Vacuum pumping system, control method and device thereof and storage medium

Abstract

The invention discloses a vacuum pumping system, a control method and device of the vacuum pumping system and a storage medium. The vacuum pumping system comprises a mechanical pump, a roots pump, a first molecular pump, a second molecular pump, a first vacuum gauge and a first gate valve which are arranged corresponding to the first molecular pump, a second vacuum gauge and a second gate valve which are arranged corresponding to the second molecular pump, and a third vacuum gauge and a third gate valve which are arranged corresponding to the vacuum chamber; the method comprises the following steps: acquiring vacuum degree detection values of a first vacuum gauge, a second vacuum gauge and a third vacuum gauge; according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge and the third vacuum gauge, control parameters of a mechanical pump, a roots pump, a first molecular pump, a second molecular pump, a first gate valve, a second gate valve and a third gate valve are obtained; and according to the control parameters, the vacuum pumping system is driven to vacuumize the vacuum chamber. Therefore, full-automatic vacuumizing of the vacuum chamber is achieved through the vacuum pumping system based on the vacuum degree detection value, the process is simplified, and manual intervention is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pumping system control, and in particular to a control method for a vacuum pumping system, a computer-readable storage medium, a control device for a vacuum pumping system, and a vacuum pumping system. Background Art

[0002] At present, controllable nuclear fusion devices mainly include the EAST device, the HL-2M device, etc. At the same time, in order to achieve the commercial application of controllable nuclear fusion, a compact fusion energy experimental device (BEST) is being built as a follow-up project to the EAST device. Among them, neutral beam injection (NBI) is one of the important components of the high-power auxiliary heating and current drive system of the BEST Tokamak main machine. The main function of the vacuum pumping system is to obtain and maintain the vacuum environmental conditions required for beam generation and transmission.

[0003] However, the problem with the related technology is that during the operation of the vacuum pumping system, the air pump and gas valves are mostly manually operated, the operation process is complex, resulting in a waste of manpower, and there are many manual interventions, making it extremely easy to have misoperations. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems in the related technology to some extent. To this end, the first object of the present invention is to propose a control method for a vacuum pumping system, which can realize the full-automatic evacuation of the vacuum chamber based on the vacuum degree detection value by the vacuum pumping system, so as to simplify the process and reduce manual intervention.

[0005] The second object of the present invention is to propose a computer-readable storage medium.

[0006] The third object of the present invention is to propose a control device for a vacuum pumping system.

[0007] The fourth object of the present invention is to propose a vacuum pumping system.

[0008] To achieve the above object, an embodiment of the first aspect of the present invention provides a control method for a vacuum pumping system. The vacuum pumping system includes a mechanical pump, a Roots pump, a first molecular pump, a second molecular pump, a first vacuum gauge and a first gate valve provided corresponding to the first molecular pump, a second vacuum gauge and a second gate valve provided corresponding to the second molecular pump, and a third vacuum gauge and a third gate valve provided corresponding to a vacuum chamber. The method includes: obtaining vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; obtaining control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; and driving the vacuum pumping system to evacuate the vacuum chamber according to the control parameters.

[0009] According to the control method of the vacuum pumping system of the embodiment of the present invention, vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are obtained. Furthermore, according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge, control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve are obtained. And, according to the control parameters, the vacuum pumping system is driven to evacuate the vacuum chamber. Thus, the vacuum chamber is automatically evacuated by the vacuum pumping system based on the vacuum degree detection values, so as to simplify the process and reduce manual intervention.

[0010] In addition, according to the control method of the vacuum pumping system of the above embodiment of the present invention, the following additional technical features may further be provided: According to an embodiment of the present invention, the obtaining control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge includes: if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all greater than or equal to a first preset vacuum threshold, controlling a stepping motor to drive the third gate valve to open and controlling the mechanical pump to operate; if the vacuum degree detection value of the third vacuum gauge is less than a second preset vacuum threshold, controlling the Roots pump to operate; if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than a third preset vacuum threshold, controlling the stepping motor to drive the third gate valve to close, the first gate valve and the second gate valve to open, and controlling the first molecular pump and the second molecular pump to operate.

[0011] According to an embodiment of the present invention, the method further includes: if the detected vacuum degree value of the third vacuum gauge is less than a fourth preset vacuum threshold, controlling the stepping motor to drive the third gate valve to close and controlling the mechanical pump to operate; if the detected vacuum degree values of the first vacuum gauge and the second vacuum gauge are both less than the second preset vacuum threshold, controlling the roots pump to operate; if the detected vacuum degree values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than the third preset vacuum threshold, controlling the stepping motor to drive the first gate valve and the second gate valve to open and controlling the first molecular pump and the second molecular pump to operate.

