A production quality inspection method and system for stepped niobium target tubes

Abstract

The present invention relates to the field of production quality data detection of stepped niobium target tubes, and specifically discloses a production quality detection method and system for stepped niobium target tubes. The method comprises: S1, presetting a plurality of contact starting points of a forming device and regional images corresponding to the plurality of contact starting points according to forming conditions; S2, obtaining a tube wall stress distribution map corresponding to each regional image based on a historical forming control process of each contact starting point, and obtaining a tube wall thickness value and a tube wall stress value of a vertical cross section at a tube orifice position where the regional image is located; S3, performing a machine training model on the real-time initial tube wall thickness values and initial tube wall stress values of different contact starting points based on the incremental forming principle of metal tubes, setting grid unit specifications, and performing single-point incremental forming simulation analysis on the inner and outer tube walls after the grid unit specifications are set; and S4, judging the uniformity of incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results to obtain a production quality detection result.

Description

Technical Field

[0001] The present invention relates to the field of production quality data detection of stepped niobium target tubes, and in particular to a production quality detection method and system for stepped niobium target tubes. Background Art

[0002] With the continuous advancement of science and technology, target preparation technology is also developing. For example, processes such as high-temperature sintering and hot isostatic pressing can improve the density and purity of target materials, thereby enhancing target performance. Furthermore, by optimizing the target's composition and structure, sputtering efficiency and film quality can be further improved.

[0003] A stepped target is a specially shaped target with a stepped surface. This structure increases the target's surface area, improving sputtering efficiency while also improving film uniformity and adhesion. Stepped targets are commonly used to produce high-quality thin films, such as those used in semiconductor devices and optical thin films.

[0004] In the existing production control process for stepped niobium target tubes, there is a lack of methods for analyzing the energy distribution of the forming process at different contact points, and a lack of measures for optimizing the production quality inspection process of stepped niobium target tubes. Summary of the Invention

[0005] The purpose of the present invention is to provide a production quality inspection method and system for stepped niobium target tubes to solve the following technical problems:

[0006] How to achieve precise production quality inspection goals by optimizing the production forming process of stepped niobium target tubes.

[0007] The purpose of the present invention can be achieved through the following technical solutions:

[0008] A production quality inspection method for a stepped niobium target tube, wherein the tube wall of the stepped niobium target tube includes a step wall and an inner tube wall; the step wall includes a first step tube wall and a second step tube wall; the inner tube wall includes an inner tube outer wall and an inner tube inner wall;

[0009] Methods include:

[0010] S1. Pre-set multiple contact starting points of the forming device according to the forming conditions:

[0011] respectively acquiring regional images corresponding to a first contact starting point of a first step tube wall, a second contact starting point of a second step tube wall, and a third contact starting point of an inner tube wall of a historical step-type niobium target tube;

[0012] S2. Obtaining a pipe wall stress distribution map corresponding to each regional image based on the forming control process of each historical contact starting point, and obtaining a pipe wall thickness value and a pipe wall stress value at a vertical section of the pipe orifice position where the regional image is located; the pipe wall stress value includes a pipe inner wall stress value and a pipe outer wall stress value;

[0013] S3. Based on the incremental forming principle of metal tubes, a machine training model is performed on the real-time initial tube wall thickness values and initial tube wall stress values at different contact starting points, and grid unit specifications are set. After the grid unit specifications are set, single-point incremental forming simulation analysis is performed on the inner and outer tube walls;

[0014] S4. Determine the uniformity of the incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results and obtain the production quality inspection results.

[0015] Preferably, the metal tube incremental forming principle includes:

[0016] Based on the forming device, a first feeding forming extrusion is performed at a designated contact starting point with a set radial feed speed and an axial feed speed to obtain a forming radial distance and a forming axial distance;

[0017] The forming radial distance includes the inner tube forming incremental radius and the outer tube forming incremental radius; the inner tube forming incremental radius is the distance from the inner vertex to the axis minus the value of the inner tube initial radius distance; the outer tube forming incremental radius is the distance from the outer vertex to the axis minus the inner tube initial radius distance and minus the tube wall thickness value; the forming axial distance is the distance of the axial deformation area; and based on the first feed forming extrusion, the second feed is performed and the tube wall is formed along the spiral trajectory to complete the tube incremental forming process.

