Light-operated integrated system of vacuum evaporator

Abstract

The invention provides a light-operated integrated system of a vacuum evaporator, which comprises a first rotating mechanism, a three-stage rotation cooperative control framework is adopted, the first rotating mechanism drives a carrier to revolve, a second rotating piece independently controls a crystal oscillator mechanism to rotate, and a third rotating mechanism regulates and controls a light-operated structure, so that multi-degree-of-freedom motion decoupling is realized; mechanical interference is effectively avoided; a multi-crystal-oscillator alternating detection mechanism is configured, rotation positioning of a crystal oscillator mechanism is driven through a middle rotating shaft, unused crystal oscillators can be automatically switched to be detected, the continuous work period is remarkably prolonged, and the shutdown maintenance frequency is reduced; the optical monitoring function is innovatively integrated, the refractive index / light transmittance parameters of the coating film can be detected in real time through the collaborative design of the rotary light control structure and the probe outer cylinder, a multi-dimensional process monitoring system is formed in combination with the thickness data of the crystal oscillator, and the quality control precision of the film layer is improved by 40% or above.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation machines, and more specifically, to an optical control integrated system for a vacuum evaporation machine. Background Art

[0002] With the rapid development of the semiconductor, optical thin film, and precision electronic device industries, higher requirements are put forward for the film thickness control and optical property monitoring of the vacuum evaporation process. Most traditional vacuum evaporation equipment uses a fixed crystal oscillator detection system, which has the following technical bottlenecks: (1) The single crystal oscillator is exposed to the evaporation source for a long time, which is prone to film layer accumulation error and needs to be replaced frequently by shutting down the machine; (2) There is a risk of mechanical interference between the existing rotary detection mechanism and the carrier movement; (3) It is impossible to realize the synchronous on-line monitoring of the film layer thickness and optical property parameters; (4) The detection probe is easily contaminated by the coating material, resulting in a decrease in measurement accuracy.

[0003] In the prior art, for example, CN218465922U discloses an evaporation machine for prolonging the life of a crystal oscillator. A plurality of the shielding parts of the evaporation machine for prolonging the life of the crystal oscillator are uniformly arranged around the rotation axis of the shielding plate, and the hollow part is arranged between adjacent shielding parts; a hollow channel is arranged on the hollow part; both the hollow channel and the plane swept by the rotation of the shielding part are blocked between the plating source and the crystal oscillator, solving the problem of the relative displacement of the position with respect to the plating pot. CN213812124U provides a probe structure at the top of the chamber of a vacuum evaporation machine, which includes, from top to bottom: a cylinder, a coupling, a second hollow sleeve, an electrode fixing part, a probe crystal oscillator fixing part, and a cap. The coupling is fixed to the cylinder and the first rod body. The outside of the coupling is sleeved with a first hollow sleeve. The upper end of the first hollow sleeve is fixed to the shell of the cylinder, and the lower end is fixed to the second hollow sleeve. The electrode fixing part is fixed to the lower end of the second hollow sleeve. The probe crystal oscillator fixing part is fixed to the lower part of the first rod body. 6 probes and crystal oscillators are evenly distributed and fixed in the probe crystal oscillator fixing part. The cap is sleeved outside the probe crystal oscillator fixing part and is connected and fixed to the electrode fixing part. A first through hole is provided at the bottom of the cap. Each time the cylinder rotates 60°, it drives the coupling, the first rod body, and the probe crystal oscillator fixing part to rotate synchronously by 60°, so that the replacement of a probe and the crystal oscillator corresponds to the position of the first through hole of the cap, solving the rotation problem. However, how to develop an innovative detection system with high integration, multiple detection parameters, and continuous on-line monitoring has become a problem to be solved at present. Summary of the Invention

[0004] In view of this, to solve the above problems, the present invention proposes an optical control integration system for a vacuum evaporation machine, including a first rotating mechanism 100. An inner cavity of the first rotating mechanism 100 is sleeved with a second rotating member 200. A rotating shaft of the second rotating member 200 is connected to an intermediate rotating shaft 220. The intermediate rotating shaft 220 is externally sleeved with the probe outer cylinder 250. The probe outer cylinder 250 extends upward to be connected to a third rotating mechanism 260. Adopting a three-stage rotation collaborative control architecture, by driving the carrier to revolve through the first rotating mechanism 100, independently controlling the crystal oscillator sheet mechanism to rotate by the second rotating member, and regulating the optical control structure 261 by the third rotating mechanism 260, multi-degree-of-freedom motion decoupling is achieved, effectively avoiding mechanical interference; configuring a multi-crystal oscillator sheet rotation detection mechanism, driving the rotation and positioning of the crystal oscillator sheet mechanism 230 through the intermediate rotating shaft 220, and automatically switching to an unused crystal oscillator sheet 235 for detection, significantly extending the continuous working cycle and reducing the frequency of shutdown maintenance; innovatively integrating the optical monitoring function, through the collaborative design of the rotary optical control structure 261 and the probe outer cylinder 250, the refractive index / transmittance parameters of the coating can be detected in real time, and a multi-dimensional process monitoring system is formed in combination with the crystal oscillator sheet thickness data, improving the film layer quality control accuracy by more than 40%; adopting a nested rotary structure design, placing the crystal oscillator sheet mechanism 230 at the fourth through hole 110 of the carrier 109, with higher film thickness detection accuracy; the modular support component design and the coaxial arrangement of the rotating shaft system achieve a compact layout while ensuring structural rigidity, increasing the effective working space utilization rate of the equipment by more than 25%, and are particularly suitable for the coating processing of high-precision micro-devices.

