Figure 1 , in some embodiments, the adjustment mechanism 21 can be a hexapod, a Stewart platform or other six-axis actuation platforms, which include a transverse movement component 211, a first platform 212, six linear actuators 213, and a second platform 214. The transverse movement component 211 extends in the Y-axis direction. The transverse movement component 211 can be, for example, but not limited to, a linear slide rail or a combination of a screw and a slide table, and the transverse movement component 211 can generate a linear guiding displacement in the Y-axis direction. In these embodiments, the extension range of the transverse movement component 211 in the Y-axis direction overlaps with the arrangement positions of the attitude detection module 40 and the image analysis module 50, so that the adjustment mechanism 21 can be transferred to the positions corresponding to the attitude detection module 40 and the image analysis module 50 in a large range.

[0077] Refer to Figure 4 , Figure 4 Figure 4 is a front view schematic diagram of an embodiment of the detection device for the micro-projection device of the present application. The first platform 212 is connected to the transverse movement component 211, and is guided by the transverse movement component 211 to be linearly displaceable in the Y-axis direction. The two ends of the six linear actuators 213 are respectively movably connected to the first platform 212 and the second platform 214. In some embodiments, the six linear actuators 213 can individually change their lengths. Specifically, the six linear actuators 213 can be, for example, but not limited to, hydraulic telescopic rods, pneumatic telescopic rods, screw telescopic rods, magnetic telescopic rods, or piezoelectric telescopic rods.

[0078] Refer to Figure 4, in some embodiments, both ends of the six linear actuators 213 are movably connected to the first platform 212 and the second platform 214 respectively by universal joints. Specifically, the universal joint can be, but is not limited to, a spherical universal joint or a cross universal joint. Thereby, the connection between the second platform 214 and the first platform 212 through the aforementioned six linear actuators 213 forms a hexapod mechanism capable of achieving six-degree-of-freedom displacement. Herein, the adjustment mechanism 21 of the transfer and six-degree-of-freedom adjustment module 20 itself can generate six-degree-of-freedom adjustment drive to achieve fine position adjustment, and can perform large-range displacement along the Y-axis direction through the transverse movement assembly 211 to achieve automatic measurement.

[0079] Refer to Figure 4 , in these embodiments, the stage 22 is fixed on the second platform 214 to be driven by the adjustment mechanism 21 with six degrees of freedom relative to the frame 10. In some embodiments, the adjustment mechanism 21 may not be provided with the second platform 214, and the stage 22 is directly connected to the other ends of the linear actuators 213, so as to achieve the six-degree-of-freedom drive of the stage 22.

[0080] Refer to Figure 1 , the electrical connection unit 30 is used to provide the power required for the micro-projection device D to complete the test work and the signals required for outputting images. In some embodiments, the electrical connection unit 30 includes a linear displacement assembly 31 and electrical contact terminals 32. The linear displacement assembly 31 is disposed on the stage 22, and the electrical contact terminals 32 are disposed on the linear displacement assembly 31. In these embodiments, the linear displacement assembly 31 can drive the electrical contact terminals 32 to generate linear displacements relative to the stage 22 in the X-axis direction, Y-axis direction, and Z-axis direction to contact the electrical connection terminals D4 of the micro-projection device D to provide the power source required for the operation of the micro-projection device D and the signal source required for outputting images. In a specific embodiment, the linear displacement assembly 31 may be composed of a plurality of mutually orthogonal slide rails.

[0081] Refer to Figure 1 , Figure 4 and Figure 5 , Figure 5 is a top view schematic diagram of an embodiment of the detection device for the micro-projection device of the present application. The attitude detection module 40 is disposed on the frame 10 to detect the attitude of the micro-projection device D to ensure that the attitude of the micro-projection device D conforms to the attitude for the image analysis module 50 to capture and analyze images. In some embodiments, the attitude detection module 40 is lower than the stage 22 of the transfer and six-degree-of-freedom adjustment module 20 in the Z-axis direction. Within the displacement range of the transfer and six-degree-of-freedom adjustment module 20 along the Y-axis direction, the attitude detection module 40 can detect the attitude of the micro-projection device D from below the stage 22 of the transfer and six-degree-of-freedom adjustment module 20.

