Vacuum processing chamber and multi-chamber vacuum processing device

Abstract

The invention belongs to the technical field of workpiece vacuum treatment, and discloses a vacuum treatment cavity and a multi-cavity vacuum treatment device. The top and / or the bottom of the vacuum processing chamber are / is rotatably provided with a first matching piece, the vacuum processing chamber comprises a workpiece loading mechanism, the workpiece loading mechanism is movably arranged in the vacuum processing chamber in the first direction and comprises a containing frame and a workpiece frame, a plurality of workpieces are loaded on the workpiece frame, and the workpiece frame is provided with a center shaft in the vertical direction; the workpiece frame can rotate around the center shaft to be arranged in the containing frame, and the top and / or the bottom of the center shaft are / is connected with a second matching piece. The first matching piece can move in the direction close to or away from the second matching piece so as to be matched with or separated from the second matching piece. The structure complexity and the manufacturing cost of the vacuum treatment cavity are reduced, the situation that the workpiece is independently unloaded and reloaded when transferred between the cavities is avoided, the pollution risk of a workpiece film layer is reduced, and the vacuum treatment efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of workpiece vacuum processing, and in particular, to a vacuum processing chamber and a multi-chamber vacuum processing device. Background Art

[0002] Sputtering coating is a physical vapor deposition technology in which ions bombard the surface of a target, causing atoms or molecules of the target to sputter onto the surface of a workpiece to form a thin film. This technology has the advantages of high deposition rate, good film layer uniformity, strong adhesion, etc., and is widely used in fields such as integrated circuits, flat panel displays, and solar cells.

[0003] Existing continuous sputtering coating equipment usually adopts a multi-chamber structure, and each chamber is independently configured with a loading mechanism. When multi-layer film deposition is required, the workpiece needs to pass through multiple chambers in sequence to complete the preparation of different film layers. However, this structure has the following defects: First, each chamber needs to be equipped with an independent loading device, resulting in a complex equipment structure and high manufacturing cost; second, when the workpiece is transferred between chambers, it needs to go through the processes of unloading and reloading, increasing the risk of film layer contamination; third, multiple transfer operations lead to an extended production cycle and reduced production efficiency. Summary of the Invention

[0004] The purpose of the present invention is to provide a multi-chamber continuous coating device to solve the problems of complex equipment structure and high manufacturing cost in the prior art; when the workpiece is transferred between chambers, it needs to go through the processes of unloading and reloading, increasing the risk of film layer contamination; multiple transfer operations lead to an extended production cycle and reduced production efficiency.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] On the one hand, a vacuum processing chamber is provided. A first mating member is rotatably provided at the top and / or bottom of the vacuum processing chamber. The vacuum processing chamber includes:

[0007] A workpiece loading mechanism, which is movably provided in the vacuum processing chamber along a first direction, includes a receiving frame and a workpiece rack. A plurality of workpieces are loaded on the workpiece rack. The workpiece rack is provided with a central axis in the vertical direction, and the workpiece rack can be rotatably provided in the receiving frame around the central axis. A second mating member is connected to the top and / or bottom of the central axis;

[0008] The first mating member can move in a direction close to or away from the second mating member to cooperate with or disengage from the second mating member.

[0009] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a transmission mechanism, the transmission mechanism includes a transmission member, a third mating member, and a fixing member. The fixing member and the third mating member are both rotatably disposed in the vacuum processing chamber. The first mating member is rotatably disposed on the fixing member. The fixing member rotates to drive the first mating member to approach or move away from the second mating member. The third mating member and the first mating member are drivingly connected through the transmission member.

[0010] As an alternative technical solution for the vacuum processing chamber, the transmission mechanism further includes a first limiting member. The first limiting member is located on the rotation path of the fixing member to limit the rotation distance of the fixing member, thereby limiting the actual center distance between the first mating member and the second mating member.

[0011] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a driving mechanism. The driving mechanism includes a first driving member. The first driving member is connected to the third mating member to drive the third mating member to rotate, thereby driving the first mating member to rotate.

[0012] As an alternative technical solution for the vacuum processing chamber, the driving mechanism further includes a second driving member. The second driving member is connected to the fixing member to drive the fixing member to rotate, thereby driving the first mating member to move in a direction approaching or moving away from the second mating member.

