Manipulator device applied to full-automatic wafer scribing machine

Abstract

The invention discloses a manipulator device applied to a full-automatic wafer scribing machine, which comprises a feeding guide rail mounting plate, corresponding lead screws and guide rails, a lead screw front protection plate and a lead screw rear protection plate are arranged on the surfaces of the front side and the rear side of the feeding guide rail mounting plate, and a motor mounting plate is arranged at the right end of the feeding guide rail mounting plate. A feeding motor and a material pulling motor are arranged on the surface of the motor mounting plate, the feeding motor controls the material sucking module, the material pulling motor controls the material pulling module, and suction cup assemblies are arranged at the bottom of the material pulling module and the bottom of the material sucking module; the feeding motor and the pulling motor are used for feeding and discharging workpieces together, the repeatability of the feeding position in the wafer cutting process is guaranteed by adjusting the relative positions of the feeding motor and the pulling motor, the stability of the cutting quality is guaranteed, the influence of the conditions that the proficiency of operators is not high, the professional ability is not high and the like on machining is avoided, and the machining efficiency is improved. The problems of long material preparation time, low position repeatability and poor wafer cutting precision in the cutting process of the scribing machine are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of dicing machines, and in particular to a manipulator device applied to a fully automatic wafer dicing machine. Background Art

[0002] Traditional semiconductor wafer dicing machines are all manually loaded and unloaded, resulting in high labor costs, long processing times, slow processing efficiency, and the inability to repeat the pasted position. To address this problem, the transformation of traditional dicing machines has begun, and automatic loading and unloading are achieved through an external manipulator; there are many existing manipulator clamping methods, but the structure is relatively complex, the cost is high, the volume is large, the floor area is wide, the applicable site is limited, and it is not conducive to popularization and use. To solve the problems of long material preparation time, low position repeatability, and poor wafer cutting accuracy during the dicing process of the dicing machine, by designing a fully automatic manipulator device, the influence of the low proficiency and professional ability of operators on processing is removed; for this reason, we design a manipulator device applied to a fully automatic wafer dicing machine to solve the above technical problems. Summary of the Invention

[0003] The purpose of the present invention is to provide a manipulator device applied to a fully automatic wafer dicing machine to solve the problems raised in the above background art.

[0004] To achieve the above purpose, the present invention provides the following technical solution:

[0005] A manipulator device applied to a fully automatic wafer dicing machine includes a loading rail mounting plate. A front lead screw is rotatably provided on the front surface of the loading rail mounting plate through a fixing block. The length direction of the front lead screw is parallel to the length direction of the loading rail mounting plate. A front transverse rail parallel to it is provided above the front lead screw. A front rail slider is slidably clamped on the front transverse rail. A manipulator mounting plate is provided on the front side surface of the front rail slider. A sliding sleeve threaded with the front lead screw is sleeved on the front lead screw. A connecting block is fixedly sleeved outside the sliding sleeve. The connecting block is fixedly connected to the bottom of the manipulator mounting plate. A motor mounting plate is provided at the right end of the loading rail mounting plate. A loading motor is provided on the other surface of the motor mounting plate. The output shaft of the loading motor penetrates the loading motor mounting plate and is connected to one end of the front lead screw. A lead screw front protection plate is provided on the front side of the loading rail mounting plate. A manipulator left cover plate is provided at the left end of the lead screw front protection plate. The manipulator left cover plate, the loading rail mounting plate, the lead screw front protection plate, and the loading motor mounting plate enclose a front space bin. An opening corresponding to the front transverse rail is provided on the surface of the lead screw front protection plate. The front end of the manipulator mounting plate extends to the front of the lead screw front protection plate through the opening and is connected to a suction mounting plate. A suction module is provided on the suction mounting plate.

