Observation window group of vacuum evaporator door for observing optical film material

Abstract

The invention provides an observation window group of a vacuum evaporator door for observing an optical film material, the observation window group comprises a plurality of observation window devices, each observation window device comprises a mounting frame, an outer shading device and an observation window body, the mounting frame protrudes out of a cavity door, and the outer shading device is connected to the outer side of the mounting frame; the observation window body comprises a first rotating shaft, a first anti-attachment plate, a second rotating shaft, a second anti-attachment plate, first glass and second glass, one end of the first rotating shaft penetrates through the mounting frame to be connected with the first anti-attachment plate, the second anti-attachment plate and the first glass, and the other end of the first rotating shaft penetrates through the outer shading device to be connected with the outer shading device; the second rotating shaft is connected outside the first rotating shaft in a sleeved mode, one end of the second rotating shaft is connected with the second adjusting bolt in a sleeved mode, and the other end of the second rotating shaft is connected with the circle center of the second anti-attachment plate in a clamped mode. The first anti-adhesion plate and the second anti-adhesion plate are both anti-adhesion plates larger than a semicircle and smaller than a whole circle, the film material is prevented from splashing, and the replacement frequency of the first glass and the second glass is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation machines, and more specifically, to an observation window group for an observation window of a vacuum evaporation machine door for observing optical film materials. Background Art

[0002] With the wide application of vacuum evaporation technology in the preparation of optical film materials, the demand for real-time observation of the ion source, evaporation source state, and film material deposition during the coating process is increasing day by day.

[0003] In the prior art, the observation window structures disclosed in patents such as CN216445456U and CN214271021U have improved some problems through designs such as polarization film adjustment and multi-view window layout. However, during observation or non-observation, film material splashes are likely to adhere and accumulate on the observation window glass. If it is frequently replaced, it is likely to cause sealing problems and high maintenance costs. The existing anti-splash plate designs are mostly simple baffles or louvered structures, which cannot meet the dual functions of full viewing angle during observation and anti-splash during non-observation.

[0004] In view of the above problems, there is an urgent need for a new type of observation window structure to achieve the dual functions of observation and anti-splash. Summary of the Invention

[0005] In view of this, in order to solve the above problems, the present invention proposes an observation window group for an observation window of a vacuum evaporation machine door for observing optical film materials. Through double-rotating shaft linkage adjustment, the first rotating shaft and the second rotating shaft respectively control two anti-splash plates. Combining with the shape of the anti-splash plate that is greater than a semi-circle but less than a full circle, when the two anti-splash plates are closed, they can form a complete seal through vertical space superposition, avoiding film material splashing from the joint. When adjusting the viewing angle, the rotation of the anti-splash plates will not cause mutual collision or occlusion failure due to an overly large shape (such as a full circle), realizing 360° full viewing angle adjustment and the dual functions of observation and anti-splash.

[0006] An observation window group for the door of a vacuum evaporation machine for observing optical film materials. The observation window group is provided on the chamber door 5 of the vacuum evaporation machine. The height of the observation window group is flush with the positions of the ion source and the evaporation source in the vacuum chamber. The observation window group includes a plurality of observation window devices 1. The observation window devices 1 are located on the same horizontal line. The middle observation window device 1 is used to observe the ion source, and the observation window devices 1 on both sides are used to observe the evaporation source. It is characterized in that: the observation window device 1 includes a mounting frame 2, an outer light-shielding device 3, and an observation window body 4. The mounting frame 2 is integrally formed with the chamber door 5, reducing the installation complexity of the traditional split observation window. The mounting frame 2 protrudes outside the chamber door 5. The outer light-shielding device 3 is connected to the outside of the mounting frame 2, further optimizing the optical path control and avoiding interference of external stray light on the observation effect; the observation window body 4 includes a first rotating shaft 41, a first anti-spattering plate 42, a second rotating shaft 43, a second anti-spattering plate 44, a first glass 46, and a second glass 47. One end of the first rotating shaft 41 passes through the mounting frame 2 and is connected to the first anti-spattering plate 42, the second anti-spattering plate 44, and the first glass 46. The other end passes through the outer light-shielding device 3 and is connected to the outer light-shielding device 3 through the first glass 46. One end of the first rotating shaft 41 is sleeved with a first adjusting bolt 411, and the other end is clamped to the center of the first anti-spattering plate 42. When adjusting the first adjusting bolt 411, the first rotating shaft 41 drives the first anti-spattering plate 42 to rotate. The second rotating shaft 43 is sleeved outside the first rotating shaft 41. One end of the second rotating shaft 43 is sleeved with a second adjusting bolt 431, and the other end is clamped to the center of the second anti-spattering plate 44. When adjusting the second anti-spattering plate 44, the second rotating shaft 43 drives the second anti-spattering plate 44 to rotate; by rotating the first adjusting bolt 411 and the second adjusting bolt 431 left and right, the left and right rotation of the first anti-spattering plate 42 and the second anti-spattering plate 44 is controlled. The first anti-spattering plate 42 and the second anti-spattering plate 44 are both anti-spattering plates larger than a semi-circle and smaller than a full circle, preventing the film material from splashing onto the first glass 46 or the second glass 47 at the vertical space junction of the first anti-spattering plate 42 and the second anti-spattering plate 44, reducing the replacement frequency of the first glass 46 and the second glass 47; during observation, by rotating the first adjusting bolt 411 or the second adjusting bolt 431, the operator can flexibly adjust the visible range of the observation window, covering the entire process area, without frequently moving or changing the observation position, achieving 360° full-angle adjustment. When observation is not required, the first anti-spattering plate 42 and the second anti-spattering plate 44 can be rotated and closed to form a complete circular barrier, avoiding the film material from splashing onto the surfaces of the first glass 46 and the second glass 47 during the evaporation process. At the same time, the non-full-circle but overlapping and sealed design of the first anti-spattering plate 42 and the second anti-spattering plate 44 not only ensures the anti-splash effect when closed but also avoids the possible mechanical interference problem of the traditional full-circle anti-spattering plate.

