Heat treatment device and guide roller for heat treatment device

Abstract

The invention relates to a heat treatment apparatus and a guide roller for the heat treatment apparatus. The heat treatment apparatus includes a transport device, an outer wall, and a guide roller. The transport device transports an object to be processed. The outer wall has therein a processing space in which an object to be processed is processed while being conveyed. The guide roller is arranged in the processing space and is used for guiding the processed object. The guide roller includes a shaft, a first bearing, a second bearing, a cylindrical roller body, a first cover, and a second cover. The first cover and the second cover block the gap between the inner ring and the outer ring on the outer sides of the first bearing and the second bearing in the axial direction of the shaft.

Description

Technical Field

[0001] The present disclosure relates to a heat treatment apparatus and a guide roll for a heat treatment apparatus. Background Art

[0002] A heat treatment apparatus including an unwinding section, a heat treatment section, a cooling section, and a winding section is disclosed in Japanese Patent No. 7285360. A strip-shaped sheet before heat treatment is unwound from the unwinding section. In the heat treatment section, the sheet is heat-treated while being conveyed. In the cooling section, the sheet heat-treated by the heat treatment section is cooled while being conveyed. In the winding section, the strip-shaped sheet cooled by the cooling section is wound. In the unwinding section, the heat treatment section, the cooling section, and the winding section, the conveyed sheet is guided by guide rolls.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Patent No. 7285360 Summary of the Invention

[0006] In addition, the present inventor aims to improve the cleanliness of the processing space where the object to be processed is processed.

[0007] The heat treatment apparatus disclosed herein includes a conveying device, an outer wall, and guide rolls. The conveying device conveys the object to be processed. The outer wall has a processing space inside where the object to be processed is processed while being conveyed. The guide rolls are disposed in the processing space and are used to guide the object to be processed. The guide roll includes a shaft, a first bearing and a second bearing, a cylindrical roll body, and a first cover and a second cover. The first bearing and the second bearing are mounted at intervals in the axial direction of the shaft. The roll body is rotatably mounted relative to the shaft by means of the first bearing and the second bearing. Both the first bearing and the second bearing include an inner ring, an outer ring, rolling elements, and a retainer. The first cover and the second cover respectively block the gap between the inner ring and the outer ring on the outer sides along the axial direction of the first bearing and the second bearing. In this heat treatment apparatus, the cleanliness of the processing space where the object to be processed is processed is improved. Brief Description of the Drawings

[0008] Figure 1 is a schematic view showing the heat treatment apparatus 10.

[0009] Figure 2 is a schematic view showing the drive mechanism of the object to be processed A.

[0010] Figure 3 is a schematic view of the guide roll 45.

[0011] Figure 4 is a schematic view of the second support member 44b. Detailed Description

[0012] Hereinafter, one of the embodiments in the present disclosure will be described in detail with reference to the attached Figure 1 drawings. It should be noted that in the following drawings, components and parts that perform the same function are denoted by the same reference numerals and described. In addition, the dimensional relationships (length, width, thickness, etc.) in each drawing do not reflect the actual dimensional relationships. The orientations of up, down, left, right, front, and back are indicated by the arrows of U, D, L, R, F, and Rr in the drawings. Here, the orientations of up, down, left, right, front, and back are only defined for the convenience of description, and the invention of the present application is not limited as long as it is not particularly mentioned.

[0013] <Heat treatment apparatus 10>

[0014] Figure 1 is a schematic diagram showing the heat treatment apparatus 10. The heat treatment apparatus 10 is a device for heat-treating a strip-shaped (sheet-shaped) object to be processed A. In this embodiment, the heat treatment apparatus 10 is a device for continuously drying a strip-shaped object to be processed while transporting it in a so-called roll-to-roll manner. The object to be processed A is not particularly limited as long as it is a strip-shaped member such as an electrode sheet of a secondary battery in which electrode materials are respectively coated on both sides of a sheet substrate, a flexible copper clad laminate (FCCL), a polyimide sheet, etc. The heat treatment apparatus 10 can be used for processing various strip-shaped (sheet-shaped) objects to be processed.

[0015] The heat treatment apparatus 10 includes transport devices 20, 22 (refer to Figure 2 ), an outer wall 41 (refer to Figure 1 ), and guide rollers 45 (refer to Figure 1 ).

[0016] As Figure 1 shown, the heat treatment apparatus 10 includes an unwinding section 30, a heat treatment section 40, a cooling section 50, and a winding section 60.

[0017] The strip-shaped object to be processed A is transported and processed in the order of the unwinding section 30, the heat treatment section 40, the cooling section 50, and the winding section 60. The object to be processed A is unwound from an unwinding reel A1 provided in the unwinding section 30, heat-treated by the heat treatment section 40, cooled by the cooling section 50, and then wound by a winding reel A2 provided in the winding section 60.

[0018] <Transport devices 20, 22>

[0019] Figure 2 is a schematic diagram showing the drive mechanism of the object to be processed A. In Figure 2In this case, the heating treatment unit 40 and the cooling unit 50 between the unwinding unit 30 and the winding unit 60 are omitted. The conveying devices 20 and 22 are devices for conveying the object to be processed A. The object to be processed A is conveyed along a predetermined conveying path. As Figure 2 shown, the conveying devices 20 and 22 are respectively devices for rotationally driving the unwinding shaft 32 equipped with the unwinding reel A1 of the unwinding unit 30 and the winding shaft 62 equipped with the winding reel A2 of the winding unit 60. In this embodiment, motors are used as the conveying devices 20 and 22. The conveying devices 20 and 22 can be constituted by a device for controlling the conveyance of the object to be processed A. As the conveying devices 20 and 22, for example, a motor and an inverter can be used, or a servo motor etc. can also be used.

[0020] In addition, the conveying devices 20 and 22 can also include a device for controlling the tension acting on the object to be processed A. As the device for controlling the tension, for example, a magnetic powder clutch can be used. The conveying devices 20 and 22 can also be realized by a series of devices in which a device for controlling the conveying speed and a device for controlling the tension cooperate with each other.

[0021] The conveying devices 20 and 22 are respectively installed on the outer wall 31 of the unwinding unit 30 and the outer wall 61 of the winding unit 60. The unwinding shaft 32 is connected to the conveying device 20. The unwinding shaft 32 is rotationally driven by the conveying device 20, and the object to be processed A is unwound from the unwinding reel A1. The winding shaft 62 is connected to the conveying device 22. The winding shaft 62 is rotationally driven by the conveying device 22, and the object to be processed A is wound by the winding reel A2. The conveying devices 20 and 22 can be respectively arranged in an air box provided in the space surrounded by the outer walls 31 and 61.

[0022] In order to improve the processing efficiency of the object to be processed A, the heat treatment device 10 is configured to be able to convey the object to be processed A at a relatively high speed. Although not particularly limited, the conveying speed of the object to be processed A can be set to about 1 m / minute to 200 m / minute. In this embodiment, the conveying speed of the object to be processed A is set to about 100 m / minute.