[0005] An optical control integrated system of a vacuum evaporation coating machine, comprising a first rotating mechanism 100. The upper part of the first rotating mechanism 100 passes through the housing of the vacuum evaporation coating machine and is connected to an external driver. The lower part of the first rotating mechanism 100 is connected to a support assembly. The support assembly includes an upper support ring 107 and a lower support ring 108. The upper support ring 107 is connected to the lower support ring 108 through a support connection assembly. The lower support ring 108 is used to support a carrier 109 to be coated. It is characterized in that a second rotating member 200 is sleeved in the internal cavity of the first rotating mechanism 100, and there is no interference between the internal cavity of the first rotating mechanism 100 and the second rotating member 200. A middle rotating shaft 220 is connected to the rotating shaft of the second rotating member 200. A fourth through hole 110 is provided in the middle of the carrier 109 to be coated. A crystal oscillator chip mechanism 230 is connected to the bottom end of the middle rotating shaft 220. The crystal oscillator chip mechanism 230 is placed in the cavity formed by the fourth through hole 110 and does not interfere with the fourth through hole 110. A plurality of crystal oscillator chips 235 are provided on the crystal oscillator chip mechanism 230. A probe cap 236 is provided at the lower part of the crystal oscillator chip mechanism 230. A second through hole 237 is provided at the probe cap 236. By rotating the crystal oscillator chip mechanism 230 through the first rotating member to drive the crystal oscillator chips 235 to rotate, so that the position of one of the crystal oscillator chips 235 completely matches the position of the second through hole 237. The coating thickness of the vacuum evaporation coating machine in the current state is detected by the coating amount at this crystal oscillator chip 235. The middle rotating shaft 220 is externally sleeved with a probe outer cylinder 250. The probe outer cylinder 250 is a hollow structure and does not interfere with the middle rotating shaft 220. The bottom of the probe outer cylinder 250 is flush with the probe cap 236. The probe outer cylinder 250 extends upward to be connected to a third rotating mechanism 260. The lower part of the probe outer cylinder 250 is connected to an optical control structure 261, which is used to detect the refractive index or light transmittance of the coating on the optical control structure 261. The third rotating mechanism 260 is used to rotate the optical control structure 261.

[0006] In some embodiments, a light control structure is sleeved on the outer ring at the bottom of the probe outer cylinder 250. The light control structure includes a boss glass pressing block 2611 and a glass sheet 2612. The upper part of the glass sheet 2612 near the inner ring part is pressed with the boss glass pressing block 2611. The lower part of the glass sheet 2612 is provided with a glass bearing plate 2615. The outer ring of the glass bearing plate 2615 is sleeved with a light control outer shell 2617. The light control outer shell 2617 is a hollow structure. The light control outer shell 2617 extends upward to be locked with the top large flange 273. The main body of the glass bearing plate 2615 is provided with a fifth through hole 2616. A light transmission and reflection measuring device is arranged in the hollow outer shell, and the light receiving head of the light transmission and reflection measuring device is matched with the position of the fifth through hole 2616. The boss glass pressing block 2611 drives the glass sheet 2612 to rotate, so that the uncoated glass sheet 2612 is matched with the position of the fifth through hole 2616. After the bottom of the glass sheet 2612 is coated, an external light beam is transmitted to a position matched with the fifth through hole 2616 by the light transmission and reflection measuring device and reflected back to detect the refractive index or the light transmittance.

[0007] Further, the glass sheet 2612 is of an annular structure and has a notch 2613. The lower part of the boss glass pressing block 2611 is provided with an arc-shaped column 2614. The arc-shaped column 2614 is integrally formed with the outer wall of the boss glass pressing block 2611. The arc-shaped column 2614 abuts against one side wall of the notch 2613 of the glass sheet 2612. The boss glass pressing block 2611 drives the glass sheet 2612 to rotate.

[0008] In some embodiments, a plurality of second partition plates 2620 are arranged between the probe outer cylinders 250. The plurality of second partition plates 2620 are arranged at intervals in parallel to prevent the probe outer cylinder 250 from moving left and right when rotating.

[0009] Further, the light transmission and reflection measuring device includes a light channel 2619. The light channel 2619 is locked by the second partition plate 2620. The input end of the external light of the light channel 2619 is fixedly connected with the top large flange 273.

[0010] Further, a plurality of suspension rods 2621 are arranged between the plurality of second partition plates 2620. The bottom of the suspension rod 2621 is connected with a heating device. The heating device includes a heating plate 2622 and a wire coil cover plate 2623 wrapped outside the heating plate 2622. The heating device is located above the glass sheet 2612.

[0011] Further, a ceramic structure 2624 is arranged at the heating device. A seventh through hole is arranged at the ceramic structure 2624. The seventh through hole is used for communicating with the light channel 2619.

[0012] Furthermore, the outer jacket of the heating device is provided with a heat-insulating cover plate 2625, and the heat-insulating cover plate 2625 is a structure with an open lower portion, and is used to keep the heating device warm.

[0013] In some embodiments, the glass supporting plate 2615 extends inwardly to the connection between the boss glass pressing block 2611 and the glass sheet 2612 and has a downwardly concave structure, so as to provide a clearance for the boss glass pressing block 2611 to drive the glass sheet 2612 to rotate.

[0014] In some embodiments, the glass supporting plate 2615 is covered with an anti-plate cover 2626, and the anti-plate cover 2626 is opened upward to wrap the glass supporting plate 2615. The anti-plate cover 2626 is provided with holes corresponding to the positions of the fifth through hole 2616 and the second through hole 237 for receiving the coating material to the corresponding position.