[0012] According to an embodiment of the present invention, the method further includes: if the detected vacuum degree value of the third vacuum gauge is between the detected vacuum degree value of the first vacuum gauge and the detected vacuum degree value of the second vacuum gauge, or the detected vacuum degree value of the third vacuum gauge is greater than the first preset vacuum threshold, and the detected vacuum degree values of the first vacuum gauge and the second vacuum gauge are both less than the first preset vacuum threshold, generating a vacuum breaking prompt message.

[0013] According to an embodiment of the present invention, the first gate valve, the second gate valve, and the third gate valve are all correspondingly provided with open / close limit switches, and the method further includes: obtaining a gate valve drive command and a limit feedback signal of the open / close limit switch; detecting the state of the gate valve according to the gate valve drive command and the limit feedback signal.

[0014] According to an embodiment of the present invention, the method further includes: obtaining the actual travel time of the stepping motor; if the actual travel time is greater than a preset travel time threshold, controlling the stepping motor to stop.

[0015] According to an embodiment of the present invention, the method further includes: after detecting a device fault signal, obtaining the operating parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve; performing fault handling according to the operating parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve.

[0016] To achieve the above object, a computer-readable storage medium provided in the second aspect embodiment of the present invention stores a control program for a vacuum pumping system, and when the program is executed by a processor, it implements the control method of the vacuum pumping system in the above embodiment of the present invention.

[0017] A computer-readable storage medium implemented according to the present invention can, by executing a control program of a vacuum pumping system stored thereon, achieve full-automatic evacuation of a vacuum chamber by the vacuum pumping system based on a vacuum degree detection value, so as to simplify the process and reduce manual intervention.

[0018] To achieve the above object, an embodiment of the third aspect of the present invention provides a control device for a vacuum pumping system. The vacuum pumping system includes a mechanical pump, a Roots pump, a first molecular pump, a second molecular pump, a first vacuum gauge and a first gate valve corresponding to the first molecular pump, a second vacuum gauge and a second gate valve corresponding to the second molecular pump, and a third vacuum gauge and a third gate valve corresponding to the vacuum chamber. The control device includes: a first acquisition module for acquiring vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; a second acquisition module for acquiring control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; and a control module for driving the vacuum pumping system to evacuate the vacuum chamber according to the control parameters.

[0019] The control device for a vacuum pumping system according to an embodiment of the present invention acquires vacuum degree detection values of a first vacuum gauge, a second vacuum gauge, and a third vacuum gauge through a first acquisition module. Further, a second acquisition module acquires control parameters of a mechanical pump, a Roots pump, a first molecular pump, a second molecular pump, a first gate valve, a second gate valve, and a third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge, and a control module drives the vacuum pumping system to evacuate the vacuum chamber according to the control parameters. Thus, full-automatic evacuation of the vacuum chamber is achieved by the vacuum pumping system based on the vacuum degree detection value, so as to simplify the process and reduce manual intervention.

[0020] To achieve the above object, a vacuum pumping system provided by an embodiment of the fourth aspect of the present invention includes the control device for the vacuum pumping system according to the embodiment of the present invention.

[0021] The vacuum pumping system according to an embodiment of the present invention can, by adopting the control device for the vacuum pumping system described above, achieve full-automatic evacuation of the vacuum chamber by the vacuum pumping system based on the vacuum degree detection value, so as to simplify the process and reduce manual intervention.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0023] Figure 1It is a schematic structural diagram of a vacuum pumping system according to an embodiment of the present invention; Figure 2 It is a schematic flowchart of a control method for a vacuum pumping system according to an embodiment of the present invention; Figure 3 It is a schematic flowchart of a control method for a vacuum pumping system according to an embodiment of the present invention; Figure 4 It is a schematic flowchart of a control method for a vacuum pumping system according to an embodiment of the present invention; Figure 5 It is a schematic flowchart of a control method for a vacuum pumping system according to an embodiment of the present invention; Figure 6 It is a schematic flowchart of a control method for a vacuum pumping system according to an embodiment of the present invention; Figure 7 It is a schematic flowchart of a control method for a vacuum pumping system according to an embodiment of the present invention; Figure 8 It is a schematic block diagram of a control device for a vacuum pumping system according to an embodiment of the present invention; Figure 9 It is a schematic block diagram of a vacuum pumping system according to an embodiment of the present invention.

[0024] Description of reference numerals: Vacuum pumping system 1000, mechanical pump 101, Roots pump 102, first molecular pump 103, second molecular pump 104, first vacuum gauge 301, first gate valve 302, second vacuum gauge 401, second gate valve 402, vacuum chamber 105, third vacuum gauge 501, third gate valve 502, control device 100 of the vacuum pumping system. Detailed description of the specific implementation

[0025] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present invention, and should not be construed as a limitation of the present invention.