[0018] Preferably, it also includes:

[0019] Accumulate multiple feeding forming to obtain pipe fittings that meet process requirements; count the cumulative forming times and the cumulative value of the forming radial distance and the cumulative value of the forming axial distance;

[0020] The cumulative forming times, the cumulative values of the forming radial distance, and the cumulative values of the forming axial distance from historical statistics are input into the machine model as initial samples for learning, and a theoretical model of metal incremental forming is constructed;

[0021] The real-time initial tube wall thickness values and initial tube wall stress values marked with different contact starting points are input into the metal incremental forming theoretical model to output the forming force and tube wall thickness reduction in the deformation area during single-point incremental forming of metal tubes.

[0022] Preferably, S3 includes:

[0023] S31, obtaining the width of the arc of the contact area between the outer tube wall of the cross section and the forming area. If the width is less than a preset threshold, performing the single-point incremental forming simulation analysis of step S32; otherwise, generating a warning signal;

[0024] S32, obtaining the forming force in the deformation zone and the equivalent stress distribution cloud diagram of the tube wall thickness reduction at different completion ratios in the single-point incremental forming with different contact starting points;

[0025] S33. Collect the energy value of the equivalent stress distribution cloud map and determine the distribution of high energy values within the grid cells:

[0026] If the distribution of high energy values exceeds the preset interval, an early warning signal is generated;

[0027] If the high energy value distribution is less than the preset interval, the simulation will continue.

[0028] Preferably, the width of the arc between the outer tube wall of the cross section and the forming contact area is obtained as follows:

[0029] According to the relationship between the tube wall thickness change during the tube incremental forming process:

[0030]

[0031] Wall thickness reduction:

[0032]

[0033] because 、 If the value of is small, for:

[0034]

[0035] when hour:

[0036]

[0037] in, ;

[0038] The width of the arc between the outer tube wall of the cross section and the forming contact area is:

[0039]

[0040] in, is the change ratio of the pipe wall thickness; is the shaft rotation radius of the forming device; is the initial radius of the inner tube; is the shaft rotation angle of the forming device; is the inner tube axis rotation angle; is the initial tube wall thickness; is the tube wall thickness at the vertex of the arc; is the amount of thinning of the pipe wall; is the pipe wall thickness deviation value.

[0041] Preferably, the ratio of the forming force in the deformation area to the tube wall thickness reduction in single point incremental forming is calculated as follows:

[0042]

[0043] in, is the single-point incremental forming proportional coefficient; is the ratio of the wall thickness reduction to the initial wall thickness; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The thickness reduction of the tube wall material at different contact starting points in the deformation zone.

[0044] Preferably, the energy value of the equivalent stress distribution cloud map is obtained as follows:

[0045] Get the single point incremental forming scale coefficient Respectively in the set value 、 、 、 Equivalent stress distribution cloud diagram of the lower tube wall forming area; < < < ;

[0046] Based on the energy balance equation, the equivalent stress values in different grid cells are obtained, and the equivalent stress values are displayed in RGB color areas and color intervals;

[0047] Collect the RGB color area in each grid cell The mean red component of each pixel , green component mean and the mean of the blue component ;

[0048] according to 、 and The energy value interval of the deformation area is determined based on the change rules of the numerical value and color interval.

[0049] Preferably, the distribution of high energy values within the grid cells is determined:

[0050] Statistical deformation area Red component in grid cells 、 、 , Green component in grid cells 、 、 , Blue component in grid cells 、 、 ;in, , , ∈ ;

[0051] Each color of the deformation area corresponds to 、 interval combination, and each color corresponds to an energy range;

[0052] according to 、 and The color interval combination of the numerical value determines the color distribution of the deformation area, and the combination in which the color distribution of the deformation area exceeds the interval is determined to be a high energy value.

