Screen stretching method of fine metal mask plate and mask plate
By improving the meshing method of mask plates, the mask is designed as a single Panel and transferred using multiple adsorption methods, the problem of high maintenance costs of mask materials in the prior art is solved, and cost reduction and efficiency improvement are achieved.
Patent Information
- Application Number
- CN202510497071.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-18
- Publication Date
- 2025-07-11
AI Technical Summary
In the prior art, the 1680mm width mask raw material required for the G8.6FMM production line cannot meet the demand in China, and the width of the domestic raw material is only below 330mm, resulting in low mask yield and high cost. The entire strip mask is damaged and needs to be replaced with the entire strip mask, which is very cost-effective.
A fine metal masking method is designed to open a mesh. The mask has only a single Panel. The mask is fixed on the mask frame through multiple support strips and welding. The transfer is carried out by electrostatic, vacuum or magnetic adsorption. The jaws are tightened and fixed to ensure consistent tension and realize column or strip arrangement.
It breaks the limitations on the length and width of raw materials, reduces production and maintenance costs, improves processing efficiency and product applicability, and achieves more flexible product layout.
Smart Images
Figure CN120291016A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of display technology, and in particular, to a method for stretching a fine metal mask plate and a mask plate. Background Art
[0002] The core structure of an OLED (organic light-emitting diode) device is composed of an anode, an organic light-emitting layer, and a cathode stacked in sequence on a substrate. During its preparation process, each layer of material needs to be accurately deposited on the surface of the array substrate through a vacuum evaporation process. For the light-emitting layer, the OLED material is placed in a vacuum chamber and heated to sublimate into a gas state, so that it passes through the micron-level pixel openings of a fine metal mask plate (FMM) and is deposited on the designated position of the substrate to form a thin film. As a key tool, the FMM controls the material distribution through its opening pattern and directly determines the geometric shape and resolution of the pixels.
[0003] The FMM consists of a mask frame (Mask Frame) and a mask sheet (Mask Sheet). The manufacturing of the FMM requires the transfer device of a stretching machine to load the Frame onto the loading platform, stretch the Sheet to the designed position by the clamping jaws of the stretching machine, and use laser welding to weld and fix the Sheet to the Frame.
[0004] The existing technology has the following problems:
[0005] For the 1680mm mask raw materials required by the G8.6 FMM production line, only DNP can provide them. The domestic raw materials cannot meet the required length of the production line. In terms of width, the domestic raw materials can only meet the masks with a width of less than 330mm.
[0006] Moreover, multiple Panels are provided on the existing strip-shaped mask, and it is required that all Panels on the entire mask are qualified, resulting in a low yield of the ultra-wide strip-shaped mask, and greater delivery and cost pressures.
[0007] Furthermore, if one Panel of the strip-shaped mask is damaged, the entire mask needs to be replaced during repair, resulting in a large maintenance cost for the fine metal mask plate. Summary of the Invention
[0008] In view of the deficiencies of the existing technology, the present invention improves the method for stretching the mask plate and the mask plate, reduces the requirements for mask raw materials in higher-generation OLED production lines, and thus reduces the production cost and subsequent maintenance cost of the mask plate.
[0009] The technical solution of the present invention is as follows:
[0010] Method for stretching a fine metal mask plate, the fine metal mask plate being used for an OLED display panel, characterized in that: a mask, the mask having only a single Panel, a mask frame, and a plurality of support bars being evenly distributed in the width direction of the mask frame within the mask frame. A plurality of masks are arranged in a group and then transferred to the mask frame, and both ends of the mask are welded to the mask frame and the support bars or to two support bars.
[0011] Further, a plurality of masks are arranged in columns, and the plurality of masks after arrangement are transferred to the mask frame together.
[0012] Further, a plurality of masks arranged in columns are referred to as a mask group, and the height of the mask group is less than or equal to the length of the inner frame of the mask frame.
[0013] Further, the plurality of masks are transferred to the mask frame together by means of electrostatic adsorption.
