Probe card automatic warehousing system

Abstract

The invention provides an automatic warehousing system for probe cards. The automatic warehousing system comprises a warehousing cabinet and a probe card transferring device. The probe card transferring device is suitable for transferring a probe card and comprises a guide rail, a vertical frame, a bearing structure and a pick-and-place device. The probe card is held on a probe card holder having a coupling portion. The guide rail extends in the first direction and is located around the storage cabinet. The vertical frame extends in the second direction perpendicular to the first direction, and the vertical frame can be arranged on the guide rail in a displacement mode in the first direction. The bearing structure can be arranged on the vertical frame in a displacement mode in the second direction and comprises a transfer arm, and the transfer arm can move in the third direction perpendicular to the first direction and the second direction. The pick-and-place device is arranged on the transfer arm and is used for being separably combined with the combination part.

Description

Technical Field

[0001] This application relates to a warehousing system, and more particularly to an automatic warehousing system for a probe card. Background Art

[0002] Press, a probe card is a test interface widely used in the semiconductor industry. It mainly conducts functional tests on bare chips with probes before integrated circuit packaging, so as to screen out defective products and ensure the product yield after subsequent packaging operations.

[0003] In order to adapt to the diversification of market demands, the product trend of IC chips also continues to develop towards miniaturization, high processing efficiency, and compound functions. For this reason, in addition to the need to reduce the chip size, the number of input / output pins on the chip has also increased significantly, and the density of input / output pins has been improved. Of course, the above factors also affect the probe configuration on the probe card at the same time. Not only is the density of probe arrangement increased, but the size of the probes has also become more refined.

[0004] During the process of testing with a probe card, the probe card needs to be transported to a test machine for subsequent testing work. When the probe card is not needed after the testing work is completed, it must also be transported and stored in a storage cabinet. At present, the work of transporting the probe card mostly relies on manual handling, which is not only time-consuming, unable to ensure the handling quality, but also unable to meet the configuration requirements of the current automated factory. In view of this, the applicant has painstakingly studied and conceived more deeply. After many R & D trials, an automatic warehousing system for a probe card has finally been invented. Summary of the Invention

[0005] This application provides an automatic warehousing system for a probe card, including a storage cabinet and a probe card transfer device. The probe card transfer device is adapted to transfer the probe card and includes a guide rail, a vertical frame, a carrying structure, and a picking and placing device. The probe card is held on a probe card holder having a coupling portion. The guide rail extends in a first direction and is located around the storage cabinet. The vertical frame extends in a second direction perpendicular to the first direction, and the vertical frame is displaceably arranged on the guide rail along the first direction. The carrying structure is displaceably arranged on the vertical frame along the second direction and includes a transfer arm, and the transfer arm can be displaced in a third direction perpendicular to the first direction and the second direction. The picking and placing device is arranged on the transfer arm and is adapted to be detachably coupled to the coupling portion.

[0006] In some embodiments, the picking and placing device of the probe card transfer device can transfer and pick up the probe card in the three-dimensional space around the storage cabinet through the configuration of the carrying structure, the vertical frame, and the guide rail, and then the probe card can be taken out of or deposited into the storage cabinet in an automated control manner, achieving the purpose of unmanned automatic warehousing.

[0007] In some embodiments, the aforementioned pick-and-place device includes a driving member and a limiting member. The limiting member has a sleeving portion and a limiting portion. The driving member is connected to the limiting member and can drive the limiting member to correspond to the engaging portion with the sleeving portion or the limiting portion. When the sleeving portion corresponds to the engaging portion, the pick-and-place device is separated from the engaging portion. When the limiting portion corresponds to the engaging portion, the pick-and-place device is engaged with the engaging portion.

[0008] In some embodiments, the aforementioned engaging portion includes a first body segment and a second body segment that are connected in series. The cross-sectional area of the first body segment is larger than that of the second body segment. The limiting member has a limiting groove, which includes a sleeving portion and a limiting portion that are connected to each other. The shape of the sleeving portion corresponds to the shape of the first body segment, and the shape of the limiting portion corresponds to the shape of the second body segment.

[0009] In some embodiments, the aforementioned pick-and-place device further includes a first component and a second component. The first component is fixed to the transfer arm, the driving member is fixed to the first component, the second component is fixed to the first component, and the limiting member is displaceably clamped between the first component and the second component.

[0010] In some embodiments, the aforementioned guiding rail includes at least two rail modules. Each rail module extends along a first direction, and the rail modules are arranged and spliced along the first direction.

[0011] In some embodiments, the aforementioned carrying structure includes a frame body and two transfer arms. The frame body is displaceably arranged on the vertical frame along a second direction. The two transfer arms are arranged on opposite sides inside the frame body, and the two transfer arms can be displaced along a third direction on both sides of the frame body in the third direction.

[0012] In some embodiments, the probe card automatic storage system further includes a material connection area, which includes a seat body and a carrier. The carrier can be linearly displaced on the seat body to carry the probe card.

[0013] In some embodiments, the aforementioned material connection area further includes a rotation module, which is rotatably arranged inside the carrier.

[0014] In some embodiments, the aforementioned carrier is displaced along the first direction, and the displacement range of the carrier along the first direction partially overlaps with the guiding rail and partially does not overlap with the guiding rail.

[0015] In some embodiments, the probe card automatic storage system further includes a material connection area, which includes a first material connection area and a second material connection area arranged adjacent to both ends of the guiding rail.

[0016] In some embodiments, the aforementioned storage cabinet includes at least two storage spaces, and the storage spaces are arranged overlappingly along the second direction.

[0017] In some embodiments, the probe card automatic storage system further includes a first maintenance door and a second maintenance door, which are respectively arranged at both ends of the guiding rail.

[0018] In some embodiments, the probe card automatic storage system further includes a control module, which includes a controller, a scanning device, and a database. The controller is signal-connected to the storage cabinet, the probe card transfer device, the material connection area, the scanning device, and the database.

[0019] The above summary is only for the purpose of the specification and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of the present application will become apparent by reference to the drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In the drawings, unless otherwise specified, the same reference numerals throughout the several views denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0021] Figure 1 Schematic diagram of an embodiment of the probe card automatic storage system of the present application Figure 1 .