[0053] A production quality inspection system for a stepped niobium target tube is used to inspect the production quality of the stepped niobium target tube. The system comprises:

[0054] An image acquisition module is used to pre-set multiple contact starting points of the forming device according to forming conditions:

[0055] respectively acquiring regional images corresponding to a first contact starting point of a first step tube wall, a second contact starting point of a second step tube wall, and a third contact starting point of an inner tube wall of a historical step-type niobium target tube;

[0056] The image analysis module is used to obtain the pipe wall stress distribution map corresponding to each regional image based on the forming control process of each historical contact starting point, and obtain the pipe wall thickness value and pipe wall stress value of the vertical section at the pipe orifice position where the regional image is located; the pipe wall stress value includes the pipe inner wall stress value and the pipe outer wall stress value;

[0057] The model simulation module is used to train the model based on the principle of incremental forming of metal tubes using the real-time initial tube wall thickness and initial tube wall stress values at different contact starting points, set the grid unit specifications, and perform single-point incremental forming simulation analysis on the inner and outer tube walls after the grid unit specifications are set;

[0058] The result detection module is used to judge the uniformity of the incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results and obtain the production quality detection results.

[0059] Beneficial effects of the present invention:

[0060] (1) The present invention performs machine training model analysis on the real-time initial tube wall thickness values and initial tube wall stress values at different contact starting points based on the incremental forming principle of metal tubes. The original relative motion relationship between the tube material and the tool wheel during the forming process is retained by machine training, and part of the forming device is simplified to train and construct a single-point incremental forming geometric model of the metal tube. The grid unit specifications are set and the solid unit is used for calculation to ensure that the subsequent simulation can obtain the stress and the range of the stress action area.

[0061] (2) The present invention performs single-point incremental forming simulation analysis on the inner and outer tube walls after setting the grid unit specifications; judges the uniformity of the incremental change of the inner and outer tube walls based on the single-point incremental forming simulation analysis results, and can improve the timely judgment of the forming completion degree of production quality inspection based on the energy change of the incremental change of the inner and outer tube walls, thereby ensuring accurate acquisition of production quality inspection results; and realizes the precise production quality inspection goal by optimizing the production forming process of the step-type niobium target tube.

[0062] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0063] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0064] Figure 1 This is a step diagram of a production quality inspection method for a stepped niobium target tube according to the present invention;

[0065] Figure 2 This is a diagram of the production quality inspection system for a stepped niobium target tube according to the present invention;

[0066] Figure 3 This is a structural diagram of the step-type niobium target tube of the present invention;

[0067] Figure 4 This is a distribution diagram of the first, second and third contact starting points during the forming process of the step-type niobium target tube of the present invention;

[0068] Figure 5 This is a process step diagram of the single point incremental forming simulation analysis in step S3 of the production quality inspection method for the stepped niobium target tube of the present invention.

[0069] Figure numerals: 1, first step tube wall; 2, second step tube wall; 3, inner tube wall; 11, first contact starting point; 21, second contact starting point; 31, inner tube outer wall; 32, inner tube inner wall; 33, third contact starting point. DETAILED DESCRIPTION

[0070] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0071] See also Figure 1 、 3 -4, the present invention is a production quality inspection method for a step-type niobium target tube, wherein the tube wall of the step-type niobium target tube includes a step wall and an inner tube wall 3; the step wall includes a first step tube wall 1 and a second step tube wall 2; the inner tube wall 3 includes an inner tube outer wall 31 and an inner tube inner wall 32;

[0072] Methods include:

[0073] S1. Pre-set multiple contact starting points of the forming device according to the forming conditions:

[0074] Acquire regional images corresponding to the first contact starting point 11 of the first step tube wall 1, the second contact starting point 21 of the second step tube wall 2, and the third contact starting point 33 of the inner tube wall 3 of the historical step-type niobium target tube respectively;

[0075] S2. Obtaining a pipe wall stress distribution map corresponding to each regional image based on the forming control process of each historical contact starting point, and obtaining a pipe wall thickness value and a pipe wall stress value at a vertical section of the pipe orifice position where the regional image is located; the pipe wall stress value includes a pipe inner wall stress value and a pipe outer wall stress value;

[0076] S3. Based on the incremental forming principle of metal tubes, a machine training model is performed on the real-time initial tube wall thickness values and initial tube wall stress values at different contact starting points, and grid unit specifications are set. After the grid unit specifications are set, single-point incremental forming simulation analysis is performed on the inner and outer tube walls;

[0077] S4. Determine the uniformity of the incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results and obtain the production quality inspection results.