[0026] The control method, computer-readable storage medium, control device and vacuum pumping system of the vacuum pumping system according to the embodiments of the present invention will be described below with reference to the drawings.

[0027] Specifically, in some embodiments of the present invention, the vacuum pumping system 1000 can be applied to a vacuum pumping system, such as Figure 1As shown in the figure, the vacuum pumping system 1000 includes a mechanical pump 101, a Roots pump 102, a first molecular pump 103, a second molecular pump 104, a first vacuum gauge 301 and a first gate valve 302 provided corresponding to the first molecular pump 103, a second vacuum gauge 401 and a second gate valve 402 provided corresponding to the second molecular pump 104, and a third vacuum gauge 501 and a third gate valve 502 provided corresponding to the vacuum chamber 105.

[0028] It can be understood that in this embodiment of the present invention, the data acquisition and control of the vacuum pumping system 1000 are performed by a PLC. Among them, the vacuum pumping system 1000 realizes rough vacuum pumping through the mechanical pump 101 and the Roots pump 102, realizes high-precision vacuum pumping through the first molecular pump 103 and the second molecular pump 104, controls the opening and closing of the first gate valve 302, the second gate valve 402 and the third gate valve 502 through a stepping motor, and controls the first molecular pump 103 and the second molecular pump 104 through a molecular pump controller.

[0029] Specifically, in the above embodiment of the present invention, the first vacuum gauge 301, the second vacuum gauge 401 and the third vacuum gauge 501 collect data to the PLC through 4-20mA analog signals. The mechanical pump 101 and the Roots pump 102 are controlled to start and stop through the PLC DO output to control a contactor. The first molecular pump 103 and the second molecular pump 104 are connected to the PLC through the ModbusRTU protocol for control. The first gate valve 302, the second gate valve 402 and the third gate valve 502 control a stepping motor through Siemens pulse output to realize opening and closing.

[0030] It can be understood that in some embodiments of the present invention, the mechanical pump 101 is specifically used for pumping rough vacuum, the Roots pump 102 is specifically used for pumping medium vacuum, and the first molecular pump 103 and the second molecular pump 104 are specifically used for pumping high vacuum. Among them, when pumping rough vacuum, the mechanical pump 101 is in an open state. When pumping medium vacuum, both the mechanical pump 101 and the Roots pump 102 are in an open state. When pumping high vacuum, the mechanical pump 101, the Roots pump 102, the first molecular pump 103 and the second molecular pump 104 are all in an open state.

[0031] Figure 2 It is a schematic flow chart of the control method of the vacuum pumping system according to an embodiment of the present invention.

[0032] Specifically, in some embodiments of the present invention, as Figure 2 shown, the control method of the vacuum pumping system includes: S101, obtaining the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge and the third vacuum gauge.

[0033] It can be understood that in this embodiment of the present invention, the vacuum degree of the evacuation channel of the first molecular pump is measured by the first vacuum gauge, the vacuum degree of the evacuation channel of the second molecular pump is measured by the second vacuum gauge, and the vacuum degree of the vacuum chamber is measured by the third vacuum gauge.

[0034] S102. Obtain the control parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge.

[0035] It can be understood that in this embodiment of the present invention, the current vacuum environment conditions of the vacuum chamber are determined through the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge. Furthermore, obtain the control parameters for making the current vacuum environment conditions of the vacuum chamber reach the target vacuum environment conditions, where the control parameters include the control parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve.

[0036] S103. Drive the vacuum pumping system to evacuate the vacuum chamber according to the control parameters.

[0037] It can be understood that in this embodiment of the present invention, the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve are respectively driven by the control parameters to enter the corresponding working conditions, so as to realize the evacuation of the vacuum chamber through the vacuum pumping system. Thus, the full-automatic evacuation of the vacuum chamber is realized based on the vacuum degree detection value through the vacuum pumping system, simplifying the process and reducing manual intervention.

[0038] Furthermore, in some embodiments of the present invention, as Figure 3 shown, obtaining the control parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge includes: S201. If the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all greater than or equal to the first preset vacuum threshold, control the stepper motor to drive the third gate valve to open and control the mechanical pump to operate.

[0039] It can be understood that in this embodiment of the present invention, when the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all greater than or equal to the first preset vacuum threshold, it can be determined that the current vacuum environment of the vacuum chamber is in the first stage (low vacuum degree). At this time, control the stepper motor to drive the third gate valve to open and control the mechanical pump to operate, so as to realize the rough precision evacuation of the vacuum chamber through the mechanical pump.

[0040] Optionally, in the above embodiments of the present invention, the first preset vacuum threshold can be set accordingly according to the type of pump selected by the vacuum pumping system.