[0006] The rear surface of the feeding guide rail mounting plate is provided with a rear lead screw, a rear transverse guide rail and a rear guide rail slider. A pulling motor is arranged on the motor mounting plate. A lead screw rear protection plate is arranged at the rear of the feeding guide rail mounting plate. The lead screw rear protection plate, the feeding motor mounting plate and the feeding guide rail mounting plate enclose a rear space bin. The bottom of the rear space bin is designed with an open mouth. The rear guide rail slider is fixedly connected with a pulling side plate. The bottom of the pulling side plate extends downward to the outside of the rear space bin and is connected with a robotic arm base. The right side of the robotic arm base is connected with a robotic arm lower protection plate. A robotic arm cover is sleeved above the robotic arm lower protection plate. A pulling module is arranged at the top of the robotic arm base. The pulling module and the suction module are located in the same vertical plane. A pulling cylinder is connected to the robotic arm base through a suction cylinder mounting plate. The output end of the pulling cylinder is vertically downward and is connected with a suction cup assembly.

[0007] As a preferred embodiment of the present invention: The suction module includes a suction cylinder. The suction cylinder includes an upper cylinder and a lower cylinder. The output end of the upper cylinder is connected with the output end of the lower cylinder through a cylinder connecting plate. The upper cylinder is fixedly connected with the front side surface of the suction mounting plate. A vertical guide rail is arranged on the left side of the front side surface of the suction mounting plate. A vertical guide rail slider is slidably clamped on the vertical guide rail. The front side surface of the lower cylinder is fixedly provided with a lower cylinder mounting plate. The lower cylinder mounting plate is in an "L" shape. The inner side of the upper part of the lower cylinder mounting plate is fixedly connected with the vertical guide rail slider. A bracket connecting device is arranged at the bottom of the lower cylinder mounting plate. A workpiece protection plate is sleeved on the outer side surface of the bracket connecting device. A suction cup assembly is arranged at the bottom of the bracket connecting device.

[0008] As a further preferred embodiment of the present invention: The pulling module includes a stepping motor mounted on the top surface of the robotic arm lower protection plate. The output shaft of the stepping motor is connected with a main pulley. One end of the top of the robotic arm base is provided with a secondary pulley through a pulley mounting plate. The secondary pulley and the main pulley are connected by a synchronous belt in transmission. A plurality of convex strips are evenly arranged on the inner side surface of the synchronous belt. The moving direction of the synchronous belt is parallel to the length direction of the front lead screw. A pulling guide rail parallel to it is arranged in front of the synchronous belt. A pulling guide rail slider is slidably clamped on the pulling guide rail. A jaw mounting plate is arranged at the top of the pulling guide rail slider. A jaw is arranged on the jaw mounting plate. The jaw includes an upper jaw plate and a lower jaw plate. A synchronous belt pressing plate is arranged on one side surface of the jaw mounting plate. The synchronous belt penetrates through the synchronous belt pressing plate. A plurality of grooves engaged with the convex strips are arranged in the synchronous belt pressing plate. The left end of the jaw mounting plate is provided with an upper jaw plate. A clamping cylinder is arranged at the bottom of the upper jaw plate. The output end of the clamping cylinder is vertically upward and is connected with the lower jaw plate. The clamping cylinder is not in contact with the top surface of the robotic arm base. Robotic arm support plates are symmetrically arranged on the front and rear sides of the top surface of the robotic arm base. Guide plates are arranged on the tops of the robotic arm support plates.

[0009] As a further preferred solution of the present invention: The suction cup assembly includes a nozzle support, the nozzle support is in an "X" shape, four support plates of the nozzle support are all connected with adjusting rods through adjusting rod lock nuts, a nozzle is arranged at the bottom of the adjusting rod, a nozzle joint is arranged on the side surface of the adjusting rod, a nozzle lock nut is arranged at the bottom of the support plate, and the nozzle lock nut is sleeved outside the adjusting rod; the material of the nozzle is liquid silicone.

[0010] As a further preferred solution of the present invention: The bottom surface of the robotic arm pallet is movably connected with the top surface of the robotic arm base through a steel ball slide rail structure. Multiple groups of mounting holes with different spacings are arranged at the top of the robotic arm pallet. The guide plate is fixedly connected with the robotic arm pallet through the mounting holes. Different groups of mounting holes correspond to fixing steel rings of different sizes. Two clamping cylinders are arranged at the top of the robotic arm base. The two clamping cylinders are distributed below the corresponding robotic arm pallet. The output ends of the two clamping cylinders are away from each other and connected with a cylinder push plate. The top of the cylinder push plate is fixedly connected with the bottom of the corresponding robotic arm pallet, and the bottom of the cylinder push plate does not contact the top of the robotic arm base.