[0078] In the above technical solution, the stepped niobium target tube is usually composed of a target tube and a step. Therefore, the tube wall of the stepped niobium target tube usually includes a step wall and an inner tube wall 3; the step wall is divided into a first step wall 1 and a second step wall 2 according to the number of steps; and the inner tube wall 3 includes an inner tube outer wall 31 and an inner tube inner wall 32. The forming tool performs a forming control process on the inner and outer walls of the target tube and the step. The specific process of the production quality inspection method is as follows: first, multiple contact starting points of the forming device are pre-set according to the forming conditions; the multiple contact starting points include contact points respectively distributed at the positions of the first step wall, the second step wall and the inner tube wall 3; the design of the present invention sets three contact starting points, namely the first contact starting point 11, the second contact starting point 21 and the third contact starting point 33. In actual production, the contact starting point of the forming tool can be set to multiple contact starting points according to design requirements. In order to better distinguish different positions, this embodiment obtains regional images corresponding to the first contact starting point 11 of the first step tube wall 1, the second contact starting point 21 of the second step tube wall 2, and the third contact starting point 33 of the inner tube wall 3 of the historical step-type niobium target tube; then, a digital camera is used to obtain historical regional images of each contact starting point, and the stress distribution area of the tube wall is obtained through the historical forming control process and finite element simulation analysis. The tube wall stress distribution includes internal and external stresses, so the tube wall thickness value and tube wall stress value can be obtained. The tube wall stress value includes the tube inner wall stress value and the tube outer wall stress value.

[0079] Then, based on the incremental forming principle of metal tubes, the real-time initial tube wall thickness values and initial tube wall stress values at different contact starting points are analyzed by machine training model. The model is a common basic geometric model. The original relative motion relationship between the tube material and the tool wheel during the forming process is retained through machine training, and some forming devices are simplified to train and construct a single-point incremental forming geometric model of the metal tube. By setting the grid unit specifications and using solid units for calculation, it is ensured that the subsequent simulation obtains the stress and the range of the stress action area. The single-point incremental forming simulation analysis is performed on the inner and outer tube walls after setting the grid unit specifications. Finally, the uniformity of the incremental changes of the inner and outer tube walls is judged according to the single-point incremental forming simulation analysis results. According to the energy changes of the incremental changes of the inner and outer tube walls, the timely judgment of the forming completion degree of the production quality inspection can be improved, and the production quality inspection results can be accurately obtained. The production forming process of the step-type niobium target tube is optimized to achieve the goal of precise production quality inspection.

[0080] As an embodiment of the present invention, the incremental forming principle of the metal tube includes:

[0081] Based on the forming device, a first feeding forming extrusion is performed at a designated contact starting point with a set radial feed speed and an axial feed speed to obtain a forming radial distance and a forming axial distance;

[0082] The forming radial distance includes the inner tube forming incremental radius and the outer tube forming incremental radius. The inner tube forming incremental radius is the distance from the inner vertex to the axis minus the inner tube initial radius. The outer tube forming incremental radius is the distance from the outer vertex to the axis minus the inner tube initial radius and the tube wall thickness. The forming axial distance is the distance of the axial deformation area.

[0083] Based on the first feed forming extrusion, the tube wall is formed along a spiral trajectory after the second feed, completing the tube incremental forming process.