[0015] In some embodiments, the crystal oscillator mechanism 230 includes a crystal oscillator fixing seat 231 and a crystal oscillator three-claw fixing plate 234. The body of the crystal oscillator fixing seat 231 is provided with a first through hole 232 corresponding to a plurality of crystal oscillators 235 one by one. The first through hole 232 serves as a channel for detecting film materials. A fixing seat connecting rod 233 is provided in the middle of the upper surface of the crystal oscillator fixing seat 231, which is used to lock with the intermediate rotating shaft 220 so that the rotation of the intermediate rotating shaft 220 drives the crystal oscillator fixing seat 231 to rotate; a crystal oscillator three-claw fixing plate 234 is also sleeved on the fixing seat connecting rod 233 and is located on the upper part of the crystal oscillator fixing seat 231. The crystal oscillator three-claw fixing plate 234 is used to fix a plurality of crystal oscillators 235.

[0016] Furthermore, the second through hole 237 is a trumpet-shaped mouth that is narrow at the top and wide at the bottom, so as to better collect the film material and improve the detection efficiency.

[0017] In some embodiments, a water-cooled shaft 240 is connected to the upper portion of the probe cap 236, and a probe outer tube 250 is connected to the outer outer portion of the water-cooled shaft 240. A water-cooled jacket 242 is provided in an inner ring of the water-cooled shaft 240. The water-cooled jacket 242 is an annular hollow chamber. The water inlet of the water-cooled jacket 242 is connected to a water inlet pipe, and the water outlet of the water-cooled jacket 242 is connected to a water outlet pipe. The water inlet and the water outlet are symmetrically arranged, and the input end of the water inlet pipe is connected to cooling water. The cooling water enters the water-cooled jacket 242 from the water inlet pipe and is discharged from the water outlet pipe to form a circulating cooling water circuit to cool the crystal oscillator mechanism 230, thereby forming a directional thermal radiation shielding for the crystal oscillator mechanism 230.

[0018] Furthermore, the water inlet pipe and the water outlet pipe are both connected to the external adapter device 245 through the interlayer, and the external adapter device 245 is sleeved with the probe outer tube 250 .

[0019] Furthermore, a third through hole 241 is provided at the center of the water-cooled shaft 240 for being sleeved with the intermediate rotating shaft 220 . A first accommodating chamber is provided near the crystal oscillator mechanism 230 of the water-cooled shaft 240 for accommodating the crystal oscillator mechanism 230 and the probe cover cap 236 .

[0020] Furthermore, the water cooling jacket 242 is located on the upper portion of the crystal oscillator mechanism 230 , which provides a better cooling effect.

[0021] Furthermore, the top of the water-cooled shaft 240 is locked with an intermediate rotating shaft protective sleeve 246 , the intermediate rotating shaft protective sleeve 246 is sleeved with the intermediate rotating shaft 220 without interfering with it, and the intermediate rotating shaft protective sleeve 246 is locked with the bottom of the external adapter device 245 .

[0022] Furthermore, an interlayer is provided between the intermediate rotating shaft protection sleeve 246 and the probe outer tube 250 , and a plurality of first partitions 247 are provided at longitudinal intervals at the interlayer. The first partitions 247 are sleeved with the intermediate rotating shaft 220 but do not interfere with it, so as to prevent the intermediate rotating shaft 220 from radial displacement.

[0023] Furthermore, a crystal oscillator detection device mounting block 248 is provided on the upper part of the crystal oscillator three-claw fixing plate 234, and a sixth through hole 249 is provided at the crystal oscillator detection device mounting block 248. The position of the sixth through hole 249 matches the position of the first through hole 232. The sixth through hole 249 is connected to the detection end of the crystal oscillator detection device, and the external connection end of the crystal oscillator detection device passes through the interlayer between the intermediate rotating shaft protection cover 246 and the intermediate rotating shaft 220 to be connected to the external crystal oscillator detection mechanism.

[0024] In some embodiments, the second rotating member 200 is a rotating cylinder, the rotating shaft of the second rotating member 200 is connected to the input end of the clamping coupling 210, the output end of the clamping coupling 210 is connected to the intermediate transmission shaft of the probe, the intermediate transmission shaft is connected to the first bearing fixing block 211 through the first bearing 212, the outer ring of the first bearing 212 is clamped with the bearing fixing block, the inner ring of the first bearing 212 is clamped with the connecting nut of the intermediate transmission shaft, the transmission shaft drives the first bearing 212 to rotate in the outer ring of the bearing fixing block, and the intermediate transmission shaft is prevented from moving up and down through the first bearing 212.

[0025] Furthermore, a top dust cover 270 is provided at the connection between the second rotating member 200 and the intermediate rotating shaft 220, and the top dust cover 270 wraps the connection. The lower part of the top dust cover 270 extends downward to the support base 271, and the top of the top dust cover 270 is locked to the shell of the second rotating member 200 through a first connecting plate 272.

[0026] Further, the bottom of the support base 271 is connected to the top large flange 273, and the top large flange 273 is connected to the top of the evaporation coater, for connecting the entire rotating device to the top of the evaporation coater.

[0027] In some embodiments, the first rotating mechanism 100 includes a magnetic fluid 101 and a first rotating shaft 103. The first rotating shaft 103 is a hollow chamber and is sleeved with the second rotating member 200 without interference. The first rotating shaft 103 is connected with a rotating gear 104. The middle of the magnetic fluid 101 is sleeved with a shaft of the magnetic fluid 101. The upper end of the shaft of the magnetic fluid 101 is placed outside the housing of the vacuum evaporation coater, and the lower end of the shaft of the magnetic fluid 101 is placed in the internal chamber. The rotating gear 104 meshes with a second gear 102 connected to the lower end of the shaft of the magnetic fluid 101. A second synchronous pulley 111 is provided at the upper end of the shaft of the magnetic fluid 101. The second synchronous pulley 111 is connected to a synchronous pulley on an external driver through a synchronous belt. By driving the synchronous pulley to rotate by a motor, the second synchronous pulley 111 is driven to rotate in sequence. The second synchronous pulley 111 drives the second gear 102 to rotate, so that the rotating gear 104 rotates to drive the first rotating shaft 103 to rotate, forming a multi-stage transmission system to ensure the smooth rotation of the first rotating shaft 103. The combination of the multi-stage transmission of the shaft of the magnetic fluid 101 and the synchronous pulley ensures stable power transmission while ensuring vacuum tightness, and solves the problem that the connection between the traditional first rotating shaft 103 and the drive system is prone to air leakage or power loss due to insufficient vacuum seal.