[0082] Refer to Figure 1 、 Figure 4 and Figure 5 , in some embodiments, the attitude detection module 40 includes a confocal distance measurement unit 41 and a telecentric image measurement unit 42. The attitude detection module 40 generates a measurement optical axis from the confocal distance measurement unit 41 and the telecentric image measurement unit 42 to perform attitude measurement on the micro projection device D. When the controller 60 controls the transfer and six-degree-of-freedom adjustment module 20 to transfer the stage 22 to one side of the attitude detection module 40, the micro projection device D is located on the measurement optical axis.

[0083] The confocal distance measurement unit 41 uses the principle of confocal microscopy for measurement. Confocal microscopy is an optical imaging method that uses point-by-point illumination and spatial pinhole modulation to remove scattered light from non-focal planes of the object to be measured. Compared with traditional imaging methods, it can improve optical resolution and visual contrast.

[0084] In some embodiments, the specific structural configuration and operation of the confocal distance measurement unit 41 are that the detection light emitted from a point light source is focused on the object to be measured through a lens (in this embodiment, the object to be measured is the micro projection device D). When the position of the micro projection device D is at the focus, the reflected light energy can be converged back to the light source through the original lens to form confocal (abbreviated as confocal), and when the position of the micro projection device D is not at the focus, the reflected light will be blocked and cannot return to the light source, thereby enabling the measurement of the distance between the micro projection device D and the confocal distance measurement unit 41 in the focusing direction.

[0085] In some embodiments, the micro projection device D is positioned on the stage 22 (i.e., the planar position formed by the X-axis and the Y-axis), and the confocal distance measurement unit 41 is located at a position in a different Z-axis direction from the micro projection device D. In the embodiments illustrated in Figure 1 、 Figure 4 , the optical axis of the confocal distance measurement unit 41 is parallel to the plane formed by the X-axis and the Y-axis and is located below the stage 22, but the present case is not limited thereto. In other embodiments, if the space on the frame 10 permits, the confocal distance measurement unit 41 can also be configured in a form such that its optical axis is perpendicular to the plane formed by the X-axis and the Y-axis.

[0086] Refer to Figure 1 and Figure 4, in some embodiments where the optical axis of the confocal measurement unit 41 is parallel to the plane formed by the X-axis and the Y-axis, the attitude detection module 40 further includes a housing 43 and an optical element 44. The housing 43 has a light exit opening. The confocal measurement unit 41 and the optical element 44 are respectively disposed inside the housing 43. The optical axis of the confocal measurement unit 41 passes through the optical element 44. The optical element 44 reflects or refracts the light of the confocal measurement unit 41 into measurement light, and the measurement light is perpendicular to the micro-projection device D and can be output from the light exit opening of the housing 43. Thereby, the displacement amount of the micro-projection device D in the Z-axis direction can be measured.

[0087] In the embodiment as Figure 1 shown, the confocal measurement unit 41 is located below the micro-projection device D in the Z-axis direction. Thereby, in addition to measuring the displacement amount of the micro-projection device D in the Z-axis direction, since there will also be a difference in the displacement amount on the Z-axis when the micro-projection device D has a pitch U rotation and a roll V rotation, therefore, the confocal measurement unit 41 can simultaneously measure the attitude of the micro-projection device D in the pitch U rotation degree of freedom and the attitude in the roll V rotation degree of freedom.

[0088] In some embodiments, the confocal measurement unit 41 can be, but is not limited to, a Confocal Laser Scanning Microscope, a Spinnig-disk confocal microscopes, or a Programmable Array Microscopes.

[0089] The telecentric measurement unit 42 performs machine vision measurement using a telecentric lens with a parallel optical path design. Through the telecentric measurement unit 42, within a specific object distance range, an image of the micro-projection device D with a fixed magnification can be captured. That is to say, the image of the micro-projection device D captured will not have the visual error of objects appearing larger up close and smaller in the distance. Thereby, the measurement error can be reduced and the measurement accuracy can be improved. Herein, the micro-projection device D is placed on the stage 22 (i.e., the position of the plane formed by the X-axis and the Y-axis), and the telecentric measurement unit 42 is located at a different position in the Z-axis direction from the micro-projection device D.

[0090] In the embodiment as Figure 1 and Figure 4 shown, the optical axis of the telecentric measurement unit 42 is parallel to the plane formed by the X-axis and the Y-axis and is located below the stage 22, but the present case is not limited thereto. In other embodiments, if the space on the frame 10 permits, the telecentric measurement unit 42 can also be configured in a form such that its optical axis is perpendicular to the plane formed by the X-axis and the Y-axis.

