Micro-motion platform

Abstract

The micro-motion platform comprises a plurality of linear motion assemblies, a mounting plate and a platform assembly, and lifting columns of the plurality of linear motion assemblies penetrate through the mounting plate to drive the platform assembly to move in a preset direction; the linear motion assembly comprises a motor, a speed reducer, a ball screw, a moving seat and a lifting column, the motor is in transmission connection with the speed reducer, an output shaft of the speed reducer is in transmission connection with a screw of the ball screw, the moving seat is installed on a nut of the ball screw, and the lifting column is installed on the moving seat; the top end of the lifting column is connected with the bottom end face of the platform adjusting unit in a ball hinge mode, and the motor drives the movable base and the lifting column to move through the speed reducer and the ball screw. The bearing capacity and precision of the micro-motion platform are improved, and the problem that an existing micro-motion platform is difficult to meet high precision and large bearing at the same time is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-motion platforms, and in particular to a micro-motion platform. Background Art

[0002] In the fields of semiconductor packaging, precision optical assembly and high-density electronic component manufacturing, processes such as flip-chip bonding place stringent requirements on the positioning accuracy and load-bearing capacity of the micro-motion stage.

[0003] However, existing micro-motion stage technology is limited by structural design or driving principles, and it is difficult to simultaneously meet the dual requirements of high precision and large load-bearing capacity. For example, the wedge-shaped micro-motion stage has problems such as large return clearance and slow dynamic response, and the piezoelectric micro-motion stage cannot adapt to the process requirements of large-load workpieces.

[0004] Based on this, a new technical solution is needed. Summary of the invention

[0005] In view of this, an embodiment of the present invention provides a micro-motion platform to at least solve the problem that the existing micro-motion platform is difficult to simultaneously meet the requirements of high precision and large load-bearing capacity.

[0006] The embodiment of the present invention provides the following technical solutions:

[0007] An embodiment of the present invention provides a micro-motion platform, comprising a linear motion component, a mounting plate and a platform component, wherein the lifting columns of the plurality of linear motion components pass through the mounting plate to drive the platform component to move in a preset direction;

[0008] The linear motion assembly includes a motor, a reducer, a ball screw, a moving seat and a lifting column, wherein the motor is connected to the reducer in a transmission manner, the output shaft of the reducer is connected to the screw of the ball screw in a transmission manner, the moving seat is mounted on the nut of the ball screw, the lifting column is mounted on the moving seat, and the top end of the lifting column is connected to the bottom end surface of the platform adjustment unit by a ball hinge, wherein the motor drives the moving seat and the lifting column to move through the reducer and the ball screw;

[0009] The platform assembly is configured to move in a preset direction according to the moving distances of the lifting columns of the plurality of linear motion assemblies.

[0010] Furthermore, the linear motion assembly also includes a fixed seat, and the end of the screw of the ball screw is rotatably mounted on the fixed seat, so that the screw provides support.

[0011] Furthermore, the linear motion assembly also includes a grating ruler, the moving end of the grating ruler is mounted on the moving seat, and the fixed end of the grating ruler is mounted on the fixed seat, for detecting the position of the moving seat.

[0012] Further, the speed reducer is drivingly connected to the screw rod of the ball screw through a coupling.

[0013] Further, the mounting plate and the fixed seat are fixedly connected, and a plurality of through holes for accommodating the lifting columns are formed in the mounting plate.

[0014] Further, the lifting columns move in the through holes through linear bearings.

[0015] Further, the platform assembly includes a plurality of mounting seats, a bearing platform, and a plurality of reed pieces;

[0016] The plurality of mounting seats are circumferentially distributed on the mounting plate along the bearing platform and are spaced apart from the outer edge of the bearing platform, and the plurality of reed pieces are correspondingly mounted between the plurality of mounting seats and the outer edge of the bearing platform.

[0017] Further, each of the lifting columns is ball-hinged to the bottom end surface of the bearing platform through a ball seat.

[0018] Further, a ball seat mounting portion is provided on the bottom end surface of the bearing platform, and a spherical groove for mounting the ball seat is formed in the ball seat mounting portion.

[0019] Further, the plurality of mounting seats are evenly distributed on the mounting plate.