[0028] Advantages of the present invention: The present invention provides an optical control integrated system for a vacuum evaporation coater, which includes a first rotating mechanism 100. The inner cavity of the first rotating mechanism 100 is sleeved with a second rotating member 200. The rotating shaft of the second rotating member 200 is connected to an intermediate rotating shaft 220. The intermediate rotating shaft 220 is externally sleeved with a probe outer cylinder 250. The probe outer cylinder 250 extends upward to be connected to a third rotating mechanism 260. Adopting a three-stage rotation collaborative control architecture, the first rotating mechanism 100 drives the carrier to revolve, the second rotating member independently controls the crystal oscillator mechanism to rotate, and the third rotating mechanism 260 regulates the optical control structure 261, realizing decoupling of multi-degree-of-freedom motion and effectively avoiding mechanical interference; configuring a multi-crystal oscillator rotation detection mechanism, the rotation positioning of the crystal oscillator mechanism 230 is driven by the intermediate rotating shaft 220, and the unused crystal oscillator 235 can be automatically switched for detection, significantly extending the continuous working cycle and reducing the frequency of shutdown maintenance; innovatively integrating the optical monitoring function, through the collaborative design of the rotary optical control structure 261 and the probe outer cylinder 250, the refractive index / transmittance parameters of the coating can be detected in real time, and a multi-dimensional process monitoring system is formed in combination with the crystal oscillator thickness data, improving the film quality control accuracy by more than 40%; adopting a nested rotary structure design, the crystal oscillator mechanism 230 is placed at the fourth through hole 110 of the carrier 109, and the film thickness detection accuracy is higher; the modular support component design and the coaxial arrangement of the rotating shaft system achieve a compact layout while ensuring the structural rigidity, increasing the effective working space utilization rate of the equipment by more than 25%, and are particularly suitable for the coating processing of high-precision micro-devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 FIG. is the assembly drawing of the optical control integrated system of the vacuum evaporation coater of the present invention.

[0030] Figure 2 FIG. is the sectional state of the optical control integrated system of the vacuum evaporation coater of the present invention Figure 1 。

[0031] Figure 3 FIG. is the sectional state of the optical control integrated system of the vacuum evaporation coater of the present invention Figure 2 。

[0032] Figure 4 FIG. is the sectional state of the optical control integrated system of the vacuum evaporation coater of the present invention Figure 3 。

[0033] Figure 5 FIG. is the sectional state of the optical control integrated system of the vacuum evaporation coater of the present invention Figure 4 。

[0034] Figure 6 FIG. is the sectional state of the optical control integrated system of the vacuum evaporation coater of the present invention Figure 5 。

[0035] Figure 7 The cross-sectional state of the light control integrated system of the vacuum evaporation machine of the present invention Figure 6 。

[0036] Figure 8 The structural diagram of the light control structure of the light control integrated system of the vacuum evaporation machine of the present invention.

[0037] Description of main component symbols

[0038] First rotating mechanism 100, magnetic fluid 101, second gear 102, first rotating shaft 103, rotating gear 104, upper support ring 107, lower support ring 108, carrier 109, fourth through hole 110, second synchronous wheel 111, second rotating member 200, clamping coupling 210, first bearing fixing block 211, first bearing 212, intermediate rotating shaft 220, crystal oscillator chip mechanism 230, crystal oscillator chip fixing seat 231, first through hole 232, fixing seat connecting rod 233, crystal oscillator three-jaw fixing plate 234, crystal oscillator chip 235, probe cap 236, second through hole 237, water-cooled shaft 240, third through hole 241, water-cooled jacket 242, external transfer device 245, probe outer cylinder 250, third rotating mechanism 260, light control structure 261, convex glass pressing block 2611, glass sheet 2612, notch 2613, arc-shaped column 2614, glass bearing plate 2615, fifth through hole 2616, light control housing 2617, light channel 2619, second partition 2620, suspension rod 2621, heating plate 2622, wire coil cover plate 2623, ceramic structure 2624, heat preservation cover plate 2625, anti-deposition plate sleeve 2626, intermediate rotating shaft protective sleeve 246, first partition 247, crystal oscillator detection device mounting block 248, sixth through hole 249, top dust cover 270, support base 271, first connecting plate 272, top large flange 273.

[0039] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. Specific embodiments Embodiment

[0040] Such as Figure 1-2As shown in the figure, an optical control integrated system of a vacuum evaporation coater includes a first rotating mechanism 100. The upper part of the first rotating mechanism 100 passes through the housing of the vacuum evaporation coater and is connected to an external driver. The lower part of the first rotating mechanism 100 is connected to a support assembly. The support assembly includes an upper support ring 107 and a lower support ring 108. The upper support ring 107 is connected to the lower support ring 108 through a support connection assembly. The lower support ring 108 is used to support the carrier 109 to be coated. A second rotating member 200 is sleeved in the inner cavity of the first rotating mechanism 100, and there is no interference between the inner cavity of the first rotating mechanism 100 and the second rotating member 200. A middle rotating shaft 220 is connected to the rotating shaft of the second rotating member 200. A fourth through hole 110 is provided in the middle of the carrier 109 to be coated. A crystal oscillator mechanism 230 is connected to the bottom end of the middle rotating shaft 220. The crystal oscillator mechanism 230 is placed in the cavity formed by the fourth through hole 110 and does not interfere with the fourth through hole 110. A plurality of crystal oscillator chips 235 are provided on the crystal oscillator mechanism 230. A probe cap 236 is provided at the lower part of the crystal oscillator mechanism 230. A second through hole 237 is provided at the probe cap 236. By rotating the crystal oscillator mechanism 230 through the first rotating member to drive the crystal oscillator chips 235 to rotate, the position of one of the crystal oscillator chips 235 is completely matched with the position of the second through hole 237. The coating thickness of the vacuum evaporation coater in the current state is detected by the coating amount at the crystal oscillator chip 235.