[0013] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a positioning mechanism. The positioning mechanism includes a positioning rod. A positioning hole is provided at the geometric center position of the second mating member facing away from the central axis. The positioning rod can move in a direction approaching or moving away from the positioning hole to insert into or disengage from the positioning hole.

[0014] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a limiting mechanism. The limiting mechanism is provided at the top or bottom of the vacuum processing chamber. The limiting mechanism includes a second limiting member. The second limiting member can move in a direction approaching or moving away from the workpiece loading mechanism and abut or disengage from the accommodating frame to limit the movement of the workpiece loading mechanism in the first direction.

[0015] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes a conveying mechanism. The conveying mechanism includes a support seat and guide wheels. The support seat extends in the first direction. The guide wheels are rotatably disposed on the support seat and are spaced apart in the first direction. The workpiece loading mechanism can slidably or rollingly cooperate with the guide wheels to move in the first direction.

[0016] As an alternative technical solution for the vacuum processing chamber, the vacuum processing chamber further includes an offset mechanism disposed at the bottom of the workpiece loading mechanism. The offset mechanism is capable of cooperating with the workpiece loading mechanism to offset along the first direction and / or the second direction, and the second direction is perpendicular to the first direction.

[0017] On the other hand, a multi-chamber vacuum processing apparatus is provided, including a loading chamber, an unloading chamber, and at least one of the above-mentioned vacuum processing chambers. The loading chamber, at least one of the vacuum processing chambers, and the unloading chamber are arranged in sequence along the first direction and can be selectively communicated.

[0018] Advantages of the present invention:

[0019] The present application discloses a vacuum processing chamber and a multi-chamber vacuum processing apparatus. A first fitting is rotatably provided at the top and / or bottom of the vacuum processing chamber. The vacuum processing chamber includes a workpiece loading mechanism that is movably provided along a first direction in the vacuum processing chamber. The workpiece loading mechanism includes a containing frame and a workpiece rack. A plurality of workpieces are loaded on the workpiece rack. The workpiece rack is provided with a central axis in the vertical direction, and the workpiece rack can be rotatably provided in the containing frame around the central axis. The top and / or bottom of the central axis is connected with a second fitting; the first fitting can move along a direction close to or away from the second fitting to cooperate or disengage with the second fitting. By providing a rotatable first fitting in each vacuum processing chamber and moving the first fitting along a direction close to or away from the second fitting, a plurality of workpieces are loaded on the workpiece rack. When the first fitting cooperates with the second fitting, the first fitting drives the workpiece rack to rotate to complete the vacuum processing of a plurality of workpieces. When the vacuum processing of the workpieces is completed, the first fitting disengages from the second fitting, avoiding the setting of a loading device in each vacuum processing chamber, reducing the complexity of the structure of the vacuum processing chamber and the manufacturing cost; the workpiece loading mechanism moves along the first direction to drive a plurality of workpieces to other chambers, avoiding the need for a separate unloading and reloading process when the workpieces are transferred between chambers, reducing the risk of film layer contamination of the workpieces, avoiding the extension of the production cycle caused by the operation of repeatedly loading and unloading the workpieces, and improving the efficiency of the vacuum processing of the workpieces. Description of the Drawings

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments of the present invention. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the content of the embodiments of the present invention and these drawings.

[0021] Figure 1 It is a schematic structural diagram of a multi-chamber vacuum processing apparatus provided by an embodiment of the present invention;

[0022] Figure 2 It is a schematic structural diagram of a vacuum processing chamber provided by an embodiment of the present invention;

[0023] Figure 3 It is a schematic structural diagram of a workpiece loading mechanism provided by an embodiment of the present invention;

[0024] Figure 4 It is one of the partial structural schematic diagrams of a vacuum processing chamber provided by an embodiment of the present invention;

[0025] Figure 5 It is another partial structural schematic diagram of a vacuum processing chamber provided by an embodiment of the present invention;

[0026] Figure 6 It is yet another partial structural schematic diagram of a vacuum processing chamber provided by an embodiment of the present invention;

[0027] Figure 7 It is still another partial structural schematic diagram of a vacuum processing chamber provided by an embodiment of the present invention;

[0028] Figure 8 It is a schematic structural diagram of the first embodiment of an offset mechanism provided by an embodiment of the present invention;

[0029] Figure 9 It is a schematic structural diagram of the second embodiment of an offset mechanism provided by an embodiment of the present invention;

[0030] Figure 10 It is a schematic structural diagram of the third embodiment of an offset mechanism provided by an embodiment of the present invention.

