Furnace body temperature self-adaptive control system

Abstract

The invention provides a furnace body temperature self-adaptive control system, and belongs to the technical field of self-adaptive control, and the system comprises the steps: carrying out the task analysis of a to-be-executed target task of a target furnace body, and obtaining the temperature demands of the target furnace body at all moments; determining a target temperature of the target furnace body at each moment based on the temperature demand at each moment; based on the target temperature of the target furnace body at the current moment, the target opening degree of a temperature adjusting valve of the target furnace body at the current moment is determined; and the real-time operation state of the target furnace body at the current moment is obtained, a self-adaptive adjustment scheme of the temperature adjusting valve at the current moment is determined based on the real-time operation state and the target opening degree at the current moment, and opening degree self-adaptive adjustment is conducted on the temperature adjusting valve according to the self-adaptive adjustment scheme. The temperature requirement is determined through task analysis, the target temperature is further determined, the self-adaptive adjustment scheme is determined by considering the current operation state and the target temperature, and the accuracy of the self-adaptive adjustment scheme is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of adaptive control, and particularly to an adaptive control system for the temperature of a furnace body. Background Art

[0002] With the rapid development of the semiconductor industry, the demand in the semiconductor market is increasing day by day, and higher requirements are put forward for the performance such as the production efficiency and the yield rate of semiconductor process equipment. Among them, vertical furnace process equipment involves various processes such as thermal oxidation, chemical vapor deposition, thermal diffusion, metal alloying, impurity activation, and dielectric film densification. In its process flow, the temperature control effect is an important index for evaluating the process quality. The temperature control of the vertical furnace body is crucial, which directly affects the wafer quality, energy efficiency, equipment life, production safety, and economic benefits. Precise temperature control can ensure the high-quality product rate of wafers, reduce defects and waste, and at the same time protect the equipment from thermal stress damage and extend its service life.

[0003] In the temperature control of the furnace body, the fuzzy control method is relatively commonly used. It mainly fuzzifies input quantities such as the temperature deviation and its change rate, performs reasoning according to pre-set fuzzy rules, and finally outputs a control quantity to adjust the temperature of the furnace body. When the temperature of the furnace body is affected by external disturbances or internal parameter changes, the fuzzy controller can flexibly adjust the control strategy according to the fuzzy rules without the need for an accurate mathematical model.

[0004] However, the adjustment and optimization process of the fuzzy control method is relatively complex, and it is difficult to achieve precise parameter adjustment. Especially when facing a complex dynamic system, the coverage range and accuracy of the fuzzy rules may be insufficient. Summary of the Invention

[0005] The present invention provides an adaptive control system for the temperature of a furnace body to solve the defect that the adjustment and optimization process of the existing fuzzy control method is relatively complex and it is difficult to achieve precise parameter adjustment.

[0006] On the one hand, the present invention provides an adaptive control system for the temperature of a furnace body, including: A task parsing module: used to parse the target task to be executed by the target furnace body to obtain the temperature requirement of the target furnace body at each moment; A temperature determination module: used to determine the target temperature of the target furnace body at each moment based on the temperature requirement at each moment; An opening degree determination module: used to determine the target opening degree of the temperature regulating valve of the target furnace body at the current moment based on the target temperature of the target furnace body at the current moment; Adaptive adjustment module: used to obtain the real-time operating state of the target furnace at the current moment, and based on the real-time operating state and the target opening at the current moment, determine the adaptive adjustment plan of the temperature regulating valve at the current moment, and perform adaptive opening adjustment on the temperature regulating valve according to the adaptive adjustment plan.

[0007] Preferably, the task parsing module includes: Feature determination unit: used to perform task parsing on the to-be-executed target task to determine the task features of the to-be-executed target task; Feature extraction unit: used to extract features from the task features to obtain the temperature features of the to-be-executed target task; Requirement determination unit: used to determine the temperature requirements of the target furnace at each moment based on the temperature features of the to-be-executed target task.

[0008] Preferably, the requirement determination unit includes: Standard temperature determination block: used to determine the standard temperature of the to-be-executed target task at each moment according to the temperature features of the to-be-executed target task; Accuracy determination block: used to determine the task accuracy requirements of the to-be-executed target task according to the task features of the to-be-executed target task; Fluctuation value calculation block: used to calculate the allowable temperature fluctuation value of the to-be-executed target task at each moment based on the task accuracy requirements of the to-be-executed target task; Temperature requirement calculation block: used to calculate the temperature requirements of the target furnace at each moment based on the standard temperature of the to-be-executed target task at each moment and the allowable temperature fluctuation value at each moment.