[0023] In the heat treatment device 10, the conveying speed of the object to be processed A is controlled by the control device 24.

[0024] <Control device 24>

[0025] The control device 24 controls the conveyance speed of the object to be processed A, the tension applied to the object to be processed A, etc., so as to convey the object to be processed A according to predetermined conveyance conditions. In this embodiment, the control device 24 controls the unwinding tension when the object to be processed A is unwound, the in-furnace tension applied to the object to be processed A being processed, and the winding tension when the object to be processed A after the winding process is wound. The control device 24 is connected to the conveyance devices 20 and 22. In addition, the control device 24 is connected to the tension detection roller 35b, the feed roller 35c, the tension adjustment roller 35d, the tension detection roller 65c, etc. The control device 24 feeds back the unwinding tension detected by the tension detection roller 35b to the conveyance device 20 and controls the torque of the unwind shaft 32. Thereby, the unwinding tension is adjusted. In addition, the control device 24 feeds back the in-furnace tension detected by the tension detection roller 35b on which the object to be processed A being processed is hung to the tension adjustment roller 35d. The tension adjustment roller 35d moves according to the detected in-furnace tension. Thereby, the in-furnace tension is adjusted. It should be noted that the rotation speed of the feed roller 35c is controlled so that the position of the tension adjustment roller 35d returns to the reference position in a state where the in-furnace tension is constant. In addition, the control device 24 feeds back the winding tension detected by the tension detection roller 65c to the conveyance device 22 and controls the torque of the winding shaft 62. Thereby, the winding tension is adjusted.

[0026] <Unwinding section 30>

[0027] As Figure 1 shown, the unwinding section 30 houses an unwind reel A1 in a state where the object to be processed A before heat treatment is wound around it.

[0028] The unwinding section 30 has an outer wall 31 that surrounds the internal equipment and the unwind reel A1. An unwind shaft 32 and a plurality of rollers 35 are provided inside the unwinding section 30. The unwind shaft 32 is a shaft on which the unwind reel A1 around which the object to be processed A before heat treatment is wound is installed. In this embodiment, the object to be processed A is unwound from the unwind reel A1 installed on the unwind shaft 32 by rotating and driving the unwind shaft 32.

[0029] A plurality of rollers 35 that set the conveyance path of the object to be processed A are provided in the space surrounded by the outer wall 31 of the unwinding section 30. The object to be processed A unwound from the unwind reel A1 is wound around the plurality of rollers 35 in a predetermined order and is conveyed toward the heat treatment section 40.

[0030] The plurality of rollers 35 include a guide roller 35a, a tension detection roller 35b, a feed roller 35c, and a tension adjustment roller 35d. The tension detection roller 35b is a roller for detecting the tension acting on the object to be processed A. A tension detector (not shown) is installed on the tension detection roller 35b. The tension adjustment roller 35d is configured to be movable within a predetermined range. The tension of the object to be processed A is adjusted by moving the tension adjustment roller 35d. The feed roller 35c is rotationally driven by a driving device (not shown). The position of the tension adjustment roller 35d is adjusted by controlling the rotation of the feed roller 35c.

[0031] <Heat treatment unit 40>

[0032] The heat treatment unit 40 is a device that heats and treats the strip-shaped object to be processed A while transporting it. The heat treatment unit 40 is connected to the unwinding unit 30 via a connecting unit 70. At the connecting unit 70, there are provided an outlet of the unwinding unit 30 and an inlet of the heat treatment unit 40. A passage for the object to be processed A is formed at the connecting unit 70. The object to be processed A is transported from the unwinding unit 30 to the heat treatment unit 40 through the connecting unit 70. The passage of the object to be processed A formed at the connecting unit 70 is set to a size slightly larger than the width and thickness of the object to be processed A. Thus, the atmosphere of the heat treatment unit 40 and the atmosphere of the unwinding unit 30 are not easily interfered with each other.

[0033] The heat treatment unit 40 includes an outer wall 41 (furnace body 41), a heater 42, and guide rollers 45 (45a to 45d). The outer wall 41 has a processing space 40a inside for the object to be processed A to be processed while being transported. The outer wall 41 surrounds the processing space 40a in which the heater 42 and the guide rollers 45 are arranged.

[0034] <Guide roller 45>

[0035] The guide rollers 45 are provided inside the processing space 40a. The guide rollers 45 are rollers for guiding the object to be processed A. The transport path for transporting the object to be processed A is set by the guide rollers 45. The guide rollers 45 are configured to rotate idly as the object to be processed A is transported. In this embodiment, the guide rollers 45 are substantially cylindrical rollers. The guide roller 45a is provided near the inlet (connecting unit 70) of the heat treatment unit 40. A plurality of guide rollers 45b are arranged at a predetermined interval from the inlet toward the outlet below the heat treatment unit 40. A plurality of guide rollers 45c are arranged above the heat treatment unit 40, offset by a half pitch from the plurality of guide rollers 45b. The guide roller 45d is provided near the outlet (connecting unit 72) of the heat treatment unit 40.

[0036] The object to be processed A is hung on the guide roller 45a near the entrance of the heat treatment unit 40 and transported downward. After that, the object to be processed A is successively and alternately wound around the upper and lower guide rollers 45b and 45c from the entrance toward the exit. Thus, in the heat treatment unit 40, the object to be processed A advances while moving up and down from the entrance toward the exit.

[0037] <Heater 42>

[0038] The heater 42 is a device for heating the object to be processed A. In this embodiment, the heater 42 is disposed around the object to be processed A that advances from the entrance toward the exit while turning back up and down. The heater 42 is also arranged in the gap of the object to be processed A that is hung on the guide rollers 45b and 45c and turns back up and down. The heater 42 is arranged in a manner facing the object to be processed A. The heater 42 can also be fixed by, for example, a heater bracket and a pillar.

[0039] In this embodiment, as the heater 42, a far-infrared heating type plate heater is used. As the heater 42, various heaters can be used according to the heating temperature, heating atmosphere, etc. As the heater 42, in addition to, for example, a plate heater, a cylindrical heater can also be used. The material of the heater 42 is not particularly limited, and a sheathed heater, a ceramic heater, a lamp heater, etc. can also be used. In addition, the heater 42 is not limited to a far-infrared heating type heater. In the case of an atmosphere furnace, as the heater 42, a hot air heating type heater that blows hot air to the object to be processed or an infrared heating type lamp heater can also be used. The object to be processed A after heat treatment is transported out toward the cooling unit 50 through the guide roller 45d provided near the exit.

[0040] <Cooling unit 50>

[0041] The cooling unit 50 is a device that cools the object to be processed A while transporting it, which has been heat-treated by the heat treatment unit 40. The cooling unit 50 is connected to the heat treatment unit 40 via the connection part 72. At the connection part 72, the exit of the heat treatment unit 40 and the entrance of the cooling unit 50 are provided.