[0031] In the figure:

[0032] 1. Loading chamber; 2. Unloading chamber; 3. Gate;

[0033] 10. Vacuum processing chamber; 11. First fitting;

[0034] 20. Workpiece loading mechanism; 21. Accommodating frame; 22. Workpiece rack; 221. Central axis; 23. Second fitting; 231. Positioning hole;

[0035] 30. Transmission mechanism; 31. Transmission member; 32. Third fitting; 33. Fixing member;

[0036] 40. Driving mechanism; 41. First driving member; 42. Second driving member; 43. First shaft; 44. Second shaft; 45. Magnetic fluid;

[0037] 50. Positioning mechanism; 51. Positioning rod; 52. Fourth driving member;

[0038] 60. Limiting mechanism; 61. Second limiting member; 62. Connecting rod;

[0039] 70. Conveyor mechanism; 71. Support base; 72. Guide wheel;

[0040] 81. Aerogel ball; 82. Sliding guide rail; 83. Magnetic part; 84. Guide part; 85. Bearing part. Detailed implementation manner

[0041] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that for the convenience of description, only parts related to the present invention are shown in the drawings, rather than all the structures.

[0042] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0043] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under", and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0044] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meanings.

[0045] Existing continuous sputtering coating equipment usually adopts a multi-chamber structure, and each chamber is independently configured with a loading mechanism. When multi-layer film deposition is required, the workpiece needs to pass through multiple chambers in sequence to complete the preparation of different film layers. However, this structure has the following defects: First, each chamber needs to be equipped with an independent loading device, resulting in a complex equipment structure and high manufacturing cost; Second, when the workpiece is transferred between chambers, it needs to go through the processes of unloading and reloading, increasing the risk of film layer contamination; Third, multiple transfer operations lead to an extended production cycle and reduced production efficiency.

[0046] To solve the above problems, this embodiment provides a vacuum processing chamber 10. Refer to Figure 2 , a first fitting 11 is rotatably provided at the top and / or bottom of the vacuum processing chamber 10. The vacuum processing chamber 10 includes a workpiece loading mechanism 20, which is movably provided in the vacuum processing chamber 10 along a first direction. The workpiece loading mechanism 20 includes a receiving frame 21 and a workpiece rack 22. A plurality of workpieces are loaded on the workpiece rack 22. The workpiece rack 22 is provided with a central axis 221 along the vertical direction. The workpiece rack 22 can be rotatably provided in the receiving frame 21 around the central axis 221. A second fitting 23 is connected to the top and / or bottom of the central axis 221. The first fitting 11 can move in a direction close to or away from the second fitting 23 to cooperate or disengage with the second fitting 23. In this embodiment, the first direction is the Y-axis direction. It should be noted that the position and quantity of the first fitting 11 correspond to the position and quantity of the second fitting 23 one by one. That is: when the first fitting 11 is provided at the top of the vacuum processing chamber 10, the second fitting 23 is provided at the top of the central axis 221; when the first fitting 11 is provided at the bottom of the vacuum processing chamber 10, the second fitting 23 is provided at the bottom of the central axis 221; when the first fitting 11 is provided at both the top and bottom of the vacuum processing chamber 10, the second fitting 23 is correspondingly provided at both the top and bottom of the central axis 221. In this embodiment, the top and / or bottom of the central axis 221 protrudes from the receiving frame 21 and the protruding end is connected with the second fitting 23. In other embodiments, the second fitting 23 can be directly rotatably provided on the receiving frame 21.

[0047] Specifically, refer to Figure 3 , the receiving frame 21 is set as a square frame structure. The central axis 221 penetrates through the center of the workpiece rack 22. Both the upper side and the lower side of the receiving frame 21 are provided with shaft holes. Both ends of the central axis 221 pass through the two shaft holes respectively and are in clearance fit with the shaft holes. In order to increase the smoothness of the rotation of the workpiece rack 22, bearings can also be provided between the central axis 221 and the shaft holes. Specifically, the workpiece rack 22 is set as a rotary workpiece loading rack, and the surface of the workpiece to be coated faces outward and is hung on the rotary workpiece loading rack. Since the rotary workpiece loading rack is a prior art, its structure and principle will not be specifically described here one by one.