[0022] Figure 2 Schematic diagram of an embodiment of the probe card automatic storage system of the present application Figure 2 .

[0023] Figure 3 Schematic diagram of an embodiment of the probe card transfer device of the probe card automatic storage system of the present application Figure 1 .

[0024] Figure 4A Schematic diagram showing that the probe card holder of the probe card transfer device of the probe card automatic storage system of the present application is separated from the probe card.

[0025] Figure 4B For the circled area Figure 4A partial enlarged view.

[0026] Figure 5 Schematic diagram of an embodiment of the probe card transfer device of the probe card automatic storage system of the present application Figure 2 .

[0027] Figure 6 Schematic diagram of an embodiment of the pick-and-place device of the probe card automatic storage system of the present application Figure 1 .

[0028] Figure 7Schematic of an embodiment of the pick-and-place device of the probe card automatic storage system of the present application Figure 2 。

[0029] Figure 8 Top view schematic of an embodiment of the probe card automatic storage system of the present application.

[0030] Figure 9 Schematic of an embodiment of the probe card automatic storage system of the present application Figure 3 。

[0031] Figure 10 Partial cross-section of the probe card automatic storage system of the present application Figure 1 。

[0032] Figure 11A Is Figure 10 Local enlarged view of the circled area 11A in

[0033] Figure 11B Is Figure 10 Local enlarged view of the circled area 11B in

[0034] Figure 12 Partial cross-section of the probe card automatic storage system of the present application Figure 2 。

[0035] Figure 13 Is Figure 12 Local enlarged view of the circled area 13 in

[0036] Figure 14 System schematic of an embodiment of the probe card automatic storage system of the present application.

[0037] Explanation of reference numerals:

[0038] 10: Storage cabinet;

[0039] 10A: First storage cabinet;

[0040] 10B: Second storage cabinet;

[0041] 11: Partition;

[0042] 12: First door panel;

[0043] 13: Second door panel;

[0044] 14: Nitrogen module;

[0045] 15: Detection module;

[0046] 16: Alignment module;

[0047] S: Storage space;

[0048] S1: Open port;

[0049] 20: Guide rail;

[0050] 21: Track module;

[0051] 30: Upright frame;

[0052] 31: Upright part;

[0053] 32: First connecting part;

[0054] 33: Second connecting part;

[0055] 40: Carrying structure;

[0056] 41: Frame;

[0057] 411: First opening;

[0058] 412: Second opening;

[0059] 413: Bottom surface;

[0060] 42: Transfer arm;

[0061] 50: Pick-and-place device;

[0062] 51: First component;

[0063] 511: Through hole;

[0064] 52: Second component;

[0065] 521: Ring groove;

[0066] 53: Driving part;

[0067] 531: Fixed part;

[0068] 532: Moving part;

[0069] 54: Limiting part;

[0070] 541: Limiting groove;

[0071] 5411: Sleeved part;

[0072] 5412: Limiting portion;

[0073] 542: Sensing part;

[0074] 55: Position sensing module;

[0075] 551: First position sensor;

[0076] 552: Second position sensor;

[0077] 56: Fixed part;

[0078] 60: Material connection area;

[0079] 60A: First material connection area;

[0080] 60B: Second material connection area;

[0081] 61: Base body;

[0082] 62: Carrier stage;

[0083] 621: Abutting edge;

[0084] 622: Receiving groove;

[0085] 623: Device space;

[0086] L: Restricting part;

[0087] 63: First guiding component;

[0088] 64: Second guiding component;

[0089] 65: Rotating module;

[0090] 651: Driving source;

[0091] 652: Turntable;

[0092] 70A: First maintenance door;

[0093] 70B: Second maintenance door;

[0094] 80: Control module;

[0095] 81: Controller;

[0096] 82: Scanning device;

[0097] 83: Database;

[0098] 84: Display;

[0099] T: Probe card transfer device;

[0100] P: Probe card;

[0101] H: Probe card holder;

[0102] H1: Bonding surface;

[0103] H2: Joint part;

[0104] H21: First body segment;

[0105] H22: Second body segment;

[0106] H3: Supporting groove;

[0107] H4: The first positioning part;

[0108] H5: The second positioning part;

[0109] F: The connecting fixture;

[0110] D1: The first direction;

[0111] D2: The second direction;

[0112] D3: The third direction. Detailed implementation manners

[0113] Refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4A and Figure 4B , the probe card automatic storage system mainly includes a storage cabinet 10 and a probe card transfer device T located around the storage cabinet 10. The probe card transfer device T is adapted to transfer the probe card P, and the aforementioned probe card P is held by a probe card holder H having a bonding part H2. The probe card transfer device T can be displaced within the range where the storage cabinet 10 is distributed to automatically pick up and place the probe card P to achieve the purpose of automatic storage and transfer of the probe card P.

[0114] Refer to Figure 1 and Figure 2 , the storage cabinet 10 has a storage space S to accommodate the probe card P. Herein, the probe card P (Probe Card) is a device including at least two probes for electrically connecting to a device under test (Device Under Test) through the probes for electrical testing.

[0115] Refer to Figure 4A 、 Figure 4B and Figure 6 、 Figure 7 , the probe card P is held by a probe card holder H (Card Holder). The probe card P can be positioned to a testing machine through the probe card holder H or be automatically / manually transferred, and the probe card holder H can fix probe cards P of different sizes, thereby enabling probe cards P of various different specifications to be unified in specification through the probe card holder H.

[0116] Refer to Figure 4A, in some embodiments, the probe card holder H is an annular structure and has a bonding surface H1, a coupling portion H2, a bearing groove H3, a first positioning portion H4, and a second positioning portion H5. In these embodiments, the bonding surface H1 is annular, the coupling portion H2 is located on the bonding surface H1, the bearing groove H3 is recessed from the bonding surface H1, and the first positioning portion H4 is a perforation penetrating the probe card holder H. In these embodiments, the probe card P is received and limited within the bearing groove H3 of the probe card holder H. The probe card holder H is limited to the storage position through the first positioning portion H4 and fixed to the picking and placing device 50 through the second positioning portion H5. Herein, the coupling portion H2 is a convex column structure protruding from the bonding surface H1. The second positioning portion H5 is a column with one end being conical.