[0020] Compared with the prior art, the at least one technical solution adopted in the embodiment of the present invention can achieve at least the following beneficial effects:

[0021] A micro-motion platform of the present invention controls the lifting columns of a linear motion assembly through a ball screw and a speed reducer, and the lifting columns control the platform assembly in a ball-hinged manner, improving the load-bearing capacity of the platform assembly, and also enabling high-precision control of the lifting columns through the speed reducer and the ball screw, solving the problem that existing micro-motion platforms are difficult to simultaneously meet the requirements of high precision and large load. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0023] Figure 1 is a side view of a micro-motion platform of the present invention;

[0024] Figure 2 is a perspective view of a micro-motion platform of the present invention without a mounting plate;

[0025] Figure 3 This is a side view of the linear motion component in a micro motion platform of the present invention;

[0026] Figure 4 This is a schematic diagram of the platform component in a micro motion platform of the present invention.

[0027] The reference numerals of the present invention are as follows:

[0028] 10. Linear motion component; 11. Motor; 12. Reducer; 13. Ball screw; 14. Moving seat; 15. Lifting column; 16. Fixed seat; 17. Grating scale; 18. Coupling;

[0029] 20. Mounting plate;

[0030] 30. Platform component; 31. Mounting seat; 32. Carrying platform; 33. Reed; 34. Ball seat. Detailed implementation manners

[0031] The following describes the embodiments of the present application in detail with reference to the accompanying drawings.

[0032] The following illustrates the implementation manners of the present application through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without making creative efforts belong to the scope of protection of the present application.

[0033] It should be noted that the following describes various aspects of the embodiments within the scope of the appended claims. It should be obvious that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is illustrative only. Based on the present application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects described herein can be used to implement the device and / or practice the method. Additionally, this device and / or this method can be implemented using other structures and / or functionality in addition to one or more of the aspects described herein.

[0034] It should also be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present application in a schematic manner. The diagrams only show the components related to the present application, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0035] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the examples can be practiced without these specific details.

[0036] In the prior art, although the piezoelectric micro-stage has high resolution, its output displacement range is extremely small, and the load-bearing capacity of the piezoelectric material is limited and cannot meet the process requirements of large-load workpieces. The motor direct-push type micro-stage uses a servo motor to directly drive the push rod. Although the structure is simple, its transmission rigidity is insufficient, and the stepping error of the motor itself and the clearance of the transmission chain will introduce non-linear errors, resulting in poor positioning accuracy; the trapezoidal lead screw micro-stage relies on the transmission of the lead screw nut pair. Although it has a certain load-bearing capacity, the pitch error, thermal deformation, and backlash of the lead screw pair will significantly reduce the positioning repeatability, and it is prone to vibration during high-speed movement.

[0037] In summary, the existing micro-stage technologies are either limited by the driving principle (such as the insufficient displacement range of the piezoelectric type) or restricted by mechanical structure defects (such as the friction and clearance of the wedge block and lead screw). There is a core contradiction that it is difficult to balance accuracy and load-bearing capacity. In high-value-added processes such as flip-chip soldering, it is required that the micro-stage can achieve sub-micron positioning accuracy within a millimeter-level stroke and can also carry a load of hundreds of Newtons to stably support heavy workpieces such as wafers and substrates. This puts forward higher requirements for the multi-degree-of-freedom collaborative control, structural stiffness, and driving efficiency of the micro-stage.

[0038] Based on this, the embodiments of this specification propose a processing solution: as Figures 1-2 shown, a micro-motion platform of the present invention drives the platform component 30 in parallel through multiple independent linear motion components 10, thereby dispersing the total load to each independent structure; then, after using a speed reducer 12 to reduce the speed and increase the torque, combined with the high transmission efficiency of the high-precision ball screw 13, it can ensure that the driving structure can stably output thrust under large loads; finally, the lifting column 15 and the platform component 30 are connected by a ball hinge, so as to compensate for the non-coplanar motion interference caused by installation errors or load eccentricities, avoid additional errors introduced by mechanical jams, and meet the requirements of large load-bearing and high precision of the micro-motion platform.

[0039] The following will describe the technical solutions provided by the embodiments of the present application with reference to the accompanying drawings.

