Chemical bottle cleaning device and process

Abstract

The invention discloses a chemical bottle cleaning device and a chemical bottle cleaning process. The chemical bottle cleaning process comprises the following steps: (1) placing chemical bottles: placing at least two chemical bottles to be cleaned on cleaning positions corresponding to a cleaning mechanism; (2) adding liquid: feeding the prepared cleaning liquid into a chemical bottle to be cleaned, and cleaning the chemical bottle by using a cleaning mechanism; (3) pipetting: after one chemical bottle is cleaned for one time, pumping out the cleaning liquid in the chemical bottle, and feeding the chemical bottle into the next chemical bottle to be cleaned for cleaning; (4) discharging liquid: after the cleaning liquid enters the last to-be-cleaned chemical bottle and cleaning is completed; or after the time when the cleaning liquid in the chemical bottle is in the corresponding chemical bottle is up and the pipetting operation does not need to be carried out, the cleaning liquid in the chemical bottle is extracted and discharged. The cleaning efficiency is improved, and the cleaning cost is reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and particularly to a chemical bottle cleaning device and process. Background Art

[0002] A wafer surface extraction detection device is mainly used to detect the metal contamination on the surface of a semiconductor wafer. The detection accuracy reaches 1 ppt (one trillionth), so the extraction detection device is extremely sensitive to pollutants. To ensure the detection accuracy of the extraction detection device, it is necessary to ensure the cleanliness of the environment during wafer transfer, the cleanliness of the detection chamber, and the cleanliness of various chemical solutions used in the detection. To ensure the cleanliness of the chemical solutions, it is necessary to ensure the cleanliness of the chemical solution bottles and the chemical solution transfer pipelines. The chemical solution bottles and pipelines are mostly made of materials such as PFA / PTFE, and often need to be cleaned for a long time before they can reach the cleanliness level that the equipment can use.

[0003] In the prior art, when cleaning a chemical solution bottle, the cleaning process is often directly run on the corresponding equipment for a long time to achieve the cleaning purpose. The advantage of this cleaning method is that after cleaning, the equipment can directly use the chemical solution bottle after cleaning, but it will waste the cleaning chemical solution and the cleaning time is long. Summary of the Invention

[0004] The purpose of the present invention is to provide a chemical bottle cleaning device and process. By using this process, the amount of cleaning liquid used can be effectively reduced, the use of chemical agents can be reduced, the cost can be reduced, and the cleaning efficiency can also be improved.

[0005] To achieve the above object, the technical solution adopted by the present invention is: a chemical bottle cleaning process, and its steps are as follows:

[0006] ① Placement of chemical bottles: Place at least two chemical bottles to be cleaned on the corresponding cleaning positions of the cleaning mechanism;

[0007] ② Liquid addition: Send the prepared cleaning liquid into one of the chemical bottles to be cleaned, and use the cleaning mechanism to clean this chemical bottle;

[0008] ③ Liquid transfer: After one chemical bottle is cleaned once, pump out the cleaning liquid in this chemical bottle and send it into the next chemical bottle to be cleaned for cleaning;

[0009] ④ Liquid drainage: When the cleaning liquid enters the last chemical bottle to be cleaned and the cleaning is completed; or when the cleaning liquid in the chemical bottle reaches the corresponding time in the chemical bottle and no liquid transfer operation is required, pump out and drain the cleaning liquid inside;

[0010] The steps ② to ④ are cycled at least once.

[0011] In the above technical solution, when cleaning the chemical bottle, the cleaning mechanism drives the corresponding chemical bottle to shake, tilt, and heat, so that the cleaning liquid inside it can clean the inside of the chemical bottle.