[0041] S202, if the vacuum degree detection value of the third vacuum gauge is less than the second preset vacuum threshold, control the Roots pump to operate.

[0042] It can be understood that in this embodiment of the present invention, when the vacuum degree detection value of the third vacuum gauge is less than the second preset vacuum threshold, it can be determined that after the vacuum chamber is evacuated by the mechanical pump, the current vacuum environment is in the second stage (medium vacuum degree). At this time, control the Roots pump to operate to achieve rough vacuum pumping of the vacuum chamber through the mechanical pump and the Roots pump.

[0043] Optionally, in the above embodiments of the present invention, the second preset vacuum threshold can be set accordingly according to the opening threshold of the Roots pump.

[0044] S203, if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than the third preset vacuum threshold, control the stepping motor to drive the third gate valve to close, the first gate valve and the second gate valve to open, and control the first molecular pump and the second molecular pump to operate.

[0045] It can be understood that in this embodiment of the present invention, when the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than the third preset vacuum threshold, it can be determined that after the vacuum chamber is evacuated by the mechanical pump and the Roots pump, the current vacuum environment is in the third stage (high vacuum degree). At this time, control the stepping motor to drive the third gate valve to close, the first gate valve and the second gate valve to open, and control the first molecular pump and the second molecular pump to operate to achieve high-precision vacuum pumping of the vacuum chamber through the first molecular pump and the second molecular pump.

[0046] Optionally, in the above embodiments of the present invention, the third preset vacuum threshold can be set accordingly according to the opening thresholds of the first molecular pump and the second molecular pump.

[0047] Further, in some embodiments of the present invention, as Figure 4 shown, the method further includes: S301, if the vacuum degree detection value of the third vacuum gauge is less than the fourth preset vacuum threshold, control the stepping motor to drive the third gate valve to close, and control the mechanical pump to operate.

[0048] It can be understood that in this embodiment of the present invention, when the vacuum degree detection value of the third vacuum gauge is less than the fourth preset vacuum threshold, it can be determined that the current vacuum environment of the vacuum chamber is in the third stage (higher vacuum degree). At this time, control the stepping motor to drive the third shutter valve to close, and control the mechanical pump to operate, so as to conduct rough vacuum pumping on the vacuum pumping channel through the mechanical pump, thereby reducing the control process and accelerating the vacuum pumping progress.

[0049] Optionally, in the above embodiment of the present invention, the fourth preset vacuum threshold can be set correspondingly according to the type of pump body selected by the vacuum pumping system.

[0050] S302, if the vacuum degree detection values of the first vacuum gauge and the second vacuum gauge are both less than the second preset vacuum threshold, then control the Roots pump to operate.

[0051] It can be understood that in this embodiment of the present invention, when the vacuum degree detection values of the first vacuum gauge and the second vacuum gauge are both less than the second preset vacuum threshold, it can be determined that the current vacuum environment of the vacuum pumping channel is in the second stage (medium vacuum degree). At this time, control the Roots pump to operate, so as to conduct rough vacuum pumping on the vacuum pumping channel through the mechanical pump and the Roots pump.

[0052] S303, if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge and the third vacuum gauge are all less than the third preset vacuum threshold, then control the stepping motor to drive the first shutter valve and the second shutter valve to open, and control the first molecular pump and the second molecular pump to operate.

[0053] It can be understood that in this embodiment of the present invention, when the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge and the third vacuum gauge are all less than the third preset vacuum threshold, it can be determined that the current vacuum environment of the vacuum pumping channel is in the third stage (higher vacuum degree). At this time, control the stepping motor to drive the first shutter valve and the second shutter valve to open, and control the first molecular pump and the second molecular pump to operate, so as to conduct high-precision vacuum pumping on the vacuum chamber through the mechanical pump, the Roots pump, the first molecular pump and the second molecular pump.

[0054] Furthermore, in some embodiments of the present invention, the method further includes: if the vacuum degree detection value of the third vacuum gauge is between the vacuum detection values of the first vacuum gauge and the second vacuum gauge, or the vacuum degree detection value of the third vacuum gauge is greater than the first preset vacuum threshold, and the vacuum detection values of the first vacuum gauge and the second vacuum gauge are both less than the first preset vacuum threshold, then generate a vacuum-breaking prompt message.