[0011] As a further preferred solution of the present invention: The top of the front guard plate of the lead screw is connected with a first drag chain through a first drag chain fixing plate, and the other end of the first drag chain is connected with a drag chain moving plate. The drag chain moving plate is fixedly connected with the left end of the top of the material suction mounting plate; The bottom of the front side surface of the front guard plate of the lead screw is connected with a second drag chain through a second drag chain fixing plate. The second drag chain is located below the front guard plate of the lead screw, and the other end of the second drag chain is fixedly connected with the upper part of the front side surface of the material pulling side plate.

[0012] As a further preferred solution of the present invention: A feeding module support is fixedly installed at the right end of the back of the feeding guide rail mounting plate, and a support connecting plate is arranged at the top of the feeding module support.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] 1. The present invention realizes the common movement of workpiece loading and unloading through the loading motor and the pulling motor. By adjusting the relative position between the two, the repeatability of the loading position during the wafer cutting process is ensured, the stability of the cutting quality is guaranteed, the degree of automation is high, and the influence of the situation that the operator has low proficiency and weak professional ability on the processing is avoided. The problems of long material preparation time, low position repeatability, and poor wafer cutting accuracy during the cutting process of the dicing saw are solved.

[0015] 2. The overall volume of this device is small, the floor area is small, the cost is low, and through the setting of the feeding module support and the support connecting plate, the external hanging of the material suction module and the material pulling module can be realized on the basis of the original model. The installation is simple and convenient, the use is convenient, and the limitation of the use site is small, which is worthy of popularization.

[0016] 3. In this device, the material suction cylinder adopts the design of a double-cylinder structure with an upper cylinder and a lower cylinder, which increases the stroke of the material suction module, enables more movements, and can complete more tasks. Brief Description of the Drawings

[0017] Figure 1 It is a three-dimensional structure diagram of the present invention without the front protective plate of the lead screw.

[0018] Figure 2 It is a three-dimensional structure diagram of the whole of the present invention from another perspective.

[0019] Figure 3 It is a rear view of the whole of the present invention.

[0020] Figure 4 It is a schematic diagram of the partial structure of the present invention.

[0021] Figure 5 It is a schematic diagram of another partial structure of the present invention.

[0022] Figure 6 It is a schematic diagram of the structure of the suction cup assembly in the present invention.

[0023] Wherein: 1 - feeding motor, 2 - pulling motor, 3 - motor mounting plate, 4 - feeding module bracket, 5 - bracket connecting plate, 6 - feeding guide rail mounting plate, 7 - front guide rail slider, 8 - rear protective plate of the lead screw, 9 - front horizontal guide rail, 10 - left cover plate of the manipulator, 11 - front lead screw, 12 - upper cylinder, 13 - material suction cylinder mounting plate, 14 - material suction mounting plate, 15 - lower cylinder mounting plate, 16 - lower cylinder, 17 - manipulator mounting plate, 18 - vertical guide rail, 19 - vertical guide rail slider, 20 - rear protective plate of the lead screw, 21 - cylinder connecting plate, 22 - front protective plate of the lead screw, 23 - suction nozzle bracket, 24 - steel ring, 25 - bracket connecting device, 26 - manipulator cover, 27 - workpiece protective plate, 28 - lower protective plate of the manipulator, 29 - base of the robotic arm, 30 - pulling side plate, 31 - stepping motor, 32 - synchronous belt pressing plate, 33 - guide plate, 34 - jaw mounting plate, 35 - synchronous belt, 36 - pulling guide rail, 37 - robotic arm support plate, 38 - upper jaw plate, 39 - lower jaw plate, 40 - cylinder push plate, 41 - pulling cylinder, 42 - adjusting rod locking nut, 43 - air nozzle joint, 44 - adjusting rod, 45 - suction nozzle locking nut, 46 - suction nozzle. Detailed Description of the Invention