[0048] By setting a rotating first matching piece 11 in each vacuum processing chamber 10, the first matching piece 11 is moved in a direction close to or away from the second matching piece 23, and multiple workpieces are loaded on the workpiece rack 22. When the first matching piece 11 cooperates with the second matching piece 23, the first matching piece 11 drives the workpiece rack 22 to rotate to complete the vacuum processing of multiple workpieces. When the vacuum processing of the workpieces is completed, the first matching piece 11 and the second matching piece 23 are disengaged, thereby avoiding the need to set a loading device in each vacuum processing chamber 10, reducing the structural complexity and manufacturing cost of the vacuum processing chamber 10; the workpiece loading mechanism moves in a first direction, driving multiple workpieces to other chambers, avoiding the need for a separate unloading and reloading process when the workpiece is transferred between chambers, reducing the risk of workpiece film contamination, avoiding the operation of repeatedly transferring the workpiece to extend the production cycle, and improving the efficiency of the vacuum processing of the workpiece; in this embodiment, the workpiece loading mechanism 20 does not need to move up and down when transferring between multiple chambers, and only involves horizontal movement, further reducing the risk of workpiece film contamination.

[0049] Specifically, see Figure 4 and Figure 5 The vacuum processing chamber 10 also includes a transmission mechanism 30, which includes a transmission member 31, a third matching member 32 and a fixed member 33. The fixed member 33 and the third matching member 32 are both rotatably disposed in the vacuum processing chamber 10. The first matching member 11 is rotatably disposed on the fixed member 33. The fixed member 33 rotates to drive the first matching member 11 to approach or move away from the second matching member 23. The third matching member 32 is connected to the first matching member 11 through the transmission member 31.

[0050] In this embodiment, the fixing member 33 is configured as a fixing rod, and the first matching member 11 is rotatably connected to the fixing rod via a rotating shaft. The fixing rod rotates clockwise or counterclockwise to drive the first matching member 11 to swing, thereby driving the first matching member 11 to move in a direction close to or away from the second matching member 23.

[0051] In this embodiment, the first mating piece 11 is configured as a combination of a sprocket and a gear, that is, the end faces of the sprocket and the gear are coaxially fixed by gluing or mechanical connection, the second mating piece 23 is configured as a gear, the third mating piece 32 is configured as a sprocket, and the transmission piece 31 is configured as a chain. The chain is wound around the sprocket of the first mating piece 11 and the outer side of the sprocket of the third mating piece 32. The third mating piece 32 rotates and drives the first mating piece 11 to rotate through the chain. The gear part of the first mating piece 11 moves in a direction close to the second mating piece 23 through the fixing piece 33, and the tooth block of the first mating piece 11 meshes with the tooth block of the second mating piece 23 to drive the second mating piece 23 to rotate, thereby driving the workpiece frame 22 to rotate.

[0052] In other embodiments, the first fitting piece 11 and the second fitting piece 23 can both be configured as magnets or one of them can be configured as a magnet and the other can be configured as a ferromagnetic material. In this case, the first fitting piece 11 and the second fitting piece 23 have different heights in the vertical direction. When the fixing piece 33 drives the first fitting piece 11 to swing, the first fitting piece 11 is located above the second fitting piece 23, and the third fitting piece 32 drives the first fitting piece 11 to rotate through a connecting piece such as a belt, thereby driving the second fitting piece 23 to rotate.

[0053] Further, the transmission mechanism 30 also includes a first limiter, which is located on the rotation path of the fixing member 33 to limit the rotation distance of the fixing member 33, thereby limiting the actual center distance between the first matching member 11 and the second matching member 23. Specifically, the first limiter can be set as a stopper, which is set on the rotation path of the fixing member 33. Specifically, a flexible buffer, such as a rubber pad, a spring or a rubber column, is provided on the side of the stopper close to the fixing member 33 to avoid the fixing member 33 and the stopper from being hard-contacted and causing the fixing member 33 to wear. It should be noted that in order to avoid the long-term meshing and mutual wear between the first matching member 11 and the second matching member 23, the actual center distance between the first matching member 11 and the second matching member 23 is greater than the theoretical center distance between the first matching member 11 and the second matching member 23, and the tooth block of the first matching member 11 can contact the tooth block of the second matching member 23 and turn the second matching member 23 to rotate. The technicians in this field can adjust the value of the actual center distance according to the actual situation on site.