[0009] Preferably, the temperature determination module includes: Range determination unit: used to determine the required temperature range of the target furnace at each moment based on the temperature requirements at each moment; Difference calculation unit: used to calculate the range difference of the target furnace at the current moment based on the required temperature range of the target furnace at the previous moment and the required temperature range of the target furnace at the current moment; Value determination unit: used to determine the target temperature of the target furnace at each moment according to the range difference at the current moment and the required temperature range at the current moment.

[0010] Preferably, the opening determination module includes: Data analysis unit: used to perform data analysis on the furnace body data of the target furnace to obtain the furnace body features of the target furnace; A data extraction unit, configured to extract data from the furnace body features of the target furnace body to determine a temperature regulation dataset of the target furnace body; An opening extraction unit, configured to extract an opening from the temperature regulation dataset based on the target temperature of the target furnace body at the current moment, so as to obtain the target opening of the temperature regulating valve of the target furnace body at the current moment.

[0011] Preferably, the opening extraction unit includes: A data sorting block, configured to sort the data in the temperature regulation dataset to obtain a target temperature range corresponding to each opening of the temperature regulating valve; A range determination block, configured to determine the target temperature range to which the target temperature of the target furnace body at the current moment belongs, and further determine the target opening of the temperature regulating valve.

[0012] Preferably, the adaptive adjustment module includes: A state acquisition unit, configured to acquire the real-time operation state of the target furnace body at the current moment; A real-time data determination unit, configured to determine the real-time operation data of the temperature regulating valve based on the real-time operation state of the target furnace body at the current moment; A scheme determination unit, configured to determine an adaptive adjustment scheme of the temperature regulating valve at the current moment according to the real-time operation data of the temperature regulating valve and the target opening at the current moment.

[0013] Preferably, the scheme determination unit includes: A speed determination block, configured to determine the real-time opening and real-time adjustment speed of the temperature regulating valve according to the real-time operation data of the temperature regulating valve; A direction determination block, configured to determine the opening adjustment direction of the temperature regulating valve according to the difference between the target opening and the real-time opening of the temperature regulating valve at the current moment; An acceleration calculation block, configured to calculate an initial opening adjustment acceleration of the temperature regulating valve according to the opening adjustment direction and the real-time adjustment speed of the temperature regulating valve at the current moment; An initial scheme determination block, configured to determine an initial adjustment scheme of the temperature regulating valve at the current moment based on the opening adjustment direction and the initial opening adjustment acceleration of the temperature regulating valve; An acceleration correction block, configured to obtain the real-time temperature value of the target furnace body, and correct the real-time opening adjustment acceleration based on the real-time temperature value and the real-time opening adjustment direction to obtain a corrected acceleration; A judgment block, configured to determine whether the corrected acceleration meets the adjustment requirement based on the valve characteristics of the temperature regulating valve; An acceleration adjustment block, which is used to, when the corrected acceleration does not meet the adjustment requirements, re-determine the corrected acceleration as the final acceleration according to the adjustment requirements, and adjust the initial adjustment plan according to the final acceleration to obtain the adaptive adjustment plan of the temperature regulating valve at the current moment; A scheme adjustment block, which is used to, when the corrected acceleration meets the adjustment requirements, adjust the initial adjustment plan based on the corrected acceleration to obtain the adaptive adjustment plan of the temperature regulating valve at the current moment.

[0014] Preferably, the adaptive adjustment module further includes: An adjustment value extraction unit, which is used to extract the opening adjustment direction and the opening adjustment speed of the temperature regulating valve from the adaptive adjustment plan; A speed adjustment unit, which is used to obtain the temperature change speed of the target furnace body at the current moment in real time, and determine the adjustment value of the opening adjustment speed based on the temperature change speed; An opening adjustment unit, which is used to perform opening adaptive adjustment on the temperature regulating valve based on the opening adjustment direction, the opening adjustment speed, and the adjustment value of the opening adjustment speed.

[0015] Preferably, the corrected acceleration is calculated by the following formula:

[0016] Wherein, is the corrected acceleration, is the initial opening adjustment acceleration, is the temperature deviation weight coefficient, is the target temperature at the current moment, is the real-time temperature value of the target furnace body, is the direction correction factor, is the real-time opening adjustment direction, and the value is 1 or -1, is the differential gain coefficient, is the temperature deviation change rate.

[0017] A furnace body temperature adaptive control system provided by the present invention dynamically analyzes the to-be-executed target task to generate the temperature requirements at each moment, determines the target temperature at each moment based on the temperature requirements, further determines the target opening degree of the temperature regulating valve based on the target temperature at the current moment, and then determines the adaptive adjustment scheme based on the target opening degree of the temperature regulating valve and the real-time operation state of the target furnace body at the current moment, and controls the temperature regulating valve to perform opening degree adaptive adjustment according to the adaptive adjustment scheme, effectively solving the problems of complex parameter adjustment and low dynamic response accuracy caused by insufficient rule coverage in the traditional fuzzy control method, effectively improving the accuracy of the adaptive adjustment scheme, and realizing precise and stable control of the furnace body temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 It is a schematic flow chart of a furnace body temperature adaptive control system provided by an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] To make the objectives, technical solutions, and advantages of the present invention clearer, the following will clearly and completely describe the technical solutions in the present invention with reference to the drawings in the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0021] Figure 1 It is a schematic flow chart of a furnace body temperature adaptive control system provided by an embodiment of the present invention.