[0014] Further, the plurality of masks are transferred to the mask frame together by means of vacuum adsorption.
[0015] Further, the plurality of masks are transferred to the mask frame together by means of magnetic adsorption.
[0016] Further, when a plurality of masks are arranged in columns, both ends of the masks are clamped and fixed by a plurality of clamping jaws to ensure that the tension applied to the masks before transfer is the same.
[0017] Further, the mask includes a mask substrate, the mask substrate having only a single Panel, clamping portions being provided on the mask substrate at the left and right ends of the single Panel, and borders being provided on the mask substrate at the upper and lower ends of the single panel.
[0018] Further, a plurality of masks are arranged in strips, and the plurality of masks after arrangement are transferred to the mask frame together.
[0019] A mask plate, which includes a mask frame, and a plurality of support bars being evenly distributed in the width direction of the mask frame within the mask frame, is characterized in that: it further includes a mask, the mask having only a single Panel, and both ends of the mask being welded and fixed to the mask frame and / or the support bars.
[0020] In summary, the present invention has the following beneficial effects:
[0021] The present invention improves the method for stretching a mask plate. By breaking the strip-shaped mask in the prior art into pieces, a new mask is designed. The mask has only a single Panel, and the mask plate can be obtained by arranging a plurality of newly designed masks, thereby breaking the limitation of the length of the strip-shaped mask on the mask in the prior art.
[0022] The requirements for degree and width break the blockade and restriction of foreign countries on raw material resources. Further, the mask with only a single Panel has an obvious cost advantage and a significant improvement in processing efficiency. Furthermore, the method of dividing the strip-shaped mask into smaller parts makes the product layout more flexible, and the produced mask plate has better applicability and cost advantages. Description of the Drawings
[0023] Figure 1 It is a schematic diagram of a mask plate in the prior art;
[0024] Figure 2 It is a schematic diagram of the mask plate in the present invention;
[0025] Figure 3 It is a schematic diagram of the mask in the present invention;
[0026] Figure 4 It is a schematic diagram of the mesh stretching method in the present invention;
[0027] Figure 5 It is a schematic structural diagram of the mask plate in the present invention;
[0028] In the figure, 1 is the mask, 10 is the Panel, 100 is the mask substrate, 101 is the clamping part, and 102 is the frame;
[0029] 2 is the mask frame, 20 is the support bar, and 21 is the cover plate,
[0030] 3 is the strip-shaped mask. Detailed Embodiments
[0031] The present invention will be further described below in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present invention and be able to implement it, but the examples given are not intended to limit the present invention.
[0032] It should be noted that when an element is referred to as "disposed on", "fixed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is referred to as "fixed on" another element, or "fixedly connected" to another element, the connection between them can be a detachable fixing method or a non-detachable fixing method. When an element is considered to be "connected", "rotatably connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right", "up", "down" and similar expressions are only for the purpose of illustration and do not represent the only implementation manner.
[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this invention belongs. The terms used in the description of the present invention herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the related listed items.
[0034] In the present invention, the terms "first", "second", "third", etc. are used for name distinction only and do not represent specific quantities or orders.
[0035] In the attached drawings, the X direction is the width direction of the mask frame, and the Y direction is the length direction of the mask frame.
[0036] See Figure 1 As shown, the fine metal mask plate in the prior art includes a mask frame 1 and a strip-shaped mask 3. The width of the strip-shaped mask is greater than the width of the mask frame. Both ends of the strip-shaped mask are fixedly connected to the mask frame. A plurality of Panels are processed on the strip-shaped mask according to production needs. The Panel is the pattern for OLED production. The material for producing OLED can pass through the Panel and be cured on the substrate. This production method of the mask plate has requirements for the length and width of the mask. For example, the G8.6 FMM production line requires a mask with a width of 1680 mm. Due to the limitations of the production process, the mask of this length cannot be produced in China, resulting in a high cost of the product. Moreover, since a plurality of Panels are provided on a strip-shaped mask, when one of the Panels fails, the entire strip-shaped mask needs to be replaced, resulting in a high maintenance cost for the mask plate in the later stage.