[0012] In the above technical solution, when cleaning the chemical bottle, the following steps are carried out:

[0013] a. The cleaning mechanism sets the query and scanning order of the chemical bottle according to the position of the chemical bottle and the number of cleaning times required for the chemical bottle; then the following steps are carried out:

[0014] b. Then query and scan whether each chemical bottle needs to be refilled. If it needs to be refilled, the refilling step is carried out;

[0015] c. Query and scan whether each chemical bottle needs to transfer liquid. If it needs to transfer liquid, the liquid transfer step is carried out;

[0016] d. Query and scan whether each chemical bottle needs to drain liquid. If it needs to drain liquid, the liquid draining step is carried out;

[0017] e. According to the above steps, determine whether to end the cyclic cleaning process. If cyclic cleaning is still required, return to step a to start over. If the cleaning is completed, the cleaning of the chemical bottle is finished.

[0018] In the above technical solution, the refilling step for each chemical bottle is set to manual or automatic. In the manual state, the refilling step is manual operation for refilling; in the automatic state, in step ② above, the following steps are included:

[0019] A1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step. If it is the manual mode, no automatic refilling is carried out;

[0020] A2. Determine whether the chemical bottle is an empty bottle. If it is an empty bottle, proceed to one step. If it is not an empty bottle, no automatic refilling is carried out;

[0021] A3. Determine whether the empty bottle state of the chemical bottle has reached the maximum idle time. If it has reached, proceed to the next step. If it has not reached the maximum idle time, temporarily no automatic refilling is carried out;

[0022] A4. Determine whether a separate cleaning liquid needs to be configured. If no separate cleaning liquid needs to be configured, proceed to the next step. If a cleaning liquid needs to be configured, first configure the cleaning liquid;

[0023] A5. Add the newly configured cleaning liquid or the cleaning liquid transferred from other chemical bottles into the chemical bottle to complete the refilling step.

[0024] In the above technical solution, the pipetting step for each chemical bottle is set to manual or automatic. In the manual state, the pipetting step is manual pipetting; in the automatic state, in step ③, the following steps are included:

[0025] D 1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step. If it is the manual mode, do not perform the automatic pipetting action.

[0026] D2. Determine whether the chemical bottle is in the state of completed cleaning. If the cleaning is completed, proceed to the next step. If the cleaning is not yet completed, do not perform the automatic pipetting action.

[0027] D3. Determine whether there is a chemical bottle in the empty bottle state. If there is a chemical bottle in the empty bottle state, transfer the cleaning solution in the chemically cleaned bottle to the chemical bottle in the empty bottle state. If there is no chemical bottle in the empty bottle state, do not perform the pipetting action.

[0028] In the above technical solution, the liquid discharge step for each chemical bottle is set to manual or automatic. In the manual state, the liquid discharge step is manual liquid discharge; in the automatic state, in step ④, the following steps are included:

[0029] C 1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step. If it is the manual mode, do not perform the automatic liquid discharge action.

[0030] C2. Determine whether the chemical bottle is cleaned. If it is cleaned, proceed to the next step. If it is not cleaned, do not perform the liquid discharge action.

[0031] C3. Determine whether the chemical bottle is the last one in the scanning sequence. If it is the last one, perform the liquid discharge action to discharge the cleaning solution. If it is not the last one, proceed to the next step.

[0032] C4. Determine whether the cleaning solution in the chemical bottle exceeds the longest soaking time. If it does not exceed, do not perform the liquid discharge action. If it exceeds the longest soaking time, perform the liquid discharge action to discharge the cleaning solution.

[0033] In the above technical solution, after the chemical liquid in the chemical bottle is pipetted or discharged, drying is performed first and then liquid addition or pipetting is carried out.

[0034] In the above technical solution, a drying step is further included. A protective gas is sent into the chemically cleaned bottle and it is dried to complete the cleaning and drying of the chemical bottle.

[0035] The present invention also provides a chemical bottle cleaning device, which includes a stock solution module, a liquid preparation module and a valve control module. The liquid preparation module is connected to the stock solution module and the valve control module. The liquid preparation module extracts the corresponding chemical liquid from the stock solution module to prepare the required cleaning liquid, and adds it into the chemical bottle through the valve control module.

[0036] In the above technical solution, the valve control module is connected to the chemical bottle and the liquid preparation module through pipelines, and the valve control module realizes the switching of liquid addition, liquid transfer, liquid drainage and drying.