[0091] In some embodiments where the optical axis of the telecentric measurement unit 42 is parallel to the plane formed by the X-axis and the Y-axis, the optical axis of the telecentric measurement unit 42 passes through the optical element 44. The optical element 44 reflects or refracts the light of the telecentric measurement unit 42 and converges it to the measurement light perpendicular to the micro-projection device D, whereby the displacement of the micro-projection device D in the X-axis direction and the Y-axis direction can be measured.

[0092] In the embodiment illustrated as Figure 1 the telecentric measurement unit 42 is located below the micro-projection device D in the Z-axis direction. Thus, in addition to measuring the displacement of the micro-projection device D in the X-axis direction and the Y-axis direction, since there will also be a displacement difference in the X-axis direction and the Y-axis direction when the micro-projection device D rotates with a yaw W, the telecentric measurement unit 42 can simultaneously measure the attitude of the micro-projection device D in the rotational degree of freedom of yaw W.

[0093] Referring to Figure 1 、 Figure 4 and Figure 5 in some embodiments where the attitude detection module 40 simultaneously includes the confocal measurement unit 41 and the telecentric measurement unit 42, the confocal measurement unit 41 and the telecentric measurement unit 42 are integrated into a single housing 43 and can converge to form a single measurement light output from a single light outlet for detection. Through the single device of the attitude detection module 40, the displacement of the three translational degrees of freedom of the micro-projection device D in the X-axis direction, the Y-axis direction, and the Z-axis direction and the three rotational degrees of freedom of pitch U, roll V, and yaw W rotating around the Y-axis, the X-axis, and the Z-axis can be completely measured to fully realize the measurement of six degrees of freedom.

[0094] Referring to Figure 1 、 Figure 4 and Figure 5 in some embodiments, the attitude detection module 40 further includes an autocollimation measurement unit 45, and the autocollimation measurement unit 45 is disposed within the housing 43. The autocollimation measurement unit 45 is used to measure the deflection of a very small angle of the object to be measured (which is the micro-projection device D) located on its optical axis. In these embodiments, the optical axis of the autocollimation measurement unit 45 is perpendicular to the stage 22 (i.e., the plane formed by the X-axis direction and the Y-axis direction) and overlaps with the measurement light of the attitude detection module 40, whereby the attitude of the micro-projection device D in the rotational degree of freedom of pitch U and the attitude in the rotational degree of freedom of roll V can be further measured, further improving the measurement accuracy.

[0095] In some embodiments, the autocollimation measurement unit 45 can be, but is not limited to, a cylindrical autocollimator, a folded beam type autocollimator, or an electronic autocollimator.

[0096] Refer to Figure 1 、 Figure 4 and Figure 5 , the image analysis module 50 is disposed on the rack 10 for analyzing the image projected and displayed by the micro projection device D. In some embodiments, the image analysis module 50 is a colorimeter. In these embodiments, the image analysis module 50 captures the image and can analyze the optical characteristics including but not limited to: chrominance, luminance, resolution, color shift, field of view (FOV), and image distortion based on the image.

[0097] Refer to Figure 2 and Figure 3 , in some embodiments, the stage 22 of the transfer and six-degree-of-freedom adjustment module 20 includes a through imaging port 222. When the micro projection device D is carried on the stage 22, the image output part D5 of the micro projection device D is exposed through the imaging port 222 for the image analysis module 50 to capture the image through the imaging port 222 for analysis. In this way, after the transfer and six-degree-of-freedom adjustment module 20 transfers the micro projection device D to the position corresponding to the image analysis module 50, the image analysis module 50 can capture the image displayed by the micro projection device D from the image output part D5 and perform image analysis.

[0098] Refer to Figure 1 , in some embodiments, the controller 60 can be but is not limited to a central processing unit (CPU), a microcontroller unit (MCU), a digital signal processor (DSP), a programmable logic controller (PLC), a digital signal processor (DSP), an application specific integrated circuit (ASIC), a programmable logic device (PLD), or other similar devices or a combination of these devices. In other embodiments, the controller 60 can also be implemented in the form of a hardware circuit to perform various operation functions, examples including but not limited to: a workstation, a laptop computer, a client terminal, a server, a distributed computing system, a handheld device, or any other computing system or device. In its most basic configuration, the controller 60 may include at least one processor and a system memory.

[0099] Herein, the detection device of the micro-projection device controls the transfer and six-degree-of-freedom adjustment module 20, the electrical connection unit 30, the attitude detection module 40, and the image analysis module 50 through the controller 60 to complete the attitude adjustment and detection of the micro-projection device D.