[0054] Further, see Figure 6 , the vacuum processing chamber 10 also includes a driving mechanism 40, and the driving mechanism 40 includes a first driving member 41, and the first driving member 41 is connected to the third matching member 32 to drive the third matching member 32 to rotate, thereby driving the first matching member 11 to rotate. The driving mechanism 40 also includes a second driving member 42, and the second driving member 42 is connected to the fixing member 33 to drive the fixing member 33 to rotate, thereby driving the first matching member 11 to move in a direction close to or away from the second matching member 23. In this embodiment, the first driving member 41 and the second driving member 42 are both configured as motors. In other embodiments, the first driving member 41 and the second driving member 42 are both configured as cylinders. In other embodiments, the first driving member 41 and the second driving member 42 can be configured as linear motors or hydraulic cylinders, etc. In this embodiment, refer to Figure 7, the driving mechanism 40 further includes a first shaft 43 and a second shaft 44. The vacuum processing chamber 10 includes a shaft hole. The first shaft 43 passes through the shaft hole, one end is connected to the first driving member 41, and the other end is connected to the rotation center of the third fitting 32. The second shaft 44 is sleeved outside the first shaft 43. The second shaft 44 passes through the shaft hole, one end is connected to the second driving member 42, and the other end is connected to the end of the fixing member 33. The fixing member 33 is located on the side of the third fitting 32 close to the first driving member 41. Further, the driving mechanism 40 further includes a magnetorheological fluid 45. The magnetorheological fluid 45 is disposed between the first shaft 43, the second shaft 44 and the shaft hole to increase the sealing performance between the first shaft 43, the second shaft 44 and the shaft hole and prevent gas leakage in the vacuum processing chamber 10.

[0055] Further, referring to Figure 2 , the vacuum processing chamber 10 further includes a positioning mechanism 50. The positioning mechanism 50 includes a positioning rod 51. A positioning hole 231 is provided at the geometric center position of the second fitting 23 away from the central axis 221. The positioning rod 51 can move in a direction close to or away from the positioning hole 231 to insert into or disengage from the positioning hole 231. When the workpiece loading mechanism 20 approaches the mating position, there will be a slight deviation. The positioning rod 51 is used to insert into the positioning hole 231 to correct the position of the workpiece loading mechanism 20, thereby improving the mating accuracy between the first fitting 11 and the second fitting 23. Specifically, the positioning mechanism 50 further includes a fourth driving member 52. The fourth driving member 52 is connected to the positioning rod 51 to drive the positioning rod 51 to move in a direction close to or away from the positioning hole 231. In this embodiment, the fourth driving member 52 is set as a cylinder. In other embodiments, the fourth driving member 52 can be set as a linear motor or a hydraulic cylinder, etc.

[0056] Exemplarily, the workpiece loading mechanism 20 moves in the first direction. When the workpiece loading mechanism 20 reaches the mating position, it stops moving. The fourth driving member 52 drives the positioning rod 51 to move in a direction close to the positioning hole 231 and insert into the positioning hole 231 to correct the position of the workpiece loading mechanism 20. The second driving member 42 operates to drive the fixing member 33 to swing, thereby driving the first fitting 11 to approach the second fitting 23 and engage with each other. After the fixing member 33 is limited by the first limiting member, the first driving member 41 operates to drive the third fitting 32 to rotate. The third fitting 32 drives the first fitting 11 to rotate through the transmission member 31, thereby driving the second fitting 23 to rotate.

[0057] Further, the positioning mechanism 50 further includes a detection member disposed on the inner wall of the vacuum processing chamber 10 to detect whether the relative positions of the first fitting member 11 and the second fitting member 23 in the first direction meet the fitting conditions. Specifically, after the workpiece loading mechanism 20 moves into the detection range of the detection member along the first direction, the moving speed of the workpiece loading mechanism 20 along the first direction slows down. When the relative positions of the first fitting member 11 and the second fitting member 23 in the first direction meet the fitting conditions, the workpiece loading mechanism 20 stops moving along the first direction. Specifically, a plurality of detection members are provided to increase the detection accuracy. Specifically, the detection member is a distance measuring sensor, and the error of the distance measuring sensor is plus or minus 1 mm. It should be noted that since the distance measuring sensor is a prior art, its specific structure and principle will not be described in detail here.