[0041] As Figures 6-8As shown, an optical control structure is sleeved on the outer ring at the bottom of the probe outer cylinder 250. The optical control structure includes a boss glass pressing block 2611 and a glass sheet 2612. The upper part of the glass sheet 2612 near the inner ring part is pressed with the boss glass pressing block 2611. The lower part of the glass sheet 2612 is provided with a glass bearing plate 2615. The outer ring of the glass bearing plate 2615 is sleeved with an optical control outer shell 2617. The optical control outer shell 2617 is a hollow structure and extends upward to be locked with the top large flange 273. The body of the glass bearing plate 2615 is provided with a fifth through hole 2616. A light transmission and reflection measuring device is arranged in the hollow outer shell, and the light receiving head of the light transmission and reflection measuring device is matched with the position of the fifth through hole 2616. The boss glass pressing block 2611 drives the glass sheet 2612 to rotate, so that the uncoated glass sheet 2612 is matched with the position of the fifth through hole 2616. After the bottom of the glass sheet 2612 is coated, an external light beam is sent to a position matched with the fifth through hole 2616 through the light transmission and reflection measuring device and reflected back to detect the refractive index or light transmittance. The glass sheet 2612 is of an annular structure and has a notch 2613. The lower part of the boss glass pressing block 2611 is provided with an arc-shaped column 2614. The arc-shaped column 2614 is integrally formed with the outer wall of the boss glass pressing block 2611. The arc-shaped column 2614 abuts against one side wall of the notch 2613 of the glass sheet 2612. The boss glass pressing block 2611 drives the glass sheet 2612 to rotate. There are multiple second partition plates 2620 between the probe outer cylinder 250 and the probe outer cylinder 250. The multiple second partition plates 2620 are arranged at intervals in parallel to prevent the probe outer cylinder 250 from moving left and right when rotating. The light transmission and reflection measuring device includes a light channel 2619. The light channel 2619 is locked by the second partition plate 2620. The input end of the external light of the light channel 2619 is fixedly connected with the top large flange 273. Multiple suspension rods 2621 are arranged between the multiple second partition plates 2620. The bottom of the suspension rod 2621 is connected with a heating device. The heating device includes a heating plate 2622 and a wire coil cover plate 2623 wrapped outside the heating plate 2622. The heating device is located above the glass sheet 2612. A ceramic structure 2624 is arranged at the heating device. A seventh through hole is arranged at the ceramic structure 2624 for communicating with the light channel 2619. A heat preservation cover plate 2625 is sleeved outside the heating device. The heat preservation cover plate 2625 is of a lower open structure for heat preservation of the heating device. The glass bearing plate 2615 extends inward to the connection part of the boss glass pressing block 2611 and the glass sheet 2612 to be a downward concave structure for avoiding the rotation of the boss glass pressing block 2611 driving the glass sheet 2612. The glass bearing plate 2615 is sleeved with an anti-deposition plate sleeve 2626. The anti-deposition plate sleeve 2626 has an upward opening and wraps the glass bearing plate 2615.A fifth through hole 2616 and a hole corresponding to the position of the second through hole 237 are provided at the anti-spattering plate sleeve 2626 for receiving the coating material to a corresponding position.

[0042] As Figure 3As shown, the crystal oscillator mechanism 230 includes a crystal oscillator fixing seat 231 and a crystal oscillator three-claw fixing plate 234. The body of the crystal oscillator fixing seat 231 is provided with a first through hole 232 corresponding to a plurality of crystal oscillators 235. A fixing seat connecting rod 233 is provided in the middle of the upper surface of the crystal oscillator fixing seat 231 for locking with the intermediate rotating shaft 220 so that the rotation of the intermediate rotating shaft 220 drives the crystal oscillator fixing seat 231 to rotate; the fixing seat connecting rod 233 is also sleeved with a crystal oscillator three-claw fixing plate 234 and is located at the crystal oscillator fixing seat 231. The upper part, the crystal three-claw fixing plate 234 is used to fix multiple crystal oscillators 235, the second through hole 237 is a trumpet mouth that is narrow at the top and wide at the bottom, the upper part of the probe cover 236 is connected to a water-cooled shaft 240, the inner ring of the water-cooled shaft 240 is provided with a water-cooled jacket 242, the water-cooled jacket 242 is an annular hollow chamber, the water inlet of the water-cooled jacket 242 is connected to the water inlet pipe, the water outlet of the water-cooled jacket 242 is connected to the water outlet pipe, the water inlet and the water outlet are symmetrically arranged, the input end of the water inlet pipe is connected to cooling water, and the cooling water enters the water from the water inlet pipe. The cooling jacket 242 is discharged from the water outlet pipe to form a circulating cooling water circuit to cool the crystal oscillator mechanism 230, thereby forming a directional thermal radiation shielding for the crystal oscillator mechanism 230. The outer shell of the water-cooled shaft 240 is connected with a probe outer tube 250. The bottom of the probe outer tube 250 is flush with the probe cap 236. The probe outer tube 250 extends upward to be connected to the third rotating mechanism 260. The lower part of the probe outer tube 250 is connected to the light control structure 261 for detecting the refractive index or transmittance of the coating on the light control structure 261. The third The rotating mechanism 260 is used to rotate the light control structure 261. The water inlet pipe and the water outlet pipe are both connected to the external adapter device 245 through the interlayer. The external adapter device 245 is sleeved with the probe outer tube 250. The center of the water-cooled shaft 240 is provided with a third through hole 241 for sleeved with the intermediate rotating shaft 220. The water-cooled shaft 240 is provided with a first accommodating chamber near the crystal oscillator mechanism 230 for accommodating the crystal oscillator mechanism 230 and the probe cover cap 236. The water-cooling jacket 242 is located on the upper part of the crystal oscillator mechanism 230 for better cooling effect., a middle rotating shaft protective sleeve 246 is locked at the top of the water-cooled shaft 240. The middle rotating shaft protective sleeve 246 is sleeved on the middle rotating shaft 220 without interference. The middle rotating shaft protective sleeve 246 is locked at the bottom of an external adapter device 245. A sandwich layer is provided between the middle rotating shaft protective sleeve 246 and the probe outer cylinder 250. A plurality of first partitions 247 are longitudinally and spacedly arranged at the sandwich layer. The first partitions 247 are sleeved on the middle rotating shaft 220 without interference, and are used to prevent the middle rotating shaft 220 from radially shifting. An oscillator detection device mounting block 248 is provided on the upper part of the oscillator three-jaw fixing plate 234. A sixth through hole 249 is provided at the oscillator detection device mounting block 248. The position of the sixth through hole 249 matches the position of the first through hole 232. The detection end of an oscillator detection device is connected at the sixth through hole 249. The external connection end of the oscillator detection device passes through the sandwich layer between the middle rotating shaft protective sleeve 246 and the middle rotating shaft 220 and is connected to an external oscillator detection mechanism.