[0024] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0025] Please refer to Figure 1-6 , in the embodiment of the present invention, a manipulator device applied to a full-automatic wafer dicing machine includes a loading guide rail mounting plate 6. A front lead screw 11 is rotatably provided on the front side surface of the loading guide rail mounting plate 6 through a fixing block. The length direction of the front lead screw 11 is parallel to the length direction of the loading guide rail mounting plate 6. A front transverse guide rail 9 parallel to it is provided above the front lead screw 11. A front guide rail slider 7 is slidably clamped on the front transverse guide rail 9. A manipulator mounting plate 17 is provided on the front side surface of the front guide rail slider 7. A sliding sleeve threadedly connected to the front lead screw 11 is sleeved on the front lead screw 11. A connecting block is fixedly sleeved outside the sliding sleeve. The connecting block is fixedly connected to the bottom of the manipulator mounting plate 17. A motor mounting plate 3 is provided at the right end of the loading guide rail mounting plate 6. A loading motor 1 is provided on the other side surface of the motor mounting plate 3. The output shaft of the loading motor 1 penetrates through the loading motor mounting plate 3 and is connected to one end of the front lead screw 11. A lead screw front protection plate 22 is provided on the front side of the loading guide rail mounting plate 6. A manipulator left cover plate 10 is provided at the left end of the lead screw front protection plate 22. The manipulator left cover plate 10, the loading guide rail mounting plate 6, the lead screw front protection plate 22, and the loading motor mounting plate 3 enclose a front space bin. An opening corresponding to the front transverse guide rail 9 is provided on the surface of the lead screw front protection plate 22. The front end of the manipulator mounting plate 17 extends to the front of the lead screw front protection plate 22 through the opening and is connected to a suction mounting plate 14. A suction module is provided on the suction mounting plate 14.

[0026] The rear surface of the loading guide rail mounting plate 6 is provided with a rear lead screw, a rear lateral guide rail and a rear guide rail slider. The connection method of this part is similar to that of the front surface of the loading guide rail mounting plate 6 and will not be elaborated in detail. The motor mounting plate 3 is provided with a pulling motor 2 for driving the rotation of the rear lead screw. The rear side of the loading guide rail mounting plate 6 is provided with a rear lead screw protection plate 8. The rear lead screw protection plate 8, the loading motor mounting plate 3 and the loading guide rail mounting plate 6 enclose a rear space bin. The bottom of the rear space bin is designed with an open mouth. The rear guide rail slider is fixedly connected to a pulling side plate 30. The bottom of the pulling side plate 30 extends downward to the outside of the rear space bin and is connected to a robotic arm base 29. The right side of the robotic arm base 29 is connected to a lower robotic arm protection plate 28. An upper robotic arm cover 26 is sleeved above the lower robotic arm protection plate 28. The top of the robotic arm base 29 is provided with a pulling module. The pulling module and the material suction module are located in the same vertical plane. A pulling cylinder 41 is connected to the robotic arm base 29 through a material suction cylinder mounting plate 13. The output end of the pulling cylinder 41 is vertically downward and is connected to a suction cup assembly.

[0027] The top of the front lead screw protection plate 22 is connected to a first drag chain through a first drag chain fixing plate. The other end of the first drag chain is connected to a drag chain moving plate. The drag chain moving plate is fixedly connected to the left end of the top of the material suction mounting plate 14. The bottom of the front side of the front lead screw protection plate 22 is connected to a second drag chain through a second drag chain fixing plate. The second drag chain is located below the front lead screw protection plate 22. The other end of the second drag chain is fixedly connected to the upper part of the front side of the pulling side plate 30.

[0028] Specifically, when the loading motor 1 is started, it drives the front lead screw 11 to rotate. Through the cooperation of the sliding sleeve, the connecting block, the robotic arm mounting plate 17, the front lateral guide rail 9 and the front guide rail slider 7, it drives the material suction mounting plate 14 to move back and forth left and right, that is, drives the material suction module to move back and forth left and right. Similarly, when the pulling motor 2 is started, it can drive the pulling side plate 30 to move back and forth left and right, that is, drives the robotic arm base 29 together with the pulling module on its top to move back and forth left and right.