[0022] As Figure 1 shown, a furnace body temperature adaptive control system provided by an embodiment of the present invention mainly includes: Task parsing module: used to parse the to-be-executed target task of the target furnace body to obtain the temperature requirements of the target furnace body at each moment; Temperature determination module: used to determine the target temperature of the target furnace body at each moment based on the temperature requirements at each moment; Opening degree determination module: used to determine the target opening degree of the temperature regulating valve of the target furnace body at the current moment based on the target temperature of the target furnace body at the current moment; Adaptive adjustment module: It is used to obtain the real-time operating state of the target furnace body at the current moment, determine the adaptive adjustment plan of the temperature regulating valve at the current moment based on the real-time operating state and the target opening degree at the current moment, and perform adaptive opening adjustment on the temperature regulating valve according to the adaptive adjustment plan.

[0023] In this embodiment, the target furnace body refers to a specific industrial furnace body equipment that needs to control the temperature, such as a metallurgical furnace, a ceramic kiln, etc. The target furnace body in this solution is the furnace body of a vertical furnace.

[0024] In this embodiment, the target task to be executed refers to the specific production task that the furnace body needs to complete, such as metal annealing, ceramic sintering. The target task to be executed includes parameters such as process flow, time plan, and temperature requirements.

[0025] In this embodiment, task parsing is a process of decomposing tasks and extracting key features. For example, analyzing the temperature curve and process accuracy requirements in different stages of the task.

[0026] In this embodiment, the temperature requirement is the temperature control index generated according to task parsing, including the standard temperature value and the allowable fluctuation range at each moment.

[0027] In this embodiment, the target temperature is the precise temperature setting value of the target furnace body at a certain moment calculated according to the temperature requirement, and it is the direct basis for the action of the temperature regulating valve of the target furnace body.

[0028] In this embodiment, the temperature regulating valve is an actuator that controls the furnace body temperature by adjusting the fuel or energy input. For example, a gas valve, an electric power controller.

[0029] In this embodiment, the target opening degree refers to the ideal opening degree required for the temperature regulating valve to achieve the target temperature at a certain moment, that is, the opening and closing ratio of the valve.

[0030] In this embodiment, the real-time operating state represents dynamic parameters such as the current actual temperature of the furnace body, the real-time opening degree of the regulating valve, and environmental disturbances. Among them, environmental disturbances can include disturbances such as heat dissipation and external temperature changes.

[0031] In this embodiment, the adaptive adjustment plan is a valve adjustment strategy dynamically generated by combining the real-time state of the target furnace body and the target opening degree, and is used to adjust the furnace body temperature to reach the target temperature.

[0032] In this embodiment, the opening degree adaptive adjustment refers to the process of real-time correcting the valve opening degree of the temperature regulating valve according to the adjustment plan to form a closed-loop control to achieve accurate temperature tracking.

[0033] The beneficial effects of the above technical solution are as follows: By dynamically parsing the to-be-executed target task to generate the temperature requirements at each moment, determining the target temperature at each moment based on the temperature requirements, further determining the target opening degree of the temperature regulating valve through the target temperature at the current moment, and then determining the adaptive adjustment scheme based on the target opening degree of the temperature regulating valve and the real-time operating state of the target furnace at the current moment, and controlling the temperature regulating valve to perform adaptive opening degree adjustment according to the adaptive adjustment scheme, it effectively solves the problems of complex parameter adjustment and low dynamic response accuracy caused by insufficient rule coverage in the traditional fuzzy control method, effectively improves the accuracy of the adaptive adjustment scheme, and realizes the precise and stable control of the furnace body temperature.

[0034] An embodiment of the present invention provides an adaptive control system for furnace body temperature, and a task parsing module, including: A feature determination unit, configured to perform task parsing on the to-be-executed target task and determine the task features of the to-be-executed target task; A feature extraction unit, configured to extract features from the task features to obtain the temperature features of the to-be-executed target task; A requirement determination unit, configured to determine the temperature requirements of the target furnace at each moment based on the temperature features of the to-be-executed target task.

[0035] In this embodiment, task parsing refers to the process of decomposing and analyzing the to-be-executed target task, and the purpose of task parsing is to identify key parameters and constraint conditions from the to-be-executed target task. For example, parsing the heating stage, heat preservation stage, cooling stage and their corresponding temperature set values, time nodes, etc. in the to-be-executed target task to form structured data.