[0100] Refer to Figures 1 to 6 , Figure 6 FIG. is a flowchart of the steps of an embodiment of the detection method of the micro-projection device of the present application. The following describes the step flow of some embodiments of the detection method of the micro-projection device of the present application, including:

[0101] Step S01: Provide the micro-projection device D to the stage 22 of the transfer and six-degree-of-freedom adjustment module 20;

[0102] Step S02: The electrical connection unit 30 moves the electrical contact end 32 to electrically contact the electrical connection end D4;

[0103] Step S03: The transfer and six-degree-of-freedom adjustment module 20 transfers the stage 22 to one side of the attitude detection module 40;

[0104] Step S04: The attitude detection module 40 detects the attitude of the micro-projection device D, and the transfer and six-degree-of-freedom adjustment module 20 adjusts the attitude of the micro-projection device D according to the detection result of the attitude detection module 40;

[0105] Step S05: The transfer and six-degree-of-freedom adjustment module 20 transfers the stage 22 to one side of the image analysis module 50; and

[0106] Step S06: The micro-projection device D outputs an image, and the image analysis module 50 analyzes the image.

[0107] Refer to Figure 1 , in some embodiments, in step S01, it can be, but is not limited to, that the operator manually provides the micro-projection device D to the stage 22. In other embodiments, a robotic arm or an automatic pick-and-place device can also be set around the detection device of the overall micro-projection device D to complete automatic loading / unloading.

[0108] Refer to Figure 2 , in some embodiments, the stage 22 includes a receiving groove 221, and the imaging port 222 is disposed through the bottom surface 2211 of the receiving groove 221. In these embodiments, the micro-projection device D is received in the receiving groove 221 with its lower surface D2 abutting against the bottom surface 2211 of the receiving groove 221. Herein, when the micro-projection device D is received in the receiving groove 221, the position of the image output portion D5 exactly corresponds to the position of the imaging port 222.

[0109] In some embodiments, the shape of the receiving groove 221 of the stage 22 corresponds to the external form of the micro-projection device D. In this way, when the micro-projection device D is received in the receiving groove 221, preliminary positioning can be obtained, so as to facilitate the electrical contact end 32 of the electrical connection unit 30 to be electrically connected to the electrical connection end D4 of the micro-projection device D.

[0110] In some embodiments, in step S04, when the attitude detection module 40 detects the attitude of the micro-projection device D, the controller 60 performs the following controls: First, control the transfer and six-degree-of-freedom adjustment module 20 to transfer the micro-projection device D to one side of the attitude detection module 40. The conjugate focus measurement unit 41 first measures the pitch U attitude of the micro-projection device D rotating around the Y axis and the roll V attitude rotating around the X axis; then the telecentric measurement unit 42 measures the displacement attitude of the micro-projection device D in the X-axis direction, the displacement attitude in the Y-axis direction, and the yaw W attitude rotating around the Z axis; then the conjugate focus measurement unit 41 measures the displacement attitude of the micro-projection device D in the Z-axis direction again; finally, the transfer and six-degree-of-freedom adjustment module 20 adjusts the attitude of the micro-projection device D according to the detection result of the attitude detection module 40 to ensure that the attitude of the micro-projection device D conforms to the attitude for the image analysis module 50 to capture and analyze the image.

[0111] Refer to Figure 4 、 Figure 7A and Figure 7B , Figure 7A is a partial perspective schematic view of the detection device of the micro-projection device of the present application; Figure 7B is Figure 7A a plan view of. In some embodiments, the lower surface D2 of the micro-projection device D further includes a plurality of positioning reference marks D21. The positioning reference marks D21 can be, but are not limited to, bumps protruding from the lower surface D2. The attitude detection module 40 determines the attitude of the micro-projection device D according to the positioning reference marks D21, and improves the detection accuracy of the attitude detection module 40 by setting the physical positioning reference marks D21.

[0112] Refer to Figure 7A and Figure 7B , in some embodiments where the lower surface D2 of the micro-projection device D includes the positioning reference marks D21, the stage 22 further includes a plurality of detection openings 223 penetrating the bottom surface 2211 of the receiving groove 221. The detection openings 223 are located around the imaging port 222. In these embodiments, the positioning reference marks D21 of the micro-projection device D are located around the image output portion D5. In this way, when the micro-projection device D abuts against the bottom surface 2211 of the receiving groove 221 with the lower surface D2, the position of the positioning reference marks D21 corresponds to the position of the detection openings 223 to facilitate the alignment detection of the attitude detection module 40.