[0055] It can be understood that in this embodiment of the present invention, when the vacuum degree detection value of the third vacuum gauge is between the vacuum detection values of the first vacuum gauge and the second vacuum gauge (for example, the vacuum degree detection value of the third vacuum gauge is greater than the vacuum detection value of the first vacuum gauge and less than the vacuum detection value of the second vacuum gauge; or, the vacuum degree detection value of the third vacuum gauge is greater than the vacuum detection value of the second vacuum gauge and less than the vacuum detection value of the first vacuum gauge), or when the vacuum degree detection value of the third vacuum gauge is greater than the first preset vacuum threshold and the vacuum detection values of the first vacuum gauge and the second vacuum gauge are both less than the first preset vacuum threshold, it can be determined that the pressure difference at both ends of the first gate valve, the second gate valve or the third gate valve is too large and vacuum breaking treatment is required. At this time, a vacuum breaking prompt message is generated. For example, it is prompted that the vacuum pumping system needs to break vacuum for 10 seconds. This prompt message can be a voice message or a text message, thereby avoiding the gate valve opening failure caused by the pressure difference.

[0056] Specifically, according to the control method of the vacuum pumping system in the foregoing embodiment of the present invention, based on the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge and the third vacuum gauge, the automatic control of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve and the third gate valve is realized in combination with the PLC. Thus, the vacuum chamber is fully automatically evacuated through the vacuum pumping system based on the vacuum degree detection value, simplifying the process and reducing manual intervention.

[0057] Further, in some embodiments of the present invention, the first gate valve, the second gate valve and the third gate valve are all correspondingly provided with open / close limit switches. As Figure 5 shown, the method further includes: S401, obtaining the gate valve drive instruction and the limit feedback signal of the open / close limit switch.

[0058] It can be understood that in this embodiment of the present invention, since the opening and closing of the first gate valve, the second gate valve and the third gate valve are controlled by a stepping motor, however, the stepping motor cannot determine the specific advancing process of the gate valve. Therefore, open / close limit switches are correspondingly provided for the first gate valve, the second gate valve and the third gate valve to obtain the limit feedback signals for the stepping motor to drive the gate valve to open in place and close in place.

[0059] S402, detecting the state of the gate valve according to the gate valve drive instruction and the limit feedback signal.

[0060] It can be understood that in this embodiment of the present invention, the state of the gate valve is detected through the gate valve drive instruction and the limit feedback signal. For example, by determining whether the limit feedback signal is consistent with the position of the gate valve after the gate valve drive instruction is executed.

[0061] Further, in some embodiments of the present invention, as Figure 6 shown, the method further includes: S501, obtaining the actual travel time of the stepper motor.

[0062] It should be understood that since the on / off limit switch may malfunction after long-term operation, and if the on / off limit switch malfunctions, then the stepper motor may be blocked, causing damage to the stepper motor. Therefore, in this embodiment of the present invention, the travel time is introduced to interlock and protect the stepper motor.

[0063] S502, if the actual travel time is greater than the preset travel time threshold, then control the stepper motor to stop.

[0064] It can be understood that in this embodiment of the present invention, since the time for the stepper motor to drive the flap valve from open to closed and from closed to open is basically the same each time, therefore, if the actual travel time of the stepper motor is greater than the preset travel time threshold, then it is considered that the stepper motor or the on / off limit switch has malfunctioned. At this time, control the stepper motor to stop.

[0065] Optionally, in the above embodiment of the present invention, the stepper motor can be replaced with a servo motor. Furthermore, the servo motor is controlled to stop according to the travel of the servo motor.

[0066] Further, in some embodiments of the present invention, as Figure 7 shown, the method further includes: S601, after detecting the equipment fault signal, obtaining the operating parameters of the mechanical pump, roots pump, first molecular pump, second molecular pump, first flap valve, second flap valve, and third flap valve.

[0067] It can be understood that the equipment fault signal may include a mechanical pump / roots pump fault signal, a flap valve fault signal, and a molecular pump fault signal. Among them, The detection method of the mechanical pump / roots pump fault signal is as follows: The mechanical pump and the logic pump have operating signal feedback, and this signal is led out from the contactor contact. Among them, when the PLC issues a control command, it is judged whether the operating signal is correct within 2 seconds. For example, when the PLC issues an open command and the operating signal is True within 2 seconds, then the mechanical pump / roots pump is in the operating state; when the PLC issues a close command and the operating signal is False within 2 seconds, then the mechanical part / roots pump is in the closed state; when the PLC issues an open instruction and the operating signal is always False within 2 seconds, then the mechanical pump / roots pump equipment is in a fault state; when the PLC issues a close instruction and the operating signal is always True within 2 seconds, then the mechanical pump / roots pump equipment is in a fault state.