[0040] As Figures 1-3As shown, a micro-motion platform provided by an embodiment of the present invention includes a linear motion component 10, a mounting plate 20 and a platform component 30. The lifting columns 15 of multiple linear motion components 10 pass through the mounting plate 20 to drive the platform component 30 to move in a preset direction; each linear motion component 10 includes a motor 11, a reducer 12, a ball screw 13, a moving seat 14 and a lifting column 15. The motor 11 is transmission-connected to the reducer 12, the output shaft of the reducer 12 is transmission-connected to the screw of the ball screw 13, the moving seat 14 is mounted on the nut of the ball screw 13, the lifting column 15 is mounted on the moving seat 14, and the top end of the lifting column 15 is connected to the bottom end surface of the platform adjustment unit by a ball hinge, wherein the motor 11 drives the moving seat 14 and the lifting column 15 to move through the reducer 12 and the ball screw 13; the platform component 30 is configured to move in a preset direction according to the moving distance of the lifting columns 15 of the multiple linear motion components 10.

[0041] Among them, multiple linear motion assemblies 10 in the linear motion assembly 10 are used to work together to achieve precise movement of the platform assembly 30.

[0042] There may be three linear motion components 10 , which are evenly spaced to synchronously withstand the pressure of the platform component 30 and improve the bearing capacity of the micro-motion platform.

[0043] The three linear motion components 10 all move independently, so that the micro-motion platform can be raised to different heights according to the lifting column 15 of each linear motion component 10 so that the platform component 30 can be adjusted in the three degrees of freedom RxRyZ.

[0044] Among them, after the lifting columns 15 of the multiple linear motion assemblies 10 move to different heights, the platform assembly 30 can be rotated in different directions.

[0045] Among them, the motor 11 is used to provide a power source to drive the subsequent transmission mechanism to move. Its type can be selected according to actual needs, such as a stepper motor or a servo motor. In this application, the servo motor 11 can be combined with a position feedback sensor to achieve sub-micron accuracy.

[0046] The reducer 12 is used to reduce the rotation speed of the motor 11 and increase the output torque to ensure that the linear motion assembly 10 can operate at a lower speed and with high precision.

[0047] In some of the embodiments, the reducer 12 is connected to the screw of the ball screw 13 through a coupling 18 to transmit the torque to the ball screw 13 .

[0048] The ball screw 13 is used to convert the rotational motion into linear motion. It has high precision and low friction, and can ensure the smooth and accurate motion of the platform.

[0049] When the ball screw 13 rotates, the moving seat 14 can be driven by the nut to make precise linear motion along the direction of the screw.

[0050] The lifting column 15 is a main actuator of the platform assembly 30 and is connected to the bottom end surface of the platform assembly 30 by means of a ball joint during movement.

[0051] Furthermore, the ball-jointed connection can effectively prevent the lifting column 15 from deviating from a predetermined trajectory during operation, thereby ensuring the stability of the platform.

[0052] Among them, when the motor 11 drives the moving seat 14 through the reducer 12 and the ball screw 13, the lifting column 15 performs lifting movement accordingly. By adjusting the rotation speed of the motor 11, the lifting height of the lifting column 15 can be adjusted. Through the ball joint, the platform assembly 30 can achieve high-precision movement.

[0053] The present application has a strong load-bearing capacity through the coordinated action of multiple linear motion components 10, and the platform component 30 can move accurately and smoothly in a preset direction, thereby achieving precise adjustment of the platform component 30.

[0054] Furthermore, the linear motion assembly 10 further includes a fixed seat 16 , and the end of the screw of the ball screw 13 is rotatably mounted on the fixed seat 16 , so that the screw provides support.

[0055] In the case where there are three linear motion components 10 , the fixing base 16 can be configured as a U-shaped structure, and a linear motion component 10 is installed on each side of the fixing base 16 .

[0056] The fixing seat 16 is used to support both ends of the screw of the ball screw 13 , and its top end is connected to the mounting plate 20 to provide bearing support for the screw of the ball screw 13 and increase the bearing capacity of the linear motion assembly 10 .

[0057] Specifically, a spacing distance is set between the screw of the ball screw 13 and the side of the fixing seat 16 so as not to affect the movement of the nut along the screw. Both ends of the fixing seat 16 are provided with protrusions that can support the screw through bearings.

[0058] Furthermore, the linear motion assembly 10 also includes a grating ruler 17 , the moving end of the grating ruler 17 is mounted on the moving seat 14 , and the fixed end of the grating ruler 17 is mounted on the fixed seat 16 , for detecting the position of the moving seat 14 to achieve high-precision displacement of the moving seat 14 .

[0059] The grating ruler 17 can detect the moving distance of the moving seat 14 .