[0084] As an embodiment of the present invention, it also includes:

[0085] Accumulate multiple feeding forming to obtain pipe fittings that meet process requirements; count the cumulative forming times and the cumulative value of the forming radial distance and the cumulative value of the forming axial distance;

[0086] The cumulative forming times, the cumulative values of the forming radial distance, and the cumulative values of the forming axial distance from historical statistics are input into the machine model as initial samples for learning, and a theoretical model of metal incremental forming is constructed;

[0087] The real-time initial tube wall thickness values and initial tube wall stress values marked with different contact starting points are input into the metal incremental forming theoretical model to output the forming force and tube wall thickness reduction in the deformation area during single-point incremental forming of metal tubes.

[0088] As an embodiment of the present invention, please refer to Figure 5 As shown, S3 includes:

[0089] S31, obtaining the width of the arc of the contact area between the outer tube wall of the cross section and the forming area. If the width is less than a preset threshold, performing the single-point incremental forming simulation analysis of step S32; otherwise, generating a warning signal;

[0090] S32, obtaining the forming force in the deformation zone and the equivalent stress distribution cloud diagram of the tube wall thickness reduction at different completion ratios in the single-point incremental forming with different contact starting points;

[0091] S33. Collect the energy value of the equivalent stress distribution cloud map and determine the distribution of high energy values within the grid cells:

[0092] If the distribution of high energy values exceeds the preset interval, an early warning signal is generated;

[0093] If the high energy value distribution is less than the preset interval, the simulation will continue.

[0094] In the above technical solution, the process of single-point incremental forming simulation analysis in step S3 is further refined. First, the width of the arc of the outer tube wall of the cross section and the forming contact area is obtained by theoretical calculation of the contact area between the tube wall and the contact tool of the forming device. When it is judged that the width is less than the preset threshold, the next step of single-point incremental forming simulation analysis is performed; otherwise, a warning signal is generated; then, the forming force of the deformation zone and the tube wall thickness thinning amount in the single-point incremental forming with different contact starting points are obtained at different completion ratios. The energy value analysis is performed based on the equivalent stress distribution cloud map to ensure further processing based on the distribution of high energy values in the energy value. The specific judgment is: if the high energy value distribution exceeds the preset interval, a warning signal is generated; if the high energy value distribution is less than the preset interval, the simulation continues.

[0095] As an embodiment of the present invention, the width of the arc between the cross-section outer tube wall and the forming contact area is obtained as follows:

[0096] According to the relationship between the tube wall thickness change during the tube incremental forming process:

[0097]

[0098] Wall thickness reduction:

[0099]

[0100] because 、 If the value of is small, for:

[0101]

[0102] when hour:

[0103]

[0104] in, ;

[0105] The width of the arc between the outer tube wall of the cross section and the forming contact area is:

[0106]

[0107] in, is the change ratio of the pipe wall thickness; is the shaft rotation radius of the forming device; is the initial radius of the inner tube; is the shaft rotation angle of the forming device; is the inner tube axis rotation angle; is the initial tube wall thickness; is the tube wall thickness at the vertex of the arc; is the amount of thinning of the pipe wall; is the pipe wall thickness deviation value.

[0108] In the above technical solution, the contact area between the tube wall and the forming device tool is theoretically calculated to obtain the width of the arc of the outer tube wall of the cross section and the forming contact area, determine the deformation range of the tube wall during the forming process, and further determine the deformation area range of the forming device tool contact tool.

[0109] As an embodiment of the present invention, the calculation process of the ratio of the forming force in the deformation area and the thinning amount of the tube wall thickness in single-point incremental forming is as follows:

[0110]

[0111] in, is the single-point incremental forming proportional coefficient; is the ratio of the wall thickness reduction to the initial wall thickness; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The thickness reduction of the tube wall material at different contact starting points in the deformation zone.

[0112] As an embodiment of the present invention, the energy value of the equivalent stress distribution cloud map is obtained as follows:

[0113] Get the single point incremental forming scale coefficient Respectively in the set value 、 、 、 Equivalent stress distribution cloud diagram of the lower tube wall forming area; < < < ;

[0114] Based on the energy balance equation, the equivalent stress values in different grid cells are obtained, and the equivalent stress values are displayed in RGB color areas and color intervals;

[0115] Collect the RGB color area in each grid cell The mean red component of each pixel , green component mean and the mean of the blue component ;

[0116] according to 、 and The energy value interval of the deformation area is determined based on the change rules of the numerical value and color interval.