[0117] Refer to Figure 1 、 Figure 2 and cooperate with Figure 5 , the guiding rail 20 extends along the first direction D1 and is located around the storage cabinet 10. The vertical frame 30 extends in height along the second direction D2 perpendicular to the first direction D1 and stands on the guiding rail 20. Herein, the vertical frame 30 is displaceably arranged on the guiding rail 20 along the first direction D1. The carrying structure 40 is displaceably arranged on the vertical frame 30 along the second direction D2 and includes a transfer arm 42. The transfer arm 42 is displaceable along the third direction D3 perpendicular to the first direction D1 and the second direction D2. The picking and placing device 50 is arranged on the transfer arm 42 and is used to detachably couple to the coupling portion H2.

[0118] Thereby, the picking and placing device 50 of the probe card transfer device T can transfer and pick up and place the probe card P in the three-dimensional space around the storage cabinet 10 through the configuration of the carrying structure 40, the vertical frame 30, and the guiding rail 20. Furthermore, the probe card P can be taken out from or stored in the storage cabinet 10 in an automated control manner, achieving the purpose of unmanned automatic transfer and storage.

[0119] Refer to Figures 1 to 3 , the guiding rail 20 can be a single structure or composed of multiple modular structures spliced together, and the present application is not limited thereto. Refer to Figure 3 , the guiding rail 20 is composed of at least two rail modules 21 spliced together. In these embodiments, each rail module 21 extends along the first direction D1 respectively, and each rail module 21 is arranged and spliced along the first direction D1. Thereby, the guiding rail 20 can extend, increase, or shorten its length along the first direction D1 as needed to meet the configuration of storage cabinets 10 with different quantities or specifications. In these embodiments, the storage cabinets 10 are arranged on both sides of the guiding rail 20 in the third direction D3.

[0120] Refer to Figure 3, in some embodiments, the vertical frame 30 includes two upright portions 31, a first connecting portion 32, and a second connecting portion 33. Each upright portion 31 extends along the second direction D2. One side of the first connecting portion 32 is connected to one end of the two upright portions 31, and the second connecting portion 33 is connected to the other end of the two upright portions 31.

[0121] Refer to Figure 3 and Figure 5 , in some embodiments, the first connecting portion 32 is in the shape of a flat plate and extends along the first direction D1. In these embodiments, the guiding rail 20 may include a sliding rail member that extends along the first direction D1 and is disposed on the track module 21 of the guiding rail 20. A sliding block member is disposed on the other side of the first connecting portion 32 of the vertical frame 30. The vertical frame 30 is slidably sleeved on the sliding rail member of the guiding rail 20 through the sliding block member of the first connecting portion 32, so that the vertical frame 30 can be stably displaced along the first direction D1 on the guiding rail 20. In some embodiments, a driving module may also be disposed between the guiding rail 20 and the vertical frame 30 to drive the vertical frame 30 to accurately displace according to the control. Herein, the driving module may be a ball screw or a combination of a gear and a rack, and the present application is not limited thereto.

[0122] Refer to Figure 3 and Figure 5 , in some embodiments, the carrying structure 40 includes a frame body 41 and two transfer arms 42. In these embodiments, the appearance of the frame body 41 is a rectangular cube. Herein, the opposite sides of the frame body 41 in the first direction D1 face the opposite sides of the respective upright portions 31 of the vertical frame 30 that face each other, and the opposite sides of the frame body 41 in the first direction D1 are respectively slidably connected to the upright portions 31 of the vertical frame 30. Thus, the frame body 41 of the carrying structure 40 can be displaced along the upright portions 31 of the vertical frame 30 in the second direction D2.

[0123] Refer to Figure 3 and Figure 5 , the opposite sides of the frame body 41 in the third direction D3 have opposite first openings 411 and second openings 412. The two transfer arms 42 are disposed on the opposite sides within the frame body 41 so as to be displaceable along the third direction D3, and each transfer arm 42 can extend out from the first opening 411 or the second opening 412 respectively. Thus, the two transfer arms 42 can be combined with the opposite sides of the picking and placing device 50, and can stably drive the picking and placing device 50 and the probe card P thereon to displace.

[0124] Refer to Figure 3 and Figure 5, in some embodiments, the housing 41 has a bottom surface 413 which is a planar structure constructed along the first direction D1 and the third direction D3. And in the second direction D2, the bottom surface 413 is closer to the guiding rail 20 than the transfer arm 42. Thus, by the configuration of the bottom surface 413, it can be avoided that the probe card P directly drops from a high place when accidentally detached from the picking and placing device 50, and during transportation, the probe card P can be effectively protected from contact and collision with other objects, improving the protection of the probe card P.

[0125] Refer to Figure 5 , in some embodiments, each transfer arm 42 is a telescopic transfer arm 42. In these embodiments, the telescopic transfer arm 42 includes at least two arm parts, and the adjacent arm parts are sleeved with each other in a relatively displaceable manner. In some embodiments, the length of each arm part in the third direction D3 is not greater than the extension length of the housing 41 in the third direction D3, whereby each transfer arm 42 can completely drive the probe card P to be displaced into the housing 41. Thus, when the probe card P needs to be picked and placed in the storage cabinet 10, the loading and unloading structure 40 can transfer the probe card P out of the housing 41 through each transfer arm 42, and when the upright frame 30 is displaced as a whole, the probe card P can be completely received in the housing 41 of the loading and unloading structure 40 through the transfer arm 42, avoiding damage to the probe card P due to collision with the surrounding environment during the transfer process.

[0126] Refer to Figure 5 And cooperate with Figure 6 And Figure 7 , in some embodiments, the picking and placing device 50 is coupled between two transfer arms 42 and includes a driving member 53 and a limiting member 54. The picking and placing device 50 is driven by the two transfer arms 42 to be displaced along the third direction D3 to the position for picking and placing the probe card P. In these embodiments, the limiting member 54 has a limiting groove 541 including a sleeving portion 5411 and a limiting portion 5412. The driving member 53 is connected to the limiting member 54 and can drive the limiting member 54 so that the sleeving portion 5411 or the limiting portion 5412 of the limiting groove 541 corresponds to the engaging portion H2 of the probe card holder H; when the limiting groove 541 corresponds to the engaging portion H2 with the sleeving portion 5411, the picking and placing device 50 can be freely separated from the engaging portion H2, and when the limiting groove 541 corresponds to the engaging portion H2 with the limiting portion 5412, the picking and placing device 50 is coupled to the engaging portion H2. In some embodiments, the driving member 53 can be but is not limited to a hydraulic cylinder, thereby driving the limiting member 54 so that the sleeving portion 5411 or the limiting portion 5412 corresponds to the engaging portion H2.