[0029] The material suction module includes a material suction cylinder. The material suction cylinder includes an upper cylinder 12 and a lower cylinder 16. The output end of the upper cylinder 12 and the output end of the lower cylinder 16 are connected through a cylinder connecting plate 21. The upper cylinder 12 is fixedly connected to the front side of the material suction mounting plate 14. A vertical guide rail 18 is provided on the left side of the front side of the material suction mounting plate 14. A vertical guide rail slider 19 is slidably clamped on the vertical guide rail 18. The front side surface of the lower cylinder 16 is fixedly installed with a lower cylinder mounting plate 15. The lower cylinder mounting plate 15 is in an "L" shape. The inner side of the upper part of the lower cylinder mounting plate 15 is fixedly connected to the vertical guide rail slider 19. A bracket connecting device 25 is provided at the bottom of the lower cylinder mounting plate 15. A workpiece protection plate 27 is sleeved on the outer side surface of the bracket connecting device 25. A suction cup assembly is provided at the bottom of the bracket connecting device 25.

[0030] Specifically, when the material suction module works: the material suction cylinder works, and with the connection and cooperation of the vertical guide rail 18, the vertical guide rail slider 19 and the lower cylinder mounting plate 15, the suction cup assembly at the bottom of the bracket connection device 25 moves vertically to pick and place workpieces.

[0031] The suction cup assembly includes a suction nozzle bracket 23. The suction nozzle bracket 23 is in an "X" shape. Four support plates of the suction nozzle bracket 23 are each connected with an adjusting rod 44 through an adjusting rod lock nut 42. A suction nozzle 46 is provided at the bottom of the adjusting rod 44. A nozzle joint 43 is provided on the side of the adjusting rod 44. A suction nozzle lock nut 45 is provided at the bottom of the support plate. The suction nozzle lock nut 45 is sleeved outside the adjusting rod 44. The suction cup assembly adopts the method of vacuum adsorption. The suction nozzle 46 in contact with the wafer is made of a material with good resilience, good wear resistance, good aging resistance, and a certain strength, such as liquid silicone. When air is introduced, under the action of air pressure, the adjusting rod 44 can drive the suction nozzle 46 to move up and down relative to the suction nozzle bracket 23 for fine adjustment, ensuring that the four suction nozzles 46 are in smooth contact with the wafer and preventing the wafer from being damaged due to excessive air introduction force. The suction cup assembly is a flexible clamping manipulator.

[0032] The material pulling module includes a stepping motor 31 installed on the top surface of the lower guard plate 28 of the robot arm. The output shaft of the stepping motor 31 is connected with a main pulley. One end of the top of the robot arm base 29 is provided with a secondary pulley through a pulley mounting plate. The secondary pulley and the main pulley are connected by a synchronous belt 35 in transmission. A plurality of convex strips are evenly arranged on the inner surface of the synchronous belt 35. The moving direction of the synchronous belt 35 is parallel to the length direction of the front lead screw 11. In front of the synchronous belt 35, there is a material pulling guide rail 36 parallel to it. A material pulling guide rail slider is slidably clamped on the material pulling guide rail 36. A jaw mounting plate 34 is provided on the top of the material pulling guide rail slider. A jaw is provided on the jaw mounting plate 34. The jaw includes a jaw upper plate 38 and a jaw lower plate 39. A synchronous belt pressing plate 32 is provided on one side surface of the jaw mounting plate 34. The synchronous belt 35 passes through the synchronous belt pressing plate 32. A plurality of grooves engaging with the convex strips are provided in the synchronous belt pressing plate 32. The left end of the jaw mounting plate 34 is provided with the jaw upper plate 38. A material clamping cylinder is provided at the bottom of the jaw upper plate 38. The output end of the material clamping cylinder is vertically upward and connected with the jaw lower plate 39. The material clamping cylinder is not in contact with the top surface of the robot arm base 29. Robot arm support plates 37 are symmetrically provided on the front and rear sides of the top surface of the robot arm base 29. A guide plate 33 is provided on the top of the robot arm support plate 37.

[0033] Specifically, when the material pulling module is working: start the stepping motor 31, the stepping motor 31 drives the main pulley to rotate, and drives the secondary pulley to rotate through the synchronous belt 35. Since the synchronous belt 35 passes through the synchronous belt pressing plate 32, and there are multiple grooves in the synchronous belt pressing plate 32 that engage with the convex strips, when the synchronous belt 35 moves, the jaw mounting plate 34 can be driven to move through the synchronous belt pressing plate 32, and then drive the jaws to move. Therefore, the jaws can be controlled to move to the workpiece, and the workpiece can be clamped and pulled to the robotic arm support plate 37 and then released. Specifically, the clamping and releasing are realized by the clamping cylinder controlling the up and down movement of the jaw lower plate 39.