[0037] In view of the problems existing in the prior art, the company has improved the screen stretching process of the fine metal mask plate and designed a new screen stretching method for the fine metal mask plate. See Figures 2 to 4 As shown, the screen stretching method for the fine metal mask plate is used for an OLED display panel. There is a mask 1 which only has a single Panel 10, and a mask frame 2. A plurality of support strips 20 are evenly arranged in the width direction of the mask frame inside the mask frame. A plurality of masks are arranged in groups and then transferred to the mask frame, and both ends of the mask are welded to the mask frame and the support strips or to two support strips.
[0038] The net spreading method described in the present invention improves the mask by dividing the strip-shaped mask into pieces and designing it into a mask with only a single Panel. The requirements for the mask frame in the width direction in high-generation production lines can be achieved by arranging multiple masks with a single Panel, thus overcoming the requirements for the length of the strip-shaped mask in the prior art. Moreover, the mask with only a single Panel has a high processing yield and low production cost, thereby overcoming the problem of the high cost of the mask plate in high-generation production lines in the prior art.
[0039] Further, as shown in Figure 4 In this embodiment, multiple masks 1 are arranged in a column. After the arrangement, the multiple masks are transferred to the mask frame together. To ensure the production efficiency of the mask plate, we need to transfer multiple masks to the mask frame at one time, which not only improves the production efficiency but also ensures the positioning accuracy of the mask on the mask frame.
[0040] Specifically, the multiple masks arranged in a column are called a mask group. The height of the mask group is less than or equal to the length of the inner frame of the mask frame. Here, the height of the mask group is limited. Preferably, the height of the mask group exactly meets the requirement of the length of the inner frame of the mask frame, and one transfer can complete the requirement of the mask arrangement in one column of the mask frame, ensuring the production efficiency.
[0041] The masks arranged in a column can be transferred to the mask frame in various ways. The following gives three common ways applicable to the simultaneous transfer of multiple items.
[0042] Method 1: The multiple masks are transferred to the mask frame together by electrostatic adsorption.
[0043] Method 2: The multiple masks are transferred to the mask frame together by vacuum adsorption.
[0044] Method 3: The multiple masks are transferred to the mask frame together by magnetic adsorption.
[0045] For the above three transfer methods, a whole column of masks can be neatly transferred to the mask frame. While improving the efficiency, it is necessary to ensure the positioning accuracy between the mask and the mask frame and between the masks.
[0046] Before the mask is transferred, when multiple masks 1 are arranged in a column, the two ends of the mask are clamped and fixed by several clamping jaws to ensure that the tension on the mask before transfer is the same. The mask is fixed and tensioned by clamping the two ends of the mask with the clamping jaws, so that the mask is in the same state before being adsorbed, thereby ensuring that after synchronous transfer, each mask is in the same state.
[0047] Further, the structure of the mask is described. As shown in Figure 3As shown, the mask 1 includes a mask substrate 100. Only a single Panel 10 is provided on the mask substrate 100. Clamping portions 101 are provided on the mask substrate at the left and right ends of the single Panel 10, and a frame 102 is provided on the mask substrate 100 at the upper and lower ends of the single panel. The provided clamping portions facilitate the clamping and fixing of the mask by the aforementioned clamping jaws. Before unified transfer, the state of the mask can be adjusted, so as to ensure the consistency of the state of each mask before being adsorbed, and thus also ensure the consistency of each Panel of the mask plate obtained in production.
[0048] Furthermore, multiple masks are arranged in a strip shape, and the multiple masks after arrangement are transferred to the mask frame together. The masks of the present invention can also be arranged in a strip shape and then uniformly transferred to the mask frame. Compared with the columnar arrangement, the number of transfers required is relatively large, and the production efficiency is slightly lower than that of the columnar arrangement, but it can also overcome the limitations of the raw materials in the prior art.