[0037] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0038] 1. In the present invention, multiple chemical bottles are cleaned through the steps of liquid addition, liquid transfer, liquid drainage and drying. In this way, the same portion of cleaning liquid can be used to clean multiple chemical bottles, and the used and relatively clean cleaning liquid can be used to clean the dirtier chemical bottles, which can effectively save the cleaning liquid. At the same time, multiple chemical bottles can be cleaned simultaneously, effectively improving the cleaning efficiency and reducing the cleaning cost.

[0039] 2. In the present invention, the stock solution module, the liquid preparation module and the valve control module are used to control the operations of liquid addition, liquid transfer, liquid drainage, etc. for multiple cleaning bottles, with high cleaning efficiency and low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 is the flow chart of chemical bottle cleaning in Embodiment 1 of the present invention;

[0041] Figure 2 is the flow chart of controlling chemical bottle cleaning in Embodiment 1 of the present invention;

[0042] Figure 3 is the flow chart of the liquid addition step in Embodiment 1 of the present invention;

[0043] Figure 4 is the flow chart of the liquid transfer step in Embodiment 1 of the present invention;

[0044] Figure 5 is the flow chart of the liquid drainage step in Embodiment 1 of the present invention;

[0045] Figure 6 is the structural schematic diagram of chemical bottle cleaning in Embodiment 1 of the present invention.

[0046] Wherein: 1. Stock solution module; 2. Liquid preparation module; 3. Valve control module; 4. Chemical bottle; 5. Solution bottle; 6. Liquid preparation bottle; 7. Rotary valve. DETAILED DESCRIPTION OF THE INVENTION

[0047] The present invention will be further described below with reference to the drawings and embodiments:

[0048] Example 1: Refer to Figures 1 to 6 As shown, a chemical bottle cleaning process has the following steps:

[0049] ① Placement of chemical bottles: Place at least two chemical bottles to be cleaned on the corresponding cleaning positions of the cleaning mechanism;

[0050] ② Liquid addition: Send the prepared cleaning liquid into one of the chemical bottles to be cleaned, and use the cleaning mechanism to clean this chemical bottle; when cleaning the chemical bottle, the cleaning mechanism drives the corresponding chemical bottle to shake, tilt, and heat, so that the cleaning liquid inside can clean the inside of the chemical bottle. By shaking, tilting, and heating, the cleaning liquid inside can fully contact and clean the inside of the chemical bottle, thus ensuring the cleaning quality.

[0051] ③ Liquid transfer: After one cleaning of a chemical bottle is completed, pump out the cleaning liquid in this chemical bottle and send it into the next chemical bottle to be cleaned for cleaning;

[0052] ④ Liquid drainage: When the cleaning liquid enters the last chemical bottle to be cleaned and the cleaning is completed; or after the cleaning liquid in the chemical bottle has been in the corresponding chemical bottle for a certain time and no liquid transfer operation is required, pump out and drain the cleaning liquid inside;

[0053] The steps ② - ④ are cycled at least once;

[0054] Among them, there is also a drying step. Send a protective gas into the cleaned chemical bottle and dry it to complete the drying of the chemical bottle. Among them, drying can be carried out after each cleaning of the chemical bottle, or after the last cleaning of the chemical bottle, or intermittent drying (for example, a total of five cleanings are required, and it is dried once every 1 - 2 cleanings, but it needs to be dried after the last cleaning is completed), or it can be dried without passing through a protective gas and wait for it to dry automatically.

[0055] In the present invention, there is a host computer to control the cleaning of chemical bottles. Among them, when cleaning the chemical bottles, the following steps are carried out:

[0056] a. The cleaning mechanism sets the chemical bottle query and scanning order according to the position of the chemical bottle and the number of cleaning times required for the chemical bottle; then the following steps are carried out:

[0057] b. Then query and scan whether each chemical bottle needs liquid addition. If liquid addition is required, perform the liquid addition step;

[0058] c. Query and scan whether each chemical bottle needs liquid transfer. If liquid transfer is required, perform the liquid transfer step;

[0059] d. Query and scan each chemical bottle to check if drainage is required. If drainage is required, perform the drainage step;

[0060] e. According to the above steps, determine whether to end the cyclic cleaning process. If cyclic cleaning is still required, return to step a to start over. If the cleaning is completed, the cleaning of the chemical bottle is finished, as Figure 2 shown.