[0034] The bottom surface of the robotic arm support plate 37 is movably connected to the top surface of the robotic arm base 29 through a steel ball slide rail structure. There are multiple groups of mounting holes with different spacings on the top of the robotic arm support plate 37. The guide plate 33 is fixedly connected to the robotic arm support plate 37 through the mounting holes. Different groups of mounting holes correspond to fixing steel rings 24 of different sizes, improving the applicability of the device. There are two clamping cylinders on the top of the robotic arm base 29. The two clamping cylinders are distributed below the corresponding robotic arm support plates 37. The output ends of the two clamping cylinders are away from each other and are connected with a cylinder push plate 40. The top of the cylinder push plate 40 is fixedly connected to the bottom of the corresponding robotic arm support plate 37. The bottom of the cylinder push plate 40 does not contact the top of the robotic arm base 29.

[0035] Specifically, during use, according to the size of the workpiece, that is, the size of the steel ring 24, select a suitable mounting hole, install the guide plate 33. When the workpiece moves to the specified position, start the two clamping cylinders. The two clamping cylinders drive the cylinder push plate 40 to move, making the two cylinder push plates 40 approach each other, so that the two robotic arm support plates 37 can approach each other, and then drive the two guide plates 33 to approach each other to clamp the workpiece and ensure the centering of the workpiece.

[0036] Workflow: Start the material pulling motor 2. Drive the material pulling module to move leftward to the stock preparation module through the material pulling side plate 30 and the robotic arm base 29. (The stock preparation module is an area for storing workpieces, which is common knowledge in the art and belongs to the prior art.) Then, through the operation of the material pulling module, make the gripper clamp the workpiece, and drive the gripper to move through the synchronous belt 35, so that the workpiece moves to the designated position, release the gripper, and the gripper returns to the initial position. At this time, start the two clamping cylinders, and the two clamping cylinders drive the cylinder push plate 40 to move, so that the two cylinder push plates 40 approach each other, which can make the two robotic arm support plates 37 approach each other, and then drive the two guide plates 33 to approach each other to clamp the workpiece and ensure the centering of the workpiece. Next, start the loading motor 1, drive the material suction module to move to the position of the workpiece, and through the operation of the material suction module, adjust the position of the suction cup assembly with the upper cylinder 12 until the suction cup assembly sucks the workpiece. Subsequently, control the overall material pulling module to move back to the initial position to the right. The material suction module then transports the workpiece to the processing area, and uses the lower cylinder 16 to put down the workpiece and wait for the processing to end. The workpiece is sucked by the suction cup assembly at the bottom of the material pulling module and moves to the cleaning area, and the workpiece is put down for cleaning. Finally, the material suction module sucks the workpiece up again, blows off the excess moisture through the air curtain tube, and then places it on the material pulling module. The gripper is enabled again to push the workpiece back to the stock preparation module.

[0037] A loading module support 4 is fixedly installed at the right end of the back of the loading guide rail mounting plate 6, and a support connecting plate 5 is provided at the top of the loading module support 4; the overall volume of this device is small, the floor area is small, the cost is low, and through the settings of the loading module support 4 and the support connecting plate 5, the external hanging of the material suction module and the material pulling module can be realized on the basis of the original model, the installation is simple and convenient, the use is convenient, and the limitation of the use site is small, which is worthy of popularization.

[0038] The material suction cylinder adopts the design of a double cylinder with an upper cylinder 12 and a lower cylinder 16, which increases the stroke of the material suction module, can achieve more movements, and can complete more tasks.

[0039] This device realizes the common movement of workpiece loading and unloading through the loading motor 1 and the material pulling motor 2. By adjusting the relative positions between the two, the repeatability of the loading position during the wafer cutting process is ensured, the stability of the cutting quality is guaranteed, the degree of automation is high, and the influence of situations such as low proficiency and weak professional ability of operators on the processing is avoided. It solves the problems of long stock preparation time, low position repeatability, and poor wafer cutting accuracy during the cutting process of the dicing machine.