[0042] Similar to the connection part 70, a passage for the object to be processed A to pass through is formed in the connection part 72. Since the structure of the connection part 72 can be made the same as that of the connection part 70, a detailed description thereof is omitted.

[0043] The cooling unit 50 includes a cooling roller 52, a plurality of guide rollers 55, and an outer wall 51. The outer wall 51 surrounds a processing space 50a in which a plurality of cooling rollers 52 and a plurality of guide rollers 55 are arranged. In this embodiment, a plurality of cooling rollers 52 are provided in the cooling unit 50. The plurality of cooling rollers 52 and the plurality of guide rollers 55 define a conveyance path for conveying the object to be processed A in the cooling unit 50. The cooling roller 52 may be a single one, but preferably a plurality of them.

[0044] <Cooling roller 52>

[0045] The cooling roller 52 is a roller configured to allow a refrigerant to flow therethrough. The object to be processed A is cooled by contacting the surface of the cooling roller 52. The cooling roller 52 includes a first cooling roller 52a and a second cooling roller 52b. The first cooling roller 52a is a cooling roller around which the object to be processed A is wound so that one surface of the object to be processed A contacts the first cooling roller 52a. The second cooling roller 52b is a cooling roller around which the object to be processed A is wound so that the other surface of the object to be processed A contacts the second cooling roller 52b. In this embodiment, a driving device (not shown) is connected to the cooling roller 52. The cooling roller 52 rotates in accordance with the set conveyance speed along the conveyance direction. In this embodiment, the object to be processed A is cooled to about room temperature in the cooling unit 50. The temperature of the cooled object to be processed A is not particularly limited.

[0046] A plurality of the first cooling rollers 52a and a plurality of the second cooling rollers 52b are respectively provided (four each in this embodiment). The number of the cooling rollers 52 is not particularly limited. The first cooling roller 52a and the second cooling roller 52b may be provided, for example, one each respectively.

[0047] A plurality of the first cooling rollers 52a are arranged in a row along the height direction at a predetermined interval in front of (the outlet side of) the cooling unit 50. A plurality of the second cooling rollers 52b are arranged in a row along the height direction at a predetermined interval behind (the inlet side of) the cooling unit 50. The intervals between adjacent first cooling rollers 52a and between adjacent second cooling rollers 52b are respectively set to be narrower than the outer diameter of the cooling roller 52. It should be noted that the arrangement of the first cooling roller 52a and the second cooling roller 52b is not particularly limited.

[0048] Here, the first cooling roller 52a and the second cooling roller 52b are arranged at the same interval. The height of the second cooling roller 52b is sequentially arranged at a position half an interval higher than that of the first cooling roller 52a from the lower side. Thus, the plurality of first cooling rollers 52a and the plurality of second cooling rollers 52b are arranged in a staggered manner in height in front of and behind the cooling unit 50 in sequence. In other words, the plurality of first cooling rollers 52a and the plurality of second cooling rollers 52b are arranged in a staggered manner. Thereby, the cooling unit 50 can be made into a structure that is longer in the height direction. On the other hand, the installation area of the cooling unit 50 can be reduced, and space saving of the equipment can be achieved.

[0049] <Deflection roller 55>

[0050] The deflection roller 55 (55a to 55d) is a roller that deflects the object to be processed A. In this embodiment, the deflection roller 55 is a substantially cylindrical roller. In the cooling unit 50, a conveyance path for the object to be processed A is set by a plurality of deflection rollers 55 in such a manner that it passes through a plurality of cooling rollers 52 from the inlet (connection part 72) and goes to the outlet (connection part 74). The plurality of deflection rollers 55 may also include a tension detection roller that detects the tension acting on the object to be processed A.

[0051] The object to be processed A is introduced into the cooling unit 50 from the inlet of the cooling unit 50 through the deflection roller 55a. The object to be processed A is conveyed downward. The object to be processed A is conveyed to the first cooling roller 52a disposed at the lowermost end through the deflection roller 55b. The object to be processed A is alternately wound around the first cooling roller 52a and the second cooling roller 52b in order from the lower side, and is conveyed from the second cooling roller 52b at the uppermost end toward the deflection roller 55c. The object to be processed A is conveyed downward through the deflection roller 55c, and is conveyed from the outlet of the cooling unit 50 to the winding unit 60 through the deflection roller 55d. Here, the object to be processed A is wound in such a manner that different surfaces of the object to be processed A come into contact with the first cooling roller 52a and the second cooling roller 52b in sequence.

[0052] The cooling unit 50 is connected to the winding unit 60 via the connection part 74. The connection part 74 has an outlet of the cooling unit 50 and an inlet of the winding unit 60. The cooled object to be processed A is conveyed to the winding unit 60 through the connection part 74.

[0053] <Winding unit 60>

[0054] The winding unit 60 is a device for winding the object to be processed A. The winding unit 60 houses a winding reel A2 for winding the object to be processed A cooled by the cooling roller 52.

[0055] The winding unit 60 has an outer wall 61 that surrounds the internal device and the winding reel A2. A winding shaft 62 and a plurality of rollers 65 are provided in the winding unit 60. The winding reel A2 on which the object to be processed A heat-treated by the heat treatment unit 40 and cooled by the cooling unit 50 is wound is mounted on the winding shaft 62. The object to be processed A is wound onto the winding reel A2 by rotationally driving the winding shaft 62.

[0056] In the space surrounded by the outer wall 61 of the winding unit 60, a plurality of rollers 65 for setting the conveyance path of the object to be processed A are provided. The plurality of rollers 65 set the conveyance path for conveying the object to be processed A in the winding unit 60. After the object to be processed A conveyed from the cooling unit 50 is hung on the roller 65 near the entrance (connection unit 74) of the winding unit 60, it is wound around the plurality of rollers 65 in a predetermined order and wound up by the winding reel A2. The plurality of rollers 65 include a guide roller 65a, a tension adjusting roller 65b, a tension detecting roller 65c, and a feed roller 65d. The tension adjusting roller 65b is configured to be movable within a predetermined range. The tension adjusting roller 65b can move, for example, to ensure the required extra length of the object to be processed A when replacing the winding reel A2. A tension detector (not shown) is installed on the tension detecting roller 65c. When the object to be processed A is pasted on the replaced winding reel A2 by the feed roller 65d when replacing the winding reel A2, the extra length required for pasting is sent out.

[0057] <Vacuum pump 80>

[0058] The heat treatment apparatus 10 is provided with a vacuum pump 80. The spaces inside the above-described unwinding unit 30, heat treatment unit 40, cooling unit 50, and winding unit 60 are respectively surrounded by outer walls 31, 41, 51, and 61. Each of the unwinding unit 30, heat treatment unit 40, cooling unit 50, and winding unit 60 has a space separated from the external space by the outer walls 31, 41, 51, and 61, respectively. The spaces inside the outer walls 31, 41, 51, and 61 are connected during the processing of the object to be processed A. The vacuum pump 80 is connected to each of the outer walls 31, 41, 51, and 61 of each unit.