[0007] Further, the first protection plate 42, the second protection plate 44, the first glass 46, and the second glass 47 are sequentially arranged on the observation window body 4 from the inside of the cavity to the outside of the cavity. An axle sleeve 45 is sleeved outside the second rotating shaft 43. One end of the axle sleeve 45 is clamped to the center of the first glass 46. Locking nuts 48 are arranged on both sides of the first glass 46 to lock the first glass 46 and the axle sleeve 45.

[0008] Further, the outer edge of the second glass 47 is arranged between the installation frame 2 and the outer light-shielding device 3. The center of the second glass 47 is sleeved on the outer circle of the axle sleeve 45, and the second glass 47 and the axle sleeve 45 are locked by a locking nut 48.

[0009] Further, the thickness of the first glass 46 is less than that of the second glass 47, and the cost is low. As the film-forming time progresses, the light transmittance of the first glass 46 will decrease. Therefore, only the first glass 46 needs to be disassembled and replaced, further reducing the consumption frequency of the second glass 47 and preventing the sealing problem caused by repeated disassembly and assembly of the second glass 47.

[0010] Further, sealing rings or magneto-fluids are provided between the first rotating shaft 41 and the second rotating shaft 43, between the second rotating shaft 43 and the axle sleeve 45, and between the axle sleeve 45 and the second glass 47.

[0011] Further, the outer light-shielding device 3 includes a connection frame 31 and an outer light-shielding plate 32. The connection frame 31 is of an annular structure. A plurality of connection bolts 312 are provided on the connection frame 31. A plurality of connection holes 22 are provided on the outer side of the installation frame 2. The outer light-shielding device 3 is connected to the installation frame 2 by one-to-one correspondence connection of the connection bolts 312 and the connection holes 22.

[0012] Further, a connection column 313 is also provided on the connection frame 31. One end of the connection column 313 is connected to the inside of the connection frame 31, and the other end is connected to the inside of the outer light-shielding plate 32. The outer light-shielding plate 32 is rotatably connected to the connection frame 31 through the connection column 313. The outer light-shielding plate 32 is of an annular structure. A light-shielding sheet 322 is clamped in the middle of the outer light-shielding plate 32. The light-shielding sheet 322 is a dark glass. When observation is needed, the brightness of the visible light source is reduced through the outer light-shielding plate 32 to reduce damage to the human eye. When the light source brightness is not high, the outer light-shielding plate 32 is rotated to directly observe the situation inside the cavity on the outside of the second glass 47.

[0013] Further, a first clamping groove 321 is provided on the inner wall of the outer light-shielding plate 32 near the outside. A light-shielding sheet fixing ring 323 is clamped in the first clamping groove 321. The light-shielding sheet fixing ring 323 is located outside the light-shielding sheet 322. At least two protruding parts 324 are provided on the light-shielding sheet fixing ring 323. The protruding parts 324 are on the same plane as the light-shielding sheet fixing ring 323 and are integrally formed, and are used to fix the light-shielding sheet 322 to prevent it from falling off.