[0117] In the above technical solution, the energy balance equation is obtained using the meshed finite element analysis model:

[0118]

[0119] The total energy generated by the model is , the work done by the external force is , the internal energy generated by elastic and plastic strain is , the kinetic energy is , the energy absorbed by friction dissipation is , the energy absorbed by viscous dissipation is ;

[0120] First, obtain the single-point incremental forming proportional coefficient Respectively in the set value 、 、 、 Equivalent stress distribution cloud diagram of the lower tube wall forming area; < < < Then, the equivalent stress values in different grid cells are obtained according to the total energy setting in the model. The energy and equivalent stress results are linked. Generally, the greater the stress, the higher the energy. The energy can better reflect the difference in pipe wall changes. Therefore, the RGB color area and color interval are displayed according to the obtained equivalent stress value.

[0121] According to the collection of RGB color area in each grid unit (the area of the grid unit is determined) The mean red component of each pixel , green component mean and the mean of the blue component ; and according to 、 and The energy value interval of the deformation area is determined based on the change rules of the numerical value and color interval.

[0122] As an embodiment of the present invention, the distribution of high energy values in the grid cells is determined:

[0123] Statistical deformation area Red component in grid cells 、 、 , Green component in grid cells 、 、 , Blue component in grid cells 、 、 ;in, , , ∈ ;

[0124] Each color of the deformation area corresponds to 、 interval combination, and each color corresponds to an energy range;

[0125] according to 、 and The color interval combination of the numerical value determines the color distribution of the deformation area, and the combination in which the color distribution of the deformation area exceeds the interval is determined to be a high energy value.

[0126] In the above technical solution, when the values of the red component, green component and blue component of the color of the deformed area fall into the corresponding intervals respectively, since each color has a corresponding distribution set with an energy value interval range (generally, the redder the color, the higher the energy value of the area; the bluer the color, the lower the energy value of the area; green indicates that the energy value of the area is within the normal range), therefore, the state with the highest RGB color proportion can be obtained by combining the intervals, and then the corresponding energy range under the color can be obtained, that is, according to 、 and The interval combination of the numerical values determines the color of the meshed pipe wall deformation area, and the corresponding energy range is determined according to the color of the meshed pipe wall deformation area. Obviously, this embodiment can significantly improve the determination of the tolerance range of pipe wall quality detection through the energy color range by dividing the color component intervals and combining the intervals. Compared with the changes distinguished only by the color distribution area of the stress cloud map, it is more specific. Specifically, by judging that when the color in the detected pipe wall grid changes within the color difference range, the method in this embodiment can obtain the simulation of the energy range corresponding to its color change, thereby improving the accuracy of the material deformation simulation.

[0127] A production quality inspection system for stepped niobium target tubes, please refer to Figure 2 As shown; used to detect the production quality of stepped niobium target tubes, the system includes:

[0128] An image acquisition module is used to pre-set multiple contact starting points of the forming device according to forming conditions:

[0129] Acquire regional images corresponding to the contact starting point 11 of the first step tube wall 1, the contact starting point 21 of the second step tube wall 2, and the contact starting point 31 of the inner tube wall 3 of the historical step-type niobium target tube respectively;

[0130] The image analysis module is used to obtain the pipe wall stress distribution map corresponding to each regional image based on the forming control process of each historical contact starting point, and obtain the pipe wall thickness value and pipe wall stress value of the vertical section at the pipe orifice position where the regional image is located; the pipe wall stress value includes the pipe inner wall stress value and the pipe outer wall stress value;

[0131] The model simulation module is used to train the model based on the principle of incremental forming of metal tubes using the real-time initial tube wall thickness and initial tube wall stress values at different contact starting points, set the grid unit specifications, and perform single-point incremental forming simulation analysis on the inner and outer tube walls after the grid unit specifications are set;

[0132] The result detection module is used to judge the uniformity of the incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results and obtain the production quality detection results.