[0059] The vacuum pump 80 decompresses the spaces inside the unwinding unit 30, heat treatment unit 40, cooling unit 50, and winding unit 60 (the processing spaces 40a and 50a in the heat treatment unit 40 and cooling unit 50). In this embodiment, the object to be processed A is processed in a predetermined vacuum atmosphere lower than the atmospheric pressure.

[0060] It should be noted that the connection method of the vacuum pump 80 is not particularly limited. It may be that a plurality of vacuum pumps 80 are provided, and the plurality of vacuum pumps 80 are respectively connected to each of the unwinding unit 30, heat treatment unit 40, cooling unit 50, and winding unit 60. Alternatively, pipes may be branched from one vacuum pump 80 to decompress the interiors of a plurality of units among the unwinding unit 30, heat treatment unit 40, cooling unit 50, and winding unit 60.

[0061] Vacuum valves 81 to 84 for adjusting the degree of vacuum of each unit are provided in the pipes of the vacuum pump 80.

[0062] The vacuum valves 81 to 84 are configured to be able to switch the connection between each part and the vacuum pump 80 and the disconnection between each part and the vacuum pump 80. Without adjusting the vacuum degree of each part, an on-off valve can also be used in place of the vacuum valves 81 to 84.

[0063] A door 70a is provided at the entrance of the heat treatment unit 40 (the connection unit 70 in this embodiment). The door 70a is closed when replacing the unwinding reel A1 or the like. By closing the door 70a when replacing the unwinding reel A1 or the like, the atmosphere of the heat treatment unit 40 (the reduced pressure state in this embodiment) can be maintained. The door 70a can also be closed when replacing the unwinding reel A1 or the like and when the workpiece A is passing through the connection unit 70. When the remaining amount of the workpiece A wound around the unwinding reel A1 becomes small, the unwinding reel A1 is replaced with a new unwinding reel A1. The end of the workpiece A on the replaced unwinding reel A1 and the end of the workpiece A before replacement are joined together. The unwinding reel A1 can be replaced while maintaining the atmosphere of the heat treatment unit 40 with the workpiece A left in the processing space 40a, and the recovery of the apparatus after replacing the unwinding reel A1 becomes faster.

[0064] In addition, a door 74a is provided at the outlet of the cooling unit 50 (the connection unit 74 in this embodiment). Similar to the door 70a, by closing the door 74a when replacing the winding reel A2 or the like, the atmosphere of the cooling unit 50 (the reduced pressure state in this embodiment) can be maintained. The door 74a can also be closed when replacing the winding reel A2 or the like and when the workpiece A is passing through the connection unit 74. When the amount of the workpiece A wound around the winding reel A2 increases, the winding reel A2 is replaced with a new winding reel A2. The end of the replaced winding reel A2 and the end of the workpiece A are joined together. The winding reel A2 can be replaced while maintaining the atmosphere of the cooling unit 50 with the workpiece A left in the processing space, and the recovery of the apparatus after replacing the winding reel A2 becomes faster.

[0065] In addition, a heat treatment apparatus that processes a strip-shaped workpiece while transporting it includes a transport device, an outer wall having a processing space inside, and guide rollers. The strip-shaped workpiece is transported in the processing space along a predetermined transport path. In other words, the transport path of the strip-shaped workpiece is set by the guide rollers. The strip-shaped workpiece is transported in a state of being hung on the guide rollers. The guide rollers are so-called free rollers and are configured to rotate following the transport of the strip-shaped workpiece. Hereinafter, the heat treatment apparatus disclosed herein will be described by taking the structure of the heat treatment unit as an example.

[0066] The heat treatment unit 40 of the heat treatment apparatus 10 disclosed herein is provided with guide rollers 45 for guiding the strip-shaped workpiece A. Figure 3 It is a schematic diagram of the guide roller 45. In Figure 3shows schematically a cross-section of the guide roller 45 along the axial direction. In Figure 3 shows a cross-section of the guide roller 45b (hereinafter also simply referred to as "guide roller 45") arranged below the heat treatment unit 40 as viewed from the front. Figure 4 is a schematic view of the second support member 44b. In Figure 4 shows schematically a plane of the second support member 44b as viewed from the outer side in the axial direction of the shaft 46.

[0067] <Guide roller 45>

[0068] As Figure 3 shown, the guide roller 45 includes a shaft 46, a first bearing 47a and a second bearing 47b, a cylindrical roller body 48, and a first cover 49a and a second cover 49b. As described above, the guide roller 45 is provided in the processing space 40a surrounded by the outer wall 41.

[0069] <Shaft 46>

[0070] The shaft 46 is a member that forms the rotation axis center of the guide roller 45. The shaft 46 is substantially cylindrical. The material of the shaft 46 is not particularly limited as long as it can withstand the tension applied by the conveyance of the object to be processed A (refer to Figure 1 ) and the temperature in the heat treatment unit 40 (refer to Figure 1 ). In this embodiment, the shaft 46 is made of stainless steel.

[0071] The shaft 46 has a first-side end 46a and a second-side end 46b. The first-side end 46a is the left end of the shaft 46. The second-side end 46b is the end located on the side opposite to the first-side end 46a. The second-side end 46b is the right end of the shaft 46.

[0072] The first-side end 46a and the second-side end 46b of the shaft 46 are fixed in the processing space 40a by the first support member 44a, the second support member 44b, and a pair of support plates 90a, 90b described later. Between the first-side end 46a and the second-side end 46b, the first bearing 47a and the second bearing 47b are mounted on the shaft 46.

[0073] <The first bearing 47a and the second bearing 47b>

[0074] The first bearing 47a and the second bearing 47b are mounted at intervals in the axial direction of the shaft 46. In this embodiment, the first bearing 47a and the second bearing 47b each include an inner ring 47a1, 47b1, an outer ring 47a2, 47b2, a plurality of rolling elements 47a3, 47b3, and a retainer 47a4, 47b4. The first bearing 47a and the second bearing 47b are so-called rolling bearings.

[0075] The inner rings 47a1 and 47b1 are components assembled to the shaft 46. The outer rings 47a2 and 47b2 are radially opposed to the inner rings 47a1 and 47b1. The outer rings 47a2 and 47b2 are components assembled to the roll body 48. The plurality of rolling elements 47a3 and 47b3 are components disposed between the inner rings 47a1 and 47b1 and the outer rings 47a2 and 47b2. The plurality of rolling elements 47a3 and 47b3 roll between the outer peripheral surfaces of the inner rings 47a1 and 47b1 and the inner peripheral surfaces of the outer rings 47a2 and 47b2. As the rolling elements 47a3 and 47b3, balls or rollers are used. As the rollers, cylindrical rollers, needle rollers, tapered rollers, etc. can be used. The cages 47a4 and 47b4 are components disposed between the inner rings 47a1 and 47b1 and the outer rings 47a2 and 47b2. The cages 47a4 and 47b4 are components that hold the plurality of rolling elements 47a3 and 47b3 between the inner rings 47a1 and 47b1 and the outer rings 47a2 and 47b2.