[0014] Furthermore, a second card slot 311 is provided in a circle near the inner side of the inner wall of the connection frame 31. The installation frame 2 is an annular structure, part of which is on the same curved surface as the chamber door 5 and part of which protrudes outside the chamber door 5. A third card slot 21 is provided in a circle near the outer side of the inner wall of the annular structure. The second glass 47 is connected between the second card slot 311 and the third card slot 21.

[0015] Furthermore, a chamber door anti-spattering plate 51 is connected to the inner side wall of the chamber door 5. A plurality of openings 52 are provided on the chamber door anti-spattering plate 51, and each opening 52 corresponds to the position of the observation window device 1 one by one.

[0016] In some embodiments, a plurality of clamping pieces 57 are provided on the side of the edge of the opening 52 close to the inside of the chamber. A square anti-spattering plate 53 is clamped by the plurality of clamping pieces 57. The area of the square anti-spattering plate 53 is larger than that of the opening 52, so that the square anti-spattering plate 53 can cover the opening 52 when the inside of the chamber is not observed.

[0017] Furthermore, a observation glass 58 is clamped by a plurality of clamping pieces 57 in the middle of the square anti-spattering plate 53 for observing the light spot of the position of the evaporation source. Even if the optical film material is evaporated onto the observation glass 58, it does not completely block the light, but only blocks light of a certain wavelength. As the film forming time goes by, the light transmittance of the observation glass 58 will decrease. Therefore, each time the chamber door 5 is opened, it can be checked whether the observation glass 58 needs to be replaced, so as to reduce the replacement frequency of the second glass 47 on the observation window device 1, thereby reducing the sealing problems caused by repeated disassembly and assembly.

[0018] In some embodiments, a anti-spattering cover device 54 is provided on the side of the observation window body 4 close to the inside of the chamber. One side of the anti-spattering cover device 54 is connected to the side of the installation frame 2 close to the inside of the chamber, and a third anti-spattering plate 55 is provided on the other side. A observation glass 58 is clamped by a plurality of clamping pieces 57 in the middle of the third anti-spattering plate 55.

[0019] Furthermore, an anti-spattering plate fixing ring 56 is provided at the connection between the third anti-spattering plate 55 and the anti-spattering cover device 54. A protruding part 324 is provided on the anti-spattering plate fixing ring 56. The protruding part 324 is on the same plane as the anti-spattering plate fixing ring 56 and is integrally formed to prevent the third anti-spattering plate 55 from falling off.

[0020] In some embodiments, both the light shielding sheet fixing ring 323 and the anti-spattering plate fixing ring 56 are elastic members.

[0021] Advantages of the present invention: The present invention provides an observation window group for the door of a vacuum evaporation machine for observing optical film materials. Through the linkage adjustment of a double rotating shaft, the first rotating shaft and the second rotating shaft respectively control two anti-splash plates. Combining with the shape of the anti-splash plates that is greater than a semi-circle but less than a full circle, the two anti-splash plates can form a complete seal through vertical space superposition when closed, avoiding the splashing of film materials from the seams. When adjusting the viewing angle, the rotation of the anti-splash plates will not cause mutual collision or occlusion failure due to the overly large shape, realizing the functions of 360° full-view adjustment, observation and anti-splash. Brief Description of the Drawings

[0022] Figure 1 It is the overall structure diagram of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0023] Figure 2 It is the cross-sectional view of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0024] Figure 3 For Figure 2 The enlarged split view of part A.

[0025] Figure 4 It is the structure diagram of the observation window body of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0026] Figure 5 It is the cross-sectional view of the observation window body of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0027] Figure 6 It is the structure diagram of the installation frame of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0028] Figure 7 It is the structure diagram of the external light-shielding device of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0029] Figure 8 It is the cross-sectional view of the external light-shielding device of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0030] Figure 9 It is the structure diagram of the light-shielding sheet fixing ring of the observation window group for the door of a vacuum evaporation machine for observing optical film materials of the present invention.

[0031] Figure 10 It is the external perspective view of the cavity door anti-splash plate of Embodiment 1 of the present invention.

[0032] Figure 11 It is the internal perspective view of the cavity door anti-splash plate of Embodiment 1 of the present invention.

[0033] Figure 12Structural diagram of the anti-exposure device according to Embodiment 2 of the present invention.