[0127] Refer to Figure 4A And cooperate with Figure 6 And Figure 7, in some embodiments, the joint portion H2 is a convex column structure protruding from the joint surface H1 and having different cross-sectional areas. In these embodiments, the joint portion H2 includes a first body segment H21 and a second body segment H22 that are connected in series, and the cross-sectional area of the first body segment H21 is larger than that of the second body segment H22. Herein, the limiting member 54 has a limiting groove 541, and the limiting groove 541 includes a sleeving portion 5411 and a limiting portion 5412 that communicate with each other. The shape of the sleeving portion 5411 corresponds to the shape of the first body segment H21, and the shape of the limiting portion 5412 corresponds to the shape of the second body segment H22. Thus, when the limiting member 54 corresponds to the joint portion H2 with the sleeving portion 5411 (such as Figure 6 state), the first body segment H21 of the joint portion H2 can freely pass through the sleeving portion 5411, and the pick-and-place device 50 and the probe card holder H are in a free state of non-combination, whereby the probe card holder H can be controlled to disengage from the pick-and-place device 50; and when the driving member 53 drives the limiting member 54 to displace to a position where the limiting portion 5412 corresponds to the joint portion H2 (such as Figure 7 state), in this state, the limiting portion 5412 of the limiting member 54 is correspondingly sleeved on the second body segment H22 of the joint portion H2, and the first body segment H21 is limited outside the limiting portion 5412. In this way, a limit is generated between the first body segment H21 of the joint portion H2 and the limiting member 54, and the probe card holder H can be combined with the pick-and-place device 50, whereby the pick-and-place device 50 can be controlled to combine with the probe card holder H to transfer the probe card P.

[0128] Refer to Figures 5 to 7 , in some embodiments, the pick-and-place device 50 further includes a first component 51 and a second component 52. When the pick-and-place device 50 is combined with the carrier structure 40, the pick-and-place device 50 is fixed to the transfer arm 42 through the first component 51, the driving member 53 is fixed to the first component 51, the second component 52 is fixed to the first component 51, and the limiting member 54 is displaceably clamped between the first component 51 and the second component 52.

[0129] Refer to Figure 6 and Figure 7 , in some embodiments, the first component 51, the second component 52, and the limiting member 54 are all circular disk structures, and the first component 51, the limiting member 54, and the second component 52 are stacked coaxially in sequence. In these embodiments, the inner diameter and outer diameter of the limiting member 54 are respectively smaller than the inner diameter and outer diameter of the first component 51 and the second component 52. In this way, the first component 51 and the second component 52 do not partially overlap the limiting member 54. Thus, the combination position between the first component 51 and the second component 52 can be located at a position that does not overlap the limiting member 54, ensuring that after the first component 51 and the second component 52 are combined, the limiting member 54 can still rotate and displace between the first component 51 and the second component 52.

[0130] Refer to Figure 6 andFigure 7 , in some embodiments, one side of the second component 52 facing the first component 51 has an annular groove 521, and the limiting member 54 is rotatably received in the annular groove 521, thereby ensuring that the limiting member 54 can be stably constrained between the first component 51 and the second component 52 and can also rotate and displace smoothly between the first component 51 and the second component 52.

[0131] Refer to Figure 6 and Figure 7 , in some embodiments, the driving member 53 is fixedly disposed on the side of the first component 51 away from the second component 52. In these embodiments, the first component 51 has a through-hole 511, a part of the driving member 53 is fixedly located on the first component 51, and a part extends into the space between the first component 51 and the second component 52 through the through-hole 511 of the first component 51 to connect the limiting member 54 to drive the limiting member 54 to rotate and displace.

[0132] It should be noted that since the pick-and-place device 50 mostly has a circular appearance in cooperation with the probe card P, in some embodiments, the pick-and-place device 50 further includes a connecting fixture F, and the connecting fixture F is fixed between the first component 51 and the transfer arm 42. In these embodiments, the connecting fixture F is arranged in a rectangular structure, thereby increasing the bonding area between the pick-and-place device 50 and the transfer arm 42 and improving the bonding strength between the pick-and-place device 50 and the transfer arm 42.

[0133] Refer to Figure 6 and Figure 7 , in some embodiments, the pick-and-place device 50 further includes a position sensing module 55, and the position sensing module 55 includes a first position sensor 551 and a second position sensor 552. In some embodiments where the driving member 53 is a pressure cylinder (such as a pneumatic cylinder, a hydraulic cylinder or an electric cylinder), the driving member 53 includes a fixed part 531 and a moving part 532, the fixed part 531 is a cylinder body, and the moving part 532 is a telescopic rod. In these embodiments, the fixed part 531 is fixed on the first component 51, the moving part 532 is connected to the limiting member 54, and the limiting member 54 further includes a sensing part 542 protruding from the through-hole 511. The first position sensor 551 and the second position sensor 552 are arranged at different positions on the periphery of the through-hole 511 of the first component 51. The moving part 532 of the driving member 53 can drive the movement of the limiting member 54 by telescoping and simultaneously drive the sensing part 542 to move between the first position sensor 551 and the second position sensor 552. Thereby, by detecting the position of the sensing part 542 by the first position sensor 551 and the second position sensor 552, the distance of the driving member 53 driving the limiting member 54 to displace can be sensed, so as to automatically and accurately control and ensure the bonding or releasing state between the pick-and-place device 50 and the probe card P.