[0068] The detection method for the fault signal of the flap valve is as follows: The PLC issues a command to open the flap valve. If the limit feedback signal is received within 10 seconds, with the open limit being True and the close limit being False, it indicates that the flap valve is in the open state. The PLC issues a command to close the flap valve. If the limit feedback signal is received within 10 seconds, with the open limit being False and the close limit being True, it indicates that the flap valve is in the closed state. If the PLC issues a command to open the flap valve and the limit feedback signal appears after 10 seconds: the open feedback is True and the close feedback is True; the open feedback is False and the close feedback is True; the open feedback is False and the close feedback is False, then the state of the flap valve is a fault. If the PLC issues a command to close the flap valve and the limit feedback signal appears after 10 seconds: the open feedback is True and the close feedback is True; the open feedback is True and the close feedback is False; the open feedback is False and the close feedback is False, then the state of the flap valve is a fault.

[0069] The detection method for the fault signal of the molecular pump is as follows: The fault state of the molecular pump is judged by the molecular pump controller.

[0070] S602, perform fault handling according to the operating parameters of the mechanical pump, Roots pump, first molecular pump, second molecular pump, first flap valve, second flap valve, and third flap valve.

[0071] It can be understood that during the process of fault handling, if it is determined through the operating parameters of the mechanical pump, Roots pump, first molecular pump, second molecular pump, first flap valve, second flap valve, and third flap valve that the full-automatic vacuum pumping has reached the molecular pump operation stage, at this time, if equipment failures such as the flap valve, mechanical pump, and Roots pump occur, the molecular pump needs to be closed first. After the rotational speed of the molecular pump is lower than the set speed threshold, then close the mechanical pump, Roots pump, flap valve and other equipment. On the contrary, if it is determined through the operating parameters of the mechanical pump, Roots pump, first molecular pump, second molecular pump, first flap valve, second flap valve, and third flap valve that the full-automatic vacuum pumping has not reached the molecular pump operation stage, at this time, if equipment failures such as the flap valve, mechanical pump, and Roots pump occur, directly close the mechanical pump, Roots pump, flap valve and other equipment, thereby ensuring the reliability and stability of the vacuum pumping system.

[0072] It should be noted that, in some embodiments of the present invention, the working modes of the vacuum pumping system 1000 may include an automatic mode and a manual mode. Among them, in the manual mode, the tester can separately control the operation of the devices of the vacuum pumping system. And in the automatic mode, based on the control method of the vacuum pumping system according to the foregoing embodiments of the present invention, the PLC program takes over the device control authority of the vacuum pumping system. The PLC fully automatically controls the device to pump vacuum, and when the PLC receives the end signal of the automatic mode, it first controls the first molecular pump 103 and the second molecular pump 104 to close. Until the rotation speeds of the first molecular pump 103 and the second molecular pump 104 are lower than the preset rotation speed threshold, the mechanical pump 101, the Roots pump 102, the first gate valve 302, the second gate valve 402, and the third gate valve 502 are closed.

[0073] In summary, according to the control method of the vacuum pumping system according to the embodiments of the present invention, the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are obtained. Furthermore, according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge, the control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve are obtained. And according to the control parameters, the vacuum pumping system is driven to pump vacuum for the vacuum chamber. Thus, through the vacuum pumping system, the full-automatic vacuum pumping of the vacuum chamber is realized based on the vacuum degree detection value, simplifying the process and reducing manual intervention.

[0074] Based on the control method of the vacuum pumping system according to the foregoing embodiments of the present invention, the embodiments of the present invention also propose a computer-readable storage medium, on which a control program of the vacuum pumping system is stored. When the program is executed by a processor, the control method of the vacuum pumping system according to the foregoing embodiments of the present invention is implemented.

[0075] It should be understood that the specific implementation manner of the computer-readable storage medium according to the embodiments of the present invention can refer to the specific implementation manner of the control method of the vacuum pumping system according to the foregoing embodiments of the present invention. To reduce redundancy, it will not be elaborated here.

[0076] In summary, according to the computer-readable storage medium implemented according to the present invention, by executing the control program of the vacuum pumping system stored thereon, the full-automatic vacuum pumping of the vacuum chamber can be realized through the vacuum pumping system based on the vacuum degree detection value, simplifying the process and reducing manual intervention.

[0077] Figure 8 It is a block diagram of the control device of the vacuum pumping system according to the embodiments of the present invention.

[0078] Specifically, in some embodiments of the present invention, as Figure 8 shown, the control device 100 of the vacuum pumping system includes: a first acquisition module 10, a second acquisition module 20, and a control module 30.

[0079] Among them, the first acquisition module 10 is used to acquire the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; the second acquisition module 20 is used to acquire the control parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; the control module 30 is used to drive the vacuum pumping system to evacuate the vacuum chamber according to the control parameters.

[0080] Further, in some embodiments of the present invention, the second acquisition module 20 is further used to, if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all greater than or equal to the first preset vacuum threshold, control the stepping motor to drive the third gate valve to open, and control the mechanical pump to operate; if the vacuum degree detection value of the third vacuum gauge is less than the second preset vacuum threshold, control the roots pump to operate; if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than the third preset vacuum threshold, control the stepping motor to drive the third gate valve to close, the first gate valve and the second gate valve to open, and control the first molecular pump and the second molecular pump to operate.