[0058] Further, referring to Figures 8 - 10 , the vacuum processing chamber 10 further includes a limiting mechanism 60 disposed at the top or bottom of the vacuum processing chamber 10. The limiting mechanism 60 includes a second limiting member 61 that can move in a direction close to or away from the workpiece loading mechanism 20 and abut or disengage from the accommodating frame 21 to limit the movement of the workpiece loading mechanism 20 in the first direction. Specifically, the limiting mechanism 60 further includes a connecting rod 62 and a third driving member. One end of the connecting rod 62 is connected to the second limiting member 61, and the other end is connected to the third driving member. In this embodiment, the third driving member is set as a cylinder. In other embodiments, the third driving member can be set as a linear motor or a hydraulic cylinder, etc. Specifically, the connecting rod 62 is set as a telescopic rod, and the third driving member can drive the connecting rod 62 to expand and contract to drive the second limiting member 61 to move in a direction close to or away from the workpiece loading mechanism 20. In this embodiment, the limiting mechanism 60 is disposed at the bottom of the vacuum processing chamber 10 and the second limiting member 61 abuts against the central position on one side of the workpiece loading mechanism 20, so that the abutting force between the second limiting member 61 and the workpiece loading mechanism 20 is evenly dispersed, avoiding the offset or tilt of the workpiece loading mechanism 20 caused by the abutment.

[0059] Further, referring to Figure 2, the vacuum processing chamber 10 further includes a conveying mechanism 70. The conveying mechanism 70 includes a support base 71 and guide wheels 72. The support base 71 extends in a first direction. The guide wheels 72 are rotatably arranged on the support base 71 and are spaced apart in the first direction. The workpiece loading mechanism 20 can be slidably or rollingly engaged with the guide wheels 72 to move in the first direction. In other embodiments, sprockets, slide rails, lead screws, etc. can be provided to replace the guide wheels 72, which are not limited herein. When sprockets and slide rails are provided, pulleys are adaptively provided at the bottom of the workpiece loading mechanism 20. When a lead screw is provided, nuts or threaded holes are adaptively provided at the bottom of the workpiece loading mechanism 20. Specifically, the support base 71 and the guide wheels 72 are connected by a rotating shaft, and a limiting member is provided on the rotating shaft to limit the axial movement of the guide wheels 72. Since the limiting member is a prior art, it will not be described in detail herein. Specifically, the plurality of guide wheels 72 are driven by a chain and sprocket. Since the chain and sprocket are prior art, it will not be described in detail herein. In this embodiment, two groups of the conveying mechanism 70 are spaced apart in the horizontal direction perpendicular to the first direction.

[0060] Further, the vacuum processing chamber 10 further includes an offset mechanism. The offset mechanism is provided at the bottom of the workpiece loading mechanism 20. The offset mechanism can cooperate with the workpiece loading mechanism 20 to offset in the first direction and / or the second direction, and the second direction is perpendicular to the first direction. In this embodiment, the second direction is the X-axis direction.

[0061] Refer to Figure 8 , in one embodiment, the offset mechanism includes a guide member 84, a carrier member 85, and an air rubber ball 81 or a universal ball. The guide member 84 is relatively stationary with respect to the accommodation frame 21 in the first direction. A guide groove is formed on one side of the guide member 84 in the first direction, and the guide groove can be slidably engaged with the guide wheels 72. The carrier member 85 is connected to the guide member 84. One side of the carrier member 85 has an opening and a carrier cavity inside. The air rubber ball 81 is floatingly engaged with the carrier cavity. When the positioning rod 51 is inserted into the positioning hole 231, the air rubber ball 81 can move adaptively in the first direction and / or the second direction relative to the carrier cavity to correct the position of the workpiece loading mechanism 20.

[0062] Refer to Figure 9 , in one embodiment, the offset mechanism includes a sliding guide rail 82. One side of the sliding guide rail 82 is connected to the workpiece loading mechanism 20, and the other side is slidably engaged with the guide wheels 72 in the first direction. When the positioning rod 51 is inserted into the positioning hole 231, the sliding guide rail 82 can move adaptively in the first direction to correct the position of the workpiece loading mechanism 20.