[0134] Refer to Figure 4A, in some embodiments, the pick-and-place device 50 further includes a fixing portion 56, which is a through-hole penetrating the pick-and-place device 50 for sleeving and fixing to the second positioning portion H5 of the probe card holder H. In these embodiments, the second positioning portion H5 protrudes from the bonding surface H1, and the height of the second positioning portion H5 on the probe card holder H is higher than the height of the bonding portion H2. In addition, one end of the second positioning portion H5 away from the bonding surface H1 is designed to be conical, so that the cross-sectional area of the second positioning portion H5 at the end away from the bonding surface H1 is smaller than the cross-sectional area at the end adjacent to the bonding surface H1. Thus, when the pick-and-place device 50 is docked with the probe card holder H, the second positioning portion H5 of the probe card holder H will contact the pick-and-place device 50 prior to the bonding portion H2, and based on the structural design of the second positioning portion H5, the fixing portion 56 of the pick-and-place device 50 first sleeved onto the end of the second positioning portion H5 with a smaller cross-sectional area, and then is gradually guided to sleeve onto the end of the second positioning portion H5 with a larger cross-sectional area, which can effectively improve the docking efficiency of the pick-and-place device 50 and the probe card holder H.

[0135] Refer to Figure 1 、 Figure 2 and cooperate with Figure 8 , in some embodiments, the probe card automatic storage system further includes a material connection area 60 to facilitate the loading and unloading of the probe card P. In these embodiments, the material connection area 60 and the storage cabinet 10 are respectively arranged around the guide rail 20. In some embodiments where the probe card automatic storage system includes the material connection area 60, the material connection area 60 is closer to the two ends of the guide rail 20 in the first direction D1 than the storage cabinet 10, which is more convenient for an Automated Guided Vehicle (AGV) or an operator to perform the loading and unloading of the probe card P.

[0136] Refer to Figure 8 , in some embodiments, the material connection area 60 includes a base 61 and a carrier 62, and the carrier 62 is linearly displaceably arranged on the base 61 to carry the probe card P. In these embodiments, at the position in the first direction D1, a part of the base 61 of the material connection area 60 overlaps with the guide rail 20, and the displacement range of the carrier 62 also partially overlaps with the guide rail 20. Thus, the carrier 62 can be displaced to a position beyond the guide rail 20, and the operator or the automated guided vehicle can perform the loading and unloading of the probe card P at a position outside the guide rail 20. After the loading and unloading of the probe card P is completed, the carrier 62 can be displaced back to the position corresponding to the guide rail 20, and the pick-and-place device 50 on the guide rail 20 can then be displaced here to pick and place the probe card P.

[0137] Refer to Figure 9, in some embodiments, the probe card automatic storage system further includes a first maintenance door 70A and a second maintenance door 70B. The first maintenance door 70A and the second maintenance door 70B are respectively disposed at two ends of the guide rail 20. Thus, during the process of the probe card transfer device T transferring the probe card P, the first maintenance door 70A and the second maintenance door 70B can be in a closed state to prevent the probe card transfer device T from being directly exposed. When the probe card transfer device T needs to be repaired, the first maintenance door 70A and the second maintenance door 70B can be in an open state to facilitate the maintenance by the operator.

[0138] Refer to Figure 8 and Figure 9 , in some embodiments, the probe card automatic storage system includes two storage cabinets 10, a probe card transfer device T, two material connection areas 60, a first maintenance door 70A and a second maintenance door 70B. In these embodiments, one of the storage cabinets 10 and one of the material connection areas 60 are disposed on one side of the guide rail 20 of the probe card transfer device T, and the other storage cabinet 10 and the other material connection area 60 are disposed on the other side of the guide rail 20. And each material connection area 60 is respectively adjacent to two ends of the guide rail 20 (as Figure 8 shown), that is, the positions of the material connection areas 60 in the first direction D1 do not overlap. The first maintenance door 70A is disposed adjacent to one end of the guide rail 20 in the first direction D1 and is connected between one of the storage cabinets 10 and one of the material connection areas 60. The second maintenance door 70B is disposed adjacent to the other end of the guide rail 20 in the first direction D1 and is connected between the other storage cabinet 10 and the other material connection area 60.

[0139] Thus, there are storage cabinets 10 on both sides of the probe card transfer device T for storing the probe card P, and the material connection areas 60 on both sides of the probe card transfer device T can respectively provide manual loading and unloading and automatic guided vehicle loading and unloading. The first maintenance door 70A, the second maintenance door 70B, each storage cabinet 10 and each material connection area 60 are disposed around the probe card transfer device T, thereby constructing a complete probe card transfer system. It should be noted that, as Figure 9 shown in the embodiments, it is only one configuration pattern, but the present application is not limited thereto. That is, the number of the storage cabinets 10 is not limited to two, and the number of the storage cabinets 10 can be increased or decreased according to the requirements, and the guide rail 20 can also be adjusted correspondingly according to the number of the storage cabinets 10; and the number and the configuration of the material connection areas 60 are not limited to the foregoing embodiments.

[0140] Refer to Figures 8 to 13, in some embodiments, the material connection area 60 includes a first material connection area 60A and a second material connection area 60B. The first material connection area 60A is located on one side of the probe card transfer device T and adjacent to one end of the guiding rail 20, and the second material connection area 60B is located on the other side of the probe card transfer device T and adjacent to the other end of the guiding rail 20.

[0141] Refer to Figure 8 , Figure 10 and Figure 11A , in these embodiments, the first material connection area 60A includes a base 61 and a carrier 62. The carrier 62 can be displaced to a position beyond the guiding rail 20 for operators to manually load and unload materials. Hereby, the first material connection area 60A can cooperate with the operators to perform manual loading and unloading or to repair the probe card P.

[0142] Refer to Figure 8 , Figure 10 and Figure 11A , in some embodiments where the material connection area 60 includes a first material connection area 60A and a second material connection area 60B, the first material connection area 60A further includes a first guiding component 63. The first guiding component 63 can be, but is not limited to, a combination including a linear slide rail and a linear slider. The first guiding component 63 is disposed between the base 61 and the carrier 62 to guide the linear displacement of the carrier 62. Hereby, the linear slide rail of the first guiding component 63 extends along the first direction D1 to guide the carrier 62 to displace along the first direction D1.

[0143] Refer to Figure 8 , Figure 10 , Figure 11A and cooperate with Figure 6 and Figure 7 , in some embodiments, the carrier 62 of the first material connection area 60A has a flat plate structure and includes an abutting edge 621, a receiving groove 622, and a limiting portion L. The abutting edge 621 protrudes from the carrier 62 and surrounds to form the receiving groove 622. The limiting portion L protrudes from the abutting edge 621 and can form a limit relative to the first positioning portion H4 of the probe card holder H. Hereby, the first positioning portion H4 of the probe card holder H is a circular through hole, and the limiting portion L is a convex column corresponding to the shape of the first positioning portion H4. The first positioning portion H4 of the probe card holder H can be sleeved on the limiting portion L to form a limit.