[0040] It should be understood that although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A manipulator device applied to a full-automatic wafer dicing machine, comprising a loading guide rail mounting plate (6); characterized in that: The front surface of the loading guide rail mounting plate (6) is rotatably provided with a front lead screw (11) through a fixing block. Above the front lead screw (11), there is a front transverse guide rail (9) parallel to it. A front guide rail slider (7) is slidably clamped on the front transverse guide rail (9). The front side surface of the front guide rail slider (7) is provided with a manipulator mounting plate (17). A sliding sleeve threadedly connected to the front lead screw (11) is sleeved on the front lead screw (11). An outer fixing sleeve of the sliding sleeve is provided with a connecting block, and the connecting block is fixedly connected to the bottom of the manipulator mounting plate (17). The right end of the loading guide rail mounting plate (6) is provided with a motor mounting plate (3). The other side surface of the motor mounting plate (3) is provided with a loading motor (1). The output shaft of the loading motor (1) penetrates through the loading motor mounting plate (3) and is connected to one end of the front lead screw (11). A front protective plate (22) for the lead screw is provided on the front side of the loading guide rail mounting plate (6). The left end of the front protective plate (22) for the lead screw is provided with a left cover plate (10) for the manipulator. The left cover plate (10) for the manipulator, the loading guide rail mounting plate (6), the front protective plate (22) for the lead screw, and the loading motor mounting plate (3) enclose a front space bin. An opening corresponding to the front transverse guide rail (9) is formed on the surface of the front protective plate (22) for the lead screw. The front end of the manipulator mounting plate (17) extends to the front of the front protective plate (22) for the lead screw through the opening and is connected to a suction material mounting plate (14). A suction material module is provided on the suction material mounting plate (14). The rear surface of the loading guide rail mounting plate (6) is provided with a rear lead screw, a rear transverse guide rail, and a rear guide rail slider. A pulling motor (2) is provided on the motor mounting plate (3). A rear protective plate (8) for the lead screw is provided on the rear side of the loading guide rail mounting plate (6). The rear protective plate (8) for the lead screw, the loading motor mounting plate (3), and the loading guide rail mounting plate (6) enclose a rear space bin. The bottom of the rear space bin is designed with an open mouth. The rear guide rail slider is fixedly connected to a pulling side plate (30). The bottom of the pulling side plate (30) extends downward outside the rear space bin and is connected to a manipulator base (29). The right side of the manipulator base (29) is connected to a lower protective plate (28) for the manipulator. An upper manipulator cover (26) is sleeved above the lower protective plate (28) for the manipulator. A pulling module is provided on the top of the manipulator base (29). A pulling cylinder (41) is connected to the manipulator base (29) through a suction cylinder mounting plate (13). The output end of the pulling cylinder (41) is vertically downward and is connected to a suction cup assembly.

2. The manipulator device applied to a full-automatic wafer dicing machine according to claim 1, characterized in that: The material suction module includes a material suction cylinder, which includes an upper cylinder (12) and a lower cylinder (16). The output end of the upper cylinder (12) is connected to the output end of the lower cylinder (16) through a cylinder connecting plate (21). The upper cylinder (12) is fixedly connected to the front side of the material suction mounting plate (14). A vertical guide rail (18) is provided on the left side of the front side of the material suction mounting plate (14). A vertical guide rail slider (19) is slidably clamped on the vertical guide rail (18). A lower cylinder mounting plate (15) is fixedly installed on the front side surface of the lower cylinder (16). The lower cylinder mounting plate (15) is in an "L" shape. The inner side of the upper part of the lower cylinder mounting plate (15) is fixedly connected to the vertical guide rail slider (19). A bracket connecting device (25) is provided at the bottom of the lower cylinder mounting plate (15). A workpiece protection plate (27) is sleeved on the outer side surface of the bracket connecting device (25). A suction cup assembly is provided at the bottom of the bracket connecting device (25).