[0043] As Figure 2 and Figure 4 shown, the second rotating member 200 is a rotary cylinder. The rotating shaft of the second rotating member 200 is connected to the input end of a clamping type coupling 210. The output end of the clamping type coupling 210 is connected to a probe middle transmission shaft. The middle transmission shaft is connected to a first bearing fixing block 211 through a first bearing 212. The outer ring of the first bearing 212 is clamped with the bearing fixing block. The inner ring of the first bearing 212 is clamped with the connection nut of the middle transmission shaft. The transmission shaft drives the first bearing 212 to rotate within the outer ring of the bearing fixing block. Through the first bearing 212, the middle transmission shaft will not move up and down. A top dust cover 270 is provided at the connection between the second rotating member 200 and the middle rotating shaft 220. The top dust cover 270 wraps the connection. The lower part of the top dust cover 270 extends downward to a support base 271. The top of the top dust cover 270 is locked with the housing of the second rotating member 200 through a first connecting plate 272. The bottom of the support base 271 is connected to the top large flange 273. The top large flange 273 is connected to the top of the evaporation machine, and is used to connect the entire rotating device to the top of the evaporation machine.

[0044] As Figure 5As shown in the figure, the first rotating mechanism 100 includes a magnetorheological fluid 101 and a first rotating shaft 103. The first rotating shaft 103 is a hollow chamber and is sleeved with the second rotating member 200 without interference. The first rotating shaft 103 is connected with a rotating gear 104. The middle of the magnetorheological fluid 101 is sleeved with a shaft of the magnetorheological fluid 101. The upper end of the shaft of the magnetorheological fluid 101 is placed outside the housing of the vacuum evaporation machine, and the lower end of the shaft of the magnetorheological fluid 101 is placed inside the internal chamber. The rotating gear 104 meshes with a second gear 102 connected to the lower end of the shaft of the magnetorheological fluid 101. A second synchronous pulley 111 is provided at the upper end of the shaft of the magnetorheological fluid 101. The second synchronous pulley 111 is connected with a synchronous pulley on an external driver through a synchronous belt. The synchronous pulley is driven by a motor to rotate, which drives the second synchronous pulley 111 to rotate in sequence. The second synchronous pulley 111 drives the second gear 102 to rotate, so that the rotating gear 104 rotates to drive the first rotating shaft 103 to rotate, forming a multi-stage transmission system to ensure the smooth rotation of the first rotating shaft 103. The combination of the multi-stage transmission of the shaft of the magnetorheological fluid 101 and the synchronous pulley ensures stable power transmission while ensuring vacuum tightness, and solves the problem that the connection between the traditional first rotating shaft 103 and the drive system is prone to air leakage or power loss due to insufficient vacuum seal.

[0045] Advantages of the present invention: The present invention provides an optical control integrated system for a vacuum evaporation machine, including a first rotating mechanism 100. The inner cavity of the first rotating mechanism 100 is sleeved with a second rotating member 200. The rotating shaft of the second rotating member 200 is connected with an intermediate rotating shaft 220. The intermediate rotating shaft 220 is sleeved with the probe outer cylinder 250. The probe outer cylinder 250 extends upward to be connected with a third rotating mechanism 260. A three-stage rotation cooperative control architecture is adopted. The first rotating mechanism 100 drives the carrier to revolve, the second rotating member independently controls the crystal oscillator plate mechanism to rotate, and the third rotating mechanism 260 regulates the optical control structure 261, realizing multi-degree-of-freedom motion decoupling and effectively avoiding mechanical interference; a multi-crystal oscillator plate rotation detection mechanism is configured. The rotation and positioning of the crystal oscillator plate mechanism 230 are driven by the intermediate rotating shaft 220, and the unused crystal oscillator plate 235 can be automatically switched to for detection, significantly extending the continuous working cycle and reducing the frequency of shutdown and maintenance; an innovative integrated optical monitoring function is adopted. Through the cooperative design of the rotary optical control structure 261 and the probe outer cylinder 250, the refractive index / transmittance parameters of the coating can be detected in real time, and a multi-dimensional process monitoring system is formed in combination with the crystal oscillator plate thickness data, improving the film layer quality control accuracy by more than 40%; a nested rotary structure design is adopted, and the crystal oscillator plate mechanism 230 is placed at the fourth through hole 110 of the carrier 109, and the film thickness detection accuracy is higher; the modular support component design and the coaxial arrangement of the rotating shaft system achieve a compact layout while ensuring structural rigidity, increasing the effective working space utilization rate of the equipment by more than 25%, and are particularly suitable for the coating processing of high-precision micro-devices.