[0036] In this embodiment, task features refer to the set of key attributes related to the to-be-executed target task extracted through task parsing, including the time distribution of each step, temperature change trend, accuracy requirements, etc. These features are the direct output of task parsing and are used to provide basic data for subsequent temperature control.

[0037] In this embodiment, feature extraction refers to the process of further screening and separating the parameters directly related to temperature control from the task features. For example, extracting the temperature target values of each stage and the allowable temperature deviation range from the process steps, and excluding features irrelevant to temperature such as pressure and humidity.

[0038] In this embodiment, temperature features are the core indicators related to temperature obtained through feature extraction, including the time-temperature correspondence relationship, temperature accuracy requirements, etc. The time-temperature correspondence relationship includes the heating rate and heat preservation duration. Temperature features are the core input for generating temperature requirements.

[0039] In this embodiment, the temperature requirement is a dynamic temperature control index calculated based on temperature characteristics, which is used to clarify the target temperature and the allowable fluctuation range of the target furnace body at each moment. Its essence is to convert the task characteristics into specific temperature control parameters, providing a basis for subsequent target temperature setting and regulating valve control.

[0040] The beneficial effects of the above technical solution are as follows: By analyzing the target task to be executed to obtain task characteristics, and extracting temperature-related parameters from them to form temperature characteristics. On this basis, generating the temperature requirement at each moment through the temperature characteristics can convert the target task to be executed into an executable temperature control parameter chain, laying a foundation for subsequent adaptive adjustment.

[0041] An embodiment of the present invention provides a furnace body temperature adaptive control system, and a demand determination unit, including: A standard temperature determination block, which is used to determine the standard temperature of the target task to be executed at each moment according to the temperature characteristics of the target task to be executed; An accuracy determination block, which is used to determine the task accuracy requirement of the target task to be executed according to the task characteristics of the target task to be executed; A fluctuation value calculation block, which is used to calculate the allowable temperature fluctuation value of the target task to be executed at each moment based on the task accuracy requirement of the target task to be executed; A temperature requirement calculation block, which is used to calculate the temperature requirement of the target furnace body at each moment based on the standard temperature of the target task to be executed at each moment and the allowable temperature fluctuation value at each moment.

[0042] In this embodiment, the standard temperature is the theoretical temperature corresponding to each time node deduced from the temperature characteristics, reflecting the ideal temperature control target of the target task to be executed at each moment.

[0043] In this embodiment, the task accuracy requirement is a quality index of the target task to be executed obtained by parsing the task characteristics, which is used to define the allowable temperature deviation range.

[0044] In this embodiment, the allowable temperature fluctuation value is the maximum allowable deviation of the temperature at each moment calculated by dynamic calculation according to the task accuracy requirement, which is used to quantify the positive and negative deviation limits of the acceptable real-time temperature from the standard value.

[0045] In this embodiment, the temperature requirement includes the standard temperature and the allowable temperature fluctuation value.

[0046] By analyzing the task characteristics of the target task to be executed, the requirements for temperature control are obtained, and a dynamic fluctuation range is generated in combination with the accuracy requirements of the target task to be executed. Finally, a temperature demand that takes into account the ideal setting and the allowable deviation is formed, providing an accurate control target for adaptive adjustment and a reference for the adjustment range for subsequent temperature adaptive adjustment.

[0047] An embodiment of the present invention provides a furnace body temperature adaptive control system, a temperature determination module, including: A range determination unit, configured to determine the required temperature range of the target furnace body at each moment based on the temperature demand at each moment; A difference calculation unit, configured to calculate the range difference of the target furnace body at the current moment based on the required temperature range of the target furnace body at the previous moment and the required temperature range of the target furnace body at the current moment; A value determination unit, configured to determine the target temperature of the target furnace body at each moment according to the range difference at the current moment and the required temperature range at the current moment.

[0048] In this embodiment, the required temperature range is a dynamic temperature interval derived from the temperature demand, representing the upper and lower boundary limits that allow the temperature of the target furnace body to fluctuate at the current moment, and is used to define the legal operation domain of temperature control.

[0049] In this embodiment, the range difference is the amplitude of the temperature interval change quantified by comparing the required temperature range differences of adjacent moments, reflecting the dynamic adjustment trend of the control boundary caused by the task process.

[0050] In this embodiment, the target temperature is an accurate temperature setting value dynamically calculated by comprehensively considering the required temperature range at the current moment and its difference from the previous time period, and is used as the direct basis for the operation of the temperature regulating valve. For example, if the temperature of the target furnace body needs to be maintained between 95°C and 105°C at the previous moment, the target temperature at the previous moment is 100°C, and the current moment demand becomes 105°C - 115°C, and the change range of the target furnace body remains within 8°C, it can transition relatively smoothly. Then, by comparing the median change of the temperature ranges before and after, it is judged that the temperature needs to be increased and in order to avoid sudden changes, the target temperature at the current moment is finally set to 108°C.