[0060] Specifically, when the motor 11 drives the moving seat 14 to move through the speed reducer 12 and the ball screw 13, the moving distance of the moving seat 14 can be obtained in real time through the grating scale 17, thereby achieving high-precision displacement of the moving seat 14 and the lifting column 15.

[0061] In some of these embodiments, the mounting plate 20 is fixedly connected to the fixed seat 16, and a plurality of through holes for accommodating the lifting column 15 are formed in the mounting plate 20. The mounting plate 20 is used to provide support for the fixed seat 16.

[0062] Furthermore, the lifting column 15 moves in the through hole through a linear bearing, so that the lifting column 15 moves linearly along the linear bearing, avoiding jamming of the lifting column 15 in the through hole of the mounting plate 20.

[0063] After the motor 11 of the linear motion assembly 10 of the present application rotates, the motor 11 increases the torque through the speed reducer 12, and then transmits the torque to the ball screw 13 through the coupling 18, so that the ball screw 13 rotates stably, and further enables the moving seat 14 and the lifting column 15 to lift stably. Then, in cooperation with the grating scale 17 to feedback the position of the moving seat 14, high-precision displacement of the moving seat 14 and the lifting column 15 is achieved. In addition, in the present application, multiple linear motion assemblies 10 and the moving seat 14 bear pressure linearly, which also improves the bearing capacity of the platform assembly 30.

[0064] In some of these embodiments, as Figure 4 shown, the platform assembly 30 includes a plurality of mounting seats 31, a bearing platform 32, and a plurality of reed pieces 33; the plurality of mounting seats 31 are circumferentially distributed on the mounting plate 20 along the periphery of the bearing platform 32 and are spaced apart from the outer edge of the bearing platform 32, and the plurality of reed pieces 33 are correspondingly mounted between the plurality of mounting seats 31 and the outer edge of the bearing platform 32.

[0065] Among them, there can be three mounting seats 31, which are evenly arranged, and are mainly used to cooperate with a plurality of reed pieces 33 to limit the position of the bearing platform 32.

[0066] Among them, the reed piece 33 has the characteristic of high elasticity. After being evenly arranged along the circumference of the bearing platform 32, it can limit the position of the bearing platform 32 and prevent it from displacing in the X or Y direction.

[0067] Furthermore, each lifting column 15 is ball-jointed to the bottom end surface of the bearing platform 32 through a ball seat 34.

[0068] Furthermore, a ball seat 34 installation portion is provided on the bottom end surface of the bearing platform 32, and a spherical groove for installing the ball seat 34 is formed in the ball seat 34 installation portion.

[0069] In this application, three sets of circularly-arrayed and evenly-distributed linear motion assemblies 10 composed of ball screws 13, linear guides, speed reducers 12, and motors 11 are fixed on the mounting plate 20. Each linear motion assembly 10 moves independently, and each linear motion assembly 10 pushes a set of spheres of the ball seat 34. The three sets of spheres of the ball seat 34 support the bearing platform 32, and the bearing platform 32 uses reed pieces 33 to control the displacement in the XY directions. When the three sets of linear motion assemblies 10 move, the attitude of the bearing platform 32 in the RxRyZ directions can be adjusted. The grating ruler 17 is used to improve the positioning accuracy of the linear motion assembly 10, and the speed reducer 12 is used to improve the load-bearing capacity of the mechanism.

[0070] The working principle of the present invention is as follows:

[0071] After integrating three linear motion assemblies 10 on the mounting plate 20, the three linear motion assemblies 10 jointly drive the adjustment platform assembly 30. Among them, the movement distance of the lifting columns 15 of each linear motion assembly 10 can be different, and the adjustment platform assembly 30 can move in different directions;

[0072] The servo motor 11 provides torque, the speed reducer 12 amplifies the torque, and the torque is transmitted to the ball screw 13 through the coupling 18;

[0073] The shaft end of the ball screw 13 is fixed on the fixed seat 16. The nut of the ball screw 13 drives the moving seat 14 to move vertically. The grating ruler 17 feeds back the position to obtain the moving distance of the moving seat 14 in real time;

[0074] The moving seat 14 pushes the lifting column 15 to move vertically along the linear bearing on the outer ring.