[0046] The above-described embodiments merely represent several implementation manners of the present invention. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent for the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention shall be subject to the appended claims.

Claims

1. An optical control integrated system of a vacuum evaporation machine, comprising a first rotating mechanism (100). The upper part of the first rotating mechanism (100) passes through the housing of the vacuum evaporation machine and is connected to an external driver. The lower part of the first rotating mechanism (100) is connected to a support assembly. The support assembly includes an upper support ring (107) and a lower support ring (108). The upper support ring (107) is connected to the lower support ring (108) through a support connection assembly. The lower support ring (108) is used to support a carrier (109) to be coated. It is characterized in that, The inner cavity of the first rotating mechanism (100) is sleeved with a second rotating member (200). There is no interference between the inner cavity of the first rotating mechanism (100) and the second rotating member (200). The rotating shaft of the second rotating member (200) is connected to an intermediate rotating shaft (220). A fourth through hole (110) is provided in the exact middle of the carrier (109) to be coated. The bottom end of the intermediate rotating shaft (220) is connected to a crystal oscillator mechanism (230). The crystal oscillator mechanism (230) is placed in the cavity formed by the fourth through hole (110) and does not interfere with the fourth through hole (110). A plurality of crystal oscillators (235) are provided on the crystal oscillator mechanism (230). A probe cap (236) is provided at the lower part of the crystal oscillator mechanism (230). A second through hole (237) is provided at the probe cap (236). By rotating the crystal oscillator mechanism (230) with the first rotating member to drive the crystal oscillator (235) to rotate, the position of one of the crystal oscillators (235) is made to exactly match the position of the second through hole (237). The coating thickness of the vacuum evaporation machine in the current state is detected by the coating amount at this crystal oscillator (235). The outer periphery of the bottom of the probe outer cylinder (250) is sleeved with a light control structure. The light control structure includes a boss glass pressing block (2611) and a glass sheet (2612). The upper part of the glass sheet (2612) near the inner ring part is pressed with a boss glass pressing block (2611). The lower part of the glass sheet (2612) is provided with a glass carrier plate (2615). The outer periphery of the glass carrier plate (2615) is sleeved with a light control outer shell (2617). The light control outer shell (2617) is a hollow structure. The light control outer shell (2617) extends upward to be locked with the top large flange (273). A fifth through hole (2616) is provided in the body of the glass carrier plate (2615). A light transmission and reflection measurement device is passed through the hollow outer shell and the light receiving head of the light transmission and reflection measurement device is made to match the position of the fifth through hole (2616). The boss glass pressing block (2611) drives the glass sheet (2612) to rotate so that the uncoated glass sheet (2612) matches the position of the fifth through hole (2616). When the bottom of the glass sheet (2612) is coated, an external light beam is directed to the position matching the fifth through hole (2616) by the light transmission and reflection measurement device and reflected back to detect the refractive index or light transmittance. The probe outer cylinder (250) is sleeved with an outer ring at the bottom with a light control structure. The light control structure includes a boss glass pressing block (2611) and a glass sheet (2612). The upper part of the glass sheet (2612) near the inner ring part is pressed with a boss glass pressing block (2611). The lower part of the glass sheet (2612) is provided with a glass carrier plate (2615). The outer periphery of the glass carrier plate (2615) is sleeved with a light control outer shell (2617). The light control outer shell (2617) is a hollow structure. The light control outer shell (2617) extends upward to be locked with the top large flange (273). A fifth through hole (2616) is provided in the body of the glass carrier plate (2615). A light transmission and reflection measurement device is passed through the hollow outer shell and the light receiving head of the light transmission and reflection measurement device is made to match the position of the fifth through hole (2616). The boss glass pressing block (2611) drives the glass sheet (2612) to rotate so that the uncoated glass sheet (2612) matches the position of the fifth through hole (2616). When the bottom of the glass sheet (2612) is coated, an external light beam is directed to the position matching the fifth through hole (2616) by the light transmission and reflection measurement device and reflected back to detect the refractive index or light transmittance. The intermediate rotating shaft (220) is externally sleeved with the probe outer cylinder (250). The probe outer cylinder (250) is a hollow structure and does not interfere with the intermediate rotating shaft (220). The bottom of the probe outer cylinder (250) is flush with the probe cap (236). The probe outer cylinder (250) extends upward to be connected to the third rotating mechanism (260). The lower part of the probe outer cylinder (250) is connected to a light control structure (261) for detecting the refractive index or light transmittance of the coating on the light control structure (261). The third rotating mechanism (260) is used to rotate the light control structure (261).

2. The optical control integrated system of the vacuum evaporation coater according to claim 1, wherein: The outer ring of the bottom of the probe outer cylinder (250) is sleeved with a light control structure. The light control structure includes a boss glass pressing block (2611) and a glass sheet (2612). The upper part of the glass sheet (2612) near the inner ring part is pressed with a boss glass pressing block (2611). The lower part of the glass sheet (2612) is provided with a glass carrier plate (2615). The outer periphery of the glass carrier plate (2615) is sleeved with a light control outer shell (2617). The light control outer shell (2617) is a hollow structure. The light control outer shell (2617) extends upward to be locked with the top large flange (273). A fifth through hole (2616) is provided in the body of the glass carrier plate (2615). A light transmission and reflection measurement device is passed through the hollow outer shell and the light receiving head of the light transmission and reflection measurement device is made to match the position of the fifth through hole (2616). The boss glass pressing block (2611) drives the glass sheet (2612) to rotate so that the uncoated glass sheet (2612) matches the position of the fifth through hole (2616). When the bottom of the glass sheet (2612) is coated, an external light beam is directed to the position matching the fifth through hole (2616) by the light transmission and reflection measurement device and reflected back to detect the refractive index or light transmittance.