[0049] Embodiment 2
[0050] See Figure 5 As shown, a mask plate includes a mask frame 2. A plurality of support bars 20 are evenly distributed in the width direction of the mask frame within the mask frame 2. It further includes a mask 1. Only a single Panel 10 is provided on the mask 1. Both ends of the mask 1 are welded and fixed to the mask frame and / or the support bars. When the mask is located between the mask frame and the support bars, one end of the mask is welded to the mask frame and the other end is welded to the support bar. When the mask is located between two support bars, both ends of the mask are respectively welded to the support bars.
[0051] The present invention improves the structure of the mask plate, improves the strip-shaped mask with multiple Panels into a mask with only a single Panel. When the high-generation OLED production line puts forward higher requirements for the width of the mask plate, we can design the arrangement of the masks with a single Panel, rather than blindly increasing the length of the strip-shaped mask, thus overcoming the limitations existing in the current mask production process, meeting the production requirements of the high-generation OLED production line, and thus also reducing the production cost and production efficiency of the fine metal mask plate.
[0052] A gap is formed between adjacent masks. It further includes a cover plate 21. The cover plate is connected to the mask frame and covers the gap.
[0053] Alternatively, a transverse support bar arranged along the X direction is further provided within the mask frame. The transverse support bar is located between adjacent masks arranged in columns. At this time, there is no need to weld the cover plate.
[0054] In summary, the present invention has the following beneficial effects:
[0055] The present invention improves the method of stretching the mask plate. By changing the strip-shaped mask in the prior art into a mask with only a single Panel, which breaks the requirements for the length and width of the mask in the prior art and breaks through the limitation of raw material resources. Further, the mask with only a single Panel has an obvious cost advantage and a great improvement in processing efficiency. Furthermore, by changing the strip-shaped mask into a mask with only a single Panel, the product layout is more flexible, and the produced mask plate has better applicability and cost advantages.
[0056] Based on the described embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of the present invention.
Claims
1. A method for stretching a fine metal mask plate, the fine metal mask plate being used for an OLED display panel, characterized in that: A mask, the mask having only a single Panel, a mask frame, and a plurality of support bars uniformly arranged in the width direction of the mask frame within the mask frame. A plurality of masks are arranged in a group and then transferred to the mask frame, and both ends of the mask are welded to the mask frame and the support bars or to two support bars.
2. The method for stretching the fine metal mask according to claim 1, characterized in that: A plurality of masks are arranged in columns, and the plurality of arranged masks are transferred to the mask frame together.
3. The method for stretching the mesh of the fine metal mask according to claim 2, characterized in that: The height of the mask group is less than or equal to the length of the inner frame of the mask frame.
4. The method for stretching the mesh of the fine metal mask according to claim 2, characterized in that: The plurality of masks are transferred to the mask frame together by means of electrostatic adsorption.
5. The method for stretching the mesh of the fine metal mask according to claim 2, wherein: The plurality of masks are transferred to the mask frame together by means of vacuum adsorption.
6. The method for stretching a fine metal mask according to claim 2, wherein: The plurality of masks are transferred to the mask frame together by means of magnetic adsorption.
7. The method for stretching a fine metal mask according to claim 1, characterized in that: When a plurality of masks are arranged in columns, both ends of the masks are clamped and fixed by a plurality of jaws to ensure that the tension applied to the masks before transfer is the same.
8. The method for stretching the fine metal mask according to claim 1, wherein: The mask includes a mask substrate, the mask substrate having only a single Panel, clamping portions provided on the mask substrate at the left and right ends of the single Panel, and borders provided on the mask substrate at the upper and lower ends of the single panel.
9. The method for stretching a fine metal mask according to claim 1, characterized in that: A plurality of masks are arranged in strips, and the plurality of arranged masks are transferred to the mask frame together.
10. A mask plate, which comprises a mask frame, and a plurality of support bars are evenly distributed in the width direction of the mask frame inside the mask frame, and is characterized in that: It further includes a mask, the mask having only a single Panel, and both ends of the mask are welded and fixed to the mask frame and / or the support bars.