[0051] The beneficial effects of the above technical solution are: By defining the required temperature range at each moment through the temperature demand, and analyzing the continuity requirements of temperature changes in combination with the required temperature range differences of adjacent time periods, an accurate target temperature value is finally generated. By converting the task requirements into specific control parameters, it is ensured that the temperature adjustment can meet the constraints at the current moment.

[0052] An embodiment of the present invention provides a furnace body temperature adaptive control system, an opening degree determination module, including: A data analysis unit, used for performing data analysis on the furnace body data of the target furnace body to obtain the furnace body characteristics of the target furnace body; A data extraction unit, used to extract data from the furnace characteristics of the target furnace body to determine a temperature adjustment data set of the target furnace body; The opening extraction unit is used to extract the opening from the temperature control data set based on the target temperature of the target furnace at the current moment, so as to obtain the target opening of the temperature control valve of the target furnace at the current moment.

[0053] In this embodiment, furnace body data refers to various parameters collected during the operation of the target furnace body, such as historical temperature, valve status, energy consumption records, etc. By analyzing the data and mining its internal laws, furnace body characteristics reflecting the thermodynamic properties of the furnace body can be extracted, such as thermal inertia coefficient, heating rate, heat dissipation characteristics, etc.

[0054] In this embodiment, the temperature adjustment data set is a structured data set that is strongly related to temperature control and is screened from the furnace characteristics, such as temperature response curves at different openings, valve action delay parameters, etc., and is mainly used to establish a mapping relationship between temperature and valve opening.

[0055] In this embodiment, the target temperature refers to the set temperature value to be reached at the current moment. By matching the corresponding opening in the temperature control data set with the associated interval of the temperature, the target opening required to achieve the temperature can be determined.

[0056] The beneficial effects of the above technical solution are: the furnace body characteristics are determined by performing data analysis on the furnace body data, and data extraction is performed to obtain a temperature control data set, and the target opening corresponding to the target temperature is further extracted from the temperature control data set to obtain the final target opening. The operating characteristics of the target furnace body can be converted into executable valve control parameters, which is convenient for quantification and improves the accuracy of temperature regulation.

[0057] The embodiment of the present invention provides a furnace temperature adaptive control system, an opening extraction unit, comprising: A data sorting block, used to sort the data in the temperature control data set to obtain a target temperature range corresponding to each opening of the temperature control valve; The range determination block is used to determine the target temperature range to which the target temperature of the target furnace body at the current moment belongs, and further determine the target opening of the temperature regulating valve.

[0058] In this embodiment, data sorting refers to the process of cleaning, classifying and standardizing the original data in the temperature adjustment data set. The mapping relationship between the opening degree and the temperature can be extracted through data sorting.

[0059] In this embodiment, the target temperature range is the effective temperature control interval corresponding to each valve opening degree determined after data collation, representing the temperature fluctuation range that the furnace body can stably maintain at this opening degree.

[0060] In this embodiment, the target temperature range to which the target temperature belongs refers to the temperature range covered by a specific opening degree determined by matching the current target temperature with the temperature interval corresponding to the opening degree.

[0061] By collating the data in the temperature adjustment dataset, the target temperature range corresponding to each opening degree is obtained, and the target opening degree of the temperature control valve is determined through the target temperature range to which the target temperature belongs, enabling the matching of the target temperature and the target opening degree.

[0062] An embodiment of the present invention provides a furnace body temperature adaptive control system, and the adaptive adjustment module includes: A state acquisition unit for acquiring the real-time operating state of the target furnace body at the current moment; A real-time data determination unit for determining the real-time operating data of the temperature control valve based on the real-time operating state of the target furnace body at the current moment; A scheme determination unit for determining the adaptive adjustment scheme of the temperature control valve at the current moment according to the real-time operating data of the temperature control valve and the target opening degree at the current moment.

[0063] In this embodiment, the real-time operating state at the current moment refers to the dynamic parameters during the real-time operation of the target furnace body, including temperature, pressure, valve opening degree, etc.

[0064] In this embodiment, the adaptive adjustment scheme refers to a dynamic control strategy generated by combining the difference between the real-time operating data and the target opening degree, including parameters such as the opening degree adjustment direction, speed, and acceleration. This scheme guides the valve action through a closed-loop feedback mechanism to ensure that the temperature accurately tracks the target value.