[0076] In this embodiment, the inner rings 47a1 and 47b1, the outer rings 47a2 and 47b2, the plurality of rolling elements 47a3 and 47b3, and the cages 47a4 and 47b4 are made of ceramics. The first bearing 47a and the second bearing 47b are ceramic bearings. The inner rings 47a1 and 47b1, the outer rings 47a2 and 47b2, the plurality of rolling elements 47a3 and 47b3, and the cages 47a4 and 47b4 can be made of, for example, oxide-based ceramics, fluoride-based ceramics, etc. By using ceramic bearings as the first bearing 47a and the second bearing 47b, the heat resistance can be improved. Therefore, when used in the heat treatment unit 40, the durability of the first bearing 47a and the second bearing 47b can also be good. It should be noted that the first bearing 47a and the second bearing 47b are not limited to ceramic bearings.

[0077] The first bearing 47a is mounted on the first side end 48a of the roll body 48 and the shaft 46 by a pair of rings 47a5 mounted on the inner and outer sides of the first bearing 47a. The second bearing 47b is mounted on the second side end 48b of the roll body 48 and the shaft 46 by a pair of rings 47b5 mounted on the inner and outer sides of the second bearing 47b.

[0078] <Roll body 48>

[0079] The roller main body 48 is a cylindrical member. The roller main body 48 is rotatably mounted relative to the shaft 46 by means of a first bearing 47a and a second bearing 47b. The object to be processed A is conveyed along the outer peripheral surface 48c of the roller main body 48. The roller main body 48 has a first-side end 48a and a second-side end 48b. The first-side end 48a is the left-side end of the roller main body 48. The second-side end 48b is the right-side end of the roller main body 48. Openings 48a1 and 48b1 are respectively formed in the first-side end 48a and the second-side end 48b.

[0080] The first-side end 48a and the second-side end 48b respectively extend from the substantially cylindrical roller main body 48 in the inner diameter direction. Therefore, the inner diameters of the first-side end 48a and the second-side end 48b are smaller than the inner diameter of the portion between the first-side end 48a and the second-side end 48b. A space 48d is formed between the roller main body 48 and the shaft 46. Thereby, the friction acting on the first bearing 47a and the second bearing 47b can be reduced. In addition, the guide roller 45 is lightened.

[0081] The first bearing 47a and the second bearing 47b are respectively installed in the openings 48a1 and 48b1 of the first-side end 48a and the second-side end 48b of the roller main body 48. Thereby, the roller main body 48 is supported so as to be rotatable in the circumferential direction relative to the shaft 46 fixed in the processing space 40a. Therefore, when the object to be processed A is conveyed, the guide roller 45 rotates along with the conveyance of the object to be processed A. A first cover 49a and a second cover 49b are provided outside the first-side end 48a and the second-side end 48b of the roller main body 48. In this embodiment, the roller main body 48 is made of stainless steel. It should be noted that the material of the roller main body 48 is not particularly limited.

[0082] <The first cover 49a and the second cover 49b>

[0083] The first cover 49a and the second cover 49b respectively block the gaps between the inner rings 47a1 and 47b1 and the outer rings 47a2 and 47b2 on the outer sides along the axial direction of the shaft 46 of the first bearing 47a and the second bearing 47b. In this embodiment, the first cover 49a and the second cover 49b are plate-like members.

[0084] In this embodiment, the first cover 49a and the second cover 49b are substantially disc-shaped. The first cover 49a and the second cover 49b have an outer diameter larger than the inner diameters of the openings 48a1 and 48b1 at the first-side end 48a and the second-side end 48b of the roller body 48. Insertion holes 49a1 and 49b1 through which the shaft 46 is inserted are respectively provided in the first cover 49a and the second cover 49b. The inner diameters of the insertion holes 49a1 and 49b1 are substantially the same as the outer diameter of the shaft 46. In this embodiment, the first cover 49a and the second cover 49b are made of stainless steel. It should be noted that the materials of the first cover 49a and the second cover 49b are not limited to stainless steel.

[0085] In this embodiment, a stepped portion 46c is provided on the shaft 46. The stepped portion 46c is provided at a position outside the position where the first bearing 47a is installed. A gap is formed between the first-side end 48a of the roller body 48 and the stepped portion 46c. The first cover 49a has a thickness substantially the same as the width of this gap. Thus, the first cover 49a is sandwiched between the stepped portion 46c and the first-side end 48a of the roller body 48. The first cover 49a closes the first-side end 48a of the roller body 48 in a state positioned by the stepped portion 46c and the first-side end 48a of the roller body 48.

[0086] In this embodiment, a spring seat portion 46d is provided on the shaft 46. The spring seat portion 46d is provided at a position outside the second-side end 48b. The spring seat portion 46d is a disc-shaped member having an outer diameter larger than the outer diameter of the shaft 46. As the spring seat portion 46d, a positioning ring formed with a groove is used. The spring seat portion 46d is detachably attached to the shaft 46 by a bolt (not shown). By moving the spring seat portion 46d along the shaft 46 with the bolt loosened, the position of the spring seat portion 46d can be adjusted. A helical spring 49c is disposed between the spring seat portion 46d and the second cover 49b with the shaft 46 inserted therethrough. The helical spring 49c has an inner diameter larger than the outer diameter of the shaft 46 and an outer diameter smaller than the outer diameter of the spring seat portion 46d.

[0087] By making the gap between the spring seat portion 46d and the second cover 49b narrower than the natural length of the helical spring 49c, the resilience of the helical spring 49c acts on the second cover 49b and the second-side end 48b. Thus, the second cover 49b is pressed against the second-side end 48b of the roller body 48 by the helical spring 49c.

[0088] In addition, in the processing space inside the outer wall of the heat treatment furnace, as the object to be processed is transported, the guide rollers for guiding the object to be processed rotate. The roller body of the guide roller rotates relative to the shaft by means of the first bearing and the second bearing. According to the inventor's opinion, at this time, friction may occur between the components of the guide roller. As a result, there is a risk of a decrease in the cleanliness (purity) inside the processing space. For example, dust may be generated from the first bearing and the second bearing due to the friction between the inner ring, outer ring, rolling elements, and retainer of the first bearing and the second bearing. The faster the transport speed and the greater the friction, the more dust may be generated from the first bearing and the second bearing. In addition, when the grease filled in the first bearing and the second bearing scatters, etc., the cleanliness inside the processing space may also decrease.