[0034] Description of main component symbols

[0035] Observation window device 1, mounting frame 2, third card slot 21, connection hole 22, outer light-shielding device 3, connection frame 31, second card slot 311, connection bolt 312, connection column 313, outer light-shielding plate 32, first card slot 321, light-shielding piece 322, light-shielding piece fixing ring 323, protruding part 324, observation window body 4, first rotating shaft 41, first adjusting bolt 411, first anti-exposure plate 42, second rotating shaft 43, second adjusting bolt 431, second anti-exposure plate 44, shaft sleeve 45, first glass 46, second glass 47, locking nut 48, cavity door 5, cavity door anti-exposure plate 51, opening 52, square anti-exposure plate 53, anti-exposure device 54, third anti-exposure plate 55, anti-exposure plate fixing ring 56, clip 57, observation glass 58.

[0036] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. Specific embodiments Embodiment 1:

[0037] An observation window group for the door of a vacuum evaporation machine for observing optical film materials. The observation window group is arranged on the chamber door 5 of the vacuum evaporation machine. The height of the observation window group is flush with the positions of the ion source and the evaporation source in the vacuum chamber. The observation window group includes a plurality of observation window devices 1. The observation window devices 1 are located on the same horizontal line. The middle observation window device 1 is used to observe the ion source, and the observation window devices 1 on both sides are used to observe the evaporation source. It is characterized in that: the observation window device 1 includes a mounting frame 2, an outer light-shielding device 3, and an observation window body 4. The mounting frame 2 is integrally formed with the chamber door 5, reducing the installation complexity of the traditional split-type observation window. The mounting frame 2 protrudes outside the chamber door 5. The outer light-shielding device 3 is connected to the outside of the mounting frame 2, further optimizing the optical path control and avoiding interference of external stray light on the observation effect; the observation window body 4 includes a first rotating shaft 41, a first anti-spattering plate 42, a second rotating shaft 43, a second anti-spattering plate 44, a first glass 46, and a second glass 47. One end of the first rotating shaft 41 passes through the mounting frame 2 and is connected to the first anti-spattering plate 42, the second anti-spattering plate 44, and the first glass 46. The other end passes through the outer light-shielding device 3 and is connected to the outer light-shielding device 3 through the first glass 46. One end of the first rotating shaft 41 is sleeved with a first adjusting bolt 411, and the other end is clamped to the center of the first anti-spattering plate 42. When adjusting the first adjusting bolt 411, the first rotating shaft 41 drives the first anti-spattering plate 42 to rotate. The second rotating shaft 43 is sleeved outside the first rotating shaft 41. One end of the second rotating shaft 43 is sleeved with a second adjusting bolt 431, and the other end is clamped to the center of the second anti-spattering plate 44. When adjusting the second anti-spattering plate 44, the second rotating shaft 43 drives the second anti-spattering plate 44 to rotate; by rotating the first adjusting bolt 411 and the second adjusting bolt 431 left and right, the left and right rotation of the first anti-spattering plate 42 and the second anti-spattering plate 44 is controlled. The first anti-spattering plate 42 and the second anti-spattering plate 44 are both anti-spattering plates that are larger than a semi-circle and smaller than a full circle, preventing the film material from splashing onto the first glass 46 or the second glass 47 from the vertical space junction of the first anti-spattering plate 42 and the second anti-spattering plate 44, and reducing the replacement frequency of the first glass 46 and the second glass 47.

[0038] The first anti-spattering plate 42, the second anti-spattering plate 44, the first glass 46, and the second glass 47 are sequentially arranged on the observation window body 4 from the chamber interior to the chamber exterior. A bushing 45 is sleeved outside the second rotating shaft 43. One end of the bushing 45 is clamped to the center of the first glass 46. Locking nuts 48 are provided on both sides of the first glass 46 to lock the first glass 46 and the bushing 45.

[0039] The outer edge of the second glass 47 is arranged between the mounting frame 2 and the outer light-shielding device 3. The center of the second glass 47 is sleeved on the outer circle of the bushing 45, and the second glass 47 and the bushing 45 are locked by a locking nut 48.

[0040] The thickness of the first glass 46 is less than that of the second glass 47, and the cost is low. As the film-forming time progresses, the light transmittance of the first glass 46 will decrease. Therefore, only the first glass 46 needs to be disassembled and replaced, further reducing the consumption frequency of the second glass 47 and preventing the repeated disassembly and assembly of the second glass 47 from affecting the sealing problem.

[0041] Sealing rings or magnetic fluids are provided between the first rotating shaft 41 and the second rotating shaft 43, between the second rotating shaft 43 and the bushing 45, and between the bushing 45 and the second glass 47.