[0063] Refer to Figure 10, in one embodiment, the offset mechanism includes a sliding guide rail 82 and a magnetic member 83. One side of the sliding guide rail 82 is connected to the workpiece loading mechanism 20, and the other side is slidably engaged with the guide wheel 72 in the first direction. Magnetic members 83 are provided on both the bottom wall of the vacuum processing chamber 10 and the bottom of the accommodation frame 21. When the workpiece loading mechanism 20 is in place, the same poles of the two magnetic members 83 approach each other to generate a repulsive force, causing the workpiece loading mechanism 20 to float in the vertical direction, that is: a gap is generated between the sliding guide rail 82 and the guide wheel 72. When the positioning rod 51 is inserted into the positioning hole 231, the sliding guide rail 82 can adaptively move in the first direction and / or the second direction to correct the position of the workpiece loading mechanism 20.

[0064] Exemplarily, when the vacuum processing chamber 10 provided in this embodiment is working, the workpiece loading mechanism 20 moves into the vacuum processing chamber 10 in the first direction. When the workpiece loading mechanism 20 enters the detection range of the detection member, the moving speed of the workpiece loading mechanism 20 in the first direction slows down. The third driving member drives the second limiting member 61 to move in the direction close to the vacuum loading mechanism 20. When the workpiece loading mechanism 20 is in place, that is, when the accommodation frame 21 abuts against the second limiting member 61, at this time, the relative positions of the first engaging member 11 and the second engaging member 23 in the first direction have the matching conditions, and the workpiece loading mechanism 20 stops moving in the first direction. The detection member sends a signal to the fourth driving member 52, and the fourth driving member 52 drives the positioning rod 51 to insert into the positioning hole 231. After the positioning rod 51 is inserted, the second driving member 42 operates to drive the fixing member 33 to swing, thereby driving the first engaging member 11 to approach the second engaging member 23 and engage with each other. During the swinging process of the fixing member 33, the fixing member 33 will contact the first limiting member. After the fixing member 33 is limited by the first limiting member, the first driving member 41 operates to drive the third engaging member 32 to rotate. The third engaging member 32 drives the first engaging member 11 to rotate through the transmission member 31 to drive the second engaging member 23 to rotate, thereby driving the workpiece rack 22 to rotate. Then, the vacuum processing mechanism performs vacuum processing on the workpiece; when the vacuum processing of the workpiece is completed, the first driving member 41 stops operating, and the second driving member 42 operates to drive the fixing member 33 to swing, thereby driving the first engaging member 11 away from the second engaging member 23, causing the first engaging member 11 and the second engaging member 23 to disengage. The fourth driving member 52 drives the positioning rod 51 to disengage from the positioning hole 231, and the workpiece loading mechanism 20 moves in the first direction to reach other chambers.

[0065] In one embodiment, the vacuum processing chamber 10 further includes a fixing mechanism that can abut against the accommodation frame 21 to limit the movement of the accommodation frame 21. Specifically, the fixing mechanism can be set as a plurality of telescopic cylinders, and the cylinder rods of the telescopic cylinders can extend and retract and abut against the accommodation frame 21 to fix the position of the accommodation frame 21. In other embodiments, the fixing mechanism can also be set as a fixed clamp, etc. Since the fixing mechanism is a prior art, it will not be elaborated here.

[0066] Refer to Figure 1 Figure 1 , this embodiment further provides a multi-chamber vacuum processing device, which includes a loading chamber 1, an unloading chamber 2, and at least one vacuum processing chamber 10. The loading chamber 1, the at least one vacuum processing chamber 10, and the unloading chamber 2 are arranged in sequence along a first direction and can be selectively communicated. Specifically, gates 3 can be provided between the loading chamber 1, the vacuum processing chamber 10, and the unloading chamber 2 to maintain the independence of each chamber and avoid mutual influence on the vacuum processing among multiple chambers. In one embodiment, the structures of the loading chamber 1 and the unloading chamber 2 are the same as those of the vacuum processing chamber 10 to reduce the design cost and facilitate the addition of other vacuum processing mechanisms in the loading chamber 1 and the unloading chamber 2, increasing the versatility of the loading chamber 1 and the unloading chamber 2. In one embodiment, the structures of the loading chamber 1 and the unloading chamber 2 are different from those of the vacuum processing chamber 10. For example, no vacuum processing source is provided, so the structures in the loading chamber 1 and the unloading chamber 2 are relatively simple to save material costs and maintenance costs.