[0089] In the above-described embodiment, the heat treatment apparatus 10 includes transport devices 20, 22, an outer wall 41, and guide rollers 45. The transport devices 20, 22 transport the object to be processed A. The outer wall 41 has a processing space 40a inside where the object to be processed A is processed while being transported. The guide rollers 45 are provided in the processing space 40a to guide the object to be processed A. The guide roller 45 includes a shaft 46, a first bearing 47a and a second bearing 47b, a cylindrical roller body 48, and a first cover 49a and a second cover 49b. The first bearing 47a and the second bearing 47b are installed at intervals in the axial direction of the shaft 46. The roller body 48 is rotatably installed relative to the shaft 46 by means of the first bearing 47a and the second bearing 47b. The first bearing 47a and the second bearing 47b each include an inner ring 47a1, 47b1, an outer ring 47a2, 47b2, rolling elements 47a3, 47b3, and retainers 47a4, 47b4. The first cover 49a and the second cover 49b each block the gap between the inner ring 47a1, 47b1 and the outer ring 47a2, 47b2 on the outer side along the axial direction of the shaft 46 of the first bearing 47a and the second bearing 47b. With this structure, the dust generated due to the friction caused by the first bearing 47a and the second bearing 47b during the transportation of the object to be processed A is not easily discharged into the processing space 40a. In addition, when grease is used for the first bearing 47a and the second bearing 47b, the grease is not easily scattered into the processing space 40a. As a result, the cleanliness of the processing space 40a is improved.

[0090] Even in cases where dust, scattering of grease, etc. are generated due to friction between components such as the first bearing 47a and the second bearing 47b of the guide roller 45, the dust, scattered grease, etc. can be accommodated in the space 48d inside the roller body 48. By providing the first cover 49a and the second cover 49b outside the first side end 48a and the second side end 48b of the roller body 48, the dust, scattered grease, etc. are not easily discharged from the space 48d inside the roller body 48 into the processing space 40a.

[0091] In the above-described embodiment, the second cover 49b is pressed against the second-side end portion 48b of the roller body 48 by the coil spring 49c. Thus, even when the dimensions of the shaft 46, the roller body 48, etc. change due to temperature changes in the processing space 40a, the second cover 49b is easily and stably pressed against the second-side end portion 48b. As a result, dust generation from the first bearing 47a and the second bearing 47b can be suppressed. Note that, without being limited to the above-described embodiment, it may be that the first cover 49a is pressed against the first-side end portion 48a of the roller body 48 by the coil spring 49c. It may also be that both the first cover 49a and the second cover 49b are pressed against the first-side end portion 48a and the second-side end portion 48b of the roller body 48 by the coil spring 49c, respectively.

[0092] In the above-described embodiment, a spring seat portion 46d is provided outside the second-side end portion 48b of the shaft 46. The coil spring 49c is disposed between the spring seat portion 46d and the second-side end portion 48b. By adjusting the position of the coil spring 49c by the spring seat portion 46d, the pressing of the first cover 49a and the second cover 49b is stabilized, and dust and the like are not easily scattered into the processing space 40a.

[0093] In the above-described embodiment, a stepped portion 46c is provided outside the position of the shaft 46 where the first bearing 47a is mounted. The first cover 49a is sandwiched between the stepped portion 46c and the first-side end portion 48a of the roller body 48. Thus, the first cover 49a is positioned on the shaft 46 and easily blocks the first-side end portion 48a.

[0094] In the above-described embodiment, the first bearing 47a and the second bearing 47b are ceramic bearings. Thus, when the guide roller 45 rotates in cooperation with the conveyance of the object to be processed A, dust generation from the first bearing 47a and the second bearing 47b can be reduced. Moreover, by using a ceramic material with good self-lubricity as the first bearing 47a and the second bearing 47b, it is not necessary to fill grease between the components. Therefore, there is no risk of grease scattering, and the cleanliness of the processing space 40a is easily improved.

[0095] In the above-described embodiment, the first cover 49a is positioned on the shaft 46. The second cover 49b is pressed against the second-side end portion 48b of the roller body 48 by the coil spring 49c. Thus, the position of the guide roller 45 is stabilized.

[0096] In the above-described embodiment, a vacuum pump 80 for decompressing the processing space 40a is connected to the outer wall 41. In the heat treatment apparatus 10 in which the processing space 40a is decompressed by the vacuum pump 80, dust generated from the guide roller 45 during processing may significantly affect the cleanliness of the processing space 40a. Therefore, when the structure of the above-described guide roller 45 is adopted, the effect of improving the cleanliness can be enhanced.

[0097] Note that in the heat treatment apparatus 10, the guide roller 45 is supported by a pair of support plates 90a and 90b provided in the processing space 40a.

[0098]

[0099] The pair of support plates 90a and 90b are provided in the processing space 40a of the heat treatment unit 40. Although detailed illustrations are omitted, the pair of support plates 90a and 90b are plate-shaped members extending in the direction (front-rear direction) along which the guide roller 45b is arranged. The pair of support plates 90a and 90b support a plurality of guide rollers 45b arranged in the front-rear direction. The pair of support plates 90a and 90b are arranged with an interval longer than the width of the object to be processed A so as to sandwich the conveyance path of the object to be processed A. Insertion holes 90a1 and 90b1 through which the shaft 46 is inserted are provided in the pair of support plates 90a and 90b. The insertion holes 90a1 and 90b1 open in a substantially circular shape. The shaft 46 is inserted through the insertion holes 90a1 and 90b1. In this embodiment, the guide roller 45 is supported by the pair of support plates 90a and 90b via the first support member 44a and the second support member 44b.

[0100] The first support member 44a is attached to the end 46a on the first side of the shaft 46. A stepped portion 46c having a diameter larger than the outer diameter of the end 46a on the first side is provided inside the end 46a on the first side. The stepped portion 46c is provided outside the first cover 49a. The second support member 44b is attached to the end 46b on the second side of the shaft 46. Insertion holes 44a1 and 44b1 penetrating along the axis of the shaft 46 are respectively formed in the first support member 44a and the second support member 44b. The shaft 46 is attached to the first support member 44a and the second support member 44b in a state of being inserted through the insertion holes 44a1 and 44b1. The inner diameters of the insertion holes 44a1 and 44b1 are set to be substantially the same as the outer diameters of the end 46a on the first side and the end 46b on the second side of the shaft 46.

[0101] <the first support member 44a>

[0102] The first support member 44a has an insertion portion 44a2, a flange portion 44a3, and an end portion 44a4. The insertion portion 44a2, the flange portion 44a3, and the end portion 44a4 may be different members or may be integrally formed. The outer shapes of the insertion portion 44a2, the flange portion 44a3, and the end portion 44a4 are substantially circular. The insertion portion 44a2 is a portion inserted into the insertion hole 90a1 of the support plate 90a. The flange portion 44a3 is a portion having a diameter larger than the diameters of the insertion portion 44a2 and the end portion 44a4. The end portion 44a4 can be a positioning ring provided with a groove.