[0144] Refer to Figure 3 , Figure 5 and Figure 8, herein, when the probe card transfer device T desires to transfer the probe card P on the pick-and-place device 50 to the stage 62 of the first material connection area 60A, first, the stage 62 of the first material connection area 60A is transferred to a position overlapping the guiding rail 20. The probe card transfer device T is displaced along the first direction D1 through the guiding rail 20, and the carrying structure 40 is displaced along the second direction D2 and is displaced to a position where the pick-and-place device 50 on the probe card transfer device T corresponds to the stage 62 of the first material connection area 60A.

[0145] Refer to Figure 3 , Figure 5 and Figure 8 , then, the transfer arm 42 of the carrying structure 40 is displaced along the third direction D3 to extend the pick-and-place device 50 into the seat body 61 of the first material connection area 60A and is displaced to a position where the first positioning portion H4 of the probe card holder H is opposite to the limiting portion L of the stage 62. Then, the carrying structure 40 drives the pick-and-place device 50 to be displaced along the second direction D2 so that the first positioning portion H4 of the probe card holder H is sleeved on the limiting portion L on the stage 62, thereby forming a preliminary positioning. Then, the driving member 53 of the pick-and-place device 50 drives the limiting member 54 to be displaced to a position where the sleeving portion 5411 corresponds to the engaging portion H2 (as in Figure 6 state). The first body segment H21 of the engaging portion H2 can freely pass through the sleeving portion 5411, and the pick-and-place device 50 and the probe card holder H are released from each other, thereby controlling the probe card holder H and the probe card P thereon to be separated from the pick-and-place device 50 and be placed on the stage 62. In these embodiments, when the probe card P is placed on the stage 62, a part of the probe card holder H can extend into the receiving groove 622, and a part can abut against the abutting edge 621 (as in Figure 11A shown), thereby improving the stability of the probe card holder H placed on the stage 62.

[0146] Refer to Figure 3 , Figure 8 , Figure 10 and Figure 11A , and when it is desired to take out the probe card P placed in the first material connection area 60A through the probe card transfer device T, the probe card P is placed on the stage 62 of the first material connection area 60A together with the probe card holder H. First, the stage 62 of the first material connection area 60A is controlled to be displaced along the first direction D1 to a position overlapping the guiding rail 20. Then, the probe card transfer device T is displaced along the first direction D1 through the guiding rail 20, and the carrying structure 40 is displaced along the second direction D2 and is displaced to a position where the fixing portion 56 on the pick-and-place device 50 corresponds to the second positioning portion H5 of the probe card holder H.

[0147] Refer to Figure 3 , Figure 5 , Figure 8 , Figure 10 and Figure 11A, then, the transfer arm 42 of the carrier structure 40 is displaced along the third direction D3 to extend the pick-and-place device 50 onto the seat body 61 in the first material connection area 60A, and is displaced to the position where the fixing part 56 of the pick-and-place device 50 is opposite to the second positioning part H5 of the probe card holder H; in this state, the position of the sleeved part 5411 of the limiting part 54 of the pick-and-place device 50 corresponds to the position of the joint part H2 (as Figure 6 state), then control the carrier structure 40 to be displaced along the second direction D2 to drive the pick-and-place device 50 so that the sleeved part 5411 is sleeved on the first body segment H21 of the joint part H2, and then control the driving part 53 to drive the limiting part 54 to be displaced to the position where the limiting part 5412 corresponds to the joint part H2 (as Figure 7 state), in this state, the limiting part 5412 of the limiting part 54 is correspondingly sleeved on the second body segment H22 of the joint part H2, and the first body segment H21 is limited outside the limiting part 5412. In this way, a limit is generated between the first body segment H21 of the joint part H2 and the limiting part 54, and the probe card holder H can be combined with the pick-and-place device 50. Then, the carrier structure 40 can be displaced along the second direction D2 so that the pick-and-place device 50 together with the probe card holder H is disengaged from the limiting part L on the carrier table 62, and at the same time, the probe card P in the first material connection area 60A is taken out.

[0148] Refer to Figure 8 , Figure 12 and Figure 13 , in some embodiments, the second material connection area 60B includes a seat body 61, a carrier table 62, a second guiding component 64 and a rotating module 65. The second guiding component 64 can be, but is not limited to, a combination of a linear slide rail and a linear slider. The second guiding component 64 is arranged between the seat body 61 and the carrier table 62 in the second material connection area 60B to guide the linear displacement of the carrier table 62. Herein, the linear slide rail of the second guiding component 64 extends along the first direction D1 to guide the carrier table 62 to be displaced along the first direction D1, and the carrier table 62 of the second material connection area 60B can refer to the description of the carrier table 62 in the first material connection area 60A, and will not be elaborated here.

[0149] Refer to Figure 12 and Figure 13 , in some embodiments, the carrier table 62 of the second material connection area 60B is a hollow box structure and has a device space 623. The rotating module 65 includes a driving source 651 and a turntable 652. The driving source 651 of the rotating module 65 is accommodated in the device space 623 and is connected to the turntable 652 through a rotating shaft. The turntable 652 is exposed on one surface of the carrier table 62 to carry the probe card P. In these embodiments, the driving source 651 can be, but is not limited to, a rotating motor.

[0150] Refer to Figure 3 , Figure 5 , Figure 8 ,Figure 12 and Figure 13 For the probe card transfer device T to transfer the probe card P on the pick-and-place device 50 to the second material connection area 60B, the operation process is the same as that of the probe card transfer device T transferring the probe card P on the pick-and-place device 50 to the first material connection area 60A. In addition, the operation process of the probe card transfer device T taking out the probe card P placed in the second material connection area 60B is roughly the same as the way of the probe card transfer device T taking out the probe card P placed in the first material connection area 60A. The difference is that the second material connection area 60B is provided with a rotation module 65. The turntable 652 of the rotation module 65 can rotate to change the angle of the probe card holder H to match the position of the pick-and-place device 50 of the probe card transfer device T and the probe card holder H. The rest of the operations are the same, so they will not be elaborated here.