[0113] Refer to Figure 1 、Figure 2 and Figure 6 In some embodiments, the detection device of the micro-projection device further includes a vision alignment unit 70, which is disposed on the stage 22 of the transfer and six-degree-of-freedom adjustment module 20 and electrically connected to the controller 60. In these embodiments, before step S02, the controller 60 first controls the vision alignment unit 70 to detect the position of the electrical connection end D4 of the micro-projection device D; then, in step S03, it can control the electrical connection unit 30 to move the electrical contact end 32 to electrically contact the electrical connection end D4 of the micro-projection device D according to the detection result of the vision alignment unit 70. Thereby, it is ensured that the electrical connection unit 30 can accurately electrically connect to the micro-projection device D. In some embodiments, the vision alignment unit 70 can be, but is not limited to, an Automated Optical Inspection (AOI) device.

[0114] Refer to Figures 8A to 8D , Figures 8A to 8D which is a schematic diagram of some embodiments of the detection device of the micro-projection device of the present application for positioning the micro-projection device. In some embodiments, the detection device of the micro-projection device further includes an auxiliary positioning unit 80, which is displaceably disposed on the frame 10 along the X-axis direction and electrically connected to the controller 60. In these embodiments, before step S02, the controller 60 controls the auxiliary positioning unit 80 to displace relative to the stage 22 to push against the side surface D3 of the micro-projection device D, so that the micro-projection device D can stably abut against the side wall of the receiving groove 221. Thereby, by the physical surface abutment between the micro-projection device D and the receiving groove 221, the accuracy of positioning the micro-projection device D in the receiving groove 221 is improved, ensuring that in step S02, the electrical contact end 32 of the electrical connection unit 30 can accurately electrically connect to the electrical connection end D4 of the micro-projection device D.

[0115] Refer to Figures 8A to 8D , in some embodiments, the detection device of the micro-projection device further includes a pressing unit 90, which is displaceably disposed on the stage 22 on the frame 10 along the Z-axis direction and electrically connected to the controller 60. In these embodiments, before step S02, the controller 60 controls the pressing unit 90 to displace relative to the stage 22 along the Z-axis direction to press against the upper surface D1 of the micro-projection device D, so that the lower surface D2 of the micro-projection device D abuts against the bottom surface 2211 of the receiving groove 221. Thereby, by the full abutment of each surface of the micro-projection device D against the receiving groove 221 of the stage 22, the accuracy of positioning the micro-projection device D in the receiving groove 221 is improved, ensuring that in step S02, the electrical contact end 32 of the electrical connection unit 30 can more accurately electrically connect to the electrical connection end D4 of the micro-projection device D.

[0116] Refer to Figures 8A to 8D, in some embodiments, the pressing unit 90 is disposed on the stage 22 which is displaceably arranged on the frame 10 along the Y-axis direction and the Z-axis direction. In these embodiments, before step S02, the controller 60 controls the pressing unit 90 to displace relative to the stage 22 along the Y-axis direction to correspond to the upper surface D1 of the micro-projection device D, and then controls the pressing unit 90 to displace relative to the stage 22 along the Z-axis direction to press on the upper surface D1 of the micro-projection device D. Thereby, the degree of freedom of the position configuration of the pressing unit 90 disposed on the frame 10 can be improved to meet various spatial configuration requirements.

[0117] Of course, the present invention can also have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can make various corresponding changes and deformations according to the present invention. However, these corresponding changes and deformations should all fall within the protection scope of the appended claims of the present invention.

Claims

1. A detection device for a micro projection device, characterized in that, Suitable for detecting a micro-projection device including an electrical connection terminal, the micro-projection device detection equipment includes: A frame; A transfer and six-degree-of-freedom adjustment module, including: An adjustment mechanism, displaceably arranged on the frame; and A stage, arranged on the adjustment mechanism to carry the micro-projection device; An electrical connection unit, displaceably arranged on the adjustment mechanism, the electrical connection unit includes an electrical contact terminal; An attitude detection module, arranged on the frame; An image analysis module, arranged on the frame; and A controller, electrically connected to the transfer and six-degree-of-freedom adjustment module, the electrical connection unit, the attitude detection module and the image analysis module; Wherein, the controller controls the electrical connection unit to move the electrical contact terminal to electrically contact the electrical connection terminal of the micro-projection device; the controller controls the transfer and six-degree-of-freedom adjustment module to transfer the stage to one side of the attitude detection module and controls the attitude detection module to detect the attitude of the micro-projection device; the controller controls the adjustment mechanism of the transfer and six-degree-of-freedom adjustment module to adjust the attitude of the micro-projection device according to the detection result of the attitude detection module; the controller controls the transfer and six-degree-of-freedom adjustment module to transfer the stage to one side of the image analysis module, the controller controls the micro-projection device to output an image, and controls the image analysis module to analyze the image.