[0065] The beneficial effects of the above technical solution are: by determining the real-time operating data of the temperature control valve through the real-time operating state, and further determining the adaptive adjustment scheme according to the real-time operating data of the temperature control valve and the target opening degree, it is possible to consider the current operating state and ensure the feasibility of the adaptive adjustment scheme.

[0066] An embodiment of the present invention provides a furnace body temperature adaptive control system, and the scheme determination unit includes: A speed determination block for determining the real-time opening degree and real-time adjustment speed of the temperature control valve according to the real-time operating data of the temperature control valve; A direction determination block for determining the opening degree adjustment direction of the temperature control valve according to the difference between the target opening degree and the real-time opening degree of the temperature control valve at the current moment; An acceleration calculation block, which is used to calculate the initial opening adjustment acceleration of the temperature regulating valve according to the opening adjustment direction and real-time adjustment speed of the temperature regulating valve at the current moment; An initial scheme determination block, which is used to determine the initial adjustment scheme of the temperature regulating valve at the current moment based on the opening adjustment direction and initial opening adjustment acceleration of the temperature regulating valve; An acceleration correction block, which is used to obtain the real-time temperature value of the target furnace body and correct the real-time opening adjustment acceleration based on the real-time temperature value and the real-time opening adjustment direction to obtain a corrected acceleration;

[0067] Wherein, is the corrected acceleration, is the initial opening adjustment acceleration, is the temperature deviation weight coefficient, is the target temperature at the current moment, is the real-time temperature value of the target furnace body, is the direction correction factor, is the real-time opening adjustment direction, with a value of 1 or -1, is the differential gain coefficient, is the temperature deviation change rate; A judgment block, which is used to determine whether the corrected acceleration meets the adjustment requirements based on the valve characteristics of the temperature regulating valve; An acceleration adjustment block, which is used to re-determine the corrected acceleration as the final acceleration according to the adjustment requirements when the corrected acceleration does not meet the adjustment requirements, and adjust the initial adjustment scheme according to the final acceleration to obtain the adaptive adjustment scheme of the temperature regulating valve at the current moment; A scheme adjustment block, which is used to adjust the initial adjustment scheme based on the corrected acceleration to obtain the adaptive adjustment scheme of the temperature regulating valve at the current moment when the corrected acceleration meets the adjustment requirements.

[0068] In this embodiment, the real-time adjustment speed refers to the speed of the valve opening change of the temperature regulating valve, such as how many percentages are adjusted per second.

[0069] In this embodiment, the difference between the target opening and the real-time opening refers to the gap between the target opening and the actual opening, which is used to judge the adjustment direction. The opening adjustment direction is used to indicate whether the valve needs to be opened or closed, that is, to increase or decrease the opening.

[0070] In this embodiment, the initial opening adjustment acceleration refers to the preliminary acceleration parameter calculated according to the real-time opening adjustment direction and the real-time adjustment speed, which is used to reflect the expected rate change of the opening change.

[0071] In this embodiment, the corrected acceleration is the final acceleration parameter obtained by dynamically adjusting the initial acceleration based on the deviation between the real-time temperature value and the target temperature, the rate of change of the deviation, and the adjustment direction.

[0072] In this embodiment, the valve characteristics refer to the inherent physical properties or performance parameters of the temperature control valve, such as the maximum opening range, response delay, mechanical inertia, etc., which are used to restrict the reasonable range of acceleration. The adjustment requirement is the allowable range of acceleration or performance index obtained based on the valve characteristics, which is used to determine whether the corrected acceleration meets the requirements of safety and effectiveness.

[0073] In this embodiment, the final acceleration refers to the acceleration value that meets the adjustment requirement generated by recalculation or constrained adjustment when the corrected acceleration does not meet the adjustment requirement, ensuring the stable and reliable operation of the valve. The adaptive adjustment scheme is a dynamic control strategy generated by combining the final acceleration, the opening adjustment direction, and the real-time operation data of the temperature control valve, which is used to guide the precise operation of the temperature control valve at the current moment.

[0074] In this embodiment, this part takes the temperature deviation into consideration. When the actual temperature and the target temperature have a larger deviation, the value of this part is larger, which will increase the corrected acceleration and prompt the control valve to act faster to reduce the temperature difference, enabling it to quickly respond to large temperature differences. The value of is 0.6; reflects the adjustment direction, which is determined to be positive or negative according to the magnitude relationship between the target temperature and the actual temperature, and is combined with d (real-time opening adjustment direction, with a value of 1 or 1), ensuring that the control valve adjusts in the direction of making the temperature approach the target value and avoiding incorrect adjustment directions.

[0075] considers the rate of change of the temperature deviation . If the temperature deviation changes rapidly, its effect is amplified through the differential gain coefficient η, enabling the control valve to react in advance, enhancing the system's adaptability to the temperature change trend, helping to suppress temperature fluctuations, and improving the system stability. The value of is 0.1.