3. The optical control integrated system of the vacuum evaporation coater according to claim 2, characterized in that: The glass sheet (2612) is of an annular structure and has a notch (2613). The lower part of the convex platform glass pressing block (2611) is provided with an arc-shaped upright column (2614). The arc-shaped upright column (2614) is integrally formed with the outer wall of the convex platform glass pressing block (2611). The arc-shaped upright column (2614) abuts against one side wall of the notch (2613) of the glass sheet (2612). The convex platform glass pressing block (2611) drives the glass sheet (2612) to rotate.

4. The optical control integration system of the vacuum evaporation machine according to claim 1, characterized in that: Between the probe outer cylinders (250), there are multiple second partition plates (2620). The multiple second partition plates (2620) are arranged at intervals and in parallel to prevent the probe outer cylinder (250) from moving left and right when rotating. The light transmission and reflection measuring device includes a light channel (2619). The light channel (2619) is locked by the second partition plate (2620). The input end of the external light of the light channel (2619) is fixedly connected to the top large flange (273).

5. The optical control integration system of the vacuum evaporation coater according to claim 4, characterized in that: Multiple suspension rods (2621) are passed through between the multiple second partition plates (2620). The bottom of the suspension rod (2621) is connected with a heating device. The heating device includes a heating plate (2622) and a wire coil cover plate (2623) wrapped outside the heating plate (2622). The heating device is located above the glass sheet (2612).

6. The optical control integrated system of the vacuum evaporation coater according to claim 2, characterized in that: A shielding plate sleeve (2626) is sleeved outside the glass carrier plate (2615). The shielding plate sleeve (2626) has an upward opening and wraps the glass carrier plate (2615). The shielding plate sleeve (2626) is provided with holes corresponding to the positions of the fifth through hole (2616) and the second through hole (237) for receiving the coating material to the corresponding positions.

7. The optical control integrated system of the vacuum evaporation coater according to claim 1, characterized in that: The crystal oscillator sheet mechanism (230) includes a crystal oscillator sheet fixing seat (231) and a crystal oscillator three-jaw fixing disk (234). The body of the crystal oscillator sheet fixing seat (231) is provided with first through holes (232) corresponding one by one to multiple crystal oscillator sheets (235). The first through holes (232) serve as channels for detecting the film material. In the middle of the upper surface of the crystal oscillator sheet fixing seat (231), there is a fixing seat connecting rod (233) for locking with the middle rotating shaft (220) so that the rotation of the middle rotating shaft (220) drives the crystal oscillator sheet fixing seat (231) to rotate. A crystal oscillator three-jaw fixing disk (234) is also sleeved on the fixing seat connecting rod (233) and is located above the crystal oscillator sheet fixing seat (231). The crystal oscillator three-jaw fixing disk (234) is used to fix multiple crystal oscillator sheets (235).

8. The optical control integrated system of the vacuum evaporation machine according to claim 1, characterized in that: The probe cap (236) is connected to a water-cooled shaft (240) on its upper part, and a probe outer tube (250) is connected to the outer shell of the water-cooled shaft (240). A water-cooled jacket (242) is provided in the inner ring of the water-cooled shaft (240). The water-cooled jacket (242) is an annular hollow chamber. The water inlet of the water-cooled jacket (242) is connected to a water inlet pipe, and the water outlet of the water-cooled jacket (242) is connected to a water outlet pipe. The water inlet and the water outlet are symmetrically arranged. The input end of the water inlet pipe is connected to cooling water. The cooling water enters the water-cooled jacket (242) from the water inlet pipe and is discharged from the water outlet pipe, thereby forming a circulating cooling water circuit to cool the crystal oscillator mechanism (230) and form a directional thermal radiation shielding for the crystal oscillator mechanism (230).

9. The optical control integrated system of the vacuum evaporation coater according to claim 8, wherein: The water inlet pipe and the water outlet pipe are both connected to the external adapter device (245) through the interlayer, and the external adapter device (245) is sleeved with the probe outer tube (250). The center of the water-cooled shaft (240) is provided with a third through hole (241) for sleeved with the intermediate rotating shaft (220). The water-cooled shaft (240) is provided with a first accommodating chamber near the crystal oscillator mechanism (230) for accommodating the crystal oscillator mechanism (230) and the probe cover cap (236). The top of the water-cooled shaft (240) is locked with an intermediate rotating shaft protective sleeve ( 246), the intermediate rotating shaft protective sleeve (246) is sleeved with the intermediate rotating shaft (220) without interfering with it, the intermediate rotating shaft protective sleeve (246) is locked with the bottom of the external adapter device (245), an interlayer is provided between the intermediate rotating shaft protective sleeve (246) and the probe outer tube (250), a plurality of first partitions (247) are provided at longitudinal intervals at the interlayer, the first partitions (247) are sleeved with the intermediate rotating shaft (220) without interfering with it, and are used to prevent the intermediate rotating shaft (220) from radial displacement.

10. The optical control integrated system of the vacuum evaporation machine according to claim 7, characterized in that: A crystal oscillator detection device mounting block (248) is provided on the upper part of the crystal oscillator three-claw fixing plate (234), and a sixth through hole (249) is provided at the crystal oscillator detection device mounting block (248). The position of the sixth through hole (249) matches the position of the first through hole (232), and the sixth through hole (249) is connected to the detection end of the crystal oscillator detection device. The external connection end of the crystal oscillator detection device passes through the interlayer between the intermediate rotating shaft protection sleeve (246) and the intermediate rotating shaft (220) and is connected to the external crystal oscillator detection mechanism.

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