[0042] The external light-shielding device 3 includes a connecting frame 31 and an external light-shielding plate 32. The connecting frame 31 is of an annular structure. A plurality of connecting bolts 312 are provided on the connecting frame 31. A plurality of connecting holes 22 are provided on the outer side of the mounting frame 2. The external light-shielding device 3 is connected to the mounting frame 2 by connecting the connecting bolts 312 and the connecting holes 22 in a one-to-one correspondence.

[0043] A connecting column 313 is further provided on the connecting frame 31. One end of the connecting column 313 is connected inside the connecting frame 31, and the other end is connected inside the external light-shielding plate 32. The external light-shielding plate 32 is rotatably connected to the connecting frame 31 through the connecting column 313. The external light-shielding plate 32 is of an annular structure. A light-shielding sheet 322 is clamped in the middle of the external light-shielding plate 32. The light-shielding sheet 322 is made of dark glass. When observation is needed, the visible light source brightness is reduced through the external light-shielding plate 32 to reduce damage to the human eye. When the light source brightness is not high, the external light-shielding plate 32 is rotated to directly observe the situation inside the chamber on the outer side of the second glass 47.

[0044] A first card slot 321 is provided on the inner wall of the external light-shielding plate 32 near the outer side. A light-shielding sheet fixing ring 323 is clamped in the first card slot 321. The light-shielding sheet fixing ring 323 is located outside the light-shielding sheet 322. At least two protrusions 324 are provided on the light-shielding sheet fixing ring 323. The protrusions 324 are on the same plane as the light-shielding sheet fixing ring 323 and are integrally formed to fix the light-shielding sheet 322 to prevent it from falling off.

[0045] A second card slot 311 is provided on the inner wall of the connecting frame 31 near the inner side. The mounting frame 2 is of an annular structure with part of it on the same curved surface as the chamber door 5 and part of it protruding outside the chamber door 5. A third card slot 21 is provided on the inner wall of the annular structure near the outer side. The second glass 47 is connected between the second card slot 311 and the third card slot 21.

[0046] A chamber door anti-staining plate 51 is connected to the inner side wall of the chamber door 5. A plurality of openings 52 are provided on the chamber door anti-staining plate 51. Each opening 52 corresponds to the position of the observation window device 1 one by one.

[0047] On one side of the edge of the opening 52 close to the cavity, a plurality of clamping pieces 57 are provided. A square anti-sputtering plate 53 is clamped by the plurality of clamping pieces 57. The area of the square anti-sputtering plate 53 is larger than that of the opening 52, so that the square anti-sputtering plate 53 can cover the opening 52 when the cavity conditions are not observed.

[0048] In the middle of the square anti-sputtering plate 53, an observation glass 58 is clamped by a plurality of clamping pieces 57 for observing the light spot at the position of the evaporation source. Even if the optical film material is evaporated onto the observation glass 58, it does not completely block the light, but only blocks light of a certain wavelength. As the film forming time progresses, the light transmittance of the observation glass 58 will decrease. Therefore, each time the cavity door 5 is opened, it is possible to check whether the observation glass 58 needs to be replaced, so as to reduce the replacement frequency of the second glass 47 on the observation window device 1, thereby reducing the sealing problems caused by repeated disassembly and assembly.

[0049] The light-shielding sheet fixing ring 323 is an elastic member.

[0050] The beneficial effects of the present invention: The present invention provides an observation window group for the door of a vacuum evaporator for observing optical film materials. Through the linkage adjustment of a double rotating shaft, the first rotating shaft and the second rotating shaft respectively control two anti-sputtering plates. Combining with the shape of the anti-sputtering plate that is larger than a semicircle but smaller than a full circle, the two anti-sputtering plates can form a complete seal through vertical space superposition when closed, avoiding the splashing of the film material from the joint. When adjusting the viewing angle, the rotation of the anti-sputtering plates will not cause mutual collision or occlusion failure due to the over-large shape, realizing 360° full-view adjustment, observation and anti-sputtering dual functions. Embodiment 2:

[0051] An observation window group for the door of a vacuum evaporation machine for observing optical film materials. The observation window group is arranged on the cavity door 5 of the vacuum evaporation machine. The height of the observation window group is flush with the positions of the ion source and the evaporation source in the vacuum chamber. The observation window group includes a plurality of observation window devices 1. The observation window devices 1 are located on the same horizontal line. The middle observation window device 1 is used to observe the ion source, and the observation window devices 1 on both sides are used to observe the evaporation source. It is characterized in that: the observation window device 1 includes a mounting frame 2, an outer light-shielding device 3, and an observation window body 4. The mounting frame 2 is integrally formed with the cavity door 5, reducing the installation complexity of the traditional split-type observation window. The mounting frame 2 protrudes outside the cavity door 5. The outer light-shielding device 3 is connected to the outside of the mounting frame 2, further optimizing the optical path control and avoiding interference of external stray light on the observation effect; the observation window body 4 includes a first rotating shaft 41, a first anti-spattering plate 42, a second rotating shaft 43, a second anti-spattering plate 44, a first glass 46, and a second glass 47. One end of the first rotating shaft 41 passes through the mounting frame 2 and is connected to the first anti-spattering plate 42, the second anti-spattering plate 44, and the first glass 46. The other end passes through the outer light-shielding device 3 and is connected to the outer light-shielding device 3 through the first glass 46. One end of the first rotating shaft 41 is sleeved with a first adjusting bolt 411, and the other end is clamped to the center of the first anti-spattering plate 42. When adjusting the first adjusting bolt 411, the first rotating shaft 41 drives the first anti-spattering plate 42 to rotate. The second rotating shaft 43 is sleeved outside the first rotating shaft 41. One end of the second rotating shaft 43 is sleeved with a second adjusting bolt 431, and the other end is clamped to the center of the second anti-spattering plate 44. When adjusting the second anti-spattering plate 44, the second rotating shaft 43 drives the second anti-spattering plate 44 to rotate; by rotating the first adjusting bolt 411 and the second adjusting bolt 431 left and right, the left and right rotation of the first anti-spattering plate 42 and the second anti-spattering plate 44 is controlled. The first anti-spattering plate 42 and the second anti-spattering plate 44 are both anti-spattering plates that are larger than a semi-circle and smaller than a whole circle, preventing the film material from splashing onto the first glass 46 or the second glass 47 from the vertical space junction of the first anti-spattering plate 42 and the second anti-spattering plate 44, and reducing the replacement frequency of the first glass 46 and the second glass 47.

[0052] The first anti-spattering plate 42, the second anti-spattering plate 44, the first glass 46, and the second glass 47 are sequentially arranged on the observation window body 4 from the cavity to the outside of the cavity. A shaft sleeve 45 is sleeved outside the second rotating shaft 43. One end of the shaft sleeve 45 is clamped to the center of the first glass 46. Locking nuts 48 are arranged on both sides of the first glass 46 so that the first glass 46 is locked with the shaft sleeve 45.

[0053] The outer edge of the second glass 47 is arranged between the mounting frame 2 and the outer light-shielding device 3. The center of the second glass 47 is sleeved on the outer circle of the shaft sleeve 45, and the second glass 47 is locked with the shaft sleeve 45 through the locking nut 48.

[0054] The thickness of the first glass 46 is less than that of the second glass 47, and the cost is low. As the film-forming time progresses, the light transmittance of the first glass 46 will decrease. Therefore, only the first glass 46 needs to be disassembled and replaced, further reducing the consumption frequency of the second glass 47 and preventing the repeated disassembly and assembly of the second glass 47 from affecting the sealing problem.

[0055] A sealing ring or magnetic fluid is provided between the first rotating shaft 41 and the second rotating shaft 43, between the second rotating shaft 43 and the bushing 45, and between the bushing 45 and the second glass 47.

[0056] The outer light-shielding device 3 includes a connecting frame 31 and an outer light-shielding plate 32. The connecting frame 31 is a ring structure. A plurality of connecting bolts 312 are provided on the connecting frame 31. A plurality of connecting holes 22 are provided on the outer side of the mounting frame 2. The outer light-shielding device 3 is connected to the mounting frame 2 by connecting the connecting bolts 312 and the connecting holes 22 in a one-to-one correspondence.

[0057] A connecting column 313 is further provided on the connecting frame 31. One end of the connecting column 313 is connected inside the connecting frame 31, and the other end is connected inside the outer light-shielding plate 32. The outer light-shielding plate 32 is rotatably connected to the connecting frame 31 through the connecting column 313. The outer light-shielding plate 32 is a ring structure. A light-shielding sheet 322 is clamped in the middle of the outer light-shielding plate 32. The light-shielding sheet 322 is a dark glass. When observation is needed, the outer light-shielding plate 32 is used to weaken the brightness of the visible light source, reducing the damage to the human eye. When the light source brightness is not high, the outer light-shielding plate 32 is rotated to directly observe the situation inside the chamber on the outer side of the second glass 47.

[0058] A first clamping groove 321 is provided on the inner wall of the outer light-shielding plate 32 near the outer side. A light-shielding sheet fixing ring 323 is clamped in the first clamping groove 321. The light-shielding sheet fixing ring 323 is located outside the light-shielding sheet 322. At least two protruding parts 324 are provided on the light-shielding sheet fixing ring 323. The protruding parts 324 are in the same plane as the light-shielding sheet fixing ring 323 and are integrally formed, for fixing the light-shielding sheet 322 to prevent it from falling off.