[0076] The beneficial effects of the above technical solution are as follows: By determining the real-time opening degree and adjustment speed of the valve based on real-time operation data, dynamically judging the adjustment direction in combination with the target opening degree difference, generating an initial adjustment acceleration and adjustment plan, further correcting the deviation of the acceleration according to the real-time temperature value, and verifying whether the correction result meets the requirements based on the valve characteristics. Finally, an adaptive control plan generated through multiple rounds of dynamic adjustment can effectively integrate the target temperature, real-time state, and valve characteristics to form a closed-loop control mechanism. While ensuring the accuracy of the adjustment direction and speed, it suppresses overshoot or lag through dynamic correction of the acceleration, effectively improving the high-precision tracking and stable control of the target furnace body temperature.

[0077] An embodiment of the present invention provides a furnace body temperature adaptive control system, and the adaptive adjustment module further includes: An adjustment value extraction unit for extracting the opening degree adjustment direction and opening degree adjustment speed of the temperature regulating valve from the adaptive adjustment plan; A speed adjustment unit for real-time obtaining the temperature change speed of the target furnace body at the current moment and determining an adjustment value of the opening degree adjustment speed based on the temperature change speed; An opening degree adjustment unit for adaptively adjusting the opening degree of the temperature regulating valve based on the opening degree adjustment direction, the opening degree adjustment speed, and the adjustment value of the opening degree adjustment speed.

[0078] In this embodiment, the temperature change speed represents the change amount of the real-time temperature of the target furnace body per unit time and is used to reflect the rising or falling trend of the current furnace temperature.

[0079] In this embodiment, the adjustment value is a dynamic correction amount of the opening degree adjustment speed according to the temperature change speed and is used to suppress temperature fluctuations or accelerate convergence. It is necessary to determine a reasonable speed of temperature change according to the characteristics of the target furnace body and determine the adjustment value of the opening degree adjustment speed according to the corresponding relationship between the temperature change speed and the opening degree adjustment speed.

[0080] In this embodiment, the opening degree adaptive adjustment refers to the process of performing closed-loop dynamic adjustment on the opening degree of the temperature regulating valve through comprehensive parameters such as the opening degree adjustment direction, adjustment speed, and its adjustment value.

[0081] The beneficial effects of the above technical solution are as follows: By extracting the opening degree adjustment direction and opening degree adjustment speed from the adaptive adjustment plan, and obtaining the adjustment value of the opening degree adjustment speed according to the temperature change speed of the target furnace body, further performing adaptive adjustment on the opening degree of the temperature regulating valve through this adjustment value. It can extract direction and speed parameters from the adaptive adjustment plan, dynamically correct the amplitude of the adjustment speed in combination with the real-time temperature change, and finally generate a precise adjustment instruction by integrating the direction, speed, and correction amount to form a closed-loop feedback, improving the stability and anti-interference ability of temperature adjustment.

[0082] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separated. The components shown as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art can understand and implement it without creative efforts.

[0083] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on such an understanding, the essence of the above technical solution, or the part that contributes to the prior art, can be embodied in the form of a software product. The computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0084] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features. And these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An adaptive control system for the furnace body temperature, characterized in that Including: Task parsing module: used to parse the target task to be executed for the target furnace body to obtain the temperature requirement of the target furnace body at each moment; Temperature determination module: used to determine the target temperature of the target furnace body at each moment based on the temperature requirement at each moment; Opening degree determination module: used to determine the target opening degree of the temperature regulating valve of the target furnace body at the current moment based on the target temperature of the target furnace body at the current moment; Adaptive adjustment module: used to obtain the real-time operating state of the target furnace body at the current moment, and determine the adaptive adjustment scheme of the temperature regulating valve at the current moment based on the real-time operating state and the target opening degree at the current moment, and perform opening degree adaptive adjustment on the temperature regulating valve according to the adaptive adjustment scheme.

2. The adaptive control system for furnace body temperature according to claim 1, wherein The task parsing module includes: Feature determination unit: used to parse the target task to be executed to determine the task features of the target task to be executed; Feature extraction unit: used to extract features from the task features to obtain the temperature features of the target task to be executed; Requirement determination unit: used to determine the temperature requirement of the target furnace body at each moment based on the temperature features of the target task to be executed.

3. The self-adaptive control system for the furnace body temperature according to claim 2, wherein The requirement determination unit includes: Standard temperature determination block: used to determine the standard temperature of the target task to be executed at each moment according to the temperature features of the target task to be executed; Accuracy determination block: used to determine the task accuracy requirement of the target task to be executed according to the task features of the target task to be executed; Fluctuation value calculation block: used to calculate the allowable temperature fluctuation value of the target task to be executed at each moment based on the task accuracy requirement of the target task to be executed; Temperature requirement calculation block: used to calculate the temperature requirement of the target furnace body at each moment based on the standard temperature of the target task to be executed at each moment and the allowable temperature fluctuation value at each moment.