[0103] The diameter of the end portion 46a on the first side is smaller than the diameter of the stepped portion 46c. The first support member 44a is mounted on the shaft 46 in a state where the insertion portion 44a2 of the first support member 44a abuts against the stepped portion 46c and is positioned. The insertion hole 44a1 of the first support member 44a has substantially the same length as the end portion 46a on the first side of the shaft 46. Therefore, the end portion 46a on the first side of the shaft 46 and the end portion 44a4 of the first support member 44a are flush. The first support member 44a is mounted on the end portion 46a on the first side of the shaft 46 by fastening the end portion 44a4 relative to the end portion 46a on the first side of the shaft 46.

[0104] The first support member 44a is mounted on the support plate 90a in a state of being mounted on the end portion 46a on the first side of the shaft 46. In other words, the end portion 46a on the first side of the shaft 46 is mounted on the support plate 90a by means of the first support member 44a. Here, the first support member 44a is mounted on the support plate 90a in a state where the flange portion 44a3 abuts against the outer side surface of the support plate 90a and the insertion portion 44a2 is inserted into the insertion hole 90a1 of the support plate 90a. Here, the flange portion 44a3 of the first support member 44a is mounted on the support plate 90a by bolts (not shown). Thus, the position of the guide roller 45 in the processing space 40a can be stabilized.

[0105] <The second support member 44b>

[0106] The second support member 44b has an insertion portion 44b2, a flange portion 44b3, and an end portion 44b4. The insertion portion 44b2, the flange portion 44b3, and the end portion 44b4 may be different members or may be formed integrally. The outer shapes of the insertion portion 44b2 and the end portion 44b4 are substantially circular rings. The outer shape of the flange portion 44b3 is a substantially square shape with chamfered corners (see Figure 4 ). The insertion portion 44b2 is a portion inserted into the insertion hole 90b1 of the support plate 90b. The flange portion 44b3 is a portion having a diameter larger than the diameters of the insertion portion 44b2 and the end portion 44b4. The end portion 44b4 can be a positioning ring provided with a groove.

[0107] The second support member 44b is set to a size such that the end portion 44b4 is substantially flush with the end portion 46b on the second side of the shaft 46 when mounted on the support plate 90b. The end portion 46b on the second side of the shaft 46 is inserted through the insertion hole 44b1 of the second support member 44b. The end portion 46b on the second side of the shaft 46 is not fixed relative to the insertion hole 44b1 of the second support member 44b. Even when the length of the shaft 46 changes due to temperature changes during the processing of the object to be processed A, the shaft 46 slides on the inner peripheral surface of the insertion hole 44b1 of the second support member 44b. Thus, it is not easy to apply a load to the shaft 46.

[0108] The second support member 44b is mounted on the support plate 90b in a state where the flange portion 44b3 abuts against the outer side surface of the support plate 90b and the insertion portion 44b2 is inserted into the insertion hole 90b1 of the support plate 90b.

[0109] As Figure 4 shown, insertion holes 44b5 are provided at the four corners of the flange portion 44b3 of the second support member 44b. The second support member 44b is mounted on the support plate 90b by bolts 44b6 inserted into the insertion holes 44b5 (see Figure 3 ). The inner diameter of the insertion hole 44b5 is set to a size slightly larger than the outer diameter of the portion through which the bolt 44b6 is inserted. Thus, even in a state where the bolt 44b6 is tightened, the flange portion 44b3 moves along the outer side surface of the support plate 90b corresponding to the difference between the inner diameter of the insertion hole 44b5 and the outer diameter of the bolt 44b6. The second support member 44b is configured to be positionally adjustable along the outer side surface of the support plate 90b by a position adjusting member 44d.

[0110] The position adjusting member 44d is disposed close to the lower surface 44ba, the front side surface 44bb, and the rear side surface 44bc of the flange portion 44b3. The position adjusting member 44d includes a base portion 44d1 mounted on the support plate 90b and an adjusting screw 44d2 inserted through the base portion 44d1. The tip portions of the adjusting screws 44d2 respectively penetrate through the base portion 44d1 and reach the respective surfaces 44ba to 44bc of the flange portion 44b3. By rotating the adjusting screws 44d2 to adjust the positions of their tips, the position of the flange portion 44b3 on the outer side surface of the support plate 90b can be adjusted.

[0111] In this embodiment, the inner diameter of the insertion hole 90b1 is larger than the outer diameter of the roller body 48 (see Figure 3 ). During maintenance or the like, the guide roller 45 is disassembled in the following manner. The second support member 44b is removed from the support plate 90b. A cylindrical member having an outer diameter larger than the outer diameter of the roller body 48 and smaller than the inner diameter of the insertion hole 90b1 is inserted into the insertion hole 90b1. The first side end portion 46a of the shaft 46 is removed from the first support member 44a. The shaft 46 on which the roller body 48 is mounted is removed from the second side end portion 46b side. By inserting the cylindrical member into the insertion hole 90b1 of the support plate 90b, the shaft 46 and the roller body 48 are not easily detached, and the workability during replacement is good.

[0112] As described above, regarding the structure of the guide roller and the like included in the heat treatment apparatus disclosed herein, the case where it is provided in the heat treatment unit has been described as an example. However, the above-described guide roller can also achieve the above effects when provided in a portion other than the heat treatment unit. For example, the above-described guide roller may be provided in a cooling unit, an unwinding unit, a winding unit, or the like.

[0113] As described above, specific embodiments have been described in detail, but they are merely examples and do not limit the claims. Thus, the technology described in the claims includes technologies obtained by various modifications and changes to the embodiments described above.

[0114] It should be noted that this specification includes the following items 1 to 16. The following items 1 to 16 are not limited to the above-described embodiments.

[0115] Item 1: A heat treatment apparatus, comprising:

[0116] A conveying device that conveys a strip-shaped object to be processed;

[0117] An outer wall that has a processing space inside where the object to be processed is processed while being conveyed; and

[0118] Guide rollers that are provided inside the processing space and are used to guide the object to be processed,

[0119] The guide roller includes:

[0120] A shaft;

[0121] A first bearing and a second bearing that are installed at intervals in the axial direction of the shaft;

[0122] A cylindrical roller body that is rotatably installed relative to the shaft by means of the first bearing and the second bearing; and

[0123] A first cover and a second cover,

[0124] Both the first bearing and the second bearing include:

[0125] An inner ring that is fitted to the shaft;

[0126] An outer ring that is radially opposed to the inner ring;

[0127] A plurality of rolling elements that are disposed between the inner ring and the outer ring; and

[0128] A retainer that is disposed between the inner ring and the outer ring and holds the plurality of rolling elements,

[0129] The first cover blocks the gap between the inner ring and the outer ring on the outer side in the axial direction of the first bearing along the shaft, and the second cover blocks the gap between the inner ring and the outer ring on the outer side in the axial direction of the second bearing along the shaft.

[0130] Item 2: The heat treatment apparatus according to Item 1, wherein,

[0131] At least one of the first cover and the second cover is pressed against an end portion of the roller body by a coil spring.