[0151] After the probe card transfer device T transfers the probe card P to the turntable 652 of the second material connection area 60B, the turntable 652 can rotate to change the angle of the probe card holder H to an angle that allows the automated guided vehicle to pick up and place the probe card P through the probe card holder H, thereby enabling the automated guided vehicle to load and unload materials in the material connection area 60. In these embodiments, since the material connection area 60 is suitable for the automated guided vehicle to load and unload materials, it is also possible to rely on the automated guided vehicle to transfer the probe card P to the testing machine for testing work, improving convenience.

[0152] Refer to Figure 3 、 Figure 5 、 Figure 8 、 Figure 12 and Figure 13 For the operation process of the probe card transfer device T taking out the probe card P placed in the second material connection area 60B, it is roughly the same as the way of the probe card transfer device T taking out the probe card P placed in the first material connection area 60A. The difference is that the second material connection area 60B is provided with a rotation module 65. The turntable 652 of the rotation module 65 can rotate to change the angle of the probe card holder H to match the position of the pick-and-place device 50 of the probe card transfer device T and the probe card holder H. The rest of the operations are the same, so they will not be elaborated here.

[0153] As can be seen from the foregoing, in some embodiments where the probe card automated storage system includes both the first material connection area 60A and the second material connection area 60B, the first material connection area 60A can be used by the operator for manual loading and unloading or maintenance of the probe card P, and the second material connection area 60B can be used by the automated guided vehicle for automated loading and unloading. The first material connection area 60A and the second material connection area 60B set at different positions can provide a configuration diversion of different working spaces, which can not only meet various different needs, but also fully improve the storage efficiency.

[0154] Refer to Figure 10 and Figure 11B In some embodiments, the storage cabinet 10 disposed around the probe card transfer device T includes at least two partitions 11, each partition 11 is spaced apart in the second direction D2, and storage spaces S are respectively formed between the partitions 11. In these embodiments, the storage cabinet 10 includes at least two storage spaces S disposed along the second direction D2, thereby increasing the storage quantity of the probe cards P. Herein, the storage cabinet 10 can be, but is not limited to, an open storage cabinet or a closed nitrogen storage cabinet. In addition, in some embodiments, the storage cabinet 10 includes at least two limiting portions L, the limiting portions L protrude from the partitions 11 and can form a limit relative to the first positioning portion H4 of the probe card holder H.

[0155] Refer to Figure 12 In some embodiments, the storage cabinet 10 includes an openable and closable first door panel 12, and the first door panel 12 can be opened and closed relative to each storage space S. Thus, the first door panel 12 of the storage cabinet 10 can be opened by an operator to repair the storage cabinet 10 or check the storage status of the probe cards P.

[0156] Refer to Figure 10 and Figure 12 In some embodiments, the storage cabinet 10 includes a first storage cabinet 10A and a second storage cabinet 10B. In these embodiments, the storage space S of the first storage cabinet 10A has an opening S1, the first storage cabinet 10A faces the probe card transfer device T with the opening S1 of the storage space S, and the first door panel 12 of the first storage cabinet 10A faces a side different from the probe card transfer device T. Thus, the probe card transfer device T can pick up and place the probe cards P from and into the open opening S1.

[0157] Refer to Figure 12 In some embodiments, the second storage cabinet 10B further includes a second door panel 13 and a nitrogen module 14. The second door panel 13 is opposite to the first door panel 12 and can be opened and closed relative to each storage space S respectively. The first door panel 12, the second door panel 13 and the partitions 11 of the second storage cabinet 10B can form a closed storage space S, and the nitrogen module 14 can supply nitrogen to each storage space S of the second storage cabinet 10B. Thus, the second storage cabinet 10B provides a closed space that needs to be stored in a nitrogen environment to facilitate the storage of the probe cards P.

[0158] Refer to Figure 8 and Figure 10, in some embodiments, the storage cabinet 10 further includes a detection module 15 and an alignment module 16. The detection module 15 and the alignment module 16 can be further provided in the storage space S. The detection module 15 can detect whether a probe card P has been stored in each storage space S, so as to monitor the storage status of the probe card P in each storage space S. The alignment module 16 can confirm whether the position where the probe card P is stored in each storage space S is correct, ensure that the probe card P is placed in the correct position, and facilitate the transfer of the probe card by the probe card transfer device T.

[0159] Refer to Figure 3 , Figure 5 and Figure 8 , herein, when the probe card transfer device T wants to transfer and store the probe card P on the picking device 50 into the storage space S of the storage cabinet 10, first, the probe card transfer device T displaces along the first direction D1 through the guide rail 20, the bearing structure 40 displaces along the second direction D2 and the third direction D3, and the picking device 50 together with the probe card P extends into the storage space S from the opening S1, and moves the first positioning portion H4 to a position relative to the limiting portion L.

[0160] Refer to Figures 5 to 8 , then, the bearing structure 40 drives the picking device 50 to displace along the second direction D2 so that the first positioning portion H4 of the probe card holder H is sleeved through the limiting portion L on the partition 11, thereby forming a preliminary positioning; then, the driving member 53 of the picking device 50 releases the fixed relationship between the picking device 50 and the probe card holder H, so as to control the probe card holder H and the probe card P thereon to break away from the picking device 50 and be placed on the partition 11 of the storage cabinet 10 for storage in the storage space S.

[0161] Refer to Figure 3 , Figure 8 and Figure 11B , and when the probe card P stored in the storage space S is to be taken out through the probe card transfer device T, the probe card P is placed on the partition 11 in the storage space S of the storage cabinet 10 together with the probe card holder H. First, the probe card transfer device T displaces along the first direction D1 through the guide rail 20, the bearing structure 40 displaces along the second direction D2 and the third direction D3, and the displacement extends the picking device 50 from the opening S1 into the storage space S where the probe card P is stored. When the picking device 50 displaces to a position where the fixing portion 56 is opposite to the second positioning portion H5, the sleeving portion 5411 of the limiting member 54 will also correspond to the position of the engaging portion H2 (as Figure 6 state).