4. A furnace body temperature adaptive control system according to claim 1, characterized in that The temperature determination module includes: Range determination unit: used to determine the required temperature range of the target furnace body at each moment based on the temperature requirement at each moment; Difference calculation unit: used to calculate the range difference of the target furnace body at the current moment based on the required temperature range of the target furnace body at the previous moment and the required temperature range of the target furnace body at the current moment; Value determination unit: used to determine the target temperature of the target furnace body at each moment according to the range difference at the current moment and the required temperature range at the current moment.

5. The adaptive control system for the furnace body temperature according to claim 1, wherein The opening degree determination module includes: Data analysis unit: used to perform data analysis on the furnace body data of the target furnace body to obtain the furnace body features of the target furnace body; Data extraction unit: used to extract data from the furnace body features of the target furnace body to determine the temperature regulation data set of the target furnace body; Opening degree extraction unit: used to extract the opening degree from the temperature regulation data set based on the target temperature of the target furnace body at the current moment to obtain the target opening degree of the temperature regulating valve of the target furnace body at the current moment.

6. The self - adaptive control system for furnace body temperature according to claim 5, characterized in that, The opening degree extraction unit includes: A data sorting block for sorting the data in the temperature adjustment dataset to obtain the target temperature range corresponding to each opening degree of the temperature control valve; A range determination block for determining the target temperature range to which the target temperature of the target furnace body at the current moment belongs, and further determining the target opening degree of the temperature control valve.

7. A furnace body temperature adaptive control system according to claim 1, characterized in that, The adaptive adjustment module includes: A state acquisition unit for acquiring the real-time operating state of the target furnace body at the current moment; A real-time data determination unit for determining the real-time operating data of the temperature control valve based on the real-time operating state of the target furnace body at the current moment; A scheme determination unit for determining the adaptive adjustment scheme of the temperature control valve at the current moment according to the real-time operating data of the temperature control valve and the target opening degree at the current moment.

8. A furnace body temperature adaptive control system according to claim 7, characterized in that, The scheme determination unit includes: A speed determination block for determining the real-time opening degree and real-time adjustment speed of the temperature control valve according to the real-time operating data of the temperature control valve; A direction determination block for determining the opening degree adjustment direction of the temperature control valve according to the difference between the target opening degree and the real-time opening degree of the temperature control valve at the current moment; An acceleration calculation block for calculating the initial opening degree adjustment acceleration of the temperature control valve according to the opening degree adjustment direction and the real-time adjustment speed of the temperature control valve at the current moment; An initial scheme determination block for determining the initial adjustment scheme of the temperature control valve at the current moment based on the opening degree adjustment direction and the initial opening degree adjustment acceleration of the temperature control valve; An acceleration correction block for acquiring the real-time temperature value of the target furnace body and correcting the initial opening degree adjustment acceleration based on the real-time temperature value and the real-time opening degree adjustment direction to obtain a corrected acceleration; A judgment block for determining whether the corrected acceleration meets the adjustment requirement based on the valve characteristics of the temperature control valve; An acceleration adjustment block for, when the corrected acceleration does not meet the adjustment requirement, re-determining the corrected acceleration as the final acceleration according to the adjustment requirement, and adjusting the initial adjustment scheme according to the final acceleration to obtain the adaptive adjustment scheme of the temperature control valve at the current moment; A scheme adjustment block for, when the corrected acceleration meets the adjustment requirement, adjusting the initial adjustment scheme based on the corrected acceleration to obtain the adaptive adjustment scheme of the temperature control valve at the current moment.

9. A furnace body temperature adaptive control system according to claim 1, characterized in that, The adaptive adjustment module further includes: An adjustment value extraction unit for extracting the opening degree adjustment direction and the opening degree adjustment speed of the temperature control valve from the adaptive adjustment scheme; A speed adjustment unit for acquiring the temperature change speed of the target furnace body at the current moment in real time and determining the adjustment value of the opening degree adjustment speed based on the temperature change speed; An opening degree adjustment unit for adaptively adjusting the opening degree of the temperature control valve based on the opening degree adjustment direction, the opening degree adjustment speed, and the adjustment value of the opening degree adjustment speed.

10. A furnace body temperature adaptive control system according to claim 8, characterized in that, The corrected acceleration is calculated by the following formula: wherein, is the corrected acceleration, is the initial opening adjustment acceleration, is the temperature deviation weight coefficient, is the target temperature at the current moment, is the real-time temperature value of the target furnace body, is the direction correction factor, is the real-time opening adjustment direction, with a value of 1 or -1, is the differential gain coefficient, is the temperature deviation change rate.

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