[0061] Among them, if a chemical bottle can be cleaned thoroughly in a single cleaning, it directly undergoes the steps of liquid addition for cleaning, drainage, and drying. Or, after adding liquid for cleaning, the cleaning liquid inside is transferred to other chemical bottles, and then the drying step is carried out. This way, the cleaning liquid can be used multiple times, reducing the waste of the cleaning liquid and lowering costs. At the same time, multiple chemical bottles can be cleaned simultaneously, with high efficiency.

[0062] Among them, the liquid addition step for each chemical bottle is set to manual or automatic mode. In manual mode, the liquid addition step is a manual operation for adding liquid; in automatic mode, in step ②, the following steps are included: Among them, in manual mode, manual liquid addition operation is carried out by manual operation of the equipment, and in automatic mode, automatic liquid addition operation is carried out by the equipment.

[0063] A1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step. If it is the manual mode, no automatic liquid addition is performed;

[0064] A2. Determine whether the chemical bottle is an empty bottle. If it is an empty bottle, proceed to a step. If it is not an empty bottle, no automatic liquid addition is performed;

[0065] A3. Determine whether the empty bottle state of the chemical bottle has reached the maximum idle time. If it has reached, proceed to the next step. If the maximum idle time has not been reached, temporarily do not perform automatic liquid addition; Among them, the empty chemical bottle needs to be idle for a period of time. For example, after the chemical bottle has been cleaned once and needs to be cleaned a second time or a third time, after each cleaning is completed, it needs to be idle for a period of time before adding liquid for cleaning again.

[0066] A4. Determine whether a separately configured cleaning liquid is required. If a separately configured cleaning liquid is not required, proceed to the next step. If a cleaning liquid needs to be configured, first perform the configuration of the cleaning liquid; Among them, different ratios of cleaning liquid can be used for each cleaning, or the same ratio of cleaning liquid can be used for cleaning. The corresponding data will be preset in the host computer. For example, during one cleaning, since the chemical bottle is relatively dirty, a cleaning liquid with a higher concentration can be used for cleaning to wash away most of the dirt. During the second cleaning, a cleaning liquid with a lower concentration or pure water can be used for rinsing to reduce the use of chemical liquid and lower costs.

[0067] A5. Add the newly configured cleaning solution or the cleaning solution transferred from other chemical bottles into the chemical bottle to complete the liquid addition step, as Figure 3 shown.

[0068] Among them, the pipetting step for each chemical bottle is set to manual or automatic state. In the manual state, the pipetting step is manual pipetting operation; in the automatic state, in step ③, the following steps are included: Among them, the manual state is for manual pipetting operation by manual operation of the equipment, and the automatic state is for automatic pipetting operation by the equipment.

[0069] D 1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step; if it is the manual mode, do not perform the automatic pipetting action.

[0070] D2. Determine whether the chemical bottle is in the cleaning completed state. If the cleaning is completed, proceed to the next step; if the cleaning is not yet completed, do not perform the automatic pipetting action.

[0071] D3. Determine whether there is a chemical bottle in the empty bottle state. If there is a chemical bottle in the empty bottle state, transfer the cleaning solution in the chemical bottle with the cleaning completed to the chemical bottle in the empty bottle state. If there is no chemical bottle in the empty bottle state, do not perform the pipetting action, as Figure 4 shown.

[0072] Among them, the pipetting operation is to transfer the cleaning solution in a chemical bottle filled with the cleaning solution to another empty chemical bottle. If the latter chemical bottle to be added with the cleaning solution is an empty bottle, the cleaning solution inside the chemical bottle that has been cleaned can be transferred to the empty chemical bottle. If there is no empty bottle, do not perform the pipetting action.