[0133] The various embodiments in this specification are described in a progressive manner. Similar portions between the various embodiments can be referenced to each other, and each embodiment focuses on the differences from the other embodiments. In particular, the device, apparatus, and non-volatile computer storage medium embodiments are generally similar to the method embodiments, so their descriptions are relatively simplified. For relevant details, refer to the descriptions of the method embodiments.

[0134] The foregoing description is of specific embodiments of this specification. Other embodiments are within the scope of the accompanying documents. In some cases, the actions or steps described in this application can be performed in an order different from that shown in the embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order shown or the sequential order to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0135] The above content is merely an example and explanation of the concept of the present invention. Those skilled in the art may make various modifications or additions to the described specific embodiments or replace them in a similar manner. As long as they do not deviate from the concept of the invention or exceed the scope defined in this application, they should all fall within the scope of protection of the present invention.

Claims

1. A production quality inspection method for a step-type niobium target tube, wherein the tube wall of the step-type niobium target tube comprises a step wall and an inner tube wall (3); the step wall comprises a first step tube wall (1) and a second step tube wall (2); the inner tube wall (3) comprises an inner tube outer wall (31) and an inner tube inner wall (32); characterized in that: The method comprises: S1. Pre-set multiple contact starting points of the forming device according to the forming conditions: Acquiring regional images corresponding to a first contact starting point (11) of a first step tube wall (1), a second contact starting point (21) of a second step tube wall (2), and a third contact starting point (33) of an inner tube wall (3) of a historical step-type niobium target tube; S2. Obtaining a pipe wall stress distribution map corresponding to each regional image based on the forming control process of each historical contact starting point, and obtaining a pipe wall thickness value and a pipe wall stress value at a vertical cross section of the pipe orifice where the regional image is located; the pipe wall stress value includes a pipe inner wall stress value and a pipe outer wall stress value; S3. Based on the incremental forming principle of metal tubes, a machine training model is performed on the real-time initial tube wall thickness values and initial tube wall stress values at different contact starting points, and grid unit specifications are set. After the grid unit specifications are set, single-point incremental forming simulation analysis is performed on the inner and outer tube walls; S4. Determine the uniformity of the incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results and obtain the production quality inspection results; The method further comprises: Accumulate multiple feeding forming to obtain pipe fittings that meet process requirements; count the cumulative forming times and the cumulative value of the forming radial distance and the cumulative value of the forming axial distance; The cumulative forming times, the cumulative values of the forming radial distance, and the cumulative values of the forming axial distance from historical statistics are input into the machine model as initial samples for learning, and a theoretical model of metal incremental forming is constructed; The real-time initial tube wall thickness values and initial tube wall stress values marked with different contact starting points are input into the metal incremental forming theoretical model to output the forming force and tube wall thickness reduction in the deformation area during single-point incremental forming of metal tubes.

2. The production quality inspection method of a stepped niobium target tube according to claim 1, characterized in that: The metal tube incremental forming principle includes: Based on the forming device, a first feeding forming extrusion is performed at a designated contact starting point with a set radial feed speed and an axial feed speed to obtain a forming radial distance and a forming axial distance; The forming radial distance includes the inner tube forming incremental radius and the outer tube forming incremental radius; the inner tube forming incremental radius is the distance from the inner vertex to the axis minus the inner tube initial radius; the outer tube forming incremental radius is the distance from the outer vertex to the axis minus the inner tube initial radius and the tube wall thickness. The forming axial distance is the distance of the axial deformation area; and based on the first feed forming extrusion, the second feed is performed along the spiral trajectory to form the tube wall, completing the tube incremental forming process.

3. The production quality inspection method of a stepped niobium target tube according to claim 1, characterized in that: Said S3 includes: S31, obtaining the width of the arc of the contact area between the outer tube wall of the cross section and the forming area. If the width is less than a preset threshold, performing the single-point incremental forming simulation analysis of step S32; otherwise, generating a warning signal; S32, obtaining the forming force in the deformation zone and the equivalent stress distribution cloud diagram of the tube wall thickness reduction at different completion ratios in the single-point incremental forming with different contact starting points; S33. Collect the energy value of the equivalent stress distribution cloud map and determine the distribution of high energy values within the grid cells: If the distribution of high energy values exceeds the preset interval, an early warning signal is generated; If the high energy value distribution is less than the preset interval, the simulation will continue.