[0081] According to an embodiment of the present invention, the second acquisition module 20 is further used to, if the vacuum degree detection value of the third vacuum gauge is less than the fourth preset vacuum threshold, control the stepping motor to drive the third gate valve to close, and control the mechanical pump to operate; if the vacuum degree detection values of the first vacuum gauge and the second vacuum gauge are both less than the second preset vacuum threshold, control the roots pump to operate; if the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than the third preset vacuum threshold, control the stepping motor to drive the first gate valve and the second gate valve to open, and control the first molecular pump and the second molecular pump to operate.

[0082] According to an embodiment of the present invention, the second acquisition module 20 is further used to, if the vacuum degree detection value of the third vacuum gauge is between the vacuum detection values of the first vacuum gauge and the second vacuum gauge, or, the vacuum degree detection value of the third vacuum gauge is greater than the first preset vacuum threshold, and the vacuum detection values of the first vacuum gauge and the second vacuum gauge are both less than the first preset vacuum threshold, generate a vacuum breaking prompt message.

[0083] According to an embodiment of the present invention, the first gate valve, the second gate valve, and the third gate valve are all correspondingly provided with open / close limit switches, and the control module 30 is further used to acquire the gate valve drive command and the limit feedback signal of the open / close limit switch; detect the gate valve state according to the gate valve drive command and the limit feedback signal.

[0084] According to an embodiment of the present invention, the control module 30 is further configured to obtain the actual travel time of the stepper motor; if the actual travel time is greater than a preset travel time threshold, the stepper motor is controlled to stop.

[0085] According to an embodiment of the present invention, the control module 30 is further configured to, after detecting a device failure signal, obtain the operating parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve; perform fault handling according to the operating parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve.

[0086] It should be understood that the specific implementation manners of the control device of the vacuum pumping system in the embodiments of the present invention correspond one-to-one to the specific implementation manners of the control method of the vacuum pumping system in the foregoing embodiments of the present invention. To reduce redundancy, they will not be described herein again.

[0087] In summary, for the control device of the vacuum pumping system according to the embodiments of the present invention, the first acquisition module acquires the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge. Furthermore, the second acquisition module obtains the control parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge. And the control module drives the vacuum pumping system to evacuate the vacuum chamber according to the control parameters. Thus, the vacuum pumping system realizes the full-automatic evacuation of the vacuum chamber based on the vacuum degree detection value, simplifies the process and reduces manual intervention.

[0088] Figure 9 is a block diagram of the vacuum pumping system according to the embodiment of the present invention.

[0089] Specifically, in some embodiments of the present invention, as Figure 9 shown, the vacuum pumping system 1000 includes the control device 100 of the vacuum pumping system in the foregoing embodiments of the present invention.

[0090] It should be understood that the specific implementation manner of the vacuum pumping system 1000 in the embodiments of the present invention can refer to the control method of the vacuum pumping system in the foregoing embodiments of the present invention. In addition, the other constitutions and functions of the vacuum pumping system in the embodiments of the present invention are known to those skilled in the art. To reduce redundancy, they will not be described herein.

[0091] In summary, for the vacuum pumping system according to the embodiments of the present invention, by adopting the foregoing control device of the vacuum pumping system, the full-automatic evacuation of the vacuum pumping system can be realized to simplify the operation process and reduce manual intervention.

[0092] Note that the logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a definite sequence list of executable instructions for implementing logical functions, and can be specifically implemented in any computer-readable medium for use by an instruction execution system, apparatus, or device (such as a computer-based system, a system including a processor, or other systems that can fetch and execute instructions from the instruction execution system, apparatus, or device), or in combination with these instruction execution systems, apparatuses, or devices. For the purposes of this specification, a "computer-readable medium" can be any device that can contain, store, communicate, propagate, or transport a program for use by or in combination with an instruction execution system, apparatus, or device. More specific examples (non-exhaustive list) of the computer-readable medium include the following: an electrical connection part with one or more wirings (electronic device), a portable computer disk cartridge (magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium can even be paper or other suitable media on which the program can be printed, because the program can be obtained electronically, for example, by optically scanning the paper or other media, followed by editing, interpretation, or otherwise processing as appropriate, and then storing it in a computer memory.

[0093] It should be understood that various parts of the present invention can be implemented by hardware, software, firmware, or a combination thereof. In the above-described embodiments, multiple steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented by hardware, as in another embodiment, any one or a combination of the following techniques well known in the art can be used: discrete logic circuits with logic gate circuits for implementing logical functions on data signals, application-specific integrated circuits with suitable combinational logic gate circuits, programmable gate arrays (PGA), field programmable gate arrays (FPGA), etc.