2. The micro-projection device detection equipment according to claim 1, wherein Wherein the stage includes a receiving groove and an imaging port, the imaging port is arranged on a bottom surface of the receiving groove and penetrates the bottom surface; the micro-projection device is received in the receiving groove; the micro-projection device includes an image output part and an adjacent lower surface and a side surface, the image output part is located on the lower surface, the electrical connection terminal is located on the side surface, and the micro-projection device abuts against the bottom surface of the receiving groove with the lower surface.

3. The micro projection device detection equipment according to claim 2, characterized in that, Further includes an auxiliary positioning unit, displaceably arranged on the frame; the controller controls the auxiliary positioning unit to displace relative to the stage to push against the side surface of the micro-projection device, so that the micro-projection device abuts against a side wall of the receiving groove.

4. The micro-projection device detection equipment according to claim 2, characterized in that Further includes a pressing unit, displaceably arranged on the stage; the controller controls the pressing unit to displace relative to the stage to press on an upper surface of the micro-projection device, the upper surface is opposite to the lower surface, so that the lower surface of the micro-projection device abuts against the bottom surface of the receiving groove.

5. The micro-projection device detection equipment according to claim 2, characterized in that, Wherein the lower surface of the micro-projection device further includes a plurality of positioning reference marks, and the attitude detection module judges the attitude of the micro-projection device according to the positioning reference marks; the positioning reference marks are located around the image output part.

6. The micro-projection device detection equipment according to claim 5, characterized in that Wherein the stage further includes a plurality of detection openings penetrating the bottom surface of the receiving groove, the detection openings are located around the imaging port, and when the micro-projection device abuts against the bottom surface of the receiving groove with the lower surface, the positions of the positioning reference marks correspond to the positions of the detection openings.

7. The detection device for a micro-projection device according to claim 1, characterized in that, It further includes a vision alignment unit, which is disposed on the transfer and six-degree-of-freedom adjustment module and electrically connected to the controller; the controller controls the vision alignment unit to detect the position of the electrical connection end of the micro-projection device, and controls the electrical connection unit to move the electrical contact end to electrically contact the electrical connection end of the micro-projection device according to the detection result of the vision alignment unit.

8. The micro-projection device detection equipment according to claim 1, characterized in that The attitude detection module includes a telecentric measurement unit and a confocal measurement unit, and the attitude detection module generates a measurement optical axis from the confocal measurement unit and the telecentric measurement unit; When the controller controls the transfer and six-degree-of-freedom adjustment module to transfer the stage to one side of the attitude detection module, the micro-projection device is located on the measurement optical axis.

9. A detection method for a micro-projection device, characterized in that, Suitable for detecting a micro-projection device including an image output part and an electrical connection end, the method for detecting the micro-projection device includes: Providing the micro-projection device to a stage of a transfer and six-degree-of-freedom adjustment module; An electrical connection unit moves an electrical contact end to electrically contact the electrical connection end; The transfer and six-degree-of-freedom adjustment module transfers the stage to one side of an attitude detection module; The attitude detection module detects the attitude of the micro-projection device, and the transfer and six-degree-of-freedom adjustment module adjusts the attitude of the micro-projection device according to the detection result of the attitude detection module; The transfer and six-degree-of-freedom adjustment module transfers the stage to one side of an image analysis module; and The micro-projection device outputs an image, and the image analysis module analyzes the image.

10. The method for detecting a micro projection device according to claim 9, wherein, The attitude detection module includes a confocal measurement unit and a telecentric measurement unit. When the attitude detection module detects the attitude of the micro-projection device, it sequentially includes the following steps: The confocal measurement unit measures the pitch attitude of the micro-projection device rotating around a Y axis and the roll attitude rotating around an X axis; The telecentric measurement unit measures the displacement attitude of the micro-projection device in the X-axis direction, the displacement attitude in the Y-axis direction, and the yaw attitude rotating around a Z axis; and The confocal measurement unit measures the displacement attitude of the micro-projection device in the Z-axis direction.

Images