[0059] A second clamping groove 311 is provided on the inner wall of the connecting frame 31 near the inner side. The mounting frame 2 is a ring structure with part of it on the same curved surface as the chamber door 5 and part protruding outside the chamber door 5. A third clamping groove 21 is provided on the inner wall of the ring structure near the outer side. The second glass 47 is connected between the second clamping groove 311 and the third clamping groove 21.

[0060] On one side of the observation window body 4 close to the inside of the cavity, there is an anti-sputtering cover device 54. One side of the anti-sputtering cover device 54 is connected to one side of the mounting frame 2 close to the inside of the cavity, and on the other side, there is a third anti-sputtering plate 55. In the middle of the third anti-sputtering plate 55, an observation glass 58 is clamped by a plurality of clips 57, which is used to observe the light spot of the position of the evaporation source. Even if the optical film material is evaporated onto the observation glass 58, it does not completely block the light, but only blocks light of a certain wavelength. As the film forming time goes by, the light transmittance of the observation glass 58 will decrease. Therefore, each time the cavity door 5 is opened, it can be checked whether the observation glass 58 needs to be replaced, so as to reduce the replacement frequency of the second glass 47 on the observation window device 1, thereby reducing the sealing problems caused by repeated disassembly and assembly.

[0061] At the connection between the third anti-sputtering plate 55 and the anti-sputtering cover device 54, there is an anti-sputtering plate fixing ring 56. On the anti-sputtering plate fixing ring 56, there is a protruding part 324. The protruding part 324 is in the same plane as the anti-sputtering plate fixing ring 56 and is integrally formed to prevent the third anti-sputtering plate 55 from falling off.

[0062] Both the light-shielding sheet fixing ring 323 and the anti-sputtering plate fixing ring 56 are elastic parts.

[0063] The beneficial effects of the present invention: Through the double-rotating shaft linkage adjustment, the first rotating shaft and the second rotating shaft respectively control the two anti-sputtering plates. Combining with the shape of the anti-sputtering plates that is greater than a semi-circle but less than a whole circle, the two anti-sputtering plates can form a complete seal by vertical space superposition when closed, avoiding the splashing of the film material from the joint. When adjusting the viewing angle, the rotation of the anti-sputtering plates will not cause mutual collision or shielding failure due to the too large shape, realizing the 360° full-view angle adjustment, observation and anti-sputtering dual functions.

[0064] The above-described embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it cannot be construed as a limitation on the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. An observation window group for an observation window of a vacuum evaporation machine door for observing optical film materials, the observation window group is provided on a chamber door (5) of the vacuum evaporation machine, the height of the observation window group is flush with the positions of the ion source and the evaporation source in the vacuum chamber, the observation window group includes a plurality of observation window devices (1), and the observation window devices (1) are located on the same horizontal line, and is characterized in that: The observation window device (1) includes a mounting frame (2), an external light-shielding device (3), and an observation window body (4). The mounting frame (2) is integrally formed with the chamber door (5), and the mounting frame (2) protrudes outside the chamber door (5). The external light-shielding device (3) is connected to the outside of the mounting frame (2). The observation window body (4) includes a first rotating shaft (41), a first anti-splash plate (42), a second rotating shaft (43), a second anti-splash plate (44), a first glass (46), and a second glass (47). One end of the first rotating shaft (41) passes through the mounting frame (2) and is connected to the first anti-splash plate (42), the second anti-splash plate (44), and the first glass (46). The other end passes through the external light-shielding device (3) and is connected to the external light-shielding device (3) through the first glass (46). One end of the first rotating shaft (41) is sleeved with a first adjusting bolt (411), and the other end is clamped to the center of the first anti-splash plate (42). The second rotating shaft (43) is sleeved outside the first rotating shaft (41). One end of the second rotating shaft (43) is sleeved with a second adjusting bolt (431), and the other end is clamped to the center of the second anti-splash plate (44). By rotating the first adjusting bolt (411) and the second adjusting bolt (431) left and right, the left and right rotation of the first anti-splash plate (42) and the second anti-splash plate (44) is controlled. The first anti-splash plate (42) and the second anti-splash plate (44) are both anti-splash plates that are larger than a semi-circle and smaller than a full circle, preventing the film material from splashing onto the first glass (46) or the second glass (47) from the vertical space junction of the first anti-splash plate (42) and the second anti-splash plate (44), and reducing the replacement frequency of the first glass (46) and the second glass (47).