3. The manipulator device applied to a full-automatic wafer dicing machine according to claim 2, characterized in that: The material pulling module includes a stepping motor (31) installed on the top surface of the lower protection plate (28) of the robot arm. The output shaft of the stepping motor (31) is connected with a main pulley. One end of the top of the robot arm base (29) is provided with a secondary pulley through a pulley mounting plate. The secondary pulley and the main pulley are drivingly connected through a synchronous belt (35). A plurality of ridges are uniformly provided on the inner side surface of the synchronous belt (35). The moving direction of the synchronous belt (35) is parallel to the length direction of the front lead screw (11). A material pulling guide rail (36) parallel to it is provided in front of the synchronous belt (35). A material pulling guide rail slider is slidably clamped on the material pulling guide rail (36). A jaw mounting plate (34) is provided at the top of the material pulling guide rail slider. A jaw is provided on the jaw mounting plate (34). The jaw includes an upper jaw plate (38) and a lower jaw plate (39). A synchronous belt pressing plate (32) is provided on one side surface of the jaw mounting plate (34). The synchronous belt (35) passes through the synchronous belt pressing plate (32). A plurality of grooves engaged with the ridges are provided in the synchronous belt pressing plate (32). The left end of the jaw mounting plate (34) is provided with an upper jaw plate (38). A material clamping cylinder is provided at the bottom of the upper jaw plate (38). The output end of the material clamping cylinder is vertically upward and connected to the lower jaw plate (39). Robot arm support plates (37) are symmetrically provided on the front and rear sides of the top surface of the robot arm base (29). A guide plate (33) is provided at the top of the robot arm support plate (37).

4. The manipulator device applied to a full-automatic wafer dicing machine according to claim 3, wherein: The suction cup assembly includes a suction nozzle support (23). The suction nozzle support (23) is in an "X" shape. Each of the four support plates of the suction nozzle support (23) is connected with an adjusting rod (44) through an adjusting rod locking nut (42). A suction nozzle (46) is provided at the bottom of the adjusting rod (44). An air nozzle joint (43) is provided on the side surface of the adjusting rod (44). A suction nozzle locking nut (45) is provided at the bottom of the support plate. The suction nozzle locking nut (45) is sleeved on the outside of the adjusting rod (44). The material of the suction nozzle (46) is liquid silicone.

5. The manipulator device applied to a full-automatic wafer dicing machine according to claim 4, wherein: The bottom surface of the robotic arm pallet (37) is movably connected to the top surface of the robotic arm base (29) through a steel ball slide rail structure. Multiple groups of mounting holes with different spacings are provided at the top of the robotic arm pallet (37). The guide plate (33) is fixedly connected to the robotic arm pallet (37) through the mounting holes. Two clamping cylinders are provided at the top of the robotic arm base (29). The two clamping cylinders are distributed below the corresponding robotic arm pallet (37). The output ends of the two clamping cylinders are away from each other and are connected to a cylinder push plate (40). The top of the cylinder push plate (40) is fixedly connected to the bottom of the corresponding robotic arm pallet (37).

6. The manipulator device applied to a full-automatic wafer dicing machine according to claim 1, wherein: The top of the front protection plate of the lead screw (22) is connected to a first drag chain through a first drag chain fixing plate. The other end of the first drag chain is connected to a drag chain moving plate. The drag chain moving plate is fixedly connected to the left end of the top of the suction material mounting plate (14). The bottom of the front side of the front protection plate of the lead screw (22) is connected to a second drag chain through a second drag chain fixing plate. The second drag chain is located below the front protection plate of the lead screw (22). The other end of the second drag chain is fixedly connected to the upper part of the front side of the material pulling side plate (30).

7. The manipulator device applied to a full-automatic wafer dicing machine according to claim 6, characterized in that: A feeding module bracket (4) is fixedly installed at the right end of the back of the feeding guide rail mounting plate (6). A bracket connecting plate (5) is provided at the top of the feeding module bracket (4).

8. The manipulator device applied to a full-automatic wafer dicing machine according to claim 7, wherein: The length direction of the front lead screw (11) is parallel to the length direction of the feeding guide rail mounting plate (6). The material pulling module and the suction material module are located in the same vertical plane.

9. The manipulator device applied to a full-automatic wafer dicing machine according to claim 3, wherein: The clamping cylinder does not contact the top surface of the robotic arm base (29), and the bottom of the cylinder push plate (40) does not contact the top surface of the robotic arm base (29).

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