[0073] In the present invention, the liquid discharging step for each chemical bottle is set to manual or automatic state. In the manual state, the liquid discharging step is manual liquid discharging operation; in the automatic state, in step ④, the following steps are included: Among them, the manual state is for manual liquid discharging operation by manual operation of the equipment, and the automatic state is for automatic liquid discharging operation by the equipment.

[0074] C 1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step; if it is the manual mode, do not perform the automatic liquid discharging action.

[0075] C2. Determine whether the chemical bottle is cleaned. If it is cleaned, proceed to the next step; if it is not cleaned, do not perform the liquid discharging action.

[0076] C3. Determine whether the chemical bottle is the last one in the scanning sequence. If it is the last one, drain the cleaning liquid. If it is not the last one, proceed to the next step. If it is the last chemical bottle, that is, the cleaning liquid has passed through all the previous chemical bottles, the cleaning liquid is relatively dirty and is not suitable for re-cleaning the chemical bottles that have been cleaned in the previous process. Therefore, it needs to be drained and no longer used.

[0077] C4. Determine whether the cleaning liquid in the chemical bottle exceeds the longest soaking time. If not, do not drain the liquid. If it exceeds the longest soaking time, drain the liquid. Soaking is also a step in the chemical bottle cleaning process. Soak the inside of the chemical bottle with cleaning liquid for a period of time so that the dirt on the chemical bottle can fully contact with the cleaning liquid and be easily cleaned. Figure 5 shown.

[0078] Among them, after the chemical liquid in the chemical bottle is pipetted or drained, it can be dried first and then added or pipetted. Of course, after pipetting and draining, if cleaning liquid needs to be added for cleaning, it can be dried first to dry the residual cleaning liquid from the previous process as much as possible without affecting the subsequent cleaning. Of course, it is also possible not to dry.

[0079] See also Figure 6 As shown, the present invention also provides a chemical bottle cleaning device, including a stock liquid module 1, a liquid preparation module 2 and a valve control module 3, wherein the liquid preparation module is connected to the stock liquid module and the valve control module, and the liquid preparation module extracts the corresponding chemical liquid from the stock liquid module to be configured as the required cleaning liquid, and adds it to the chemical bottle 4 through the valve control module.

[0080] The valve control module is connected with the chemical bottle and the liquid preparation module via pipelines, and the valve control module realizes the switching of liquid addition, liquid transfer, liquid discharge and drying.

[0081] In this embodiment, the stock liquid module 1 includes a plurality of solution bottles 5 filled with corresponding chemical solutions, the liquid preparation module 2 has a plurality of liquid preparation bottles 6, and the valve control module 3 has a plurality of rotary valves 7. The rotary valves (having a plurality of passages, and the rotary valves are connected to only one passage at a time) are connected through pipelines and liquid preparation bottles, solution bottles, and chemical bottles to be cleaned. The chemical solution delivered from the chemical bottle is connected through the rotary valve to deliver the corresponding chemical solution into the corresponding liquid preparation bottle, and is configured as a cleaning liquid of a corresponding proportion. Among them, there will also be vacuum equipment and protective gas equipment (the protective gas equipment preferably adopts nitrogen providing equipment to provide nitrogen, and other equipment provides compressed po2, compressed air, vac, and discharges the waste liquid after cleaning, and the attached Figure 6The diagram in the middle shows the factory service (production workshop supporting), which is used to provide compressed air, nitrogen, VAC, waste liquid discharge collection, etc.) connection. By rotating the valve, the corresponding passage is connected to realize the work of adding liquid, transferring liquid, draining liquid and drying.