[0067] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A vacuum processing chamber, characterized in that, A first fitting member (11) is rotatably provided at the top and / or bottom of the vacuum processing chamber (10), and the vacuum processing chamber (10) includes: A workpiece loading mechanism (20) is movably provided in the vacuum processing chamber (10) along a first direction, and includes a receiving frame (21) and a workpiece rack (22). A plurality of workpieces are loaded on the workpiece rack (22). A central axis (221) is provided in the workpiece rack (22) along the vertical direction. The workpiece rack (22) is rotatably provided in the receiving frame (21) around the central axis (221). A second fitting member (23) is connected to the top and / or bottom of the central axis (221). The first fitting member (11) can move in a direction close to or away from the second fitting member (23) to cooperate with or disengage from the second fitting member (23).

2. The vacuum processing chamber according to claim 1, wherein, The vacuum processing chamber (10) further includes a transmission mechanism (30). The transmission mechanism (30) includes a transmission member (31), a third fitting member (32), and a fixing member (33). The fixing member (33) and the third fitting member (32) are both rotatably provided in the vacuum processing chamber (10). The first fitting member (11) is rotatably provided on the fixing member (33). The fixing member (33) rotates to drive the first fitting member (11) to approach or move away from the second fitting member (23). The third fitting member (32) is drivingly connected to the first fitting member (11) through the transmission member (31).

3. The vacuum processing chamber according to claim 2, wherein, The transmission mechanism (30) further includes a first limiting member. The first limiting member is located on the rotation path of the fixing member (33) to limit the rotation distance of the fixing member (33), thereby limiting the actual center distance between the first fitting member (11) and the second fitting member (23).

4. The vacuum processing chamber according to claim 2, wherein The vacuum processing chamber (10) further includes a driving mechanism (40). The driving mechanism (40) includes a first driving member (41). The first driving member (41) is connected to the third fitting member (32) to drive the third fitting member (32) to rotate, thereby driving the first fitting member (11) to rotate.

5. The vacuum processing chamber according to claim 4, wherein, The driving mechanism (40) further includes a second driving member (42). The second driving member (42) is connected to the fixing member (33) to drive the fixing member (33) to rotate, thereby driving the first fitting member (11) to move in a direction close to or away from the second fitting member (23).

6. The vacuum processing chamber according to claim 1, characterized in that, The vacuum processing chamber (10) further includes a positioning mechanism (50). The positioning mechanism (50) includes a positioning rod (51). A positioning hole (231) is provided at the geometric center position of the second fitting member (23) facing away from the central axis (221). The positioning rod (51) can move in a direction close to or away from the positioning hole (231) to insert into or disengage from the positioning hole (231).

7. The vacuum processing chamber according to any one of claims 1-6, characterized in that, The vacuum processing chamber (10) further includes a limiting mechanism (60). The limiting mechanism (60) is disposed at the top or bottom of the vacuum processing chamber (10). The limiting mechanism (60) includes a second limiting member (61). The second limiting member (61) can move in a direction close to or away from the workpiece loading mechanism (20) and abut or disengage from the accommodating frame (21), so as to limit the movement of the workpiece loading mechanism (20) in the first direction.

8. The vacuum processing chamber according to any one of claims 1-6, characterized in that, The vacuum processing chamber (10) further includes a conveying mechanism (70). The conveying mechanism (70) includes a support seat (71) and guide wheels (72). The support seat (71) extends in the first direction. The guide wheels (72) are rotatably disposed on the support seat (71) and a plurality of them are arranged at intervals in the first direction. The workpiece loading mechanism (20) can be in sliding or rolling cooperation with the guide wheels (72) to move in the first direction.

9. The vacuum processing chamber according to claim 8, wherein The vacuum processing chamber (10) further includes an offset mechanism. The offset mechanism is disposed at the bottom of the workpiece loading mechanism (20). The offset mechanism can cooperate with the workpiece loading mechanism (20) to offset in the first direction and / or the second direction, and the second direction is perpendicular to the first direction.

10. A multi-chamber vacuum processing device, characterized in that, It includes a loading chamber (1), an unloading chamber (2) and at least one vacuum processing chamber (10) as described in any one of claims 1-9. The loading chamber (1), at least one of the vacuum processing chambers (10) and the unloading chamber (2) are arranged in sequence in the first direction and can be selectively communicated.

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