[0162] Refer to Figure 3 , Figures 5 to 8 and Figure 11B, then control the displacement of the carrier structure 40 along the second direction D2 to drive the pick-and-place device 50 to sleevedly fit the first body segment H21 of the joint portion H2 with the sleeved portion 5411, and then drive the displacement of the limiting member 54 through the driving member 53 (such as Figure 7 status), so as to generate a restriction between the joint portion H2 and the limiting member 54, and the probe card holder H can be combined with the pick-and-place device 50. Thus, the pick-and-place device 50 can take out the probe card P in the storage space S.

[0163] Refer to Figure 14 , in some embodiments, the probe card automatic storage system further includes a control module 80. The control module 80 includes a controller 81, a scanning device 82 and a database 83. The controller 81 is signal-connected to the storage cabinet 10, the probe card transfer device T, the material connection area 60, the scanning device 82 and the database 83. Thus, the controller 81 can control the displacement of the vertical frame 30 on the guide rail 20, control the displacement of the transfer arm 42 of the carrier structure 40, control the pick-and-place action of the pick-and-place device 50 and control the operation of the material connection area 60.

[0164] The scanning device 82 can be a manual scanning device or an automatic scanning device. In some embodiments, the scanning device 82 is not limited to be disposed in the material connection area 60. Each probe card P includes identification information. When the probe card P passes through the material connection area 60, the scanning device 82 scans the identification information of the probe card P to obtain the information of the probe card P and then stores the probe card P information into the database 83. Thus, the information of the probe card P stored in or removed from the probe card automatic storage system can be accurately monitored.

[0165] In some embodiments, the database 83 stores a storage data table. The storage data table includes the probe card classification applicable to the probe card automatic storage system and the storage status of the corresponding storage cabinet 10. In these embodiments, when storing the probe card P into the probe card automatic storage system, the scanning device 82 can scan the identification information of the probe card P and compare it with the storage data table of the database 83. The controller 81 can automatically control to transfer and store the probe card P into a suitable storage cabinet 10 according to the classification of the probe card P, and store the storage status of the storage space S in the storage cabinet 10 into the database 83 through the detection module 15 in the storage cabinet 10, so as to achieve real-time monitoring of the storage quantity and position of the stored probe card P and the storage space S to be stored. Moreover, the controller 81 can control the probe card transfer device T to pick and place the probe card P in the storage space S corresponding to the storage cabinet 10 according to the information in the storage data table.

[0166] Refer to Figure 14, in some embodiments, the control module 80 further includes a display 84. The display 84 is electrically connected to the controller 81, the scanning device 82, and the database 83. Thus, the controller 81 can display various information of the probe card automatic storage system (such as but not limited to the identification information of the probe card P scanned by the scanning device 82, the storage information of the probe card P in the database 83, the operation information or abnormal information in the current operation) on the display 84 for the operator to view, thereby improving the usability.

Claims

1. An automatic storage system for a probe card, characterized in that, Comprising: A storage cabinet; And A probe card transfer device adapted to transfer a probe card, which is held on a probe card holder having a coupling portion, comprising: A guiding rail extending in a first direction and located around the storage cabinet; A vertical frame extending in a second direction perpendicular to the first direction, the vertical frame being displaceably arranged on the guiding rail along the first direction; A carrying structure displaceably arranged on the vertical frame along the second direction and including a transfer arm, the transfer arm being displaceable along a third direction perpendicular to the first direction and the second direction; and A picking and placing device arranged on the transfer arm for detachably coupling to the coupling portion.

2. The probe card automatic storage system according to claim 1, wherein, The picking and placing device includes a driving member and a limiting member, the limiting member having a sleeve portion and a limiting portion, the driving member is connected to the limiting member and can drive the limiting member to align the sleeve portion or the limiting portion with the coupling portion. When the sleeve portion aligns with the coupling portion, the picking and placing device is separated from the coupling portion. When the limiting portion aligns with the coupling portion, the picking and placing device is coupled to the coupling portion.

3. The probe card automatic storage system according to claim 2, wherein The coupling portion includes an abutting first body segment and a second body segment, the cross-sectional area of the first body segment is larger than that of the second body segment, the limiting member has a limiting groove, the limiting groove includes the sleeve portion and the limiting portion that are abutted to each other, the shape of the sleeve portion corresponds to the shape of the first body segment, and the shape of the limiting portion corresponds to the shape of the second body segment.

4. The probe card automatic storage system according to claim 2, wherein The picking and placing device further includes a first component and a second component, the first component is fixed to the transfer arm, the driving member is fixed to the first component, the second component is fixed to the first component, and the limiting member is displaceably clamped between the first component and the second component.

5. The probe card automatic storage system according to claim 1, characterized in that The guiding rail includes at least two rail modules, each of the rail modules extends along the first direction, and the rail modules are arranged and spliced along the first direction.

6. The probe card automatic storage system according to claim 1, characterized in that, The carrying structure includes a frame body and two transfer arms, the frame body is displaceably arranged on the vertical frame along the second direction, the two transfer arms are arranged on opposite sides within the frame body, and the two transfer arms can be displaced along the third direction on both sides of the frame body in the third direction.

7. The probe card automatic storage system according to claim 1, further comprising a material connection area, the material connection area includes a seat body and a carrier, the carrier is linearly displaceably arranged on the seat body to carry the probe card.

8. The probe card automatic storage system according to claim 7, characterized in that The material connection area further includes a rotation module, the rotation module is rotatably arranged within the carrier.

9. The probe card automatic storage system according to claim 7, wherein The carrier is displaced along the first direction, and the displacement range of the carrier along the first direction partially overlaps with the guiding rail and partially does not overlap with the guiding rail.

10. The probe card automatic storage system according to claim 1, further comprising a material connection area, the material connection area includes a first material connection area and a second material connection area arranged adjacent to both ends of the guiding rail.

11. The probe card automatic warehousing system according to claim 1, characterized in that The storage cabinet includes at least two storage spaces, and the at least two storage spaces are arranged overlappingly along the second direction.

12. The probe card automatic storage system according to claim 1, further comprising a first maintenance door and a second maintenance door, the first maintenance door and the second maintenance door are respectively arranged at both ends of the guiding rail.

13. The probe card automatic storage system according to claim 10 further includes a control module, which includes a controller, a scanning device, and a database. The controller is signal-connected to the storage cabinet, the probe card transfer device, the material connection area, the scanning device, and the database.

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