2. The observation window group of the vacuum evaporation machine door for observing optical film materials according to claim 1, wherein: The first anti-splash plate (42), the second anti-splash plate (44), the first glass (46), and the second glass (47) are sequentially arranged on the observation window body (4) from the chamber interior to the chamber exterior. A bushing (45) is sleeved outside the second rotating shaft (43). One end of the bushing (45) is clamped to the center of the first glass (46). Locking nuts (48) are provided on both sides of the first glass (46) to lock the first glass (46) and the bushing (45).

3. The observation window group of the vacuum evaporation machine door for observing optical film materials as described in claim 1, characterized in that: The outer edge of the second glass (47) is arranged between the mounting frame (2) and the external light-shielding device (3). The center of the second glass (47) is sleeved on the outer circle of the bushing (45), and the second glass (47) and the bushing (45) are locked by a locking nut (48).

4. The observation window group of the vacuum evaporation machine door for observing optical film materials according to claim 1, characterized in that: The thickness of the first glass (46) is less than that of the second glass (47).

5. The observation window group of the vacuum evaporation machine door for observing optical film materials as described in claim 1, characterized in that: Sealing rings or magnetic fluids are provided between the first rotating shaft (41) and the second rotating shaft (43), between the second rotating shaft (43) and the bushing (45), and between the bushing (45) and the second glass (47).

6. The observation window group of the vacuum evaporation machine door for observing optical film materials according to claim 1, characterized in that: The outer light-shielding device (3) includes a connection frame (31) and an outer light-shielding plate (32). The connection frame (31) is of an annular structure. A plurality of connection bolts (312) are provided on the connection frame (31). A plurality of connection holes (22) are provided on the outer side of the installation frame (2). The outer light-shielding device (3) is connected to the installation frame (2) by connecting the connection bolts (312) and the connection holes (22) in one-to-one correspondence.

7. The observation window group of the vacuum evaporation machine door for observing optical film materials according to claim 6, characterized in that: A connection column (313) is further provided on the connection frame (31). One end of the connection column (313) is connected inside the connection frame (31), and the other end is connected inside the outer light-shielding plate (32). The outer light-shielding plate (32) is rotatably connected to the connection frame (31) through the connection column (313). The outer light-shielding plate (32) is of an annular structure. A light-shielding sheet (322) is clamped in the middle of the outer light-shielding plate (32). The light-shielding sheet (322) is dark glass. When observation is needed, the visible light source brightness is weakened through the outer light-shielding plate (32) to reduce damage to the human eye. When the light source brightness is not high, the outer light-shielding plate (32) is rotated to directly observe the situation inside the chamber outside the second glass (47).

8. The observation window group of the vacuum evaporation machine door for observing optical film materials according to claim 6, characterized in that: A first card slot (321) is provided on the inner wall of the outer light-shielding plate (32) near the outer side. A light-shielding sheet fixing ring (323) is clamped in the first card slot (321). The light-shielding sheet fixing ring (323) is located outside the light-shielding sheet (322). At least two protruding parts (324) are provided on the light-shielding sheet fixing ring (323). The protruding parts (324) are on the same plane as the light-shielding sheet fixing ring (323) and are integrally formed, and are used to fix the light-shielding sheet (322) to prevent it from falling off.

9. The observation window group of the vacuum evaporation machine door for observing optical film materials according to claim 6, wherein: A second card slot (311) is provided on the inner wall of the connection frame (31) near the inner side. The installation frame (2) is of an annular structure with part of it on the same curved surface as the chamber door (5) and part protruding outside the chamber door (5). A third card slot (21) is provided on the inner wall of the annular structure near the outer side. The second glass (47) is connected between the second card slot (311) and the third card slot (21).

10. The observation window group of the vacuum evaporation machine door for observing optical film materials as described in claim 1, characterized in that: A chamber door anti-spotting plate (51) is connected to the inner side wall of the chamber door (5). A plurality of openings (52) are provided on the chamber door anti-spotting plate (51). Each opening (52) corresponds to the position of the observation window device (1) one by one. A plurality of clamping pieces (57) are provided on the side of the edge of the opening (52) close to the inside of the chamber. A square anti-spotting plate (53) is clamped by the plurality of clamping pieces (57). The area of the square anti-spotting plate (53) is larger than that of the opening (52), so that the square anti-spotting plate (53) can cover the opening (52) when the situation inside the chamber is not observed. An observation glass (58) is clamped by the plurality of clamping pieces (57) in the middle of the square anti-spotting plate (53).

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