[0075] The linear motion assembly 10 is connected to the ball seat 34, converting the vertical movement into the RxRyZ-direction movement of the bearing platform 32. At the same time, the reed pieces 33 ensure that there is no displacement of the bearing platform 32 in the XY directions, and the mounting seat 31 tightens the reed pieces 33, thereby realizing the sub-micron-level high-precision movement of the linear motion assembly 10 and ensuring the urad-level angle adjustment ability of the platform.

[0076] The present invention uses the speed reducer 12 to provide large torque for the ball screw 13, enabling the ball screw 13 to drive the moving seat 14 to perform linear motion. Then, the lifting column 15 is ball-hinged to the bottom end surface of the bearing platform 32 through the ball seat 34, and the reed pieces 33 are used to limit the movement amount of the bearing platform 32 in the XY directions, thereby improving the positioning accuracy and load-bearing capacity of the micro-motion platform.

[0077] The present invention can achieve sub-micron level adjustment of the bearing platform 32 through the linear motion component 10 and the grating scale 17, and at the same time, the reed 33 is combined to ensure that the movement amount in the XY direction during adjustment is less than 1 micron; moreover, the structure of the micro-motion platform of the present invention is simple, and it only needs to add lubricating oil to the linear guide of the ball screw 13 as required, and the micro-motion platform of the present application has relatively low noise.

[0078] The micro-motion platform of the present invention uses devices such as the ball screw 13, the speed reducer 12, the linear guide, and the grating scale 17 to make the adjustment accuracy of the present invention reach the sub-micron level; the use of the ball screw 13, the speed reducer 12, etc. improves the load-bearing capacity of the invention.

[0079] The present invention can also be applied to workbenches with large load-bearing and sub-micron level accuracy in various fields such as chemical industry, metallurgy, forging, detection, and medicine.

[0080] In this specification, for the same or similar parts between various embodiments, reference can be made to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the method, the description is relatively simple, and reference can be made to the partial description of the system embodiments for the relevant parts.

[0081] As described above, the above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A micro-motion platform, characterized in that, It comprises a plurality of linear motion components, a mounting plate and a platform component, wherein the lifting columns of the plurality of linear motion components pass through the mounting plate to drive the platform component to move in a preset direction; The linear motion assembly includes a motor, a reducer, a ball screw, a moving seat and a lifting column, wherein the motor is connected to the reducer in a transmission manner, the output shaft of the reducer is connected to the screw of the ball screw in a transmission manner, the moving seat is mounted on the nut of the ball screw, the lifting column is mounted on the moving seat, and the top end of the lifting column is connected to the bottom end surface of the platform adjustment unit by a ball hinge, wherein the motor drives the moving seat and the lifting column to move through the reducer and the ball screw; The platform assembly is configured to move in a preset direction according to the moving distances of the lifting columns of the plurality of linear motion assemblies.

2. The micro-motion platform according to claim 1, wherein The linear motion assembly also includes a fixed seat, and the end of the screw of the ball screw is rotatably mounted on the fixed seat, so that the screw provides support.

3. The micro-motion platform according to claim 2, characterized in that, The linear motion assembly also includes a grating ruler, the moving end of the grating ruler is mounted on the moving seat, and the fixed end of the grating ruler is mounted on the fixed seat, for detecting the position of the moving seat.

4. The micro-motion platform according to claim 1, characterized in that, The reducer is connected to the screw of the ball screw through a coupling.

5. The micro-motion platform according to claim 2, characterized in that, The mounting plate is fixedly connected to the fixing seat, and a plurality of through holes for accommodating the lifting columns are formed on the mounting plate.

6. The micro-motion platform according to claim 5, characterized in that, The lifting column moves in the through hole via a linear bearing.

7. The micromanipulation platform according to any one of claims 1 to 6, characterized in that, The platform assembly includes a plurality of mounting seats, a load-bearing platform and a plurality of springs; The plurality of mounting seats are distributed on the mounting plate along the circumference of the bearing platform and are spaced apart from the outer edge of the bearing platform. The plurality of spring leaves are correspondingly mounted between the plurality of mounting seats and the outer edge of the bearing platform.

8. The micro-motion platform according to claim 7, characterized in that, Each lifting column is spherically hinged to the bottom end surface of the bearing platform via a ball seat.

9. The fine motion platform according to claim 8, wherein, A ball seat mounting portion is provided on the bottom end surface of the bearing platform, and a spherical groove for mounting the ball seat is provided on the ball seat mounting portion.

10. The fine motion platform according to claim 7, wherein The plurality of mounting seats are evenly distributed on the mounting plate.

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