[0132] Item 3: The heat treatment apparatus according to Item 2, wherein

[0133] The shaft has a first-side end portion and a second-side end portion located on a side opposite to the first-side end portion,

[0134] The first cover is positioned on the shaft,

[0135] The second cover is pressed against the second-side end portion of the guide roller by the coil spring.

[0136] Item 4: The heat treatment apparatus according to Item 3, wherein

[0137] A spring seat portion is provided outside the second-side end portion of the roller body on the shaft,

[0138] The coil spring is disposed between the spring seat portion and the second-side end portion of the roller body.

[0139] Item 5: The heat treatment apparatus according to Item 3 or 4, wherein

[0140] A stepped portion is provided outside the position where the first bearing is mounted on the shaft,

[0141] The first cover is sandwiched between the stepped portion and the first-side end portion of the roller body.

[0142] Item 6: The heat treatment apparatus according to any one of Items 3 to 5, wherein

[0143] A pair of support plates is provided in the processing space,

[0144] One of the first-side end portion and the second-side end portion of the shaft is mounted on one of the pair of support plates.

[0145] Item 7: The heat treatment apparatus according to any one of Items 1 to 6, wherein

[0146] A vacuum pump for decompressing the processing space is connected to the outer wall.

[0147] Item 8: The heat treatment apparatus according to any one of Items 1 to 7, wherein

[0148] At least one of the first bearing and the second bearing is a ceramic bearing.

[0149] Item 9: The heat treatment apparatus according to any one of Items 1 to 8, wherein

[0150] A space is formed between the roller body and the shaft.

[0151] Item 10: A guide roller for a heat treatment apparatus, wherein the guide roller for a heat treatment apparatus includes:

[0152] A shaft;

[0153] A first bearing and a second bearing, which are installed at intervals in the axial direction of the shaft;

[0154] A cylindrical roller body, which is rotatably installed relative to the shaft by means of the first bearing and the second bearing; and

[0155] A first cover and a second cover,

[0156] Both the first bearing and the second bearing include:

[0157] An inner ring, which is fitted to the shaft;

[0158] An outer ring, which is radially opposed to the inner ring;

[0159] A plurality of rolling elements, which are arranged between the inner ring and the outer ring; and

[0160] A retainer, which is arranged between the inner ring and the outer ring and holds the plurality of rolling elements,

[0161] The first cover blocks the gap between the inner ring and the outer ring on the outer side of the first bearing along the axial direction of the shaft, and the second cover blocks the gap between the inner ring and the outer ring on the outer side of the second bearing along the axial direction of the shaft.

[0162] Item 11: The guide roller for a heat treatment apparatus according to Item 10, wherein

[0163] At least one of the first cover and the second cover is pressed against the end of the roller body by a helical spring.

[0164] Item 12: The guide roller for a heat treatment apparatus according to Item 11, wherein

[0165] The shaft has a first-side end and a second-side end located on the side opposite to the first-side end,

[0166] The first cover is positioned on the shaft,

[0167] The second cover is pressed against the roller body by the helical spring.

[0168] Item 13: The guide roller for a heat treatment apparatus according to Item 12, wherein

[0169] A spring seat portion is provided outside the end portion on the second side of the shaft.

[0170] The helical spring is disposed between the spring seat portion and the end portion on the second side.

[0171] Item 14: The guide roller for a heat treatment apparatus according to item 12 or 13, wherein

[0172] A stepped portion is provided outside the position where the first bearing is mounted on the shaft.

[0173] The first cover is sandwiched between the stepped portion and the end portion on the first side of the roller body.

[0174] Item 15: The guide roller for a heat treatment apparatus according to any one of items 10 to 14, wherein

[0175] At least one of the first bearing and the second bearing is a ceramic bearing.

[0176] Item 16: The guide roller for a heat treatment apparatus according to any one of items 10 to 15, wherein

[0177] A space is formed between the roller body and the shaft.

Claims

1. A heat treatment apparatus, comprising: A conveying device for conveying a strip-shaped object to be processed; An outer wall having a processing space inside for processing the object to be processed while being conveyed; and Guide rollers provided in the processing space for guiding the object to be processed, The guide roller includes: A shaft; A first bearing and a second bearing mounted at an interval in the axial direction of the shaft; A cylindrical roller body rotatably mounted relative to the shaft by means of the first bearing and the second bearing; and A first cover and a second cover, Both the first bearing and the second bearing include: An inner ring fitted to the shaft; An outer ring radially opposed to the inner ring; A plurality of rolling elements disposed between the inner ring and the outer ring; and A retainer disposed between the inner ring and the outer ring for holding the plurality of rolling elements, The first cover blocks the gap between the inner ring and the outer ring on the outer side along the axial direction of the shaft of the first bearing, and the second cover blocks the gap between the inner ring and the outer ring on the outer side along the axial direction of the shaft of the second bearing.

2. The heat treatment apparatus according to claim 1, wherein At least one of the first cover and the second cover is pressed against the end of the roller body by a spiral spring.

3. The heat treatment apparatus according to claim 2, wherein The shaft has a first-side end and a second-side end located on the side opposite to the first-side end, The first cover is positioned on the shaft, The second cover is pressed against the roller body by the spiral spring.

4. The heat treatment apparatus according to claim 3, wherein A spring seat portion is provided outside the second-side end of the roller body on the shaft, The spiral spring is disposed between the spring seat portion and the second-side end of the roller body.

5. The heat treatment apparatus according to claim 3 or 4, wherein A stepped portion is provided outside the position where the first bearing is installed on the shaft, The first cover is clamped between the stepped portion and the first-side end of the roller body.

6. The heat treatment apparatus according to claim 3 or 4, wherein A pair of support plates are provided in the processing space, One of the first-side end and the second-side end of the shaft is installed on one of the pair of support plates.

7. The heat treatment apparatus according to any one of claims 1 to 4, wherein A vacuum pump for decompressing the processing space is connected to the outer wall.

8. The heat treatment apparatus according to any one of claims 1 to 4, wherein At least one of the first bearing and the second bearing is a ceramic bearing.

9. The heat treatment apparatus according to any one of claims 1 to 4, wherein A space is formed between the roller body and the shaft.

10. A guide roller for a heat treatment apparatus, wherein, The guide roller for this heat treatment apparatus includes: A shaft; A first bearing and a second bearing mounted at an interval in the axial direction of the shaft; A cylindrical roller body rotatably mounted relative to the shaft by means of the first bearing and the second bearing; and A first cover and a second cover, Both the first bearing and the second bearing include: an inner ring, which is assembled to the shaft; an outer ring, which is radially opposed to the inner ring; a plurality of rolling elements, which are disposed between the inner ring and the outer ring; and a cage, which is disposed between the inner ring and the outer ring and holds the plurality of rolling elements, the first cover blocks the gap between the inner ring and the outer ring on the outer side along the axial direction of the shaft of the first bearing, and the second cover blocks the gap between the inner ring and the outer ring on the outer side along the axial direction of the shaft of the second bearing.

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