[0094] In the description of this specification, the description referring to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0095] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0096] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0097] In the present invention, unless otherwise clearly defined and limited, the terms "mounted", "connected", "coupled", "fixed", etc. shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0098] In the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0099] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as a limitation of the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A control method for a vacuum pumping system, characterized in that, The vacuum pumping system includes a mechanical pump, a Roots pump, a first molecular pump, a second molecular pump, a first vacuum gauge and a first gate valve corresponding to the first molecular pump, a second vacuum gauge and a second gate valve corresponding to the second molecular pump, and a third vacuum gauge and a third gate valve corresponding to the vacuum chamber. The method includes: Obtaining the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; Obtaining the control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; Driving the vacuum pumping system to evacuate the vacuum chamber according to the control parameters.

2. The control method of the vacuum pumping system according to claim 1, characterized in that The obtaining the control parameters of the mechanical pump, the Roots pump, the first molecular pump, the second molecular pump, the first gate valve, the second gate valve, and the third gate valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge includes: If the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all greater than or equal to a first preset vacuum threshold, controlling the stepping motor to drive the third gate valve to open and controlling the mechanical pump to operate; If the vacuum degree detection value of the third vacuum gauge is less than a second preset vacuum threshold, controlling the Roots pump to operate; If the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than a third preset vacuum threshold, controlling the stepping motor to drive the third gate valve to close, the first gate valve and the second gate valve to open, and controlling the first molecular pump and the second molecular pump to operate.

3. The control method of the vacuum pumping system according to claim 2, wherein, The method further includes: If the vacuum degree detection value of the third vacuum gauge is less than a fourth preset vacuum threshold, controlling the stepping motor to drive the third gate valve to close and controlling the mechanical pump to operate; If the vacuum degree detection values of the first vacuum gauge and the second vacuum gauge are both less than the second preset vacuum threshold, controlling the Roots pump to operate; If the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge are all less than the third preset vacuum threshold, controlling the stepping motor to drive the first gate valve and the second gate valve to open and controlling the first molecular pump and the second molecular pump to operate.

4. The control method of the vacuum pumping system according to claim 2, characterized in that, The method further includes: If the vacuum degree detection value of the third vacuum gauge is between the vacuum detection values of the first vacuum gauge and the second vacuum gauge, or the vacuum degree detection value of the third vacuum gauge is greater than the first preset vacuum threshold and the vacuum detection values of the first vacuum gauge and the second vacuum gauge are both less than the first preset vacuum threshold, generating a vacuum breaking prompt message.

5. The control method of the vacuum pumping system according to any one of claims 2-4, characterized in that, The first gate valve, the second gate valve, and the third gate valve are all correspondingly provided with open / close limit switches. The method further includes: Obtaining the gate valve drive instruction and the limit feedback signal of the open / close limit switch; Detect the state of the flap valve according to the flap valve drive instruction and the limit feedback signal.

6. The control method of the vacuum pumping system according to claim 5, characterized in that, The method further includes: Obtain the actual travel time of the stepper motor; If the actual travel time is greater than a preset travel time threshold, control the stepper motor to stop.

7. The control method of the vacuum pumping system according to claim 1, characterized in that, The method further includes: After detecting a device failure signal, obtain the operating parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first flap valve, the second flap valve, and the third flap valve; Perform fault handling according to the operating parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first flap valve, the second flap valve, and the third flap valve.

8. A computer-readable storage medium, characterized in that, Stored thereon is a control program for a vacuum pumping system, and when the program is executed by a processor, it implements the control method of the vacuum pumping system according to any one of claims 1-7.

9. A control device for a vacuum pumping system, which uses the control method of the vacuum pumping system as described in any one of claims 1-7, characterized in that, The vacuum pumping system includes a mechanical pump, a roots pump, a first molecular pump, a second molecular pump, a first vacuum gauge and a first flap valve provided corresponding to the first molecular pump, a second vacuum gauge and a second flap valve provided corresponding to the second molecular pump, and a third vacuum gauge and a third flap valve provided corresponding to the vacuum chamber. The control device includes: A first acquisition module for acquiring the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; A second acquisition module for obtaining the control parameters of the mechanical pump, the roots pump, the first molecular pump, the second molecular pump, the first flap valve, the second flap valve, and the third flap valve according to the vacuum degree detection values of the first vacuum gauge, the second vacuum gauge, and the third vacuum gauge; A control module for driving the vacuum pumping system to evacuate the vacuum chamber according to the control parameters.

10. A vacuum pumping system, characterized in that, The vacuum pumping system includes the control device of the vacuum pumping system according to claim 9.

Images