[0082] In the present invention, taking the simultaneous cleaning of 4 chemical bottles as an example, from front to back they are chemical bottle No. 1, chemical bottle No. 2, chemical bottle No. 3, and chemical bottle No. 4, and taking the automatic state as an example, the chemical solution in the stock solution module is first sent to the liquid preparation module through the valve control module for liquid preparation, and then the valve control module sends the cleaning liquid in the liquid preparation module to chemical bottle No. 1, and chemical bottle No. 1 is first cleaned. After the cleaning of chemical bottle No. 1 is completed, a pipetting operation is performed to extract and transfer the cleaning liquid in chemical bottle No. 1 to chemical bottle No. 2, and chemical bottle No. 2 is cleaned. Then the cleaning liquid in chemical bottle No. 2 is transferred to chemical bottle No. 3 again, and cleaning is continued. Finally, it is transferred to chemical bottle No. 4. After the cleaning of chemical bottle No. 4 is completed, the cleaning liquid that has been used 4 times is discharged. If a second cleaning is required, when the cleaning liquid is cleaning the No. 2 chemical bottle, another portion of unused cleaning liquid can be added to the No. 1 chemical bottle for simultaneous cleaning, and the cycle is repeated. According to the required cycle, the corresponding number of cycles are repeated until the cleaning is completed. In this way, the same cleaning liquid can be used for cleaning 4 times (if 7 chemical bottles are used, the same cleaning liquid can be used for cleaning 7 times. The more chemical bottles there are, the more times the same cleaning liquid can be used for cleaning), which can reduce the amount of cleaning liquid used and reduce costs. At the same time, during the cycle cleaning process, each chemical bottle can be cleaned, which is highly efficient.

[0083] At the same time, if the chemical bottles are relatively dirty, in order to ensure the cleanliness of the cleaning, for example, if 8 chemical bottles are cleaned at the same time, cleaning liquid can be added to chemical bottle No. 1 and chemical bottle No. 5 at the same time, and the cleaning liquid in chemical bottle No. 1 is transferred to chemical bottles No. 2, 3, and 4 for cleaning in turn, and the cleaning liquid in chemical bottle No. 5 is transferred to chemical bottles No. 6, 7, and 8 for cleaning in turn, and discharged from chemical bottles No. 4 and No. 8. For subsequent secondary and tertiary cleanings, the subsequent cleaning liquid is relatively clean and can be transferred from chemical bottle No. 1 to chemical bottle No. 8 to reduce the amount of cleaning liquid used. Adjustments can be made according to actual conditions.

[0084] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0085] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, or a detachable connection, or an integral one; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, for example, the two can form a mechanical abutment or abutment connection through abutment, contact, etc., the two can also be directly hung or hung through an intermediate medium, etc., or it can be the internal connection of the two elements or the interaction relationship between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

Claims

1. A chemical bottle cleaning process, the steps of which are as follows: ① Placement of chemical bottles: Place at least two chemical bottles to be cleaned on the corresponding cleaning positions of the cleaning mechanism; ② Liquid addition: Feed the prepared cleaning liquid into one of the chemical bottles to be cleaned, and use the cleaning mechanism to clean the chemical bottle; ③ Liquid transfer: After a chemical bottle is cleaned once, pump out the cleaning liquid in the chemical bottle and feed it into the next chemical bottle to be cleaned for cleaning; ④ Liquid drainage: When the cleaning liquid enters the last chemical bottle to be cleaned and the cleaning is completed; or when the cleaning liquid in the chemical bottle reaches the corresponding time in the chemical bottle and no liquid transfer operation is required, pump out and drain the internal cleaning liquid; The steps ② to ④ are cycled at least once.

2. The chemical bottle cleaning process according to claim 1, characterized in that: When cleaning the chemical bottle, the cleaning mechanism drives the corresponding chemical bottle to shake, tilt, and heat, so that the cleaning liquid inside it cleans the inside of the chemical bottle.

3. The chemical bottle cleaning process according to claim 1, characterized in that: When cleaning the chemical bottle, the following steps are carried out: a. The cleaning mechanism sets the chemical bottle query and scanning order according to the position of the chemical bottle and the number of cleaning times required for the chemical bottle; then the following steps are carried out: b. Then query and scan whether each chemical bottle needs liquid addition. If liquid addition is required, perform the liquid addition step; c. Query and scan whether each chemical bottle needs liquid transfer. If liquid transfer is required, perform the liquid transfer step; d. Query and scan whether each chemical bottle needs liquid drainage. If liquid drainage is required, perform the liquid drainage step; e. According to the above steps, determine whether to end the cyclic cleaning process. If cyclic cleaning still needs to continue, return to step a to start over. If the cleaning is completed, the cleaning of the chemical bottle is finished.