4. The production quality inspection method of a stepped niobium target tube according to claim 3, characterized in that: The width of the arc between the outer tube wall of the cross section and the forming contact area is obtained as follows: According to the relationship between the tube wall thickness change during the tube incremental forming process: Wall thickness reduction: because 、 If the value of is small, for: when hour: in, ; The width of the arc between the outer tube wall of the cross section and the forming contact area is: in, is the change ratio of the pipe wall thickness; is the shaft rotation radius of the forming device; is the initial radius of the inner tube; is the shaft rotation angle of the forming device; is the inner tube axis rotation angle; is the initial tube wall thickness; is the tube wall thickness at the vertex of the arc; is the amount of thinning of the pipe wall; is the pipe wall thickness deviation value.

5. The production quality inspection method of a stepped niobium target tube according to claim 4, characterized in that: The calculation process of the ratio of forming force in the deformation area and tube wall thickness reduction in single point incremental forming is as follows: in, is the single-point incremental forming proportional coefficient; is the ratio of the wall thickness reduction to the initial wall thickness; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The three-dimensional force components on the contact surface between the pipe wall and the tool wheel are directional force; The thickness reduction of the tube wall material at different contact starting points in the deformation zone.

6. The production quality inspection method of a stepped niobium target tube according to claim 5, characterized in that: The energy value of the equivalent stress distribution cloud map is obtained as follows: Get the single point incremental forming scale coefficient Respectively in the set value 、 、 、 Equivalent stress distribution cloud diagram of the lower tube wall forming area; < < < ; Based on the energy balance equation, the equivalent stress values in different grid cells are obtained, and the equivalent stress values are displayed in RGB color areas and color intervals; Collect the RGB color area in each grid cell The mean red component of each pixel , green component mean and the mean of the blue component ; according to 、 and The energy value interval of the deformation area is determined based on the change rules of the numerical value and color interval.

7. The production quality inspection method of a stepped niobium target tube according to claim 6, characterized in that: The distribution of high energy values in the judgment grid unit: Statistical deformation area Red component in grid cells 、 、 , Green component in grid cells 、 、 , Blue component in grid cells 、 、 ;in, , , ∈ ; Each color of the deformation area corresponds to 、 interval combination, and each color corresponds to an energy range; according to 、 and The color interval combination of the numerical value determines the color distribution of the deformation area, and the combination in which the color distribution of the deformation area exceeds the interval is determined to be a high energy value.

8. A production quality inspection system for a stepped niobium target tube, characterized in that: A method for detecting the production quality of a stepped niobium target tube according to any one of claims 1 to 7, the system comprising: An image acquisition module is used to pre-set multiple contact starting points of the forming device according to forming conditions: Acquiring regional images corresponding to a first contact starting point (11) of a first step tube wall (1), a second contact starting point (21) of a second step tube wall (2), and a third contact starting point (33) of an inner tube wall (3) of a historical step-type niobium target tube; An image analysis module is used to obtain a pipe wall stress distribution map corresponding to each regional image based on the forming control process of each historical contact starting point, and obtain the pipe wall thickness value and pipe wall stress value of the vertical section at the pipe orifice position where the regional image is located; the pipe wall stress value includes the pipe inner wall stress value and the pipe outer wall stress value; The model simulation module is used to train the model based on the principle of incremental forming of metal tubes using the real-time initial tube wall thickness and initial tube wall stress values at different contact starting points, set the grid unit specifications, and perform single-point incremental forming simulation analysis on the inner and outer tube walls after the grid unit specifications are set; The result detection module is used to judge the uniformity of the incremental changes of the inner and outer tube walls based on the single-point incremental forming simulation analysis results and obtain the production quality detection results.

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