4. The chemical bottle cleaning process according to claim 3, wherein: The liquid addition step for each chemical bottle is set to manual or automatic state. In the manual state, the liquid addition step is manual operation for liquid addition; in the automatic state, in step ②, the following steps are included: A1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, enter the next step. If it is the manual mode, no automatic liquid addition is performed; A2. Determine whether the chemical bottle is an empty bottle. If it is an empty bottle, enter a step. If it is not an empty bottle, no automatic liquid addition is performed; A3. Determine whether the empty bottle state of the chemical bottle has reached the maximum idle time. If it has reached, enter the next step. If the maximum idle time has not been reached, no automatic liquid addition is performed temporarily; A4. Determine whether a separate cleaning liquid needs to be configured. If no separate cleaning liquid needs to be configured, enter the next step. If a cleaning liquid needs to be configured, first perform the configuration of the cleaning liquid; A5. Add the newly configured cleaning liquid or the cleaning liquid transferred from other chemical bottles into the chemical bottle to complete the liquid addition step.

5. The chemical bottle cleaning process according to claim 3, characterized in that: The liquid transfer step for each chemical bottle is set to manual or automatic state. In the manual state, the liquid transfer step is manual operation for liquid transfer; in the automatic state, in step ③, the following steps are included: D 1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, enter the next step. If it is the manual mode, no automatic liquid transfer action is performed; D2. Determine whether the chemical bottle is in the state of the end of cleaning. If the cleaning is finished, proceed to the next step. If the cleaning is not completed yet, do not perform the automatic pipetting operation. D3. Determine whether there is a chemical bottle in the empty bottle state. If there is a chemical bottle in the empty bottle state, pipette the cleaning solution in the chemical bottle with the cleaning finished into the chemical bottle in the empty bottle state. If there is no chemical bottle in the empty bottle state, do not perform the pipetting operation.

6. The chemical bottle cleaning process according to claim 3, characterized in that: Set the drainage step for each chemical bottle to the manual state or the automatic state. In the manual state, the drainage step is manual drainage operation. In the automatic state, step ④ includes the following steps: C1. Determine whether the mode of the chemical bottle is the automatic mode. If it is the automatic mode, proceed to the next step. If it is the manual mode, do not perform the automatic drainage operation. C2. Determine whether the cleaning of the chemical bottle is completed. If the cleaning is completed, proceed to the next step. If the cleaning is not completed, do not perform the drainage operation. C3. Determine whether the chemical bottle is the last one in the scanning sequence. If it is the last one, perform the drainage operation to drain the cleaning solution. If it is not the last one, proceed to the next step. C4. Determine whether the cleaning solution in the chemical bottle exceeds the longest soaking time. If it does not exceed, do not perform the drainage operation. If it exceeds the longest soaking time, perform the drainage operation to drain the cleaning solution.

7. The chemical bottle cleaning process according to claim 1, characterized in that: After the chemical liquid in the chemical bottle is pipetted or drained, perform drying first and then perform liquid addition or pipetting.

8. The chemical bottle cleaning process according to claim 1, characterized in that: It also includes a drying step, sending a protective gas to the chemical bottle with the cleaning finished and drying it to complete the cleaning and drying of the chemical bottle.

9. A chemical bottle cleaning device for implementing the chemical bottle cleaning process according to any one of claims 1-8, characterized in that: It includes a stock solution module, a liquid preparation module and a valve control module. The liquid preparation module is connected to the stock solution module and the valve control module. The liquid preparation module extracts the corresponding chemical liquid from the stock solution module to prepare the required cleaning solution and adds it to the chemical bottle through the valve control module.

10. The chemical bottle cleaning device according to claim 9, wherein: The valve control module is connected to the chemical bottle and the liquid preparation module through pipelines, and the valve control module realizes the switching of liquid addition, pipetting, drainage and drying.

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